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Requirements Specification Document (RSD)
Small aperture deformable mirrors
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Table of Content
1. Introduction ...................................................................................................... 3
1.1. Short description of the subject ...................................................................... 3
1.1.1. Scheme of laser L1 beamlines with two small aperture DM (Figure 1). ........... 3
1.2. Terms, Definitions and Abbreviations .............................................................. 3
1.3. References and Applicable Documents ............................................................ 4
1.4. Description of the product ............................................................................. 4
1.4.1. Description of the full system (Figure 2) .................................................... 5
2. Functional and Performance requirements ............................................................. 5
2.1. Laser beam properties; DM properties ............................................................ 5
2.2. Optomechanics; interface; Mount ................................................................... 7
2.2.1. Power supply.......................................................................................... 7
2.2.2. Tip-tilt mount actuators ........................................................................... 8
2.2.3. Controllers / Drivers for deformable mirror and for the motorized tip-tilt mount
..................................................................................................................... 8
2.2.4. Cables for the DM ................................................................................... 9
2.2.5. Cables for the tip/tilt actuators ................................................................. 9
2.3. Software / documentation ............................................................................. 9
2.3.1.
2.3.2.
2.3.3.
2.3.4.
Software for close loop operation with a wavefront sensor ........................... 9
Software type and operating system ........................................................ 10
Software capabilities .............................................................................. 10
Documents ........................................................................................... 10
2.4. Delivery – training – maintenance ................................................................. 11
3. General Safety Requirements ............................................................................. 11
4. Quality Requirements ........................................................................................ 12
4.1. Quality Management .................................................................................... 12
4.1.1. Quality organization and responsibilities ................................................... 12
4.1.2. Quality plan and its implementation ......................................................... 13
4.1.3. Documentation and data control .............................................................. 13
5. Verification Requirements .................................................................................. 14
5.1.
5.2.
5.3.
5.4.
5.5.
5.6.
5.7.
General requirements .................................................................................. 14
Review ....................................................................................................... 14
Inspection .................................................................................................. 15
Test ........................................................................................................... 15
Functional Demonstration ............................................................................. 16
Analysis ..................................................................................................... 16
Verification Control Document (VCD) ............................................................. 17
6. ANNEXES ......................................................................................................... 18
6.1. Schematic of the available volume for the full system (Figure 3) ....................... 18
6.2. Schematic of the base plate (Figure 4) ........................................................... 18
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1. Introduction
1.1. Short description of the subject
The wavefront is one of the key parameters for the performance of a high power laser
facility. In the ELI-Beamlines project, the wavefront will be controlled with adaptive
optics loops consisting of deformable mirror, wavefront sensor and software for running
the adaptive optics loop.
The spatial profile of the laser beam is a Gaussian shape with diameter at 1/e2
between 50 and 75 mm.
This document gives the technical specifications for the two deformable mirrors used
with the laser beamline named L1. L1 is split into two main beams and two auxiliary
beams. The two deformable mirrors will be located before focusing each main beam onto
the target area located in the Experimental Room 1.
1.1.1. Scheme of laser L1 beamlines with two small
aperture DM (Figure 1).
Figure 1: Laser L1 beamlines. DM1 and DM2 are the two small aperture deformable
mirrors described in this document.
1.2. Terms, Definitions and Abbreviations
For the purposes of this document, the terms and definitions from ECSS-S-ST-00-01
apply (AD -001). For the purpose of this document, the following abbreviated terms
apply:
Abbreviation
Meaning
ELI
Extreme Light Infrastructure
DM
Deformable Mirror
E1
Experimental area 1
RMS
Root Mean Square
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PtV
Peak to Valley
FWHM
Full width at half maximum
mJ
10-3 Joule
nm
Nano meter
L1
Laser 1 (1 kHz, 100 mJ)
RSD
Requirement Specification Document
R
Review of design
T
Test
I
Inspection
LxWxH
Length x width x height
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1.3. References and Applicable Documents
Applicable documents – ECSS standards (http://www.ecss.nl/)
Number of
document
AD-01
AD-02
Title of document
ECSS-S-ST-00-01 Glossary of Terms
ECSS-E-ST-10-06C Technical Requirements Specification
1.4. Description of the product
In order to be properly integrated in ELI-Beamlines facility, these two deformable
mirrors are part of a more complete system as shown in figure 2. The vacuum chamber
and the rack have not to be furnished by the supplier. For each deformable mirror, the
complete system as expected and as delivered is composed of:










a deformable mirror to improve the wavefront quality;
a motorized tip-tilt Gimbal mount to align the deformable mirror;
a riser block to locate the Deformable mirror at the correct height;
a base plate to fix the deformable mirror on an optical table;
the vacuum compliant cables located inside the vacuum chamber;
the cables to connect the vacuum chamber to the controller, power supply;
the controller for the deformable mirror;
the controller/driver for the motorized Gimbal mount;
Ethernet cables to connect the controllers to the control system of the facility;
A Software to control the deformable mirror from the ELI control system.
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1.4.1. Description of the full system (Figure 2)
Figure 2: Description of the full system: Deformable mirror; motorized mirror mount;
riser block; base plate; cables; power supply and controller.
2. Functional and Performance requirements
REQ-006323/A
The number of devices must be 2.
Verification method: I - inspection
2.1. Laser beam properties; DM properties
REQ-006324/A
Minimum clear aperture diameter must be 85 mm.
Verification method: T - test
REQ-006325/A
Minimum number of electrodes/actuators must be not less than 37. Or
equivalent for a different technology
Verification method: T - test
REQ-006326/A
Central wavelength must be 850 nm ± 20 nm.
Verification method: T - test
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REQ-006327/A
Wavelength range (bandwidth) FWHM must be 800 - 900 nm.
Verification method: T - test
REQ-006328/A
Coating – LIDT must be 0.1 J/cm2 (20fs pulse at 1kHZ).
Verification method: T - test
REQ-006329/A
Reflectance must be more than 99 % over the bandwidth for both s and
p polarization.
Verification method: T - test
REQ-006330/A
Angle of incidence of the beam must be less than 15 degrees.
Verification method: T - test
REQ-006331/A
Group delay dispersion (|GDD|) must be less than 50 fs2 for all the
bandwidth.
Verification method: T - test
REQ-006333/A
Dynamic range, stroke (peak to valley) must be more than 10λ at
850nm over the full clear aperture.
Verification method: T - test
REQ-006334/A
Actuator footprint (rms value) must be less than 20 nm.
Verification method: T - test
REQ-006335/A
Cosmetic quality per MIL-PRF-13830A must be 20-10 scratch-dig.
Verification method: T - test
REQ-006336/A
Surface roughness (rms value) must be less than 5 nm.
Verification method: T - test
REQ-006337/A
The device must be without active cooling system (see REQ-006338/A).
Note: The device will be used under vacuum.
Verification method: FD - functional demonstration
REQ-006338/A
All system (def. mirror + motorized tip/tilt mount) must be capable to
work in vacuum environment (10-6 mbar).
Verification method: FD - functional demonstration
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REQ-006339/A
Close loop processing frequency must be not less than 1Hz.
Verification method: FD - functional demonstration
REQ-006340/A
Open/close loop stability must be less than 5 nm after 1 hour.
Verification method: FD - functional demonstration
REQ-006341/A
Residual slope Root Mean Square must be equal 1 µrad.
Verification method: T - test
2.2. Optomechanics; interface; Mount
REQ-006342/A
The full system includes the deformable mirror and the motorized mount
shall fit inside a box with dimension 300x300x300mm3 (length, width,
height).
Verification method: T - test
REQ-006347/A
Deformable mirror mount must be Aluminum.
Verification method: I - inspection
REQ-006348/A
Optical axis of the deformable mirror must be located at 180mm from
the optical table.
Verification method: T - test
REQ-006354/A
Mechanical fixation to the optical table must be based as described in
figure 4.
Verification method: I - inspection
REQ-006345/A
The supplier provides the sockets/connectors which will be used for the
fabrication of the feedtrough.
Verification method: I - inspection
2.2.1. Power supply
REQ-006343/A
The System must be capable to work with power supply 230V / 50Hz
AC.
Verification method: I - inspection
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REQ-006344/A
System must be designed according the valid Czech and European
norms.
Note: The connector IEC 60320 C14 is preferred. European plug-in for
230V AC type E is also possible.
Verification method: I - inspection
2.2.2. Tip-tilt mount actuators
REQ-006349/A
System must be with tip-tilt mount actuators and shall fit a Gimbal
mount with motorized actuators.
Verification method: I - inspection
REQ-006350/A
Tip-tilt mount actuators must be in the travel range from minimum ±1
mrad to maximum ±5 mrad.
Verification method: T - test
REQ-006351/A
Tip-tilt mount actuators must have ±0.5 µrad angular resolution.
Verification method: T - test
REQ-006352/A
Tip-tilt mount actuators must be vacuum compatible.
Verification method: T - test
REQ-006353/A
Tip-tilt mount actuators must not introduce extra heating.
Verification method: T - test
2.2.3. Controllers / Drivers for deformable mirror
and for the motorized tip-tilt mount
REQ-006389/A
Controllers / Drivers for deformable mirror and for the motorized tip-tilt
mount must fit inside a rack of width 19’’ and with a maximum depth of
650mm.
Verification method: T - test
REQ-006390/A
Controllers / Drivers for deformable mirror and for the motorized tip-tilt
mount must be connected to the PC/Control system via Ethernet RJ45.
Verification method: I - inspection
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2.2.4. Cables for the DM
REQ-006391/A
Cables length for the DM must be 50 cm.
Note: Suitable for use in vacuum chamber with L1 beamline.
Verification method: T - test
REQ-006392/A
Cables length for the DM must be not less than 15 m to connect the
vacuum chamber interface to the controller inside the rack.
Verification method: T - test
2.2.5. Cables for the tip/tilt actuators
REQ-006393/A
Cables length for the tip/tilt actuators must be 50cm.
Note: Suitable for use in vacuum.
Verification method: T - test
REQ-006394/A
Cables length for the tip/tilt actuators must be not less than 15 m to
connect the vacuum chamber interface to the rack.
Verification method: T - test
2.3. Software / documentation
2.3.1. Software for close loop operation with a
wavefront sensor
REQ-006361/A
The supplier must provide the software for close loop operation with a
wavefront sensor (the wavefront sensor is not part of the delivery).
Verification method: FD - functional demonstration
REQ-006362/A
The supplier must provide software for close loop operation with a
wavefront sensor for operating with both Shark-Hartmann type and
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quadriwave lateral shearing interferometry type wavefront sensor
technology (the wavefront sensors are not part of the delivery).
Verification method: FD - functional demonstration
2.3.2. Software type and operating system
REQ-006363/A
Software for operating the DM must run on an operating system.
Note:
Priority 1 - Windows package.
 Windows executable and access to basic functions through a
command line.
Priority 2 - Windows package.
 Providing drivers and Software Development Kit.
Priority 3 - Linux package.
 Linux library and access to basic functions through a command
line.
Priority 4 - Linux package.
 Providing drivers and Software Development Kit.
Verification method: FD - functional demonstration
2.3.3. Software capabilities
REQ-006367/A
Software must be capable to provide access to device statuses.
Verification method: FD - functional demonstration
REQ-006368/A
Software must provide possibility of calling basic functions that allows
basic access and data extraction.
Verification method: FD - functional demonstration
REQ-006369/A
Software must be capable to provide access and transfer to raw data
files.
Verification method: FD - functional demonstration
2.3.4. Documents
REQ-006370/A
Supplier must provide reference manual.
Verification method: I - inspection
REQ-006371/A
Supplier must provide users guide.
Verification method: I - inspection
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REQ-006372/A
Supplier must provide documents in paper and/or in electronic format.
Verification method: I - inspection
2.4. Delivery – training – maintenance
REQ-006373/A
Delivery must be performed at ELI-Beamlines in Prague.
Verification method: I - inspection
REQ-006638/A
All delivery items must be compatibles with clean room ISO7 and
vacuum.
Verification method: I - inspection
REQ-006374/A
Measurements must be performed in ELI-Beamlines laboratory with both
types of wavefront sensor: Shark Hartmann type and quadriwave lateral
shearing interferometry.
Verification method: T - test
REQ-006639/A
Optical quality will be measured with our Zygo Dynafiz Fizeau
interferometer.
Verification method: T - test
REQ-006375/A
Supplier must perform a system installation and training on site.
Verification method: I - inspection
3. General Safety Requirements
REQ-006833/A
System or its relevant components shall comply with all applicable EU
and Czech legislative requirements and where applicable shall have CE
marking and Certificate of Compliance.
Verification method: R - review
REQ-006834/A
Supplier shall perform hazard identification and risk assessment of
system prior to design.
Verification method: R - review
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REQ-006835/A
System shall be delivered with operational manual and technical
documentation where supplied specifies modes of operation, conditions
for safe operation, and maintenance of system.
Verification method: R - review
4. Quality Requirements
4.1. Quality Management
4.1.1. Quality organization and responsibilities
4.1.1.1. Organization
REQ-007070/A
The supplier shall identify the personnel responsible for implementing
and performing QA management plan and other Quality Controls
disciplines.
Verification method: R - review
REQ-007071/A
The supplier shall assign a project Quality manager reporting to the
project manager who has an unimpeded access to higher management.
Verification method: R - review
REQ-007072/A
The appointed project Quality manager, irrespective of other
responsibilities, shall have organizational authority to establish and
implement a product assurance programme in accordance with the
project quality assurance requirements.
Verification method: R - review
REQ-007073/A
The project Quality Manager shall act as the primary contact person
within the project concerning Quality matters.
Verification method: R - review
4.1.1.2. Responsibility and authority
REQ-007074/A
The supplier shall define and document the responsibility, the authority
and the interrelation of personnel who manage, perform and verify work
affecting product assurance.
Verification method: R - review
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REQ-007075/A
The supplier shall define and document the responsibilities and the
interfaces of the Quality functions, either external or internal, involved in
a project.
Verification method: R - review
REQ-007076/A
When the supplier’s Quality organization delegates quality assurance
tasks to another organization it shall be done in a documented and
controlled way monitored by the Quality organization.
Verification method: R - review
4.1.2. Quality plan and its implementation
REQ-007077/A
The supplier shall prepare, maintain and implement a plan of the QA
activities in accordance with the customer QA requirements.
Verification method: R - review
REQ-007078/A
The supplier QA management shall ensure the application of processes
defined in applicable project plans and documents.
Verification method: R - review
4.1.3. Documentation and data control
4.1.3.1. Documentation
REQ-007079/A
The supplier shall supply the following relevant manufacturing
documents (extent as stipulated in contract): Operating manual
(including step-by-step aligning procedure), maintenance manual,
breakdown list as built, Declarations of Conformity and relevant CE
markings where required by EU legislation.
Verification method: R - review
REQ-007080/A
The supplier shall supply certificate of compliance of furnished pieces
with design and manufacturing documentation.
Verification method: R - review
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4.1.3.2. Formats for data exchange
REQ-007081/A
Documentation shall be supplied in all following formats: hardcopy and
PDF/A.
Verification method: I - inspection
REQ-007082/A
The supplier shall provide following type of documents:
 3D model (if available)
 2D drawings
 Printable format for text documents
Verification method: I - inspection
REQ-007083/A
The Supplier shall use following data formats.
 *.JPG
 *.PDF/A
 CAD 2D: *.dwg
 CAD 3D: STEP type files (*.stp;*.ste;*.step)
 text processors *.doc, *.docx, OpenDocument Format
 spreadsheet processors *.xls, *.xlsx, OpenDocument Format
 presentations *.ppt, *.pptx; OpenDocument Format
 *.HTML
Verification method: I - inspection
5. Verification Requirements
5.1. General requirements
REQ-006815/A
Verification process (acceptance) of deliverables shall be performed
according to contract statements defined in corresponding chapter
(verification/acceptance).
Verification method: R - review
5.2. Review
Verification by Review (R) shall consist in using approved records or evidence that
unambiguously shows that the requirement is met.
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NOTE Examples of such approved records are design documents and reports, technical
descriptions, and engineering drawings, manuals and accompanying operation
documentation.
REQ-006816/A
The list of accomplished requirements and the list of unaccomplished
and incomplete requirements shall be made.
Verification method: R - review
REQ-006817/A
The results of review shall be documented in approved record.
Verification method: R - review
5.3. Inspection
Verification by
characteristics.
Inspection
(I)
shall
consist
of
visual
determination
of
physical
NOTE Physical characteristics include constructional features, hardware conformance to
document drawing or workmanship requirements, physical conditions, software source
code conformance with coding standards.
REQ-006818/A
The list of accomplished requirements and their physical location and
presence, and the list of unaccomplished and incomplete requirements
shall be made.
Verification method: R - review
REQ-006819/A
The results of inspection shall be documented in approved record.
Verification method: R - review
5.4. Test
Verification via Test (T) shall be performed to test a measurable parameter.
REQ-006820/A
The protocol of the measurement shall be made and approved.
Verification method: R - review
REQ-006821/A
The list of accomplished requirements with the note of measured value
and the list of unaccomplished and incomplete requirement shall be
made.
Verification method: R - review
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REQ-006822/A
The test plan shall be defined including all requirements where is applied
test as the verification method.
Verification method: R - review
REQ-006823/A
Test plan shall be approved by the Customer.
Verification method: R - review
5.5. Functional Demonstration
Verification via Functional demonstration (FD) shall be performed to test the system’s
response to a subject of requirement and check if its response is within the limits of the
requirement.
REQ-006824/A
Verification programme by Functional demonstration shall be a part of
the Test Plan (see chapter Test).
Verification method: R - review
REQ-006825/A
The protocol of functional demonstration shall be made and approved.
Verification method: R - review
REQ-006826/A
The list of accomplished requirements and the list of unaccomplished
and incomplete requirements shall be made.
Verification method: R - review
5.6. Analysis
REQ-006869/A
Verification by analysis shall consist of performing theoretical or
empirical evaluation using techniques agreed with the Customer.
NOTE Techniques comprise systematic, statistical and qualitative design
analysis, modelling and computational simulation.
Verification method: R - review
REQ-006870/A
Verification by similarity shall be part of the verification by analysis.
Verification method: R - review
REQ-006871/A
Similarity analysis shall define
complementary verification activities.
Verification method: R - review
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differences
that
can
dictate
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5.7. Verification Control Document (VCD)
The Verification Control Document lists the requirements to be verified with the use of
selected methods at the defined levels. The VCD is a living document and provides
traceability during the phases of a contract realization how and when each requirement is
planned to be verified and is actually verified.
REQ-006827/A
The content of the completed Verification Control Document (VCD) shall
be agreed by the Customer and the Supplier.
Verification method: R - review
REQ-006828/A
The final issue of the Verification Control Document (VCD) shall be
submitted to the Verification Control Board (Acceptance Board) after the
approval of the last report, within the time frame agreed with the
customer.
Verification method: R - review
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6. ANNEXES
6.1. Schematic of the available volume for the full
system (Figure 3)
Figure 3 Maximum dimensions of the full system and height of the optical axis from the
top of an optical breadboard.
6.2. Schematic of the base plate (Figure 4)
Figure 4: Base plate description.
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