Supplementary Materials 3:
Optical characteristics for Pyramidal Probe with elliptic groove patterns
[1] Optical transmittances at 532 nm and 780 nm wavelength
A SEM image for an aperture with a 95 nm diameter surrounded with elliptically patterned grooves is shown in
(a). The depth, width, and pitch are 100 nm, 100 nm, and 250 nm, respectively (a). Enhanced transmittance with
a 103 fold increase after patterning 5 elliptical groove is shown in (b). The open circles indicate the
transmittances through the nano-aperture before fabricating the elliptical groove patterns. The closed red circles
indicate the enhanced optical transmittances. Transmittances for input wavelengths of 532 nm and 780 nm were
presented (c). Optical characterizations at 532 nm and 780 nm in (c) were also performed several months later after the
optical measurements of (a). Slight increases in transmittance at 532 nm are presented and can be attributed to the reduced
diameters of the apertures by ~ 10 nm due to Au migration under room temperature environments.
Transmittances for 780 nm input wavelength are higher than those for 532 nm input wavelength. These
experimental results can be attributed to higher overlapping of the photonic modes into localized surface plasmon
modes in the groove for 780 nm than for 532 nm.24, 25.
[2] Optical measurements using optical microscope with spectrophotometer
Halogen lamp with (400 nm ~ 800 nm) wavelength
Table: Lists of 3 drilled apertures and 2 drilled grooves
Sample Number
Up21
Up22
Up23
Up24
Up25
Up26
Hole Diameter (nm)
129
124
0
0
116
0
Elliptic Groove
depth (nm)
0
0
25
25
0
10
visibility
No
No
Yes
Yes
No
Yes
● Optical images of transmitted optical beams were taken with installed camera shots >
●Optical Spectrum in the visible range by Nikon Eclipse + Princeton Acton 100
spectrophotometer
Output profiles with two resonant peaks are shown from the pyramidal probe with grooves and hole
on the pyramidal apex (left), and with grooves only without hole on the pyramidal apex (right).
Two resonant peaks at 555 nm and 678 nm due to resonant transmission via coupling of
photonic modes of the input Gaussian beam with local surface plasmon modes in the groove
cavity.
● A reduced input Gaussian beam profile (x10-3) is provided (bottom, right).The peak
position of the input Gaussian profile from standard control (17 m x 17 m) aperture
is ~ 675 nm. The shift of the peak position to 615 nm is also shown (up, right).
Figure 2. Input Gaussian Profile Intensity
through (17 m x 17 m) aperture
Figure 3. Output profile and input Gaussian
profile from (17 m x 17 m) aperture are shown.
We examined the optical characteristics of pyramidal nano-probes surrounded with elliptical periodic patterns
using optical microscope equipped with a spectrophotometer (Nikon Optical Eclipse Ti-U Microscope +
Princeton Instruments Acton SpectroPro 2300 i).
First, three nanoholes with 129 nm, 124 nm, and 119 nm diameters were fabricated on the samples of Up21, Up
22, Up 25, respectively.
Three pyramids of Up 23, Up 24, and Up 26 were fabricated with 5 periodic elliptic
groove patterns with 25 nm, 25 nm, and 10 nm depth. The drilling conditions for 10 nm and 25 nm depth were
calibrated using atomic force microscopy (PSIA 100). First, drilling on the Au flat plane for 10 nm and 25 nm
was carried out and characterized with AFM. Then, we adjust the exposure time and beam currents of ion beam
and drilled on the pyramids.
[3] Calibration Process of drilled groove depth using Atomic force microscopy (PSI AFM 100)
Depth (D) = 18.4  1.6 nm
Width (W) = 186.2  14.5 nm
Interval (I) = 119.8  20.2 nm
Average of 20 line profiles
Scale size: (1 x 1) m2
AFM images of 4 different depth, width, and pitch of periodic grooves on the flat plane.
Drilling conditions are varied to find out optimal conditions for desired depth