Supplementary Materials
Controllable film densification and interface flatness for
high-performance amorphous indium oxide based thin film transistors
Wei Ou-Yang, Nobuhiko Mitoma, Takio Kizu, Xu Gao, Meng-Fang Lin, Toshihide
Nabatame, and Kazuhito Tsukagoshi
Figure S1 shows the XRR patterns of the ISWO thin films pre-annealed at various
temperatures.
10
6
Reflection Intensity (cps)
quartz glass
10
5
o
200 C
o
300 C
10
10
10
o
400 C
4
3
2
0.5
1.0
1.5
2.0
2.5
Incident Angle,  (degree)
Figure S1. Logarithmic reflection intensity of ISWO thin films pre-annealed at
various temperatures with respect to the incident angle.
To further quantitatively discuss the change in ISWO films under the effect of
different pre-annealing temperatures, we used the free software of “Parratt 32” based
on the recursive Parratt formalism to fit the XRR results of these films. Figure S2
shows the fitting results for XRR curves of ISWO thin films pre-annealed at 300 and
400 oC, where the oscillation parts can be properly fitted. The film thicknesses of 62
and 60 nm are obtained for the films pre-annealed at 300 and 400 oC, respectively, as
shown in Table S2, which are very close to the calculated values using the Kiessig
fringe periods. Corresponding with the decreased film thickness as the pre-annealing
temperature increase, the film density becomes larger represented the increased
scattering length density (SLD) given in the table. In addition, we see the greatly
decreased interface roughness at higher temperature reflected from the larger
oscillation amplitude. All these fitted data corresponds well with the discussion in the
main text.
fitting results:
400oC:
film: d=600Å, rho=2.1e-5, Im(rho)=4.5
bulk(quartz):
1.89e-5;
2.44
Reflection Intensity (arb. unit)
3.0
2.5
300oC:
film: d=620Å, rho=2.0e-5, Im(rho)=4.2
bulk(quartz):
1.89e-5;
2.44
2.0
o
400 C
1.5
1.0
o
300 C
0.5
0.0
1.5
2.0
Incident Angle,  (degree)
Figure S2. XRR results with oscillation parts of ISWO films pre-annealed at 300 and 400
o
C fitted with the free software of Parratt 32 (available on the website of
“http://parratt32.software.informer.com/1.6/”). The red and black curves are fitted results.
Table S2. Fitted parameters for the ISWO films pre-annealed at 300 and 400 oC in
Figure S2. The real part and imaginary part of scattering length density (Re(SLD) and
Im(SLD)) are proportional to the film physical density.
Temperature
(oC)
Layer thickness
(Å)
Re(SLD)
(×106 Å-2)
Im(SLD)
(×106 Å-2)
Interface RMS
(Å)
300
620
20
0.42
6.0
400
600
21
0.45
3.0