Supplementary information Schottky Barrier Contrasts in Single and Bi-layer Graphene Contacts for MoS2 Field Effect Transistors Hyewon Du,1 Taekwang Kim,1 Somyeong Shin,1 Dahye Kim,1 Hakseong Kim,2 Ji Ho Sung,3,4 Myoung Jae Lee,3 David H. Seo,5 Sang Wook Lee,2 Moon-Ho Jo3,4 and Sunae Seo1* 1Department 2Divison of Physics, Sejong University, Seoul, 143-747, Korea of Quantum Phases & Devices, Department of Physics, Konkuk University, Seoul, 143-701, Korea 3Center for Artificial Low-Dimensional Electronic Systems, Institute for Basic Science (IBS), 77 Cheongam-Ro, Pohang 790-784, Korea 4Division of Advanced Materials Science, Pohang University of Science and Technology (POSTECH), 77 Cheongam-Ro, Pohang 790-784, Korea 5Samsung Electronics Company, Limited, System LSI Division, TD Team, Gyunggi 446-711, Korea E- mail: sunaeseo@sejong.ac.kr S1. Experimental methods FIG. S1. Schematic illustration of the mechanical transfer process of MoS 2/Graphene heterostructure device. We prepared MoS2 and graphene flakes on SiO2 (300 nm)/Si substrate using mechanical exfoliation method. For stacking MoS2 and graphene, a mechanical transfer process was used as illustrated in Fig. S1. MoS2 was 1 transferred onto the prepared graphene to prevent folding or tear of graphene during fabrication process. After the formation of heterojunction, source-drain electrodes of Au (100 nm)/Ti (10 nm) were constructed by E-beam lithography, followed by a Lift-off process. 20k 4 A1g E2g 10k 1M1G 4M1G 4M2G I2D/IG Intensity (counts) S2. Layer thickness analyzations by Raman and AFM (a) MoS2 (b) 2D 5 3 2 5 4 3 2 1 0 2D 1M1G G 4M1G 1000 2000 3000 4M2G 1 0 0 380 400 420 -1 2600 Raman shift (cm ) 2650 2700 2750 -1 Raman shift (cm ) (c) (d) FIG. S2. Raman spectra of (a) MoS2 and (b) enlarged 2D mode of graphene. The AFM images of MoS2 flake in 1M-SG (c) and 4M-SG (d). Fig. S2(a) shows frequency difference between single (1M) and 4-layer MoS2 (4M). The frequency differences in 1M and 4M are 18.9 cm-1 and 20.7 cm-1. We could confirm graphene thickness by the normalized intensity of 2D peak by G peak intensity with an intensity ratio of I2D/IG ~5.3 (~3.6) on 1M-SG (4M-SG) as shown in Fig. S2(b). In bi-layer graphene (4M-BG), it consists of 4 components; 2D1B, 2D1A, 2D2A and 2D2B. For the direct thickness analyzation of 1M (1M-SG) and 4M (4M-SG), we measured thickness using Atomic force microscope (AFM). As shown in inset data of Fig. S2(c-d), we obtained MoS2 thicknesses used in 1M-SG and 4M-SG are 0.7nm and 2.7 nm, respectively. (Single-layer MoS2 has 0.65nm thick.) 2 S3. Raman spectra in MoS2/Graphene junction 3 2 4M2G 1 A1g 0 4M1G 400 420 -1 Raman shift (cm ) 4M1G 4 1 1M1G 2 0 380 4M2G 8 6 2 4M1G (c) 2D mode Counts (a.u) 4M2G E2g 1M1G 10 (b) G mode Counts (a.u) Counts (a.u) 3 (a) MoS2 1M1G 0 2600 1560 1580 1600 -1 Raman shift (cm ) 2700 2800 Raman shift (cm-1) FIG. S3. Raman spectra of (a) MoS2 (b) Graphene (c, d) enlarged G, 2D mode of graphene. The soid lines and dotted lines represent only MoS2 or only graphene area and MoS2/graphene overraid area. Fig. S3(a) shows Raman shift of MoS2 modes for MoS2-only (solid line) and MoS2/graphene (dotted line) region. The two first-order MoS2 Raman active modes exist at 385 ±5 cm-1 (E2g) from the in-plane electron-electron interaction and 405 ±5 cm-1 (A1g) from the out-of-plane van der Waals (VDW) interaction. The blue shift of A1g peak was considered as p-doping (less n-doping) or interlayer VDW interaction between MoS2 and graphene. The raised up-shift of A1g peak could be originated from increased charge transfer from MoS2 to graphene or from the increased interlayer VDW interaction. For intrinsic graphene, two Raman active modes are in-plane vibration ones, G (E2g) at 1584 cm-1 and 2D (A1g) at 2690 cm-1 on SiO2/Si substrate. We could confirm graphene thickness by the normalized intensity of 2D peak by G peak intensity with an intensity ratio of I2D/IG ~5.3 (~3.6) on 1M-SG (4M-SG) as shown in Fig. S3(b). To compare the details of Raman spectra of MoS2/graphene with graphene-only area, both G and 2D mode are enlarged and plotted at Figs. S3(c) and S3(d) with y-axis offset for clear view. Raman spectra of graphene covered with MoS2 can be illustrated using charge carrier doping or compressive stress. G peak is sensitive to carrier doping. It stiffens and narrows with carrier concentration regardless of hole and electron. Although 2D peak softens for hole and stiffens for electron doping but its intensity reduction is dominant with carrier concentration. On the other hand, the compressive stress can also generate blue shift of the G and 2D mode but induce larger 2D shift than G. 3 S4. Photocurrent FIG. S4. (a) Schematic illustration of the experimental setup for photocurrent imaging with a diffractionlimited resolution. Photocurrent mapping images in (b) 1M-SG (c) 4M-SG (d) 4M-BG. The red, white and blue line denote the edge of Au/Ti, MoS2 flake and graphene flake, respectively. We measured Photocurrent at zero bias with 4 W low incident power and a 532 nm wavelength laser in ambient air. Fig. S4(a) shows a schematic illustration of the experimental setup for photocurrent imaging. A focused beam was scanned over a device while the electrical signal from the device is measured as a function of the position of laser spot to construct a spatial image with a diffraction-limited resolution. The representative Photocurrent images are plotted in Figs. S4(b)-S4(d). The overlaid lines, based on reflectance and optical microscopy image, display the boundary of the materials at the Photocurrent images. With illumination along the contacts, photocurrent shows opposite polarity of the signal. Photo-generated electrons flow into MoS2 from contact. The opposite signs of the PC signal at the source/drain contact can be explained by Photovoltaic effect (PVE) at each Schottky barrier or Photothermoelectric effect (PTE). The zero bias data are not sufficient to discuss the photocurrent mechanism by PVE and PTE but at least it indicates possible formation of Schottky barrier. 4