Quantitative x-ray phase imaging at the nanoscale by multilayer Laue lenses
Hanfei Yan1,*, Yong S. Chu1, Jörg Maser2,3, Evgeny Nararetski1, Jungdae Kim1,†, Hyon Chol Kang4, Jeffrey J.
Lombardo5 and Wilson K. S. Chiu5
1
National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA
2
Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, USA
3
Center for Nanoscale Materials, Argonne, Illinois 60439, USA
4
Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for
Advanced Materials and Parts, Chosun University, Gwangju 501-759, Republic of Korea
5
Department of Mechanical Engineering, University of Connecticut, Storrs, Connecticut 06269-3139, USA
*
Correspondence and requests for materials should be addressed to H. Y. (hyan@bnl.gov)
†
Present address: Department of Physics, University of Ulsan, Ulsan 680-749, Korea.
SUPPLIMENTARY MATERIALS
FIGURE S1
a
b
c
1.4
1.0
1.2
0.8
200 nm
0.8
-200
0.6
0
x (nm)
Intensity (arb. unit)
Intensity (arb. unit)
30 nm
1.0
200
0.4
0.2
52 nm
0.6
-200
0.4
0
y (nm)
200
0.2
0.0
0.0
0
100
200
300
x (nm)
400
500
600
0
100
200
300
400
500
600
y (nm)
Figure S1 SEM image of the test structure a and fluorescence line scans across a double-line structure
with a gap size of 20 nm in horizontal b and vertical c directions. Insets are the best-fitting probe profiles
in respective directions.
FIGURE S2
a
b
Figure S2 Far field diffraction patterns from the focusing optics, a without and b with specimen.
FIGURE S3
a
b
c
d
Figure S3 a Phase image of the specimen. b-d are the zoom-in phase, transmission and Ni fluorescence
images of the rectangular area in a, respectively. Pixel size in b-d is 30 nm.
FIGURE S4
a
b
Figure S4. Images of the fitting residue error in x a and y b directions. A larger error appears on sharp
boundaries where the effect of high-order expansion terms of the phase function is more appreciable.
The root-mean-square error normalized to the total intensity,
Rl ,m / I tot , is in the order of 10-3 in this
case. This indicates that a linear phase term is good enough to approximate the local phase variation.