Правительство Российской Федерации
Федеральное государственное автономное образовательное учреждение
высшего профессионального образования
"Национальный исследовательский университет
"Высшая школа экономики"
Московский институт электроники и математики Национального
исследовательского университета "Высшая школа экономики"
Департамент электронной инженерии
Программа дисциплины «Материаловедение наноструктурированных
материалов»
для направления 222900.62 «Нанотехнологии и микросистемная техника »
подготовки бакалавра
Автор программы: Новоселова Е.Г., к.ф.-м.н., enovoselova@hse.ru
Рекомендована профессиональной коллегией
УМС по электронике
Председатель С.У. Увайсов
Утверждена Учёным советом МИЭМ
Ученый секретарь В.П. Симонов
Москва, 2015
Настоящая программа не может быть использована другими подразделениями
университета и другими вузами без разрешения кафедры-разработчика программы.
The course «Material science of nanostructured materials» is designed to provide an
introduction to nanomaterials and devices to the third-year students of bachelor study
programme in Nanotechnology .
Course objective:
providing a basic understanding of the relationships between physical properties or phenomena
and material dimensions. Also, we will discuss fabrication and application of nanostructures or
nanomaterials. The course will be focused primarily on inorganic materials.
Course contents:
1. Thin Films
Fundamentals of Film Growth. Vacuum Science. Physical Vapor Deposition (PVD).
Evaporation. Molecular beam epitaxy (MBE). Sputtering. Comparison of evaporation
and sputtering. Chemical Vapor Deposition (CVD). Typical chemical reactions. Reaction
kinetics. Transport phenomena. CVD methods. Diamond films by CVD. Atomic Layer
Deposition (ALD). Superlattices. Self-Assembly. Langmuir-Blodgett Films.
Electrochemical Deposition.
2. Nanostructures Fabricated by Physical Techniques
Lithography. Photolithography. X-ray lithography
Focused ion beam (FIB) lithography.
Nanomanipulation and Nanolithography . Scanning tunneling microscopy. Atomic force
microscopy .
Soft Lithography. Microcontact printing. Molding. Nanoimprint
3. Special nanomaterials
Carbon fullerenes. Fullerene-derived crystals. Carbon nanotubes.
Micro and mesoporous materials.Ordered mesoporous structures. Random mesoporous
structures. Crystalline microporous materials: zeolites
Core-Shell Structures. Metal-oxide structures . Metal-polymer structures . Oxidepolymer structures.
Nanocomposites and Nanograined Materials
4. Characterization and properties of nanomaterials
Structural characterization. X-ray diffraction (XRD) .Small angle X-ray scattering
(SAXS). Scanning electron microscopy (SEM) .Transmission electron microscopy
(TEM).Scanning probe microscopy (SPM)
Chemical characterization . Optical spectroscopy . Electron spectroscopy . Ionic
spectrometry.
5. Physical Properties of Nanomaterials
Melting points and lattice constants . Mechanical properties .
Optical properties. Surface plasmon resonance . Quantum size effects .
Electrical conductivity. Surface scattering . Change of electronic structure. Quantum
transport . Effect of microstructure.
Ferroelectrics and dielectrics.
Superparamagnetism
6. Applications of Nanomaterials
Molecular Electronics and Nanoelectronics
Nanobots
Biological Applications of Nanoparticles
Band Gap Engineered Quantum Devices .Quantum well devices .Quantum dot devices .
Nanomechanics
Carbon Nanotube Emitters
Photoelectrochemical Cells
Photonic Crystals .Plasmon Waveguides
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Learning outcomes:
The students:
will recognize the classification of nanosized structures,
will be able to understand fundamentals of synthesis and processing of nanomaterials and
nanostructures,
will be able to discuss structure and properties of nanostructured films and coatings
will be able to describe methods employed for nanomaterial fabrication
Entry requirements:
Students registering for this course are required to have a basic knowledge in
physics, chemistry, semiconductor materials and devices
Course contents per week
Week
1
2
3
4
5
6
7
8
Course contents – lectures
Contents
Fundamentals of Film Growth. Vacuum Science. Physical
Vapor Deposition (PVD). Evaporation.
Molecular beam epitaxy (MBE). Sputtering. Comparison of
evaporation and sputtering
Chemical Vapor Deposition (CVD). Typical chemical
reactions. Reaction kinetics. Transport phenomena. CVD
methods. Diamond films by CVD
Nanostructures Fabricated by Physical Techniques.
Lithography. Photolithography. X-ray lithography
Focused ion beam lithography.
Nanomanipulation and Nanolithography. Scanning tunneling
microscopy. Atomic force microscopy .
Soft Lithography. Microcontact printing. Molding.
Nanoimprint
Special nanomaterials.Carbon fullerenes. Fullerene-derived
crystals. Carbon nanotubes.
Micro and mesoporous materials.Ordered mesoporous
structures. Random mesoporous structures. Crystalline
9
10
microporous materials: zeolites
Characterization and properties of nanomaterials
Structural characterization. X-ray diffraction (XRD) .Small
angle X-ray scattering (SAXS).
Scanning electron microscopy (SEM) .Transmission electron
microscopy (TEM). Scanning probe microscopy (SPM)
11
Chemical characterization . Optical spectroscopy . Electron
spectroscopy . Ionic spectrometry.
12
Physical Properties of Nanomaterials
Melting points and lattice constants . Mechanical properties .
13
Optical properties. Surface plasmon resonance . Quantum size
effects .
14
Electrical conductivity. Surface scattering . Change of
electronic structure. Quantum transport . Effect of
microstructure.
15
Ferroelectrics and dielectrics. Superparamagnetism
16
Applications of Nanomaterials
Molecular Electronics and Nanoelectronics
Nanobots
Biological Applications of Nanoparticles
17
Band Gap Engineered Quantum Devices .Quantum well
devices .Quantum dot devices .
18
Photonic Crystals .Plasmon Waveguides
Course contents – practical courses
week
6
Contents
Study of the formation of nanoscale films by magnetron
sputtering
Determination of nanoscale films parameters by X-ray
reflectivity
7
8
High-resolution X-ray diffraction study of epitaxial structures
9
Small-angle X-ray scattering study of metal clusters size in the
polymer matrix
Workload table
Activity
Total workload
Class hours
Time (hours)
108
60
Lectures
Laboratory
Seminar
20
20
20
Working hours out of class
48
Evaluation system
mid-term studies
(10 points max.)
Assignment
Reports on
practical courses
Quiz
Total
Contribution, %
20
60
(4х15%)
20
100
Contribution of mid -term studies to pass mark (10 points max.) – 50%
Type of final exam –oral. It is a closed book examination.
Contribution of final exam (10 points max.) to pass mark– 50%
Form of tuition:
Lectures, tutorials, practical courses and self-study
Course material:
Powerpoint presentations, internet
Literature:
Pogrebnjak A., Beresnev V. Nanocoatings Nanosystems Nanotechnologies. SAIF Zone, Sharjah,
UAE: Bentham Science Publishers, 2012
Guozhong Cao Nanostructures and nanomaterials. Synthesis, Properties, and Applications/
Imperial College Press, 2004