Standard Operating Procedure
Trichlorosilane
Settlement Class: Water Reactive Chemicals
This is an SOP template and is not complete until: 1) lab specific information is entered into the
box below 2) lab specific protocol/procedure is added to the protocol/procedure section and
3) SOP has been signed and dated by the PI and relevant lab personnel.
Print a copy and insert into your
Laboratory Safety Manual and Chemical Hygiene Plan.
Department:
Chemistry
Date SOP was written:
11/6/2012
Date SOP was approved by PI/lab supervisor:
Principal Investigator:
Richmond Sarpong
Internal Lab Safety Coordinator/Lab Manager:
Lab Phone:
1/13/2013
Rebecca Murphy
510-643-2485
Office Phone:
510-643-6312
Emergency Contact:
Richmond Sarpong 626-644-2407
Location(s) covered by this SOP:
Latimer 834, 836, 837, 838, 839, 842, 844, 847, 849,
907
(Name and Phone Number)
(Building/Room Number)
Type of SOP:
☐ Process
☒Hazardous Chemical
☐ Hazardous Class
Purpose
Trichlorosilane is highly flammable liquid and vapor, corrosive, and toxic by inhalation. May ignite or
explode on contact with moist air. Reacts violently and/or explosively with water, steam or moisture.
Use extreme caution. Trichlorosilane is toxic if inhaled.
Material is extremely destructive to tissue of the mucous membranes and upper respiratory tract, eyes,
and skin, shortness of breath, headache, nausea.
Trichlorosilane is used in the production of purified polysilicons.
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
Physical & Chemical Properties/Definition of Chemical Group
CAS#: 10025-78-2
Class: Highly Flammable, Corrosive, Toxic
Molecular Formula: HCl3Si
Form (physical state): liquid
Color: colorless
Boiling point: 31.8°C
Potential Hazards/Toxicity
Trichlorosilane is highly flammable liquid and vapor, corrosive, and toxic by inhalation.
Use extreme caution. May ignite or explode on contact with moist air. Reacts violently and/or explosively
with water, steam or moisture.
Trichlorosilane is toxic if inhaled. Material is extremely destructive to tissue of the mucous membranes
and upper respiratory tract, eyes, and skin, shortness of breath, headache, nausea.
No permissible exposure limits are listed for Trichlorosilane
Has the following toxicity data:
Oral LD50 - rat - 1,030 mg/kg
Inhalation LC50- mouse - 2 h - 1,500 mg/m3
Engineering Controls
NOTE: Lab-specific information on engineering controls may be included in the Protocol/Procedure
section.
The following is a general plan for all water reactive materials:
1. Work under an inert atmosphere (e.g., argon, nitrogen) in a glove box.
If work in a glove box is impractical or otherwise not indicated; be certain the material in not
pyrophoric.
1. Work in a properly functioning certified chemical fume hood when handling water reactive
materials. Work with the sash as low as possible.
2. Work away from any water sources or where there is the potential of water splash.
3. Use fresh, dry solvents.
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
4. Keep the material under inert atmosphere (e.g., nitrogen, argon) when not in use.
5. Handle using a chemical fume hood with good ventilation and electrically grounded lines and
equipment.
Personal Protective Equipment (PPE)
NOTE: Lab-specific information on PPE selection may be included in the Protocol/Procedure section.
Respiratory protection
NOTE: Lab personnel intending to use/wear a respirator mask must be trained and fit-tested by EH&S.
This is a regulatory requirement.
Respirators should be used only under any of the following circumstances:
 As a last line of defense (i.e., after engineering and administrative controls have been
exhausted).
 When Permissible Exposure Limit (PEL) has exceeded or when there is a possibility that PEL will
be exceeded.
 Regulations require the use of a respirator.
 An employer requires the use of a respirator.
 There is potential for harmful exposure due to an atmospheric contaminant (in the absence of
PEL)
 As PPE in the event of a chemical spill clean-up process
Hand Protection
Gloves must be worn. Use proper glove removal technique to avoid any skin contact. Nitrile gloves
recommended.
NOTE: Consult with your preferred glove manufacturer to ensure that the gloves you plan on using are
compatible with Trichlorosilane.
Refer to glove selection chart from the links below:
http://www.ansellpro.com/download/Ansell_8thEditionChemicalResistanceGuide.pdf
OR
http://www.allsafetyproducts.biz/page/74172
OR
http://www.showabestglove.com/site/default.aspx
OR
http://www.mapaglove.com/
NOTE: Nomex-and-leather flight gloves over chemically resistant gloves are recommended in the UC
Berkeley Office of Environmental Health and Safety document “Safe Use of Pyrophoric and Water
Reactive Reagents”. http://www.ehs.berkeley.edu/hs/126-standard-operating-proceduressop.htmlEye Protection
ANSI approved properly fitting safety glasses or chemical splash goggles. Face shield is also
recommended.
Skin and Body Protection
Flame resistant lab coats must be worn and be appropriately sized for the individual and buttoned to their
full length. Laboratory coat sleeves must be of sufficient length to prevent skin exposure while wearing
gloves. As outlined in Policy 905 personnel should also wear full length pants, or equivalent, and closeTrichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
toed shoes. Full length pants and close-toed shoes must be worn at all times by all individuals that are
occupying the laboratory area. The area of skin between the shoe and ankle should not be exposed.
Hygiene Measures
Wash thoroughly and immediately after handling. Remove any contaminated clothing and wash before
reuse and at the end of the workday.
First Aid Procedures
Notify supervisor and EH&S immediately. Follow up with a call to 510-642-9090 to report the incident.
If Inhaled
Move person into fresh air. If not breathing, give artificial respiration. Consult a physician.
In Case of Skin Contact
Take off contaminated clothing immediately. Wash off with soap and plenty of water for 15 minutes. Take
victim immediately to hospital. Consult a physician.
In Case of Eye Contact
Rinse thoroughly with plenty of water for at least 15 minutes, occasionally lifting the upper and lower
eyelids. Get medical aid immediately.
If Swallowed
Do not induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with
water. Consult a physician.
Special Handling and Storage Requirements
NOTE: Lab-specific information on handling and storage may be included in the Protocol/Procedure
section.
Working Alone
Certain extremely hazardous operations should not be performed if the PI or Lab Safety Contact(s) are
not present. Never work alone with extremely hazardous materials/operations. See the
Protocol/Procedure section below for specific prohibitions (if any) on working alone.
NOTE: The UC Berkeley Office of Environmental Health and Safety document “Safe Use of Pyrophoric
and Water Reactive Reagents” specifies not to work alone or during off hours, when there are few people
around to help. http://www.ehs.berkeley.edu/hs/126-standard-operating-procedures-sop.html
Precautions For Safe Handling

Avoid contact with skin and eyes and inhalation. Keep away from sources of ignition.
 Avoid heat and shock or friction when handling.
 Avoid strong acids or bases or strong oxidizing or reducing agents. Unless it is known otherwise,
assume the material is pyrophoric.
 To be handled always in a glove box or under inert atmosphere.
Design a quenching scheme for residual materials prior to using water reactive materials.
Trichlorosilane reacts violently with water, alcohols, amines, and alkalis to produce hydrochloric acid.
It should be used under anhydrous conditions, with dry solvent, and in the absence of alcohols,
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
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amines, and alkalis. If the quenching of the reaction involves water, the reaction vessel should be
cooled to avoid an exotherm.
Never use water to quench the material itself or a reaction where a water-reactive reagent is used.
Begin quenching with a low reactivity quenching agent and slowly add more reactive quenching
agents. For example, first quench residual sodium metal with isopropanol and then add ethanol to the
mixture.
Design your experiment to use the least amount of material possible to achieve the desired result.
It is better to do multiple transfers of small volumes than attempt to handle larger quantities. Before
transferring, make sure that the material is at room temperature.
Avoid formation of dusts and aerosols
Provide appropriate exhaust ventilation at places where dust is formed.
Take measures to prevent the build-up of electrostatic charge.
Keep away from sources of ignition – Open flames (e.g., Bunsen Burner)
Eliminate or substitute a less hazardous material when possible.
Verify your experimental set-up and procedure prior to use.
Inform colleagues that this material will be used and where. Label the work area with a sign saying
"Water Reactives Use Area".
Only use if the area is properly equipped with a certified eye wash/safety shower within ten seconds
of travel.
Never use water to extinguish fires caused by water reactive materials.
NOTE: See a more details on safe handling in the UC Berkeley Office of Environmental Health and
Safety documents “Safe Use of Pyrophoric and Water Reactive Reagents” and “Quenching of Pyrophoric
Substances”. http://www.ehs.berkeley.edu/hs/126-standard-operating-procedures-sop.html
Conditions for Safe Storage
 Always handle inside a glove box.
 Over time, pressure may increase causing containers to burst. Keep container tightly closed in a cool,
dry, well-ventilated place..
 Store and handle under inert gas (Noble gases such as Nitrogen, Argon etc.)
 Moisture sensitive.Keep in a dry place (such as a desiccator or a dry box or glove box).
 Store in a location, separated from acids and protected from sunlight.
 Store away from heat sources and in a flame proof area
 Recommended storage temperature: 2 - 8 °C.
 Keep away from incompatible materials and conditions.
 Do not leave the container near a lab sink, emergency eyewash or safety shower.
 Do not store in humid air/moisture.
 Store and handle under inert gas (Noble gases such as Nitrogen, Argon etc.)
 Keep in a dry place (such as a desiccator or a dry box or glove box).
 Store in a location, separated from acids and protected from sunlight.
 Use/purchase only amount that is needed in a reasonable amount of time. Use small quantities
whenever possible.
 Store in a separate secondary container and label the material clearly.
 Minimize dust generation and accumulation.
 Hazard communication label on the container must read ‘Water Reactive’. W
 Never allow product to get in contact with water or water based compounds during storage.
 Do not leave the container on the bench top - even momentarily.
 Follow any substance-specific storage guidance provided in Safety Data Sheet documentation.
 Monitor your inventory closely to assure that you have tight control over your material.
 Wash hands and arms with soap and water after handling.
 Minimize dust generation and accumulation.
 At the end of each project, thoroughly inspect the area for residual reactive material..
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
Spill and Accident Procedure
Fire-fighting & Extinguishing media
Suitable extinguishing media
Carbon dioxide (CO2), Dry powder, and Class D fire extinguisher
DO NOT use water
Special Protective Equipment For Fire-Fighters
Wear Self-Contained Breathing Apparatus (SCBA) for fire-fighting if necessary.
Personal precautions
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Avoid dust formation.
Ensure adequate ventilation.
Remove all sources of ignition.
Evacuate personnel to safe areas.
Environmental precautions
Do not let product enter drains.
Methods and materials for containment and cleaning up
 Pick-up and dispose of as hazardous waste without creating dust.
 Do not flush with water or bring in contact with moisture.
 Keep in suitable, tightly closed containers for disposal.
Chemical Spill Dial 911
Spill – Assess the extent of danger. Help contaminated or injured persons. Evacuate the spill area.
Avoid breathing vapors. If possible, confine the spill to a small area using a spill kit or absorbent material.
Keep others from entering contaminated area (e.g., use caution tape, barriers, etc.).
Small (<1 L) – If you have training, you may assist in the clean-up effort. Use appropriate personal
protective equipment and clean-up material for chemical spilled. Double bag spill waste in clear plastic
bags, label and take to the next chemical waste pick-up.
Large (>1 L) – Dial 911 and 510-642-9090 for assistance.
Chemical Spill on Body or Clothes – Remove clothing and rinse body thoroughly in emergency shower
for at least 15 minutes. Seek medical attention. Notify supervisor and EH&S immediately. Follow up with
a call to 510-642-9090 to report the incident.
Chemical Splash Into Eyes – Immediately rinse eyeball and inner surface of eyelid with water from the
emergency eyewash station for 15 minutes by forcibly holding the eye open. Seek medical attention.
Notify supervisor and EH&S immediately. Follow up with a call to 510-642-9090 to report the incident.
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
Medical Emergency Dial 911
Life Threatening Emergency, After Hours, Weekends And Holidays – Dial 911 or go to the nearest
emergency room. Note: All serious injuries must be reported to EH&S within 8 hours. Follow up with a
call to 510-642-9090 to report the incident.
Non-Life Threatening Emergency – Go to the Occupational Health Facility (Tang Health Center). After
hours go to the nearest emergency room. Note: All serious injuries must be reported to EH&S within 8
hours. Follow up with a call to 510-642-9090 to report the incident.
Needle stick/puncture exposure (as applicable to chemical handling procedure) – Wash the affected
area with antiseptic soap and warm water for 15 minutes. For mucous membrane exposure, flush the
affected area for 15 minutes using an eyewash station. Go to the Occupational Health Facility (Tang
Health Center). After hours go to the nearest emergency room. Note: All needle stick/puncture exposures
must be reported to EH&S within 8 hours. Follow up with a call to 510-642-9090 to report the incident.
Decontamination/Waste Disposal Procedure
Use proper personal protective equipment for chemical and properly dispose chemical and contaminated
disposables as hazardous waste following the guidelines below.
General hazardous waste disposal guidelines:
Label Waste
Label all containers with the label provided at http://ehs.berkeley.edu/hm/279-new-hazardous-wasteprogram-hwp.html. See the EH&S Fact Sheet, “Hazardous Waste Management” for general
instructions on procedures for disposing of hazardous waste.
Store Waste
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Call EH&S for proper procedure to dispose of waste
Store hazardous waste in closed containers, in secondary containment and in a designated
location
Double-bag dry waste using transparent bags
Waste must be under the control of the person generating & disposing of it
Dispose of Waste
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Dispose of regularly generated chemical waste within 6 months
Call EH&S for questions
Empty Containers
o Dispose as hazardous waste if it once held extremely hazardous waste (irrespective of
the container size)
o Consult waste pick-up schedule
Prepare for transport to pick-up location
 Check on-line waste tag
 Write date of pick-up on the waste tag
 Use secondary containment
 Dispose of regularly generated chemical waste within 6 months
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
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Call EH&S for questions
Safety Data Sheet (SDS) Location
SDS can be accessed online at http://ucmsds.com
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
Protocol/Procedure for Trichlorosilane
CAS#: 10025-78-2
Preparation
List any other particular preparation requirements needs for this procedure (e.g., location of spill kit or keep water or
ignition sources away from procedure area).
Know the location of the nearest fire extinguisher, eyewash, and safety shower before beginning work.
Lab-specific
Information
Add lab-specific information not included above if needed (e.g., all work for this procedure is to take place in the
designated fume hood.)

Procedure/Use
Scale
Engineering
Controls/Equipment
PPE (eye, face, gloves, clothing)
Procedure Steps and Special
Precautions for this Procedure
Trichlorosilane can
be used as a
reagent in a wide
range of organic
reactions.
Suitable
procedure for
volume up to
~150 mL of
trichlorosilan
e
Trichlorosilane should be
stored in chemical reagent
bottles provided by
chemical suppliers
Eye protection: Wear tight-fitting
safety goggles or safety glasses
with side shields.
Trichlorosilane reacts violently with
water, alcohols, amines, and alkalis to
produce hydrochloric acid. It should be
used under anhydrous conditions, with
dry solvent, and in the absence of
alcohols, amines, and alkalis.
Since trichlorosilane is
toxic, it should be used
exclusively in a fume hood
to avoid the inhalation of
vapors and exposure of the
eyes to vapors. If inhaled or
exposed to the eyes, it has
a corrosive effect.
Exposure to the air should
be avoided, as it can
spontaneously catch fire
due to moisture in the air.
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Gloves: Handle with gloves.
Gloves must be inspected prior to
use. Use proper glove removal
technique (without touching
glove's outer surface) to avoid
skin contact with this product.
Dispose of contaminated gloves
after use in accordance with
applicable laws and good
laboratory practices. Wash and
dry hands after use.
Clothing: Wear fire/flame
resistant lab coat (100% cotton
based); cotton based
clothing/attire; full length pants or
Date: 12/18/2012
If the quenching of the reaction involves
water, the reaction vessel should be
cooled to avoid an exotherm.
Since trichlorosilane is flammable (flash
point -27 °C, boiling point 31.5-33 °C), it
should not be measured out in the
presence of a heat source (ex. Bunsen
burner, heat gun, non-sparking hot
plate, etc.). It will ignite in the presence
of a spark.
equivalent; and close-toed, closeheeled shoes.
If it is used in a heated reaction, care
should be taken not to superheat the
reaction. A thick walled schlenk flask or
a flask with a reflux condenser or other
ventilation should be used. These
precautions should be used to avoid the
rupturing of the reaction vessel if there
is a release of hydrogen chloride gas as
the reagent decomposes.
For small quantities (<10 mL) a syringe
should be used to transfer
trichlorosilane from its container to the
reaction vessel. Large quantities (>60
mL) may be transferred using a
cannula. For intermediate quantities
(10-60 mL) either a syringe or a cannula
may be used to transfer the reagent.
Syringe and cannula transfer are used
in all cases because trichlorosilane
reacts with moisture in the air to form
hydrochloric acid and a white residue
(silica gel, SiO2).
Trichlorosilane should be disposed of if
it no longer appears as it should (based
on the supplier description). To dispose
of, it can be submitted to EH&S as is. It
can also be added slowly to a solution
of aqueous base at 0 °C to quench the
reagent. The quenched reagent can
then be added to standard liquid waste.
Trichlorosilane
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
Notes
Initials of
individuals using
this procedure
Trichlorosilane
Any deviation from this SOP requires approval from PI.
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SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012
Documentation of Training (signature of all users is required)

Prior to conducting any work with Trichlorosilane, designated personnel must provide training to
his/her laboratory personnel specific to the hazards involved in working with this substance, work
area decontamination, and emergency procedures.

The Principal Investigator must provide his/her laboratory personnel with a copy of this SOP and a
copy of the SDS provided by the manufacturer.

The Principal Investigator must ensure that his/her laboratory personnel have attended appropriate
laboratory safety training or refresher training within the last one year.
I have read and understand the content of this SOP:
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Signature
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Trichlorosilane
12
SOP Template developed by the UC Center for Laboratory Safety
Date: 12/18/2012