University “ Babeş-Bolyai” Cluj-Napoca
Faculty of Physics
Academic Year: 2009/2010
Semester 2/ 4
SYLLABUS
I. General Information about the course and laboratory classes
Title of the course: PHYSICS OF THIN FILMS
Level: Master of Science (Bologna): SOLID STATE PHYSICS
Code: FMF 0006
Credits: 7
Hours / week: 2 course + 1 laboratory + seminar
Location: in accord with the schedule of the activities
Timetable of the activities: C: Monday 10-12, Lab.: Monday 10-12; Sem: Friday
12-14.
II.Information about the lecturers, seminar and laboratory assistants
Name, scientific title:
Aurel Pop, Prof. Dr.
E-mail: avpop@phys.ubbcluj.ro
Telephone: 405300, int. 5150
Office hours: 2 h / week
III. Presentation of the discipline
Objectives: Revision and improvement of the fundamental knowledge in
solid state physics and thermodinamics acquired before this lectures. This course
is designed to provide an introduction to the physics and methods used in the
production and characterization of thin films. We will examine what thin films are,
their important properties, how they are produced, and how we can characterize
them.
Assimilated competencies:
The enforcement of the competences in study the physical properties of thin films.
The fundamental and applicative aspects of this discipline will be taken in to
account in order to have graduate students with good competences in research
(fundamental or applicative) and didactic activities or in fabrication.
IV. Compulsory bibliography:
1.Milton Ohring, “The materials science of thin films” ( Academic Press
Limited,London,1992)-biblioteca Catedrei de Fizica Starii Condensate.
2.M.Konuma, “Film deposition by plasma techniques”, Springer Verlag, Berlin,
1992.-biblioteca Catedrei de Fizica Starii Condensate
3.Julia M. Phillips, “Substrate selection for HTS thin films”,
J.Appl.Phys.79(4),1829-1846(1996).
4.King-Ning Tu, J.W.Mayer, L.O.Feldman, “Electronic thin film science for
electrical engineers and materials scientists”, 1992 MacmillanPublishing
Company, New-York.
5, Kasturi Chopra,” Thin film phenomena” (Editura:McGraw-Hill Company)
6.A.V.Pop, „Introducere in fizica sistemelor vortex”, 2004, Ed.Efes-ClujNapoca.
V. Educational materials used during lectures, seminars and laboratories:
- Video-projector for courses and seminars and free internet access
to the lectures.
- research equipments from the Institute of Physics of UBB
- computers of Physics Department network
VI. Detailed Syllabus for all meetings and verifications:.
a). courses
Nr.
subject
Title and thematic
Nr.
hours
1.
Basics:Solid State Physics :
- crystal structure and defects, packing arrangements,
close packed planes, thermodynamic vacancy
concentration
Basics:Thermodynamics - phase diagrams; Kinetics Fick's Laws, Diffusion coef, Arrhenius
Film formation: Introduction, Trapping, Capillarity model
(heterogeneous nucleation)
Film formation: Growth modes, island growth, zone
models, columnar growth
Film deposition: Basic Vacuum(kinetic theory of gasses,
flow, substrates, cleaning),
Evaporation(basic steps, point vs. surface sources purity,
hardware)
Film deposition:Sputtering I. (basics: plasma physics,
sputter yield, alloys, heating
Film deposition:Sputtering II (methods: dc, RF,
magnetron, reactive).
Film characterization:
Surface morphology and composition:optical microscopy,
2
2.
3.
4
5
6
7
8
Bibliography
Ref.1, cap1.1 1.4; Ref.4.
2
2
2
Ref.1, cap 1.5;
Ref.4.
Ref.1, cap 1.7 1.8;5.1-5.3;Ref.5.
Ref.4, Ref.5.
2
Ref.1, cap 2.1;
3.1-3.4; Ref.4
2
2
2
Ref.1, cap 3.5 3.6;3.7-3.8; Ref.4
Ref.1, cap 3.5 3.6;3.7-3.8; Ref.4
Ref.1, Cap. 6;
Ref.4
9
10
11
12
13
14
SEM (EDAX),AFM,STM, XPS( X-ray photoelectron
spectroscopy),Auger spectroscopy
Film characterization
Structural characterization: XRD, LEED (low energy
electron diffraction), RHEED (reflection high energy
electron diffraction), ellipsometry
Film characterization
Electric and magnetic characterization: resistivity, Hall
effect, magnetization, a.c. susceptibility
Properties of thin films
Magnetic and electric properties (resistance/resistivitymetals, insulators - models,)
Properties of thin films
Superconductivity
Properties of thin films
Optical properties (metals, dielectrics, semiconductors;
optics of transparent films, multiple coating)
Mechanical properties
2
Ref.1, Cap. 6;
Ref.4
2
2
Ref.1, Cap. 6;
Ref.4
Ref.1, Cap. 6;
Ref.4
2
Ref.6
2
Ref.6;Ref.3
2
Ref.6;Ref.3
b). seminar
Nr.
subject
Title and thematic
Nr.
hours
1
Thin
film
surface:
relaxation
and
reconstruction.
Models for thin film formation
Deposition parameters and their effects on film
growth.
Student presentation ( thin film synthesis)
Student
presentation
(thin
film
characterisation)
Student presentation ( thin films properties)
2
2
3
4
5
6
Bibliography
2
2
2
2
2
c) Laboratory
Nr.
subject
Title and thematic
Nr.
hours
1
Presentation of research equipments for thin
films (Institute of Physics)
Thin film synthesis by DC magnetron
sputtering
Thin film synthesis by RF magnetron
sputtering
Measurements of electrical resistance function
of temperature for thin films
2
2
3
4
2
2
2
Bibliography
5
6
A.C. susceptibility function of temperature for
HTS films
Study of thin film structure and epitaxy by XRD
2
2
VII. Evaluation modes:
- 25% seminar/laboratory work
- 20% presentation of a scientific reports
- 55% final semester exam.
VIII.
Organizing details, handling with special situations:
Presence to courses is not obligatory, but this presence and the active presence
in seminars classes are well recommended. Absence from more than 20% of the
seminar/laboratory classes leads to exclusion from the final exam.
Seminar/Laboratory classes cannot be replaced and verifications can be
repeated only in very special cases.
IX. Optional bibliography:
1.Arthur C. Smith, James J. Janak, Richard B. Alder, Electron Conduction in
Solids, Mc. Graw-Hill Book Company, New York, 1967
3. M. Cyrot, D. Pavuna, Introduction to Superconductivity and High-Tc
materials, World Scietific, Singapore, New York, London, Hong Kong,
1992
4. H. E. Hall, Solid State Physics, John Wiley & Sons Ltd., London , New
York, Sydney, Toronto, 1974
5. G. Ilonca, A. V. Pop, Supraconductibilitatea si supraconductorii cu
temperaturi critice inalte, Editura Bit, Iasi, 1999
6. V. Comello "RGAs Provide Real Time Process Control" Semiconductor
International p. 71, Sept. 1990.
7. P. H. Singer "Today's Changing Vacuum Requirements" Semiconductor
International p. 59, Sept. 1990.
8. R. F. Bunshah and C. V. Deshpandey "Evaporation Processes" MRS
Bulletin p. 33, Dec. 1988.
9. W. D. Westwood "Sputter Deposition Processes" MRS Bulletin p. 46, Dec.
1988.
10. P. Harris "Taking the Lead in Electron-beam Deposition" Vacuum &
ThinFilm, Feb. 1999, p. 26.
11. B. Heinz "Sputter Target and Thin Film Defects" Vacuum & ThinFilm,
October 1999, p. 22.
12. G. S. Bales et al., "Growth and Erosion of Thin Solid Films", Science, 249,
264 (1990).
13. C. R. M. Grovenor, H. T. G. Hentzell and D. A. Smith, "The Development
of Grain Structure During Growth of Metallic Films" Acta Metallurgica 32,
773 (1984).
14. * L. A. Stelmack, C. T. Thurman and G. R. Thompson "Review of Ionassisted Deposition: Research to Production", Nuclear Instruments and
Methods in Physics Research B, 37/38, 787 (1989).
15. J. M. Bennett "When is a surface clean ?" p. 29 in Optics and Photonics
News, June, 1990.
16. H. M. Layton "Ultrasonic Cleaning for Semiconductor Wafer Processing"
Microelectronic Manufacturing and Testing Jan. 1983.
17. P. J. Martin and D. R. McKenzie, "Make Clean, Dense Films with a
Filtered Process", R+D Magazine, October 1990, p. 108.
18. D. E. Aspnes "The Accurate Determination of Optical Properties by
Ellipsometry" p. 89 in Handbook of Optical Constants of Solids, E. D. Palik,
ed.
19. R. E. Honig "Surface and Thin Film Analysis of Semiconductor Materials"
Thin Solid Films 31, 89 (1976).
20. S. Fitzgerald "Analysis of Thin Films and Surfaces", Microscopy and
Analysis, July 1995, p. 23.
21. L. J. Whitman, J. A. Stroscio, R. A. Dragoset, and R. J. Celotta
"Manipulation of Adsorbed Atoms and Creation of New Structures on
Room-Temperature Surfaces with a Scanning Tunneling Microscope",
Science, 251, 1206 (1991).
22. E. Paparazzo, "Applications of Scanning Auger Microscopy to the Analysis
of Materials", Microscopy and Analysis, Nov. 1994, p. 9.