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Dispatching Rule Considering TimeConstraints on Processes for Semiconductor
Wafer Fabrication Facility
LI
LI
Tongji University
Content
» Problem description
» Dispatching Rule Considering Time-Constraints on
Processes
» Simulations
» Conclusions
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Problem Description
» Dispatching with time-constraints on the processes
 the requirements on the
delivery of jobs
 high utility and workload
balance of machines with timeconstraints requirements of
processes
 guarantee the yields of lots
 increase the movements of jobs
to utilize its capacity efficiently
Figure 1 An example of a job with time-constraint
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Dispatching workflow
The Workflow of DRTC
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Dispatching workflow
» For non-BPM, the selection probability of job n is
set to
» For BPM, the selection probability of job n is set to
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Simulations 1
Table 1 Time-constrain of Metal Sputtering
Stage
Metal Sputtering
Metal Sputtering
Recipe
90:1 BOE Etching
Cleaning(F)
Tool
6WET31、6WET32
6FSI01、6RAD25
Metal Sputtering
Sputtering ALSICU
6SPU81、6SPU81_A5
Metal Sputtering
Sheet Resistance
Measurement
6RES06、MFM01
Table 2 Time-constraint of BPSG
Stage
BPSG Deposition
BPSG Deposition
BPSG Deposition
BPSG Deposition
BPSG Deposition
BPSG Flow
BPSG Flow
BPSG Deposition
Recipe
Cleaning (J)
BPSG Deposition
B/P Contents Test
Silicon Oxide Thickness
Measurement
UV Test
BPSG Flow
Cleaning (SPM)
Cleaning (J)
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Tool
6FSI01、6RAD25
6WJ01、6WJ02
6RIG01
MIR02、TEN01
6UV03
6BTU34
6FSI01、6RAD25
6FSI01、6RAD25
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Simulations 1
No.
1
2
3
4
5
6
α1
β1
γ1
α2
β2
γ2
σ
ζ
0.51
0.55
0.65
0.45
0.7
0.35
0.49
0.45
0.35
0.55
0.3
0.65
10
10
5
25
15
15
0.25
0.15
0.4
0.3
0.25
0.4
0.25
0.3
0.35
0.1
0.15
0.1
0.29
0.4
0.15
0.35
0.3
0.1
0.21
0.15
0.1
0.25
0.3
0.4
10
10
5
25
15
15
Rule
FIFO
EDD
CR
SRPT
PRIOR
DRTC
P-M-Avg.
30.25%
27.10%
38.25%
39%
18.66%
61.78%
P-B-Avg.
70%
75.92%
70.29%
69.38%
64.13%
64.83%
MOVE-Avg.
156409
145136
151423
138416
141182
157286
No.
1
2
3
4
5
6
No.
1
2
3
4
5
6
No.
P-M-Avg.: average proportion of the jobs satisfying TC-M
P-B-Avg.: average proportion of the jobs satisfying TC-B
MOVE -Avg.: average movements of the qualified jobs
during one week
Values of parameters impact the
performance of DRTC critically
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2
3
4
5
6
FIFO
P-M
P-B
28.57% 66.67%
20% 66.67%
35.08% 75%
30.66% 75%
32.72% 50%
33.92% 80%
MOVE
167219
154371
153851
154498
154124
153891
EDD
P-S
P-B
28.59% 72.41%
23.68% 75.86%
27.14% 73.07%
29.11% 92.30%
26.38% 69.23%
27.39% 73.07%
MOVE
156789
148416
151870
146270
137065
130407
MOVE
156272
150648
156180
148730
148157
148553
SRPT
P-S
P-B
50.66% 50%
38.09% 25%
42.5% 75%
41.46% 77.77%
30.98% 61.11%
29.16% 80%
MOVE
149237
141263
139484
137225
131059
132232
PRIOR
P-M
P-B MOVE
16.32% 33.33% 144047
18.64% 71.43% 147575
31.74% 75% 147632
31.42% 80% 137018
10.34% 75% 135530
3.50% 50% 135292
DRTC
P-S
P-B
63.63% 70.58%
61.29% 65.38%
64.28% 67.39%
57.14% 66.04%
57.69% 56.86%
66.67% 62.74%
MOVE
161507
160503
161131
156780
152577
151220
CR
P-M
P-B
41.66% 43.75%
34.21% 75%
43.54% 77.77%
38.66% 81.25%
36.50% 88.88%
35.93% 59.09%
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Parameter Optimization
The workflow to determine the parameter values of DRTC
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Simulations 2
No.
α1
β1
γ1
α2
β2
γ2
σ
ζ
1
0.50
0.57
14.89
0.14
0.32
0.20
0.20
14.89
2
0.37
0.55
19.01
0.18
0.38
0.38
0.31
19.25
3
0.50
0.49
23.26
0.42
0.22
0.16
0.18
23.33
4
0.87
0.30
24.70
1.27
0.23
0.32
1.13
25.67
5
0.38
0.48
20.96
0.39
0.29
0.22
0.15
21.33
6
0.45
0.48
21.11
0.25
0.31
0.37
0.20
21.21
No. MOVE-A MOVE-O M-Imp. P-M-A
P-M-O P-M-Imp. P-B-A
P-B-O P-B-Imp.
Avg.
1
161095
161435
0.21
66.55
68.67
3.19
62.68
64.5
2.90
2.10
2
158028
163712
3.60
68.43
71.69
4.76
60.46
73.33
21.29
9.88
3
159434
160168
0.46
69.24
68.08
-1.68
62.83
69.23
10.19
2.99
4
158030
159432
0.89
66.89
67.27
0.57
60.3
68.96
14.36
5.27
5
154342
159097
3.08
59.14
62
4.84
61.31
58.62
-4.39
1.18
6
153034
153428
0.26
60.04
62.78
4.56
64.67
68.96
6.63
3.82
Avg.
-
-
1.42
-
-
2.71
-
-
8.50
4.21
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Conclusion
» A dispatching rule considering the time-constraints
on processes is proposed in this paper.
» We also introduce how to determine its parameters to
obtain better performance.
» However, our work doesn’t relate these parameters to
running information of a fab, and the latter is
anticipated to be better than the former.
» Our future work is to link these parameters with
running information to realize its adaptability to
changing environments.
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