Using Scheduling For Constraint Management Talk Title in Semiconductor Manufacturing Speaker Name Dilip Gopi and Roland Schelasin Speaker Title Industrial Engineering, Texas Instruments, Maine Outline • Wafer Fabrication Process Overview • TI Maine Fab Overview • Scheduling Methodology Overview • Problem Statement • Rule Definitions • Benefits 2 © 2014 Texas Instruments Incorporated TI Maine Fab Overview 3 © 2014 Texas Instruments Incorporated Wafer Fabrication Process Overview Wafer Fab Re-Entrant Flow Used with Permission from Clifford L. Henderson, GA Tech cliff.henderson@chbe.gatech.edu 404 385-0525 4 © 2014 Texas Instruments Incorporated TI Maine – Location Aizu Aizu Fab Chengdu Chengdu Fab Miho Miho Fab Hiji Hiji Fab Hiji A/T Portland MFAB Greenock GFAB Freising FFAB Taipei TITL Aguascalientes TMX Dallas DFAB DMOS5 DMOS6 SFAB DHC RFAB DBump Malaysia TIM TIEM Baguio Baguio Stafford HFAB HBump Color Management Fab Assembly & Test Bump © 2014 Texas Instruments Incorporated Pampanga Clark MFAB – Maine – The Way Life Should Be! Portland © 2014 Texas Instruments Incorporated TI Maine - Fab Overview • 200mm SMIF w/Intercell Transport/Stockers • 27 Technologies, 130-1500nm, 16-48 Masks • 50,000 Reticles (10,000 In Fab) • 700 Active Products • 75k sq. ft. Clean Room • In-House MES • 7 x 24 Manufacturing with 4 Shifts • Electronic Run Cards (STS): Real Time Wafer Level Tracking • Intelligent Stockers for Lot Dispatch • Automatic Recipe Select/Downloading • Automated “Feed Forward” Adjustment for Advanced Process Control © 2014 Texas Instruments Incorporated 7 TI Maine – Mix and Capacity Overview • Approximate Wafer Starts Mix • 54% 350nm CMOS, Avg. 26 Patterns • 26% 1500-130nm BiCMOS, 16-48 Patterns • 20% 180nm CMOS, Avg. 31 Patterns • Bottle Necks • Design – Photo • Tactical – EPI, Etch (Metal, Oxide), CMP, Diffusion (Clox) – Technology + Process Module Sub-Capacities 8 © 2014 Texas Instruments Incorporated Scheduling Overview • Scheduling is an important tool for manufacturing and engineering since it can have a major impact on the productivity of a process. • Helps minimize – Production Time – Costs by explicitly telling the manufacturing specialists what to run on which equipment. • Production scheduling aims to maximize efficiency of the operation • The methodology presented uses scheduling theory based on point allocation to dictate lot-to-entity allocation and visualization for one of the constraint modules in the factory © 2014 Texas Instruments Incorporated 9 Problem Statement • 6 Chamber States (setup condition) with 35 active production recipes • In-flexibility to run everywhere based on, – Hardware – Gas restrictions – Recipe qualification on tools • Chamber conditioning & test runs needed when switching states • Inability to meet required productive hours results in cycle time losses Chamber states are defined based on the gas configuration used for Production Chamber State Collector As Lo Emitter As Hi Collector As Lo Collector Boron Collector As Lo Collector As Lo Collector As Lo Collector P Collector P Collector P Collector P N Base Base P Base Base P Base Base Emitter Base N Collector P Collector As Lo N Base Base Emitter As Hi P Base Base N Base Base P Collector Boron N Base Base Collector Boron Collector Boron Collector Boron Collector P Collector P Collector P Collector Boron Collector Boron Collector Boron Layer EPI01 EPI02 Released Hardware © 2014 Texas Instruments Incorporated EPI03 In Qual EPI04 EPI05 EPI06 States Qualified 1 1 1 1 1 1 2 2 2 2 2 2 2 2 2 2 2 3 3 3 3 3 4 4 4 4 5 5 5 5 5 5 Not Qual'd As Hi Restrict Week Date Week 1 Week 2 © 2014 Texas Instruments Incorporated Week 3 1/9/13 Week 4 60 50 0 40 20 0 12 9 Down 33 ( 6 Months Data) 18 11 Idle 10 7 Passing Lane Run PCRC Qual 100 Running Qual 19 Idle - Down Qual 26 Idle 27 Down Process 150 Wait for Lot Clean 237 Idle - Wait for WIP EPI06 Wait for Qual Data 17 Down Process 80 Chamber State Change Re-Measure Leakup PM 250 Down Maintenance Goal Hours/Week EPI05 3/9/13 3/10/13 EPI04 3/11/13 3/12/13 EPI03 3/13/13 3/15/13 EPI02 3/14/13 EPI01 1/8/13 1/7/13 Productive Hours/Day 1/6/13 1/5/13 1/4/13 1/3/13 1/2/13 1/1/13 12/31/12 12/30/12 12/29/12 12/28/12 12/27/12 12/26/12 12/25/12 12/24/12 100 12/23/12 Sum120 of Time (Hrs) 12/22/12 E10 State 12/21/12 12/20/12 Productive Hours Problem Statement (Contd.) Tool Average Hours/Week 200 Equivalent Loss of 1 Tool due to Components of Chamber State Change 75 Qual Proposed Model – Tools by State 4QCY12 1QCY13 2QCY13 # of Tools Assigned 4.0 # of Tools 3.0 • Reduce Chamber State Changes • Eliminate associated Idle time with State Changes 2.0 • Use Passing Lanes to keep recipes Qualified 1.0 0.0 As Hi As Lo Base Boron P Hi P Lo Preferred Tool Model Primary Secondary Tool State State EPI01 As Lo Boron EPI02 As Hi Base EPI03 Base Boron/P EPI04 Base As Lo /P EPI05 Boron Base EPI06 Base As Hi © 2014 Texas Instruments Incorporated • Each Tool to have a Primary and Backup State • EPI Scheduler to define State Changes based on WIP and Look ahead functions • Reduce downtime associated with state changes What is a WIP Scheduler? • The WIP Scheduler is used to schedule a lot to be loaded into the tool • The WIP Scheduler uses a set of rules that have been set up for each entity type • The WIP Scheduler schedules a run by using the rules and other factors on each tool • The WIP Scheduler and Dispatch are Different! – Dispatch only shows work, and the order is based on dispatching rules: • Slack time • Priority lot (Hot, Hand carry, etc.) – The WIP Scheduler sees what can run on a tool and determines what lot or group of lots (batch) should run next based on the rules 13 © 2014 Texas Instruments Incorporated Rule Definitions • Points are assigned for each rule (Low, Med, High) • Lot-based Rules – Priority, Lateness, Static • Lot / Entity Rules – “Cost” of changing Chamber State – How many tools can run the Recipe right now? • Fewer tools means MORE points – MTTD consideration for batches with inspectable lots © 2014 Texas Instruments Incorporated Maximization Function Where Rules are defined based on, • Lot Priority • Lot Lateness • Lot Slack Time • Lot Inspection • Tool Chamber State • Tool Count • Tool Ready • Tool State, etc. 15 © 2014 Texas Instruments Incorporated EPI Rule Set Type Name Min Points Mid Points Max Points Min Text Mid Text Max Text BATCH PRIORITY 0 300 500 no priority Medium Priority High Priority Lot BATCH LATENESS 100 200 300 3 days late 7 days late >10 days late or push it BATCH STATIC 100 300 500 24 - 48 hours 48-72 hours >72 hours BATCH STATIC_HRS 0 0 1 BATCH INSPECTION 100 300 500 Inspectable 50-125 Inspectable 125-500 Inspectable >500 ENTITY TOOL_COUNT 0 0 300 3 tools 2 tools 1 tool ENTITY QUAL EXPIRATION 100 300 500 >7-14 days 2-7 days <2 days ENTITY RUNNABLE 0 300 500 Cannot Run Allowed but must Qual Can run Now ENTITY STATE_CHANGE 0 0 0 © 2014 Texas Instruments Incorporated hours static Value from table State Change Table From To State As Hi As Lo Base Boron P Hi P Lo As Hi 0 100 0 100 100 As Lo 5000 1000 100 100 100 Base 100 100 100 0 0 Boron 10000 100 100 100 100 P Hi 5000 100 100 100 0 Risk Levels 0 100 1000 10000 Just do it. Can be handled with standard prep recipe (hours) Extended chamber prep time and qualification (days) Don't do it. © 2014 Texas Instruments Incorporated P Lo 5000 100 100 100 0 Scheduler Breakdown Current State Projected time when tool will finish current lot(s) Points Score based on Rule Set © 2014 Texas Instruments Incorporated Benefits • 34% increase in Productive Hours • Chamber State Dedication Helped, – – – – Increased Availability Increased Utilization Increased Labor Productivity Reduced number of State Changes – Reduced Quals – Gas Savings Scheduler Online 19 © 2014 Texas Instruments Incorporated Benefits (Contd.) • Empowerment to the shop floor • Engineering Productivity Improvement • Gave the floor a better visibility of what needed to run next • Look ahead of when the next lots are needed on what tool 20 © 2014 Texas Instruments Incorporated Q&A 21 © 2014 Texas Instruments Incorporated