Chemical Hygiene Plan
Safety Manual
Bob Hamilton
bob at eecs.berkeley.edu
4/13/2015
1
#1 Rule
No one may work alone in the NanoLab!
• Failure to follow rules can result in suspension of lab privileges.
• Will be warned if logging in alone, or if logging out would leave someone
alone.
• Can find who is in the lab through MercuryWeb.
• During non-staff hours, confirm presence of another lab member.
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Safety Test and Quiz
• Passing the SAFETY TEST qualifies a NanoLab member to work in the
NanoLab. Qualified on “NANOLAB” and virtual equipment “chp”
• Passing an annual, online Safety Quiz is required to renew
membership. Lab members receive an automatic email reminder when
your safety quiz is due.
• Revisions to Chemical Hygiene Plan are posted in Revision history and
should be regularly reviewed:
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Telephone System Information
The laboratory has an independent telephone system:




You cannot dial campus numbers with only 5 digits.
You can dial lab numbers with only 3 digits.
Use “all call” to page staff or other members in the lab.
During staff hours dial “0” to reach the NanoLab office
You must dial “9” to dial an outside number:
 Both “9 – 911 and 911 will reach an emergency operator.
For emergencies dial 9-1-1 from any lab phone.
If you use your cellular phone, call campus police at 510-642-3333
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Marvell NanoLab Phone Numbers
**** Dial 9 For Outside Line****
EMERGENCY
Fire
Serious Injury
All Emergencies
NanoLab Phones - Your Location is Highlighted
Lab Equipment or Facilities
From Any Lab Phone
Dial "0" (zero)
From Any Lab Phone
or UC Campus Police
(510) 642-3333
If No Response,
Use List Below
From Your Cell Phone
Medical Emergency
After Staff Hours
Alta Bates Hospital
Call in order below until you contact a listed person live.
Berkeley, CA 94705
Tel.: (510) 204-4444
520
Reception desk
0
580-1
Gowning West
641
580-2
Gowning East
640
581
Service Chase
642
582
Cleanroom
643
582A
Cleanroom
658
583
Service Chase
644
584
Cleanroom
659
585
Service Chase
660
586
Cleanroom
661
593
Service Chase
647
595
Service Chase
646
599
Level5 Gas/Chem Room
645
3rd Floor
Cell:
(510) 325 - 7557
380
Cleanroom
648
Home:
(510) 644 - 3329
381
Service Chase
649
382
Cleanroom
650
383
Service Chase
655
UHS Tang Center
Bill Flounders
Berkeley, CA 94720
Cell:
(510) 301 - 1082
384
Cleanroom
651
Tel.: (510) 642-3188
Home:
(510) 845 - 4847
385
Service Chase
656
386
Cleanroom
652
391
Service Chase
653
393
Service Chase
654
395
Service Chase
670
399
Level3 Gas/Chem Room
657
M-F
8:00 AM - 6:00 PM
Sunday 9:00 AM - 5:00 PM
Danny Pestal
Cell:
(510) 394 - 4897
Building/Facilities
Sutardja Dai Hall
Building Manager
Domenico Caramagno
6025
Campus Services
Ed Hester
Cell: (510) 502-
Cory Labs
(510) 642-2796
Cell:
(510) 206 -9516
Home:
(510) 428 - 9820
Al Briggs
(510) 642-1032
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Ext. Number
5th Floor
Bob Hamilton
Minor Injuries
2222 Bancroft Way
Description
During Staff Hours
911
2450 Ashby Avenue
Physical
Location
Home:
(510) 647 - 9218
Mike Linan
Home:
(707) 864 - 2605
Lab Services
158
Level1 Telecom Room
664
180
Electrical Room
632
280-1
Level2 Mech. Room South
666
280-2
Level2 Mech. Room North
667
481
Mezzanine Telecom Room
662
681
Mezzanine Telecom Room
663
780
Level7 Exhaust Fan Room
665
5
Emergency Response
In event of fire:



Pull a red fire alarm pull station.
Pull a blue Hazmat alarm pull station.
Evacuate the building.
In event of medical emergency:


Call 911 if life threatening.
Visit Tang Center for minor injuries. If Tang Center closed, the Trauma Center at Alta Bates Hospital on
Ashby and Telegraph is at all hours.
In event of flooding or utility problem:


Contact staff.
Shutoff water supply if you can identify the source.
If there is a non-NanoLab building issue:


Contact campus hotline at 510-642-1032.
Follow up with call to building manager Domenico Carmagno at 510-502-6025.
If you call an EMERGENCY phone number on left, follow-up with a call to a
number on right.
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Blue Hazmat Evacuation Pulls
Blue Hazmat pull stations are located at every emergency exit
and at several locations throughout the lab. Lab members should
use these pulls when they believe the lab should be evacuated:
-
hazmat activates blue lights and audible alarm.
hazmat seals all hazardous gases.
hazmat notifies a 24 hour alarm company.
that then contacts laboratory staff.
hazmat does not call 911.
If blue light is flashing upon arrival,
you may NOT enter the lab.
At each lab entrance is a Firefighter Restricted
“break glass” emergency ventilation pull station.
This station turns off air recirculation and puts
the lab in a state of maximum exhaust.
Lab members are Never allowed to activate
this pull station!
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NanoLab Evacuation Procedure
 Secure your process.
 As you proceed to a blue emergency exit door ask other
lab members to follow.
 Exit the building. If after hours, bring a phone list from
the exit door.
 The assembly area for an Emergency Exit from the
NanoLab is NE of the Hearst Ave stairwell.
 The assembly area for SDH is to the West of the Qual
Comm Café
 Remain available to pass on details you have about
events that lead to an evacuation. Such information is
useful.
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NanoLab Evacuation Routes
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NanoLab Assembly Area
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SDH Building & NanoLab Office
Emergency Assembly Area
X
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12
Clean Gowning
 Proper attire requires before entering
cleanroom:
– Goggles, bouffant cap, nitrile gloves,
shoe covers, gown, boot covers.
 Safety glasses must be worn at all
times! Safety Glasses must comply with
OSHA standard: 1910.133
– Prescription Safety glasses available
through UC Optometry Department
– Contact lenses discouraged: They can
trap abrasive chemicals next to eyes.
 No sandals, open toe shoes, hi-heels
or bare feet. Shorts allowed under full
coverall suits.
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Cleanroom Face Mask Is
Not A Safety Device!
General Laboratory Practices
 Walk, do not run while in the lab.
 Food or drinks are not allowed in the NanoLab.
 Cellular phone use is permitted in gowning area and main
lab aisle, along west-windows.
 Use of music players is allowed only in the gowning area
only.
 Visitors are allowed on by pre-approval. Request permission request via:
visitor at silicon.eecs.berkeley.edu
 Always remove your gloves as you exit the laboratory.
 It is recommended lab users wash their hands after leaving
the NanoLab or other Campus labs.
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Eyewash, Showers, Safety Stations
The laboratory is equipped with ten safety
Shower/eyewash systems.
Five of these are sited in fully-equipped
Safety Stations located between bays.
Each safety station is equipped with:
1. Safety shower
2. Eyewash
3. First Aid Kit
4. Chemical Spill clean up kit
5. HF burn paste and pH test strips
* Two Safety Stations are equipped with
defibrillators
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Chemicals
 Common chemicals are
supplied by the NanoLab.
– For use in NanoLab ONLY.
– Chemicals are stored in lab member
accessible labeled cabinets
throughout the lab.
 Chemicals are also stored in
rolling carts under the sinks.
 View available chemicals on
Mercury.
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Special Chemicals
 A “Special Chemical” is a proper name for any chemical not supplied
by the NanoLab.
 Special Chemicals must be approved prior to bringing them into the
NanoLab.
 Approval Process:
– Obtain a Material Safety Data Sheet (MSDS).
– Email MSDS to Chemical Safety Officer Bill Flounders (bill at eecs.berkeley.edu)
and request special chemical review.
– If approved, when you obtain your chemical, visit the NanoLab office to obtain a
red “Approved Special Chemical” label.
– Even if previously approved, additional purchases of the same chemical must go
through the approval process to maintain up to date chemical inventories.
– It is recommended that you complete the approval process prior to ordering
chemical.
– Special Chemicals may require special hazardous waste disposal methods.
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Transporting Chemicals
 Lab members are NEVER allowed in the chemical storage areas within the
gas vaults, rooms 399 and 599 without staff escort or prior approval.
 Make sure there are no open bottles of desired chemical already in the area.
 Use safety carriers to move bottles within the NanoLab.
 Store opened standard chemicals in designated areas near the sinks.
 Notify staff if there is no stock of a chemical.
 Chemical transport between levels is to be minimized:
– No chemicals are allowed in the lab passenger elevator.
– Always use bottle carriers in the stairs or the chemical “dumb waiter”.
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20
Chemical Transport
“Dumb Waiter”
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Working with Chemicals
 All wet chemical work must be
performed at a NanoLab sink.:
 You must wear protective
equipment (PPE) when working
with any chemicals:
– Chemically resistant gloves, face
shield & apron.
 You must wear chemically-rated
gloves, chemical resistant apron and a
face shield when working with any
chemicals.
– The only exception to this rule is the tripolymer chemically resistant gloves are not
required when handling small amber bottles
of photoresist.
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Working with Chemicals
 Respirators are not required when working with standard or
approved Special Chemicals at NanoLab sinks.
 NanoLab sinks are annually certified as fume hoods.
 If your process requires you to handle chemicals outside of a
NanoLab sink, review your process with Chemical Safety
Officer Bill Flounders.
 Incidental use of isopropanol, methanol, or acetone squeeze
bottles outside of NanoLab sinks is permitted.
 Cal-OSHA requires all chemical containers to be labeled with
their content!
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23
Working with Chemicals
 Always add acid to water.
– Exception being Piranha
 Do not use glassware with HF acid.
 Ongoing processed must be labeled for chemical content, contact
information date and time of return.
– Place setups toward the back of fume hood where there is maximum exhaust.
 Clean unidentified spills by:
– Checking pH with a test strip.
– If strongly acidic or basic (pH <4 or >10) use a sink hose to flush into the sink.
– If neutral, mop up with Techni-cloths.
All chemicals must be stored in proper containers
with the contents identified!
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Dry Chemicals
 Measure dry chemicals by pouring into weigh boat
or weighing paper:
– Always use a clean spatula if scooping is necessary.
– Never return chemicals to the source bottle.
– All chemicals must be labeled and stored in proper containers, i.e. no
beakers with foil or unlabeled dry chemicals.
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Storing Chemicals
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Chemical Disposal
Is it water immiscible
or
halogenated solvent?
yes
Take to msink 1, 16,18
no
Does it contain
metal ions?
yes
Is it nonhalogenated
water soluble
solvent or acid
or base?
Did you receive Special
Chemical approval?
no
no
no
Is Organic waste
bottle more than
75% full?
yes
Replace full with empty
bottle, capping full one
lightly
yes
no
Take full to
Chemical Disposal
Cabinet in 582A
Pour in
funnel
Complete and attach
HAZMAT sticker, fill
out Chemical
Disposal Manifest
Stop, see
Chemical Safety
Officer
Follow disposal guidelines
provided during Special
Chemical review
yes
Aspirate in sink
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Treat as photoresist
Collect separately
27
Chemical Bottle Disposal
 Take empty bottles of drain disposable chemicals to
the automated bottle rinse station in 582a.
– Rinse using the in foot-peddles of the bottle rinse station.
– Wearing a face shield and gloves.
– Cross out label with an ‘x’ and place in bins near the rinse station.
 Empty bottles of non-drain disposable solvent bottles
should be placed in rear of fume hood to allow bottle
to dry out, then put in a trash can.
 Bottles of silicon etch should be washed and placed in
marked bin in 582A for refilling.
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Chemical Waste Bottles
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Photoresist &
Spin Coatings
Residues from spin coating such as
aluminum foil, cleanroom wipes,
swabs, etc, that contain volatile
solvents should be disposed of in
the vented waste cans located at
msink1 and msink3.
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30
Chemical Exposures
 Remove the affected clothing.
 Rinse the exposed areas with water for 15 minutes using a
safety shower or eyewash.
 Notify staff after exposure using the posted Emergency
Contact Information.
 In an emergency, the deck hoses are usually your closest
source of water.
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Eye Exposure
 If eyes are exposed:
Flush eyes for at least15 minutes – NOT LESS!
– Use an eye-wash.
– Sinks have DI deck guns which can be used followed by an eye
wash.
– Contact staff for assistance or cal 911.
– Follow up eye exposures with visit to a medical professional.
 All eye exposures require a follow up visit to Tang Center or a hospital
emergency room.
Lab members should assist a colleague in the event of an eye exposure!
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32
HF Burns
 HF acts as an anesthetic, you may not feel
the burn until damage is already done.
 If exposed:
– Remove affected clothing, flush with cold water
for 15 minutes.
– Massage calcium gluconate ointment from safety
stations onto exposed area.
– Notify staff after exposure, using posted
Emergency contact information.
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TMAH
 TMAH is used in photoresist developer @ ~ 3%
 It is hazardous by ingestion, inhalation, skin
exposure or eye contact
 Exposure to concentrations > 15% may cause
respiratory or heart failure – a ganglion inhibitor
 Flush expose area with water for 15 minutes.
 Notify staff after exposure, using posted
Emergency contact information.
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Chemical Spills
 During staff hours, contact a staff member.
 Contain spills using the Spill Containment Kit
available at Safety Stations.
 Contact staff for assistance using the posted
emergency contact information posted at
every phone.
 Final spill cleanup must be done by trained
staff certified for spill cleanup.
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Toxic Metals
 General practices for handling metals:
–
–
–
–
–
–
–
–
Consider all metal dust as potentially hazardous
Minimize quantities
Protect bench top with disposable covers.
Confine material as you work
Change gloves when leaving the area
Solutions used for etching of toxic materials requires proper disposal
Confine dust - use dampened lab wipes to collect metal dust
Contact staff for proper disposal of cleaning materials contaminated with
toxic metals
– Mechanical cleaning should be done with fume hood at 200 ft per minute
face velocity and a HEPA vacuum
– Do not use N2 blowoff guns - use a HEPA vacuum
– New evaporation sources or sputter targets must be reviewed as Special
Chemicals
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Work with Gallium Arsenides or
other highly toxic metals must first
be reviewed with Bill Flounders!
Follow the same procedures as
outlined for: SPECIAL CHEMICALS
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Sharps & Dangerous Objects
 Dispose broken glassware in yellow trash pails labeled “broken
glass”.
 Dispose Si wafers in the blue Si wafer recycle bins.
 Dispose needles, razor blades, and other sharp objects in red
“SHARPS” bins.
 Mercury thermometers are banned from the lab.
 Contact lab staff in event of a mercury spill.
 Batteries and electronic waste disposal is via the NanoLab
office to assure proper disposal.
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Cylinder Gases
 Lab members are not allowed to handle compressed gas
cylinders.
 Corrosive and Toxic Gases are kept in the dedicated gas
vaults, room 399 and 599.
 Gases are stored in ventilated steel gas cabinets. Toxic
Gases are monitored by the Toxic Gas Monitoring system,
which will shut them off at source if leak is detected or if
HAZMAT alarm is pulled.
 Lab members are NEVER allowed in the gas and chemical
storage areas, rooms 399 and 599 without staff escort or
prior approval.
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Lasers
•
Lasers are allowed after review and approval of Bill Flounders (bill at
eecs.berkeley.edu).
•
More information on safe use of lasers at: www.ehs.berkeley.edu
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Ionizing Radiation Safety
MNL has 4 radiation producing machines and one radiation source.
Radiation Producing Machines
• LEO 1550 scanning electron microscope (RUA 2501)
• FEI 650 Nova Nano scanning electron microscope (RUA 2511)
• Crestec CABL-9510CC electron beam writer (RUA 2531)
• Siemans D5000 x-ray diffractometer (RUA 1501)
Radiation Source
• SemiTest SCA 2500 – Po210 (RUA 3631)
UC policy requires anyone working in the presence of such machines to read UC’s Radiation
Safety Guidelines for Non-Users.
http://nanolab.berkeley.edu/public/factsheets/radsafenonuser.pdf
This link is provided in the MNL chemical hygiene plan. To pass the MNL safety test you must
confirm that you have read and understand these guidelines.
Cryogens
 Review EH&S Cryogen fact Sheet before working with
cryogens.
 Liquid Nitrogen is stored in vacuum jacketed cylinders
called dewars.
 Hazards are from freezing burns and asphyxiation due
to sudden oxygen depletion.
 Wear gloves and goggles when transferring to a
smaller container.
 Use care to avoid spills to minimize damage to the
floor in the lab.
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Flooding in the Lab
 Search for the source of the leak and turn off the
supply valve.
 Use the squeegees located in the freight elevator
vestibule area to direct most water to floor drain.
 Use the wet vacuum located in the freight elevator
vestibule area to vacuum up any remaining water
from the floor.
 Notify a staff member and report the incident on
Mercury as a problem under facilities.
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Electrical Safety
 Report all electrical issues to staff.
 In event of electrocution, shutoff the power sources
at the east end of each chase.
 Use of power strips is regulated in the lab, see
Staff.
 Never use the ON/OFF, EMO or EPO buttons to
reboot tools. Such functions are for emergencies.
The use of ON/OFF, EMO/EPO functions runs the
risk of equipment damage.
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44
Lock out, Tag out
 If an equipment is labeled red (fatal) in
Mercury, do not attempt to use it or energize
it in any way.
 Watch for Engineer Photo ID tags on
equipment and follow the instructions on
these tags.
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Fire Prevention and Response
 Use care with heat lamps or when heating flammable
solvents:
– Use only digitally controlled hot plates.
– Always use a water bath to transfer heat.
In event of fire:
– Fire extinguishers are clean room “approved”.
– Fire extinguishers are located throughout the lab and near every door.
– You are not expected to fight fires. Use a fire extinguisher only if you are
feel safe doing so.
– You are expected to “Notify, Evaluate, Evacuate”.
– If clothes are involved use a safety shower.
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NanoLab Evacuation Routes
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NanoLab Assembly Area
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