IMT- Bucharest

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Proiecte de succes în cercetare - Abordarea

IMT în identificarea soluțiilor de finanțare la nivel european și național

Dr.Carmen Moldovan

Institutul Național de Cercetare dezvoltare pentru

Microtehnologie - IMT

Masa Rotunda - Solutii Financiare pentru Proiecte Energetice Viitoare, 20 iunie 2012

IMT- Bucharest

National Institute for Research and Development in Microtechnologies

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Mission

IMT Supervised by the National Authority for Scientific Research

( ANCS ) , Ministry of Education, Research, Youth and Sport ;

Mission : Integrating R&D with education and training and with support for industry ( services, technology transfer ) ; networking at national and international level innovation, in the field of micronanotechnologies and microsystems (RF- MEMS, photonics devices and circuits, sensors, bio-nano-info technologies, CNT and graphene based sensors and nanodevices, (bio)sensors, integrated nano-bio systems, microfluidics, microactuators).

Main applications : communications, automotive, biomedical, health, environment, energy, robotics

Training activities : master courses, internships, hands-on labs for students, PhD supervising and post-doc programs.

Research topics

The research laboratories of IMT-Bucharest are involved in joint research with international and national partners, including companies , based on a multidisciplinary approach, promoting the convergence of micro-nano-bio- info technologies . Main topics:

► MEMS based microsensors and actuators for bio-medical, environmental applications and robotics: pressure sensors, accelerometers, microgrippers

► RF-MEMS devices and circuits: design, modelling and manufacturing of dielectric membrane supported inductors, capacitors, filters and antennae based on silicon and GaAs micromachining; micromachined millimetre and sub millimetre wave receiver modules, SAW interdigitated traducers

► Photonic devices and MOEMS

(waveguides, optical couplers, µring filters and resonators; grating-based microstructures, tuneable interferometers based on movable micromirrors, optical sensors), photonic circuits for optical interconnections

The research laboratories of IMT-Bucharest are also developing:

► CNT and graphen based micro-nanostructures for sensing and interconnections

► microfluidic devices

► biochips for biological materials investigation and detection (proteins, DNA, enzymes) on various substrates (silicon, glass, polymers), microarrays, biosensors

► silicon nanoelectrode arrays , porous silicon layers (El, PL and bio-active properties); field emission nanostructures;

► magnetic nanostructures

Processing chain

Silicon Wafer

Processed wafer

Wire bonding

(part of packaging process)

Photolitographic mask

Testing

Examples

GaN SAW structure with fingers and interdigits 300 nm wide resonating at a frequency close to 4 GHz

Experimental PCs optical waveguide divisor configuration integrated with an optical waveguide, using EBL nanolithography

MSM photodetector based on subwavelength interdigitated electrodes

Ground speed sensor at 77 GHz

Organization

Department for Scientific and Technological

Research

Technical Department

The present R&D activities of the institute are structured 4 directions of research corresponding to the 4 “ centers ” , focusing the activity of 10 R&D laboratories .

This new structure is an implementation of the medium-term strategy of the institute (revised in October 2009) and a followup of funding of two projects financed by structural funding for competitive development (POS CCE).

Organization

Department for Scientific and Technological Research

4 centers, grouping 10 R&D laboratories

► MIMOMEMS: European Research Centre of Excellence “ Micro- and nano systems for radiofrequency and photonics ”

► CNT- IMT: Centre of Nanotechnologies ” (under the aegis of the

Romanian Academy)

► CINTECH: Research Centre for integration of technologies ” (micronano-biotechnologies)

► CENASIC: Research Centre for nanotechnologies and carbon – based nanomaterials ”

Technological Department

Clean rooms – class 1000, and 10 000; Mask shop including: pattern generator – DWL 66fs Laser Lithography, EBL: Electron Beam

Nanolitography from RAITH

Infrastructure: IMT-MINAFAB views

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IMT and European Cooperation

IMT was coordinating the MEMSWAVE project (1998-2001), the first European project coordinated by a country outside EU (at that time), which was nominated from IST in 2002 for the

Descartes Prize ( the best European R&D project ).

IMT coordinated 3 SSA-ACC FP6 Projects : ROMNET ERA,

MINAEAST-NET, MINOS-EURONET facilitating the participation of NMS and ACC organisations to EU programmes and other activities in the field of micro-nanosystems

► IMT was involve in 15 FP6 European projects

(STREPs, IPs, NoE, CA, SSA, Marie Curie RTN, Leonardo da

Vinci) priorities IST (ICT) and NMP

► IMT was and is involved in 11 FP7 projects (IPs, Streps )

► IMT is involved in 4 ENIAC (Nanoelectronics) projects

► IMT was and is involved in 5 MNT ERA-NET projects and

1 COST project

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Research projects: FP6,

FP7+related project distribution

FP6, FP7 and related projects

FP6

FP7

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Research projects: FP6,

FP7+related project distribution

started in 2011 and 2012 started projects related FP 7 projects

FP 7 projects (1)

REGPOT - FP7 project coordinated by IMT-BUCHAREST

• MIMOMEMS- European Centre of Excellence in Microwave, Millimeter Wave and

Optical Devices, based on Micro-Electro-Mechanical Systems for Advanced

Communication Systems and Sensors , REGPOT call 2007-1, Contract no. 202897,

2008-2011

C oordinator: IMT-Bucharest , Dr. Alexandru Muller ( alexandru.muller@imt.ro

)

IP projects

• SMARTPOWER- Smart integration of GaN & SiC high power electronics for industrial and RF applications " , IP FP7-ICT-2011.3.2, contract no. 288801, 2011 - 2014

Coordinator: Thales SA - Thales Research & Technology, France

IMT role: partner, Dr. Alexandru Muller ( alexandru.muller@imt.ro

)

NANOTEC- Nanostructured materials and RF-MEMS RFIC/MMIC technologies for highly adaptive and reliable RF systems ", IP FP7-ICT-2011.3.2, contract no. 288531,

2011 - 2014

Coordinator: Thales SA - Thales Research & Technology, France

IMT role: partner, Dr. Alexandru Muller ( alexandru.muller@imt.ro

)

FP 7 projects (2)

CP- IP projects

FlexPAET- Flexible Patterning of Complex Micro Structures using Adaptive

Embossing Technology, IP, NMP, 2008-2010

Coordinator: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. Fraunhofer Institut für Produktionstechnolgie (IPT), Germany, Dr. Eng.

Christian Wenzel

IMT role: partner, Dr. Dana Cristea ( dana.cristea@imt.ro

)

• NanoValid- Development of reference methods for hazard identification, risk assessment and LCA of engineered nanomaterials, FP7 Large-scale integrating Collaborative Project 20112015, IP, NMP. Coordinator NordMiljö AB

(NOMI), Sweden, Dr. Rudolf Reuther

IMT role: partner, Dr. Mihaela Kusko ( mihaela.kusko@imt.ro

)

FP 7 projects (3)

CP- SMALL projects

• PARCIVAL- Partner Network for a Clinically Validated Multi-Analyte Lab-on-a-Chip

Platform,

FP7 HEALTH.2011.2.3.1-4, 2011 - 2014

Coordinator: Guus Simons, PathoFinder BV, Netherlands

IMT role: partner, Dr. Carmen Moldovan ( carmen.moldovan@imt.ro

)

NANOSUSTAIN- Development of sustainable solutions for nanotechnology-based products based on hazard characterization and LCA, FP7-NMP-ENV-2009, STREP ,

2010-2013.

Coordinator NordMiljö AB (NOMI), Sweden, Dr. Rudolf Reuther

IMT role: partner, Prof. Dan Dascalu, ( dan.dascalu@imt.ro

), http://www.nanosustain.eu/

MEMS-4-MMIC- Enabling MEMS-MMIC technology for cost-effective multifunctional

RF-system integration , STREP, FP7-ICT-2007-2, Contract no. 204101, 2008-2011

Coordinator: IMST GmbH

IMT role: partner, Dr. Dan Neculoiu ( dan.neculoiu@imt.ro

), MEMS-4-MMIC

CATHERINE- Carbon nAnotube Technology for High-speed nExt-geneRation nano-

InterconNEcts , STREP, FP7-ICT-2007.8.1, Contract no. 216215, 2008-2011

Coordinator: Consorzio Sapienza Innovazione, Italy, Dr. Stephen Trueman

IMT role: partner, Adrian Dinescu ( adrian.dinescu@imt.ro

), http://www.catherineproject.eu/

FP 7 projects (4)

CSA project

• EuroNanoBio- European scale infrastructure in NanoBiotechnology, CSA,

NMP, 2009- 2010

Coordinator: CEA, France, Dr. Patrick Boisseau

IMT role: partner, Prof. Dan Dascalu ( dan.dascalu@imt.ro

)

INCO project

• MOLD NANONET- Enhancing the capacities of the ELIRI Research Institute in applied research to enable the integration of Moldova in the European

Research Area on the basis of scientific excellence , FP7-INCO-2011-61, 2011-

2014, Coordinator ELIRI, R. Moldova

IMT role: partner, Dr. Mircea Dragoman ( mircea.dragoman@imt.ro

)

Related FP 7 projects

Participation in JTU ENIAC:

SE2A- Nanoelectronics for Safe, Fuel Efficient and Environment Friendly

Automotive Solution

ENIAC2008-1, Coordinator: NXP Semiconductor Netherlands BV, The Netherlands.

IMT role: partner, Dr. Alexandru Muller ( alexandru.muller@imt.ro

).

MERCURE- Micro and Nano Technologies based on wide band gap materials for future transmitting receiving and sensing systems

ENIAC2009-1, Coord: Thales Research and Technology, France.

IMT role: partner, Dr. Alexandru Muller ( alexandru.muller@imt.ro

).

NANOCOM- Reconfigurable Microsystem Based on Wide Band Gap Materials,

Miniaturized and Nanostructured RF-MEMS

Coordinator Thales Research and Technology, France, Dr Afshin Ziaei

IMT role: partner, Dr. Alexandru Muller ( alexandru.muller@imt.ro

).

MotorBrain- Nanoelectronics for Electric Vehicle Intelligent Failsafe Drive Train;

ENIAC-2010-1, Coordinator: Infineon AG, Germany

IMT role: partner, Dr. Gabriel Moagar-Poladian ( gabriel.moagar@imt.ro

).

COST project

• Novel Gain Materials and Devices Based on III-V-N Compounds

Contract: Action MP0805, 2009-2012

Coordinator: University of Essex, UK, Prof. N. Balkan

IMT role: partner, Dr. Alexandru Muller ( alexandru.muller@imt.ro

)

Other International Partnerships

 Apart of cooperation with dozens of organizations from Europe in EU projects IMT- Bucharest was and is involved in a great number of bilateral inter-guvernamental European projects (especially with

Italy, France, Belgium, Greece, Rep. Moldova, Slovakia)

 Outside Europe , IMT- Bucharest has also bilateral guvernamental cooperation with:

South Africa : Univ. of Pretoria

Korea KERI Changwon

Japan Institute of Advanced Energy, Kyoto University

Bilateral Agreement- institute to institute with :

- KETI (Korea Electronics Technology Institute), Korea

- Sungkyunkwan University, Suwon, Korea

- Inst. of Electrical Eng. and Nanotechnology “D.Ghitu” Rep.Moldova

Université catholique de Louvain -ICTM Institute, Louvain La Neuve,

Belgium

The experience of IMT in cooperation with industry in European projects

 Thales Research and Technology (TRT), Paris in

- FP7: SMARTYPOWER, NANOTEC,

ENIAC : MERCUR, NANOCM,

 NXP Semiconductor Netherlands BV (Philips) in: ENIAC :SE2A

 IMST GmbH, Germany in: FP7 MEMS4MMIC

MOTORBRAIN; Infineon Technologies AG Germany, Siemens Germany

ZF Friedrichshafen AG Germany, AVL List GMBH Austria,

NXP Semiconductors BV Netherlands, Volkswagen AG, Germany

 Scienion, Berlin, Germany, ERANET – Platform for Pesticide detection

 EADS , Germany, Askion (Germany), Rohrer (Switzerland) - partners in

PARCIVAL FP7 project

Cooperation with multinational companies, from Romania

► Honeywell Romania

Agreement of cooperation, IMT offering scientific service

Access to technology and host of equipments

► INFINEON Technologies Romania

Partners in ENIAC project : MOTORBRAIN: Nanoelectronics for Electric

Vehicle Intelligent Failsafe Drive Train;

Coordinator: Infineon AG, Germany IMT role: partner

Organization of common actions in Romania as:

NanoElRei Summit: „NanoElectronics in Romania: Research-educationindustry ” : 2010, 2011

Workshop “ New trends in Automotive electronics and semiconductor ” satellite event to CAS 2010

Co-organizer of the European Semiconductor Device Research Conference

(EUROPEAN SOLID –STATE DEVICE RESEARCH CONFERENCE – ESSDERC) and the European Conference on Semiconductor Circuits (EUROPEAN SOLID –

STATE CIRCUITS CONFERENCE – ESSCIRC) 2013

NATIONAL PROJECTS

30 Proiecte nationale ( 2004-2012) Proiecte coordonate

Partener

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16 16

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NATIONAL PROJECTS (2)

PN II Parteneriate

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Inovare TT

Include proiecte RELANSIN, Infratech, Inovare

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Proiecte coordonate

Partener

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Proiecte coordonate

Partener

Latest results

Guardian Angels FET Flagship, EU

Zero Power Systems

The Guardian Angels systems will gather energy wherever it can be found, in the environment surrounding us. The goal of this “zero power” approach is to provide complete autonomy by integrating the most recent technology; light, vibrations and thermal gradients can be used to power electronic circuits.

Finally, Guardian Angels will incorporate the latest energy storage technologies

(such as green batteries), for situations in which energy is just not available.

59 EU PARTNERS

Latest results (2)

5 Projects

IDEAS

New PNII Projects – 2012

6 Projects

Capacities

– Co-financing the running EU Projects

IMPORTANT TIPS

 Networking

 Building on Excellent results in running project

 Strategic partnership at national and EU level

 Working with major players - industry and academics

 Information – Infodays, conferences, web

 Strategic decision and analysis – what call should I follow?

 Realistic estimation of chances

 Visibility and recognition at EU level

 Experience in proposal writing

 European topics (EU)

 Good infrastructures, EU level

CONCLUSIONS

IMT succeeded to survive to the

Crisis

effects and cutting of funds

EU projects – important source of income and visibility

National Projects – strategy for institute sustainability

THANK YOU!

carmen.moldovan@imt.ro

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