IEEE Robotics and Automation Society
Technical Committee (TC) on Semiconductor Manufacturing Automation
Technical Committee Meeting
At the 10th IEEE International Conference on
Automation Science and Engineering (IEEE CASE 2014)
Venue: T2-Narcissus, Fullon Hotel Danshuei, Taipei, Taiwan
Time: 6:00 – 6:30 pm, Tuesday, August 19, 2014
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
Meeting Overview
• Review of TC facts
– TC data on membership, etc.
– Face-to-face meetings
– Publication and conference involvement
• TC activities
–
–
–
–
–
TC co-Chairs
Special issues
Archive presentations from CASE 2014
T-ASE discussion
Next services to provide…
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
2
Technical Committee (TC) Brief Data
• URL: http://xs3d.kaist.edu/TC-SMA
• Founding Date: August 1, 2001
• Scope:
– To promote basic and applied research in semiconductor manufacturing
and automation
– To provide a forum for exchanging ideas among semiconductor
manufacturing researchers and engineers
– To facilitate related scientific publications and events (such as special
conference sessions, workshops, symposia, and special journal issues)
• Membership:
– 300 TC members
– All the major institutes and companies across Americas, Europe, and
Asia
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
3
Committee Board
Honorary Board of Chairmen
•
•
•
•
•
Thomas Wen-Yao CHEN, Director, Technology System Integration Division, TSMC, Taiwan
MuDer JENG , IEEE Fellow, Professor, Department of Electrical Engineering, National Taiwan Ocean University
Dr. Simon YANG, Former COO, SMIC and Former Senior VP & CTO, Chartered Semiconductor Manufacturing Co.
Dr. Douglas Chen-Hua YU, Senior Director, Advanced Module Technology Development Division, TSMC
MengChu ZHOU, IEEE Fellow, Professor, Dept of Electrical and Computer Eng, New Jersey Institute of Technology
Co-Chairs
•
•
•
Chen-Fu CHIEN, Distinguished Professor, National Tsing Hua University, Taiwan
Mike Tao ZHANG, President, Hoku Materials, USA
James R. MORRISON, Associate Professor, Dept of Industrial and Systems Engineering, KAIST, South Korea
Academy Chair: Prof. Stanley B. Gershwin, Dept of Mechanical Engineering, MIT
Industry Chair: Dave Gross, Director, Global Foundries
Membership Chair:
Conference Chair: Shi-Chung Chang, Professor, Dept of Electrical Engineering, National Taiwan University
Publication Chair: Prof. Ruey-Shan Andy Guo, Professor, Dept of Business Administration, National Taiwan University
Regional Chair, China: Prof. Han Ding, Professor, School of Mechanical Engineering, Shanghai Jiao Tong University, China
Regional Chair, Europe: Dr. Arieh Greenberg
Regional Chair, Israel: Dr. Adar Kalir, Principal Engineer, Intel Corporation
Regional Chair, Japan: Kenji Miyake, PMT Corporation
Regional Chair, Korea: Prof. Tae-Eog Lee, Professor and Chair, Dept of Industrial Eng, KAIST, South Korea
Regional Chair, Taiwan: Shi-Chung Chang, Professor, Dept of Electrical Engineering, National Taiwan University
Regional Chair, U.S.A.: Prof. John W. Fowler, Professor and Chair, Dept of Supply Chain Management, Arizona State University,
USA
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
4
Face-to-Face TC Meetings
•
Historically we hold about 2 meetings per year
Date
Location
2006/09
Tokyo, Japan
2006/10
Shanghai, PRC
2007/04
Rome, Italy
2007/09
Arizona, USA
2008/08 Washington, DC, USA
2008/10
Tokyo, Japan
2009/08
Bangalore, India
2009/12
Texas, USA
2010/07
California, USA
2010/08
Toronto, Canada
2011/08
Arizona, USA
2011/12
Arizona, USA
2012/8
Seoul, Korea
2012/12
Berlin, Germany
2013/08
Madison, WI, USA
•
•
Conference
IEEE/SEMI Int’l Symposium on Semiconductor Manufacturing (ISSM)
2nd IEEE Conference on Automation Science and Engineering (CASE)
IEEE Int’l Conference on Robotics and Automation (ICRA)
3rd IEEE Conference on Automation Science and Engineering (CASE)
4th IEEE Conference on Automation Science and Engineering (CASE)
IEEE/SEMI Int’l Symposium on Semiconductor Manufacturing (ISSM)
5th IEEE Conference on Automation Science and Engineering (CASE)
2009 MASM within WinterSim 2009
IEEE/SEMI Advanced Semiconductor Manufacturing Conf. (ASMC)
6th IEEE Conference on Automation Science and Engineering (CASE)
5th Multidisciplinary International Scheduling Conference (MISTA)
2011 MASM within WinterSim 2011
8th IEEE Conference on Automation Science and Engineering (CASE)
2012 MASM within WinterSim 2012
9th IEEE Conference on Automation Science and Engineering (CASE)
TODAY: IEEE CASE 2014, August 2014, Taipei, Taiwan
NEXT MEETING: MASM, December 2014, Savannah, GA, USA
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
5
Most Recent TC Meeting
(during CASE 2014, Taipei, Taiwan)
Attending (from left to right): Cheng-Hung Wu (Professor, National Taiwan Univ, Taiwan), John
Kuan (Infineon), Jei-Zheng WU (Professor, Soochow Univ, Taiwan), Jonathan Chang
(Director, Infineon), Lars Moench (Professor, Univ of Hagen, Germany), Chen-Fu Chien
(Professor, National Tsing Hua Univ, Taiwan), Kan Wu (Professor, NTU, Singapore), ChiaYen Lee (Professor, National Cheng Kung Univ, Taiwan), Jakey Blue (Ecole des Mines St.
Etienne, France), James R. Morrison (Professor, KAIST, South Koera), Gian Antonio Susto
(Researcher, National University of Ireland, Ireland), Sean McLoone (Professor, Queen’s
University of Belfast, Ireland), Claude Yugma (Professor, Ecole des Mines St. Etienne,
France), Simone Pampuri (Researchers, National University of Ireland, Ireland), Ja-Hee Kim
(Professor, SNUT, South Korea), Li Li (Professor, Tongji Univ, China), Sylvain Housseman
(PhD candidate, Ecole des Mines St Etienne, France), Junghoon Kim (PhD candidate, KAIST,
South Korea), Young Jae Jang (Professor, KAIST, South Korea)
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
6
TC Meeting (during IEEE CASE 2014)
TC Meeting (during IEEE CASE 2013)
Attending (from left to right): Cheng-Hung Wu (Professor, National Taiwan Univ, Taiwan),
John Kuan (Infineon), Jei-Zheng WU (Professor, Soochow Univ, Taiwan), Jonathan
Chang (Director, Infineon), Lars Moench (Professor, Univ of Hagen, Germany),
Chen-Fu Chien (Professor, National Tsing Hua Univ, Taiwan), Kan Wu (Professor,
NTU, Singapore), Chia-Yen Lee (Professor, National Cheng Kung Univ, Taiwan),
Jakey Blue (Ecole des Mines St. Etienne, France), James R. Morrison (Professor,
KAIST, South Koera), Gian Antonio Susto (Researcher, National University of
Ireland, Ireland), Sean McLoone (Professor, Queen’s University of Belfast, Ireland),
Claude Yugma (Professor, Ecole des Mines St. Etienne, France), Simone Pampuri
(Researchers, National University of Ireland, Ireland), Ja-Hee Kim (Professor, SNUT,
South Korea), Li Li (Professor, Tongji Univ, China), Sylvain Housseman (PhD
candidate, Ecole des Mines St Etienne, France), Junghoon Kim (PhD candidate,
KAIST, South Korea), Young Jae Jang (Professor, KAIST, South Korea)
Attending (from left to right): Sean McLoone (Professor, Queen’s University-Belfast,
Ireland), Andrea Matta (Professor, Polytecnico di Milano, Italy), Liang Zhang (Univ.
Wisconsin-Milwaukee, USA), Jingshan Li (Professor, Univ. Wisconsin-Madison, USA),
Lady #1 (unidentified – please send me your info), Jingang Yi (Professor, SUNJ
Rutgers, USA), Gian Antonio Susto (Researcher, Natl Univ Ireland-Maynooth, Ireland),
Peter Luh (Professor, Univ Connecticut, USA), Israel Tirkel (Ben Gurion Univ, Israel),
Jesus Jimenez (Professor, Texas State University, USA), Qais Hatim AlKhazraji (PhD
candidate, Univ Pennsylvania, USA), Li Li (Professor, Tongji Univ, China), Bengt
Lennartson (Professor, Chalmers Univ, Sweden), Fei Qiao (Professor, Tongji Univ,
China), Dean Grosbard (Engineer, Intel, Israel), James R. Morrison (Professor, KAIST,
South Korea), Ruth Shilman (PhD candidate, Ben Gurion Univ, Israel), Shi-Chung
Chang (Professor, Natl Taiwan Univ, Taiwan), Kar-Way Tan (Professor, Singapore
Management Univ, Singapore), Bouhnik Sylvain (Engineering, Micron, Israel), FanTien Cheng (Professor, Natl Cheng Kung Univ, Taiwan), Tongdan Jin (Professor, Texas
State Univ, USA)
TC Meeting (during MASM 2012)
TC Meeting (during IEEE CASE 2012)
Attending (from left to right): Ken Fordyce (Engineer, IBM, USA), Argon Chen (Professor, NTU,
Attending (from left to right): Thomas Ponsignon (Staff Engineer, Infineon, Germany), Gottfried Schmid
Taiwan), Rong Huei Chen (NTU, Taiwan), Toshiya Kaihara (Professor, Kobe University, Japan),
(IT Director, Infineon, Germany), Claude Yugma (Professor, EMSE, France), Lars Moench (Professor,
Michael Hassoun (Professor, Ariel University Center, Israel), Stephan Deuzere-Peres (Professor,
University of Hagen, Germany), Chengbin Chu (Professor, Ecole Centrale Paris, France), Gloria Rodrigues
EMSE, France), Israel Tirkel (Professor, Ben-Gurion University, Israel), Hans Ehm (Director,
(Research Engineer, STMicroelectronics, PhD candidate, EMSE, France), James R. Morrison (Professor,
Infineon, Germany), Claude Yugma (Professor, EMSE, France), Jesus Jimenez (Professor, Texas
KAIST, Korea), Fan-Tien Cheng (Professor, NCKU, Taiwan), Tae-Eog Lee (Professor, Chair, Dean,
State University, USA), Frank Lehmann (Engineer, Infineon, Germany), Konstanze Knoblich
KAIST, Korea), Mengchu Zhou (Professor, NJIT, USA), Todor Dimitrov (Engineer, Franhofer IOSB,
(Engineer, Infineon, Germany), Gloria Rodrigues (Research Engineer, STMicroelectronics, PhD
Germany), Naiqi Wu (Professor, Guangdong University fo Technology, China), Adar Kalir (Principal
candidate, EMSE, France), Andreas Klemmt (Engineer, Infineon, Germany), Mathias Duemmler
Engineer, Intel, Israel), Gian Antonio Susto (PhD candidate, University of Padova, Italy), Jingshan Li
(Engineer, Infineon, Germany), Pascal Etman (Professor, TU/e, Netherlands), Roland Schelasin
(Professor, University of Wisconsin-Madison, Kyungsu Park (PhD candidate, KAIST, Korea), Woosung
(Engineer, Texas Instruments, USA), Lars Moench (Professor, University of Hagen, Germany),
Kim (PhD candidate, KAIST, Korea), Byungduk Song (PhD candidate, KAIST, Korea), Hong Yue Jin (MS
IEEE Sematech/ISMI,
RAS Technical
Committee
on Semiconductor
Manufacturing
Automation
Julian Richards (Program Director,
USA), Camera
Operator (not shown):
James
candidate, KAIST, Korea), Jungho Park (MS candidate, KAIST, Korea)
R. Morrison (Professor, KAIST,
Korea)
http://xs3d.kaist.edu/TC-SMA
TC Meeting (during MASM 2011)
TC Meeting (during MISTA 2011)
Attending (from left to right):
1st Row: James Morrison (Professor, KAIST, South Korea), G1, G2, John Fowler (Professor, ASU, USA),
G3, Attila Lengyel, Young Jae Jang (Professor, KAIST, South Korea), G4, Shekar Krishnaswamy (AMAT,
USA)
2nd Row: G5, G6, G7, G8, Claude Yugma (Professor, EMSE, France), Tobias Uhlig (PhD Candidate,
Dresden University of Technology, Germany), G9, Jingshan Li (Professor, UW-Madison, USA), Pascal
Etman (Professor, TU/e, Netherlands),
3rd Row: G10, G11, G12, G13, G14, G15, Lars Monch (Professor, University of Hagen, Germany), G17,
Oliver Rose (Dresden U Tech., Germany), Stéphane Dauzère-Pérès (Professor, EMSE, France)
Detlef Pabst (Engineer, Global Foundaries, PhD Candidate ASU, USA), Felix Cheng
(PhD Candidate, ASU, USA), Todor Dimitrov (Engineer, Franhofer IOSB, USA),
Tobias Uhlig (PhD Candidate, Dresden University of Technology, Germany), John
Fowler (Professor, ASU, USA), Ken Fordyce (Engineer, IBM, USA), Lars Monch
(Professor, University of Hagen, Germany), James Morrison (Professor, KAIST,
South Korea), Ketan Khowala (Engineer, Apple, PhD Candidate, ASU, USA)
TC Meeting (during IEEE CASE 2010)
TC Meeting (during IEEE/SEMI ASMC 2010)
Attending (from left to right):
Attending (from left to right):
Attending (from left to right):
Zubin Mevawalla (Ph.D. candidate, Georgia Tech), Jan Rothe (Global Foundries),
Wei (Victor) Feng (Ph.D. candidate, Tsinghua University) , Li Zheng (Prof.,
Haim Albalak (Head, Tefen), James Morrison (Prof., KAIST), Brett Williams
Tsinghua University), Jingshan Li (Prof., University of Wisconsin-Madison),
(Engineer, ON Semiconductor), Lynn Yuwen Zhang, Ph.D. (Sr. Engineer, Intel),
Chandresh Mehta (Prof., University of Michigan), Gentleman #1, Andrea Schirru
Darryl Peters (Confluence), Fan-Tien Cheng (Prof., National Cheng Kung
(Ph.D. candidate, University of Pavia, Italy), Fan-Tien Cheng (Prof., National
University), Dave Gross (Director, Global Foundries), Claude Yugma (Prof., Ecole
Cheng Kung University), James Morrison (Prof., KAIST), Gentelman #2,
Nationale Superieure des Mines de Saint-Etienne), Agnes Roussy (Prof., Ecole
Gentleman #3, Naiqi Wu (Guangdong University of Technology), Cpt. Younghun
Nationale
Superieure des Mines
de Saint-Etienne), Kyungsu Park (Ph.D. candidate,
IEEE RAS Technical Committee on Semiconductor Manufacturing
Automation
Ahn (MS candidate, KAIST), Kyungsu Park (PhD candidate, KAIST)
KAIST),
Gyoungwon
Park, Ph.D. (Manager, Finisar)
http://xs3d.kaist.edu/TC-SMA
TC Meeting (during IEEE CASE 2009)
TC Meeting (during ISSM 2008)
First Row (from left):
Gentleman #1, Prof.Jingshan Li (U Kentucky) , Prof. Fan-Tien Cheng (NCKU,
Taiwan), Prof. James R. Morrison (KAIST), Prof. Min-Hsiung Hung (National
Defense U, Taiwan), Prof. Shi-Chung Chang (National Taiwan U), Prof. Argon Chen
(National Taiwan U), Prof. Chih-Min Fan
First Row (from left):
Gentleman #1, Gentleman #2, Prof. James R. Morrison (KAIST), Mike Zhang (Sr.
Manager, Spansion), Peter van der Meulen (Chairman and Founder, Blue Shift
Technologies), Gentleman #3, Prof. Shi-Chung Chang (National Taiwan University)
Please send e-mail to james.morrison@kaist.edu to identify
yourself (we’ll update the photo caption).
TC Meeting (during IEEE CASE 2008)
Please send e-mail to james.morrison@kaist.edu to identify yourself
(we’ll update the photo caption).
TC Meeting (during IEEE CASE 2007)
Second Row (from left):
Prof. Jiangshan Li (U Kentucky), a gentleman coming late, Prof. Oliver Rose
(Dresden U Tech., Germany), Prof. Leon McGinnis (Georgia Tech), Kan Wu
(Georgia Tech), President van der Meulen (Blueshift), General Manager David Aires
(Intel), Vice President John Behnke (Spansion), Lance Rist (ISMI/SEMATECH),
Naiping Keng (Intel), First Row (from left):
9
Deputy
Director
Chen-Fu
(TSMC, Taiwan), Mike Zhang (Spansion), Sr.
IEEE RAS Technical Committee on Semiconductor Manufacturing Chien
Automation
Director Eric Englhardt (Applied Materials), Prof. Fan-Tien Cheng (NCKU, Taiwan)
http://xs3d.kaist.edu/TC-SMA
Publication Involvement (1)
•
Special Issue on Automation Science and Engineering, IEEE Robotics and Automation
Magazine
–
•
Special Issue on eManufacturing in the Semiconductor Industry, IEEE Transactions on
Automation Science and Engineering (T-ASE)
–
•
–
Chen-Fu Chien, Stephane Dauzere-Peres, Milind Dawande, Han Ding, James Morrison, Jeff Pettinato,
Jingang Yi (Guest Editors)
32 papers submitted; published Jan 2011
Special Issue on Automation in Green Technology for IEEE Transactions on Automation
Science and Engineering (T-ASE)
–
–
•
Thomas Chen, Mike Tao Zhang, Chen-Fu Chien, John Fowler, and George Shanthikumar (Guest
Editors); 37 papers submitted; published in Oct 2007
Special Issue on Equipment and Operations Automation in the Semiconductor Industry, IEEE
Transactions on Automation Science and Engineering (T-ASE)
–
•
Mike Tao Zhang (Guest Editor); Published in Dec 2006; 3 articles on semiconductor manufacturing
Jingshan Li, James R. Morrison, Mike Tao Zhang, Masaru Nakano, Stephan Biller, Bengt Lennartson
(Guest Editors)
Publication scheduled 2013
Special Issue on Selected Papers from CASE 2012 and MASM 2012 for Computers and
Operations Research (C&OR)
–
–
Lars Moench (Lead Guest Editor), Argon Chen, Andy Myoungsoo Ham, James R. Morrison (Guest
Editors)
To appear end 2014 or early 2015!
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
10
Publication Involvement (2)
•
Special Issue for Computers & Industrial Engineering on “Manufacturing Intelligence and
Automation in Semiconductor Industry”.
–
–
•
Special Issue of the Journal of Industrial Engineering: Theory, Applications and Practice on
“The Roles of Industrial Engineers in the Semiconductor Industry”.
–
–
•
TC co-chair Chen-Fu Chien serves as Lead Guest Editor, TC Member Lars Moench servers as Guest
Editor and TC Member Jei-Zheng Wu serves as Guest Editor.
Paper submission deadline September 30, 2014.
Special Issue of Flexible Services and Manufacturing Journal on “Big Data Analytics for Digital
Decisions in Services and Manufacturing”.
–
–
•
TC co-chair Chen-Fu Chien serves as Lead Guest Editor and TC co-chair James R. Morrison serves as
Guest Editor.
Paper submissions deadline October 31, 2014.
TC co-chair Chen-Fu Chien serves as Lead Guest Editor.
Paper submissions deadline March 31, 2015.
Considering a Special Issue on Automation for Next Generation High Technology
Manufacturing (with a focus on 450 mm wafer manufacturing), IEEE Transactions on
Automation Science and Engineering (T-ASE)
– Candidates for Guest Editors?
– Publication target TBD
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
11
Conference Involvement (1)
•
IEEE Conference on Automation Science and Engineering, Shanghai, 2006
–
–
–
•
18th IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Stresa, Italy, June 11-12, 2007
–
•
Thomas Chen (Steering Committee member)
4th Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing, Miami, Florida, USA, Dec. 2008.
–
•
Shi-Chung Chang (Program Committee)
Joint symposium of "AEC/APC-Asia 2008" and "e-Manufacturing & DFM Symposium 2008", HsinChu, Taiwan, Nov.
2008.
–
•
Mengchu Zhou (General Chair). Mike Tao Zhang (Steering Committee member)
2008 International Symposium on Semiconductor Manufacturing, Tokyo, Japan, Oct.2008.
–
•
Mike Tao Zhang (Program Chair); Intel Fellow Dev Pillai (Keynote Speaker)
John Fowler, Chen-Fu Chien, Oliver Rose, and James Wuerfel (Co-Chairs): The 2007 Int’l Conference on Modeling and
Analysis of Semiconductor Manufacturing (MASM 2007) – as a part of IEEE CASE 2007
4th IEEE Conference on Automation Science and Engineering, Washington DC, USA, August 2008.
–
•
Thomas Chen and MuDer Jeng (Steering Committee members)
IEEE Conference on Automation Science and Engineering (IEEE CASE 2007), Phoenix, USA, Sept 2007
–
–
•
Dave Gross (Conference Co-Chair).
IEEE/SEMI eManufacturing Symposium, Taipei, Taiwan, June, 2007
–
•
Invited Session on Semiconductor Manufacturing: Fan-Tien Cheng, CC Huang, Naiqi Wu, and Mike Tao Zhang (Session
Co-Chairs); 14 papers accepted
Tech tours to Intel and Semiconductor Manufacturing Int'l Company (SMIC): Mike Tao Zhang (Organizer); 30 people
joined
Tutorial/Workshop on eManufacturing for the Semiconductor Industry: Fan-Tien Cheng, Min-Hsiung Hung, Jonathan
Chang, and Mike Tao Zhang (Organizers)
John Fowler and Chen-Fu Chien (Conference Chairs). Mike Tao Zhang (Int’l Advisory Committee member).
Joint 20th Advanced Semiconductor Manufacturing Conference and 2009 International Symposium on Semiconductor
Manufacturing, Berlin, Germany, May 2009.
–
Shi-Chung Chang (Program committee)
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
12
Conference Involvement (2)
•
10th International Conference on Automation Technology (Automation 2009), Tainan (Taiwan), June 2009.
•
5th
–
Meng-Chu Zhou and Mike Tao Zhang (Int’l Advisory Committee members)
IEEE Conference on Automation Science and Engineering, Bangalore, India, Aug 2009
–
–
–
•
2009 International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), Austin, Texas, Dec 2009
–
–
•
21st
–
–
•
Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, San Francisco, USA, July 2010
Special session on Reducing Cost and Maximizing Equipment Productivity, co-chair James Morrison
Shi-Chung Chang (Technical Committee)
Special session on Green Tech Automation, chairs James Morrison and Jingshan Li
Semiconductor Manufacturing session chaired by James Morrison and Jingshan Li
5th MISTA
–
–
–
•
James Morrison (Program Committee)
6th Annual IEEE CASE 2010
–
–
•
Shekar Krishnaswamy, Scott Mason (Conference Organizers)
Lars Mönch, Stephane Dauzere-Peres, Oliver Rose (Track Chairs)
IEEE International Conference on Robotics and Automation, Anchorage, Alaska, May 2010
–
•
Mike Tao Zhang, MengChu Zhou (Steering Committee). Tae-Eog Lee (Track Co-Chair), James Morrison (Track Co-Chair).
Shi-Chung Chang, MuDer Jeng, Wai Kin Victor Chan, Shengwei Ding, Fei Qiao, Naiqi Wu, Jingang Yi (Program Committee).
Shi-Chung Chang and Argon Chen, organize special session on Yield Symptom Identification
John Fowler (Conference Organizer)
Ken Fordyce (Plenary Speaker)
Focus session on Semiconductor Scheduling chaired by James Morrison
7th MASM (within Wintersim 2011)
–
–
Stephane Dauzere-Peres, John Fowler (Conference Organizers)
Lars Monch, James Morrison (Track Chairs)
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
13
Conference Involvement (3)
•
•
8th IEEE Conference on Automation Science and Engineering (CASE 2012), Seoul, Korea
–
Steering Committee: Mengchu Zhou, Mike Tao Zhang
–
Organizing Committee: Tae-Eog Lee (Award Chair), James R. Morrison (Workshop Chair)
–
Technical Program Committee: Fan-Tien Cheng (Information Automation)
–
Conference Editorial Board: Wai Kin Victor Chan (Editor), Fan-Tien Cheng (Associate Editor), Jingshan Li (Associate Editor),
James R. Morrison (Associate Editor), Jingang Yi (Associate Editor), Claude Yugma (Associate Editor), many reviewers
–
Plenary Talk: Tae-Eog Lee
–
4 special sessions (22 papers in total): “Process Control Automation”, Chair Fan-Tien Cheng, co-Chair James R. Morrison,
“Petri Nets in Automation”, co-Chair Mengchu Zhou, “Scheduling Methods for Semiconductor Manufacturing,” Chair Lars
Moench, co-Chair Claude Yugma, Modeling, Analysis and Operation of High Technology Manufacturing”, co-Chair Adar Kalir
–
Workshop on “Emerging Topics from Special Sessions at CASE 2012”, Presenter Jingshan Li, Presenter Lars Moench,
Chair/Presenter James R. Morrison, Presenter Claude Yugma
8th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM
2012 within Wintersim 2012), Berlin, Germany
–
Conferenece Organizers: Argon Chen, Andy Myoungsoo Ham and Lars Moench
–
Wintersim General Chair: Oliver Rose
–
Wintersim Track Coordinators: John Fowler
–
International Program Committee: Thomas Chen, Chen-Fu Chien, Hans Ehm, Stephane Dauzere-Peres, John Fowler, Cathal
Heavey (membership invite sent), Jesus Jimenez, Andreas Klemmt (membership invitation sent), Tae-Eog Lee, Scott Mason,
James Morisson, Dima Nazzal (membership invitation sent), Israel Tirkel, Gerald Weigert
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
14
Conference Involvement (4)
•
•
9th IEEE Conference on Automation Science and Engineering, Madison, WI, USA, August 2013.
–
Steering Committee: TC emeritus co-chair Mengchu Zhou, TC co-chair Mike Tao Zhang.
–
International Advisory Committee: TC emeritus co-chair Mengchu Zhou, TC co-chair Mike Tao Zhang.
–
Organizing Committee: TC member Jingshan Li (Conference Co-Chair), TC co-chair James R. Morrison (Special Sessions Chair).
–
Program Committee (PC): TC member Shi-Chung Chang (PC Member), TC regional chair Korea Tae-Eog Lee (PC Member), Jingang Yi
(PC Member).
–
Editorial Board: TC founding member Fan-Tien Cheng (Editor), TC co-chair James R. Morrison (Editor).
–
Special Sessions at CASE 2013 organized by TC members
“Modeling, Analysis, Operation, and Control of Cluster Tools” organized by TC emeritus co-chair Mengchu Zhou and TC member Naiqi Wu.
•
“Virtual Metrology and Predictive Maintenance” co-organized TC founding member Fan-Tien Cheng.
•
“Markovian and Queueing Models for Semiconductor Manufacturing Systems” organized by TC member Israel Tirkel and TC co-chair James R.
Morrison.
•
“Decision Analysis, Manufacturing Intelligence, and Optimization for Semiconductor Manufacturing” co-organized by TC co-chair Chen-Fu Chien.
ISSM 2013, Taiwan
–
•
•
Organizing committee: Argon Chen, Shi-Chung Chang, Fan-Tien Cheng
9th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) within the 2013 Winter Simulation
Conference, Washington, D.C., USA, December 2013.
–
Conference Organizers: TC member Claude Yugma (Conference Organizer), TC member Jesus Jimenez (Conference Organizer).
–
International Program Committee: TC members Stephane Dauzere-Peres, Hans Ehm, Kenneth Fordyce, John Fowler, Cathal Heavey, DJ
Kim, Tae-Eog Lee, Lars Moench, Oliver Rose, Israel Tirkel and Gerald Weigert (International Program Committee).
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
15
Conference Involvement (5)
•
•
2014 International Symposium on Semiconductor Manufacturing Intelligence (2014 ISMI), Taipei, Taiwan, August 2014.
–
General Chair: TC co-chair Chen-Fu Chien
–
Honorary Co-Chairs: TC Regional Chair Taiwan Shi-Chung Chang and TC co-chair James R. Morrison
–
Program Committee (PC): TC Member Jei-Zheng Wu (PC Chair), TC Member Lars Moench (PC Co-Chair), TC Member Thomas Ponsignon, TC Member Fei Qiao
–
Plenary Talks: TC Board Member MengChu Zhou, TC Member Kan Wu, TC Member Lars Moench, TC Member Ken Fordyce, TC co-chair James R. Morrison
10th
IEEE Conference on Automation Science and Engineering (CASE 2014), Taipei, Taiwan, August 2014.
–
Steering Committee: TC emeritus co-chair Mengchu Zhou (Chair), TC co-chair Mike Tao Zhang.
–
International Advisory Committee: TC emeritus co-chair Mengchu Zhou, TC co-chair Mike Tao Zhang.
–
Organizing Committee: TC Founding Member Fan-Tien Cheng (Program Chair), TC co-chair Chen-Fu Chien (Exhibition Chair), TC co-chair James R. Morrison (Publicity Chair)
–
Program Committee: TC Regional Chair Taiwan Shi-Chung Chang, TC Regional Chair Korea Tae-Eog Lee
–
Conference Editorial Board: TC Member Jingshan Li (Editor), TC Member Lars Moench (Associate Editor), TC Member Kan Wu (Associate Editor), TC Member Naiqi Wu (Associate Editor), TC
Member Jingang Yi (Associate Editor)
–
Special sessions at CASE 2014 organized by TC members
–
•
•
“Computational Intelligence in Scheduling” co-organized by TC co-chair Chen-Fu Chien
•
“Performance Evaluation for Production Systems and Supply Chains” organized by TC Member Kan Wu
•
“Quantitative Methods in Semiconductor Manufacturing” organized by TC co-chair James R. Morrison and TC Member Lars Moench
•
“Quantitative Methods in Computer-Assisted Detection and Diagnosis” by TC Member Argon Chen
•
“Advanced Process Control for Semiconductor Manufacturing” by TC Member Gian Antonio Susto and TC Member Sean McLoone
Workshop organization at CASE 2014 by TC members
•
“Internet of Things: Research and Practice” co-organized by TC emeritus co-chair MengChu Zhou
•
“Recent Advances and Emerging Topics in Sustainable Production Automation” co-organized by TC Member Jingshan Li
•
“Workshop on Advanced Intelligent Automation Technology” co-organized by TC Founding Member Fan-Tien Cheng
10th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) within the 2014 Winter Simulation Conference, Savannah, Georgia, USA, December 2014.
–
Conference Organizers: TC Regional Chair USA John Fowler, TC Member Lars Moench and TC co-chair James R. Morrison
–
International Program Committee: TC members Joey Chang, Shi-Chung Chang, Argon Chen, Fan-Tien Cheng, Chen-Fu Chien, Guy Curry, Stephane Dauzere-Peres, Hans Ehm. Gary Godding, Andy
Ham, Cathal Heavey, Keung Hsu, Jesus A. Jimenez, Baris Kacar, Adar Kalir, DJ Kim. Andreas Klemmt. Tae-Eog Lee. Dae-Eun Lim, Kenji Miyake, Devadas Pillai, Jürgen Pilz, Thomas Ponsignon,
Fei Qiao, Oliver Rose, Israel Tirkel, Gerald Weigert, Jei-Zheng Wu, Kan Wu, Claude Yugma and Ken Fordyce
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
16
TC Activities (1)
• TC co-chairs
– 3 people
– Serve 3 year term with opportunity for one consecutive reappointment
– May return to service after a 3 year hiatus
• Retiring
– Mike Zhang is scheduled to retire end of 2014 after many years of very much
appreciated service
– James Morrison is scheduled to retire at end of 2015
• Nominations for Membership Chair will be considered
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
17
TC Activities (2)
• Special issues
– Special Issue for Computers & Industrial Engineering on “Manufacturing
Intelligence and Automation in Semiconductor Industry”. Paper
submissions deadline October 31, 2014.
– Special Issue of the Journal of Industrial Engineering: Theory, Applications
and Practice on “The Roles of Industrial Engineers in the Semiconductor
Industry”. Paper submission deadline September 30, 2014.
– Special Issue of Flexible Services and Manufacturing Journal on “Big Data
Analytics for Digital Decisions in Services and Manufacturing”. Paper
submissions deadline March 31, 2015.
– Considering a Special Issue on Automation for Next Generation High
Technology Manufacturing (with a focus on 450 mm wafer manufacturing)
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
18
TC Activities (3)
• TC website archive for CASE and MASM presentations!
– CASE 2012 and CASE 2013 special sessions presentations archived!!
– Want to archive CASE 2014 presentations!!!
– ACTION: Please e-mail me your presentation from CASE (voluntary!)
james.morrison@kaist.edu
• ISMI 2015, CASE 2015, MASM 2015
– Special or organized sessions! Who would like to help?
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
19
Discussion Topics (1)
• How can the TC better serve the community?
– Archive for simulation models? (Plan to link to MIMAC models)
– Archive for case study reports?  SUGGEST: Bibliograpy on our website!!!
– Archive for tutorials?
– Archive may mean a link to the file stored elsewhere or we can host the file
– Please consider to let me know about your service activities so that I can add it
to our TC service lists!
• T-ASE discussion
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
20
Discussion Topics (2)
• How to join?
– Send me an e-mail: james.morrison@kaist.edu
• Want to talk later? Have ideas later..
– Contact James Morrison (see e-mail above)
• Please consider to submit to our special issues
• Please e-mail me your CASE 2014 presentation
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
21
System Modeling and Control with Resource-Oriented Petri Nets /
Edition 1
Authors: MengChu Zhou, Naiqi Wu
October 2009
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
22
IEEE RAS Technical Committee on Semiconductor Manufacturing Automation
http://xs3d.kaist.edu/TC-SMA
23