Heterogeneous
Technology
Alliance
Platform ”Reliability”
HTA General Assembly
November 12 – 13, 2013
The Heterogeneous Technology Alliance HTA
HTA Reliability Platform
Added value to customers:
Faster ─
because of
optimized
reliability
approaches
Lower cost ─
due to matched
reliability goals
during product
development
Less risky ─
because of wide
base of
expertise and
tools
More
innovative
solutions ─
forced by builtin reliability
demands
AND effective
development
of micro / nano
technology
products
One-stop shop
The Heterogeneous Technology Alliance HTA
Reliability Platform
VISION
• HTA offers leading reliability platform for process and product development, aiming at
understanding of failure mechanisms and failure avoidance, testing and health
monitoring of devices
MISSION
• Makes the large arsenal of tools available for customers and all HTA partners
• Chaining of quite different reliability methods and expertises
• Strengthening European products by Made-in-Europe Quality
• Helping R&D engineers to select and link most efficient methods and equipment
for reliability driven purposes
The Heterogeneous Technology Alliance HTA
HTA Complete Offer
Built-in reliability solutions
Reliability
Platform
• Life Time
Assessment
•
•
•
•
IC, MEMS
RF
Power
System
• Failure Modeling
• Failure
Mechanisms
• Electrical and
Mechanical
Testing
• Hermeticity
• Analytics
• Material and
functional
device charact.
• Layout
optimization
• Material
selection
• Process
Windows
• Design Rules
• Applications
• HTA complete offer covers all key competencies to create solutions for our customers
• Key mission of HTA is to enable reliable integration and combination of different microand nanotechnologies
• Reliability Platform managers offer a communication channel between the partners
The Heterogeneous Technology Alliance HTA
Platform purpose and definition
• Platform purpose
• Linking HTA partners to an efficient team
• Definition
• Platform composes reliability predictions
methods and respective equipment
• Platform provides accelerated testing
including component / system qualification
• Platform partners support qualification of
testing procedures and respective
standardization
Product2
• Making the right choice among a variety of
analysis and testing methods at HTA labs
Product and process
development
Product1
• To accompany all product development steps
by appropriate reliability measures
Reliability
Component1
assessment
Testing &
qualification
Reliability platform
The Heterogeneous Technology Alliance HTA
Key Lab Sites:
Accelerated testing
Itzehoe
Cryogenic
Testing
Berlin
Duisburg
Dresden
Chemnitz
Mechanical
Testing
Erlangen
Radiation
Testing
Charging
Effects
Freiburg
Grenoble
Munich
The Heterogeneous Technology Alliance HTA
Key Lab Sites:
Simulation
Itzehoe
Finite
Element
Analysis
Berlin
Duisburg
Dresden
Chemnitz
Mechanical
Failure
Modeling
Erlangen
Freiburg
Material
Characterization
Grenoble
Munich
The Heterogeneous Technology Alliance HTA
Key Lab Sites:
Local Stress Measurement
Itzehoe
Stress
Measurement
Berlin
Duisburg
Dresden
Chemnitz
Erlangen
Freiburg
Grenoble
Munich
The Heterogeneous Technology Alliance HTA
Recent and current activities for ESA
WALES
2009-2012
WALES-PLUS
2013-2014
MEMS Qualification
2013-2014
MEMS Reliability
Assessment
2014-2015
 2008: Joint reliability team has been presented to ESA: CANEUS Workshop at CNES,
Toulouse FR.
 2009: HTA presentation “Reliability and Testing for Space Applications”, ESA-ESTEC.
 2011: ESA Innovation day “Reliable MEMS for Space Applications – A joint effort”,
ESA-ESTEC.
 2012: ESA Round tables “The HTA Reliability Platform”, ESA-ESTEC.




Recognition of HTA by ESA
MNT reliability related projects in direct negotiation with ESA
Participation in MNT workgroup at ESA (STATs)
ESA Round Table Committee
The Heterogeneous Technology Alliance HTA
Next steps:
•Enhancement of the HTA reliability platform:
 Acquisition of new ESA qualification projects
 Involvement in European MEMS development projects, EU call H2020
 Updating the HTA Reliability Website making visible competencies, new
developments and contact persons
 Using more synergies with other HTA platforms
 Optimizing return of investment
 Parallel projects
 Involvement of partial reliability consortium in
combination with MEMS development and
fabrication
The Heterogeneous Technology Alliance HTA
Access to Platform services
Platform Manager VTT
• Markku.Lahti@vtt.fi
Tel. +358 20 722 2269
• Mikko.Karppinen@vtt.fi
Tel. +358 40 848 5029
Platform Manager FhG
• Dietmar.Vogel@enas.fraunhofer.de
Tel. +49 371 45001 412
Mobile +49 160 93 884 218
• Bernd.Michel@enas.fraunhofer.de
Tel. +49 371 45001 220
Platform Manager CEA
• Didier.Bloch@cea.fr
Platform Manager CSEM
• Antonia.Neels@csem.ch
Tel. +33 4 38 78 57 68
Tel. +41 32 720 5195
• Frederic.Souchon@cea.fr
• Michel.Despont@csem.ch
Tel. +33 4 38 78 28 68
Tel. +41 32 720 5478
The Heterogeneous Technology Alliance HTA
MEMS-Qual and MEMS-Real
ESCC - European Space Components Coordination
MEMS-Real
- Reliability assessment
for a class of MEMS
- 4 different MEMS prov.
Evaluation
Basic testing oriented versus:
- Process, radiation (such as
226XXX..)
- Detection of reliability limits
(going to failure / max. stress)
- Definition of domain Max / Min
X
MEMS-Qualification
- MEMS classification
- Generic test plans
- MEMS qualification
Qualification (such as 9000)
Generic test plan
- Verification
- ‘0’ failures allowed in the
above defined range