McGill Nanotools Microfab Facility: MCRF Site Visit
Peter Grutter
Academic Director
September 2011
McGill Nanotools Microfab Facility
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3300sq.ft. facility, 1000 sq.ft. clean room
space.
$13 million capital investment, $615K/year
operating budget
In 2010:
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87 individual projects
42 principal investigators
38% users external to McGill
Internal users from 5 faculties
10 corporate users
91 students/PDFs trained
At least 63 peer reviewed papers, 6 patents, 52
thesis
0.7um
features
Outline - Selection Criteria
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Accreditation:
1. Character of the facility
2. Efficient use of the facility
3. Quality of the nanotechnology research program
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Accessibility:
4. Users
5. Benefits for Quebec
6. Integration and promotion
7. Development plan
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1. Characteristics of the Facility
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Facility: over the past 10 years over 13M$ capital
equipment invested by Quebec, CFI and NSERC
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Equipment enables R&D and training in:
1.
2.
3.
4.
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Nanoelectronics
Nanobiology
NEMS/MEMS
Nanophotonics
Providing leadership within QNI:
• integrating fabs of 4 major universities in Quebec:
• Training: NSERC CREATE ISS (2009)
• Infrastructure support: NSERC MRS (2011, in prep.)
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1. Characteristics of the Facility
Equipment:
 Complete NEMS/MEMS fab facility (see section F for
details).
 Complementarity with the global QNI offer (see Section
C of application).
Unique character of McGill Nanotools Microfab:
 Ecosphere of integrated training and world-class R&D in
terms of processing know-how and established
collaborations along 2 major axes:
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fundamental – industrial
interdisciplinary (medicine – biology – chemistry –
physics – ECE – materials science – tissue eng.)
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Unique Ecosphere: Green Technology
Growing, understanding, processing and integrating InN for energy and
sensing applications
University:
Z. Mi (ECE), G. Gervais (Physics), P. Kambhampati (Chemistry), T. Szkopek (ECE), A. Kirk
(ECE), Lennox (Chemistry), R. Sladek (Genomics)
Companies:
ICP Solar Technologies, Future Lightning Solutions, Silonex Inc.
DNA Landmarks (St. Jean-sur-Richelieu, QC), BASF
Government and Crown Corporations:
IREQ (Hydro Quebec), DRDC (Val Cartier, QC), Canadian Space Agency (Brossard, QC)
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Unique Ecosphere: Green Technology
MBE growth of GaN nanowires (Z. Mi)
Closed loop growth-fabrication-characterizationapplication  Proximity to fab crucial!
McGill leads the pack in nanoscale nitride
semiconductors. Only nitride MBE system in Canada.
Vol. 11, 1919
(2011).
World’s most efficient phosphor-free white light LEDs:
Devices grown in McGill MBE lab and fabricated in McGill Nanotools Microfab.
17.8.2011: $ 667,500 MDEIE for commercialization (wafer scale demonstration)!
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Fabrication of Optical Ring Resonators
Zetian Mi, ECE, McGill
Integrated tube lasers
waveguides on Si
OSA Optics Express 19, 12164 (2011)
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Unique Ecosphere: SiC
SiC Micromachining compatible with CMOS technologies
University:
Mourad el-Gamal (ECE, McGill), Srikar Vengallatore (Mechanical, McGill)
Companies:
MEMS-Vision (Montreal), Thales Inc., Boston Microsystems
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The Vision
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Very small, for portable devices …
Batch fabrication, for very low cost
Endless functionalities
Much less battery consumption
MEMS
(Micro Electro-Mechanical Systems)
+
Micro
Mechanical
Sensors &
Actuators
=
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State-of-the-Art in MEMS Integration
MEMS Technology
At least three
manufacturing or
assembly facilities are
needed
Connections
IC Technology
MEMS
Connections
IC
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Objective: “Growing” the mechanical devices
“on top of” the electronics using IC compatible technologies
Challenges: Incompatible temperatures,
materials, and chemicals.
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A Breakthrough Material ?
- High elastic modulus
- High acoustic velocity
- High fracture strength
- Sustains higher temp.
- Inert surfaces
- Resists corrosion,
erosion, and radiation
- Biocompatible
Metals
IC & MEMS
Before New Inventions:
- Difficult to deposit
- High temp. processing
- Not compatible with IC
manufacturing
- High residual stresses
- Difficult & slow
etching
and deposition
SiC is routinely used in the manufacturing of CMOS electronics, for example in
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some of today’s state-of-the-art and very high-end microprocessors.
Problems Solved - MoSiC™ MEMS (El-Gamal, McGill)
patented, published, commercialization venture started – MEMS Vision Inc.
Pressure Sensors
Micro Beam Resonators
Harp-like Vibration Sensors
Output
Input
Micro Switches
Isolation
Isolation
Input
Input
Square Resonators
Tunable Capacitors
Actuation
Output
Input
Output
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Problems Solved - MoSiC™ MEMS
Processing and materials know-how key! Many have tried, all others have failed!
Stress Control
High Yield
150m
< 50 MPa of stress
12m
220m
- Small gaps
(high sensitivity)
- High initial
sensors accuracies
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Unique Ecosphere: Nanobiotech & Health
Microfluidic systems
Nanofluidics
3D microfluidic probe:
Shear free gradient at the
stagnation point for cell
chemotaxis studies.
Sculpting the energy
landscape of
polymers and DNA.
nanochannel
DNA melting assay.
Juncker et al.,
Nature Commun. 2 465 (2011)
Si pins for multi-spotting
proteins.
System used to identify 6
relevant markers for
breast cancer. Developing
protein chip.
100 nm
Reisner et al.,
PNAS (2010)
Pla-Roca et al. Mol. Cell.
Prot. (under review)
Myoblast response to RGD
Peptide Gradient (MNI)
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Concept: Nanopore-Nanochannel Device
Conventional Nanopore
Nanopore Nanochannel
reservoirs
nanopore
nanochannel
Reisner (Physics, McGill)
nanopore in 20nm thick
SiNx membrane (made
via TEM milling)
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Nanopore-Nanochannel: Device Fabrication
loading
microchannel
nanochannel
Membrane
(50x50μm)
10μm
nanopore
TEM image of nanopore
embedded in
nanochannel
100nm
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Other concrete example of interdisciplinary interactions
Plasmonic Micro-array Biosensor
100 nm
Gold nanorods
Completed chip
cartridge
Low cost 24,000 element plasmonic sensing array based
on patterned, functionalized self assembled gold nano
rods. Read-out: absorption spectrum shift. Integrated
system demonstrated. Currently being tested with
leishmania (protozoan infection common in northern
Asia), in collaboration with B. Ward (Fac. of Medicine)
Kirk (ECE), Lennox (Chem.) and Reven (Chem.)
Read-out
Cantilever based biochemical sensing
Functionalized microfabricated cantilevers transduct
electrochemical signal (Lennox (Chem.), Sladek
(Genomics) & Grutter (Physics)).
Systems integration in collaboration with A. Boisen
(DTU) and M. Roukes (Cal Tech).
Transfer of fundamental insights to nanowire
sensors: Si nanowires (M. Reed, Yale) and InN
nanowires (Z. Mi (ECE) and DNA Landmarks Inc.).
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Unique Ecosphere Micro/NanoSystems
Light off
PTCDA on KBr(001)
Microelectronic Engineering 87, 652 (2010)
Advanced Materials 21, 2029 (2009) (including cover page)
J. Phys.: Condens. Matter 21, 423101 (2009) (invited topical review)
Phys. Rev. Lett. 100, 186104 (2008)
Light on
CuPc:PTCDI deposited on KBr
Grutter (Physics, McGill), Guo
(Physics, McGill), Silva
(Chemistry UdM), Beerens
(ECE, Sherbrooke)
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Unique Ecosphere Micro/NanoSystems
Molecular electronics, OPV, CNT, graphene, nanowires for topological
quantum computing, ...
T. Szkopek (ECE, McGill), R.
Martel (Chem., UdM)
M. Siaj, (Chem. UQAM)
SNS
Z. Mi (ECE), T. Szkopek (ECE,
McGill), G. Gervais (Physics,
McGill)
A. Champagne (Concordia)
graphene FET memory cells
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Suspended bridge CNT device
3. Quality of Nanotechnology Research Programs
From NanoQuebec’s website:
http://www.nanoquebec.ca/en/nano-in-quebec.php
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Unique Ecosphere
Training:
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New type of students:
• Sébastien Ricoult: neuroengineering PhD with extensive
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fab experience. Industry needs such people!
Michael Ménard: ECE McGill -> Cornell -> UQAM
Frédéric Nabki: ECE McGill -> UQAM (NanoQAM)
NSERC CREATEs: ($900k p.a. total)
• Integrated Sensor systems (2009); PI Kirk
• Neuroengineering (2010); PI Lennox
• Nanobiomachines (2010); PI Gehring
Nanobiotechnology Microfab Course:
Hands-on course, organized by D. Juncker
4th year in 2011, attracted 26 participants (national,
international and industry).
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2. Efficient operation
Our guiding principle is to fund operating costs
(including maintenance/repairs) from user fees.
 Keeping the Microfab ‘ready for use’ requires
dedicated and highly trained personnel – which is
financed by a combination of other contributions.
 Responsive, transparent management structure.
 User driven
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4. Usage
Source: annual McGill
Nanotools Microfab reports
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4. Usage
40% of PIs hired since 2005
45% increase in processing tool
capital investment: 3M$ new
equipment in 2009/10 (ebeam,
DRIE, spray coater, PECVD,
evaporator, sputtering)
Expect 75% increase in total hours
per year:
 Expect to be able to offer
better and more services to
outside users (both academic
and non-academic).
 Need to run longer hours.
 Expect to increase access by
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bio and med. researchers.
NanoQuebec funding
1. Increase capacity of McGill Nanotools Microfab
 Requests by users for extended hours. This is a result of 50 new faculty
since inception and hands-on component of NSERC CREATE programs.
 Customer services for the life sciences: large number of untapped
biomed users (2 CREATE, 1 CIHR Systems Biology Training grant).
2. Develop active industrial outreach
 ‘From academia to industry’. Coordinate disperse academic know-how
that solves real-world problems for industry and facilitate the creation
of start-ups. Complimentary to NQ outreach coordinator.
3. Enable sustainable funding model
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5. Benefits to Quebec
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Empirical observation: most companies access microfabs through
collaboration with academic research groups. They value the
expertise and access to world class facilities of academic
researchers; very few companies have the need or interest to
directly access the fab.
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In 2010, direct, funded collaborations with more than 10
companies from Quebec in key economic sectors (see p.29 of 34
for list).
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In 2010 NEW contracts/grants worth 2.7M$ p.a. were obtained
(2009: 1.3M$). These grants are often multi-year and fund HQP,
R&D as well as fab access.
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Google ‘microfab’: ranks nr. 2 !!!
6. Integration and Promotion within the QNI
Integration & Leadership:
 Founding member of NQ (2000)
 NSERC CREATE ISS (2009)
 NSERC MRS QNI (to be submitted 2011)
Increased international visibility:
 In 2010 McGill nano researchers have signed MOUs and started
exchanging researchers with:
• RIKEN (Japan): green chemistry, nanoelectronics
• IIT Mumbai (India): micro and nanofabrication training
• IoP CAS (Beijing): nanoelectronics and photonic
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7. Development plan for the facility
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Development and upgrade plans for the McGill Nanotools
Microfab are driven by its users and coordinated with other
facilities.
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In upcoming CFI call VII the McGill Nanotools Microfab facility will
replace, upgrade and expand equipment necessary for:
• Fabrication, including material deposition and growth
• Packaging and assembly
• Characterization
In particular we are planning to establish a rapid prototyping facility
suitable for bio/medical applications
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Summary
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Unique R&D and training ecosystem: from fundamental to
applied, across all disciplines.
Broad user base and efficient management – NanoQuebec and
partners finance ‘ready for business’ status; users pay for
operation.
Close interactions of Science & Eng. with biomed R&D unique
among all NanoQuebec supported fabs. By increasing fab
manpower we will capitalize on this opportunity.
New outreach and industrial coordinator to facilitate
knowledge transfer and the creation of start-ups.
NanoQuebec funding to partially replace unsustainable current
bridge funding from MIAM.
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What will 300k$ from NanoQuebec enable?
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Extended operation hours needed due to usage
increase.
Incorporation of unique R&D ecosphere within NQ –
from fundamental to applications.
Grow and nurture emerging applications in bio med.
In-reach coordinator to take advantage of academic
know-how and facilitate transfer to industry.
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Budget details: Expenses
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(see p 14 of 34 for overview)
Budget details: Expenses
Future:
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Budget details: Revenues
(*) CREATE: cash from McGill support of ISS, Neuroeng. and
Nanobiomachines for help with facilitating internships as a result of
Business Development person.
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(see p. 14 of 34 for overview)
Budget details: Revenues
Current (past): (partial) FTE to bridge funding
shortfall and establish well functioning infrastructure.
Future: Equivalent in cash, frees up the previously
used manpower to support intensified R&D and
training at CMP.
Note: Increased MIAM funds will directly benefit fab –
training, networking, characterization facility support
(e.g. SEM, TEM).
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Complementarity with other microfabs
• Toolset (in particular spray coater, wafer bonder)
• Processing know-how (SiC, nitrides, microfluidic systems)
•Leadership
•Training
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Statistiques d'utilisation des QNI
Source: RQMP annual report (2011)38