Chapter 1
Crystal Properties and Growth of Semiconductor
1. Describe what a semiconductor is
2. Perform simple calculations about crystals
3. Understanding what is involved in bulk Czochralski and
thin-film epitaxial crystal growth
4. Learn about crystal defects
주기율표
Semiconductor materials
Crystal Lattices
Figure 6—33
Cross section of a MOSFET. This high resolution transmission electron
micrograph of a silicon Metal–Oxide Semiconductor Field Effect Transistor shows
the silicon channel and metal gate separated by a thin (40Å, 4nm) silicon–dioxide
insulator. The inset shows a magnified view of the three regions, in which
individual rows of atoms in the crystalline silicon can be distinguished.
(Photograph courtesy of AT&T Bell Laboratories.)
Crystal Lattices
Cubic Lattices
Cubic Lattices
Planes and Directions
Planes and Directions
Planes and Directions
The Diamond Lattice can be thought of as an fcc structure with an extra atom placed at
a/4+b/4+c/4 from each of the fcc atoms.
Figure 1—8
Diamond lattice structure: (a) a unit cell of the diamond lattice constructed by placing atoms from each atom in
an fcc; (b) top view (along any 100 direction) of an extended diamond lattice. The colored circles indicate one fcc
sublattice and the black circles indicate the interpenetrating fcc.
• Si and Ge have diamond lattice; GaAs and most of the compound semiconductors
have Zincblende structure
• Ternary and quaternary systems, e.g., AlxGa1-xAs and InxGa1-xAsyP1-y
Figure 1—9
Diamond lattice unit cell, showing the four nearest neighbor structure. (From Electrons and
Holes in Semiconductors by W. Shockley, © 1950 by Litton Educational Publishing Co., Inc.;
by permission of Van Nostrand Reinhold Co., Inc.)
Atoms in Crystals are arranged in certain planes.
― mechanical, metallurgical, chemical and electronic properties
― Cleave along atomic planes  jewelery
― semiconductors with Diamond and Zinclblende lattices have similar
cleavage planes.
― Etching often occurs preferentially along certain directions.
―during Fabrication processes semiconductors undergo both:
―Etching, and
―Cleavage
Bulk Crystal Growth