Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
VACUUM TECHNOLOGY 2293
HVET/RVET AUTOMATION
Session #1
FLOW: TRANSITION FROM
VISCOUS TO MOLECULAR FLOW
3
Session #1
Transition From Viscous to Molecular Flow
Agenda
Objectives
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Attendance
Safety Topic
Course Introduction
Discussion: Viscous to Molecular
Flow
Learning Activity: AHVET
Pumpdown
Discussion: Rough Pumps Revisited
Troubleshooting Introduction
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Analyze Man Caught in Vacuum
Chamber case study
Review the syllabus & other
administrative stuff
Review old VacTech news
Why is Molecular Flow different
than Viscous Flow?
Learn High Vacuum pump-down
procedure
Review Rough Pumps, their
function, and some features
Discover what Troubleshooting is
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
A Simple Question
WHAT IS SAFETY?
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Safety is…
Safety is the state of being relatively free
from harm, danger or injury
Harm, danger, and injury are
the result of circumstances or conditions present
in the workplace:
Hazards, Exposure and Risk
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
A HAZARD IS A PHYSICAL CONDITION THAT
COULD CAUSE HARM OR AN INCIDENT; AN
UNSAFE CONDITION
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EXPOSURE IS THE PHYSICAL STATE
WHERE A PERSON OR A GROUP OF
PEOPLE COULD BE HARMED BY A
HAZARD
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Often quantitatively calculated as the probability of an incident x the
severity (low, normal, high)
RISK IS THE LIKELIHOOD, HIGH OR LOW,
THAT A HAZARD WILL ACTUALLY CAUSE
HARM.
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May also be known as ‘consequence’.
SEVERITY IS THE HARM THAT WOULD
RESULT FROM AN INCIDENT DUE TO THE
HAZARD.
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
What’s the Point?
• Personnel heath and safety requires identification of
Hazards.
• The existence of hazards alone does not mean the
situation is unsafe. Personnel must have Exposure to the
hazard before it is a concern.
• Even exposure does not create an unsafe situation. To be
unsafe, the situation must be such that there is Risk the
hazard will actually cause harm.
• If there is risk of harm, the severity of the harm must be
assessed and, if necessary, mitigated.
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Man Caught in a
Vacuum Chamber!
• Extremely possible in
large vacuum chambers
• Asphyxiation
• Decompression Sickness
a/k/a “The Bends”
• Countermeasures:
– Confined Space
Procedures
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
What happens when human skin is
exposed to outer space?
Don’t Try This at Home!
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VACUUM TECHNOLOGY 2293
VACUUM ANALYSIS & TROUBLESHOOTING
Significance, Characteristics, Features & Functionality
LOGISTICS AND OTHER STUFF…
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
What you signed up for…
• College Level coursework in Vacuum Technology
• Objective: Prepare technicians for work in industries that rely on
“high” vacuum processes
(Nominally below 1 Torr; 1 mTorr by definition)
• Vacuum enables many manufacturing processes, including:
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Semiconductor
Microelectromechanical systems (MEMS)
High-Performance Glass
Optics
Manufacture of “pure” metals
Etc.
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What we do here is
Pretty Darn Close to Rocket Science!
•
By the end of the course, you will:
•
Skills Needed coming into class
– Be conversant in high vacuum
technology
– High school algebra: no Calculus
– Be able to explain the function
and purpose of vacuum
components
– Understand how to write a lab
report
– Perform system calculations
– Select components and materials
for basic applications
– Start developing skills to
understand system performance
and performance issues
– Understand the Scientific Method
– Excel/spreadsheet manipulation
– Word/word processing & high
school writing capability
– Workplace problem-solving and
teamwork
– Prerequisite: 1292 class or
equivalent experience
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
General Plan for Course
Make
Vacuum
Week 1-5
Measure
Vacuum
Utilize
Vacuum
Week 6-10
Week 11-16
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Your Normandale Instructors!
John Lasswell
Scott Holm-Hansen
John.Lasswell@normandale.edu
Scott.HolmHansen@normandale.edu
Office – S1342/S1335
Hours:
• One hour after class or
by arrangement
• Monday on ZOOM
Office – S1342
Hours:
• MTWR afternoons by
arrangement
• Phone 952-358-9238
4:00-5:00 Central Time
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•
Discussion Forum?
Phone 952-358-9238
(leave a voicemail)
Special Guests
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Nancy Louwagie
Ruth Robinson
Tom Johnson
Kim Klein
And other notquite-ready for
prime-time players,
to be named later
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Our Success…
EACH STUDENT CAN APPLY THE
KNOWLEDGE AND SKILLS THEY
HAVE LEARNED TO UNDERSTAND,
OPERATE AND MAINTAIN THE
VACUUM SYSTEMS THEY ARE
RESPONSIBLE FOR.
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Communicating with Your Instructors
Option 1-Email
Option 2-Phone
Option 3-Scheduled Meeting
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Comms: Weekly D2L Announcement
• Look Something like this
• Published at 11:59
Monday evening before
class
• Links will connect you to
all the stuff you should
need for the week
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Comms: E-mail From Your Instructor
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Will come via your
Normandale email
address
Message to either a
Partial Class Group
or Individual
Reasons:
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For your
information
For some action
on your part
(response may be
requested)
Recommended: Set
up automatic
notification to an
email address you
look at frequently
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Comms: Announcements From Your Instructor
• Message for entire
class
• Recommended: Set
up automatic
notification to an
email address you
look at frequently
You will get an email
message like this
https://normandale.learn.minnstate.edu/d2l/Notifications/Settings?ou=4148064
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Course Materials
You Supply
NCC Supplies via Online
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Optional Textbook: Introduction
to Vacuum Technology
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– David Hata
– ISBN-13: 978-0-13-045018-0
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Paper
Black/Blue Pen
Red Pen
Highlighter – the colors of choice
Internet Connected Computer
Printer
Office Suite software apps
Camera and Microphone
Ability to deliver document
deliverables in PDFs
Weekly:
•
Slide Deck Handout
Study Guide Handout
Reading Material Links
Video Links
Available Monday12:59 pm
Quiz
– Available after class to start of next
class
•
Experimental Equipment
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Resource: If you can find it…
• The Third Edition (not the blue
cover version)
• This text is the closest that the
NCC faculty have found that
relates to the purpose of this
course.
• Good long-term Reference
• May be available on
Amazon (new) or eBay (used)
•
https://kipdf.com/modern-vacuum-practice2007-nigel-s-harris-mcgraw-hill2007_5ad30c6b7f8b9a886c8b4587.html
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Lessons: In-Class Lecture/Discussion
• Topic Orientation allows a
certain amount of material
to be presented
• Primarily intended as an
opportunity to discuss the
topic as opposed to being a
lecture
• Managed digression is
acceptable
• Death by PowerPoint
potential…
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Lessons: Study Guide
Preview It!
Pink Text = Hidden
when Printing
Read It!
Hyperlinked to
documents in D2L
Outline Class
Notes
Only from 2 or 3
every week
Automate
personalized SG
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Lesson Homework: Read It! Assignment
• Developing the skill of getting information from
information published by others is important.
• This information is a record of what has been
observed…but not of the present or future
– What can that mean to us?
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Homework: Read It! Assignment
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The patron of the Normandale
VACT program, Phil Danielson and
his wife , gifted his published
articles on vacuum technology to
the program on his death
These can be found at:
https://www.normandale.edu/dep
artments/stem-andeducation/vacuum-and-thin-filmtechnology/vacuum-technologyresources--the-danielsoncollection/articles
Assignments relevant to the topic
under consideration will be made.
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Lesson Homework: Read It! Assignment
• Other Materials
– Operator and
Maintenance Data
– Papers by Others
– Etc.
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Lessons: Study Guide
Watch It!
Figure It!
Typically about 1
hour of video
content
Typically about 1
hour of video
content
Typically about 1
hour of video
content
Information about
the Lab Activity
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Lesson Homework: Online Activities -Videos
Benefits for Students
Benefits to Teachers
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Create a more engaging sensory
experience than using print
materials alone
Provide a go-to resource that can
be watched from anywhere
Increase knowledge retention
Can assist the learning of any
subject
Increase digital literacy and
communication
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Increase student engagement
Offer flexibility to pause, rewind,
etc.
Create a flipped classroom
Facilitate remote learning
Analytics
Opportunities for student
feedback and assistance
Changes the role of teachers from
lecturers to facilitators
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Lesson Homework: Online Activities
PhET – University of Colorado
• https://phet.colorado.edu/e
n/simulations/filter?subjects
=physics,chemistry,math&typ
e=html&sort=alpha&view=
grid
Wisc-Online – Wisconsin
Technical College System
• https://www.wisconline.com/learn/naturalscience/chemistry
• https://www.wisconline.com/learn/naturalscience/physics
General Idea: Provide additional focus on a particular technical subject
You will need to:
• Establish an account with each of these (they are free)
• Make sure your computer will allow the animations provided.
• If you use your work computer, work with your IT department if there are issues
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Lessons: Study Guide
Lab Information
Partial
Information about
the Lab Activity
Memo Report
Practice writing.
Do your best. You are not
expected to be Shakespere
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Turn in your homework to the
appropriate Drop Box
• Scan your homework into a single pdf
file.
• Multiple pdf & jpeg files can be
accommodated but are a pain
• See the announcements for pdf
software that you can use from
your phone.
• Other formats? Let’s discuss!
• You only need to turn in the
Homework
• Turn in study guides to the
correct drop box
• Only the last submission is
graded (so relying on me to
understand what is a complete
submission is somewhat
hazardous)
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Dreadful Things
Quizzes
Exam
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• One Final - ±1-1/2 hours
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Expect one most weeks
They may pop up in class
Open book – notes – homework –
friends (if any)
Quizzes start after class and are
due by the next class
No extensions
One do-over
I must grade written answers; this
will happen after the due date
These should not be too hard
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Always Cumulative
Open book – notes – homework
This should be somewhat
challenging
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Earning Your Grade
Study Guide
a/k/a Homework
• 60% of grade
• Do Collaborate
• Due by the next
class session
• Give yourself a
reasonable
time limit
Quizzes
Final Exam
• 30% of grade
• Open book,
open note
• Don’t
collaborate
• One do-over
• Due by the next
class session
• One-hour limit
• 10% of grade
• During class
time, finals
week
• 2-hour limit
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Per Time Investment Class Session
• Class Time – ±3-4
hours/week
• Homework – 4+ hours/week
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Reading Assignments
Problems
Lab Analysis
On-line activities
Quizzes
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Policies and Procedures –
Questions?
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ADA
D2L
Attendance
Weather Events
Other Events
Late Assignments
• Incomplete Grades
• Academic Dishonesty
• Other Dubious Behavior
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Good Telepresence Etiquette!
CLASS
• Keep Camera On! Don’t
hide with your camera
off all the time
• Sit sort of close to the
camera!
• Talk once in awhile
without being prompted!
• Be judicious about using
“mute”
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Professionalism
• How we should
work together!
• Route to
maximizing
Boogie Factor!
41
VACUUM TECHNOLOGY 2293
VACUUM ANALYSIS & TROUBLESHOOTING
Significance, Characteristics, Features & Functionality
FLOW: THE TRANSITION FROM
VISCOUS TO MOLECULAR FLOW
42
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Impact of the Light Bulb on Vacuum Technology
• No, not Thomas Edison
– 1802: Humphry (Henry) Davy
& Davy Electric Arc Lamp
– 1840: Henry de la Rue –
platinum filament in an
evacuated tube
– 1850-1878: Joseph Swan –
Improved filaments in Better
Vacuums
– 1874: Woodward and Evans –
Arc Lamp in Nitrogen-filled
globes
• Edison:
– 1878-patent application for
improved electric lights
– 1879-purchase of
Woodward/Evans patent;
patent for carbon filament
(similar to Swan)
– 1880-Commercial production
of light bulbs begins
• Vacuum Technology
transitions from a scientific
curiosity to an industrial
process for mass production
44
Edison’s Advances
•
Device Combination
– Geissler Pump in Rough/Backing Mode
(higher volumetric flow rate, pump to about
0.1 Torr pressure)
– Sprengel Pump in continuous exhaustion
mode (pump to 1 mPa/7.5x10-6 Torr
pressure)
– McLeod Gauge (measure to 10-6 Torr)
•
Also:
– Control of Mercury Flow
– Automation of Mercury Delivery to 100 pumps
– Removal of Residual Gasses during lamp
processing
45
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Edison Pump System
Schematic Diagram
These devices have
complex tubing that
could be diagrammed
in more detail
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How was Low of a Pressure Needed?
• Eliminate as much oxygen as possible to reduce oxidation
(corrosion):
– Chemical reaction rates tend to double every 10 degrees temperature
rise
– Filament temperatures are in the range of 2800-2900 0F
• Eliminate as much gas as possible to reduce filament cooling
due to the gas
– Cooling will affect the color and intensity of light
– Backfilling with Nobel gasses that don’t chemically react or Halogens
which prevent filament condensation except on the filament are
exceptions under the correct conditions.
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Interesting but off task.
WHAT HAPPENS WHEN THE
PRESSURE OF A GAS IS REDUCED?
48
VACUUM TECHNOLOGY 2293
VACUUM ANALYSIS & TROUBLESHOOTING
Learning Activity/Scott Holm-Hansen
OPERATING THE HVET
90
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
High Vacuum System
Components
VC
P1
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VC – Vacuum Chamber
V1 – Roughing Valve
P1 – Roughing Pump
G1 – Roughing Gauge
V2 – Venting Valve
V3 – High Vac Valve
V4 – Foreline Valve
P2 – High Vac Pump
G2 – High Vac Gauge
P2
92
Key Turbo Operating Information
• Crossover Pressure – 200 mTorr
– Production systems often need to pump down to 75
mTorr before crossing over
• Base Pressure – ±0.005 mTorr (5x10-6 Torr)
93
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
HVET – High Vacuum Equipment Trainer
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Small footprint allowing ease
of transporting
Open system design allows
students to easily see all
system components
A variety of gauges were used
to compare different gauge
technologies
Gauges have local displays to
show pressures at point of use
94
VC – Vacuum Chamber
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The vacuum chamber is where
high vacuum processes take
place
The HVET has a plastic bell jar
for easy viewing of
experiments. Plastic material
eliminates risk of implosion or
shattering.
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
V1 – Roughing Valve
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The roughing valve isolates the
roughing pump from the
vacuum chamber
The HVET uses an angle seat
design with a manual
handwheel
Be sure to always fully open or
close the valve
96
P1 – Roughing Pump
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•
The roughing pump removes
gases from the vacuum
chamber
The HVET has a scroll pump
with an ultimate pressure
rating of Approximately 100
mTorr
97
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
G1 – Roughing Gauge
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The roughing gauge is useful for
measuring pressure in the rough
vacuum range
The HVET uses a Capacitance
Manometer/Pirani gauge combo
for measuring down to the
crossover pressure of 200 milliTorr
98
V2 – Venting Valve
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The venting valve allows gas to
return to the vacuum chamber
bringing the pressure back to
atmosphere
The HVET has a simple quarter
turn valve for this purpose
The HVET vents with air from the
atmosphere. It is preferred to
vent with dry nitrogen as to
minimize the amount of water
vapor in the system
99
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
V3- High Vac Valve
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The high vac valve isolates the high vac pump from the vacuum chamber
The HVET uses a gate valve for this purpose
The gate valve is the most popular choice for this application due to its
high conductance
100
V4 – Foreline Valve
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The foreline valve isolates the
high vac pump from the
roughing line
The HVET uses an angle seat
design with a manual
handwheel
Be sure to always fully open or
close the valve
101
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
P2 – High Vac Pump
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The high vacuum pump is used to
remove gases from the vacuum
chamber at pressures below the
cross over pressure
The HVET has a turbo pump for
this purpose
A turbo pump must be backed up
by a roughing pump which is
connected by the foreline
102
G2 – High Vac Gauge
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The high vac gauge is useful for
measuring pressures in the high
vacuum range
The HVET uses an Ion Gauge to
measure the base pressure of the
system <10-3 Torr
The ion gauge can only be used in
the high vacuum range. Be sure to
shut it off before venting to
atmosphere
103
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
High Vacuum Pump Down
START BY ROUGH PUMPING
THE TURBO PUMP DOWN
(NOMINALLY 200 MTORR)
VC
P1
P2
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VC CLOSED
V2 CLOSED
V1 CLOSED
P1 ON
V3 CLOSED
V4 OPEN
P2 ON
G2 OFF
106
High Vacuum Pump Down
CLOSE FORELINE VALVE V4.
ROUGH PUMP TO CROSSOVER
PRESSURE (<200MT)
VC
P1
P2
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VC CLOSED
V2 CLOSED
V1 OPEN
P1 ON
V3 CLOSED
V4 CLOSED
P2 ON
G2 OFF
107
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
High Vacuum Pump Down
CLOSE ROUGH VALVE
VC
P1
P2
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VC CLOSED
V2 CLOSED
V1 CLOSED
P1 ON
V3 CLOSED
V4 CLOSED
P2 ON
G2 OFF
108
High Vacuum Pump Down
OPEN FORELINE VALVE
VC
P1
P2
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•
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VC CLOSED
V2 CLOSED
V1 CLOSED
P1 ON
V3 CLOSED
V4 OPEN
P2 ON
G2 OFF
109
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
High Vacuum Pump Down
OPEN HIGH VAC VALVE
VC
P1
P2
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VC CLOSED
V2 CLOSED
V1 CLOSED
P1 ON
V3 OPEN
V4 OPEN
P2 ON
G2 OFF
110
High Vacuum Pump Down
TURN ON HIGH VAC GAUGE
VC
P1
P2
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VC CLOSED
V2 CLOSED
V1 CLOSED
P1 ON
V3 OPEN
V4 OPEN
P2 ON
G2 ON
111
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
High Vacuum Venting
TURN OFF HIGH VAC GAUGE
VC
P1
P2
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VC CLOSED
V2 CLOSED
V1 CLOSED
P1 ON
V3 OPEN
V4 OPEN
P2 ON
G2 OFF
112
High Vacuum Venting
CLOSE HIGH VAC VALVE
VC
P1
P2
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•
VC CLOSED
V2 CLOSED
V1 CLOSED
P1 ON
V3 CLOSED
V4 OPEN
P2 ON
G2 OFF
113
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
High Vacuum Venting
CLOSE FORELINE VALVE
VC
P1
P2
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VC CLOSED
V2 CLOSED
V1 CLOSED
P1 ON
V3 CLOSED
V4 CLOSED
P2 ON
G2 OFF
114
High Vacuum Venting
OPEN VENT VALVE
VC
P1
P2
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VC CLOSED
V2 OPEN
V1 CLOSED
P1 ON
V3 CLOSED
V4 CLOSED
P2 ON
G2 OFF
115
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Session 1 - Transition from Viscous to
Molecular Flow
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VACUUM TECHNOLOGY 2293
VACUUM ANALYSIS & TROUBLESHOOTING
Troubleshooting
INTRODUCTION TO
TROUBLESHOOTING
118
Troubleshooting is:
• A systematic problem-solving process used to correct issues with
complex systems
• An iterative, trial-and-error process repeated until the issue is fixed.
• Typically moves from common, known causes to the more complex
diagnosis
• A skill that needs to be practiced!
Q: WHAT IS TROUBLESHOOTING?
119
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Troubleshooting Process
• Gather Information
• Describe the Problem
• Determine the Most
Probable Cause
• Create a plan of action
and test a solution
• Implement the solution
• Analyze the Results
• Document the Process
120
• Safety is the state of being relatively free from harm,
danger, or injury.
• Edison was the person who transitioned vacuum
technology from a curiosity to an industrial process
• Theory is useful because it gives us clues on how to
design and operate our equipment
• Troubleshooting is both a skill and a process used to
correct issues associated with complex processes
121
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Session 1 - Transition from Viscous to
Molecular Flow
1/12/2023
Fist to Five Vote
How did Today Go?
Terrible!
Terrific!
122
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