ELS-6600 Version 3.0 Software Reference
Book
List
Laser Safety
Before attempting to install, operate, or service the laser, carefully review the
Laser Safety Manual. This manual provides information critical to the safe
operation and maintenance of the laser.
TOC
Table of Contents
Revision History
Limitation on Warranties and Liabilities
Preface
Getting Started
Documentation Set
Highlighting Important Information
Safety Precautions
Contacting Customer Support
User Feedback
CD-ROM and Printed Formats
Chapter 1
Configurable Descriptions
Help
Exit
Configurable Descriptions
C 0 RepRtMax
C 1 HVSetMin
C 2 HVSetMax
C 3 EnrgyMin
C 4 EnrgyMax
C 5 LmbdaMin
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
C 6 LmbdaMax
C 16 KLen IHk
C 21 Bins1Tim
C 22 Bins2Tim
C 23 KShotCnt
C 24 PCelGain
C 25 HVPS_Cal
C 26 HVChgTim
C 27 HVAdjust
C 30 HVDfault
C 31 HVAdjMin
C 32 HVAdjMax
C 33 EnrgyLow
C 35 RAvgSmpl
C 38 E Dither
C 39 TauDithr
C 40 DithrInt
C 41 DedvFrac
C 42 EnrgyFrc
C 43 DoseFrac
C 44 Bin_Frac
C 46 KLen XSg
C 49 ExtPCell
C 50 SlockMin
C 52 SLTimOut
C 53 RcvryLmt
C 54 Trig Dly
C 55 M adOfst
C 56 T adOfst
C 57 Sync0Dly
C 58 Sync1Dly
C 59 Sync2Dly
C 66 KLen XHk
C 70 TauSigma
C 71 TauSgmaN
TOC
Help
Exit
101084-A 04/01
C 72 EFrc IHk
C 73 DFrc IHk
C 74 BFrc IHk
C 77 EFrc XSg
C 78 DFrc XSg
C 79 BFrc XSg
C 82 EFrc XHk
C 83 DFrc XHk
C 84 BFrc XHk
C 90 DoseLock
C 91 DoseErMx
C 92 DoseShts
C 100 CloseTim
C 101 VPmpHTim
C 102 FlshLnTm
C 103 L_ChkTim
C 104 BkFilTim
C 105 H_FilTim
C 106 F_FilTim
C 107 N_FilTim
C 108 InjktTim
C 109 BleedTim
C 110 BurpTime
C 111 P_ChkTim
C 112 M_ChkTim
C 113 L_VacTim
C 114 C_VacTim
C 115 RoughTim
C 130 F_FilDPr
C 131 LasngPrs
C 132 T_FilPrs
C 133 BkFilPrs
C 134 BurpDPrs
C 135 InjktDPr
C 136 P_ChkPrs
ELS-6600 Version 3.0 Software Reference
Book
List
C 137 M_ChkPrs
C 138 L_VacPrs
C 139 C_VacPrs
C 140 N2PrsMin
C 141 L_ChkDPr
C 142 BledDPrs
C 143 BledOPrs
C 144 PmpTOPrs
C 145 MnPrsDsT
C 160 SSTimOut
C 162 InjHrMin
C 163 InjDltaV
C 164 InjDltaE
C 165 F2PerHr_
C 166 F2PerMSh
C 167 ECInjMin
C 168 InjTauMn
C 169 InjTauMx
C 170 InjktTau
C 171 TimedInj
C 172 AvgInjMS
C 173 F2MaxPct
C 174 F2MinPct
C 175 F2CmpPct
C 176 VoltNorm
C 177 EngyNorm
C 180 MPrsOfst
C 181 CPrsOfst
C 182 VPrsOfst
C 183 N2PsOfst
C 184 MPrsBval
C 185 CPrsBval
C 186 VPrsBval
C 187 N2PsBval
C 200 InjShots
TOC
Help
Exit
101084-A 04/01
C 201 TotlShts
C 202 GasShots
C 203 FWndShts
C 204 RWndShts
C 205 ChmbrSht
C 206 FltrShts
C 207 FrntShts
C 208 RearShts
C 209 WCMShots
C 210 HVPSShts
C 211 ComprSht
C 212 CommuSht
C 213 BmSplSht
C 214 CntrlSht
C 215 ShtrOSht
C 219 PwrOnTim
C 220 GsXdcrTm
C 221 H2OBoxTm
C 240 F2TrapCy
C 241 ShuttrCy
C 242 BearngLf
C 243 StaticTm
C 244 InjectCt
C 245 GsModFil
C 246 GasPmpCy
C 247 H2OBoxHr
C 250 GasMaint
C 251 Gas_Life
C 252 FWndowMt
C 253 FWndowLf
C 254 RWndowMt
C 255 RWndowLf
C 256 ChambrMt
C 257 ChambrLf
C 258 FilterMt
ELS-6600 Version 3.0 Software Reference
Book
List
C 259 FilterLf
C 260 FrontMnt
C 261 FrontLif
C 262 RearMant
C 263 RearLife
C 264 WCMMaint
C 265 WCM_Life
C 266 HVPSMant
C 267 HVPSLife
C 268 ComprMnt
C 269 ComprLif
C 270 CommuMnt
C 271 CommuLif
C 272 BeamMant
C 273 BeamLife
C 274 F2TrapMt
C 275 F2TrapLf
C 276 StaticLf
C 277 GsXdcrMt
C 279 H2OBoxMt
C 290 MaintInt
C 291 AvgRepRt
C 301 HWLsrRes
C 302 WvLckBnd
C 303 WCMHldOf
C 304 SgmaLock
C 305 SgmaUnlk
C 306 SgmaPeak
C 307 ISHldOff
C 308 ISSgmaLk
C 309 ISSgmaPk
C 310 ISSgmaUl
C 311 ISWvLckB
C 331 WCntlBnd
C 332 LineWMax
TOC
Help
Exit
101084-A 04/01
C 350 AwrEnabl
C 351 FeMaxAdj
C 352 AWRreprt
C 370 BlwrDrvS
C 371 BlSpdRng
C 376 BlwrIMax
C 380 BlrMnFan
C 390 Sys_Cntl
C 391 SysData1
C 392 SysData2
C 393 SysData3
C 394 DiagPcRt
C 400 Mft_Imax
C 401 Mft_Imin
C 409 ChmbrCld
C 411 H2OMaxTp
C 412 Heat_On_
C 413 Heat_Off
C 414 Cool_Off
C 415 Cool_On_
C 416 ChmbrHot
C 417 HtDCycTm
C 418 GasT_Slp
C 419 GasT_Ofs
C 420 H2OT_Slp
C 421 H2OT_Ofs
C 422 Spr1TSlp
C 423 Spr1TOfs
C 424 Spr2TSlp
C 425 Spr2TOfs
C 430 Lamp1_01
C 431 Lamp1_02
C 432 Lamp1_03
C 433 Lamp1_04
C 434 Lamp1_05
ELS-6600 Version 3.0 Software Reference
Book
List
C 435 Lamp1_06
C 436 Lamp1_07
C 437 Lamp2_01
C 438 Lamp2_02
C 439 Lamp2_03
C 440 Lamp2_04
C 441 Lamp2_05
C 442 Lamp2_06
C 443 Lamp2_07
C 444 Lamp3_01
C 445 Lamp3_02
C 446 Lamp3_03
C 447 Lamp3_04
C 448 Lamp3_05
C 449 Lamp3_06
C 450 Lamp3_07
C 451 ILBuzzer
C 452 5FcnSSIL
C 460 SerialNo
C 461 Lsr_Type
C 462 Gas_Type
C 463 Open_Hex
C 464 RmteVAPO
C 465 IfaceTyp
C 466 Paraltyp
C 469 PupState
C 470 Cntl_Dev
C 471 AirTmpMx
C 472 H2OTmpMx
C 473 H2OtTmpMn
C 474 H2OflwMn
C 475 Bckwrd2F
C 476 IN_actlv
C 477 OUTactlv
C 478 WD_SETUP
TOC
Help
Exit
101084-A 04/01
C 479 LW_Type_
C 480 HostBaud
C 481 ChmbrSN
C 489 FeLampEn
C 499 MonChan
ELS-6600 Version 3.0 Software Reference
Book
List
Chapter 2
TOC
Diagnostic Descriptions
Diagnostics Overview
Diagnostic Access
Diagnostics Descriptions
Chapter 3
Errors and Warnings Descriptions
Help
Exit
Errors and Warnings Descriptions
Warning 3 Reconfigured RAM!
Error 6 Blower COM fault
Error 7 TCS COM failed
Warning 8 CSI COM failed
Warning 9 Retry CPU COMM err
Warning 10 CPU comm slow TcsOK
Error 11 Vent flow hi intlk
Error 12 Vent flow lo intlk
Error 13 User AC interlock
Error 14 AC intlk
Error 14 AC thermal intlk
Error 14 AC rear panel intlk
Error 14 AC intlk reset
Error 15 Interface inhibit
Warning 16 CPU comm Tcs timout
Error 17 HVPS intlk
Error 19 User HVPS intlk
Error 20 Gas intlk status
Error 21 Gas intlk
Error 22 User gas intlk
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 23 N2 pressure low
Error 24 Coolant flow low
Error 25 Coolant temp high
Error 26 Coolant temp low
Warning 29 Bad chmbr temp cnfg
Warning 31 Blower cooling fan
Error 32 Chambr pressure low
Error 33 Laser blower slow
Error 34 Blower fault
Error 35 Blower temp high
Error 36 Laser blower fast
Error 37 Blower current high
Error 38 Filter current low
Error 39 Filter current high
Error 40 Shot energy low
Error 41 Avg energy too low
Error 42 Avg energy too high
Error 43 Life limit exceeded
Error 45 HVPS temperature hi
Error 46 HVPS overload
Error 48 HVPS general fault
Error 49 Selflock energy
Error 50 Selflock wavelength
Error 51 Selflock linewidth
Error 52 N2CHK timeout
Error 53 P_CHK timeout
Error 54 M_CHK timeout
Error 55 F_VAC timeout
Error 56 N_VAC timeout
Error 57 ROUGH timeout
Error 58 V_CHK timeout
Error 59 H_CHK timeout
Error 60 F_CHK timeout
Error 61 N_CHK timeout
Error 62 FBKFL timeout
TOC
Help
Exit
101084-A 04/01
Error 63 NBKFL timeout
Error 64 H_BAL timeout
Error 65 H_FIL timeout
Error 66 F_FIL timeout
Error 67 N_FIL timeout
Error 68 INJKT timeout
Error 69 BLEED timeout
Error 70 BURP_timeout
Error 72 Prs on pump too low
Error 73 Gas supply prs high
Warning 83 System cooling fans
Error 84 HVPS relay or fuse
Error 85 Utilities 24V
Warning 89 Service F2 trap
Error 90 Replace F2 trap
Warning 91 Service gas xdcrs
Warning 92 Service H2O Box
Error 93 F2 Inject required
Error 94 H_VAC timeout
Error 95 MFT or H2O intlk
Error 95 Water intlk
Error 96 Selflock timeout
Error 97 TCS not fire ready
Error 98 Gas temp sensor
Error 99 Gas temp high
Warning 100 Inject orifice cal
Warning 101 CCI Volts too high
Error 102 SSPPM + 24 V supply
Error 103 CCI Volts too high
Error 104 AWR_WRMUP No λ Lock
Error 105 AWR No end of scan
Error 106 AWR PCell dark
Error 107 AWR PCell saturated
Error 108 AWR Dip too small
Error 109 AWR No left edge
ELS-6600 Version 3.0 Software Reference
Book
List
Error 110 AWR No right edge
Error 111 AWR Bad λ step
Error 112 AWR_SCAN aborted
Error 113 AWR Too few pts
Error 114 AWR_SCAN timeout
Error 115 AWR Adjust too big
Error 116 AWR_RESET Dscrpncy
Error 117 AWR_RESET No λ Lock
Error 118 AWR No scan data
Warning 120 XFR ShtData corrupt
Warning 121 XFR shtlgth corrupt
Warning 122 XFR SplData corrupt
Warning 123 XFR s_ack corrupt
Warning 124 XFR s_err corrupt
Warning 125 XFR bufofst corrupt
Error 126 XFR no SplData data
Error 130 TCS SEL/HVPS fault!
Error 131 TCS WCM data lag!
Warning 132 TCS corrupt offset
Warning 133 TCS corrupt cmd snt
Warning 134 TCS bad cmd length
Warning 135 TCS no command sent
Warning 136 TCS corrupt data
Error 137 TCS bad trig mode
Warning 138 TCS no pseudo fire
Error 140 TCS not initialized
Error 141 TCS HVPS Sum Fault
Error 142 TCS HVPS Overload
Error 143 TCS HVPS overtemp
Error 145 TCS bad command
Error 146 TCS selflock parm
Error 147 TCS nrgy low 2 long
Warning 148 TCS DRAM NMI
Error 149 TCS HV not charging
Error 150 TCS no MCS response
TOC
Help
Exit
101084-A 04/01
Warning 151 Bad remote HV data
Error 152 TCS internal error
Error 166 No 1st response-TCS
ELS-6600 Version 3.0 Software Reference
Book
List
ELS-6600 Version 3.0 Software Reference
TOC
Revision History
The product number, located at the bottom of each page, identifies this manual. The initial release and revisions to
the manual are indicated by a letter following the product number. The initial release will start with the letter “A” and
subsequent releases with “B”, “C”, etc.
Part Number
Revision
101084
A
Revision
Date
04/01
Summary
Released per CO 7511
– ELS-6600 Version 3.0 operating software
– Replaced part number 31-06-60011-P2 01/00
– Procedures comply with SEMI S2-93A (CO 2167)
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Limitation on Warranties and Liabilities
Cymer reserves the right to make changes in specifications and other information contained in this publication without
prior notice, and the reader should in all cases consult Cymer to determine whether any such changes have been
made. This manual may not be reproduced and is intended for the exclusive use of Cymer’s customers.
This publication represents the latest information available at the time of release. Due to continuous efforts to improve
the product, technical changes may occur that are not reflected in this document. Please contact Cymer Customer
Support for the latest information.
Copyright © 2001 by Cymer, Inc.
®
is a registered trademark of Cymer, Inc.
All Rights Reserved.
Microsoft, MS-DOS (DOS), Notepad, and Windows are registered trademarks of Microsoft Corporation.
No part of the publication may be reproduced or transmitted in any form or by any means, electronic or mechanical,
including photocopy, recording or any information storage and retrieval system, without permission in writing from
Cymer, Inc. Copying, under the law, includes translating into another language or format.
This technical data is for ultimate destination under U. S. law. Diversion contrary to U. S. law prohibited.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Getting Started
W:\CSS\IPROD\IPROD\CD Product Files\LaserCD\66SW_V3.0_0401\Preface.fm
0
Preface
TOC
This manual is written and organized for use by individuals skilled in the operation and function of industrial lasers
and their subsystems, particularly excimer lasers. It is assumed that this skill and knowledge will be used when
following the procedures outlined in this manual.
Getting Started
Before you attempt to install, operate, or service a Cymer excimer laser, carefully review the following important
information in the Laser Safety Manual:
•
Operating requirements for the laser
•
Potential hazards
•
Laser radiation safety features
•
Hazardous energy controls/lockout
•
Administration controls
•
Electrical safety features
•
Gas-handling safety features
•
Environmental air quality, fire, and mechanical safety features
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Documentation Set
Documentation Set
This manual is part of the Cymer documentation set that consists of the following manuals describing the laser and
its operation:
•
Laser Safety Manual
Provides comprehensive safety guidelines, safety labels and their
location, and precautions for working on and around the laser. It is
important that you read and understand this manual before
proceeding to any other manual.
•
Site Preparation
Manual
Describes facility requirements for the laser.
•
Installation Manual
Provides installation instructions, test procedure forms, and
instructions for repacking the laser for shipment.
•
Operations Manual
Describes laser characteristics and operation, as well as the routine
maintenance requirements of the laser.
•
Software Reference
A supplement providing the current release software configurables,
errors and warnings, and diagnostics in both summary and
descriptive forms.
•
Level I Service
Manual
Describes preventative maintenance service, including procedures
for consistent system performance and a complete description of
system interlocks.
•
Level II Service
Manual
Provides troubleshooting information necessary to isolate and solve
problems with the laser, including diagnostic data, error, warning
messages, and configurables.
•
Translator Module
Interface
Specifications
Provides engineering details for laser integration into a lithography
system, including signal descriptions, data syntax, and
communication protocols.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Highlighting Important Information
•
Material Safety Data
Sheets
Provide required safety information for proper handling and use of
the materials associated with the operation and maintenance of the
laser, as well as first-aid information for personnel operating the
laser. (These sheets are copies of vendor documents and are
available from Cymer upon request.)
•
Diagnostic PC User’s
Manual
Explains how to retrieve information, such as configuration and
diagnostic data, from the laser system that is connected to a PC
installed with the Diagnostic PC software.
•
CUBIT Operations
Manual
Explains how to use the CUBIT (Cymer ultraviolet beam imaging
telescope) in assessing chamber alignment and beam
characteristics of excimer lasers.
TOC
Highlighting Important Information
Throughout this manual, important information is highlighted in notes, cautions, warnings, or dangers, which
represent the following levels of importance:
Note
Identifies supplemental information to aid in understanding, as
well as important reminders, helpful hints, or shortcuts.
CAUTION
Identifies information that requires careful attention to prevent a
potentially hazardous situation which, if not avoided, can result in
minor or moderate injury or that alerts against unsafe practices.
WARNING
Identifies information that requires careful attention to prevent a
hazardous situation or unsafe practice that presents an
immediate threat of personal injury.
DANGER
Identifies information that requires careful attention to prevent an
imminently hazardous situation which, if not avoided, will result in
death or serious injury.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Safety Precautions
Safety Precautions
Cymer’s excimer lasers are designated as Class IV laser products. All Class IV laser devices present potential
hazards during their operation and maintenance. Cymer recommends that specific operational procedures be
followed to protect users from these potential hazards. (See the Laser Safety Manual for complete safety
information.)
CAUTION: Using controls or adjustments, or performing procedures other than those specified in this
manual, can result in hazardous radiation. Only qualified personnel should maintain and operate the laser.
Please contact Cymer for any questions regarding the procedures outlined in this manual.
Contacting Customer Support
In the event that you need further assistance, or if you encounter unexpected problems, contact Cymer Technical
Support in one of the following ways:
Inside the United States:
Call the Customer Response Center (CRC) at 1-888-MYCYMER
Outside the United States:
Check the CYMER web site (www.cymer.com) for the address and phone number of the nearest regional office.
Note: All references to contacting Cymer Technical Support that appear in this manual should be handled
as noted above.
User Feedback
Help
We are interested in receiving your comments about this manual. Please complete and FAX the User Feedback form
to Cymer. The form is located at the back of the manual.
CD-ROM and Printed Formats
Exit
This manual is available in CD-ROM format for online viewing. The CD-ROM also contains a printable version of this
manual, which can be accessed via the Cymer Documentation icon or lasrdoc.pdf file on the CD-ROM.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
1
TOC
1
Configurable Descriptions
This chapter contains individualized configurable tables that are identified by name, number, and page listing.
Help
Exit
Configurable Descriptions
C 0 RepRtMax
C 1 HVSetMin
C 2 HVSetMax
C 3 EnrgyMin
C 4 EnrgyMax
C 5 LmbdaMin
C 6 LmbdaMax
C 16 KLen IHk
C 21 Bins1Tim
C 22 Bins2Tim
C 23 KShotCnt
C 24 PCelGain
C 25 HVPS_Cal
C 26 HVChgTim
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
C 27 HVAdjust
C 30 HVDfault
C 31 HVAdjMin
C 32 HVAdjMax
C 33 EnrgyLow
C 35 RAvgSmpl
C 38 E Dither
C 39 TauDithr
C 40 DithrInt
C 41 DedvFrac
C 42 EnrgyFrc
C 43 DoseFrac
C 44 Bin_Frac
C 46 KLen XSg
C 49 ExtPCell
C 50 SlockMin
C 52 SLTimOut
C 53 RcvryLmt
C 54 Trig Dly
C 55 M adOfst
C 56 T adOfst
C 57 Sync0Dly
C 58 Sync1Dly
C 59 Sync2Dly
C 66 KLen XHk
C 70 TauSigma
C 71 TauSgmaN
C 72 EFrc IHk
C 73 DFrc IHk
C 74 BFrc IHk
C 77 EFrc XSg
C 78 DFrc XSg
C 79 BFrc XSg
C 82 EFrc XHk
C 83 DFrc XHk
TOC
Help
Exit
101084-A 04/01
C 84 BFrc XHk
C 90 DoseLock
C 91 DoseErMx
C 92 DoseShts
C 100 CloseTim
C 101 VPmpHTim
C 102 FlshLnTm
C 103 L_ChkTim
C 104 BkFilTim
C 105 H_FilTim
C 106 F_FilTim
C 107 N_FilTim
C 108 InjktTim
C 109 BleedTim
C 110 BurpTime
C 111 P_ChkTim
C 112 M_ChkTim
C 113 L_VacTim
C 114 C_VacTim
C 115 RoughTim
C 130 F_FilDPr
C 131 LasngPrs
C 132 T_FilPrs
C 133 BkFilPrs
C 134 BurpDPrs
C 135 InjktDPr
C 136 P_ChkPrs
C 137 M_ChkPrs
C 138 L_VacPrs
C 139 C_VacPrs
C 140 N2PrsMin
C 141 L_ChkDPr
C 142 BledDPrs
C 143 BledOPrs
C 144 PmpTOPrs
ELS-6600 Version 3.0 Software Reference
Book
List
C 145 MnPrsDsT
C 160 SSTimOut
C 162 InjHrMin
C 163 InjDltaV
C 164 InjDltaE
C 165 F2PerHr_
C 166 F2PerMSh
C 167 ECInjMin
C 168 InjTauMn
C 169 InjTauMx
C 170 InjktTau
C 171 TimedInj
C 172 AvgInjMS
C 173 F2MaxPct
C 174 F2MinPct
C 175 F2CmpPct
C 176 VoltNorm
C 177 EngyNorm
C 180 MPrsOfst
C 181 CPrsOfst
C 182 VPrsOfst
C 183 N2PsOfst
C 184 MPrsBval
C 185 CPrsBval
C 186 VPrsBval
C 187 N2PsBval
C 200 InjShots
C 201 TotlShts
C 202 GasShots
C 203 FWndShts
C 204 RWndShts
C 205 ChmbrSht
C 206 FltrShts
C 207 FrntShts
C 208 RearShts
TOC
Help
Exit
101084-A 04/01
C 209 WCMShots
C 210 HVPSShts
C 211 ComprSht
C 212 CommuSht
C 213 BmSplSht
C 214 CntrlSht
C 215 ShtrOSht
C 219 PwrOnTim
C 220 GsXdcrTm
C 221 H2OBoxTm
C 240 F2TrapCy
C 241 ShuttrCy
C 242 BearngLf
C 243 StaticTm
C 244 InjectCt
C 245 GsModFil
C 246 GasPmpCy
C 247 H2OBoxHr
C 250 GasMaint
C 251 Gas_Life
C 252 FWndowMt
C 253 FWndowLf
C 254 RWndowMt
C 255 RWndowLf
C 256 ChambrMt
C 257 ChambrLf
C 258 FilterMt
C 259 FilterLf
C 260 FrontMnt
C 261 FrontLif
C 262 RearMant
C 263 RearLife
C 264 WCMMaint
C 265 WCM_Life
C 266 HVPSMant
ELS-6600 Version 3.0 Software Reference
Book
List
C 267 HVPSLife
C 268 ComprMnt
C 269 ComprLif
C 270 CommuMnt
C 271 CommuLif
C 272 BeamMant
C 273 BeamLife
C 274 F2TrapMt
C 275 F2TrapLf
C 276 StaticLf
C 277 GsXdcrMt
C 279 H2OBoxMt
C 290 MaintInt
C 291 AvgRepRt
C 301 HWLsrRes
C 302 WvLckBnd
C 303 WCMHldOf
C 304 SgmaLock
C 305 SgmaUnlk
C 306 SgmaPeak
C 307 ISHldOff
C 308 ISSgmaLk
C 309 ISSgmaPk
C 310 ISSgmaUl
C 311 ISWvLckB
C 331 WCntlBnd
C 332 LineWMax
C 350 AwrEnabl
C 351 FeMaxAdj
C 352 AWRreprt
C 370 BlwrDrvS
C 371 BlSpdRng
C 376 BlwrIMax
C 380 BlrMnFan
C 390 Sys_Cntl
TOC
Help
Exit
101084-A 04/01
C 391 SysData1
C 392 SysData2
C 393 SysData3
C 394 DiagPcRt
C 400 Mft_Imax
C 401 Mft_Imin
C 409 ChmbrCld
C 411 H2OMaxTp
C 412 Heat_On_
C 413 Heat_Off
C 414 Cool_Off
C 415 Cool_On_
C 416 ChmbrHot
C 417 HtDCycTm
C 418 GasT_Slp
C 419 GasT_Ofs
C 420 H2OT_Slp
C 421 H2OT_Ofs
C 422 Spr1TSlp
C 423 Spr1TOfs
C 424 Spr2TSlp
C 425 Spr2TOfs
C 430 Lamp1_01
C 431 Lamp1_02
C 432 Lamp1_03
C 433 Lamp1_04
C 434 Lamp1_05
C 435 Lamp1_06
C 436 Lamp1_07
C 437 Lamp2_01
C 438 Lamp2_02
C 439 Lamp2_03
C 440 Lamp2_04
C 441 Lamp2_05
C 442 Lamp2_06
ELS-6600 Version 3.0 Software Reference
Book
List
C 443 Lamp2_07
C 444 Lamp3_01
C 445 Lamp3_02
C 446 Lamp3_03
C 447 Lamp3_04
C 448 Lamp3_05
C 449 Lamp3_06
C 450 Lamp3_07
C 451 ILBuzzer
C 452 5FcnSSIL
C 460 SerialNo
C 461 Lsr_Type
C 462 Gas_Type
C 463 Open_Hex
C 464 RmteVAPO
C 465 IfaceTyp
C 466 Paraltyp
C 469 PupState
C 470 Cntl_Dev
C 471 AirTmpMx
C 472 H2OTmpMx
C 473 H2OtTmpMn
C 474 H2OflwMn
C 475 Bckwrd2F
C 476 IN_actlv
C 477 OUTactlv
C 478 WD_SETUP
C 479 LW_Type_
C 480 HostBaud
C 481 ChmbrSN
C 489 FeLampEn
C 499 MonChan
TOC
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
0
Configurable Descriptions
The following configurables are based upon the current software for the ELS-6600 series laser. Each configurable is
identified by a number and name which uses applicable units of measures. The system will reset to the default values
if RAM reconfiguration is necessary. Some of the configurables have fixed values, while others have ranges that are
set during manufacturing and listed in the table when applicable.
C 0 RepRtMax
Configurable
C 0 RepRtMax
Units
Hz
Default
Range
2000
Read
Supervisor
Write
None
Description:
Repetition rate maximum limits the repetition rate that can be entered from the hand held terminal or from a
stepper/scanner command.
C 1 HVSetMin
Configurable
C 1 HVSetMin
Units
1.0V
Default
Range
600
Description:
High voltage (HV) set minimum is the minimum voltage set point.
Help
Exit
101084-A 04/01
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 2 HVSetMax
Configurable
C 2 HVSetMax
Units
1.0V
Default
Range
1000
Read
Supervisor
Write
None
Description:
High voltage set maximum is the maximum voltage set point.
C 3 EnrgyMin
Configurable
C 3 EnrgyMin
Units
1µJ
Default
Range
7000
Read
Supervisor
Write
OEM
Description:
Energy minimum is the minimum pulse energy entered from the hand held terminal or a stepper/scanner
command. It is also displayed by the set energy entry limit error.
C 4 EnrgyMax
Configurable
C 4 EnrgyMax
Units
1µJ
Default
13000
Description:
Energy maximum is the maximum pulse energy set point.
Help
Exit
101084-A 04/01
Range
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 5 LmbdaMin
Configurable
C 5 LmbdaMin
Units
0.1pm +
246000 pm
Default
Range
22000
Read
Supervisor
Write
OEM
Description:
Lambda minimum is the minimum target wavelength. The wavelength is represented internally as an offset
from 246 nm in units of 0.1pm.
C 6 LmbdaMax
Configurable
C 6 LmbdaMax
Units
0.1pm +
246000pm
Default
Range
25100
Read
Supervisor
Write
OEM
Description:
Lambda maximum is the maximum target wavelength. It limits the maximum tunable range, and is
represented internally as an offset from 246 nm in 0.1pm units.
C 16 KLen IHk
Configurable
C 16 KLen IHk
Help
Units
Pulses
Description:
Internal Hk, number of Hk profiling bins.
Exit
101084-A 04/01
Default
5
Range
0-5
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 21 Bins1Tim
Configurable
C 21 Bins1Tim
Units
10ms
Default
Range
30
Read
Supervisor
Write
OEM
Description:
The HV profiling algorithm uses three separate sets of HV profiling bins. Each set of bins applies to a
different interburst interval range. The minimum interburst interval is 0.1s. Bin set 0 applies from 0.1s to the
configurable C21 Bins1Tim. Bin set 1 applies from the configurable Bins1Tim to the configurable C22
Bins2Tim.
C 22 Bins2Tim
Configurable
C 22 Bins2Tim
Units
10ms
Default
Range
450
Read
Supervisor
Write
OEM
Description:
The HV profiling algorithm uses three separate sets of HV profiling bins. Each set of bins applies to a
different interburst interval range. Bin set 1 applies from the configurable C21 Bins1Tim to the configurable
C22 Bins2Tim.
C 23 KShotCnt
Configurable
Help
C 23 KShotCnt
Units
Bins
Default
5
Range
0-5
Read
Supervisor
Description:
K shot count is the number of pulses for which the HV profiling is effective in each burst.
Exit
101084-A 04/01
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 24 PCelGain
Configurable
C 24 PCelGain
Units
µJ/5V
Default
48000
Range
25000 - 45000
Read
Supervisor
Write
Supervisor
Description:
Photocell gain is the gain calibration for the photocell signal from the energy monitor in the stabilization
module. The optical and electronic gain of the energy monitor are factory set to a default value. This value is
multiplied by the ADC reading to yield the pulse energy as displayed in the energy display mode and as
diagnostic internal energy.
C 25 HVPS_Cal
Configurable
C 25 HVPS_Cal
Units
---
Default
1024
Range
900 - 1100
Read
Supervisor
Write
OEM
Description:
This configurable is used to compensate for inaccuracies in the control module, HVPS, or SSPPM
commutator. An input voltage of 1.0 V to the HVPS corresponds to an output voltage of 100 V. However,
changes to the HVPS_Cal value will not go into effect until the laser drops to STANDBY state and then reenters LSRON state.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 26 HVChgTim
Configurable
C 26 HVChgTim
Units
1µs
Default
Range
350
Read
Supervisor
Write
None
Description:
High voltage charge time is the interval during which the HV_ENABLE signal enables the HV power supply
to charge the HV storage capacitor in the commutator. In manual or gated trigger modes this interval is
followed immediately by an SSPPM_TRIG trigger pulse to the commutator. The HVChgTim must be
compatible with the repetition rate to allow at least 200µs between laser firing and start of the next charge
cycle. At 1000 Hz laser triggering occurs every 1 ms. The unit of measure for this configurable is 1µs. The
Default of 700 sets the HV Enable time to 700 µs. The HVPS requires at least 700 µs to charge VCO to
operating voltage. For repetition rates greater than 799 Hz, HV charge starts as soon as SSPPMRDY is true
- at approximately 200 ms after the last trigger. This configurable is not used when the repetition rate is
greater than 799 Hz.
C 27 HVAdjust
Configurable
C 27 HVAdjust
Units
0.001V/µJ
Default
5
Range
2-8
Read
Supervisor
Write
OEM
Description:
High voltage adjust is the increment added or subtracted from the high voltage control setting after each
pulse in the K region if adjustment is required by the pulse energy mode algorithm. Larger values allow
faster slewing response. Smaller values keep the system from overshooting.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 30 HVDfault
Configurable
C 30 HVDfault
Units
1.0V
Default
Range
700
Read
Supervisor
Write
OEM
Description:
High voltage default is the initial high voltage control set by the pulse energy mode algorithm if the fixed
voltage was previously zero.
C 31 HVAdjMin
Configurable
C 31 HVAdjMin
Units
1.0V
Default
Range
600
Read
Supervisor
Write
OEM
Description:
High voltage adjust minimum is the lowest voltage adjustment that the pulse energy mode algorithm is
allowed to make.
C 32 HVAdjMax
Configurable
C 32 HVAdjMax
Units
1.0V
Default
1000
Range
Read
Supervisor
Write
OEM
Description:
Help
High voltage adjust maximum is the upper limit of voltage adjustment that the pulse energy mode algorithm
is allowed to make.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 33 EnrgyLow
Configurable
C 33 EnrgyLow
Units
1µJ
Default
Range
5000
Read
Supervisor
Write
OEM
Description:
Energy low is the minimum pulse energy threshold below which a pulse is declared a misfire. The laser
maintains a running misfire counter that is cleared to zero at the beginning of LSRON state. Each misfire
adds 13 to the counter, each valid pulse decrements the counter by one unless it is already zero. If the
counter exceeds 127 the laser shuts down to STANDBY with the energy low error. This limits the misfires to
10 pulses in a row in the short run and 10% average in the long run.
C 35 RAvgSmpl
Configurable
C 35 RAvgSmpl
Units
1 shot
Default
Range
25
Read
Supervisor
Write
OEM
Description:
Running average samples is the number of HV settings used for a running average if the current HV setting
is missing or invalid.
C 38 E Dither
Configurable
Help
C 38 E Dither
Units
µJ
Description:
Amplitude of energy perturbation.
Exit
101084-A 04/01
Default
150
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 39 TauDithr
Configurable
C 39 TauDithr
Units
Pulses
Default
Range
20
Read
Supervisor
Write
OEM
Description:
Number of samples averaged to calculate de/dv.
C 40 DithrInt
Configurable
C 40 DithrInt
Units
Pulses
Default
Range
60
Read
Supervisor
Write
OEM
Description:
Number of pulses between energy perturbations.
C 41 DedvFrac
Configurable
C 41 DedvFrac
Units
Percent
Default
100
Description:
A percent of configurable C42 EFrclSg, based on the K region.
Help
Exit
101084-A 04/01
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 42 EnrgyFrc
Configurable
C 42 EnrgyFrc
Units
Percent
Default
Range
50
Read
Supervisor
Write
OEM
Description:
Proportional coefficient in the energy algorithm (internal sigma).
C 43 DoseFrac
Configurable
C 43 DoseFrac
Units
Percent
Default
Range
50
Read
Supervisor
Write
OEM
Description:
Integral coefficient in the energy algorithm (internal sigma).
C 44 Bin_Frac
Configurable
C 44 Bin_Frac
Units
Percent
Default
30
Description:
Proportional coefficient for K region bins (internal sigma).
Help
Exit
101084-A 04/01
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 46 KLen XSg
Configurable
C 46 KLen XSg
Units
Pulses
Default
5
Range
0-5
Read
Supervisor
Write
OEM
Description:
Number of HV profiling bins (external sigma).
C 49 ExtPCell
Configurable
C 49 ExtPCell
Units
1/256
Default
Range
1024
Read
Supervisor
Write
OEM
Description:
External photo cell calibration factor.
C 50 SlockMin
Configurable
C 50 SlockMin
Units
1µJ
Default
8000
Range
Read
Supervisor
Write
Supervisor
Description:
Help
Selflock energy minimum is the minimum value of average energy required when in SELFLOCK trigger
mode and STEPPER/SCANNER control mode. If the 256 pulse running energy average falls below
SLockMin, the energy ready status of the stepper/scanner interface is declared not ready. Selflock triggering
will shift into high repetition rate to try to correct the deficiency.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 52 SLTimOut
Configurable
C 52 SLTimOut
Units
Minutes
Default
Range
15
Read
Supervisor
Write
Supervisor
Description:
Stepper/scanner selflock mode maximum time limit.
C 53 RcvryLmt
Configurable
C 53 RcvryLmt
Units
Bursts
Default
Range
50
Read
Supervisor
Write
Supervisor
Description:
Recovery limit is a variable from zero to 65535. RcvryLmt is the number of recovery bursts allowed in
STEPPER/SCANNER control mode and SELFLOCK trigger mode to correct beam quality. The default will
equal the number of bursts allowed to fire in quick succession to recover beam quality. A value of zero
causes an error and immediate shutdown to standby. Beam quality is considered okay when energy,
linewidth, and wavelength are all within specifications.
C 54 Trig Dly
Configurable
C 54 Trig Dly
Help
Units
N/A
Default
16
Range
0 - 160
Description:
Programmable time delay between trigger signal and emission of light.
Exit
101084-A 04/01
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 55 M adOfst
Configurable
C 55 M adOfst
Units
N/A
Default
Range
10
Read
Supervisor
Write
OEM
Description:
Intrinsic offset of AD converter for MCS. Not implemented.
C 56 T adOfst
Configurable
C 56 T adOfst
Units
N/A
Default
Range
10
Read
Supervisor
Write
OEM
Description:
Intrinsic offset of AD converter for TCS. Not implemented.
C 57 Sync0Dly
Configurable
C 57 Sync0Dly
Description:
Voltage set point 1.
Help
Exit
101084-A 04/01
Units
Volt 1step=
2ns
Default
600
Range
600 - 1012
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 58 Sync1Dly
Configurable
C 58 Sync1Dly
Units
1step=2ns
Default
0
Range
0 - 50
Read
Supervisor
Write
OEM
Description:
Delay value.
C 59 Sync2Dly
Configurable
C 59 Sync2Dly
Units
Volt
1step=2ns
Default
600
Range
600 - 1012
Read
Supervisor
Write
OEM
Description:
Voltage set point 2. When entered, if equal to configurable C57 Sync0Dly, delay value is updated to value in
configurable C58 Sync1Dly.
C 66 KLen XHk
Configurable
C 66 KLen XHk
Units
Pulses
Description:
Help
Number of profiling bins (external Hk).
Exit
101084-A 04/01
Default
5
Range
0-5
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 70 TauSigma
Configurable
C 70 TauSigma
Units
Samples
Default
Range
100
Read
Supervisor
Write
OEM
Description:
Number of samples averaged for energy sigma.
C 71 TauSgmaN
Configurable
C 71 TauSgmaN
Units
Samples
Default
Range
100
Read
Supervisor
Write
OEM
Description:
Number of samples averaged for energy sigma.
C 72 EFrc IHk
Configurable
C 72 EFrc IHk
Units
Percent
Default
50
Description:
Proportional coefficient in the energy algorithm (internal Hk).
Help
Exit
101084-A 04/01
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 73 DFrc IHk
Configurable
C 73 DFrc IHk
Units
Percent
Default
Range
50
Read
Supervisor
Write
OEM
Description:
Integral coefficient in the energy algorithm (internal Hk).
C 74 BFrc IHk
Configurable
C 74 BFrc IHk
Units
Percent
Default
Range
30
Read
Supervisor
Write
OEM
Description:
Proportional coefficient for K region bins (internal Hk).
C 77 EFrc XSg
Configurable
C 77 EFrc XSg
Units
Percent
Default
Range
50
Description:
Proportional coefficient in the energy algorithm (external sigma).
Help
Exit
101084-A 04/01
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 78 DFrc XSg
Configurable
C 78 DFrc XSg
Units
Percent
Default
Range
50
Read
Supervisor
Write
OEM
Description:
Integral coefficient in the energy algorithm (external sigma).
C 79 BFrc XSg
Configurable
C 79 BFrc XSg
Units
Percent
Default
Range
30
Read
Supervisor
Write
OEM
Description:
Proportional coefficient of K region bins (external sigma).
C 82 EFrc XHk
Configurable
C 82 EFrc XHk
Units
Percent
Default
50
Description:
Proportional coefficient in the energy algorithm (external Hk).
Help
Exit
101084-A 04/01
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 83 DFrc XHk
Configurable
C 83 DFrc XHk
Units
Percent
Default
Range
50
Read
Supervisor
Write
OEM
Description:
Integral coefficient in the energy algorithm (external Hk).
C 84 BFrc XHk
Configurable
C 84 BFrc XHk
Units
Percent
Default
Range
30
Read
Supervisor
Write
OEM
Description:
Proportional coefficient for K region bins (external Hk).
C 90 DoseLock
Configurable
C 90 DoseLock
Units
T/F
Default
0
Range
Read
Supervisor
Write
OEM
Description:
Help
When DoseLock=0 the energy diagnostic sigma is calculated and used to determine whether the laser
energy is locked. Configurables DoseErMx and DoseShts are ignored. When this configurable=1 the energy
diagnostic sigma is not calculated and the sigma diagnostics are not updated. All configurable sigma limits
are ignored. The dose based energy lock algorithm is enabled and uses DoseErMx and DoseShts to set or
clear the Energy Lock signal. Nonzero = > use dose energy lock criteria.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 91 DoseErMx
Configurable
C 91 DoseErMx
Units
±µJ
Default
Range
3000
Read
Supervisor
Write
OEM
Description:
Dose energy maximum sets the limit for total dose energy error. The laser is considered to be locked within
this limit. This configurable applies only when DoseLock is enabled (1). At each pulse in the burst (after the
first DoseShots) the absolute value of the total dose error ShotErrorSum is compared to a configurable limit
DoseErMx. If ShotErrorSum > DoseErMx the energy locked signal is cleared within 500 µs of the pulse that
was out of tolerance.
C 92 DoseShts
Configurable
C 92 DoseShts
Units
Shots
Default
Range
32
Read
Supervisor
Write
OEM
Description:
Dose shots is applied only when DoseLock is on and is the minimum number of pulses in a burst before total
dose energy lock is valid. At each pulse in the burst (after the first dose shots) the absolute value of the total
dose error ShotErrorSum is compared to a configurable limit DoseErMx. If ShotErrorSum > DoseErMx the
energy locked signal is cleared within 500 µs of the pulse that was out of tolerance.
C 100 CloseTim
Help
Configurable
C 100 CloseTim
Units
1second
Description:
Exit
Time allowed to close gas valves.
101084-A 04/01
Default
1
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 101 VPmpHTim
Configurable
C 101 VPmpHTim
Units
1second
Default
Range
3
Read
Supervisor
Write
OEM
Description:
Vacuum pump helium time defines the number of seconds allowed to backfill the vacuum pump foreline with
helium at the close of an automated gas procedure.
C 102 FlshLnTm
Configurable
C 102 FlshLnTm
Units
1second
Default
Range
10
Read
Supervisor
Write
OEM
Description:
Gas supply line flush time.
C 103 L_ChkTim
Configurable
C 103 L_ChkTim
Units
1second
Default
60
Range
Read
Supervisor
Write
OEM
Description:
Help
Line supply check time is the maximum time allowed for the L_CHK gas step to sense line supply pressure
in the manifold after the krypton/neon, helium, or fluorine valve has been opened by N_CHK, H_CHK, or
F_CHK gas step. Neon, fluorine, or helium line pressure check time limit.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 104 BkFilTim
Configurable
C 104 BkFilTim
Units
1second
Default
Range
60
Read
Supervisor
Write
OEM
Description:
Back fill time is the maximum time allowed for the FBKFIL or NBKFL gas step to backfill the gas supply line
to BkFilPrs helium pressure after the gas supply line has been pumped out. Neon or fluorine supply line
backfill time.
C 105 H_FilTim
Configurable
C 105 H_FilTim
Units
1second
Default
Range
240
Read
Supervisor
Write
OEM
Description:
Helium fill time is the maximum time allowed for the H_BAL or H_FIL gas steps to reach BkFilPrs or
LasngPrs - 200, respectively. This configurable is used in the BKFIL and the C_PRG gas functions. Helium
fill or balance.
C 106 F_FilTim
Configurable
C 106 F_FilTim
Help
Units
1second
Default
180
Range
Read
Supervisor
Write
OEM
Description:
Fluorine fill time is the maximum time allowed for the F_FIL1 or F_FIL2 gas step to reach the target pressure
during the REFIL gas function.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 107 N_FilTim
Configurable
C 107 N_FilTim
Units
1second
Default
Range
300
Read
Supervisor
Write
OEM
Description:
Krypton/neon fill time is the maximum time allowed for the N_FIL gas step to reach T_FilPrs - InjktDPr
during the REFIL gas function. Neon fill chamber to C 132 T_FilPrs time limit.
C 108 InjktTim
Configurable
C 108 InjktTim
Units
1second
Default
Range
60
Read
Supervisor
Write
OEM
Description:
Inject time is the maximum time allowed for the INJKT gas step to increase the chamber pressure by
InjktDPr during the INJKT gas function.
C 109 BleedTim
Configurable
C 109 BleedTim
Units
1second
Default
60
Range
Read
Supervisor
Write
OEM
Description:
Help
Bleed time is the maximum time allowed for the BLEED gas step to decrease the chamber pressure by
BledDPrs during the INJKT gas function. Chamber bleed down to configurable C 132 T_FilPrs time limit.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 110 BurpTime
Configurable
C 110 BurpTime
Units
1second
Default
Range
360
Read
Supervisor
Write
OEM
Description:
Burp time is the total duration of the BURP_ gas step allowing the chamber pressure to equilibrate to
atmospheric pressure at the end of C_Prg gas function. If chamber pressure does not drop by BurpDPrs
during BURP_ gas step a timeout error occurs.
C 111 P_ChkTim
Configurable
C 111 P_ChkTim
Units
1second
Default
Range
380
Read
Supervisor
Write
OEM
Description:
Pump check time is the maximum time allowed for the P_ChkPrs gas step to reach P_ChkPrs.
C 112 M_ChkTim
Configurable
C 112 M_ChkTim
Units
1second
Default
400
Range
Read
Supervisor
Write
OEM
Description:
Help
Manifold check time is the maximum time allowed for the M_Chk gas step to reach M_ChkPrs.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 113 L_VacTim
Configurable
C 113 L_VacTim
Units
1second
Default
Range
470
Read
Supervisor
Write
OEM
Description:
Line vacuum time is the maximum time allowed for the N, HVAC, or FVAC gas step to evacuate the
krypton/neon, helium, or fluorine supply line down to L_VacPrs. Neon or fluorine line evacuation.
C 114 C_VacTim
Configurable
C 114 C_VacTim
Units
1second
Default
Range
1
Read
Supervisor
Write
OEM
Description:
Chamber vacuum time after ROUGH.
C 115 RoughTim
Configurable
C 115 RoughTim
Units
1second
Default
1800
Range
Read
Supervisor
Write
OEM
Description:
Help
Rough pump time is the maximum time allowed for the ROUGH gas step to pump the laser chamber down
to C_VacPrs - 2.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 130 F_FilDPr
Configurable
C 130 F_FilDPr
Units
0.1kPa
Default
240
Range
200 - 360
Read
Supervisor
Write
Supervisor
Description:
Fluorine fill delta pressure is the partial pressure of fluorine gas put in the laser chamber in the F_FIL1 gas
step of the REFIL gas function. This controls the richness of the laser gas mixture and must be used to
compensate for variations in the fluorine gas supply.
C 131 LasngPrs
Configurable
C 131 LasngPrs
Units
0.1kPa
Default
Range
2500
Read
Supervisor
Write
Supervisor
Description:
Lasing pressure is the minimum chamber pressure required to allow the laser to enter LSRON state and it is
the minimum pressure required for operation of the metal fluoride trap and the chamber blower fan. It is also
the helium fill pressure - 200 during the first cycles of C_Prg gas function. This ensures that the laser will not
be fired, and the metal fluoride trap or chamber blower fan will not be turned on, with helium in the chamber.
C 132 T_FilPrs
Help
Configurable
C 132 T_FilPrs
Units
0.1kPa
Default
2900
Range
Read
Supervisor
Write
OEM
Description:
Exit
Total fill pressure is the final chamber pressure setpoint for the REFIL gas function. T_FilPrs must be
greater than LasngPrs to allow the laser to enter LSRON state.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 133 BkFilPrs
Configurable
C 133 BkFilPrs
Units
0.1kPa
Default
Range
1120
Read
Supervisor
Write
Supervisor
Description:
Back fill pressure is the helium fill pressure setpoint for the FBKFL, NBKFL and H_BAL gas steps. It is set
slightly greater than atmospheric pressure. During the C_Prg gas function the helium balance step is
followed by the BURP gas step in which the excess helium is vented to equilibrate the chamber to
atmospheric pressure. BkFilPrs must be greater than atmospheric pressure plus BurpDPr for the BURP gas
step to work properly. Helium supply line backfill pressure chamber manifold.
C 134 BurpDPrs
Configurable
C 134 BurpDPrs
Units
0.1kPa
Default
50
Range
Read
Supervisor
Write
Supervisor
Description:
Burp delta pressure is the minimum required drop in chamber pressure during the BURP gas step of the
C_Prg gas function. This drop confirms that the chamber, which was filled to BkFilPrs by the H_BAL gas
step, has been vented to atmospheric pressure.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 135 InjktDPr
Configurable
C 135 InjktDPr
Units
0.1kPa
Default
40
Range
30 - 65
Read
Supervisor
Write
OEM
Description:
Injection delta pressure is the increase in chamber pressure during the INJKT gas step of the Injkt gas
function. The current chamber pressure is read and added to InjktDPr to yield the setpoint for the INJKT gas
step. InjktDPr controls the amount of fluorine injected into the laser each time Injkt gas function is
performed.
C 136 P_ChkPrs
Configurable
C 136 P_ChkPrs
Units
0.1kPa
Default
Range
70
Read
Supervisor
Write
Supervisor
Description:
Pump check pressure is the target vacuum pressure for the P_CHK gas step. An error occurs if the pump is
unable to pump down to this pressure or below within P_ChkTim.
C 137 M_ChkPrs
Configurable
C 137 M_XhkPrs
Help
Units
0.1kPa
Default
100
Range
Read
Supervisor
Write
Supervisor
Description:
Manifold check pressure is the target manifold pressure for M_CHK gas step. An error occurs if the pump is
unable to pump the manifold down to this pressure or below within M_ChkTim.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 138 L_VacPrs
Configurable
C 138 L_VacPrs
Units
0.1kPa
Default
Range
70
Read
Supervisor
Write
Supervisor
Description:
Line vacuum pressure is the target manifold pressure for FVAC or NVAC gas step after either the fluorine or
krypton/neon supply line manifold valve has been opened. An error occurs if the pump is unable to pump the
selected supply line down to this pressure or below within L_VacTim. Maximum manifold pressure.
C 139 C_VacPrs
Configurable
C 139 C_VacPrs
Units
0.1kPa
Default
Range
130
Read
Supervisor
Write
Supervisor
Description:
Chamber vacuum pressure minus 200 (0.1 kPa) is the target pressure for the ROUGH pump gas step. If the
pump is unable to pump the chamber down to this pressure or below within RoughTim an error occurs.
Chamber maximum pump down pressure.
C 140 N2PrsMin
Configurable
C 140 N2PrsMin
Help
Exit
Units
0.1kPa
Default
5800
Range
Read
Supervisor
Write
Supervisor
Description:
Nitrogen pressure minimum is the minimum pressure required to purge laser optics and to operate the pilot
controlled gas solenoid valves on the gas manifold. The nitrogen supply is turned on by the laser nitrogen
solenoid valves on the gas manifold whenever the laser is powered on. The laser will shut down to LASER
OFF if nitrogen pressure is not adequate. All gas functions begin with the N2CHK gas step.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 141 L_ChkDPr
Configurable
C 141 L_ChkDPr
Units
0.1kPa
Default
Range
330
Read
Supervisor
Write
Supervisor
Description:
Line check delta pressure is the static line supply pressure required above the fill pressure setpoint for a
krypton/neon, helium, or fluorine gas fill step. H_CHK, F_CHK or N_CHK gas steps open the appropriate
supply valve and wait for the manifold pressure to exceed either the LasngPrs, F_FilDPrs, or T_FilPrs plus
L_ChkDPr. Minimum pressure required above T_FilPrs line supply.
C 142 BledDPrs
Configurable
C 142 BledDPrs
Units
0.1kPa
Default
50
Range
38 - 88
Read
Supervisor
Write
Supervisor
Description:
The chamber gas pressure will be bled down by bleed down pressure (BledDPrs) amount if, during the preinject check step, the chamber pressure has exceeded the T_FilPrs by the configurable BledOPrs. Amount
to BLEED before INJKT.
C 143 BledOPrs
Configurable
Help
Exit
C 143 BledOPrs
Units
0.1kPa
Default
40
Range
30 - 70
Read
Supervisor
Write
Supervisor
Description:
The chamber gas pressure is checked against bleed off pressure (BledOPrs) before each injection. If the
chamber pressure has exceeded T_FilPrs by at least this amount, the chamber will be bled down by the
configurable amount BledDPrs. Threshold above C 132 T_FilPrs.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 144 PmpTOPrs
Configurable
C 144 PmpTOPrs
Units
0.1kPa
Default
Range
900
Read
Supervisor
Write
Supervisor
Description:
The vacuum pump cannot be started if the pressure on the pump is lower than this configurable pump turn
on pressure value.
C 145 MnPrsDsT
Configurable
C 145 MnPrsDsT
Units
Seconds
Default
Range
5
Read
Supervisor
Write
OEM
Description:
Minimum pressure display time is the length of time that gas supply pressure as read at the manifold is
displayed during FPCHK, HPCHK, and NPCHK procedures.
C 160 SSTimOut
Configurable
C 160 SSTimOut
Units
Seconds
Default
6400
Range
Read
Supervisor
Write
OEM
Description:
Help
SS time out sets the timeout since the last pulse fired, after which the SSI algorithm is disqualified. The SSI
algorithm is used in auto injections. Time since last shot until SSI invalid.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 162 InjHrMin
Configurable
C 162 InjHrMin
Units
0.1hours
Default
120
Range
10 - 120
Read
Supervisor
Write
OEM
Description:
Hours after SSI not dependent on fluorine consumed.
C 163 InjDltaV
Configurable
C 163 InjDltaV
Units
0.1V
Default
300
Range
240 - 480
Read
Supervisor
Write
OEM
Description:
Injection delta voltage is the required increase in the average high voltage to provoke a fluorine injection
request in INTERNAL ENERGY mode and AUTO INJECT gas mode. This parameter is ignored in SHOT
INJECT gas mode. Request auto inject, fixed E mode after V delta.
C 164 InjDltaE
Configurable
C 164 InjDltaE
Units
µJ
Default
1000
Range
Read
Supervisor
Write
OEM
Description:
Help
Injection delta energy is the required decrease in the average pulse energy to provoke a fluorine injection
request in INTERNAL HV mode and AUTO INJECT gas mode. This parameter is ignored in SHOT INJECT
gas mode. Request auto inject, fixed V mode after E delta.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 165 F2PerHr_
Configurable
C 165 F2PerHr_
Units
0.001kPa/hr
Default
50
Range
50 - 400
Read
Supervisor
Write
Supervisor
Description:
Fluorine per hour is used by the estimated consumption algorithm (SHOT INJECT gas mode) to calculate
the passive component of the fluorine consumption.
C 166 F2PerMSh
Configurable
Units
C 166 F2PerMSh
0.001kPa/
Mshot
Default
800
Range
600 - 1200
Read
Supervisor
Write
Supervisor
Description:
Fluorine per million pulses is used by the estimated consumption algorithm (SHOT INJECT gas mode) to
calculate the active component of the fluorine consumption.
C 167 ECInjMin
Configurable
C 167 ECInjMin
Units
0.10%
Default
500
Range
Read
Supervisor
Write
Supervisor
Description:
Help
Exit
Estimated consumption injection minimum is used by the AUTO INJECT gas mode to compute a minimum
value of the fluorine consumption above which an auto injection can be initiated as long as all other auto
inject criteria are met. The following inequality that uses ECInjMin must be satisfied for an auto injection to
be initiated: (fluorine consumption) ≥ InjktDPr/ECInjMin/1000. Minimum interval auto injects, on estimated
consumption.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 168 InjTauMn
Configurable
C 168 InjTauMn
Units
0.01s
Default
Range
1000
Read
Supervisor
Write
Supervisor
Description:
Inject time constant minimum sets the minimum limit for the value of InjktTau. InjktTau is calculated by the
C_TAU gas step after each refill. If C_TAU calculates a value for InjktTau that is outside this set minimum a
warning is generated W100 Inject orifice cal. This is only a warning and will not interfere with the completion
of the Refill gas function. Orifice time constant minimum.
C 169 InjTauMx
Configurable
C 169 InjTauMx
Units
0.01s
Default
Range
8000
Read
Supervisor
Write
Supervisor
Description:
Inject time constant maximum sets the maximum limit for the value of InjktTau. InjktTau is calculated by the
C_TAU gas step after each refill. If C_TAU calculates a value for InjktTau that is outside this set maximum a
warning is generated E 100 Inject orifice cal. This is only a warning and will not interfere with the completion
of the Refill gas function. Orifice time maximum.
C 170 InjktTau
Configurable
Help
C 170 InjktTau
Units
0.01s
Default
1753
Range
1000 - 8000
Read
Supervisor
Write
Supervisor
Description:
Exit
Inject time constant sets the time constant characteristic of the gas manifold inject orifice. It is calculated by
the C_TAU gas step after each refill. Orifice time constant for gas manifold inject orifice.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 171 TimedInj
Configurable
C 171 TimedInj
Units
T/F
Default
Range
1
Read
Supervisor
Write
Supervisor
Description:
This configurable selects either timed or pressure injects. A 1 (one) causes injects to be timed as
determined by the last gas refill; a 0 (zero) causes injects to be based on pressure changes as specified by
InjktDPr.
C 172 AvgInjMS
Configurable
C 172 AvgInjMS
Units
0.1Mshots
Default
40
Range
10 - 100
Read
Supervisor
Write
OEM
Description:
Average shots between injects.
C 173 F2MaxPct
Configurable
C 173 F2MaxPct
Units
0.10%
Default
1500
Range
Read
Supervisor
Write
OEM
Description:
Help
This is used in the F2 injection algorithm to determine the maximum number of shots that are allowed to fire
after inject is requested. When this number of shots is exceeded, error E 093 F2 Inject Required, is issued
and the laser is set to standby. The maximum number of shots is a percentage based upon the historical
data that is generated by the F2 algorithm.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 174 F2MinPct
Configurable
C 174 F2MinPct
Units
0.10%
Default
Range
500
Read
Supervisor
Write
OEM
Description:
C 175 F2CmpPct
Configurable
C 175 F2CmpPct
Units
0.10%
Default
Range
1000
Read
Supervisor
Write
OEM
Description:
This is used to compensate the F2 PerMshot when the energy or voltage is set at a value other than the
normal values of 600V and 10 µJ.
C 176 VoltNorm
Configurable
C 176 VoltNorm
Units
Volts
Default
700
Description:
Voltage used for F2 consumed compensation.
Help
Exit
101084-A 04/01
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 177 EngyNorm
Configurable
C 177 EngyNorm
Units
µJ
Default
Range
10000
Read
Supervisor
Write
OEM
Description:
Energy used for F2 consumed compensation.
C 180 MPrsOfst
Configurable
C 180 MPrsOfst
Units
0.1kPa
Default
525
Range
272 - 418
Read
Supervisor
Write
Supervisor
Description:
Manifold pressure offset is an offset calibration for the manifold pressure transducer signal. This
configurable is used to calibrate the manifold pressure transducer.
C 181 CPrsOfst
Configurable
C 181 CPrsOfst
Units
0.1kPa
Default
1235
Range
1097 - 1663
Read
Supervisor
Write
Supervisor
Description:
Help
Chamber pressure offset is an offset calibration for the chamber pressure transducer signal. This
configurable is used to calibrate the chamber pressure transducer.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 182 VPrsOfst
Configurable
C 182 VPrsOfst
Units
0.1kPa
Default
67
Range
49 - 84
Read
Supervisor
Write
OEM
Description:
Vacuum pressure offset is an offset calibration for the vacuum pressure transducer signal. This configurable
is used to calibrate the vacuum pressure transducer.
C 183 N2PsOfst
Configurable
C 183 N2PsOfst
Units
0.1kPa
Default
345
Range
272 - 418
Read
Supervisor
Write
OEM
Description:
Nitrogen pressure offset is an offset calibration for the nitrogen supply pressure transducer signal. This
configurable is used to calibrate the nitrogen pressure transducer.
C 184 MPrsBval
Configurable
C 184 MPrsBval
Units
100kPa/cnt
Default
1683
Description:
Help
Manifold pressure transducer bit value scaling factor.
Exit
101084-A 04/01
Range
1657 - 1709
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 185 CPrsBval
Configurable
C 185 CPrsBval
Units
100kPa/cnt
Default
3366
Range
3282 - 3450
Read
Supervisor
Write
None
Description:
Chamber pressure transducer bit value scaling factor.
C 186 VPrsBval
Configurable
C 186 VPrsBval
Units
100kPa/cnt
Default
324
Range
320 - 330
Read
Supervisor
Write
None
Description:
Vacuum pressure transducer bit value scaling factor.
C 187 N2PsBval
Configurable
C 187 N2PsBval
Units
100kPa/cnt
Default
1683
Description:
Nitrogen pressure transducer bit value scaling factor.
Help
Exit
101084-A 04/01
Range
1657 - 1709
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 200 InjShots
Configurable
C 200 InjShots
Units
1Mshots
Default
Range
0
Read
Supervisor
Write
Supervisor
Description:
Shot counter since last injection.
C 201 TotlShts
Configurable
C 201 TotlShts
Units
1Mshots
Default
Range
0
Read
Supervisor
Write
None
Description:
Total shot counter for system.
C 202 GasShots
Configurable
C 202 GasShots
Units
1Mshots
Description:
Shot counter since last gas refill.
Help
Exit
101084-A 04/01
Default
0
Range
0 - 200
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 203 FWndShts
Configurable
C 203 FWndShts
Units
1Mshots
Default
0
Range
0 - 7000
Read
Supervisor
Write
Supervisor
Description:
Front chamber window shot counter.
C 204 RWndShts
Configurable
C 204 RWndShts
Units
1Mshots
Default
0
Range
0 - 7000
Read
Supervisor
Write
Supervisor
Description:
Rear chamber window shot counter.
C 205 ChmbrSht
Configurable
C 205 ChmbrSht
Units
1Mshots
Description:
Chamber and electrodes shot counter.
Help
Exit
101084-A 04/01
Default
0
Range
0 - 7000
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 206 FltrShts
Configurable
C 206 FltrShts
Units
1Mshots
Default
0
Range
0 - 7000
Read
Supervisor
Write
Supervisor
Description:
MFT shot counter.
C 207 FrntShts
Configurable
C 207 FrntShts
Units
1Mshots
Default
0
Range
0 - 12000
Read
Supervisor
Write
Supervisor
Description:
Front optics shot counter.
C 208 RearShts
Configurable
C 208 RearShts
Units
1Mshots
Description:
Rear optics shot counter.
Help
Exit
101084-A 04/01
Default
0
Range
0 - 12000
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 209 WCMShots
Configurable
C 209 WCMShots
Units
1Mshots
Default
0
Range
0 - 12000
Read
Supervisor
Write
Supervisor
Description:
WCM shop counter.
C 210 HVPSShts
Configurable
C 210 HVPSShts
Units
1Mshots
Default
0
Range
0 - 50000
Read
Supervisor
Write
Supervisor
Description:
HVPS shot counter.
C 211 ComprSht
Configurable
C 211 ComprSht
Units
1Mshots
Description:
SSPPM commutator shot counter.
Help
Exit
101084-A 04/01
Default
0
Range
0 - 50000
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 212 CommuSht
Configurable
C 212 CommuSht
Units
1Mshots
Default
0
Range
0 - 50000
Read
Supervisor
Write
Supervisor
Description:
SSPPM compression head shot counter.
C 213 BmSplSht
Configurable
C 213 BmSplSht
Units
1Mshots
Default
0
Range
0 - 12000
Read
Supervisor
Write
Supervisor
Description:
Stabilization module beam splitter shot counter.
C 214 CntrlSht
Configurable
C 214 CntrlSht
Units
1Mshots
Description:
Control module shot counter.
Help
Exit
101084-A 04/01
Default
0
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 215 ShtrOSht
Configurable
C 215 ShtrOSht
Units
1Mshots
Default
Range
0
Read
Supervisor
Write
Supervisor
Description:
Shutter open shot counter.
C 219 PwrOnTim
Configurable
C 219 PwrOnTim
Units
Hours
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Time laser powered on in hours.
C 220 GsXdcrTm
Configurable
C 220 GsXdcrTm
Units
Hours
Description:
Gas box maintenance time counter.
Help
Exit
101084-A 04/01
Default
0
Range
0 - 8760
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 221 H2OBoxTm
Configurable
C 221 H2OBoxTm
Units
Hours
Default
0
Range
0 - 8760
Read
Supervisor
Write
OEM
Description:
H2O box maintenance time counter.
C 240 F2TrapCy
Configurable
C 240 F2TrapCy
Units
Cycles/10
Default
0
Range
0 - 1750
Read
Supervisor
Write
Supervisor
Description:
Fluorine trap operation cycles counter.
C 241 ShuttrCy
Configurable
C 241 ShuttrCy
Description:
Shutter cycles counter.
Help
Exit
101084-A 04/01
Units
1Kcounts
Default
0
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 242 BearngLf
Configurable
C 242 BearngLf
Units
Hours
Default
Range
0
Read
Supervisor
Write
Supervisor
Description:
Chamber blower motor on time.
C 243 StaticTm
Configurable
C 243 StaticTm
Units
Hours
Default
0
Range
0 - 168
Read
Supervisor
Write
OEM
Description:
Static gas time.
C 244 InjectCt
Configurable
C 244 InjectCt
Units
Injects
Description:
Gas injects counter - gas log item.
Help
Exit
101084-A 04/01
Default
0
Range
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 245 GsModFil
Configurable
C 245 GsModFil
Units
Refills
Default
Range
0
Read
Supervisor
Write
None
Description:
Gas refills counter - gas log item.
C 246 GasPmpCy
Configurable
C 246 GasPmpCy
Units
Cycles
Default
Range
0
Read
Supervisor
Write
None
Description:
Gas box maintenance time counter.
C 247 H2OBoxHr
Configurable
C 247 H2OBoxHr
Units
Hours
Description:
H2O box maintenance time counter.
Help
Exit
101084-A 04/01
Default
0
Range
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 250 GasMaint
Configurable
C 250 GasMaint
Units
1Mshots
Default
Range
160
Read
Supervisor
Write
OEM
Description:
Maintenance shot count.
C 251 Gas_Life
Configurable
C 251 Gas_Life
Units
1Mshots
Default
Range
200
Read
Supervisor
Write
OEM
Description:
Lifetime shot counter.
C 252 FWndowMt
Configurable
C 252 FWndowMt
Description:
Maintenance shot count.
Help
Exit
101084-A 04/01
Units
1Mshots
Default
5600
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 253 FWndowLf
Configurable
C 253 FWndowLf
Units
1Mshots
Default
Range
7000
Read
Supervisor
Write
OEM
Description:
Lifetime shot count.
C 254 RWndowMt
Configurable
C 254 RWndowMt
Units
1Mshots
Default
Range
5600
Read
Supervisor
Write
Supervisor
Description:
Maintenance shot count.
C 255 RWndowLf
Configurable
C 255 RWndowLf
Description:
Lifetime shot count.
Help
Exit
101084-A 04/01
Units
1Mshots
Default
7000
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 256 ChambrMt
Configurable
C 256 ChambrMt
Units
1Mshots
Default
Range
5600
Read
Supervisor
Write
Supervisor
Description:
Maintenance shot count.
C 257 ChambrLf
Configurable
C 257 ChambrLf
Units
1Mshots
Default
Range
7000
Read
Supervisor
Write
OEM
Description:
Lifetime shot count.
C 258 FilterMt
Configurable
C 258 FilterMt
Description:
Maintenance shot count.
Help
Exit
101084-A 04/01
Units
1Mshots
Default
5600
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 259 FilterLf
Configurable
C 259 FilterLf
Units
1Mshots
Default
Range
7000
Read
Supervisor
Write
OEM
Description:
Lifetime shot count.
C 260 FrontMnt
Configurable
C 260 FrontMnt
Units
1Mshots
Default
Range
9600
Read
Supervisor
Write
Supervisor
Description:
Maintenance shot count.
C 261 FrontLif
Configurable
C 261 FrontLif
Description:
Lifetime shot count.
Help
Exit
101084-A 04/01
Units
1Mshots
Default
12000
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 262 RearMant
Configurable
C 262 RearMant
Units
1Mshots
Default
Range
8000
Read
Supervisor
Write
Supervisor
Description:
Maintenance shot count.
C 263 RearLife
Configurable
C 263 RearLife
Units
1Mshots
Default
Range
10000
Read
Supervisor
Write
OEM
Description:
Lifetime shot count.
C 264 WCMMaint
Configurable
C 264 WCMMaint
Description:
Maintenance shot count.
Help
Exit
101084-A 04/01
Units
1Mshots
Default
9600
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 265 WCM_Life
Configurable
C 265 WCM_Life
Units
1Mshots
Default
Range
12000
Read
Supervisor
Write
OEM
Description:
Lifetime shot count.
C 266 HVPSMant
Configurable
C 266 HVPSMant
Units
1Mshots
Default
Range
40000
Read
Supervisor
Write
Supervisor
Description:
Maintenance shot count.
C 267 HVPSLife
Configurable
C 267 HVPSLife
Description:
Lifetime shot count.
Help
Exit
101084-A 04/01
Units
1Mshots
Default
50000
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 268 ComprMnt
Configurable
C 268 ComprMnt
Units
1Mshots
Default
Range
40000
Read
Supervisor
Write
Supervisor
Description:
Maintenance shot count.
C 269 ComprLif
Configurable
C 269 ComprLif
Units
1Mshots
Default
Range
50000
Read
Supervisor
Write
OEM
Description:
Lifetime shot count.
C 270 CommuMnt
Configurable
C 270 CommuMnt
Description:
Maintenance shot count.
Help
Exit
101084-A 04/01
Units
1Mshots
Default
40000
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 271 CommuLif
Configurable
C 271 CommuLif
Units
1Mshots
Default
Range
50000
Read
Supervisor
Write
OEM
Description:
Lifetime shot count.
C 272 BeamMant
Configurable
C 272 BeamMant
Units
1Mshots
Default
Range
9600
Read
Supervisor
Write
Supervisor
Description:
Maintenance shot count.
C 273 BeamLife
Configurable
C 273 BeamLife
Description:
Lifetime shot counter.
Help
Exit
101084-A 04/01
Units
1Mshots
Default
12000
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 274 F2TrapMt
Configurable
C 274 F2TrapMt
Units
Cycles/10
Default
Range
2400
Read
Supervisor
Write
Supervisor
Description:
Maintenance shot count.
C 275 F2TrapLf
Configurable
C 275 F2TrapLf
Units
Cycles/10
Default
Range
3000
Read
Supervisor
Write
OEM
Description:
Lifetime shot count.
C 276 StaticLf
Configurable
C 276 StaticLf
Description:
Static gas life time limit.
Help
Exit
101084-A 04/01
Units
Hours
Default
168
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 277 GsXdcrMt
Configurable
C 277 GsXdcrMt
Units
Hours
Default
Range
8760
Read
Supervisor
Write
None
Description:
Maintenance refill count.
C 279 H2OBoxMt
Configurable
C 279 H2OBoxMt
Units
Hours
Default
Range
8760
Read
Supervisor
Write
None
Description:
Maintenance refill count.
C 290 MaintInt
Configurable
C 290 MaintInt
Description:
Maintenance interval.
Help
Exit
101084-A 04/01
Units
Hours
Default
24
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 291 AvgRepRt
Configurable
C 291 AvgRepRt
Units
Shots/sec
Default
2000
Range
0 - 2000
Read
Supervisor
Write
Supervisor
Description:
Averaged repetition rate, shots/sec.
C 301 HWLsrRes
Configurable
C 301 HWLsrRes
Units
±0.01pm
Default
Range
5
Read
Supervisor
Write
OEM
Description:
Wavemeter physical resolution.
C 302 WvLckBnd
Configurable
C 302 WvLckBnd
Description:
Wavelength lock band.
Help
Exit
101084-A 04/01
Units
±0.01pm
Default
25
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 303 WCMHldOf
Configurable
C 303 WCMHldOf
Units
1msec
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Time to burst before WCM processing begins.
C 304 SgmaLock
Configurable
C 304 SgmaLock
Units
0.10%
Default
Range
100
Read
Supervisor
Write
OEM
Description:
Sigma lock threshold limit.
C 305 SgmaUnlk
Configurable
C 305 SgmaUnlk
Units
0.10%
Description:
Sigma unlock threshold limit.
Help
Exit
101084-A 04/01
Default
150
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 306 SgmaPeak
Configurable
C 306 SgmaPeak
Units
0.10%
Default
Range
300
Read
Supervisor
Write
OEM
Description:
Set peak energy error bit.
C 307 ISHldOff
Configurable
C 307 ISHldOff
Units
1ms
Default
Range
40
Read
Supervisor
Write
OEM
Description:
ISS hold off time.
C 308 ISSgmaLk
Configurable
C 308 ISSgmaLk
Description:
ISS sigma lock limit.
Help
Exit
101084-A 04/01
Units
0.10%
Default
50
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 309 ISSgmaPk
Configurable
C 309 ISSgmaPk
Units
0.10%
Default
Range
250
Read
Supervisor
Write
OEM
Description:
ISS sigma peak limit.
C 310 ISSgmaUl
Configurable
C 310 ISSgmaUL
Units
0.10%
Default
Range
60
Read
Supervisor
Write
OEM
Description:
ISS sigma unlock limit.
C 311 ISWvLckB
Configurable
C 311 ISWvLckB
Units
±0.01pm
Description:
ISS wave lock band limit.
Help
Exit
101084-A 04/01
Default
50
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 331 WCntlBnd
Configurable
C 331 WCntlBnd
Units
±0.01pm
Default
Range
3
Read
Supervisor
Write
OEM
Description:
Wavelength control band.
C 332 LineWMax
Configurable
C 332 LineWMax
Units
0.1pm
Default
Range
8
Read
Supervisor
Write
OEM
Description:
Maximum linewidth.
C 350 AwrEnabl
Configurable
C 350 AwrEnabl
Units
T/F
Description:
T=1=enable AWR calibration.
Help
Exit
101084-A 04/01
Default
1
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 351 FeMaxAdj
Configurable
C 351 FeMaxAdj
Units
±0.1pm
Default
Range
3
Read
Supervisor
Write
Supervisor
Description:
Maximum AWR_CAL adjustment allowed.
C 352 AWRreprt
Configurable
C 352 AWRreprt
Units
Hz
Default
Range
1000
Read
Supervisor
Write
Supervisor
Description:
Pulse repetition rate to be used for AWR calibration.
C 370 BlwrDrvS
Configurable
C 370 BlwrDrvS
Units
RPM
Description:
Blower drive speed setpoint.
Help
Exit
101084-A 04/01
Default
3400
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 371 BlSpdRng
Configurable
C 371 BlSpdRng
Units
±RPM
Default
Range
10
Read
Supervisor
Write
OEM
Description:
Blower speed range around setpoint without error.
C 376 BlwrIMax
Configurable
C 376 BlwrIMax
Units
0.01Amps
Default
Range
450
Read
Supervisor
Write
OEM
Description:
Maximum blower current.
C 380 BlrMnFan
Configurable
C 380 BlrMnFan
Units
RPM
Description:
Minimum blower cooling fan speed.
Help
Exit
101084-A 04/01
Default
2500
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 390 Sys_Cntl
Configurable
C 390 Sys_Cntl
Units
Decimal
code
Default
Range
0
Read
Supervisor
Write
Supervisor
Description:
System flag to set date/time/year (1=view, 2=set).
C 391 SysData1
Configurable
Units
C 391 SysData1
Default
Range
0
Read
Supervisor
Write
Supervisor
Description:
System control time in hour/minute format (hhmm).
C 392 SysData2
Configurable
C 392 SysData2
Units
Default
0
Description:
System control date in month/day format (mmdd).
Help
Exit
101084-A 04/01
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 393 SysData3
Configurable
Units
C 393 SysData3
Default
Range
0
Read
Supervisor
Write
Supervisor
Description:
System control year in a digit format (yyyy).
C 394 DiagPcRt
Configurable
C 394 DiagPcRt
Units
Decimal
code
Default
4
Range
0-4
Read
Supervisor
Write
Supervisor
Description:
DiagPC baud rate. 0=115200, 1=57600, 2=38400, 3=19200, 4=9600.
C 400 Mft_Imax
Configurable
C 400 Mft_Imax
Description:
Maximum MFT current.
Help
Exit
101084-A 04/01
Units
µΑ
Default
1200
Range
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 401 Mft_Imin
Configurable
C 401 Mft_Imin
Units
µΑ
Default
Range
100
Read
Supervisor
Write
Supervisor
Description:
Minimum MFT current.
C 409 ChmbrCld
Configurable
C 409 ChmbrCld
Units
0.1°C
Default
Range
300
Read
Supervisor
Write
OEM
Description:
Chamber minimum operating temperature.
C 411 H2OMaxTp
Configurable
C 411 H2OMaxTp
Units
0.1°C
Default
Range
350
Read
Supervisor
Write
Supervisor
Description:
Coolant inlet maximum temperature. Not implemented.
Help
C 412 Heat_On_
Configurable
C 412 Heat_On_
Exit
101084-A 04/01
Units
0.1°C
Default
450
Range
420 - 600
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 412 Heat_On_
Configurable
Units
Default
Range
Read
Write
Default
Range
Read
Write
Description:
Heater on below this temperature.
C 413 Heat_Off
Configurable
C 413 Heat_Off
Units
0.1°C
465
435 - 615
Supervisor
OEM
Description:
Heater shut off above this temperature.
C 414 Cool_Off
Configurable
C 414 Cool_Off
Units
0.1°C
Default
410
Range
300 - 600
Read
Supervisor
Write
OEM
Description:
Cooling off below this temperature.
C 415 Cool_On_
Help
Configurable
C 415 Cool_On_
Units
0.1°C
Description:
Exit
Cooling on above this temperature.
101084-A 04/01
Default
600
Range
600 - 850
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 416 ChmbrHot
Configurable
C 416 ChmbrHot
Units
0.1°C
Default
Range
800
Read
Supervisor
Write
OEM
Description:
Maximum chamber temperature.
C 417 HtDCycTm
Configurable
C 417 HtDCycTm
Units
Seconds
Default
Range
20
Read
Supervisor
Write
OEM
Description:
Heating full period duty cycle time.
C 418 GasT_Slp
Configurable
C 418 GasT_Slp
Description:
Gas temperature slope.
Help
Exit
101084-A 04/01
Units
0.1°C/AtoD
count
Default
1017
Range
1000 - 1050
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 419 GasT_Ofs
Configurable
C 419 GasT_Ofs
Units
-0.1°C
Default
2732
Range
2700 - 2800
Read
Supervisor
Write
None
Description:
Gas temperature offset.
C 420 H2OT_Slp
Configurable
C 420 H2OT_Slp
Units
0.1°C/AtoD
count
Default
1017
Range
1000 - 1050
Read
Supervisor
Write
None
Description:
Water temperature slope.
C 421 H2OT_Ofs
Configurable
C 421 H2OT_Ofs
Units
-0.1°C
Description:
Water temperature offset.
Help
Exit
101084-A 04/01
Default
2732
Range
2700 - 2800
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 422 Spr1TSlp
Configurable
C 422 Spr1Slp
Units
0.1°C/AtoD
count
Default
1017
Range
1000 - 1050
Read
Supervisor
Write
None
Description:
Spare temperature slope.
C 423 Spr1TOfs
Configurable
C 423 Spr1TOfs
Units
-0.1°C
Default
2732
Range
2700 - 2800
Read
Supervisor
Write
None
Description:
Spare temperature offset.
C 424 Spr2TSlp
Configurable
C 424 Spr2TSlp
Units
0.1°C/AtoD
count
Description:
Help
Spare temperature slope.
Exit
101084-A 04/01
Default
1017
Range
1000 - 1050
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 425 Spr2TOfs
Configurable
C 425 Spr2TOfs
Units
-0.1°C
Default
2732
Range
2700 - 2800
Read
Supervisor
Write
None
Description:
Spare temperature offset.
C 430 Lamp1_01
Configurable
C 430 Lamp1_01
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 431 Lamp1_02
Configurable
C 431 Lamp1_02
Description:
Lamp control word.
Help
Exit
101084-A 04/01
Units
Bit-mapped
Default
0
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 432 Lamp1_03
Configurable
C 432 Lamp1_03
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 433 Lamp1_04
Configurable
C 433 Lamp1_04
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 434 Lamp1_05
Configurable
C 434 Lamp1_05
Description:
Lamp control word.
Help
Exit
101084-A 04/01
Units
Bit-mapped
Default
0
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 435 Lamp1_06
Configurable
C 435 Lamp1_06
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 436 Lamp1_07
Configurable
C 436 Lamp1_07
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 437 Lamp2_01
Configurable
C 432 Lamp2_01
Description:
Lamp control word.
Help
Exit
101084-A 04/01
Units
Bit-mapped
Default
0
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 438 Lamp2_02
Configurable
C 438 Lamp2_02
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 439 Lamp2_03
Configurable
C 439 Lamp2_03
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 440 Lamp2_04
Configurable
C 440 Lamp2_04
Description:
Lamp control word.
Help
Exit
101084-A 04/01
Units
Bit-mapped
Default
0
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 441 Lamp2_05
Configurable
C 441 Lamp2_05
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 442 Lamp2_06
Configurable
C 442 Lamp2_06
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 443 Lamp2_07
Configurable
C 443 Lamp2_07
Description:
Lamp control word.
Help
Exit
101084-A 04/01
Units
Bit-mapped
Default
0
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 444 Lamp3_01
Configurable
C 444 Lamp3_01
Units
Bit-mapped
Default
Range
16
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 445 Lamp3_02
Configurable
C 445 Lamp3_02
Units
Bit-mapped
Default
Range
32
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 446 Lamp3_03
Configurable
C 446 Lamp3_03
Description:
Lamp control word.
Help
Exit
101084-A 04/01
Units
Bit-mapped
Default
0
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 447 Lamp3_04
Configurable
C 447 Lamp3_04
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 448 Lamp3_05
Configurable
C 448 Lamp3_05
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 449 Lamp3_06
Configurable
C 449 Lamp3_06
Description:
Lamp control word.
Help
Exit
101084-A 04/01
Units
Bit-mapped
Default
0
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 450 Lamp3_07
Configurable
C 450 Lamp3_07
Units
Bit-mapped
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Lamp control word.
C 451 ILBuzzer
Configurable
C 451 ILBuzzer
Units
Bit-mapped
Default
Range
63
Read
Supervisor
Write
OEM
Description:
Interlocks defeated buzzer.
C 452 5FcnSSIL
Configurable
C 452 5FcnSSIL
Units
Lamps
Default
1
Range
0-1
Read
Supervisor
Write
OEM
Description:
When the default is set to 1, the five function safety status indicator lamp (SSIL) is selected.
Help
When the default is set to 2, the two function SSIL is selected.
The five function SSIL has a white lamp, a red lamp, a yellow lamp, a green lamp, and a buzzer for the
vent flow low interlock.
Exit
The two function SSIL is still controlled by the values of configurables C 444 Lamp3_01 to C 450
Lamp3_07. The two function SSIL has a white lamp and a buzzer for the vent flow low interlock.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 460 SerialNo
Configurable
C 460 SerialNo
Units
Decimal
Default
0
Range
6000 - 6999
Read
Supervisor
Write
None
Description:
Laser frame serial number.
C 461 Lsr_Type
Configurable
C 461 Lsr_Type
Units
Decimal
Default
Range
1
Read
Supervisor
Write
None
Description:
Laser type.
C 462 Gas_Type
Configurable
C 462 Gas_Type
Units
Decimal
Default
0
Description:
0=krypton fluoride (KrF), 1=argon fluoride (ArF).
Help
Exit
101084-A 04/01
Range
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 463 Open_Hex
Configurable
C 463 Open_Hex
Units
T/F
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Open H2O valve to flush heat exchanger.
C 464 RmteVAPO
Configurable
C 464 RmteVAPO
Units
T/F
Default
Range
0
Read
Supervisor
Write
OEM
Description:
1=remote VAPO enable.
C 465 IfaceTyp
Configurable
C 465 IfaceTyp
Description:
Host interface type.
Help
Exit
101084-A 04/01
Units
Decimal
code
Default
3
Range
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 466 Paraltyp
Configurable
C 466 Paraltyp
Units
T/F
Default
Range
1
Read
Supervisor
Write
OEM
Description:
Host parallel interface type.
C 469 PupState
Configurable
C 469 PupState
Units
Decimal
code
Default
1
Range
0-2
Read
Supervisor
Write
OEM
Description:
Initial power up laser state: 0=laser off, 1=standby, or 2=laser on.
C 470 Cntl_Dev
Configurable
C 470 Cntl_Dev
Units
Decimal
code
Default
1
Range
0-1
Description:
Help
Initial control device: 0=paddle, 1=host device (stepper/scanner).
Exit
101084-A 04/01
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 471 AirTmpMx
Configurable
C 471 AirTmpMx
Units
0.1°C
Default
Range
650
Read
Supervisor
Write
OEM
Description:
Enclosure air temperature maximum.
C 472 H2OTmpMx
Configurable
C 472 H2OtmpMx
Units
0.1°C
Default
Range
280
Read
Supervisor
Write
OEM
Description:
Water inlet temperature maximum.
C 473 H2OtTmpMn
Configurable
C 473 H2OTmpMn
Units
0.1°C
Description:
Water inlet temperature minimum.
Help
Exit
101084-A 04/01
Default
120
Range
Read
Supervisor
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 474 H2OflwMn
Configurable
C 474 H2OflwMnt
Units
0.1L/min
Default
Range
32
Read
Supervisor
Write
OEM
Description:
Water inlet flow rate minimum.
C 475 Bckwrd2F
Configurable
C 475 Bckwrd2F
Units
0=scanner
1=stepper
Default
Range
0
Read
Supervisor
Write
OEM
Description:
Backward compatible to F laser.
C 476 IN_actlv
Configurable
C 476 IN_actlv
Units
Bit-mapped
Description:
Parallel input active logic levels.
Help
Exit
101084-A 04/01
Default
255
Range
Read
OEM
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 477 OUTactlv
Configurable
C 477 OUTactlv
Units
Bit-mapped
Default
Range
32895
Read
OEM
Write
OEM
Description:
Parallel output active logic levels.
C 478 WD_SETUP
Configurable
C 478 WD_SETUP
Units
0=Off, 1=On
Default
Range
1
Read
Supervisor
Write
OEM
Description:
Watch dog setup.
C 479 LW_Type_
Configurable
C 479 LW_Type_
Units
Decimal
code
Description:
Linewidth type; 0=TLN, 1=UFLN.
Help
Exit
101084-A 04/01
Default
0
Range
Read
Supervisor
Write
None
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 480 HostBaud
Configurable
C 480 HostBaud
Units
Decimal
code
Default
4
Range
0-4
Read
Supervisor
Write
OEM
Description:
Host serial interface baud rate. 0=115200, 1=57600, 2=38400, 3=19200, 4=9600.
C 481 ChmbrSN
Configurable
Units
C 481 ChmbrSN
Default
Range
0
Read
Supervisor
Write
None
Description:
Chamber serial number.
C 489 FeLampEn
Configurable
Units
C 489 FeLampEn
Description:
Iron lamp enable; 0=Off, 1=On.
Help
Exit
101084-A 04/01
Default
0
Range
Read
OEM
Write
OEM
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Configurable Descriptions
C 499 MonChan
Configurable
C 499 MonChan
Units
Channel
Description:
Channel number to monitor.
Help
Exit
101084-A 04/01
Default
0
Range
0-7
Read
Supervisor
Write
Supervisor
ELS-6600 Version 3.0 Software Reference
Book
List
1
TOC
2
Diagnostic Descriptions
This chapter contains the following information:
Diagnostics Overview
Diagnostic Access
Diagnostics Descriptions
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Diagnostics Overview
0R
Diagnostics Overview
Diagnostics provide operational information about the laser system. Some diagnostics alert you when laser
maintenance or part replacement is necessary and other diagnostics are related to error messages.
Each diagnostic has a number assigned to it. The numbers do not follow an exact sequential listing as some numbers
are reserved. The diagnostics are grouped by topic, including:
•
System identification
•
Mechanical
•
Current and voltage
•
Temperature and pressure
•
Utilities
•
Wavelength
•
Energy
•
Power supply voltages
•
Maintenance and lifetime
•
Pulse count
•
Module estimated time to maintenance
•
Miscellaneous
Diagnostic Access
Help
You can access a specific diagnostic using the hand held terminal or the Diagnostic PC. For more information about
the Diagnostic PC, refer to the Diagnostic PC User’s Manual.
Use the DGNSTCS key on the hand held terminal to access the following diagnostic information while in any service
mode.
Exit
•
To access a specific diagnostic, enter the diagnostic number and press the DGNSTCS key.
•
To scroll through the diagnostics, repeatedly press the DGNSTCS key.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Diagnostics Descriptions
Diagnostics Descriptions
The following table, lists each diagnostic, its description, and the display format (if applicable). .
Diagnostics Descriptions
Diagnostic
D 0 Model:
D 1 Laser serial #:
D 2 Com status
Help
Display
Format
99999
(Flags)
Description
System Identification
Laser model name
Laser serial number
Status of communication link between the laser main processor
and other processors; any of the following characters may be
displayed: 1TW (Paddle 1, Trigger processor, and WCM)
MCS (main control software) version number
MCS version (hexadecimal)
TCS (trigger control software) version number
TCS software CRC verification
Software version
Software ID number of WCM software
Version number of wavemeter software
D 3 MCS SW version
D 4 MCS CRC#
D 5 TCS SW version
D 6 TCS CRC#
D 7 Orion version
D 8 WCM SWID#:
D 9 WCM SW Ver.
D 10-D 14 Reserved
9999
HHHH
HHHH
HHHH
9.9
99999
9.99
D 15 Blower speed
D 16 Blower I
D 17 Reserved
D 18 Blower
D 19 Reserved
D 20 Fans
D 21-D 24 Reserved
9999RPM
9.99Amp
Mechanical
Frequency of gas circulation blower in the laser
Blower motor DC current
(Flags)
Blower status
(Flags)
Fan status
D 25 Filter I
9999µA
Exit
101084-A 04/01
Current and Voltage
Metal fluoride trap filter current
ELS-6600 Version 3.0 Software Reference
Book
List
Diagnostics Descriptions
Diagnostics Descriptions (Continued)
Diagnostic
TOC
D 26 HV chg time
Display
Format
9999µs
Description
Default value of configurable C 26 HVChgTim, not an actual
reading
D 27-D 39 Reserved
Help
Exit
D 40 Gas temp
D 41 Chamber prs
D 42 Manifld prs
D 43 Vacuum prs
999.9°C
999.9kPa
999.9kPa
999.9kPa
D 44 F2 supply prs
D 45 Ne supply prs
D 46 He supply prs
D 47-D 54 Reserved
999.9kPa
999.9kPa
999.9kPa
D 55 Nitrogn prs
D 56 Lsr H2O flw
D 57 Chbr H2O flw
D 58 H2O temp
D 59 Gas status
999.9kPa
99.9L/min
99.9L/min
999.9°C
(Flags)
D 60 Cooling flow
D 61 Heating D.C.
D 62-D 64 Reserved
D 65 Gas temp A/D
D 66 H2O temp A/D
D 67 Spr1 temp A/D
999%
999%
101084-A 04/01
Temperature and Pressure
Gas temperature in laser chamber
Gas pressure in the discharge chamber
Gas pressure in the gas manifold
Gas pressure in the line between the gas manifold and the
vacuum pump
Fluorine gas supply pressure from F_CHK
Neon gas supply pressure from N_CHK
Helium gas supply pressure from H_CHK
Utilities
Nitrogen gas supply inlet pressure
Cooling water flow rate through laser
Cooling water flow rate through chamber
Temperature of cooling water
Status of gas functions; any of the following characters may be
displayed: EIRGB (Error, Inject request, Refill request, Gas
ready, Busy)
Cooling water heat exchanger valve setting (% open)
Duty cycle of chamber heater
Gas temperature
Water temperature
Spr1 temperature
ELS-6600 Version 3.0 Software Reference
Book
List
Diagnostics Descriptions (Continued)
Diagnostic
TOC
Display
Format
D 68 Spr2 temp A/D
D 69-D 74 Reserved
Help
Exit
Diagnostics Descriptions
Description
Spr2 temperature
D 75 λ Fine
D 76 λ Coarse
D 77 λ Dscrpncy
D 78 λ Error
D 79 λ Linewidth
D 80 λ Center
9999.9pm
9999.9pm
±999.9pm
±99.99pm
99.99pm
99999
D 81 λ Stat:
(Flags)
D 82 λ Video floor
D 83 λ Video peak
99.99V
99.99V
D 84 λ Fe PCell
D 85 λ Left peak
99.99V
99.99V
D 86 λ Right peak
99.99V
D 87 λ Temperature
D 88 λ dT/dt
99.99°C
99.99°C/min
Wavelength
Wavelength measurement by fine and coarse systems
Wavelength measurement by coarse system alone
Discrepancy between D 75 and D 76
Difference between target wavelength and actual wavelength
Spectral linewidth (bandwidth) measured by fine etalon
Location of center pixel in etalon fringe pattern on photodiode
array
Error status of wavelength/linewidth detection and wavelength
control; any of the following characters may be displayed:
RWVFNDLBTflrc (RAM parity error, bad line Width, Video low,
Far limit, Near limit, Discrepancy, Locked, Bad data,
Temperature sensor, floor, left fringe, right fringe, coarse fringe)
Dark level of etalon fringe pattern from photodiode array
Peak level of digitized etalon fringe pattern from the photodiode
array
Voltage of photocell in AWR
Peak level of left side etalon analog fringe pattern from the
photodiode array
Peak level of right side etalon analog fringe pattern from the
photodiode array
Average temperature
dT/dt
D 89 λ Temp comp.
99.99pm
WCM temperature compensation offset
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Diagnostics Descriptions (Continued)
Diagnostic
TOC
Diagnostics Descriptions
D 90 AWR λ
D 91 AWR λ Error
D 92 AWR Linwidth
D 93 AWR Pcell dip
D 95-D 99 Reserved
D100 λ Right peak
Display
Format
9.999nm
±99.99pm
99.99pm
999%
99.99V
Description
Difference between the measured center of the photocell dip
and the known center of iron (Fe) absorption (248.3271nm)
Iron (Fe) error
Iron (Fe) band width
Fe photocell dip
Peak level of right side etalon analog fringe pattern from the
photodiode array
D 101-D 104 Reserved
Help
Exit
D 105 Int energy
D 106 Energy status
99999µJ
(Flags)
D 107 Avg energy
D 108 Energy Sigma
99999µJ
999.9%
D 109 Shot ErrSum
D 110 Stepper
D 111 DeDv
D 112-D 123 Reserved
99999
9
999µJ/Volt
D 126 WCM +12V
D127 WCM -12V
D128 WCM +23V
D129 WCM +5V
D 130 PCell bias
999.9Volts
99.9Volts
999.9Volts
99.99Volts
99999V
101084-A 04/01
Energy
Pulse energy measured by the photocell in the WCM
Error status of pulse energy and pulse to pulse energy stability;
any of the following characters may be displayed: PNKL Peak
energy error, sigmaN ok, sigmaK ok, energy Locked
Energy averaged over the last 1000 pulses
The running average standard deviation of pulse energy; the
averaging is performed over the time defined in C 70 TauSigma
Shot errsum
Stepper mode
DeDv
Power Supply Voltages
Wavemeter +12V
Wavemeter -12V
Wavemeter +23V
Wavemeter +5V
Pulse energy detector photocell bias voltage
ELS-6600 Version 3.0 Software Reference
Book
List
Diagnostics Descriptions
Diagnostics Descriptions (Continued)
Diagnostic
TOC
Display
Format
Description
D 131-D 139 Reserved
D 140 MN
D 141 LF
Maintenance/Lifetime Diagnostics
(Flags)
Shows maintenance status indicating modules that are due for
service; any of the following characters may be displayed:
wgTBMPHλROFCZWG; water box, gas transducers, Trap,
Beam splitter, coMmutator, comPression module, HVPS,
Wavemeter (λ), Rear optics, front Optics, metal Fluoride trap,
Chamber, rear window (Z), front Window, Gas
(Flags)
Shows lifetime status indicating modules that have exceeded
pulse count limit; any of the following characters may be
displayed: wgTBMPHλROFCZWG; water box, gas transducers,
Trap, Beam splitter, coMmutator, comPression module, HVPS,
Wavemeter (λ), Rear optics, front Optics, metal fluoride trap,
Chamber, rear window (Z), front Window, Gas
D 142-D 149 Reserved
Help
Exit
D 150 Injection
D 151 Shot total
D 152 Laser gas
D 153 Front window
D 154 Rear window
D 155 Laser chamber
D 156 Filter
D 157 Front optics
D 158 Rear optics
D 159 WCM module
D 160 HV pwr supply
D 161 Comprssn head
101084-A 04/01
99999M
99999M
99999M
99999M
99999M
99999M
99999M
99999M
99999M
99999M
99999M
99999M
Pulse Count
Number of laser pulses since last fluorine injection
Total number of pulses on laser frame
Number of laser pulses since last gas refill
Number of laser pulses on chamber front window
Number of laser pulses on chamber rear window
Number of laser pulses on discharge chamber
Number of laser pulses on metal fluoride trap
Number of laser pulses on output coupler
Number of laser pulses on line narrowing module
Number of laser pulses on stabilization module
Number of laser pulses on high voltage power supply
Number of laser pulses on compression module
ELS-6600 Version 3.0 Software Reference
Book
List
Diagnostics Descriptions (Continued)
Diagnostic
TOC
D 162 Commutator
D 163 Beam splitter
D 164 Controller
D 165 F2 trap
D 166 Shutter
D 167 Bearing life
D 168 Gs Mod Lf
D 169 Gs Pmp Lf
D 170 Reserved
D 171 H2O Box Lf
D 172-D 179 Reserved
D 180 TM Gas
Help
Exit
Diagnostics Descriptions
D 181 TM F Window
D 182 TM R Window
D 183 TM Chamber
D 184 TM Filter
D 185 TM F Optics
D 186 TM R Optics
D 187 TM WCM Module
D 188 TM HV Pwr
D 189 TM Comprsn Hd
D 190 TM Commutator
D 191 TM Beam Split
101084-A 04/01
Display
Format
99999M
99999M
99999M
9999.9cycle
Description
99999kcycle
99999Hr
99999fills
99999cycle
Number of laser pulses on commutator module
Number of laser pulses on beam splitter
Number of laser pulses on control module
Number of gas refills and injects in equivalent counts on fluorine
trap
Number of open/close cycles on shutter
Number of hours on laser gas blower bearings
Number of gas fills
Number of vacuum pump cycles
99999Hr
Life of cooling module in hours
Module Estimated Time to Maintenance
99.9Hr
Time left before gas replacement (Refill); reported as the lesser
of gas shots/(average repetition rate) or (C 276 StaticLf + 1) C 243 StaticTm
99.9Hr
Time left before front window replacement
99.9Hr
Time left before rear window replacement
99.9Hr
Time left before chamber window replacement
99.9Hr
Time left before metal fluoride trap replacement
99.9Hr
Time left before rear optic replacement
99.9Hr
Time left before front optic replacement
99.9Hr
Time left before WCM module replacement
99.9Hr
Time left before HV power supply replacement
99.9Hr
Time left before compression module replacement
99.9Hr
Time left before commutator module replacement
99.9Hr
Time left before beam splitter replacement
ELS-6600 Version 3.0 Software Reference
Book
List
Diagnostics Descriptions
Diagnostics Descriptions (Continued)
Diagnostic
Display
Format
TOC
Description
D 192-D 204 Reserved
Help
D 205 F2 consumed
D 206 TCS DbugVal
D 207 TCS DbugVal2
D 208 Inject count
D 209 TotInjSh
D 210 CmpInjSh
D 211 Inj Mode
999.9kPa
99999
99999
999
99.99MS
99.99MS
9
D 212 Inj Hrs
D 213 Avg10kMinc
99.99Hr
9999V
D 214 Avg10kEnrgy
D 216 Avg10kVlts
D 217 Reserved
D 218 SSI Inh
99999µJ
9999V
9
D 219 AvgE_Min
9999µJ
D 220 Pct Usage
9999%
Exit
101084-A 04/01
Miscellaneous
Estimated fluorine consumption since previous injection
Reserved for use by Cymer
Reserved for use by Cymer
Number of fluorine injections between gas refills
Number of shots since last injection
Shots compensated for higher or lower power
Inject mode (0=pressure inject; 1=timed inject 3=SSI, 2=CCI,
1=ECI, or 0:MAN
Number of hours since last inject
Average minimum voltage for the current inject cycle lowest 10k
shot voltage average over inject cycle - 999V
Mean energy for current inject cycle
Mean voltage for current inject cycle
Reason for not using SSI:
1 = laser running in fixed voltage mode
2 = gas temp < C 409 ChmbrCld
3 = if Avg10kMin ≥ C 32 HVAdjMAx – C 163 InjDHaV
4 = if Avg10kMin ≥ C 32 HVAdjMAx
Average minimum energy for current inject cycle Lowest 10k
shot voltage average over inject cycle
Average percentage of fluorine usage for current inject cycle
Percent of possible shots for current inject cycle
ELS-6600 Version 3.0 Software Reference
Book
List
1
TOC
3
Errors and Warnings Descriptions
This chapter contains information about each error or warning that includes the error or warning display name and
number, a problem definition, the diagnostic display name and number (when applicable), and a short description.
Help
Exit
Errors and Warnings Descriptions
Warning 3 Reconfigured RAM!
Error 6 Blower COM fault
Error 7 TCS COM failed
Warning 8 CSI COM failed
Warning 9 Retry CPU COMM err
Warning 10 CPU comm slow TcsOK
Error 11 Vent flow hi intlk
Error 12 Vent flow lo intlk
Error 13 User AC interlock
Error 14 AC intlk
Error 14 AC thermal intlk
Error 14 AC rear panel intlk
Error 14 AC intlk reset
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 15 Interface inhibit
Warning 16 CPU comm Tcs timout
Error 17 HVPS intlk
Error 19 User HVPS intlk
Error 20 Gas intlk status
Error 21 Gas intlk
Error 22 User gas intlk
Error 23 N2 pressure low
Error 24 Coolant flow low
Error 25 Coolant temp high
Error 26 Coolant temp low
Warning 29 Bad chmbr temp cnfg
Warning 31 Blower cooling fan
Error 32 Chambr pressure low
Error 33 Laser blower slow
Error 34 Blower fault
Error 35 Blower temp high
Error 36 Laser blower fast
Error 37 Blower current high
Error 38 Filter current low
Error 39 Filter current high
Error 40 Shot energy low
Error 41 Avg energy too low
Error 42 Avg energy too high
Error 43 Life limit exceeded
Error 45 HVPS temperature hi
Error 46 HVPS overload
Error 48 HVPS general fault
Error 49 Selflock energy
Error 50 Selflock wavelength
Error 51 Selflock linewidth
Error 52 N2CHK timeout
Error 53 P_CHK timeout
Error 54 M_CHK timeout
Error 55 F_VAC timeout
TOC
Help
Exit
101084-A 04/01
Error 56 N_VAC timeout
Error 57 ROUGH timeout
Error 58 V_CHK timeout
Error 59 H_CHK timeout
Error 60 F_CHK timeout
Error 61 N_CHK timeout
Error 62 FBKFL timeout
Error 63 NBKFL timeout
Error 64 H_BAL timeout
Error 65 H_FIL timeout
Error 66 F_FIL timeout
Error 67 N_FIL timeout
Error 68 INJKT timeout
Error 69 BLEED timeout
Error 70 BURP_timeout
Error 72 Prs on pump too low
Error 73 Gas supply prs high
Warning 83 System cooling fans
Error 84 HVPS relay or fuse
Error 85 Utilities 24V
Warning 89 Service F2 trap
Error 90 Replace F2 trap
Warning 91 Service gas xdcrs
Warning 92 Service H2O Box
Error 93 F2 Inject required
Error 94 H_VAC timeout
Error 95 MFT or H2O intlk
Error 95 Water intlk
Error 96 Selflock timeout
Error 97 TCS not fire ready
Error 98 Gas temp sensor
Error 99 Gas temp high
Warning 100 Inject orifice cal
Warning 101 CCI Volts too high
Error 102 SSPPM + 24 V supply
ELS-6600 Version 3.0 Software Reference
Book
List
Error 103 CCI Volts too high
Error 104 AWR_WRMUP No λ Lock
Error 105 AWR No end of scan
Error 106 AWR PCell dark
Error 107 AWR PCell saturated
Error 108 AWR Dip too small
Error 109 AWR No left edge
Error 110 AWR No right edge
Error 111 AWR Bad λ step
Error 112 AWR_SCAN aborted
Error 113 AWR Too few pts
Error 114 AWR_SCAN timeout
Error 115 AWR Adjust too big
Error 116 AWR_RESET Dscrpncy
Error 117 AWR_RESET No λ Lock
Error 118 AWR No scan data
Warning 120 XFR ShtData corrupt
Warning 121 XFR shtlgth corrupt
Warning 122 XFR SplData corrupt
Warning 123 XFR s_ack corrupt
Warning 124 XFR s_err corrupt
Warning 125 XFR bufofst corrupt
Error 126 XFR no SplData data
Error 130 TCS SEL/HVPS fault!
Error 131 TCS WCM data lag!
Warning 132 TCS corrupt offset
Warning 133 TCS corrupt cmd snt
Warning 134 TCS bad cmd length
Warning 135 TCS no command sent
Warning 136 TCS corrupt data
Error 137 TCS bad trig mode
Warning 138 TCS no pseudo fire
Error 140 TCS not initialized
Error 141 TCS HVPS Sum Fault
Error 142 TCS HVPS Overload
TOC
Help
Exit
101084-A 04/01
Error 143 TCS HVPS overtemp
Error 145 TCS bad command
Error 146 TCS selflock parm
Error 147 TCS nrgy low 2 long
Warning 148 TCS DRAM NMI
Error 149 TCS HV not charging
Error 150 TCS no MCS response
Warning 151 Bad remote HV data
Error 152 TCS internal error
Error 166 No 1st response-TCS
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
0132
Errors and Warnings Descriptions
This section includes each operating error or warning number and name, problem definition, description, and
diagnostic display if applicable.
Note: To view the current value of the parameter associated with an error or warning message, press the
CLEAR key then press the DGNSTCS key.
Warning 3 Reconfigured RAM!
Display
W 3 Reconfigured RAM!
Problem Definition
RAM has been reconfigured
Diagnostic
No diagnostic
This warning occurs when the system boots for the first time, or when the controller software determines that the RAM
is corrupt. In the latter case, it automatically reconfigures RAM and all configurables are set to default values. The
user will have to re-enter any configurables that were set to non-default values. This warning also occurs if the battery
has been disconnected or is dead.
Error 6 Blower COM fault
Display
E 6 Blower COM fault
Problem Definition
Blower communication failed
Diagnostic
No diagnostic
This error occurs if the blower controller is not communicating with the main control system.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 7 TCS COM failed
Display
E 7 TCS COM failed
Problem Definition
Serial interface not communicating
Diagnostic
D 2 Com status
This error occurs if communication between the MCS and TCS failed, and occurs in any laser state. If this error occurs
in LSRON state, the laser is brought to STANDBY state.
Warning 8 CSI COM failed
Display
W 8 CSI COM failed
Problem Definition
Serial interface not communicating
Diagnostic
No diagnostic
This warning occurs when communication between the laser and the stepper/scanner over the serial interface has
stopped. This warning can occur if the serial communication cable becomes disconnected or the stepper/scanner
stops responding while communication is in progress.
Warning 9 Retry CPU COMM err
Display
W 9 Retry CPU COMM err
Problem Definition
Retry establishing MCS to TCS communication
Diagnostic
No diagnostic
This warning occurs when the MCS system determines that communication with TCS has been interrupted for an
unknown reason, but it is attempting to re-establish communication with the TCS system. MCS will go through 4 retry
sequences, but it will then display the E 7 TCS COM failed message if communication is still down.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Warning 10 CPU comm slow TcsOK
Display
W10 CPU comm slow TcsOK
Problem Definition
MCS/TCS Communications is slow
Diagnostic
No diagnostic
This warning occurs if communication between the MCS and TCS has slowed. This is an internal warning and will
only display on a diagnostic PC download.
Error 11 Vent flow hi intlk
Display
E 11 Vent flow hi intlk
Problem Definition
Air flow above maximum threshold
Diagnostic
No diagnostic
This error occurs when the air flow through the laser enclosure rises above a maximum threshold as measured by a
pressure switch and is reported only when a gas function is performed. The gas function is aborted under these
circumstances.
Error 12 Vent flow lo intlk
Display
E 12 Vent flow lo intlk
Problem Definition
Air flow below minimum threshold
Diagnostic
No diagnostic
This error occurs when the air flow through the laser enclosure falls below a minimum threshold as measured by a
pressure switch. It is reported only when a gas function is performed. The gas function is aborted under these
circumstances. A laser buzzer will sound when this error occurs. The buzzer can be stopped and the error message
cleared from the display by pressing the CLEAR key on the hand held terminal.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 13 User AC interlock
TOC
Display
E 13 User AC interlock
Problem Definition
User AC interlock switch is open
Errors and Warnings Descriptions
Diagnostic
No diagnostic
This error occurs when there is an open circuit in the user AC interlock system. This error message can occur during
any state except LASER OFF.
Error 14 AC intlk
Display
E 14 AC intlk
Problem Definition
AC cover interlock switch is open
Diagnostic
No diagnostic
This error occurs when one of the AC cover door interlock switches is open. There are three defeatable and three
non-defeatable switches.
Error 14 AC thermal intlk
Display
E 14 AC thermal intlk
Problem Definition
AC thermal interlock switch is open
Diagnostic
No diagnostic
This error occurs when the over temperature switch in the compression head heat exchanger is open.
Error 14 AC rear panel intlk
Help
Display
E 14 AC rear panel intlk
Problem Definition
AC panel interlock switch is open
Diagnostic
No diagnostic
This error occurs when one of the removable panel interlock switches is open. There are six non-defeatable switches.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 14 AC intlk reset
Display
E 14 AC intlk reset
Problem Definition
Needs start button reset
Diagnostic
No diagnostic
This error occurs when an interlock problem has been cleared and the start button has not been reset.
Error 15 Interface inhibit
Display
E 15 Interface inhibit
Problem Definition
Laser inhibited by stepper/scanner
Diagnostic
No diagnostic
This error message can only occur during COUNTDOWN or LSRON states. This error forces the laser to drop to the
STANDBY state. When operating with the laser in stepper/scanner control mode, the parallel interface cable must be
connected to the interface module in the laser. Also, the laser enable parallel interface signal must be provided by
the stepper/scanner for the laser to go above STANDBY state and remain in the LSRON state.
Warning 16 CPU comm Tcs timout
Display
W 16 CPU Comm Tcs timout
Problem Definition
MCS/TCS Communication is slow
Diagnostic
No diagnostic
This warning occurs if the MCS has not received any TCS responses to queries for the last 60 seconds. This is an
internal warning and will only display on a diagnostic PC download.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 17 HVPS intlk
Display
E 17 HVPS intlk
Problem Definition
Open switch in the HVPS radiation interlock circuit
Diagnostic
No diagnostic
This error occurs when there is an open switch in the HVPS radiation interlock circuit. This error may be caused by
an open chamber rollout switch, beam tube switch, beam dump switch, AUTO shutter, or a disconnected hand held
terminal. This error occurs during COUNTDOWN or LSRON.
Error 19 User HVPS intlk
Display
E 19 User HVPS intlk
Problem Definition
User radiation interlock is open
Diagnostic
No diagnostic
This error occurs when there is an open circuit in the user HVPS radiation interlock system. This error occurs during
COUNTDOWN or LSRON states.
Error 20 Gas intlk status
Display
E 20 Gas intlk status
Problem Definition
Gas system interlock open circuit
Diagnostic
No diagnostic
This error occurs when one of the gas system interlock switches is open or the utilities circuit breaker is open. This
error occurs only during a gas procedure.
Error 21 Gas intlk
Help
Display
E 21 Gas intlk
Exit
Problem Definition
Gas interlock switch is open
Diagnostic
No diagnostic
This error occurs when any gas cover interlock switch is open and a gas procedure is in progress, or when the shutter
is open. This message occurs if a gas interlock switch is opened while the shutter is open.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 22 User gas intlk
Display
E 22 User gas intlk
Problem Definition
User gas interlock is open
Diagnostic
No diagnostic
This error occurs when there is an open circuit in the user gas interlock system. A closed contact is required. This
error occurs only during a gas procedure, or when the shutter is open. When the gas interlock is satisfied it will be at
24 VDC and the red INTLK GAS LED will be on.
Error 23 N2 pressure low
Display
E 23 N2 pressure low
Problem Definition
Nitrogen supply pressure below set point
Diagnostic
D 55 Nitrogen prs
This error occurs if an AC interlock switch has been opened and closed and the green START button has not been pressed to reset the
interlocks. It occurs during WARMUP, WARMDOWN, STANDBY, COUNTDOWN, or LSRON and when the nitrogen
purge supply pressure falls below the C 140 N2PrsMin. Verify that the nitrogen supply line is turned on. Fluctuations
in line pressure longer than a few seconds can cause this error.
Error 24 Coolant flow low
Display
E 24 Coolant flow low
Help
Problem Definition
Coolant flow < 4 L/min
Diagnostic
D 56 Lsr H2O flw
This error occurs when coolant water flow drops below four liters per minute. Proper flow is required to remove waste
heat from the laser chamber. This error occurs in COUNTDOWN state or LSRON state only. The laser will not
proceed above LASER OFF state if the coolant flow rate is less than configurable C 474 H2OflwMn.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 25 Coolant temp high
TOC
Display
E 25 Coolant temp high
Problem Definition
Coolant water temperature too high
Errors and Warnings Descriptions
Diagnostic
D 58 H2O temp
This error occurs when the coolant water temperature rises above configurable C 472 H2OTmpMx. The laser state
will drop to LASER OFF if not already in this state and this error message is generated.
Error 26 Coolant temp low
Display
E 26 Coolant temp low
Problem Definition
Coolant water temperature too low
Diagnostic
D 58 H2O temp
This error occurs when the coolant water temperature drops below configurable
C 473 H2OTmpMn. The laser state will drop to LASER OFF if not already in this state and this error message is
generated.
Warning 29 Bad chmbr temp cnfg
Display
W 29 Bad chmbr temp cnfg
Problem Definition
Chamber configurable out of order
Diagnostic
No diagnostic
This warning message occurs when either one of the two pairs of chamber temperature configurables is set to a value
that places it out of order in relation to the other chamber temperature configurables. Configurable C 412 Heat_On_
must be greater than C 413 Heat_Off and C 415 Cool_On_ must be greater than C 414 Cool_Off. These four
configurables are reset to their default values when this situation occurs.
Help
Note: If this warning is displayed and the laser controller locks up (does not respond), the system RAM
must be reconfigured. Contact Cymer Technical Support.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Warning 31 Blower cooling fan
Display
W 31 Blower cooling fan
Problem Definition
Blower motor fan is not running.
Diagnostic
D 20 Fans:
This warning is generated when the blower motor (cooling) fan has stopped running.
Error 32 Chambr pressure low
Display
E 32 Chambr pressure low
Problem Definition
Chamber pressure below minimum
Diagnostic
D 41 Chamber prs
This error message can occur only in COUNTDOWN or LSRON state. The laser gas chamber pressure is less than
the C 131 LasngPrs. This can occur if an error happened during a REFIL gas function and the laser chamber was
not fully refilled.
Error 33 Laser blower slow
Display
E 33 Laser blower slow
Problem Definition
Laser blower speed < minimum acceptable speed
Diagnostic
D 15 Blower spd
This error occurs if the blower speed deviates from the minimum range, in COUNTDOWN or LSRON state only.
Blower speed range is a range around the blower drive speed set point in RPM units within which the chamber blower
speed is considered acceptable.
Error 34 Blower fault
Help
Display
E 34 Blower fault
Exit
Problem Definition
Blower controller failure
Diagnostic
D18 Blower Status
This error occurs when the chamber blower controller reports a failure or the blower circuit breaker in the AC
distribution module has tripped. Diagnostic D18 will display a string describing the error.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 35 Blower temp high
TOC
Display
E 35 Blower temp high
Errors and Warnings Descriptions
Problem Definition
Heat sink or motor thermal overload
Diagnostic
D18 Blower Status
This error message occurs when the heat sink temperature in the blower motor reaches a thermal overload.
Error 36 Laser blower fast
Display
E 36 Laser blower fast
Problem Definition
Laser blower speed > maximum acceptable speed
Diagnostic
D 15 Blower spd
This error message can occur only in COUNTDOWN or LSRON state. The laser drops to STANDBY state. Blower
speed range is a range around the blower drive speed set point in RPM units within which the chamber blower speed
is considered acceptable. If the blower speed deviates outside this range then an error is generated and the laser
state drops to STANDBY, turning off the blower.
Error 37 Blower current high
Display
E 37 Blower current high
Problem Definition
Motor phase over current
This error occurs if the current exceeds the preset level.
Help
Exit
101084-A 04/01
Diagnostic
D 15 Blower spd
ELS-6600 Version 3.0 Software Reference
Book
List
Error 38 Filter current low
TOC
Display
E 38 Filter current low
Problem Definition
Filter current less than MFT_Imin
Errors and Warnings Descriptions
Diagnostic
D 25 Filter I
This error message occurs only in COUNTDOWN or LSRON state. This error occurs when the metal fluoride trap
current is less than the configurable C 401 MFT_Imin.
If the filter current is low, follow these steps:
1. Check the filter AC power circuit breaker and reset if required.
2. Verify that the laser chamber pressure reading on the hand held terminal agrees with the mechanical gauge on
the laser.
3. Replace the laser gas to appropriate fill pressure.
Error 39 Filter current high
Display
E 39 Filter current high
Problem Definition
Filter current greater than C 400 MFT_Imax
Diagnostic
D 25 Filter I
This error message occurs in COUNTDOWN or LSRON when the metal fluoride trap current is greater than the C 400
Mft_Imax.
Try the following steps in the order listed:
1. Verify that the laser chamber pressure reading on the hand held terminal agrees with the mechanical gauge on
the laser.
Help
2. Replace the laser gas to appropriate fill pressure.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 40 Shot energy low
TOC
Display
E 40 Shot energy low
Problem Definition
10 pulse average energy < threshold
Errors and Warnings Descriptions
Diagnostic
D 105 Int energy
This error message can occur only in LSRON state and the pulse energy average of approximately 10 pulses is below
the threshold of the C 33 EnrgyLow. The laser drops to STANDBY state.
Check the following possible causes in the order listed:
1. The high voltage setting is too low.
2. Laser gas needs replacing. The laser gas is exhausted, or the laser gas might be contaminated.
3. The energy-monitoring photocell in the stabilization module is faulty.
4. The laser optics are dirty.
5. Air or water vapor is entering the laser chamber. Check the laser gas supply plumbing for leaks. Check the laser
gas exhaust plumbing for water vapor that may be emitted from the fluorine filters.
6. Catastrophic failure of the laser chamber. Fire the laser a few times with BURST COUNT = 1. If the laser makes
only a faint discharge noise and produces almost no light, the laser chamber is probably bad.
7. The laser is not being triggered properly. This is especially true when operating in TRIGGER mode.
Error 41 Avg energy too low
Display
E 41 Avg energy too low
Help
Problem Definition
Average < C 3 EnrgyMin
Diagnostic
D 107 Avg energy
This error occurs when average energy falls below configurable C 3 EnrgyMin while in EXTERNAL ENERGY control
mode.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 42 Avg energy too high
TOC
Display
E 42 Avg energy too high
Problem Definition
Average > C 4 EnrgyMax
Errors and Warnings Descriptions
Diagnostic
D 107 Avg energy
This error occurs when average energy exceeds configurable C 4 EnrgyMax while in EXTERNAL ENERGY control
mode.
Error 43 Life limit exceeded
Display
E 43 Life limit exceeded
Problem Definition
Shot count exceeds lifetime of module
Diagnostic
No diagnostic
This error occurs in LSRON state. The lifetime counter (in shots, pulses, or fills) exceeds the specified limit for a
particular laser module. The laser is forced to STANDBY state when this error occurs.
Error 45 HVPS temperature hi
Display
E 45 HVPS temperature hi
Problem Definition
Cooling fan failure
Diagnostic
No diagnostic
This interlock error message occurs only in COUNTDOWN or LSRON state. The temperature sensor in the HVPS
has detected an over heated condition within the HVPS. The laser drops to STANDBY state. The HVPS is air cooled
by a fan. If this fan fails, the HVPS overheats.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 46 HVPS overload
Display
E 46 HVPS overload
Problem Definition
Duty cycle is greater than 90%
Diagnostic
No diagnostic
This error message occurs only in COUNTDOWN or LSRON state. It occurs when the duty cycle of the HVPS is
greater than 90%. The laser drops to STANDBY state. An open collector output from the HVPS grounds a pullup
resistor in the control module to flag this error condition. Any short to ground on this line will cause the error. Verify
that configurable C 26 HVChgTim is set properly. Usually this error means that the HVPS must be adjusted or
replaced.
Error 48 HVPS general fault
Display
E 48 HVPS general fault
Problem Definition
An error has occurred in the HVPS
Diagnostic
No diagnostic
This error occurs when an unknown fault that cannot be self-diagnosed has been detected.
Error 49 Selflock energy
Display
E 49 Selflock energy
Help
Problem Definition
Average misfire rate of 10%
Diagnostic
Int Energy
This error occurs only in LSRON state, selflock trigger mode, and stepper control mode when the laser is triggered
internally. If the configurable RcvryMod is set to 0, this error occurs anytime the energy of the beam falls out of
specification. RcvryMod is the number of recovery bursts allowed in the stepper control mode and selflock trigger
mode for correcting beam quality. If RcvryLmt is set to 0, this error occurs anytime the energy of the beam falls out
of specifications. RcvryLmt is the number of recovery bursts allowed in the stepper control mode and selflock trigger
mode for correcting beam quality.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 50 Selflock wavelength
TOC
Display
E 50 Selflock wavelength
Problem Definition
Wavelength is out of lockband
Errors and Warnings Descriptions
Diagnostic
λ Fine
This error occurs in LSRON state, selflock trigger mode, and stepper control mode when the laser is triggered
internally. If the configurable RcvryMod is set to 0, this error occurs anytime the wavelength of the beam falls out of
specification. RcvryMod is a variable from 0 to 255. RcvryLmt is the number of recovery bursts allowed in the stepper
control mode and selflock trigger mode for correcting beam quality. A fault value of 30 allows up to 30 bursts to be
fired in quick succession to recover beam quality. A value of zero causes an error and shutdown to STANDBY
immediately. A value of 255 allows an infinite number of recovery bursts, with no beam quality error generated. Beam
quality is considered okay when energy and wavelength are within specifications.
Error 51 Selflock linewidth
Display
E 51 Selflock linewidth
Problem Definition
Linewidth exceeds maximum
Diagnostic
WCM bndwd
This error occurs in LSRON state, selflock trigger mode, and stepper control mode when the laser is triggered
internally. If the configurable RcvryMod is set to 0, this error occurs anytime the linewidth, as displayed by 1 linewidth,
exceeds the configurable LineWMax. If RcvryLmt is set to 1, this error occurs only after the linewidth fails to recover
in 30 seconds of high reprate selflock firing. If RcvryLmt is set to 0, this error occurs anytime the laser linewidth, as
displayed by 1 linewidth, exceeds the configurable LineWMax. If RcvryLmt is set to 1, this error occurs only after the
linewidth fails to recover in 30 seconds of high reprate selflock firing.
Error 52 N2CHK timeout
Help
Exit
Display
E 52 N2CHK timeout
Problem Definition
Inadequate nitrogen gas supply pressure
Diagnostic
D 55 Nitrogn prs
This error occurs during the N2CHK gas step of the associated gas routine. This step of the gas routine checks the
nitrogen supply pressure, as displayed in diagnostic D 55 Nitrogn prs, and compares it with configurable C 140
N2PrsMin. Ten seconds are allowed for this compare step.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 53 P_CHK timeout
Display
E 53 P_CHK timeout
Problem Definition
Vacuum pump unable to achieve vacuum
Diagnostic
D 43 Vacuum prs
This error occurs during the P_CHK gas step when the vacuum pump inlet pressure, as measured by diagnostic
vacuum press, has not reached configurable C 136 P_ChkPrs within C 111 P_ChkTim after the start of the P_CHK
gas step. Vacuum pressure is measured by an absolute pressure transducer at the vacuum pump inlet. The P_CHK
gas step is performed automatically during most gas functions.
If the pump is unable to achieve vacuum, there can be:
•
Moisture contamination in the F2 trap
•
A leak in the vacuum pump plumbing
•
A leaky exhaust valve on the manifold
•
A leaky bypass valve
•
Service required on the pump
To check the operation of the manifold pressure transducer, restart the gas function and compare diagnostic D 42
Manifld prs to diagnostic D 43 Vacuum prs during the M_CHK step. Configurables C 182 VPrsOfst or C 180 MPrsOfst
might not be calibrated properly. Check the pump contactor overload breaker and reset if required.
Error 54 M_CHK timeout
Display
E 54 M_CHK timeout
Help
Exit
Problem Definition
Unable to achieve vacuum in the manifold
Diagnostic
D 42 Manifld prs
This error occurs during the M_CHK gas step when the manifold gas pressure as measured by diagnostic D 42
Manifld prs has not reached configurable C 137 M_ChkPrs within C 112 M_ChkTim after the start of the M_CHK gas
step. The M_CHK gas step is performed automatically during most gas functions. If the pump is unable to achieve
vacuum in the manifold there is probably a leak in the vacuum pump plumbing or a leaky valve on the gas manifold.
To check the operation of the manifold pressure transducer, restart the gas function and compare diagnostic D 42
Manifld prs to diagnostic vacuum press during the M_CHK step. Configurable C 182 VPrsOfst or C 180 MPrsOfst
may not be calibrated properly.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 55 F_VAC timeout
Display
E 55 F_VAC timeout
Problem Definition
Unable to pump out the fluorine/krypton/neon supply
line
Diagnostic
D 42 Manifld prs
This error occurs during the FVAC step when the manifold gas pressure, as measured by diagnostic D 42 Manifld
prs, has not reached the value of C 138 L_VacPrs within C 103 L_ChkTim after the start of the FVAC gas step. If the
pump is unable to pump out the supply line there may be a leak in the supply line system or the supply valve is not
closed at the other end of the line.
Restart the gas function and compare diagnostic D 42 Manifld prs to Configurable C 138 L_VacPrs during the FVAC
step. Configurable C 182 VPrsOfst or C 180 MPrsOfst may not be calibrated properly.
Error 56 N_VAC timeout
Display
E 56 N_VAC timeout
Problem Definition
Unable to pump out the krypton/neon supply line
Diagnostic
D 42 Manifld prs
This error occurs during the NVAC step when the manifold gas pressure, as measured by diagnostic D 42 Manifld
prs, has not reached the value of configurable C 138 L_VacPrs within configurable C 113 L_VacTim after the start of
NVAC gas step. If the pump is unable to pump out the supply line there is probably a leak in the supply line system
or the supply valve is not closed at the other end of the line. Restart the gas procedure and compare to configurable
C 138 L_VacPrs during the FVAC step. C 182 VPrsOfst or C 180 MPrsOfst might not be calibrated properly.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 57 ROUGH timeout
Display
E 57 ROUGH timeout
Problem Definition
Unable to pump down the laser chamber
Diagnostic
D 41 Chamber prs
This error occurs during the ROUGH gas step when the laser chamber gas pressure, as measured by diagnostic D
41 Chamber prs, has not reached configurable C 139 C_VacPrs minus 2 within configurable C 115 RoughTim after
the start of the ROUGH gas step. The ROUGH gas step is performed automatically during most gas functions.
If the pump is unable to pump down the chamber the manual chamber valve might be closed, there is a leak in the
chamber, a leak in the gas plumbing from the manifold to the chamber, or configurable C 181 CPrsOfst is not
calibrated properly.
Error 58 V_CHK timeout
Display
E 58 V_CHK timeout
Problem Definition
Unable to reduce vacuum at pump inlet
Diagnostic
D 43 Vacuum prs
This error occurs in the V_CHK gas step in all gas functions and prevents starting the vacuum pump against a hard
vacuum. V_CHK will supply a little helium into the vacuum pump inlet if the vacuum sensor reads less than
configurable C 144 PmpTOPrs. It allows no more than 10 seconds of helium to reduce the vacuum to the acceptable
level before it times out. Check that the helium bottle has pressure and that all supply valves are open.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 59 H_CHK timeout
Display
E 59 H_CHK timeout
Problem Definition
Inadequate helium supply pressure
Diagnostic
D 42 Manifld prs
This error occurs during the H_CHK gas step when the manifold gas pressure, as measured by diagnostic D 42
Manifld prs, has not reached configurable C 131 LasngPrs plus C 141 L_ChkDPr within C 103 L_ChkTim after the
start of H_CHK gas step. The H_CHK gas step is performed automatically during gas functions that require use of
the helium supply gas.
If the helium supply pressure is not adequate, the helium bottle might be empty, the bottle regulator or valve(s) are
shut off at the supply end of the line, or the laser gas manifold valve failed.
Check configurable C 180 MPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Error 60 F_CHK timeout
Display
E 60 F_CHK timeout
Problem Definition
Inadequate fluorine supply pressure
Diagnostic
D 42 Manifld prs
This error occurs during the F_CHK gas step when the manifold gas pressure, as measured by diagnostic D 42
Manifld prs, has not reached the value of diagnostic D 41 Chamber prs plus configurables C 130 F_FilDPr plus C 141
L_ChkDPr within C 103 L_chktim after the start of the F_CHK gas step.
Fluorine gas is injected into the laser chamber as a partial pressure. If the laser chamber is already at pressure and
an injection is required, the supply pressure must be nearly 540 kPa (65 psi) to perform the injection.
Help
If the fluorine supply pressure is not adequate, the fluorine/krypton/neon bottle might be empty, the bottle regulator
or valve(s) are shut off at the supply end of the line, or the laser gas manifold fluorine valve has failed.
Check configurable C 180 MPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 61 N_CHK timeout
Display
E 61 N_CHK timeout
Problem Definition
Inadequate krypton/neon supply pressure
Diagnostic
D 42 Manifld prs
This error occurs during the N_CHK gas step when the manifold gas pressure, as measured by diagnostic D 42
Manifld prs, has not reached C 132 T_FilPrs plus C 141 L_ChkDPr within C 103 L_ChkTim after the start of the
N_CHK gas step.
If the krypton/neon supply pressure is not adequate, the krypton/neon bottle might be empty, the bottle regulator or
valve(s) are shut off at the supply end of the line, or the laser gas manifold valve has failed.
Check configurable C 180 MPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Error 62 FBKFL timeout
Display
E 62 FBKFL timeout
Problem Definition
Inadequate fluorine supply pressure
Diagnostic
D 42 Manifld prs
This error occurs during the FBKFL gas step of Auto Purge when the manifold gas pressure, as measured by
diagnostic D 42 Manifld prs, has not reached C 133 BkFilPrs within C 104 BkFilTim after the start of FBKFL gas step.
The manifold fluorine and helium valves should be open to allow helium gas to backfill the fluorine supply line, which
has just been pumped out. All other gas manifold valves should be closed.
If the fluorine supply pressure is not adequate, the fluorine bottle might be empty, the bottle regulator or valve(s) are
shut off at the supply end of the line, or the laser gas manifold valve has failed.
Help
Check configurable C 180 MPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 63 NBKFL timeout
Display
E 63 NBKFL timeout
Problem Definition
Inadequate neon supply pressure
Diagnostic
D 42 Manifld prs
This error occurs during the NBKFL gas step when the manifold gas pressure, as measured by diagnostic D 42
Manifld prs, has not reached C 133 BkFilPrs within C 104 BkFilTim after the start of the NBKFL gas step.
The manifold nitrogen and helium valves should be open to allow helium gas to backfill the nitrogen supply line, which
has just been pumped out. All other gas manifold valves should be closed.
If the neon supply pressure is not adequate, the neon bottle might be empty, the bottle regulator or valve(s) are shut
off at the supply end of the line, or the laser gas manifold valve has failed.
Check configurable C 180 MPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Error 64 H_BAL timeout
Display
E 64 H_BAL timeout
Problem Definition
Inadequate helium supply pressure
Diagnostic
D 41 Chamber prs
This error occurs during the H_BAL gas step when the chamber gas pressure, as measured by diagnostic D 41
Chamber prs, has not reached configurable C 133 BkFilPrs within C 105 H_FilTim after the start of H_BAL gas step.
The H_BAL gas step is performed automatically during BkFil or a C_Prg gas function.
If the helium supply pressure is not adequate, the helium bottle might be empty, the bottle regulator or valve(s) are
shut off at the supply end of the line, or the laser gas manifold valve has failed.
Help
Check configurable C 180 MPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 65 H_FIL timeout
Display
E 65 H_FIL timeout
Problem Definition
Inadequate helium supply pressure
Diagnostic
D 41 Chamber prs
This error occurs during the H_FIL gas step when the chamber gas pressure, as measured by diagnostic D 41
Chamber prs, has not reached the configurable C 131 LasngPrs minus 200 within C 105 H_FilTim. The H_FIL gas
step is performed automatically during a C_PRG gas function.
If helium supply pressure is not adequate, the helium bottle might be empty, the bottle regulator or valve(s) are shut
off at the supply end of the line, or the laser gas manifold valve has failed.
Check configurable C 181 CPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Error 66 F_FIL timeout
Display
E 66 F_FIL timeout
Problem Definition
Inadequate fluorine supply pressure
Diagnostic
D 41 Chamber prs
This error occurs during either the FFIL1 or FFIL2 gas step when the chamber gas pressure, as measured by
diagnostic D 41 Chamber prs, has not increased by the targeted amount within C 106 F_FilTim since the start of the
FFIL1 or FFIL2 gas step. FFIL1 injects most of the fluorine required for the mix: C 130 F_FilDPr minus C 135 InjktDPr.
FFIL2 injects the last C 135 InjktDPr at the end of the REFIL simulating an injection. The FFIL1 or FFIL2 gas steps
are performed automatically during a REFIL gas function.
If the fluorine/krypton/neon supply pressure is not adequate, the fluorine bottle might be empty, the bottle regulator
or valve(s) are shut off at the supply end of the line, or the laser gas manifold valve has failed.
Help
Check configurable C 181 CPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 67 N_FIL timeout
Display
E 67 N_FIL timeout
Problem Definition
Inadequate krypton/neon supply pressure
Diagnostic
D 41 Chamber prs
This error occurs during the N_FIL gas step when the chamber gas pressure, as measured by diagnostic D 41
Chamber prs, has not reached configurable C 132 T_FilPrs minus C 135 InjktDPr within C 107 N_FilTim after the
start of the N_FIL gas step. The N_FIL gas step is performed automatically during a REFIL gas function. If the
krypton/neon supply pressure is not adequate, the krypton/neon bottle might be empty, the bottle regulator or valve(s)
are shut off at the supply end of the line, or the laser gas manifold valve has failed.
Check configurable C 181 CPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Error 68 INJKT timeout
Display
E 68 INJKT timeout
Problem Definition
Injection failed
Diagnostic
D 41 Chamber prs
This error indicates that, during an injection, the target chamber pressure could not be achieved in the prescribed
amount of time, which is determined by configurable C 108 InjktTim.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 69 BLEED timeout
Display
E 69 BLEED timeout
Problem Definition
Unable to exhaust gas from chamber
Diagnostic
D 41 Chamber prs
This error occurs during the BLEED gas step when the chamber gas pressure, as measured by diagnostic D 41
Chamber prs at the start of the inject cycle, has not dropped by configurable C 142 BledDPrs within the configurable
C 109 BleedTim since the start of the BLEED gas step. The BLEED gas step may be performed during an INJKT gas
function.
The manifold exhaust and inject valves should be open to allow laser gas to slowly bleed from the laser chamber to
reduce the chamber pressure in preparation for the INJKT value. All other gas manifold valves should be closed
during the INJKT gas step. The manual chamber valve must be open to the laser chamber.
Check configurable C 181 CPrsOfst calibration for gross error. Adjust if required and restart the gas function.
Error 70 BURP_timeout
Display
E 70 BURP_ timeout
Problem Definition
Chamber gas pressure has not dropped
Diagnostic
D 41 Chamber prs
This error occurs during the BURP gas step when the chamber gas pressure, as measured by diagnostic D 41
Chamber prs, has not dropped by configurable C 134 BurpDPrs within C 110 BurpTime since the start of the BURP
gas step. The BURP gas step is performed automatically during the C_PRG gas function.
Help
The chamber should have been filled with helium to just above atmospheric pressure by the preceding H_BAL gas
step. The H_BAL gas step should allow the chamber pressure to settle down to atmospheric pressure. If the burp is
not detected, the chamber may not be at atmospheric pressure.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 72 Prs on pump too low
TOC
Display
E 72 Prs on pump too low
Problem Definition
Attempting to start pump under vacuum
Errors and Warnings Descriptions
Diagnostic
D 43 Vacuum prs
This error occurs only while operating the gas valves and relays directly from the hand held terminal when the
operator attempts to start the vacuum pump and the inlet pressure to the pump is below the value set by configurable
C 144 PmpTOPrs, as the pump cannot start against a hard vacuum. This error terminates the gas function.
After clearing the error, some helium should be allowed into the pump foreline to raise the pressure above the
configurable C 144 PmpTOPrs value.
Error 73 Gas supply prs high
Display
E 73 Gas supply prs high
Problem Definition
Measured gas pressure > 75 psi
Diagnostic
D 42 Manifld prs
This error occurs anytime the manifold pressure transducer measures gas pressure greater than 75 psi. It could be
an indication that a facility gas supply pressure is too high. This can damage the laser.
Warning 83 System cooling fans
Display
E 83 System cooling fans
Problem Definition
System cooling fans
Diagnostic
D 20 Fans
If the correct hardware is not installed, this warning will occur during laser power up and subsequent attempts to go
into the LSRON state.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 84 HVPS relay or fuse
TOC
Display
E 84 HVPS relay or fuse
Errors and Warnings Descriptions
Problem Definition
HVPS interlock circuit is not energized
Diagnostic
No diagnostic
This error occurs when the radiation HVPS interlock circuit is not energized even though the utilities power supply is
attempting to provide the expected 24 volts. The lack of 24 volts power to the radiation interlock circuit is due to either
an open fuse in the HVPS solid state relay or a failure of the relay itself.
Error 85 Utilities 24V
Display
E 85 Utilities 24V
Problem Definition
Utilities 24V power supply has failed
Diagnostic
No diagnostic
This error occurs when the utilities 24 volt power supply fails. This power supply provides 24 volts to several systems
in the laser including interlocks and radiation. An open external user interlock also can cause this error.
Warning 89 Service F2 trap
Display
W 89 Service F2 trap
Problem Definition
Time to order F2 trap
Diagnostic
D 165 F2 trap
This warning alerts the operator that the F2 trap in the gas module is approaching the end of its useful life.This
warning will occur when a gas procedure requiring fluorine is started after the maintenance service point is passed,
as defined by configurable C 274 F2TrapMt.
Help
Note:
Exit
101084-A 04/01
The F2 trap should be replaced during the next scheduled maintenance.
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 90 Replace F2 trap
Display
E 90 Replace F2 trap
Problem Definition
F2 trap must be replaced
Diagnostic
D 165 F2 trap
This error alerts the operator that the F2 trap in the gas module has reached the end of its useful life. This error occurs
if the F2 trap was not replaced after the W 89 Service F2 trap warning occurred and a gas procedure requiring fluorine
is started.
Until the F2 trap is replaced, this error will continue to occur and abort any attempt to execute a gas procedure that
requires the exhaust of fluorine such as Refil and Injkt, after the lifetime point is passed, as defined by configurable
C 275 F2TrapLf.
Warning 91 Service gas xdcrs
Display
W 91 Service gas xdcrs
Problem Definition
Gas transducer maintenance limit has been reached
Diagnostic
No diagnostic
This warning occurs when the gas transducer maintenance limit has been reached and the gas transducers need
calibration. After you calibrate the gas transducers, reset configurable C 220 GSXdcrTm to zero.
Warning 92 Service H2O Box
Display
W 92 Service H2O box
Help
Problem Definition
H2O box maintenance limit has been reached
Diagnostic
No diagnostic
This warning occurs when it is time to service the cooling module filter and the control valves.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 93 F2 Inject required
TOC
Display
E 93 F2 Inject required
Problem Definition
Injection not granted in time
Errors and Warnings Descriptions
Diagnostic
No diagnostic
This error occurs when a requested injection is not granted by the stepper/scanner within the calculated number of
shots after the request. To determine this calculation, multiply the shot count at the time of the injection request by
C 173 F2MaxPct, in units of 0.1%.
Error 94 H_VAC timeout
Display
E 94 H_VAC timeout
Problem Definition
Unable to pump out the helium supply line
Diagnostic
D 42 Manifld prs
This error occurs during the HVAC step when the manifold gas pressure, as measured by diagnostic D 42 Manifld
prs, has not reached the value of configurable C 138 L_VacPrs within C 113 L_VacTim after the start of the HVAC
gas step.
If the pump is unable to pump out the helium supply line there is probably a leak in the supply line system or the
supply valve is not closed at the other end of the line.
Restart the gas function and compare diagnostic D 42 Manifld prs to diagnostic D 43 Vacuum prs during the HVAC
step. The accuracy of diagnostic D 42 Manifld prs is normally coarse at 3 kPa; however, differences of more than 4
kPa suggest that configurable C 182 VPrsOfst or C 180 MPrsOfst might not be calibrated properly.
Error 95 MFT or H2O intlk
Help
Display
E 95 MFT or H2O intlk
Problem Definition
MFT interlock switch is open
This error occurs when the interlock switch on the MFT power supply is open.
Exit
101084-A 04/01
Diagnostic
No diagnostic
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 95 Water intlk
Display
E 95 Water intlk
Problem Definition
Water leak problem detected
Diagnostic
No diagnostic
This error occurs when water is detected by the float sensor in the bottom of the laser, or by the leak sensor tape on
the water plumbing.
Error 96 Selflock timeout
Display
E 96 Selflock timeout
Problem Definition
Maximum time limit reached
Diagnostic
No diagnostic
This error occurs when the stepper/scanner selflock mode reaches its maximum time limit. This is a safety feature.
Error 97 TCS not fire ready
Display
E 97 TCS not fire ready
Problem Definition
TCS is not ready to fire
Diagnostic
No diagnostic
This error occurs when the TCS is not ready to fire within 3 seconds after the laser enters the LSRON state. Since
the MCS expects a reply from the TCS after informing the TCS that the laser is entering the LSRON state, this error
could be caused by a problem with the communication between the TCS and the MCS.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 98 Gas temp sensor
TOC
Display
E 98 Gas temp sensor
Errors and Warnings Descriptions
Problem Definition
Chamber temperature < 5 or > 100°
Diagnostic
D 40 Gas temp
This error occurs if the chamber temperature sensor measures outside the valid range of temperature readings, less
than 5° C or greater than 100° C, the laser drops to LASER OFF.
The chamber temperature is monitored with diagnostic Gas Temp. Valid readings occur only if a chamber
temperature sensor is installed. With no sensor installed, the reading will be 0° C. Resolution is 0.1° C.
The temperature is checked during WARMUP, WARMDOWN, STANDBY, COUNTDOWN, and LSRON states.
Error 99 Gas temp high
Display
E 99 Gas temp high
Problem Definition
Chamber temperature too high
Diagnostic
D 40 Gas temp
This error occurs if the chamber temperature exceeds configurable C 416 ChmbrHot. The laser drops to STANDBY
if in LSRON.
Warning 100 Inject orifice cal
Display
W 100 Inject orifice cal.
Help
Problem Definition
C 170 InjktTau is outside the range of both C 168
InjTauMn and C 169 InjTauMx
Diagnostic
No diagnostic
The time constant of the fluorine injection orifice configurable C 170 InjktTau is calculated following the FFIL2 step
by the C_TAU step of the REFIL gas function.
If the calculated value is outside the range of configurables C 168 InjTauMn and C 169 InjTauMx then the C_Tau
step will not alter the existing configurable C 170 InjktTau but will generate this warning instead.
Exit
Check that the fluorine/krypton/neon supply is adequate, but within the measurement range of the manifold pressure
transducer.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Warning 101 CCI Volts too high
Display
W 101 CCI Voltage too high
Problem Definition
Average shot voltage exceeds range
Diagnostic
No diagnostic
This warning occurs when the average shot voltage exceeds the range of configurables C32 HVAdjMax - C163
InfDltaV. In CCI mode, the CCI calculation requests an inject, increments a counter, and issues this warning. Also,
this warning may be caused by the final fill pressure being too low, the F2 percentage in the gas mixture being too
high or low, or the inject delta voltage configurable being set improperly. The laser performs another inject in an
attempt to reduce the firing voltage.
Error 102 SSPPM + 24 V supply
Display
E 102 SSPPM + 24 V supply
Problem Definition
Voltage is too high or too low
Diagnostic
No diagnostic
This error occurs if the voltage is too high or too low. The hardware will activate the status signal, and the software
will generate this error. The laser state will drop to STANDBY when an active status signal is detected. Previously,
the software read the SSPPM voltage, but now the hardware monitors the voltage and sets a status signal.
Error 103 CCI Volts too high
Display
E 103 CCI Voltage too high
Help
Problem Definition
The voltage remains too high
Diagnostic
No diagnostic
This error occurs if the voltage remains too high after warning W 101 CCI Volts. The error is repeated three times.
The CCI calculation drops the laser to STANDBY and issues this error. When this error is issued the laser has had
three injects within a short time. The gas mixture may be too rich and the firing voltage too high.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 104 AWR_WRMUP No λ Lock
Display
E 104 AWR_WRMUP No λ
lock
Problem Definition
Wavelength did not reach 248.3246 nm
Diagnostic
D 81 λ Stat:
This error occurs at the end of AWR_WARMUP while the laser is firing in LSRON state indicating that the stabilization
module has failed to lock to 248.3246 nm within the 60 second AWR_WARMUP time.
The repetition rate may be too low for the stabilization module to step from the original operation wavelength to the
scan target. A repetition rate of 50 should allow the stabilization module to tune more than 300 pm in 60 seconds.
Error 105 AWR No end of scan
Display
E 105 AWR No end of scan
Problem Definition
Stabilization module not reached the end of scan
Diagnostic
No diagnostic
This error occurs when the stabilization module has taken 100 photocell and wavelength readings and 150 half steps
without moving 5.0 pm from the beginning of the scan. This occurs during AWR_SCAN while the laser is firing in
LSRON state.
Error 106 AWR PCell dark
Display
E 106 AWR PCell dark
Help
Problem Definition
Maximum iron lamp photocell voltage is < 2 V
Diagnostic
D 84 λ Fe PCell
This error occurs when the stabilization module is analyzing the iron lamp photocell scan data and finds that the
maximum voltage is < 2 V. Check laser energy, D 84 λ Fe PCell. This occurs during AWR_SCAN while the laser is
firing in LSRON state.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 107 AWR PCell saturated
TOC
Display
E 107 AWR PCell saturated
Errors and Warnings Descriptions
Problem Definition
Maximum iron lamp photocell voltage is > 4.9 V
Diagnostic
D 84 λ Fe PCell
This error occurs when the stabilization module is analyzing the iron lamp photocell scan data and finds that the
maximum voltage is > 4.9 V. Check laser energy, D 84 λ Fe PCell. This occurs during AWR_SCAN while the laser is
firing in LSRON state.
Error 108 AWR Dip too small
Display
E 108 AWR Dip too small
Problem Definition
Dip in iron lamp photocell voltage is < 15% of max
Diagnostic
D 84 λ Fe PCell
This error occurs when the stabilization module is analyzing the iron lamp photocell scan data and calculates
FePcellDip, the depth of the iron lamp photocell dip as a percentage of the maximum. dip% = [ (Max - Min)Max] *
100%. This occurs during AWR_SCAN while the laser is firing in LSRON state.
The stabilization module rejects any dip smaller than 15% of the maximum. The dip will be small or missing if the
laser linewidth is very broad, tuning is unstable, or the wavelength calibration is off.
Error 109 AWR No left edge
Display
E 109 AWR No left edge
Help
Problem Definition
Dip in iron lamp photocell voltage, too far left to scan
Diagnostic
No diagnostic
This error occurs when the stabilization module is analyzing the iron lamp photocell scan data and cannot find the
left edge of the dip in the scan data. This occurs during AWR_SCAN while the laser is firing in LSRON state.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 110 AWR No right edge
TOC
Display
E 110 AWR No right edge
Errors and Warnings Descriptions
Problem Definition
Dip in iron lamp photocell voltage, too far right to
scan
Diagnostic
No diagnostic
This error occurs when the stabilization module is analyzing the iron lamp photocell scan data and cannot find the
right edge of the dip in the scan data. This occurs during AWR_SCAN while the laser is firing in LSRON state.
Error 111 AWR Bad λ step
Display
E 111 AWR Bad λ step
Problem Definition
One of half steps in the scan was negative
Diagnostic
No diagnostic
This error occurs when the stabilization module is analyzing the iron lamp photocell scan data. While interpolating
the left or right edge, the stabilization module finds that the change in wavelength from one step to the next is
negative. This occurs during AWR_SCAN while the laser is firing in LSRON state.
Error 112 AWR_SCAN aborted
Display
E 112 AWR_SCAN aborted
Help
Problem Definition
The WCM mode changes during an AWR Scan
Diagnostic
No diagnostic
This error occurs if the stabilization module receives a change in mode of operation command from the laser control
module while performing an AWR_SCAN. This error is detected by the stabilization module and indicates a problem
exists in the control module, which should not be issuing commands to the stabilization module until a successful
completion of the AWR_SCAN has been detected.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 113 AWR Too few pts
TOC
Display
E 113 AWR Too few pts
Errors and Warnings Descriptions
Problem Definition
Stabilization module detects to few samples in scan
Diagnostic
No diagnostic
This error occurs when the stabilization module is analyzing the iron lamp photocell scan data and finds that there
are fewer than 10 samples over the 5 pm scan. The wavelength was bumped mechanically or the wavelength set
point was changed by the control module in the middle of the AWR_SCAN. This occurs during AWR_SCAN while the
laser is firing in LSRON state.
Error 114 AWR_SCAN timeout
Display
E 114 AWR_SCAN timeout
Problem Definition
CM timed out before finishing 5 pm scan
Diagnostic
D 81 λ Stat:
This error occurs when the stabilization module is required to complete the 5 pm scan and return results to the control
module. After 30 seconds, the control module times out. The repetition rate may have been too low for the
stabilization module to half step 5.0 pm (approximately 70 steps) and average eight readings per step. Use a
repetition rate > 30 Hz. This occurs during AWR_SCAN while the laser is firing in LSRON state.
Error 115 AWR Adjust too big
Display
E 115 AWR Adjust too big
Help
Exit
Problem Definition
Scan results required too great an adjustment to
FineOffsetCal
Diagnostic
D 91 AWR λ Error
This error occurs when the results of the AWR scan indicate that the fine offset needs adjusting more than allowed
by configurable C 351 FeMaxAdj. This error indicates that the adjustment was not made. This occurs during
AWR_CAL while the laser is firing in LSRON state.
Examine diagnostic D 90 AWR λ and compare to 248.3271 or D 91 AWR λ Error and decide whether to adjust the
fine offset manually.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Error 116 AWR_RESET Dscrpncy
Display
E 116 AWR_RESET
Dscrpncy
Problem Definition
Adjustments to FineOffsetCal too far from coarse
Diagnostic
D 81 λ Stat:
This error occurs when the laser control module has determined that the DSCRPNCY flag of the stabilization module
status byte is set. The DSCRPNCY flag is set when the discrepancy between the fine and the coarse wavelength
reading is larger than ±8.0 pm. This serves as a limit to long term adjustment of fine offset. This occurs during
AWR_RESET while the laser is firing in LSRON state.
These adjustments are performed automatically by the AWR. The adjustment, during AWR_CAL, is made only to the
fine offset. The coarse offset is not changed. If a series of small adjustments to the fine offset are made, all in the
same direction, there will be a significant discrepancy between fine and coarse wavelength readings.
Error 117 AWR_RESET No λ Lock
Display
E 117 AWR_RESET No λ
Lock
Problem Definition
Wavelength did not return by end of AWR_RESET
Diagnostic
D 81 λ Stat:
This error occurs when the stabilization module has failed to lock to the requested original wavelength within the 70
second AWR_RESET time. The repetition rate may have been too low for the wavemeter to step from the iron-line
wavelength back to the original setpoint or the original wavelength setpoint could have been invalid. A repetition rate
of 50 should allow the stabilization module to tune more than 300 pm in 60 seconds. This occurs during AWR_RESET
while the laser is firing in LSRON state.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 118 AWR No scan data
TOC
Display
E 118 AWR No scan data
Problem Definition
Communication with AWR module failed
Errors and Warnings Descriptions
Diagnostic
D 2 Com Status
This error message occurs at the end of AWR_SCAN of an AWR calibration sequence when communication between
the laser control module and the AWR module has failed. The AWR calibration sequence will terminate early without
a successful completion and generate this error message since no scan data can be obtained.
Warning 120 XFR ShtData corrupt
Display
W 120 XFR ShtData corrupt
Problem Definition
Corrupted data in shot data record
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the shot data
was passed from TCS to MCS. The shot data is passed in 150 shot data blocks if running at high repetition rates and
smaller blocks if running slower repetition rates or small bursts. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Warning 121 XFR shtlgth corrupt
Display
W 121 XFR shtlgth corrupt
Help
Problem Definition
Shot data length word corruption
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the shot data
was passed from TCS to MCS. The shot data is passed in 150 shot data blocks if running at high repetition rates and
smaller blocks if running slower repetition rates or small bursts. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Warning 122 XFR SplData corrupt
Display
W 122 XFR SplData corrupt
Problem Definition
Special response data corruption
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the shot data
was passed from TCS to MCS. The shot data is passed in 150 shot data blocks if running at high repetition rates and
smaller blocks if running slower repetition rates or small bursts. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Warning 123 XFR s_ack corrupt
Display
W 123 XFR s_ack corrupt
Problem Definition
S_ACK data word corruption
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the shot data
was passed from TCS to MCS. The shot data is passed in 150 shot data blocks if running at high repetition rates and
smaller blocks if running slower repetition rates or small bursts. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Warning 124 XFR s_err corrupt
Display
W 124 XFR s_err corrupt
Help
Exit
Problem Definition
S_ERR data word corruption
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the shot data
was passed from TCS to MCS. The shot data is passed in 150 shot data blocks if running at high repetition rates and
smaller blocks if running slower repetition rates or small bursts. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Warning 125 XFR bufofst corrupt
Display
W 125 XFR bufofst corrupt
Problem Definition
Transfer buffer address offset data corrupt
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the shot data
was passed from TCS to MCS. The shot data is passed in 150 shot data blocks if running at high repetition rates and
smaller blocks if running slower repetition rates or small bursts. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Error 126 XFR no SplData data
Display
E 126 XFR no SplData data
Problem Definition
TCS transfers data to MCS but data is not found
Diagnostic
No diagnostic
This error indicates a problem with the data transfer in shared memory between the two CPUs when the shot data
was passed from TCS to MCS. The shot data is passed in 150 shot data blocks if running at high repetition rates and
smaller blocks if running slower repetition rates or small bursts. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this error
occurs.
Error 130 TCS SEL/HVPS fault!
Display
E 130 TCS SEL/HVPS fault!
Help
Problem Definition
Shot energy low/HVPS fault
Diagnostic
No diagnostic
A shot energy low has occurred due to an HVPS fault. This error occurs when an unknown fault is detected in the
HVPS and cannot be self-diagnosed.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 131 TCS WCM data lag!
TOC
Display
E 131 TCS WCM data lag!
Problem Definition
Shot energy low/HVPS fault
Errors and Warnings Descriptions
Diagnostic
No diagnostic
This error occurs when more than 5 percent of the shot-to-dot data from the wavemeter has been replicated because
the data is missing. This error could be due to a serial communication problem between the wavemeter and the laser
controller or a bad video signal that cannot be analyzed by the wavemeter. It the wavemeter cannot analyze the video
signal for a particular signal for a particular laser pulse, then the data for that pulse cannot be sent to the laser
controller. Note that in this case the error LED on the Wavemeter Control Module (WCM) will be illuminated.
Warning 132 TCS corrupt offset
Display
W 132 TCS corrupt offset
Problem Definition
Transfer buffer address offset data corrupt
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the shot data
was passed from TCS to MCS. The shot data is passed in 150 shot data blocks if running at high repetition rates and
smaller blocks if running slower repetition rates or small bursts. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Warning 133 TCS corrupt cmd snt
Display
W 133 TCS corrupt cmd snt
Help
Exit
Problem Definition
Data corruption in command value received
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the command
data was passed from to MCS to TCS. The command data is passed when command blocks are sent. Commands
are sent across when a TCS shot information parameter is changed. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Warning 134 TCS bad cmd length
Display
W 134 TCS bad cmd length
Problem Definition
Data corruption in command length value
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the command
data was passed from MCS to TCS. The command data is passed when command blocks are sent. Commands are
sent across when a TCS shot information parameter is changed. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Warning 135 TCS no command sent
Display
W 135 TCS no command
sent
Problem Definition
Command interrupt received but no command sent
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the command
data was passed from MCS to TCS. The command data is passed when command blocks are sent. Commands are
sent across when a TCS shot information parameter is changed. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Warning 136 TCS corrupt data
Help
Exit
Display
W 136 TCS corrupt data
Problem Definition
Corruption in command value received
Diagnostic
No diagnostic
This warning indicates a problem with the data transfer in shared memory between the two CPUs when the command
data was passed from MCS to TCS. The command data is passed when command blocks are sent. Commands are
sent across whenever a TCS shot information parameter is changed. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 137 TCS bad trig mode
TOC
Display
E 137 TCS bad trig mode
Errors and Warnings Descriptions
Problem Definition
Invalid value or incomplete data received
Diagnostic
No diagnostic
This error indicates a problem with the data transfer in shared memory between the two CPUs when the command
data was passed from MCS to TCS. The command data is passed when command blocks are sent. Commands are
sent across whenever a TCS shot information parameter is changed. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this warning will occur. Contact Cymer Technical Support if this error
occurs. This error does not stop the laser.
Warning 138 TCS no pseudo fire
Display
W 138 TCS no psuedo fire
Problem Definition
Unable to pseudo fire after LSRON
Diagnostic
No diagnostic
This warning indicates one of the following:
•
Commutator problem
•
Signal conditioning board problem
•
Connector between TCS CPU and signal conditioning board disconnected
•
Bad TCS board
•
Broken connection between signal conditioning board and commutator
Error 140 TCS not initialized
Help
Exit
Display
E 140 TCS not initialized
Problem Definition
Laser did not properly start up
Diagnostic
No diagnostic
This error occurs when not enough information has been sent from the MCS to fire the laser for the current firing
mode. This error can be caused by corrupt memory (SRAM) on the MCS CPU board. Check all configurables, as well
as repetition rate, burst count for MANUAL and SELFLOCK TRIGGER modes, energy setting, energy mode, and
selflock burst interval. This error does not stop the laser.
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 141 TCS HVPS Sum Fault
TOC
Display
E 141 TCS HVPS Sum Fault
Problem Definition
An error has occurred in the HVPS
Errors and Warnings Descriptions
Diagnostic
No diagnostic
This error occurs when an unknown fault has been detected by the TCS in the HVPS and cannot be self-diagnosed.
This error does not stop the laser.
Error 142 TCS HVPS Overload
Display
E 142 TCS HVPS Overload
Problem Definition
Duty cycle is greater than 90%
Diagnostic
No diagnostic
This error occurs only in COUNTDOWN or LSRON state. It occurs when the duty cycle of the HVPS is greater than
90%. The laser drops to STANDBY state.
An open collector output from the HVPS grounds a pullup resistor in the control module to flag this error condition.
Any short to ground on this line would cause the error.
Verify that configurable C 26 HVChgTim is set properly. Usually this error means that the HVPS must be adjusted or
replaced. This error does not stop the laser.
Error 143 TCS HVPS overtemp
Display
E 143 TCS HVPS overtemp
Help
Problem Definition
Cooling fan failure
Diagnostic
No diagnostic
This interlock error occurs only in COUNTDOWN or LSRON state. The temperature sensor in the HVPS has detected
an over heated condition within the supply and the laser drops to STANDBY. The HVPS is air cooled by a fan. If this
fan fails, the HVPS will overheat.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
Error 145 TCS bad command
TOC
Display
E 145 TCS bad command
Problem Definition
Invalid or corrupt command sent
Errors and Warnings Descriptions
Diagnostic
No diagnostic
This error indicates a problem with the data transfer in shared memory between the two CPUs when the command
data was passed from MCS to TCS. The command data is passed when command blocks are sent. Commands are
sent across whenever a TCS shot information parameter is changed. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this error will occur. Contact Cymer Technical Support if this error
occurs. This error does not stop the laser.
Error 146 TCS selflock parm
Display
E 146 TCS selflock parm
Problem Definition
Bad selflock setting
Diagnostic
No diagnostic
This error occurs when the system is powered up for the first time and the information stored in the battery RAM is
invalid. This error occurs when the battery is disconnected from the MCS CPU and the battery RAM is corrupted.
There was a problem with the data transfer in shared memory between the two CPUs when the command data was
passed from MCS to TCS. The command data is passed when command blocks are sent. Commands are sent
across whenever a TCS shot information parameter is changed. This type of bus arbitration problem has been
corrected in the software, and it is unlikely that this error will occur. Contact Cymer Technical Support if this error
occurs. This error does not stop the laser.
Error 147 TCS nrgy low 2 long
Help
Display
E 147 TCS nrgy low 2 long
Problem Definition
Shot energy low too long
Diagnostic
No diagnostic
This error occurs after 300,000 shots with configurable C 33 EnrgyLow set to zero. Change configurable value to a
valid value to correct this error.
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Warning 148 TCS DRAM NMI
Display
W 148 TCS DRAM NMI
Problem Definition
NMI interrupt occurred in TCS
Diagnostic
No diagnostic
This warning is fixed by new bus arbitration logic. This should not occur on any system with revision D or higher bus
arbitration logic on the CPU boards. It is unlikely that this warning will occur. Contact Cymer Technical Support if this
warning occurs.
Error 149 TCS HV not charging
Display
E 149 TCS HV not charging
Problem Definition
The end of charge signal is not received.
Diagnostic
No diagnostic
This error could occur if the EOC (end of charge) signal is not received from the HVPS (high voltage power supply).
The error could also occur if the silicon controlled rectifier in the commutation module is latched up when the HVPS
is attempting to charge into the module.
Error 150 TCS no MCS response
Display
E 150 TCS no MCS response
Problem Definition
No MCS response
Diagnostic
No diagnostic
This error occurs when the MCS fails to respond. The trigger control software shuts down the laser and issues this
error; however, it does not display if communication has failed.
Help
Exit
101084-A 04/01
ELS-6600 Version 3.0 Software Reference
Book
List
TOC
Errors and Warnings Descriptions
Warning 151 Bad remote HV data
Display
W 151 Bad remote HV data
Problem Definition
Received data from RS485 host that was out of
range
Diagnostic
No diagnostic
This warning occurs if data that was out of range of configurable C 1 HVSetMin and/or configurable C 2 HVSetMax
was read on the input port, if received data was corrupted or not received within the specified time.
Error 152 TCS internal error
Display
E 152 TCS internal error
Problem Definition
Invalid repetition rate sent
Diagnostic
No diagnostic
This error could be any problem that is undefined inside the TCS CPU. It could be the result of a bad TCS board, bad
shared memory board, or possibly a bad MCS board. However, this error should never occur due to bus arbitration
problems. This error does not stop the laser.
Error 166 No 1st response-TCS
Display
E 166 No 1st response-TCS
Problem Definition
TCS not executing properly
Diagnostic
No diagnostic
This error indicates that the TCS board is not installed, the shared memory board is not installed, board(s) are bad,
or the loader software is not installed on the TCS CPU board.
Help
Exit
101084-A 04/01
W:\CSS\IPROD\IPROD\CD Product Files\LaserCD\66SW_V3.0_0401\feedback.fm
Cymer, Inc.
16750 Via Del Campo Ct.
San Diego, CA 92127 USA
User Feedback Form
Cymer welcomes your feedback about this manual. Your comments help us improve the quality and accuracy of
our manuals.
Please complete this form and FAX it to Information Products at (858) 385-6012.
Document Title
ELS-6600 Version 3.0 Software Reference
Document Number & Revision Date
101084-A April 2001
Date:
Your Evaluation
Suggested Improvements
Circle the number next to each question that best represents
your opinion of this manual.
CODE: 5 = Excellent, 4 = Good, 3 = Adequate,
2 = Fair*, 1 = Poor*, 0 = Not applicable
The following items list ideas for improving this manual.
Check the box next to the area(s) where you feel we could
improve this manual.
*Please explain CODE 1 or 2 evaluations in the COMMENTS
section below.
How easy is this manual to read
and understand?
5
4
3
2
1
0
Improve the Table of Contents
Is this manual technically
accurate?
5
4
3
2
1
0
Improve the overview/introduction
Does this manual include the
information you need?
5
4
3
2
1
0
Improve the organization
How helpful is this manual’s
information in your work?
5
4
3
2
1
0
Make the manual less technical
Can you easily find the
information you need?
5
4
3
2
1
0
Make the manual more concise/brief
Is the information provided in a
logical sequence?
5
4
3
2
1
0
Add more/better quick reference aids
How do you rate the
appearance of this manual?
5
4
3
2
1
0
Add examples
Do the illustrations help you
learn the topic?
5
4
3
2
1
0
Add more illustrations
Does this manual provide
answers to your questions?
5
4
3
2
1
0
Add more step-by-step procedures
Would you recommend this
manual to others?
5
4
3
2
1
0
Add more troubleshooting information
Do you believe this version of
the manual is an improvement
over the previous version?
‰
‰
‰
Yes
Add more detail
No
Other: ___________________________
Not applicable
‰
‰
‰
‰
‰
‰
‰
‰
‰
‰
‰
‰
COMMENTS: Write any additional comments on the lines below, including page numbers where applicable. Use
additional sheets if necessary:
OPTIONAL: If we may contact you concerning your comments, please complete the following information.
Your Name:
Company:
E-mail:
Address:
City/State:
______________________________________ Title:
_____________________________________
______________________________________ Telephone:
_____________________________________
______________________________________ FAX:
_____________________________________
________________________________________________________________________________________
______________________________________ Zip/Country:
_____________________________________
Thank you for your evaluation and input on suggested improvements to this manual.