See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/320897715 Analysis of SiC MOSFET dI/dt and its temperature dependence Article in IET Power Electronics · November 2017 DOI: 10.1049/iet-pel.2017.0203 CITATIONS READS 13 1,713 6 authors, including: Hui Li Zheng Zeng Xidian University Chongqing University 356 PUBLICATIONS 6,637 CITATIONS 106 PUBLICATIONS 1,707 CITATIONS SEE PROFILE Some of the authors of this publication are also working on these related projects: NARRATE: Natural LAnguage InteRaction with RelAtional OpTimizEr View project High-Density and Multi-Functional SiC Power Module for Electric Vehicle View project All content following this page was uploaded by Zheng Zeng on 24 November 2018. The user has requested enhancement of the downloaded file. SEE PROFILE IET Power Electronics Research Article Analysis of SiC MOSFET dI/dt and its temperature dependence ISSN 1755-4535 Received on 17th March 2017 Revised 18th September 2017 Accepted on 30th October 2017 doi: 10.1049/iet-pel.2017.0203 www.ietdl.org Hui Li1, Xinglin Liao1 , Yaogang Hu1, Zheng Zeng1, Erbing Song1, Hongwei Xiao1 1State Key Laboratory of Power Transmission Equipment & System Security and New Technology, School of Electrical Engineering, Chongqing University, Chongqing 400044, People's Republic of China E-mail: lxl108381@126.com Abstract: A change regulation of variation in drain current (dID/dt) of silicon carbide (SiC) metal–oxide–semiconductor fieldeffect transistors (MOSFETs) and their temperature dependencies are examined. Experimental results show that the magnitude of turn-off dID/dt decreases with temperature and turn-on dID/dt increases with increasing temperature. Further analysis shows that turn-on dID/dt is better than turn-off dID/dt in terms of temperature dependency and exhibits good linearity. This behaviour results from the positive temperature coefficient of the intrinsic carrier concentration and the negative temperature coefficient of the effective mobility of the electrons in the SiC MOSFET. Other factors that affect the temperature dependency of dID/dt, such as supply voltage, load current, and gate resistance, are also discussed. A temperature-based analytical model of dID/dt for the SiC MOSFET is derived using fundamental device physics equations. The calculations generally fit the measurements well. These results are beneficial since they provide a potential approach for junction temperature estimation in the SiC MOSFET. In SiC MOSFET-based practical applications, if turn-on dID/dt is sensed, then the junction temperature can be derived from the relationship curve of turn-on dID/dt versus temperature drawn experimentally in advance. 1 Introduction The superiority of a silicon carbide (SiC) metal–oxide– semiconductor field-effect transistor (MOSFET) in static and switching performance to Si devices has been demonstrated [1, 2]. To promote and expand its applications, many efforts have been devoted [3, 4]. In the future, the SiC MOSFET may replace Si insulated-gate bipolar transistors (IGBTs) in the voltage range of 1200 V and above due to its similar on-state performance and a faster switching speed. However, SiC MOSFETs are prone to oscillations during switching because of the coupling effects between the variation of drain current (dID/dt) and the parasitic inductances from the package design of the power module, which results in voltage overshoot [5, 6], false turn-on and unreliability [7, 8], and even damage to the devices [9]. With the development of the packaging technology, parasitic inductances are becoming increasingly small, but it cannot be avoided. Since the SiC MOSFET possesses a larger dID/dt compared with a Si MOSFET, even small parasitic inductances also result in significant oscillations. In practical applications, dID/dt requires close attention. In addition, their dynamic performance is also influenced by temperature [10, 11]. However, due to the limited knowledge of the SiC MOSFET, the theoretical analysis and the change regulation in terms of the effects of temperature on its switching characteristics have not been fully characterised and understood. Previous work by Zhu et al. [12] analysed the temperature dependency of on-resistance. In [13, 14], the threshold voltage, which was unstable under different temperatures because of electron tunnelling into and out of oxide traps, was investigated. The switching characteristics of the SiC MOSFET were investigated in [15, 16], whereas the impact of temperature was ignored. The relationship between dID/dt and temperature for the SiC MOSFET can be observed in a few published reports [17–20]. In [17], the characterisation and comparison of three types of 1.2 kV SiC MOSFETs from different manufacturers were presented at 25 and 175°C. Similar measurements were also carried out in [18, 19]. In [20], a SiC implantation and epitaxial MOSFET were evaluated at temperatures of 25 and 125°C. In [21], the effects of temperature on the turn-on dID/dt of the SiC MOSFET were investigated. It is IET Power Electron. © The Institution of Engineering and Technology 2017 suggested that turn-on dID/dt can be used as an approach for junction temperature measurement in the SiC MOSFET. Unfortunately, many issues still remain unclear. For the SiC MOSFET-based practical applications, the effects of temperature on its switching characteristic, which is useful for safely using the device, system reliability, and actual system design, should be investigated. Alternatively, in the future SiC MOSFET-based practical applications, junction temperature measurement will become an important topic. For the SiC MOSFET, the temperature sensitivity for the same electrical parameters in Si IGBT is low owing to its unipolar nature. Some conventional indicators of junction temperature estimation for Si devices will fail for the SiC MOSFET because of its wide bandgap, low intrinsic carrier concentration, and fast switching speed [22, 23]. Hence, it is also important to find a suitable temperature-sensitive electrical parameter for junction temperature measurement of the SiC MOSFET. In this study, an analysis of the variation in drain current for the SiC MOSFET during turn-on and turn-off is completed by considering the effects of temperature. It is shown experimentally that the magnitude of turn-off dID/dt decreases with temperature and turn-on dID/dt increases with increasing temperature. Further analysis shows that turn-on dID/dt is better than turn-off dID/dt in terms of temperature dependency and exhibits good linearity. The result is of great interest since it provides a potential approach to the junction temperature of the SiC MOSFET. From the relationship curve of turn-on dID/dt versus temperature, the junction temperature of the SiC MOSFET can be derived. In addition, a temperature-based analytical model of variation in drain current is presented, and the effects of the supply voltage, load current, and gate resistance on the temperature dependency of variation in drain current are analysed. 2 Temperature dependency characterisation of variation in drain current 2.1 Overview of the turn-on and turn-off process The typical structure of a 1200 V SiC MOSFET that consists of electrodes, gate oxide, junction field-effect transistor (JFET) 1 2.2 Temperature-based model of dID/dt Drain current rises during turn-on because VGS reaches the threshold voltage VTH. An N-type conducting channel connecting the source to the JFET region is created, while an accumulation layer is formed under the gate oxide at the top of the JFET region, providing current spreading for the electron current flowing from the channel into the JFET region, as shown in Fig. 1a. During turnoff, the condition is the opposite. Before the MOSFET is turned off, it is effectively in the normal operation condition, of which its drain-source voltage is approximately equal to VGS-VTH. Assuming that the drain current is approximately equal to the MOSFET channel current, the drain current can be written as ID = W μ0COX V GS − V TH 2 1 + λ(V GS − V TH) , 2L (1) where W is the channel width, L is the channel length, VTH is the threshold voltage, λ is the channel length modulation parameter, μ0 is the effective mobility of the carriers in the channel of the SiC MOSFET, and COX is the gate oxide capacitor. The time derivative of the drain current is given by dID W μ0COX dV GS = V GS − V TH 2 + 3λ(V GS − V TH) . dt 2L dt (2) The gate–source voltages (VGS) for turn-off and turn-on are given below Fig. 1 The structure and typical switching process (a) Structure of the SiC MOSFET, (b) Simplified equivalent circuit of the SiC MOSFET, (c) Typical switching process under an inductive load V GS_off = V GGe−(t / RgCISS), (3a) V GS_on = V GG(1 − e−(t / RgCISS)), (3b) where VGG is the gate driver voltage, Rg is the gate resistance that is composed of gate driver resistance and internal gate resistance, CISS = CGS + CGD is the input capacitance, where CGS and CGD are the gate–source capacitance and gate–drain capacitance, respectively. Taking the derivation of (3) with respect to time and substituting it into (2), the turn-off and turn-on dID/dt are shown as Fig. 2 Experimental switching process of the SiC MOSFET: VGS 20 V/div (orange line), VDS 400 V/div (blue line), ID 10 A/div (green line), t 100 ns/div region, and N-drift is shown in Fig. 1a, which is a vertical device with a planar gate. Fig. 1b shows its equivalent circuit, which contains three internal capacitances between each pair of nodes: gate–drain (CGD), gate–source (CGS), and drain–source (CDS). The switching process of power MOSFET based on an inductive load circuit is illustrated in Fig. 1c, which shows the four phases during turn-on and turn-off. Owing to the existence of switching loop stray inductances, the voltage drop across stray inductances reshapes the waveforms of VDS at the drain current rise phase in turn-on and fall phase in turn-off. As a result, a notch during turn-on and a peak during turn-off is provided because of the induced positive voltages and negative voltages, respectively. During turn-on, the drain current over-shoot is also indicated, which results from the reverse recovery current of the freewheeling diode (FWD). Meanwhile, during turn-off, drain current drops before the metal–oxide–semiconductor (MOS) channel starts to cut-off. This condition is due to the existence of the FWD junction capacitance discharged by the drawing part of the drain current. In addition, the turn-on gate–source voltage VGS presents a higher plateau voltage level than that of the turn-off because of the effect of CDS. Fig. 2 shows the turn-on and turn-off experimental measurements at a supply voltage of 450 V, a load current of 12 A, and a gate resistor of 10 Ω. 2 dID_off W μ0COXV GG = − a(2 + 3λa) e−(t / RgCISS), dt 2LRgCISS (4a) dID_on W μ0COXV GG = b(2 + 3λb) e−(t / RgCISS), dt 2LRgCISS (4b) with a = V GG e−(t / RgCISS) − V TH, b = V GG(1 − e−(t / RgCISS)) − V TH . Equation (4) is useful for understanding how the variation in drain current is determined by the gate resistance, load current, system voltage, and temperature. The value of dID/dt is also dependent on input capacitance Ciss, which dominates the switching time constant of the SiC MOSFET. Indeed, since the gate–drain capacitor is formed by a combination of constant gate-oxide capacitor and bias-dependent depletion capacitance under the gate, the input capacitance Ciss is non-linear and depends largely on the terminal voltage of the drain–source that has been revealed in numerous presented literature and datasheets. For a fixed drain– source voltage, the value of Ciss can be obtained according to the curve of Ciss versus drain–source voltage. The curve is normally provided by the manufacturer or experimental measurements. The switching process in Fig. 1c shows that during the drain current rise stage in turn-on and the fall stage in turn-off, the terminal voltage of the drain–source is equal to system voltage VDC. In practical application, system voltage VDC is typically fixed in the IET Power Electron. © The Institution of Engineering and Technology 2017 existing assembled converters. Therefore, Ciss can be considered a fixed value in the presented model. As reported by Chen et al. [15], experimentally, the C–V characteristics of the SiC MOSFET almost overlap under different temperatures. Hence, the temperature dependency of CISS is neglected. However, threshold voltage VTH and carrier effective mobility μ0 are dependent on temperature. The temperature dependency of dID/dt can be evaluated by taking the derivative of (4) with respect to temperature. For turn-off and turnon, the results are shown as (5a) and (5b), respectively d2ID_off WCOX V GG dμ = − (2a + 3λa2) 0 dtdT 2L RgCISS dT dV TH −(t / RgCISS) −(2 + 6λa)μ0 e , dT d2ID_on WCOX V GG dμ = (2b + 3λb2) 0 dtdT 2L RgCISS dT −μ0(2 + 6λb) dV TH −(t / RgCISS) e . dT (5b) (6) By replacing a with b and multiplying by −1 in (6), the expression of the temperature dependency of turn-on dID/dt can be obtained. Ultimately, the temperature dependency of the variation in drain current is dominated by the temperature dependency of the threshold voltage. The threshold voltage is the value of the gate voltage at which the surface potential of the channel in the MOSFET is exactly two times the bulk potential. In other words, the gate potential has induced sufficient band bending for the intrinsic Fermi level in the p-type body of the device to be below the Fermi level. Hence, the electron concentration in the channel is exactly equal to the p-body doping and the channel is properly inverted, that is, the minimum gate voltage required to switch on the device. Hence, the threshold voltage can be calculated as shown below in (7), where ψB is the Fermi potential, ɛSiC is the dielectric constant of carbide silicon, NA is the p-body doping, Qf is the fixed oxide charges, COX is the oxide capacitance, and φms is the metal–semiconductor work function difference [25] 4εSiCqNAψ B Qf V TH = ϕms − + 2ψ B + , COX COX (7) where kT NA ψB = ln . q ni Given that the work function difference (φms) and the oxide charges (Qf) are essentially independent of temperature, the threshold voltage temperature dependency can be written approximately as IET Power Electron. © The Institution of Engineering and Technology 2017 (8) Nevertheless, the analytical expressions of the threshold voltage and its temperature dependency are difficult to use for common electrical engineers due to several parameters based on the device fabrication that is not provided usually by manufacturers. A simple and feasible temperature-sensitive parameter of the threshold voltage can be generally obtained by experimental measurements. During turn-off, the time it takes for drain current to fall to zero from the load current can be modelled as (5a) Equations (5a) and (5b) show two temperature-sensitive parameters: the threshold voltage and the effective mobility of the carriers. Effective mobility in the SiC MOSFET, as reported in [24], initially shows an increasing trend with temperature due to the early movement of the Fermi level towards the band gap, whereas the mobility shows a negative temperature-sensitive parameter at high temperature because lattice scattering dominates and begins to release the interface trap charges. Therefore, in the practical working temperature range of 300–600 K, the mobility can be considered approximately constant for the SiC MOSFET, and dμ0/dT can be ignored for simplicity. Hence, (5a) can be simplified as d2ID_off W μ0COX V GG −(t / RgCISS) dV TH = e (2 + 6λa) . dtdT 2L RgCISS dT dV TH dψ B 1 εSiCqNA = 2+ . dT dT COX ψB tif = RgCISSln V GP , V TH (9) where VGP is the plateau voltage of VGS in turn-off defined as (IL/gm + VTH) and IL is the load current. Equation (9) shows that time tif is a function of load current (IL). Equation (9) is substituted into (4a) and the derivative with respect to IL is expressed as follows: d2ID_off W μ0COXV GGV TH = (2 + 3λa(3a + 2V TH)) e−(t / RgCISS) .(10) dtdIL 2LRgCISSV GPgm In (10), time t is equal to the drain current fall time tif. Similarly, for turn-on, the load current dependency of dID/dt is written as d2ID_on W μ0COXV GG(2 + 3λb(3b + 2V TH)) −(t / RgCISS) = e , (11) dtdIL 2LRgCISSgm(V GG − V GP) where the value of time t is the drain current rise time given as tir = RgCISSln((VGG−VTH)/(VGG−VGP)). Regardless of the situation, (10) and (11) are positive, which means that dID/dt increases with the load current during turn-off and turn-on. During turn-off, the excess carriers in the N-drift region are swept out to form a depletion layer in order to block the supply voltage. The depletion layer capacitance (Cdep) is defined as Cdep = εSiC A . 2εSiCV /qNA (12) The input capacitance (CISS) consists of gate–source capacitance CGS and gate–drain capacitance CGD. The former is constant and independent of voltage. The latter includes two components, namely, fixed gate oxide capacitor COX and varied depletion layer capacitance Cdep, which are in series. Hence, the derivative of CISS with respect to voltage can be obtained as 2 dCISS COX dCdep = Cdep + COX dV dV = − 2 2 COX εSiC A 2εSiCV Cdep + COX qNA qNA −(3/2) (13) . The voltage dependency of dID/dt can be evaluated by taking the derivative of (4) with respect to voltage and substituting (13) into the derivative. For turn-off, the dependency relation is exhibited in (14a), and for turn-on, the relation is in (14b). d2ID_of f W μ0COXV GG εSiCqNA = − 2 2A dtdV 4LRgCISS 1/2 2 COX × a(2 + 3λa)e−(t / RgCISS), Cdep + COX (14a) 3 d2ID_on W μ0COXV GG εSiCqNA = 2 dtdV 2A 4LRgCISS × 1/2 2 COX b(2 + 3λb)(1 − e−(t / RgCISS)) . Cdep + COX (14b) It is shown in (14) that dID/dt decreases with the increase in voltage during turn-off because its second-order derivative is negative. Also, for turn-on, dID/dt increases with voltage because of the positive second-order derivative. The relationships between temperature, load current, supply voltage, and variation in drain current during turn-off and turn-on are summarised in Table 1. When temperature increases, the variation of drain current decreases monotonically in turn-off. In the case of a turn-on, the trend increases monotonically. At a fixed temperature, the variation in drain current decreases with the increase in load current during turn-off and increases during turn-on. In addition, the variations in drain current during turn-off and turn-on show an increasing shift in supply voltage at the same temperature and load current. These results are interesting because the variation in drain current may be used as a potential indicator of junction temperature in the SiC MOSFET due to the monotonicity in temperature variation, load current, and supply voltage. 3 Experimental detail The static characteristics of the SiC MOSFET are measured using the Agilent B1505A curve tracer with the device placed in an environment chamber to control the temperature. The switching characteristics are determined by using the clamped inductive double-pulse test circuit shown in Fig. 3a. The switching waveforms are captured using a Lecroy 610Zi digital oscilloscope, which possesses a bandwidth of 1 GHz and a Table 1 Variation trend of drain current over operation conditions Turn-on Turn-off dID/dt dID/dt operation condition temperature ↑ load current ↑ supply voltage ↑ gate resistance ↑ ↓ ↓ ↑ ↓ ↑ ↑ ↓ ↓ sample rate of 20 GS/s. Current is measured using a Pearson current sensor that is connected to the oscilloscope. During the experiment, different ambient temperatures are simulated using a heater, and the SiC MOSFET is mounted at the bottom of the test circuit board connected to the heater through an aluminium plate with some thermal grease for reliable heat transfer, as shown in Fig. 3b. The heater can vary the temperature from room temperature to 450°C. To guarantee measurement accuracy, a fan is used to avoid the effects of temperature on the other components. Fig. 3c shows the test rig. 4 Experimental results 4.1 Threshold voltage and transconductance temperature sensitivity Figs. 4a and b show the SiC MOSFET transfer and output characteristics at varying temperatures, respectively. The temperature dependencies of the threshold voltage can be obtained, as shown in Fig. 4c. The square represents the tested values under different temperatures, while the solid line represents the fitted values. It can be seen that the threshold voltage significantly decreases with the increase in temperature, which is typical for 4HSiC MOSFET and has been observed in previous studies [17, 18]. The effect is caused by the increase in intrinsic carrier concentration at high temperatures, as expressed by (7), due to the increased thermal generation of carriers across the band gap, which forms the channel easily. Fig. 4c shows that the threshold voltage temperature dependency is approximately linear. The temperature sensitivity coefficient (kVT) is ∼−6.37 mV/°C, which causes the derivative of dID/dt with respect to the temperature for the turn-off to be negative according to (6). As predicted, dID/dt decreases with the increase in temperature during turn-off. In the case of a turn-on, dID/dt increases with temperature because of the positive temperature derivative of dID/dt. If the nominal threshold voltage (VTH0) at room temperature is known, then a simple expression can be used to describe the threshold voltage at any measured temperature T V TH(T) = V TH0 − kVT(T − T 0) . (15) The temperature dependency of transconductance gm is shown in Fig. 4d. The stars represent the tested values under different Fig. 3 Experiment details (a) Schematics of test, (b) Simulation of different ambient temperatures, (c) Experiment rig components 4 IET Power Electron. © The Institution of Engineering and Technology 2017 Fig. 4 Static characteristics under different temperatures for the SiC MOSFET (a) Temperature-dependent transfer characteristics, (b) Temperature-dependent output characteristics, (c) Temperature-dependent threshold voltage, (d) Temperature-dependent transconductance temperatures, while the solid line represents the fitted values. Fig. 4d shows that transconductance increases with temperature and the temperature sensitivity coefficient kGT is ∼16.19 mS/°C. The positive temperature coefficient of the transconductance arises from the increased MOS channel inversion electron density and mobility at high temperatures due to the increased detrapping of electrons at the high density of interface traps at the SiC/SiO2 interface. A simple expression similar to (15) can also be used to describe the transconductance at any measured temperature (T), where gm0 is the nominal transconductance at room temperature gm(T) = gm0 + kGT(T − T 0) . (16) 4.2 Impact of temperature on dID/dt The switching waveforms of the SiC MOSFET are recorded at different temperatures, load currents, gate resistors, and supply voltages to study the effects of these conditions on dID/dt. Figs. 5a and b show the turn-off waveforms of the drain current under different gate resistors at a supply voltage of 200 V and a load current of 15 A. The temperature varies with a range of room temperature to 175°C at 25°C intervals. The turn-on waveforms for drain current are also exhibited in Figs. 5c and d. It can be seen that the temperature dependency of dID/dt varies with gate resistors during turn-off and turn-on. During turn-off, the time at which the drain current starts to fall increases with temperature at small values of the gate resistor and is approximately the same for large values of the gate resistor. During turn-on, the time, at which the drain current starts to increase, decreases with temperature at large values of the gate resistor and is nearly the same at small values of the gate resistor. The phenomenon is a result of the negative temperature coefficient of the threshold voltage shown in Fig. 4c, which causes the device to switch later or sooner at high temperatures during turn-off and turn-on, respectively. In addition, the variation in drain current varies with temperature during turnoff and turn-on, especially for a large gate resistor during turn-on. From the curves above, the measured values of dID/dt, as a function of temperature under different measurement conditions, are obtained. The results are shown in Fig. 6 for turn-off and Fig. 7 IET Power Electron. © The Institution of Engineering and Technology 2017 for turn-off, respectively. In Fig. 6, the magnitude of dID/dt is adopted for plotting. The calculated values are also shown in these figures. In the calculations, the values of CGS and COX are 2.192 and 3.387 nF, respectively, which are extracted by a constant gate current circuit during turn-on. Indeed, for the SiC MOSFET, the relative variation of channel length is very small compared with the long channel, and λ can be treated as zero. The values of W and L are calculated by choosing points from the saturation region of the device output characteristic curves in the datasheet. The drain– source overlap area ADS is 5.3676 mm2. The temperature dependency of the effective mobility of the carriers is taken from [26]. For a fixed voltage of 400 V and a gate resistance of 47 Ω, the relationship between dID/dt and temperature under different load currents is presented in Fig. 6a. The load current values are 10, 15, and 20 A. Fig. 6b shows the results at supply voltages of 200, 400, and 600 V with a fixed load current of 15 A and a gate resistance of 47 Ω. The calculated values can be obtained by (4a) combined with (15). It can be seen that turn-off dID/dt decreases as temperature increases with fixed voltage, load current, and gate resistance, which is consistent with (4a) and (6). At a fixed temperature, turn-off dID/dt increases with load current as predicted by (10). The increase of the gate voltage plateau with load current will increase dID/dt, while the increase in time it takes for gate voltage to fall to threshold voltage from plateau with voltage plateau will result in a small dID/dt. Hence, assuming a fixed supply voltage and device temperature, the more dominant parameter will determine how dID/dt varies with temperature. Indeed, the load current dependency of dID/dt is dominated mainly by the gate voltage plateau. At large load current, dID/dt is large. At fixed load current, turn-off dID/dt varies with supply voltage. It can be seen in Fig. 6b that turn-off dID/dt decreases with the increase in supply voltage as predicted by (14a). This characteristic is a result of the change in Miller capacitance under different supply voltages. Further analysis of the measurements in Figs. 6a and b reveals that regardless of the measurement conditions, the temperature sensitivity of dID/dt is approximately common. 5 Fig. 5 Turn-off and -on waveforms for ID at a supply voltage of 200 V and a load current 15 A under different temperatures (a) Turn-off waveforms for ID at Rg = 10 Ω, (b) Turn-off waveforms for ID at Rg = 47 Ω, (c) Turn-on waveforms for ID at Rg = 10 Ω, (d) Turn-on waveforms for ID at Rg = 47 Ω Fig. 6 Turn-off dID/dt as a function of temperature (a) Turn-off dID/dt at different load currents, (b) Turn-off dID/dt at different supply voltages, (c) Turn-off dID/dt at different gate resistances Moreover, the dependency of dID/dt on the gate resistor and temperature is investigated by experimental measurements. The results are exhibited in Fig. 6c, where the temperature dependencies of dID/dt are shown for different gate resistors with a supply voltage of 400 V and a load current of 15 A. It can be seen from Fig. 6c that the temperature sensitivity of dID/dt varies with 6 different gate resistors, which is small at small and large values of the gate resistor and large at intermediate values of the gate resistor, which is due to the fact that d2ID/dtdT as the varying gate resistor shows an upside-down bell-shaped characteristic, as presented in Fig. 8. IET Power Electron. © The Institution of Engineering and Technology 2017 In the case of a turn-on, the temperature dependency of dID/dt at different load currents is shown in Fig. 7a, while the results under different supply voltages are exhibited in Fig. 7b. It is shown that turn-on dID/dt increases with temperature as expected. The variation trend is different from that for turn-off. For the load current, its impacts on dID/dt are positive as predicted by (11), which is similar to that for turn-off. For supply voltage, its effect is also positive as predicted by (14b), but is contrary to that for turnoff. This means that turn-on dID/dt increases with increasing temperature and supply voltage. The temperature sensitivity of dID/dt is also approximately the same in any test condition. Fig. 7c presents the temperature dependency of dID/dt for different gate resistors. It is noted that the impacts of the gate resistor are similar to those for turn-off. At the intermediate gate resistor value, the temperature sensitivity of dID/dt is large. In addition, the comparisons of calculated and measured dID/dt in the figures above show that the calculations generally fit the measurements well. The results obtained are interesting and useful because they provide a potential approach for junction temperature measurement in the SiC MOSFET. Fig. 7 Calculated d2ID/dtdT for varying gate resistor at 25°C 5 Discussion The aforementioned analysis indicates that the threshold voltage will vary at different temperatures, thereby causing the device to switch sooner or later. Hence, delay time also varies with temperature during turn-on and turn-off. The results for two temperatures, namely, 25 and 175°C, are presented in Fig. 9, where the delay time during turn-off and turn-on is defined according to the report in [27]. The two gate resistances of 10 and 47 Ω are also used in the measurement. Fig. 9a shows the turn-on delay time of the SiC MOSFET at 25 and 175°C with a gate resistance of 10 Ω. The supply voltage and load current are 200 V and 15 A, respectively. At the same conditions, the turn-off delay time of the SiC MOSFET is shown in Fig. 9b. Delay time versus temperature is repeated at a gate resistance of 47 Ω as shown in Figs. 9c and d for turn-on and turn-off, respectively. It is noted from Fig. 9 that delay time varies with temperature and that gate resistance exerts a significant influence on the temperature dependency of delay time. For a fixed gate resistance of 10 Ω, the turn-on delay time varies from ∼50.44 ns at 25°C to 61.11 ns at 175°C, thereby exhibiting a small variation trend as temperature increases. However, during turn-off, delay time ranges from 132.71 to 199.88 ns when temperature changes from 25 to 175°C. With a large gate resistance of 47 Ω, the turn-on delay time shows a significant decrease from 109.59 ns at 25°C to 57.76 ns at 175°C, while the turn-off delay time is approximately invariant with temperature. The values are ∼564.88 ns for two temperature conditions. For a certain gate resistance, either turn-on delay time is strongly correlated with temperature or turn-off delay time varies significantly with temperature. Hence, the delay time can also be used as a thermosensitive electrical parameter for junction temperature measurement in the SiC MOSFET. However, since the time is relatively small, the delicate measurement of delay time in practical applications is a challenge. The variation trend between dID/dt and temperature for the SiC MOSFET can also be observed in other published reports on the performance of the SiC MOSFET at different temperatures. OrtizGanzalez et al. [21] investigated the temperature dependency of turn-on dID/dt. Measurements were performed for three different Fig. 8 Turn-on dID/dt as a function of temperature (a) Turn-on dID/dt at different load currents, (b) Turn-on dID/dt at different supply voltages, (c) Turn-on dID/dt at different gate resistances IET Power Electron. © The Institution of Engineering and Technology 2017 7 Fig. 9 Delay times at 25 and 175°C at a supply voltage of 200 V and a load current 15 A with different gate resistances (a) Turn-on delay time at Rg = 10 Ω, (b) Turn-off delay time at Rg = 10 Ω, (c) Turn-on delay time at Rg = 47 Ω, (d) Turn-off delay time at Rg = 47 Ω rating current devices (10, 24, and 42 A) at 25, 75, 105, and 150°C. Their results showed that turn-on dID/dt linearly increases with temperature and that the temperature sensitivity of dID/dt increases with gate resistance and current rating, which are consistent with the results. Compared with other published literature in terms of the temperature dependency of turn-off dID/dt, an interesting phenomenon can be found. The turn-off dID/dt is either temperature invariant or decreases with temperature at a small gate resistance. In DiMarino et al. [17] and Chen et al. [18], the measurements were performed at a supply voltage of 600 V and a load current of 10 A with 10 Ω gate resistance. The magnitude of turn-off dID/dt decreases with temperature. The values are ∼2.22, 1.9, 1.79, and 1.64 A/ns at 25, 125, 175, and 200°C, respectively. Othman et al. [19] experimentally showed that the temperature sensitivity of turn-off dID/dt is very low and approximately constant under 400 V, 15 A, and a gate resistance of 28 Ω. When the temperature increases from 25 to 175°C, the value of dID/dt is ∼0.96 A/ns. As reported by Takao et al. [20], the same conclusions were drawn from the switching waveforms of the SiC MOSFET at 25 and 125°C at 600 V, 10 A, and a gate resistance of 11.36 Ω. Thus, it can be concluded that the temperature sensitivity of turnoff dID/dt differs for different devices coming from different manufacturers even at the same gate resistance. In addition, the temperature dependency of the gate current varies for different SiC MOSFETs, as presented in Fig. 10, where the SiC MOSFETs are SCT2080KE and C2M0080120 and the gate resistance is 220 Ω. In both measurements, the temperatures are 25, 75 and 150°C. Figs. 10a and b show the measured turn-on and turn-off gate current waveforms as a function of time for SCT2080KE, whereas Figs. 10c and d show the results for C2M0080120 during turn-on and turn-off. It can be seen that the turn-on gate current plateau increases with temperature, which is similar to those reported in Ortiz-Ganzalez paper [21]. However, for C2M0080120, the turn-on gate current plateau is approximately invariant with temperature. It indicates this parameter is not utilised for junction temperature measurement in C2M0080120. In the case of turn-off gate current, its temperature dependency in SCT2080KE is not significant 8 shown in Fig. 9b, while it exhibits a strong temperature dependency in C2M0080120 shown in Fig. 9d, which may be used as a potential approach in junction temperature measurement for C2M0080120. Hence, it is concluded from the above analysis that some parameters in the dynamic properties of the SiC MOSFET during turn-off at special operation conditions may be suitable temperature-sensitive electrical parameters for junction temperature measurement in SiC MOSFET. In the case of the SiC MOSFET used in this study, the relationship curve between turn-off dID/dt and temperature is nearlinear under large gate resistor conditions, which may be as a temperature-sensitive electrical parameter for junction temperature measurement. However, further analysis of the curves of dID/dt versus temperature during turn-off and turn-on shows that the turnon dID/dt exhibits better temperature sensitivity compared with that of turn-off dID/dt at the same gate resistor. The linearity with temperature for turn-on dID/dt is higher than turn-off dID/dt. The higher linearity brings benefits to the calibration step since it does not need a lot of measurement points. Hence, turn-on dID/dt is more suitable to be used as a temperature-sensitive electrical parameter. Indeed, dID/dt can be easily measured by the induced voltage across the parasitic inductance between the Kelvin and the power emitter terminal of a power module [28]. For a discrete SiC MOSFET with TO-247 package, the Kelvin connection is realised by adding an auxiliary source pin at the root of the packaging power source lead. In addition, dID/dt can also be measured directly by the Rogowski coil or the magnetoresistive current sensors [29, 30]. For SiC MOSFET-based practical applications, the type of device and system parameters, such as voltage, load current, and gate resistance, are usually fixed. Once turn-on dID/dt is sensed, the junction temperature of the SiC MOSFET can be derived from the relationship curve of turn-on dID/dt versus temperature drawn experimentally in advance. IET Power Electron. © The Institution of Engineering and Technology 2017 Fig. 10 Temperature dependency of gate current for different SiC MOSFETs during turn-on and turn-off (a) Turn-on gate current for SCT2080KE, (b) Turn-off gate current for SCT2080KE, (c) Turn-on gate current for C2M0080120, (d) Turn-off gate current for C2M0080120 6 Conclusion The temperature dependency of dID/dt is presented in this study. It is shown that dID/dt is a function of temperature. Compared with turn-off dID/dt, the temperature dependency of turn-on dID/dt is better and exhibits a near linear dependency on temperature. This behaviour is a result of the coupling of the positive temperature effect of the intrinsic carrier concentration and the negative temperature effect of the effective mobility of the electrons in the SiC MOSFET. The effects of supply voltages, load currents, and gate resistances are also discussed. During turn-off, dID/dt increases with load current but decreases with supply voltage. In the case of a turn-on, dID/dt increases with the increase in load current and supply voltage. However, for different supply voltages and load currents, the temperature dependency of dID/dt is approximately the same. With fixed supply voltage and load current, the temperature dependency of dID/dt varies for different gate resistors, which is small at small and large values of the gate resistor and large at intermediate values of the gate resistor. In addition, delay time also varies with temperature and gate resistors under fixed supply voltage and load current. A temperature-based analytical model of dID/dt for the SiC MOSFET is proposed and is shown to account for the experimental measurements. Due to good linearity, it can be concluded that turn-on dID/dt may be considered a practical temperature-sensitive electrical parameter for the junction temperature measurement of the SiC MOSFET. With a database of turn-on dID/dt with temperature, supply voltage, load current, and gate resistance, the junction temperature of the SiC MOSFET can be derived from the relationship curve of turn-on dID/dt versus temperature. (CYB16020), the National Natural Science Foundation of China (51377184, 51607016), and the Chongqing Scientific and Technological Talents Program (KJXX2017009). 8 [1] [2] [3] [4] [5] [6] [7] [8] [9] [10] [11] [12] 7 Acknowledgments This paper is supported by the Fundamental Research Funds for the Central Universities (106112016CDJZR158802), the Graduate Scientific Research and Innovation Foundation of Chongqing IET Power Electron. © The Institution of Engineering and Technology 2017 References Hudgins, J.: ‘Power electronic devices in the future’, IEEE J. Emerg. Sel. Top. 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