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Lamp power supply, Q1000HA

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POWER SUPPLY Q1000HA
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Description
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V0.1
Electronic Visions Co.
Description
POWER SUPPLY Q1000HA
Autor:HL
Doc.:Q1000HA.DOC

ELECTRONIC VISIONS CO. (1998). All rights reserved
Allied Signals
10.03.00
POWER SUPPLY Q1000HA
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Table of Contents
1 Front View Layout ............................................................................................................. 3
2 Description of the Individual Components......................................................................... 4
2.1 Power ON.................................................................................................................................4
2.2 Start..........................................................................................................................................4
2.3 Display Unit for Intensity and Lamp Power ............................................................................4
2.4 Display Unit for Current and Voltage......................................................................................4
2.5 Meter Select - Current/Voltage................................................................................................4
2.6 Meter Select - Intensity/Power.................................................................................................5
2.7 Mode Select C/I - C/P ..............................................................................................................5
2.8 Channel Select ..........................................................................................................................5
2.9 Channel A/B - Calibration Regulator.......................................................................................5
2.10 Channel A/B - Set Regulator..................................................................................................6
2.11 Power Set Regulator...............................................................................................................6
2.12 Counter...................................................................................................................................6
3 Adjustment of the Power-Supply ........................................................................................ 7
4 Measurement Tools ............................................................................................................ 8
4.1 U.V. Powermeter......................................................................................................................8
4.2 Adjustmentplate .......................................................................................................................9
4.2.1 Measurement points ..........................................................................................................................9
4.2.2 Calculation of the uniformity: ...........................................................................................................9
4.2.3 Desired Uniformity: ..........................................................................................................................9
5 C/I Mode (Constant Intensity).......................................................................................... 10
6 Trouble Shooting.............................................................................................................. 11
6.1 Lamp doesn’t ignite................................................................................................................11
6.2 Lamp turns off during operation............................................................................................11
6.3 Lamp explosion ......................................................................................................................11
Autor:HL
Doc.:Q1000HA.DOC

ELECTRONIC VISIONS CO. (1998). All rights reserved
Allied Signals
10.03.00
POWER SUPPLY Q1000HA
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Description
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V0.1
1 Front View Layout
Autor:HL
Doc.:Q1000HA.DOC

ELECTRONIC VISIONS CO. (1998). All rights reserved
Allied Signals
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POWER SUPPLY Q1000HA
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2 Description of the Individual Components
2.1 Power ON
To switch on the voltage.
For turning on the power this lever needs to be switched to the top position.
2.2 Start
Press this button to start the lamp.
For igniting the lamp the electronics control system of the maskaligner
needs to be switched off. Also at least 5 bar of nitrogen cooling pressure needs to be supplied and the lamp must be cold.
2.3 Display Unit for Intensity and Lamp Power
display unit for intensity in mW/cm2 and actual lamp power in Watts.
To switch between intensity and power use
the "Meter Select - Intensity/Power" switch
(refer to chapter 2.6)
2.4 Display Unit for Current and Voltage
display unit for lamp current in Ampere and
lamp voltage in Volts.
To switch between Current and Voltage use
the "Meter Select - Current/Voltage" switch
(refer to chapter 2.5)
2.5 Meter Select - Current/Voltage
Change-over switching between Current and Voltage for Display Unit "Current / Voltage" (refer to chapter
2.4)
Autor:HL
Doc.:Q1000HA.DOC
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ELECTRONIC VISIONS CO. (1998). All rights reserved
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2.6 Meter Select - Intensity/Power
Change-over switching between intensity and lamp
power - for Display Unit "Intensity / Power" (refer to
chapter 2.3)
2.7 Mode Select C/I - C/P
Change-over switching between C/I (constant intensity) and
C/P (constant power). Constant Intensity mode requires a
photo diode inside the way of light.
2.8 Channel Select
Change-over switching between Channel A and B. Each
channel can be connected to a photo diode (two different
wavelength).
2.9 Channel A/B - Calibration Regulator
This is for adjusting the measured lamp power
With LOCK the regulator position can be saved after the adjustment.
Autor:HL
Doc.:Q1000HA.DOC
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ELECTRONIC VISIONS CO. (1998). All rights reserved
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2.10 Channel A/B - Set Regulator
This is for adjusting the intensity in mW/cm2
With LOCK the regulator position can be saved after the adjustment.
2.11 Power Set Regulator
This is for adjusting the light power in Watts (for standby and
Constant Power mode).
With LOCK the regulator position can be saved after the adjustment.
2.12 Counter
Lifetime Counter. It is activated when turning on the power of the
lamp power supply.
Autor:HL
Doc.:Q1000HA.DOC

ELECTRONIC VISIONS CO. (1998). All rights reserved
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3 Adjustment of the Power-Supply
1. Turn on the red main switch on the Maskaligner and the POWER ON at the Lamp
Power Supply.
2. Put the selection switch CURRENT/VOLTAGE to Voltage and check the open circuit voltage (should be app. 150V).
3. Move the MODE switch to constant power (C/P) and the Intensity/Power switch
to Power.
4. Press the START-button to start the lamp. Check if the lamp is on (via the cov-
ered window in the lamp house). Lamp power comes down to 10 V.
If the lamp doesn’t ignite, refer to chapter 5 "Trouble Shooting".
5. Switch on the electronic unit with the Power ON - button at the Maskaligner. After
initialization run the "Lamp Adjust" procedure in the menu "UTILITIES".
6. You must wait about 10 min until the lamp is up to working temperature (check
with lamp voltage - has to be about 60V).
7. Turn the POWER SET regulator until the lamp is at the recommended standby
power.
8. Adjust the lamp uniformity with the UV-Powermeter and the adjustmentplate and
measure the resulting average intensity.
9. Switch the meter select to Intensity and the channel to A. Adjust the Calibration
Regulator to the measured intensity.
10.Switch MODE to Constant Intensity and the meter select to Power.
11.Adjust the channel A SET regulator until the lamp power reaches the normal
working lamp power (1000W).
12.Switch the meter select back to Intensity and check the mW/cm2 reading. Compare to the value on the UV-power meter. If necessary fine-adjust the calibrate
regulator until it shows the same value as the UV-power meter.
13.Move channel switch to B and repeat steps 9 - 12 for the second wave length (if
photo diode is available).
Autor:HL
Doc.:Q1000HA.DOC
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ELECTRONIC VISIONS CO. (1998). All rights reserved
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4 Measurement Tools
4.1 U.V. Powermeter
1 - Shows the contact for the sensor
2 - Power ON / OFF
3 - Selection switch for 3 different measurement types.:
NORM: shows actual intensity
PEAK HOLD: shows maximum intensity during the whole measurement.
HOLD: keeps the actual value on the display.
Autor:HL
Doc.:Q1000HA.DOC

ELECTRONIC VISIONS CO. (1998). All rights reserved
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4.2 Adjustmentplate
4.2.1 Measurement points
C è center (for 6" and 4" field lens)
6 H/R/V/L è for 6’’field lens
4 H/R/V/L è for 4’’field lens
After adjustment of the uniformity pass all the 5 points with the sensor and calculate
the average value for the adjustment of the Lamp Power-Supply.
4.2.2 Calculation of the uniformity:
(max - min) / (max + min) x100 = uniformity in [%]
4.2.3 Desired Uniformity:
+/- 3% with 4" field lens
+/- 5% with 6" field lens
Autor:HL
Doc.:Q1000HA.DOC

ELECTRONIC VISIONS CO. (1998). All rights reserved
Allied Signals
10.03.00
POWER SUPPLY Q1000HA
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5 C/I Mode (Constant Intensity)
When using the Constant Intensity Mode, the system automatically switches between standby power and exposure power.
Standby power is used when the shutter is closed. In this case the photo diode inside the lamp house can not measure any light, so the lamp power supply automatically switches to IDLE MODE (equal to Constant Power mode). This idle mode
power can be set to a lower value than the normal working power of the lamp. This
behavior gives the lamp a longer live.
The idle power is set during adjustment of the lamp power supply (refer to chapter 3
point 7). Recommended idle powers are:
nominal value of the lamp
350 W
500 W
1000 W
idle power
250 W
350 W
750 W
When opening the Shutter the photo diode reacts on the light and the lamp power
supply automatically switches back to Constant Intensity mode and rises the power
to the value adjusted with the SET regulator (refer to chapter 3 point 10).
Autor:HL
Doc.:Q1000HA.DOC

ELECTRONIC VISIONS CO. (1998). All rights reserved
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POWER SUPPLY Q1000HA
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Description
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6 Trouble Shooting
6.1 Lamp doesn’t ignite
1. Check the microswitch inside the lamp house which checks if the cover is close.
2. Check the POWER ON switch for the electronic of the Maskaligner. It has to be
switched off when igniting the lamp.
3. Lamp is not cold enough. After switching off the lamp it has to cool down for at
least 20 min before it can be started again.
4. Check the nitrogen cooling pressure. It has to be higher than 5.5 bar. If this value
is not reached an internal pressure switch reacts and does not allow the ignition
of the lamp.
6.2 Lamp turns off during operation
Nitrogen cooling pressure has dropped below 5,5bar. Pressure switch automatically
turns off the lamp to avoid explosion.
6.3 Lamp explosion
Reasons:
• lamp too old - lamp current may exceed maximum current
• defective lamp (mechanical failure)
• lamp power set too high (maximum values supported by vendor)
Safety actions after explosion:
Attention!!! Mercury vapour is extremely dangerous to health!!!
• All persons have to leave the room immediately!!! Mercury vapour escapes from
the damaged lamp.
• The room has to be ventilated carefully for at least 20 - 30 min to avoid mercury
vapour getting into the main air-conditioning system.
• After the lamphouse has cooled (ca. 20 min), any mercury residue should be
picked up with a special absorptive agent (available from lab-equipment dealers).
Autor:HL
Doc.:Q1000HA.DOC

ELECTRONIC VISIONS CO. (1998). All rights reserved
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