Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 1-11 V0.1 Electronic Visions Co. Description POWER SUPPLY Q1000HA Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 2-11 V0.1 Table of Contents 1 Front View Layout ............................................................................................................. 3 2 Description of the Individual Components......................................................................... 4 2.1 Power ON.................................................................................................................................4 2.2 Start..........................................................................................................................................4 2.3 Display Unit for Intensity and Lamp Power ............................................................................4 2.4 Display Unit for Current and Voltage......................................................................................4 2.5 Meter Select - Current/Voltage................................................................................................4 2.6 Meter Select - Intensity/Power.................................................................................................5 2.7 Mode Select C/I - C/P ..............................................................................................................5 2.8 Channel Select ..........................................................................................................................5 2.9 Channel A/B - Calibration Regulator.......................................................................................5 2.10 Channel A/B - Set Regulator..................................................................................................6 2.11 Power Set Regulator...............................................................................................................6 2.12 Counter...................................................................................................................................6 3 Adjustment of the Power-Supply ........................................................................................ 7 4 Measurement Tools ............................................................................................................ 8 4.1 U.V. Powermeter......................................................................................................................8 4.2 Adjustmentplate .......................................................................................................................9 4.2.1 Measurement points ..........................................................................................................................9 4.2.2 Calculation of the uniformity: ...........................................................................................................9 4.2.3 Desired Uniformity: ..........................................................................................................................9 5 C/I Mode (Constant Intensity).......................................................................................... 10 6 Trouble Shooting.............................................................................................................. 11 6.1 Lamp doesn’t ignite................................................................................................................11 6.2 Lamp turns off during operation............................................................................................11 6.3 Lamp explosion ......................................................................................................................11 Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 3-11 V0.1 1 Front View Layout Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 4-11 V0.1 2 Description of the Individual Components 2.1 Power ON To switch on the voltage. For turning on the power this lever needs to be switched to the top position. 2.2 Start Press this button to start the lamp. For igniting the lamp the electronics control system of the maskaligner needs to be switched off. Also at least 5 bar of nitrogen cooling pressure needs to be supplied and the lamp must be cold. 2.3 Display Unit for Intensity and Lamp Power display unit for intensity in mW/cm2 and actual lamp power in Watts. To switch between intensity and power use the "Meter Select - Intensity/Power" switch (refer to chapter 2.6) 2.4 Display Unit for Current and Voltage display unit for lamp current in Ampere and lamp voltage in Volts. To switch between Current and Voltage use the "Meter Select - Current/Voltage" switch (refer to chapter 2.5) 2.5 Meter Select - Current/Voltage Change-over switching between Current and Voltage for Display Unit "Current / Voltage" (refer to chapter 2.4) Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 5-11 V0.1 2.6 Meter Select - Intensity/Power Change-over switching between intensity and lamp power - for Display Unit "Intensity / Power" (refer to chapter 2.3) 2.7 Mode Select C/I - C/P Change-over switching between C/I (constant intensity) and C/P (constant power). Constant Intensity mode requires a photo diode inside the way of light. 2.8 Channel Select Change-over switching between Channel A and B. Each channel can be connected to a photo diode (two different wavelength). 2.9 Channel A/B - Calibration Regulator This is for adjusting the measured lamp power With LOCK the regulator position can be saved after the adjustment. Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 6-11 V0.1 2.10 Channel A/B - Set Regulator This is for adjusting the intensity in mW/cm2 With LOCK the regulator position can be saved after the adjustment. 2.11 Power Set Regulator This is for adjusting the light power in Watts (for standby and Constant Power mode). With LOCK the regulator position can be saved after the adjustment. 2.12 Counter Lifetime Counter. It is activated when turning on the power of the lamp power supply. Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 7-11 V0.1 3 Adjustment of the Power-Supply 1. Turn on the red main switch on the Maskaligner and the POWER ON at the Lamp Power Supply. 2. Put the selection switch CURRENT/VOLTAGE to Voltage and check the open circuit voltage (should be app. 150V). 3. Move the MODE switch to constant power (C/P) and the Intensity/Power switch to Power. 4. Press the START-button to start the lamp. Check if the lamp is on (via the cov- ered window in the lamp house). Lamp power comes down to 10 V. If the lamp doesn’t ignite, refer to chapter 5 "Trouble Shooting". 5. Switch on the electronic unit with the Power ON - button at the Maskaligner. After initialization run the "Lamp Adjust" procedure in the menu "UTILITIES". 6. You must wait about 10 min until the lamp is up to working temperature (check with lamp voltage - has to be about 60V). 7. Turn the POWER SET regulator until the lamp is at the recommended standby power. 8. Adjust the lamp uniformity with the UV-Powermeter and the adjustmentplate and measure the resulting average intensity. 9. Switch the meter select to Intensity and the channel to A. Adjust the Calibration Regulator to the measured intensity. 10.Switch MODE to Constant Intensity and the meter select to Power. 11.Adjust the channel A SET regulator until the lamp power reaches the normal working lamp power (1000W). 12.Switch the meter select back to Intensity and check the mW/cm2 reading. Compare to the value on the UV-power meter. If necessary fine-adjust the calibrate regulator until it shows the same value as the UV-power meter. 13.Move channel switch to B and repeat steps 9 - 12 for the second wave length (if photo diode is available). Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 8-11 V0.1 4 Measurement Tools 4.1 U.V. Powermeter 1 - Shows the contact for the sensor 2 - Power ON / OFF 3 - Selection switch for 3 different measurement types.: NORM: shows actual intensity PEAK HOLD: shows maximum intensity during the whole measurement. HOLD: keeps the actual value on the display. Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 9-11 V0.1 4.2 Adjustmentplate 4.2.1 Measurement points C è center (for 6" and 4" field lens) 6 H/R/V/L è for 6’’field lens 4 H/R/V/L è for 4’’field lens After adjustment of the uniformity pass all the 5 points with the sensor and calculate the average value for the adjustment of the Lamp Power-Supply. 4.2.2 Calculation of the uniformity: (max - min) / (max + min) x100 = uniformity in [%] 4.2.3 Desired Uniformity: +/- 3% with 4" field lens +/- 5% with 6" field lens Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 10-11 V0.1 5 C/I Mode (Constant Intensity) When using the Constant Intensity Mode, the system automatically switches between standby power and exposure power. Standby power is used when the shutter is closed. In this case the photo diode inside the lamp house can not measure any light, so the lamp power supply automatically switches to IDLE MODE (equal to Constant Power mode). This idle mode power can be set to a lower value than the normal working power of the lamp. This behavior gives the lamp a longer live. The idle power is set during adjustment of the lamp power supply (refer to chapter 3 point 7). Recommended idle powers are: nominal value of the lamp 350 W 500 W 1000 W idle power 250 W 350 W 750 W When opening the Shutter the photo diode reacts on the light and the lamp power supply automatically switches back to Constant Intensity mode and rises the power to the value adjusted with the SET regulator (refer to chapter 3 point 10). Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved Allied Signals 10.03.00 POWER SUPPLY Q1000HA Page Description 11-11 V0.1 6 Trouble Shooting 6.1 Lamp doesn’t ignite 1. Check the microswitch inside the lamp house which checks if the cover is close. 2. Check the POWER ON switch for the electronic of the Maskaligner. It has to be switched off when igniting the lamp. 3. Lamp is not cold enough. After switching off the lamp it has to cool down for at least 20 min before it can be started again. 4. Check the nitrogen cooling pressure. It has to be higher than 5.5 bar. If this value is not reached an internal pressure switch reacts and does not allow the ignition of the lamp. 6.2 Lamp turns off during operation Nitrogen cooling pressure has dropped below 5,5bar. Pressure switch automatically turns off the lamp to avoid explosion. 6.3 Lamp explosion Reasons: • lamp too old - lamp current may exceed maximum current • defective lamp (mechanical failure) • lamp power set too high (maximum values supported by vendor) Safety actions after explosion: Attention!!! Mercury vapour is extremely dangerous to health!!! • All persons have to leave the room immediately!!! Mercury vapour escapes from the damaged lamp. • The room has to be ventilated carefully for at least 20 - 30 min to avoid mercury vapour getting into the main air-conditioning system. • After the lamphouse has cooled (ca. 20 min), any mercury residue should be picked up with a special absorptive agent (available from lab-equipment dealers). Autor:HL Doc.:Q1000HA.DOC ELECTRONIC VISIONS CO. (1998). All rights reserved