Chemical Vapour Deposition Method
Submitted to:
Dr. Pankaj Sharma,
HOD Mechanical Engineering,
JECRC University
Submitted by:
Gourav Bhansali,
VIIth Mechanical Engineering,
JECRC University
What is CVD?
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CVD is a manufacturing method used to produce high quality and
performance solid materials at nano scale. They are used to produce
nano coatings, nano tubes and fullerenes. Graphene is yet another
application of this process.
These materials are of high purity and strong structural properties.
Thus, Carbon Nanotubes and Nano Coatings are prime applications.
How is CVD done?
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In CVD, gaseous precursors react to form a solid coating on a heated
substrate. The substrate maybe a metal heated to temperatures 200OC
– 2200OC. After that, reaction gases are put inside via the terminal
which then get adsorbed on the metal surface. The residual or waste
gases exit via the exit terminal.
The equation for “n” components is:
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M: Metal;
nMCl + nH2 = nM + nClh2
Cl: gaseous chemical;
H: Hydrogen
How is CVD done?(Contd...)
Applications of CVD
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Following are the applications of CVD:
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Thin film coatings,
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Carbon nanotubes and graphene,
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Agricultural applications like composite and powder production,
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Semiconductor isolation and erosion protection,
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Optical fibres,
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Nano machines and so on.
Applications of CVD(Contd...)
Effects on Nature
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Following are the harmful effects of CVD:
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Harmful waste gases: H2, CO, HF, and so on,
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Metal-organic precursors are expensive,
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High temperatures causes stress on films, etc.
QnA
&
Thanks!