SPECIALTY EQUIPMENT
1. Clean Room Products
1.1 KP
Series KP are one-touch fittings for clean room blow-off systems and drive air systems. The
KP series is completely oil free and liquid-contact areas are non-metallic. Parts are cleaned,
assembled and double packaged in a clean room. Resin parts for one-touch series KPQ/KPG
(for drive system air piping) are polypropylene.
1.2 SRF
The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin
material is used in the fluid contact area. The fluid contact area is washed with freon ultra
sonic and DI water.
1.3 LLB
Clean Air Module series LLB, available in a standard or high flow type, was designed to
easily obtain clean air. The space-saving module design reduces piping man-hours. The
series is assembled and double-packed in a clean room environment. Available in 24
variations the LLB offers a nominal filtration rating of 0.01 µm. Parts in contact with fluid
are grease-free and silicon-free. Options include digital flow switch, regulator, ON/OFF
valve, and restrictor.
1.4 SRP
High precision, low flow consumption, stainless steel regulator SRP has excellent corrosion
resistance. SUS316 is used for all metal parts in contact with the fluid. Consistent clean room
production is achieved by cleaning, assembling, inspecting, and sealing in double packaging
in a class 10,000 environment.
1.5 ARP
Precise pressure control and pressure adjustment can be critical factors when working with
either pressure fed fluids, air pilot regulator supply or during test and inspection applications.
R&D engineers from SMC, the world leaders in pneumatic technology, have long recognised
this fact and have now developed a new, improved, range of direct operated precision
regulators, Series ARP 20/30/40. Developed using SMC´s extensive knowledge of direct
operated regulators, Series ARP now offers several advantages over previous SMC models
including a decrease in air consumption by up to 80% compared to previous models less
than 1 /min (ANR) at 0,4 MPa - more precise pressure adjustment repeatability is within
±1% and sensitivity is now within 0,2% of Full Scale. Further benefits of this new modular
regulator range include digital pressure gauges fitted as standard and reverse flow
functionality.
1.6 SRH
Clean regulator series SRH is a contamination controlled stainless steel regulator designed to
minimize residual fluid. Design includes an intake/exhaust port in the diaphragm
compartment, which facilitates flow. SRH has outstanding corrosion resistance. All metal
parts in contact with fluid use stainless steel SUS316.
2. High Purity Products
2.1 Valves & Manifolds
2.1.1 LVA
SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can
be selected based on the customers application. Special diaphragm construction insures gentle
opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the
piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing
particle formation.
2.1.2 LVC
High purity chemical valves, series LVC with integral fittings eliminate the possibility of
residual liquid in pipe threads. In addition, the body has been designed for smooth flow with
minimal internal dead space. Special diaphragm construction insures gentle opening and
closing preventing the formation of micro-bubbles. A unique guide ring on the piston rod
eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.
2.1.3 LVQ
Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF
housing offers increased chemical resistance and the special diaphragm construction insures
gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring
eliminates lateral motion of the poppet, which reduces internal leakage.
2.1.4 LVM
Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique
construction reduces residual liquid to a minimum. Superior resistance to chemicals requires
less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.
2.1.5 LVN
An complaint often heard in both semiconductor and chemical equipment industries, is that
it’s almost impossible to eliminate bubble formation in the fluid circuit during the
manufacturing process. Following extensive research and development, engineers from SMC,
the worlds leading automation control experts, are pleased to announce that this is no longer
the case with the introduction of their latest chemical needle valves – Series LVN. Developed
especially to overcome bubble generation when using light liquids, LVN valves are
manufactured from a new type of lightweight PFA material which is highly compatible with
acids, bases and ultra pure water. Normally installed on top of the filter unit, these needle
valves can regulate flow rates between 0 to 12 l/min and when used in conjunction with
SMC’s LQ2 hyper PFA fittings, with their unique quadruple seal construction, outstanding
performance is achieved providing minimal leakage, reduced residual fluid and high flexural
strength. Series LVN valves are the perfect answer when working with fluids between 5 – 90º
C, at operating pressures of 0 – 0 ,5 MPa and in ambient temperatures of 0 – 60º C - a
champagne solution minus the bubbles.
2.1.6 LVD
Following semiconductor industry requests for a range of high purity valves for wet process
applications, engineers from SMC, the worlds leading automation experts, have reaped the
benefits of their substantial R&D investment with the launch of their latest 2/3 port Series
LVA, LVC and LVD valves. Designed specifically for both semi and medical applications,
these air operated high purity valves are the perfect answer to overcome the harsh
environments often encountered in wet process applications. Constructed from different
materials, dependent on their performance needs, and with a wide range of body options,
Series LVA, LVC and LVD with their resin fluid paths, are the perfect choice when working
with acids, alkalis and ultra pure water. Series LVC features integral compression fittings and
uses the latest PFA material for its body. Series LVA features threaded body fittings and uses
a combination of body materials including SUS316, PPS and PFA with Series LVD using
PFA body materials and SMC ´s one touch fittings - Series LQ1 and the clean Series KP . In
the case of the LVC model one further feature is also available - a suck back valve to
overcome and eliminate any possible leakage following the valves closure. With their unique
design and construction, these valves have no measurable leakage when operated at normal
working pressures and SMC´s development testing has indicated extremely long life cycle
performance.
2.1.7 LVH
LVH series air operated high purity valves are corrosion resistant against acid, alkali and ultra
pure water, making the LVH valve the perfect answer to overcome the harsh environments
often encountered in wet process applications. Series LVH is a manually operated valve,
available in a threaded or integral fitting type.
2.2 Fittings
LQ
SMC high purity HYPER FITTING series LQ* responds to the latest demands in process
control. From parts cleaning to assembly and packaging, all processes are controlled for
cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total
organic carbon) allowing confident use for the most demanding applications. If chemistries or
flow requirements are changed duing process, our face seal design allows for quick change of
tubing, and/or tube diameters, using the same fitting body.
2.3 Tubing
2.3.1 TIL
Series TIL high purity fluoropolymer tubing is available as standard in inch sizes of 50' and
100' rolls. The TIL series has outstanding corrosion resistance, compatible with chemicals
such as acids, bases and ultrapure water. The TIL series is also compatible with maximum
fluid temperatures of up to 200°C.
2.3.2 TL
Series TL high purity fluoropolymer tubing is available as standard in metric sizes of 10m or
20m rolls. The TL series has outstanding corrosion resistance, compatible with chemicals
such as acids, bases and ultrapure water.
2.3.3 TID
Machine builders requiring extra flexible, heat and chemical resistant tubing now have the
answer with our new Series TD/TID tubing range. Developed specifically for use in restricted
space applications, this soft multi-purpose fluoropolymer tubing achieves a 20% increase in
flexibility when compared to our existing TL/TH tubing. Available in both metric and inch
sizes of between 4 -12 mm and 1/8” – 1/2” respectively, the tubing is made from denatured
PTFE fluorine-based resin which provides high chemical and heat resistance up to + 260ºC.
With Food Sanitation Approval (FDA), TD/TID is the perfect solution in Food and
Packaging, Life Science, Semiconductor and Automotive industry applications.
2.3.4 TD
Machine builders requiring extra flexible, heat and chemical resistant tubing now have the
answer with our new Series TD/TID tubing range. Developed specifically for use in restricted
space applications, this soft multi-purpose fluoropolymer tubing achieves a 20% increase in
flexibility when compared to our existing TL/TH tubing. Available in both metric and inch
sizes of between 4 -12 mm and 1/8” – 1/2” respectively, the tubing is made from denatured
PTFE fluorine-based resin which provides high chemical and heat resistance up to + 260ºC.
With Food Sanitation Approval (FDA), TD/TID is the perfect solution in Food and
Packaging, Life Science, Semiconductor and Automotive industry applications.
3. Ionizer
3.1 IZS
At some stage in our lives most of us will receive an unexpected electrostatic shock. These
occur when an electrical charge is generated between two materials and then subsequently
earthed such as when getting out of a car, or after walking across carpet and touching a metal
door handle. Whilst this electrostatic discharge (ESD) is normally considered a minor
inconvenience, these shocks, often accompanied with a spark, can pose serious problems
during some manufacturing processes. As the world s leading automation experts, SMC
have recognised the potential hazards of static generation and their new Series IZS31 Ionizer,
simply and effectively takes the static away. Designed initially for use in applications where
even small amounts of static can destroy or damage sensitive electronic components, this bar
type ionizer uses the corona discharge method to eliminate static. For those not familiar with
this method, the corona discharge is a phenomenon observed when high voltage is applied to
an electrode needle and the atoms in the air around the tip of the needle are ionized. The
Series IZS31 Ionizer is available in three ion emission modes; sensing DC, continuous DC or
pulsed DC which can be adjusted from 1 Hz to 60 Hz dependent on the required speed of
operation. With its smooth profile and aerodynamic cross section, flow disturbance and
particle generation is kept to a minimum making the IZS31 ideal for use in clean room
environments. Available in nine standard bar lengths between 300 mm and 2300 mm, three
types of needles can be selected from general purpose tungsten, specialist silicon for use in
metal sensitive environments and cost effective standard stainless steel for applications
requiring less accuracy. Should the Ionizer s performance drop during operation an output
signal alerts the operator that the electrode needles require cleaning, maintenance or simple
replacement. Whilst the needles are secured with a double lock to prevent accidental release,
additional security covers are also available for even more protection when the ionizer is used
in critical applications.
3.2 IZN
IZN10 nozzle ionizer, was designed to meet the requirements for a more compact product
with better ion balance than the IZS31. With a 16mm body thickness, the IZN10 can be
installed in narrow spaces. The IZN series is suitable for high precision static electricity
removal on light electrical work pieces, and spot static electricity removal on small work
pieces. It is also appropriate for dust removal on injection-molded component parts.
3.3 Accessories
A build up of static electricity during the manufacturing process often results in poor final
production quality and substantially lower output. To help detect and monitor this naturally
occurring phenomenon engineers from SMC, the world s leading automation experts, have
now provided the solution with the launch of their new IZD10 and IZE11 Electrostatic Sensor
and Electrostatic Sensor Monitor. Originally developed to work alongside SMC s IZS31
Ioniser, the new electrostatic sensor and sensor monitor can accurately measure the potential
levels of static before the introduction of any countermeasures and importantly confirm the
effective performance of any countermeasures which have been introduced. The IZD10
sensor is currently available in two options depending on the magnitude of the charged object
- ±0.4 kV at 25 mm, ±20 kV at 50 mm - with a detection distance between 10 to 50 mm and
25 to 75 mm respectively. Readings from the sensor are converted into a 1 5 V output
which can be viewed on the extremely compact 30 mm square, IZE11 digital sensor monitor
or other instrumentation for downstream analysis. With its red and green colour digital
display, the sensor monitor can be adjusted to one of four different display patterns and it can
be ordered with either NPN or PNP switch outputs and either 1 5 V or 4 20 mA analogue
output specifications.
3.4 IZH
When the natural build up of static electricity causes production line or machine function
problems, its early detection and eradication can often be the difference between success and
failure. Today, engineers and production staff can now simply check the electrostatic potential
of an object and establish an immediate reading thanks to the new handheld electrostatic
sensor Series IZH10 from world automation experts SMC. Powered by two standard AA
batteries, the lightweight IZH10 is extremely portable and its sensor and separate compact
display unit can be used in even the tightest of spaces. Being both precise and accurate the
IZH10 can effectively measure electrostatic potential in various situations and, as an example,
a charge potential of ±20kV can be detected in a circular areas with a diameter of only
180mm at a distance of 50mm. When used in continuous mode, the sensor and display can
also operate for over 15 hours before its low battery warning light confirms that replacement
batteries are required. Further functions of the IZH10 include an automatic battery saver
which effectively turns the sensor off after 5 minutes of non-operation, a back light display to
ensure that readings can be seen even in the darkest of locations, the option to adjust the
sensor display to zero and the ability of the display to indicate and store both maximum and
minimum potential readings.
4. Thermo-control Units
4.1 HRS
Industry requests for a small, lightweight, high performance thermo-chiller have been
answered with the launch of our new Series HRS Thermo-Chiller. Developed for use across a
broad range of industry applications, this new addition to our rapidly expanding thermo
chiller range is ideal when installation space and ventilation flow is restricted yet stable
cooling performance is required. Weighing just 43 kilos, the HRS is designed to operate with
circulating fluid temperatures between 5 – 40 ºC and its PID control ensures smooth
temperature changes and excellent stability of ±0.1ºC. Available in both air cooled, or water
cooled options and three cooling capacities up to 2.500W, Series HRS is compatible for use
with all the common single phase power supplies – AC100V, AC100 -115V and AC200230V. Fully compliant to CE, UL and European RoHS standards, the Series HRS thermochiller range is also environmentally friendly with its quiet 60dB (A) operation and zero rated
ozone layer depletion R407C refrigerant.
4.2 HRGC
Series HRGC, is a comprehensive range of water temperature controllers that can produce a
constant supply of cool water in any environment. Available in a wide range of power supply
voltages, Series HRGC can be used throughout the world, and they provide both a cost
effective and environmentally friendly cool water solution. With reduced power consumption
of up to 74% and reduced refrigerant of up to 35%, Series HRGC really is the leader in
environmentally friendly cool water production. The HRGC series can achieve a temperature
stability of up to ± 0,5 ºC by using a proportional valve PID control. Designed for ease of
installation and maintenance Series HRGC, provides both simple operation including remote
control capabilities. With a cooling capacity from 0.9 to 4.8 kW, Series HRCG is available in
both air cooled and water cooled options.
4.3 HEC
If your machine requires accurate temperature control our new Series HEC, thermo con is the
perfect answer. Developed initially for the semiconductor industry, Series HEC is a range of
Peltier type chillers which are ideal for ensuring the constant temperature of circulating fluids.
Currently available in either an air cooled non refrigerant type - or water cooled options;
Series HEC provides accurate temperature control of +-0.01 to +-0.03ºC. Available in a wide
range of power supply voltages; 100 to 240VAC, 50/60Hz for air cooled models and 200 to
220VAC, 50/60 Hz for water cooled or Galden®HT 135, Fluorinert"FC-3283 options, this
new compact chiller range offers outstanding cooling capacity performance of between 230
and 1200W depending on the selected model. Further benefits of the HEC´s Peltier device is
that both noise and vibrations are kept to an absolute minimum. Series HEC is both CE and
IEC 60601-1 Medical Equipment Safety compliant and the air cooled models are perfect for
controlling temperatures in locations where there are no water facilities.
4.4 HED
Developed initially for use in wet etching, industrial plating and chemical metal polishing
equipment, our new and extremely compact, Series HED Chemical Thermocon ensures
precise temperature control in either acidic or alkali chemical liquid applications. Designed to
either cool or heat a circulating fluid, this range of Peltier type heat exchangers directly
control the temperature of the chemical fluid, at pressures up to 0.35MPa, and achieve a
temperature control accuracy of ± 0.1ºC thanks to its Peltier element. Using a number of PFA
moulded parts to help reduce metallic ion contamination, the Series HED is up to 50% smaller
than comparable thermocons on the market and also is considerably lighter, from 6 – 15kgs,
depending on the selected model. Available in a wide range of power supply voltages; 180 to
242VAC, 50/60Hz, this new compact heat exchanger range offers cooling capacities of
300W, 500W and 750W and heating capacities of 600W, 1000W and 1800W depending on
the selected model. Series HED is environmentally friendly and is fully compliant to RoHS,
CE, UL and eti accreditations.
5. High Vacuum Products
5.1 Angle and In-line Valves
5.1.1 XL
High vacuum angle valve series XL provides excellent thermal conductivity results in a
uniform temperature for the entire valve body and a marked decrease in the condensation of
gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr
(chrome) and a low sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.
5.1.2 XM and XY
Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body
materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the
body material of the XL is aluminum. The XM series is interchangeable with the XL series.
The precision cast, one piece manufacturing process of the XY series prevents imperfections
due to accumulation of gas and ensures no porosity in the body.
5.2 Slit Valves
XGT
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the
transfer chamber, and between the transfer chamber and the process chamber in
semiconductor manufacturing equipment, etc.
5.3 Smooth Vent
XV
Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR
(male & female) and Swagelok. Port size for the main supply is 1/4" and orifice is 3mm.
Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and
external seal).
6. Process Pumps
6.1 PA
Series PA is a double acting, compact, large capacity diaphragm pump suitable for transfer
and recovery of a wide variety of fluids. The PA series is available in 3 types; automatically
operated, air operated or automatically operated with a built-in pulsation attenuator.
6.2 PB
The PB series is a compact, single acting diaphragm pump which is suitable for transfer and
recovery of a wide variety of fluids. The PB series is available with a built-in solenoid valve
or in an air operated style. Space is saved due to the centralization of piping and wiring areas
on the top and bottom surfaces.
6.3 PAF3000
Semiconductor and LCD manufacturers now have a perfect pump solution with the launch of
the new PAF3000 diaphragm pump from SMC. Designed specifically to meet industry
demands, this high performance fluororesin pump is constructed with non metallic body parts
to ensure perfect compatibility when using high purity chemicals. With all wetted parts made
from either new PFA or PTFE, the PAF3000´s premium chemical and temperature
characteristics are further enhanced with use of PFA-PPS dual construction to improve both
proof pressure and heat cycle performance. Currently available in two options, an
automatically operated type with a solenoid valve built into the pump body or an air operated
type where the valve and electrical circuit are separated from the pump, the PAF3000 offers a
lightweight, compact, high flow rate solution to meet the most demanding of needs.
Additional features include the option to include an optical leak detector which can provide an
early warning signal of diaphragm failure and in the case of the air operated type, the addition
of mounted optical stroke sensors to ensure stable operation of the pump and accurate cycle
monitoring.
6.4 PAF5000
Semiconductor and LCD manufacturers now have a perfect pump solution with the launch of
the new PAF5000 diaphragm pump from SMC. Designed specifically to meet industry
demands, this high performance fluororesin pump is constructed with non metallic body parts
to ensure perfect compatibility when using high purity chemicals. With all wetted parts made
from either new PFA or PTFE, the PAF5000´s premium chemical and temperature
characteristics are further enhanced with use of PFA-PPS dual construction to improve both
proof pressure and heat cycle performance. Currently available in two options, an
automatically operated type with a solenoid valve built into the pump body or an air operated
type where the valve and electrical circuit are separated from the pump, the PAF5000 offers a
lightweight, compact, high flow rate solution to meet the most demanding of needs.
Additional features include the option to include an optical leak detector which can provide an
early warning signal of diaphragm failure and in the case of the air operated type, the addition
of mounted optical stroke sensors to ensure stable operation of the pump and accurate cycle
monitoring.