Temperature Control Equipment
Count on SMC for all your temperature control needs.
Chillers are products that control the temperature of heat sources in customers’ devices and equipment using
temperature-controlled circulating fluid. Maintaining a fixed temperature can improve the quality, reliability and
service life of devices or equipment.
Semiconductors
Machine
tools
Food
products
Physical and chemical/
analytical equipment
Temperature
control
of chamber
electrode
Measuring
devices
Medical/
Pharmaceutical
etc.
Makes cooling water easily available, anytime, anywhere.
There is no cooling tower.
Even without a cooling tower, an air-cooled refrigerated chiller
can be used to easily supply cooling water.
When... Tap water is being used.
Less tap water
used!
Dripping stops
When... There is a cooling tower, but high temperatures in
Cooling water at a consistent temperature can be supplied
regardless of the season.
summer or low (freezing) temperatures in winter make
cooling water temperatures unstable.
Cooling tower
Compact types that can be installed
under or on top of desks, etc., are
available. Use for physical, chemical,
and analytical equipment, etc.
When... Equipment is to be used in a laboratory or other
small space.
Thermo-chiller
Thermo-cooler
Thermo-con
HRG
HRGC
HRS
HRZD
HRZ
HRW
HEC
Thermoelectric
Chemical
Bath
Thermo-con
HEB
HED
Can be
used not only for
cooling, but also
for heating
applications
(max. 90°C)
P-E10-5B
Chiller
What’s a Chiller?
A Chiller is equipment to control temperature
of customers’ heating sources.
Chillers control fluid, such as water, and circulate the fluid
to customers’ machine using a pump by controlling the
output from a cooling source such as a compressor, or a
heating source such as a heater. That’s why this equipment
can be also called a circulator.
Temperature sensor
Circulating
fluid tank
Circulating fluid pump
Heating source
Customer’s
heating
source
Cooling source
Controller
Chiller (circulator)
e places chillers are
re some of th
used!!
Here a
Application Examples
Laser machining
Cooling of
laser
irradiated
part
UV curing device (printing, painting, bonding and sealing) X-ray (digital) instrument
Cooling of
UV lamp
Temperature control of
X-ray tube and X-ray
light sensing part
X-ray tube
Light sensing part
Electronic microscope
Temperature
control of
electron-beam
irradiated part
Atomizing device (food and cosmetics)
Temperature
control of
sample
and
device
Laser marker
Ultra sonic wave inspection machine
Cooling of laser
irradiated
part
Temperature
control of
ultrasonic wave
laser part
Packaging line (sealing of film and paper package)
Linear motor
Cooling of work pieces for bonding
Temperature control of
moving
coil
Cooling water
Coil
Workpiece
Cooling of die
Temperature control of paint material
Cooling of vacuum pump
Circulating fluid
Vacuum pump
Cooling water
Shrink fitting machine
Cooling of
work pieces
Reagent cooling equipment
Temperature
control of
reagent
Gas cylinder cabinet
Temperature
control inside
cabinet
Cleaning tank
Temperature
control of
cleaning
tank
Concentrating equipment
Temperature
control of
concentration
fluid
Temperature control of chamber electrode
CH1
CH2
1
Dual
Thermo-chiller
HRG, HRGC, HRS, HRZ, HRZD
Three types of cooling and heating methods (refrigerated, water-cooled,
Peltier-type) can be selected for a wide range of applications.
Cooling capacity from 1 kW to 15 kW. For a wide range of applications
1 Refrigerated
Generates low temperatures using a refrigeration cycle.
Refrigeration cycle
Condenser
(Water-cooled)
Expansion valve Evaporator
Lowtemperature
refrigerant
Facility
water
Circulating
fluid
(Air-cooled)
Fan
Thermo-cooler/
Thermo-chiller
Hightemperature
refrigerant gas
Compressor
This equipment cools the circulating fluid by performing heat
exchange with low-temperature refrigerant gas, using a built-in
refrigeration circuit that circulates refrigerant.
Large-scale heat exchange can be handled compared with the
Peltier type.
There are two types of heating sources: high-temperature
refrigerant gas, which is generated from the refrigeration circuit,
and an electric heater.
Both air-cooled and water-cooled types are available, depending
on the condenser’s cooling method.
Economy type HRG
Compact type HRS
Makes cooling water easily available, anytime,
anywhere.
# As a replacement for a cooling tower
Pump capacity: Max. 62 L /min
#
#
Installation close to a wall is possible on both sides.
n
615
V
0
n
tio
ila
50
377
tio
ila
t
en
t
en
V
HRG
Air-cooled
refrigeration
HRG
Installing extra cooling towers
can be troublesome. The HRG
series (air-cooled refrigeration)
can be moved easily to
wherever you need it, when
you need it. Cooling water is
supplied from the attached
hose.
Convenient functions
Self diagnosis function
and check display
Timer operation function
# Low tank level detecting function
# Power failure auto-restart
function
# Anti-freezing operation function
#
With casters (Option)
#
31 types of alarm codes
High-performance type HRZ/HRZD
#
Space-saving
Footprint reduced by 23%
HRZ010
HRZD020
2 units
1 unit
Temperature control of
chamber electrode
HRZ
#
CH1
Dual
Thermo-chiller
0
76
HRZD
CH2
0
87
0.66 m2
0
60
Temperature stability ±0.1°C,
temperature range from −20°C
to +90°C. Full array of features
and equipment.
# A double inverter type is also
available, saving energy more
effectively through use of a DC
inverter compressor and an
inverter pump.
Dual Thermo-chiller, HRZD
series can control temperature for two systems
separately by one chiller.
Energy-saving thanks to
reduced wiring, piping and
labor, and double inverter
type.
0.51 m2
5 0.15 m2
84
reduction
2
Chiller
HRW, HEC
2 Water-cooled
For temperature control in room temperature area Temperature range setting: 20°C to 90°C
Thermo-chiller
Refrigerant-free and energy-saving type using no compressor.
High-performance type HRW
With no compressor, power consumption is drastically reduced.
Reduction in power consumption is even greater with inverter
type: 0.5 kWh/h.
# Suitable for temperature control in room temperature areas not requiring compressor.
# Reduction in facility water volume (1.2 L/min) thanks to direct heat exchange
with circulating fluid.
# Features equivalent to HRZ series.
Energysaving
In-plant cooling water circulation
facility such as cooling tower, etc.
3 Peltier-type
This equipment cools the circulating
fluid by directly exchanging it with
the cooling water in the plant. This
can be used at room temperature or
higher, and also used when there is
a cooling water circulation facility.
Circulating Large-scale heat exchange can be
fluid
performed using less energy, and
the device has a compact body
since a compressor is not required.
An electric heater is used for
heating.
Heat exchanger for cooling
circulating fluid
For high-precision temperature control Temperature stability: ±0.01°C to 0.03°C
Thermo-con
Generates little vibration, and is refrigerant-free and environmentally friendly.
Can control the temperature just in front of the heat source using the external temperature sensor.
High-precision type HEC
Cooling
Heat suction (cooling)
Circulating fluid
Electron
flow
N
P
Electron
hole flow
Facility water
Heat generation (heating)
Current
Air-cooled
DC power supply
Water-cooled
Air-cooled
Heating
Heat generation (heating)
Circulating fluid
Water-cooled
No facility water
equipment
Can install the unit easily
without facility water
equipment.
Need to avoid
effects of ambient
temperature.
Frequent piping
changes
Can reduce the piping
installation labor since
facility water piping is not
required.
Since the unit is
water-cooled, the
ambient temperature
will have little effect.
Want to reduce
installation space.
Can reduce the
space since the unit
is compact.
Heat source
3
P
Electron
hole flow
DC power supply
Facility
water
Fan
Peltier device
N
Facility water
Heat suction (cooling)
Current
Thermo-con
Thermo-con
Electron
flow
Peltier device
A Peltier device is a plate type element,
inside which P-type semiconductors and
N-type semiconductors are located
alternately.
Therefore, changing the direction of the
current supplied to the Peltier device can
achieve heating and cooling operation.
Temperature can be controlled very
precisely because this method has a fast
response and can switch quickly.
Thermoelectric Bath
HEB
Accurately controls the temperature of
liquid in the bath.
Temperature stability: ±0.01°C
Temperature distribution
in the bath: ±0.02°C
Circulating fluid
Peltier device
Water, fluorinated
liquid
GALDEN® FluorinertTM
Applications
• Chemicals for MOCVD
• Diffusion gas
• Various samples,
materials and parts
• Chemicals and liquids
with high viscosity
Controller
Facility water Facility water
outlet inlet
Constant temperature
liquid tank
This equipment precisely controls the temperature of the
fluid in the constant temperature tank.
Customers can control the temperature by placing a
container in the tank.
Application Examples
Semiconductor
Various tests
Physical and chemical analysis
Various chemical processes
Evaporation of chemicals
for MOCVD,
temperature control of
diffusion gas
Thermal test with immersion
Temperature control of
various samples,
materials and parts
Indirect temperature control of
chemicals and liquids
with high viscosity
Chemical Thermo-con
HED
Fluororesin heat exchanger allows direct temperature control for chemicals!!
Industry-leading withstand pressure 0.35 MPa!!
Chemical Thermo-con
Temperature controller
Peltier device (thermo-module)
Type of circulating fluid
• Deionized water
• Hydrofluoric acid
• Ammonia hydrogen
peroxide solution, etc.
Fluororesin heat exchanger
THERMO-CON
AT
SEL
RET
Chemical fluid tank
or chemical bath
POWER
ON
OFF
Pump
Facility water
4
With this chiller, cooling water can be obtained
anywhere it is necessary because of easy
installation and easy operation.
For a wide range of applications such as laser
machine tool, analytical equipment, LCD manufacturing equipment, mold temperature control, etc.
Economy-type chiller
Thermo-cooler
Series HRG
(3-phase power supply)
With this chiller, cooling water can be obtained anywhere it is
necessary because of easy installation and easy operation.
For a wide range of applications such as mold
temperature control, laser machine tool, analytical
equipment, LCD manufacturing equipment, etc.
Ideal for export equipment (single-phase 200 to 230 V)
UL standards, CE marking
Economy-type chiller
Thermo-cooler
Series HRGC
(Single-phase power supply)
®
High-performance chiller/Compact type
Thermo-chiller
Refrigerated
New
High-performance chiller
SEMI
Thermo-chiller
Series HRZ
(Built-in inverter)
SEMI
High-performance chiller
Dual Thermo-chiller
Series HRZD
(Built-in inverter)
SEMI
−30
Air-cooled
refrigeration,
Water-cooled
refrigeration
±0.1°C
5 to 40
L/min
Clear water,
Ethylene glycol
aqueous solution
15 kW
Water-cooled
refrigeration
±0.1°C
6 to 40
L/min
Fluorinated fluid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution
5°C to 40°C
−30
90
witc
h
or/s
o
leak
Hig r
a ge
env h-temp
iron
menerature
t sp
ecs
.
5 kW
90
h-lif
t pu
mp
With
D
With I cont
rol k
w
sen
it
s ater
Clear water,
Deionized water,
Ethylene glycol
aqueous solution
ith h
5 to 62
L/min
e a te
Wit
r
inle h exter
t
nal
swit
Stain
ch
parts less ste
fo
e
For r circu l wetted
pipindeion lating fl
ized
u
g
wat id
er
Hig
±1.0°C/
±0.5°C
brea arth
ker
leak
age
W
Air-cooled
refrigeration,
Water-cooled
refrigeration
85
log
I/O
Dev
ic e N
et ™
With
e
5 kW
5°C to 35°C
Ana
Clear water,
Deionized water,
Ethylene glycol
aqueous solution
RS-4
5 to 62
L/min
32C
±1.0°C
s e ns
Air-cooled
refrigeration,
Water-cooled
refrigeration
RS-2
15 kW
90
Applicable
fluid
−30
−30
90
20°C to 90°C
−20°C to 90°C
New
Temperature for two systems can be controlled
separately by one chiller.
More effective energy-saving is achieved through
use of a DC inverter compressor and an inverter
pump.
Conforming to SEMI standards, CE marking
90
90
10 kW
Water-cooled
refrigeration
±0.1°C
10 to 40
L/min
Fluorinated fluid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution
9.5 kW x 2
Water-cooled
refrigeration
±0.1°C
10 to 40
L/min
Fluorinated fluid,
Ethylene glycol
aqueous solution
30 kW
Water-cooled
Without
compressor
±0.3°C
10 to 30
L/min
Fluorinated fluid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution
600 W
Peltier-type
air-cooled
±0.01°C
1 to 10
L/min
Clear water
1.2 kW
Peltier-type
water-cooled
±0.01°C
3 to 23
L/min
Clear water,
Fluorinated fluid
140 W
Peltier-type
water-cooled
±0.01°C
—
Clear water,
Fluorinated fluid
750 W
Peltier-type
water-cooled
±0.1°C
—
Deionized water,
Chemical
−20°C to 90°C
−30
90
−30°C to 90°C
−30
90
Thermo-chiller
Series HRW (Water-cooled)
®
SEMI
High-performance chiller
Thermo-chiller
Series HRW (Water-cooled)
(Built-in inverter)
Peltier-type
Series HEC
High-precision bath
Thermoelectric Bath
Series HEB
Fluororesin temperature control
system for chemicals
Chemical Thermo-con
Series HED
SEMI
Direct heat exchanger for in-plant circulating fluid
Refrigerant-free
Can control the temperature over a wide range
since a compressor is not required.
Suitable for semiconductor processing equipment
with a wide variety of features such as high
temperature stability, wide temperature range,
failure diagnosis, external communication, etc.
Conforming to UL, SEMI standards, CE marking
20°C to 90°C
−30
90
SEMI
Thermo-con
Bath
−30
Temperature Pump
stability capacity
High-performance chiller
High-performance chiller
Temperature Control
System for Chemicals
Cooling
method
5°C to 35°C
−30
In addition to advanced HRZ series, energy-saving is
achieved through use of a DC inverter compressor.
A single unit covers a wide temperature range
and has a large cooling capacity.
Can respond to change of process conditions
flexibly, which is suitable for semiconductor
equipment with a short innovation cycle.
Conforming to UL, SEMI standards, CE marking
High-performance chiller
®
5
Suitable for semiconductor processing equipment
with a wide variety of features such as high
temperature stability, wide temperature range,
failure diagnosis, external communication, etc.
Conforming to various safety standards
Conforming to UL, SEMI standards, CE marking
Series HRZ
®
Max. cooling
capacity
−20°C to 40°C
Thermo-chiller
®
Water-cooled
Chiller (Circulating Fluid Temperature Controller)
Series HRS
Fits into the space under a laboratory table with a
compact design.
615 H x 377 W x 500 D 40 kg
Available for single-phase 100/115 V, 200 to 230 V
UL standards, CE marking
Temperature range
rol
ON/
OFF
c
ontr
Lear
ol
ning
con
Error
trol
diagn
ostic
functi
Pum
on
p in
vert
Flow
er
Features
mati
c wa
ter s
Circu
upply
lating
fluid
recov
Invert
er-con
ery
trolled
comp
PID
resso
con
r
t
Series
: Standard
: Selectable by model or option
Auto
SMC Temperature Control Equipment Guide
High-precision temperature controller with a Peltier
device suitable for applications that require
high-precision temperature control.
Refrigerant-free
Highly-reliable simple construction
Easy installation in equipment with a compact,
low-vibration body
Compatible with a wide range of power supply voltage
Conforming to UL standards, CE marking
High-precision temperature control bath with a
Peltier device
Refrigerant-free
Compact and low noise
Minimal up-down temperature distribution with a
unique agitation method
Heat exchanger for direct temperature control
with a Peltier device
Refrigerant-free
Compatible with a wide range of chemicals by
use of a fluororesin heat exchanger
Conforming to SEMI standards, CE marking
10°C to 60°C
−30
90
−15°C to 60°C
−30
90
10°C to 60°C
−30
90
Discontinued Discontinuation • HRG/HRGC (1 kW/2 kW) End of March 2011
dates
• HRG/HRGC (5 kW) End of April 2011
Production
Information
Thereafter, please select the HRS series.
6
Temperature Control Equipment
Related Products
Industrial Filter
Circulating Fluid Line
Pressure Switch Relief valve
Valve
Fittings and Tubing
Circulating fluid
outlet
Customer’s
loading
machine
Circulating fluid
return inlet
Y-strainer
Flow Switch
Facility Water Line (water-cooled)
Facility water
outlet
Customer’s
facilities
Facility water
inlet
Pressure Switch
Manage pressure, flow rate, and temperature:
digital display makes these aspects “visible”
Flow Switch
Pressure Switch: Monitors pressure of the circulating fluid and facility water.
2-Color Display
High-Precision Digital Pressure Switch
Refer to Best Pneumatics No. 6 for details.
Pressure Sensor for General Fluid PSE56:
Pressure Sensor Controller PSE200, 300
ISE80
• Stainless diaphragm
• IP65
• VCR®, Swagelok® compatible fittings can be selected.
• Wetted parts: Stainless steel 316L
• IP65
• VCR®, Swagelok® compatible fittings can be selected.
Industrial Filter: Filters the circulating fluid and facility water.
Quick Change Filter
FQ1
• Port size: Rc1/2, 3/4, 1
• Filtration flow rate: Max. 30 L/min
• No tools required
• Takes only 60 seconds for element
Refer to Best Pneumatics No. 7 for details.
Industrial Filter/
Vessel Series FGD
High-Precision Filter
for Fluid FGH
• Port size: Rc3/8, 1/2, 3/4
• Filtration flow rate: Max. 60 L/min
• Port size: Rc3/8 to 1
• Filtration flow rate: Max. 30 L/min
• HEPO element,
Membrane element
replacement.
Flow Switch: Monitors the flow rate and temperature of the circulating fluid and facility water.
Digital Flow Switch for Water
Integrated with
temperature sensor
PF3W
• Set flow rate range
(L/min)
• 0.5 to 4
• 2 to 16
• 5 to 40
• 10 to 100
• Three-color display,
Digital Flow Switch for Deionized Water and Chemicals
4-Channel Flow Monitor PF2:200
• Set flow rate range
two-screen display
• IP65 compliant
• Grease-free
(L/min)
• 0.4 to 4
• 1.8 to 20
• 4.0 to 40
Fittings and Tubing
S Coupler
KK
S Coupler/Stainless Steel (Stainless Steel 304)
KKA
• Port size: 6A to 50A (1/8 to 11/2)
KQG2
• Applicable tube O.D.: ø3.2 to ø16
Tubing
PF2D
• Material
Body sensor: New PFA
Tube: Super PFA
Refer to Best Pneumatics No. 6 for details.
• Applicable tube O.D.: ø3.2 to ø16
• Port size: M5 to 25A (3/4)
Stainless Steel 316 One-touch Fittings
Refer to Best Pneumatics No. 6 for details.
T:
Stainless Steel 316 Insert Fittings
T
TU
TH
TD
TL
KQB2
• Applicable tube O.D.: ø3.2 to ø16
KFG2
• Applicable tube O.D.: ø4 to ø16
Series
Metal One-touch Fittings
Material
Nylon
Polyurethane
FEP (fluoropolymer)
Modified PTFE (soft fluoropolymer)
Super PFA
LQ
• Applicable tube O.D.: ø3 to ø25
Fluoropolymer Fittings
O.D.
ø4 to ø16
ø4 to ø16
ø4 to ø12
ø4 to ø12
ø4 to ø19
Akihabara UDX 15F,
4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN
Phone: 03-5207-8249 Fax: 03-5298-5362
http://www.smcworld.com
© 2011 SMC Corporation All Rights Reserved
Specifications are subject to change without prior notice
and any obligation on the part of the manufacturer.
D-DN
1st printing PP printing PR 12450SZ Printed in Japan.