VACUUM GAUGE MEASUREMENT & CONTROL SYSTEM
W W W . M K S I N S T . C O M
Pressure Measurement
& Control
Type 146C
The MKS Type 146 Cluster Gauge™ is a versatile half-rack vacuum gauge measurement
and control system which powers and provides simultaneous readout for up to four
different vacuum gauges or mass flow controllers. Vacuum gauges supported are:
Baratron® capacitance manometers (four, five, and six decades of measurement), Pirani,
convection, and hot/cold cathode gauges. Two dual-channel features are provided to
automatically switch from one gauge to another allowing continuous pressure display
across the range of both gauges. Gauges can be zeroed and spanned individually, or
cross-calibrated for span and zero. There is an automatic ion gauge power down at high
pressures, and a sensor power down for cryo-pump regeneration. Two alarms and an
analog output are also furnished as standard features.
Features & Benefits
• Provides simultaneous readout for up to
four vacuum gauges (Pirani, convection,
hot and cold cathode gauges,
capacitance manometers) or four mass
flow controllers
• Computer control via RS-232 for ease of
system interfacing
• Cross-reference between gauges
enables a reference sensor to span or
zero another gauge
• Provides pressure readings from
atmosphere down to 10-10 Torr,
eliminating the need for individual
electronics for each sensor
• Leak rate mode for checking system
leaks and quantifying system leak size
• Closed-loop pressure control option for
use with MKS valves eliminates the need
for separate pressure control electronics
• Two dual-channel displays switch
automatically from one gauge to another
to provide continuous readout
• Two alarm relays are included in the
base unit
• CE Compliant when used with CE
compatible sensors and cables
Additional two alarm relays and two analog outputs are
available with an optional auxiliary output board. The
optional alarm relays can be configured as normally
actuated or de-actuated, and can be assigned to any of
the four sensor channels. The optional analog outputs
can be programmed as linearly scaled, logarithmically
scaled, or as set points, and, like the relays, can be
assigned to any of the four sensor channels.
Commands are activated through the front panel or via an
RS-232C interface, and all entry parameters are stored in
nonvolatile memory in case of power loss. A "displayless"
version of the Type 146 is also available as an option.
The 146 has the versatility to be re-configured as your
needs change. With the reassignment of channels and
the addition of cards, the Type 146 affords the flexibility
needed for future upgrades.
A leak rate mode is provided to measure the pressure
change over a user-defined time period, between an
initial pressure and a current pressure reading.
With the installation of a valve drive card, fast and
accurate closed-loop digital PID pressure control is
obtained with an MKS gas proportioning valve or
exhaust throttle valve. Alternately, upstream pressure
control can be accomplished with a mass flow controller
and an MFC card operating in ratio mode.
Channel 1 Display
Channel 2 Display
Channel 3 Display
Alarms
Trend Indicator
Main Display/Channel 4 Display
Type 146 Full LCD Display—
Upon power up, the Type 146 proceeds with its normal initialization and
provides a full LCD test display in the front panel window, as shown
above. When initialization is complete, the 146 defaults to Normal Mode
operation.
Pressure Control
and
Diagnostic Information
Specifications
Display
Backlit LCD, one channel with 4½ place readout plus exponent and three channels with 2½
place readout plus exponent
Optional displayless version
Compatible Sensors/Transducers*
MKS Baratron® Types 120, 122, 124, 127, 128, 220, 221, 223, 622, 623, 624, 625,
626, 627, 628, 722, or any capacitance manometer providing 0 to 10 VDC output
MKS' Vacuum Products Group Pirani sensors
MKS' Vacuum Products Group and Granville-Phillips convection/Pirani sensors
MKS' Vacuum Products Group cold cathode ionization sensors
Hot cathode ionization sensors (nude and glass envelope Bayard-Alpert types)
MKS Mass-Flo® mass flow controller Types 1179, 1559, 1679, or any MFC requiring
±15 VDC power and 0 to 5 VDC set point
Pressure Measurement Range
1000 Torr to 10-10 Torr (Dependent upon sensor type.)
Outputs
Digital
Analog
Standard
Optional
One 0 to 10 VDC on any channel; linear or log; may be assigned to dual channel
Two additional 0 to 10 VDC on any channel; linear or log
Relays
Standard
Optional
Two alarm relays (1 Amp @ 30 VDC) on any channel
Two additional alarm relays (2 Amps @ 120 VAC) on any channel
Output Power
±15 VDC @ 2 Amps (max.)
Input Power
90 to 135 VAC or 200 to 270 VAC, 50/60 Hz, user-selectable
Optional Closed-Loop
Pressure Control
PID pressure control via either upstream using an MKS Type 148, 154, or 248
Proportioning Valve, or downstream using an MKS Type 153 Exhaust Throttle Valve in
sizes from 20 mm to 100 mm
CE Mark Compliance
Certain configurations are compliant to EMC Directive 89/336/EEC (when used with an
overall metal braided shielded cable properly grounded at both ends) and the Low Voltage
Directive 72/23/EEC. Consult Applications Engineering at 800-227-8766 for configurations
which are Fully CE Compliant.
Size
Half-rack cabinet: 9.45" W × 3.47" H × 12.59" D (240.0 mm × 88.1 mm × 319.8 mm)
RS-232C
*Note: For more information on the MKS products listed above, contact Applications Engineering at (800) 227-8766 for a product data sheet, or
download literature from the MKS web site at http://www.mksinst.com.
Ordering Information
Ordering Code Example: 146CAAAOM1
Type 146C Cluster Gauge Vacuum Gauge Measurement & Control System
Code
Type Number
146C
Channel and Function Cards (choice of up to 5 cards)
Channel:
Capacitance Manometer
A
Dual Pirani/Convecton Gauge
B
Cold Cathode Gauge
C
Hot Cathode Gauge
D
Dual Thermocouple Gauge
E
Mass Flow Controller
F
Function:
Control (occupies slot 5 only)
M
Optional Outputs (2 analog and 2 relays)
N
No Card (card slot covered)
O
8.00
(203.2)
Display
Standard: LCD readout
Optional: No display
1
2
Configuration
146C
AAAOM
1
Notes:
0.50
(12.7)
12.09 (307.1)
3.38
(85.7)
3.47
(88.1)
9.45 (240.0)
8.80 (223.5)
TYPE 146
VACUUM GAUGE MEASUREMENT AND CONTROL SYSTEM
ALARMS
CHANNELS
A
1
B
2
C
3
4
D
POWER
ON
OFF
1
2
1
+/-
3
4
2
3
ZERO
SPAN
EXP
5
4
DEGAS
SET
POINT
6
7
8
9
A
DUAL
ON
OFF
QUIET
LEAD
GAIN
CANCEL
B
0
C
DISPLAY
MODE
CONTROL
MODE
ALARMS
CHANNELS
TUNING
TUNING
D
ENTER
8.25 (209.6)
2.
All unused card slots must be specified as Code 0 (No Card) within the ordering code.
3.
There may be up to four measurement channels per instrument.
4.
There can be only one control card per instrument.
5.
There can be only one optional output card per instrument.
6.
There can be only one hot cathode card per instrument.
7.
Channel cards should be installed in lower number slots; function cards should be installed
in higher number slots. The ordering code establishes the order in which the cards will be
installed.
8.
For CE compliance, use CE compliant shielded cables and sensors. Glass tube hot
cathode gauges cannot be made CE compliant.
115V
9
6
5
Channel numbers are determined by sequence of channel card slots (For example, a
single channel card in slot 1 becomes channel 1; if a dual channel card is added to slot 2,
it becomes both channels 2 and 3. Dual channel cards may be changed to a single
channel by moving a jumper.)
0.38 (9.7)
4 PLACES
RS232
1
0.25 (6.4)
4 PLACES
1.
230V .63ASB
115V 1.25ASB
FUSES
13
1
14
25
Dimensional Drawing —
Note: Unless otherwise specified,
dimensions are nominal values in inches
(mm referenced).
Global Headquarters
90 Industrial Way
Wilmington, MA 01887-4610
Tel: 978.284.4000
Tel: 800.227.8766 within U.S. only
Web: www.mksinst.com
Bulletin 146C-6/04
© 2004 MKS Instruments, Inc.
All rights reserved.
Specifications are subject to change without notice.
Baratron® and Mass-Flo® are registered trademarks of MKS Instruments, Inc., Wilmington, MA.
Cluster Gauge™ is a trademark of MKS Instruments, Inc., Wilmington, MA.