Ultra Large & Broadband Silicon Capacitors for Optical Communication Systems UBSC 60 GHz+ / ULSC 20 GHz UBEC 60 GHz+ / ULEC 20 GHz UWSC 26 GHz IPDiA Ultra Broadband Silicon Capacitors – Introduction IPDiA Ultra Broadband Silicon Capacitors for Optical communication applications UBB Series Introduction IPDiA Ultra Broadband product line targets optical communication systems (ROSA/TOSA, SONET and all optoelectronics) as well as high speed data systems or products. UBB products are designed for DC blocking, feedback, coupling and bypass grounding applications. The unique technology of integrated passive devices in silicon developed by IPDiA, offers low insertion loss, low reflection and high phase stability from 16 kHz up to 60+ GHz for the UBSC/UBEC and up to 20+ GHz for the ULSC/ULEC, and high rejection higher than 26GHz for the UWSC according to capacitance value. These deep trench silicon capacitors have been developed with a semiconductor MOS process. All UBB products are RoHS-compliant and lead-free. Fig. 1: Cross section of IPDiA Capacitor Key Parameters The purity of the oxide cured at a temperature of 900°C during the manufacturing process plays a major role on the Ultra Broadband Si Cap characteristics and leads to superior: • Repeatability • Reliability • Stability over temperature • Stability over DC voltage • Limited ageing • Insulation resistance Moreover, the Silicon substrate brings lower dielectric absorption and low to zero piezo effect . For example: our UBSC 100 nF/0402 SiCap is made of 270 elementary cells of 370 pF distributed over the chip, combined with a 25pF Metal Insulator Metal (MIM) capacitor in parallel to maintain a flat broadband frequency response. our UWSC 10 nF/0303 SiCap combines ultra-deep trench MOS capacitors for high capacitance value of 10 nF (35 elementary cells of 280 pF distributed over the chip), combined with a single layer MOS capacitors for low capacitance value of 100 pF, both in a 0303 package size, to maintain a flat broadband frequency response. All these features in the TIME DOMAIN: In the FREQUENCY DOMAIN: • Minimize the rise and fall times • Maximize the eye opening • Neutralize the jitter • Ensure a flat frequency response with no resonance or phase discontinuity • Minimize the attenuation • Minimize the reflection Eye Diagram Analysis and Comparison between a ‘Through’ and a Silicon Broadband Fig. 3: Fourier series Fig. 2: Typical Set up for Eye Pattern Measurements No signal degradation ! Fig. 4: UBSC SiCap eye diagram Rev. 1.0 2 IPDiA Ultra Broadband Silicon Capacitors – Introduction Fig. 5: Capacitance variation versus operating temperature (for UBSC and MLCC technologies) Fig. 6: Capacitance variation versus DC biasing (for UBSC and MLCC technologies) Fig. 7: Projected capacitor failure rate in 10 years at 85°C and 50% of the rating voltage (depending on UBSC, tantalum and MLCC technology) Rev. 1.0 3 IPDiA Ultra Broadband Silicon Capacitors – Introduction The UBB product line is composed of 3 series: - UBSC/ULSC – 60+GHz Ultra Broadband Silicon Capacitors – Surface Mounted - UBEC/ULEC – 60+GHz Ultra Broadband Embedding silicon Capacitor – Wire Bondable - UWSC – Ultra large-band Wire bonding Silicon Capacitor – Wire Bondable Vertical UBSC/ULSC Key Features UBEC/ULEC Key Features Ultra broadband performance up to 60 GHz Low insertion with a flat frequency response Resonance free Excellent return loss No phase discontinuity Ultra high stability of capacitance value: Ultra broadband performance up to 60 GHz High rejection Low ESR and ESL Ultra high stability of capacitance value: - Temperature <0±24 ppm/°C (-55°C to +150°C) - DC voltage < 0.1 %/V (From 0 V to RVDC - Negligible aging < 0.001 %/1000 hours - Temperature <0±24 ppm/°C (-55°C to +150°C) - DC voltage < 0.1 %/V (From 0 V to RVDC ) - Negligible aging < 0.001 %/1000 hours - Capacitance value stable even at 16 kHz ) Compatible with standard wire bonding assembly (ball and wedge) Suitable for lead free reflow-soldering UWSC Key Features Ultra large-band performance High rejection Ultra low ESR and ESL Ultra high stability of capacitance value: - Temperature <0±24 ppm/°C (-55°C to +150°C) - DC voltage < 0.02 %/V (From 0V to RVDC - Negligible aging < 0.001 %/1000 hours ) Compatible with standard wire bonding assembly (ball and wedge) Key Applications General Key Features Optoelectronics/high-speed data. Trans-Impedance Amplifiers (TIA). Receive-and-transmit optical subassembly (ROSA/TOSA). Synchronous optical networking (SONET). High speed digital logic. Broadband test equipment. Broadband microwave/millimeter wave. Replacement of X7R and NP0. Downsizing. Low profile application: 400 µm for UBSC/ ULSC, 250 µm for UBEC/ULEC/UWSC or 100 µm on request. Lower dielectric absorption (0.1%) compared with NP0/X7R. No AC distortion due to low-to zero piezo effect. High reliability (FIT < 0.017 parts/billion hours) exceeding X7R ceramics by a factor of 10. Rev. 1.0 4 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted UBSC 60 GHz + / ULSC 20 GHz - General Description UBSC/ULSC Capacitor targets Optical communication system such as ROSA/TOSA, SONET and all optoelectronics as well as High speed data system or products. The UBSC/ULSC is suitable for DC blocking, feedback, coupling and bypassing applications in all broadband optoelectronics and High speed data systems. The unique technology of integrated passive device in silicon, developed by IPDiA, offers unique performances with low insertion loss, low reflection and phase stability from 16 kHz to 60+ GHz for the UBSC and to 20 GHz for the ULSC. These capacitors in ultra-deep trenches in silicon have been developed in a semiconductor process, in order to integrate trench MOS capacitors providing a high capacitance value of 100 nF in a SMT 0402. The UBSC capacitor provides very high stability of the capacitance over temperature, voltage variation as well as a very high reliability. UBSC capacitors have an extended operating temperature ranging from -55°C to 150°C, with very low capacitance change over temperature (+/- 0.5%). Standard form factor are 0201, 0402 & 0603 with values range covers from 10 nF to 100 nF. Assembly: Please refer to our assembly recommendations p. 13. Pad finishing: nickel/gold electroless (ENIG). Other types of finishing are available on request (Aluminum, thin copper, lead-free nickel solder coating such as SAC305 or thin gold). For any custom capacitance values and other package sizes please feel free to contact us. 1 Ultra-deep trench MOS capacitors 2 for high capacitance Single layer MOS capacitors for low capacitance Fig. 8: UBSC/ULSC capacitor soldered on board Fig. 9: UBSC/ULSC capacitor block diagram (2 connections) UBSC 60 GHz + / ULSC 20 GHz - Standard Electrical Performances In accordance with the Absolute Maximum Rating System (IEC 60134) Symbol Parameter Conditions Min. Typ. Max. Unit CP Capacitance tolerance -15 - TOP Operating temperature -55 20 150 °C TSTG Storage temperature -70 - 165 °C CT Capacitance temperature variation -55 °C to 150 °C -24 0 +24 ppm/°C CRVDC Capacitance voltage variation From 0 V to RVDC - - 0.1 %/VDC (**) - - kV 10 - GΩ ESDHBM ESD testing > 2kV HBM stresses IR Insulation resistor GQS, SNW-FQ- 302A 2 - (*) +15 % Table 1: UBSC/ULSC standard electrical performances (*) Other capacitance tolerances upon request (**) for capacitance value, higher than 47 pF Rev. 1.0 5 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted 100 nF – 0402 – BV11 UBSC capacitor Fig. 10: S21 phase vs. DC voltage (frequency response in transmission mode) Fig. 11: S21 module vs. DC voltage (frequency response in transmission mode) Fig. 12: S21 module vs. Temp. (frequency response in transmission mode) Fig. 13: Insertion loss variation @ 16kHz for SiCap & X5R MLCC (100 nF nom. capacitance value, 85°C, 3 VDC & 1.5 Vrms) UBSC 60 GHz + / ULSC 20 GHz - Specific Electrical Performances (Typical value) P/N Min break down voltage (V) 935 151 423 510 11 935 151 723 510 30 935 151 424 610 11 935 155 425 610 11 Nom. Rated voltage (VDC) 3.6(**) 5(***) 10(**) 13.6(***) 3.6(**) 5(***) 3.6(**) 5(***) IL (dB) IL (dB) IL (dB) @ 20 GHz @ 40 GHz @ 60 GHz 0201 0.4 0.3 1 14 10 0201 0.2 0.3 0.8 15 100 0402 0.2 0.2 0.7 18 100 0603 0.4 / / 15 Capacitance value (nF) Case size 10 RL (dB) Table 2: UBSC/ULSC specific electrical performances (**) 60 years of intrinsic life time predictions with nominal dielectric thickness at 100°C (***) 10 years of intrinsic life time predictions at 100°C Rev. 1.0 6 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted UBSC 60 GHz + / ULSC 20 GHz - Frequency Response(*) 100 nF – 0402 – BV11 UBSC capacitor UBSC424.610 50Ω 50Ω Fig. 14: 100 nF/0402/BV11— P/N: 935 151 424 610 frequency response in transmission mode (red curve: gain & blue curve: return loss) 10 nF – 0201 – BV11 UBSC capacitor UBSC423.510 50Ω 50Ω Fig. 15: 10 nF/0201/BV11— P/N: 935 151 423 510 frequency response in transmission mode (red curve: gain & blue curve: return loss) Rev. 1.0 7 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted 10 nF – 0201 – BV30 UBSC capacitor UBSC723.510 50Ω 50Ω Fig. 16: 10 nF/0201/BV30— P/N: 935 151 723 510 frequency response in transmission mode (red curve: gain & blue curve: return loss) 100 nF – 0603 – BV11 ULSC capacitor ULSC425.610 50Ω 50Ω Fig. 17: 100 nF/0603/BV11— P/N: 935 155 425 610 frequency response in transmission mode (red curve: gain & blue curve: return loss) (*) The measurement results are only valid for the described test set up. Other configurations will lead to different results. UBSC/0402 datasheet test condition description: IPDiA testing to 60+ GHz performed on 10-mils Rogers 4350B. Nominal Pad dimensions – pad length = 0.476 mm, pad width and line width = 0.551mm, pad gap = 0.246 mm (nominal 50 ohm characteristic impedance). UBSC/0201 datasheet test condition description: IPDiA testing to 60+ GHz performed on 6.6-mils Rogers 4350B. Nominal Pad dimensions – pad length = 0.150 mm, pad width and line width = 0.400mm, pad gap = 0.300 mm (nominal 50 ohm characteristic impedance). ULSC/0603 datasheet test condition description: IPDIA testing to 20 GHz performed on 10-mils Rogers 4350B. Nominal Pad dimensions – pad length = 0.50 mm, pad width = 0.90 mm, pad gap = 0.80 mm. FREE S-Parameters-Based Linear Simulation Models for ADS: http://www.modelithics.com/mvpIpdia.asp Rev. 1.0 8 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted UBSC 60 GHz + / ULSC 20 GHz - Component Dimensions ( µm ) C0201M C0201 C0402 C0603 C0805 C1206 C1812 IPD pad dimensions a b c 100 150 200 150 400 300 300 500 400 400 900 800 500 1 200 1 000 600 1 600 2 000 900 3 400 2 700 L 600 800 1 200 1 800 2 200 3 400 4 700 IPD size W T 300 600 400 700 (standard 1 100 profile) or 1 400 100 (low profile) 1 800 3 600 W L c a T b Table 3: UBSC/ULSC component dimensions For landing pad dimensions on your PCB layout, please refer to the assembly chapter. Package Outline and Orientation Mark The UBSC/ULSC capacitor is delivered as a bare die, with opening for contacts. Die name Fig. 18: Microphotograph of a 100 nF/0402 UBSC capacitor UBSC 60 GHz + / ULSC 20 GHz - Capacitance Range Available parts For other values, contact your IPDiA sales representative Rev. 1.0 9 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted UBSC 60 GHz + / ULSC 20 GHz - Global Part Number Information Example of a 100 nF – 0402 UBSC capacitor delivered in a 1000 unit Tape and Reel 935.151.4.2.4.6.10-T3N T BV S Type / Thickness 935.151 = UBSC thickness 400 µm 935.152 = UBSC thickness 100 µm 935.155 = ULSC thickness 400 µm 935.156 = ULSC thickness 100 µm Breakdown Voltage 4 = 11 V 7 = 30 V Size 2 = 1005 3 = 0201 4 = 0402 5 = 0603 6 = 0805 7 = 1206 9 = 1812 . . U . 0 = 10f 1 = 0.1p 2 = 1p 3 = 10p 4 = 0.1n Unit 5 = 1n 6 = 10n 7 = 0.1µ 8 = 1µ 9 = 10µ XX . PK / F Value 10 15 22 33 47 68 - Packing / Finishing W0: 2" x 2" waffle pack F1: 6” film frame carrier T3: T&R 1 000 units T4: T&R 10 000 units T5: T&R 5 000 units Finishing N: ENIG (Ni/Au electroless) S: SAC305 bump UBSC 60 GHz + / ULSC 20 GHz - Available Parts Case Size S2P files 935 151 423 510 Surface mount Ultra Broad Band Silicon Capacitor, from -55 to 150°C, 60+GHz with ENIG termination Ultra Broadband Si Cap 10 nF 60+ GHz 400 µm, BV>11 V 400 µm C0201 Yes(*) 935 152 423 510 Ultra Broadband Si Cap 10 nF 60+ GHz 100 µm, BV>11 V 100 µm C0201 Yes(*) 935 151 723 510 Ultra Broadband Si Cap 10 nF 60+ GHz 400 µm, BV>30 V 400 µm C0201 Yes(*) 935 152 723 510 Ultra Broadband Si Cap 10 nF 60+ GHz 100 µm, BV>30 V 100 µm C0201 Yes(*) 935 151 424 610 935 152 424 610 Ultra Broadband Si Cap 100 nF 60+ GHz 400 µm, BV>11 V 400 µm Ultra Broadband Si Cap 100 nF 60+ GHz 100 µm, BV>11 V 100 µm C0402 C0402 Yes(*) Yes(*) Case Size S2P files 935 155 424 610 Surface mount Ultra Large Band Silicon Capacitor, from -55 to 150°C, 20 GHz with ENIG termination Ultra Large band Si Cap 100 nF 20 GHz 400 µm, BV>11 V 400 µm C0402 Yes(*) 935 156 424 610 Ultra Large band Si Cap 100 nF 20 GHz 100 µm, BV>11 V 100 µm C0402 Yes(*) 935 155 425 610 935 156 425 610 Ultra Large band Si Cap 100 nF 20 GHz 400 µm, BV>11 V 400 µm Ultra Large band Si Cap 100 nF 20 GHz 100 µm, BV>11 V 100 µm C0603 C0603 Yes(*) Yes(*) Part number UBSC.xxx Part number ULSC.xxx Product description Product description Thickness Thickness Table 4: UBSC/ULSC part numbers (*) FREE S-Parameters-Based Linear Simulation Models for ADS: http://www.modelithics.com/mvpIpdia.asp. Rev. 1.0 10 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted UBSC 60 GHz + / ULSC 20 GHz - Packing Format Tape and Reel format definition: Case size (Thickness) C0201M (100 µm) C0201 (100 µm) C0201 (400 µm) C0402 (100 µm) C0402 (400 µm) C0603 (100 µm) C0603 (400 µm) Ao Bo Ko Carrier Tape width TBD - - - 8 mm 2 mm 7” 1 000 - 0.793 mm 0.959 mm 0.26 mm 8 mm 4 mm 7” 1 000 BD0050 x 0100 0.65 mm 1.14 mm 0.56 mm 8 mm 4 mm 7” 1 000 LO-691 0.9 mm 1.31 mm 0.33 mm 8 mm 4 mm 7” 1 000 AAB012-A 0.79 mm 1.31 mm 0.5 mm 8 mm 4 mm 7” 1 000 LO-534 1.23 mm 2.19 mm 0.44 mm 8 mm 4 mm 7” 1 000 BDO 100 x 170 1.3 mm 2.0 mm 0.64 mm 8 mm 4 mm 7” 1 000 Cavity dimensions Tape Ref Carrier Tape pitch Reel size Qty per reel Table 5: Tape & Reel references Width Pitch Fig. 19: Tape & Reel dimensions Tape Width 8 mm A Diameter 178 mm +/- 1.0 Fig. 20: Die orientation (flip) within the carrier (Pocket) related to tape and reel orientation C 13.5 mm ± 0.5 D (min) 20.2 mm N Hub 60 mm + 0.1 -0.0 W1 93 mm ± 0.5 W2 (max) 11.5 Table 6: Reel references used for tape width 8 mm Fig. 21: Reel references and dimensions used for tape width 8 mm Rev. 1.0 11 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted Film frame carrier format definition: Ref. FF070 (Perfection products) Wafer diameter Frame type Inside diameter (A) 7.639” (***) 6.0” (150 mm) Type A Outside diameter (B) 8.976” Width (C) 8.346” Thickness (D) Pin location (E) Pin location (F) Frame style Weight (lbs) (stainless) 0.048 2.370” 2.500” DTF-2-6-1 0.21 Table 7: Details of film frame carrier (***) other size and type on request. Like FF108 and F123 frame type A respectively for 8” and 12” wafer diameter. Fig. 22: Dimensions of film frame carrier Waffle pack format definition: (Entegris product) Pocket details Case size (thickness) Waffle Ref C0201M TBD C0201 TBD C0402 (400 µm) C0603 (400 µm) H20-052040 -66C02 H20-055078 -66C02 X ±0.05 mm Y ±0.05 mm Z ±0.05 mm A ±0.5° 1.32 1.02 0.61 7° 1.02 5° 1.40 8a: Details 1.98 Table of waffle pack Max Qty / waffle 20 x 20 (400) 15 x 15 (195) Overall tray size Size Height Flatness 50.8 mm ±0.10 mm 3.96 mm +0.05 -0.08 0.1 mm Table 8b: Details of waffle pack Fig. 22: Dimensions of waffle pack The die orientation (flipped) within the pocket is related to the waffle pack orientation. Rev. 1.0 12 IPDiA Capacitors – UBSC/ULSC Series - Surface Mounted Assembly by Soldering The attachment techniques recommended by IPDiA for the UBSC/ULSC capacitors on the customers substrates are fully detailed in specific documents available on our website. To assure the correct use and proper functioning of IPDiA capacitors please download the assembly instructions on www.ipdia.com/assembly and read them carefully. For UBSC/ULSC assembly instructions @ 100 µm, please go to ww w. i p d i a .c om /as s em b l y a n d download the pdf file called ‘UBSC/ ULSC 100 µm Capacitors Assembly by Soldering’ For UBSC/ULSC assembly instructions @ 400 µm, please go to ww w. i p d i a .c om /as s em b l y a n d download the pdf file called ‘UBSC/ ULSC 400 µm Capacitors Assembly by Soldering’ Rev. 1.0 13 IPDiA Capacitors – UBEC/ULEC Series - Wire Bondable UBEC 60 GHz + / ULEC 20 GHz - General Description UBEC / ULEC Capacitor targets Optical communication systems such as ROSA/TOSA, SONET and all optoelectronics as well as High speed data systems or products. The UBEC / ULEC is suitable for DC blocking, feedback, coupling and bypassing applications in all broadband optoelectronics and High speed data systems. The unique technology of integrated passive devices in silicon, developed by IPDiA, offers unique performances with low insertion loss, low reflection and phase stability from 16 kHz to 60+ GHz for the UBEC and to 20 GHz for the ULEC. These capacitors in ultra-deep trenches in silicon have been developed in a semiconductor process, in order to integrate trench MOS capacitors providing a high capacitance value of 100 nF in a SMT 0404. The UBEC/ULEC capacitor provides very high stability of the capacitance over temperature, voltage variation as well as very high reliability. UBEC/ULEC capacitors have an extended operating temperature ranging from -55°C to 150°C, with very low capacitance change over temperature (0+/- 24 ppm/°C). Assembly: Please refer to our assembly recommendations p. 20. Pad finishing: 3 µm Aluminum (Al/Si/Cu: 98.96%/1%/0.04%), other types of top finishing are available on request such as Ti (0.2 µm) / Cu (3.4 µm) / Ni (3 µm) / Au (1.5 µm) for wire bonding. Other types of finishing are available on request such as thin copper for embedding, electroless nickel/gold (ENIG) for flipchipping compatible with lead free reflow soldering process. For any custom capacitance values and other package sizes please feel free to contact us. 1 Ultra-deep trench MOS capacitors for high capacitance 2 Single layer MOS capacitors for low capacitance Fig. 25: UBEC/ULEC capacitor block diagram (2 connections) Fig. 24: UBEC/ULEC capacitor soldered on board UBEC 60 GHz + / ULEC 20 GHz - Standard Electrical Performances In accordance with the Absolute Maximum Rating System (IEC 60134) Symbol Parameter Conditions Min. Typ. Max. Unit CP Capacitance tolerance -15 - TOP Operating temperature -55 20 150 °C TSTG Storage temperature -70 - 165 °C CT Capacitance temperature variation -24 0 +24 ppm/◦C CRVDC Capacitance voltage variation - - 0.1 %/VDC ESDHBM ESD testing > 2kV HBM stresses 2(**) - - kV IR Insulation resistor - 10 - GΩ -55 °C to 150 °C From 0 V to RVDC GQS, SNW-FQ302A (*) +15 % Table 9: UBEC/ULEC standard electrical performances (*) Other capacitance tolerances upon request (**) for capacitance value, higher than 47 pF Rev. 1.0 14 IPDiA Capacitors – UBEC/ULEC Series - Wire Bondable UBEC 60 GHz + / ULEC 20 GHz - Specific Electrical Performances (Typical value) P/N Min break down voltage (V) Nom. Rated voltage (VDC) Capacitance value (nF) Case size ESL (pH) @SRF ESR (mohms) @SRF 935 157 42F 610 11 3.6(**) 5(***) 100 E0404 50 200 Table 10: UBEC/ULEC specific electrical performances (**) 60 years of intrinsic life time predictions with nominal dielectric thickness at 100°C. (***) 10 years of intrinsic life time predictions at 100°C UBEC 60 GHz + / ULEC 20 GHz - Frequency Response(*) 100nF – 0404– BV11 ULEC capacitor ULEC42F.610 50Ω 50Ω Fig. 26: 100nF/0404/BV11— P/N: 935 158 42F 610 frequency response in transmission mode (red curve: gain & blue curve: return loss) Fig. 27: 100nF/0404/BV11— P/N: 935 158 42F 610 frequency response of impedance in transmission mode (*) The measurement results are only valid for the described test set-up. Other configurations will lead to different results. ULEC/0404 datasheet test condition description (flip-chipped assembly mode): IPDiA testing to 20 GHz performed on 25-mils ceramic substrate (εr=9.9) used in coplanar mode. Nominal Pad dimensions – pad length = 0.152 mm, pad width= 0.892 mm and line width = 0.085mm, pad gap = 0.548 mm (nominal 50 ohm characteristic impedance). Rev. 1.0 15 IPDiA Capacitors – UBEC/ULEC Series - Wire Bondable UBEC 60 GHz + / ULEC 20 GHz - Component Dimensions Case size (typ. ±0.01mm) Pad dimension (mm) d or a/b E0201M(*) 0.1 / 0.15 S L W 0.2 0.6 0.3 E0202 0.15 0.15 0.62 0.62 E0302 0.15 0.42 / 0.15 0.89 0.62 E0404 0.15 0.57 1.06 1.06 E0505 0.15 0.81 1.29 1.29 T 0.10 (low profile) W W L L s s a T d T b For landing pad dimensions on your PCB layout, please refer to the assembly chapter. Package Outline and Orientation Mark The UBEC / ULEC capacitor is delivered as a bare die, with opening for contacts. Die name Fig 28: Microphotograph of a 100 nF/0404 UBEC capacitor UBEC 60 GHz + / ULEC 20 GHz - Capacitance Range Available parts—For other values, contact your IPDiA sales representative Rev. 1.0 16 IPDiA Capacitors – UBEC/ULEC Series - Wire Bondable UBEC 60 GHz + / ULEC 20 GHz - Global Part Number Information Example of a 100 nF – 0404 capacitor delivered in a 1000 unit Tape and Reel 935.157.4.2.F.6.10-T3A T BV Type 935.157 = UBEC thickness 100 µm 935.158 = ULEC thickness 100 µm Breakdown voltage 4 = 11 V 7 = 30 V . S U Size . C = 0202 I = 0302 F = 0404 H = 0505 S =1208 V =1216 V = 1612 Y = 1616 X =2016 . 0 = 10f 1 = 0.1p 2 = 1p 3 = 10p 4 = 0.1n Unit 5 = 1n 6 = 10n 7 = 0.1µ 8 = 1µ 9 = 10µ XX . Value 10 15 22 33 47 68 PK / F - Packing W0: 2" x 2" waffle pack F1: 6” film frame carrier T3: T&R 1 000 units T4: T&R 10 000 units T5: T&R 5 000 units Finishing A: 3 µm Al (Al/Si/Cu: 98.96%/1%/0;.04%) O: electroplated TiCuNiAu (Ti:0.2 µm; Cu:3.4 µm; Ni :3 µm; Au:1.5 µm) UBEC 60 GHz + / ULEC 20 GHz - Available Parts Part number UBEC.xxx 935 157 42F 610 Part number ULEC.xxx 935 158 42F 610 Product description Thickness Case Size S2P files 100 µm E0404 Yes(*) Thickness Case Size S2P files 100 µm E0404 Yes(*) Ultra Broadband Embedding/wire bonding Si Cap, from -55°C to 150°C, 60 GHz with Alu termination Ultra Broadband Embedding/wire bonding Si Cap 100 nF, 60 GHz, BV>11 V Product description Ultra Large band Embedding/Wire bonding Si Cap, from -55°C to 150°C, 20 GHz with Alu termination Ultra Large band Embedding/wire bonding Si Cap 100 nF, 20 GHz, BV>11 V Table 11: UBEC/ULEC part numbers (*) FREE S-Parameters-Based Linear Simulation Models for ADS: http://www.modelithics.com/mvpIpdia.asp. Rev. 1.0 17 IPDiA Capacitors – UBEC/ULEC Series - Wire Bondable UBEC 60 GHz + / ULEC 20 GHz - Packing Format Tape and Reel format definition: Carrier Tape width Carrier Tape pitch Reel size Qty per reel tbd 8 mm 4 mm 7” 1 000 E0202 tbd 8 mm 4 mm 7” 1 000 E0404 BDO120X120 1.20 1.20 0.47 8 mm 4 mm 7” 1 000 E0505 LO-560 1.48 1.58 0.31 8 mm 4 mm 7” 1 000 Case size Tape Ref E0201M Cavity dimensions Ao Bo Ko Table 12: Tape & Reel references Width Pitch Fig. 29: Tape & Reel dimensions Fig. 30: Die orientation (No flip) within the carrier (Pocket) related to tape and reel orientation Tape width 8 mm A Diameter 178 mm +/- 1.0 C 13.5 mm ± 0.5 D (min) 20.2 mm N Hub 60 mm + 0.1 -0.0 W1 93 mm ± 0.5 W2 (max) 11.5 Table 13: Reel references used for tape width 8 mm Fig. 31: Reel references and dimensions used for tape width 8 mm Rev. 1.0 18 IPDiA Capacitors – UBEC/ULEC Series - Wire Bondable Film frame carrier format definition: Ref: FF070 (Perfection products) Wafer diameter Frame type (***) 6.0” (150 mm) Thickness (D) 0.048 Type A Pin location (E) 2.370” Inside diameter (A) 7.639” Pin location (F) 2.500” Outside diameter (B) 8.976” Frame style DTF-2-6-1 Width (C) 8.346” Weight (lbs) (stainless) 0.21 Table 14: Details of film frame carrier (***) other size and type on request. Like FF108 and F123 frame type A respectively for 8” and 12” wafer diameter. Fig. 32: Dimension of film frame carrier Waffle pack format definition: (Entegris product) Pocket details Case size Waffle Ref E0201M tbd E0202 E0404 E0505 H20-032-1566C02 H20-047-2066CO2 H20-N126706 -66C02 X ±0.05 mm Y ±0.05 mm Z ±0.05 mm A ±0.5° 0.81 0.81 0.38 5° 1.19 1.19 0.51 0° 1.85 1.45 0.36 7° Max Qty per waffle 20 x 20 (400) 20 x 20 (400) 16 x 19 (304) Table 15a: Details of waffle pack Overall tray size Size Height Flatness 50.8 mm ±0.10 mm 3.96 mm +0.05 -0.08 0.1 mm Table 15b: Details of waffle pack Fig. 33: Dimensions of waffle pack The die orientation (no flip) within the pocket is related to the waffle pack orientation. Rev. 1.0 19 IPDiA Capacitors – UBEC/ULEC Series - Wire Bondable Assembly by Wirebonding The attachment techniques recommended by IPDiA for the UBEC/ULEC capacitors on the customers substrates are fully detailed in specific documents available on our website. To assure the correct use and proper functioning of IPDiA capacitors please download the assembly instructions on www.ipdia.com/assembly and read them carefully. For UBEC assembly instructions, please go to: ww w. i p d i a .c om /as s em b l y a n d download the pdf file called ‘UBEC Capacitors - Assembly by Wirebonding’ For ULEC assembly instructions, please go to: www.ipdia.c om /as s embl y and download the pdf file called ‘ULEC Capacitors - Assembly by Wirebonding’ Rev. 1.0 20 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical UWSC 26 GHz+ - General Description UWSC Capacitor targets Optical communication systems such as ROSA/TOSA, SONET and all optoelectronics as well as High speed data systems or products. The UWSC is suitable for DC decoupling and bypass applications in all broadband optoelectronics and High speed data systems. The unique technology of integrated passive devices in silicon, developed by IPDiA, offers unique performances with high rejection higher than 26+ GHz according to the capacitance value. These Ultra large band Wire Bondable MOS vertical Silicon Capacitors (UWSC) have been developed in a semiconductor process, in order to combine ultra-deep trench MOS capacitors for high capacitance value and single layer MOS capacitors for low capacitance value in small form factor. Other capacitance values and other package size are available as a single capacitor or capacitor array; please feel free to contact us. The UWSC capacitor provides very high stability of the capacitance over temperature, voltage variation as well as very high reliability. UWSC capacitors have an extended operating temperature ranging from -55°C to 150°C, with very low capacitance change over temperature (0+/- 24 ppm). Standard form factors are 0101, 0201, 0202, 0303 & 0504 with values range covers from 10 pF to 22 nF. Assembly: Please refer to our assembly recommendations p. 29. Pad finishing: bottom electrode in Ti (0.1 μm)/Ni (0.3 μm)/Au (0.2 μm) and top electrode in Ti (0.2 μm) / Cu (3.4 μm) / Ni (3 μm) / Au (1.5 μm). Other types of finishing are available on request such as 3 μm Aluminum (Al/Si/Cu: 98.96%/1%/0.04%). For any custom capacitance values and other package sizes please feel free to contact us. 1 Single layer MOS capacitors Ultra-deep trench MOS capacitors for low capacitance for high capacitance 2 Fig. 34: UWSC capacitor soldered on board Fig. 35: UWSC capacitor block diagram (2 connections) UWSC 26 GHz+ - Standard Electrical Performances In accordance with the Absolute Maximum Rating System (IEC 60134). Symbol Parameter Conditions Min. Typ. Max. Unit CP Capacitance tolerance -15 - TOP Operating temperature -55 20 150 °C TSTG Storage temperature -70 - 165 °C CT Capacitance temperature variation -24 0 +24 ppm/◦C CRVDC Capacitance voltage variation - - 0.05 %/VDC ESDHBM ESD testing > 2 kV HBM stresses 2(**) - - kV IR Insulation resistor - 10 - GΩ -55 °C to 150 °C From 0 V to RVDC GQS, SNW-FQ302A (*) +15 % Table 16: UWSC standard electrical performances (*) Other capacitance tolerances upon request (**) for capacitance value, higher than 47pF Rev. 1.0 21 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical UWSC 26 GHz+ - Specific Electrical Performances (Typical value) P/N 935 153 622 210 935 154 622 210 935 153 622 310 935 154 622 310 935 153 622 410 935 154 622 410 935 153 822 410 935 154 822 410 935 153 528 210 935 154 528 210 935 153 528 247 935 154 528 247 935 153 528 333 935 154 528 333 935 153 521 310 935 154 521 310 935 153 521 410 935 154 521 410 935 153 620 510 935 154 620 510 935 153 624 522 935 154 624 522 935 153 821 510 935 154 821 510 Break down voltage (V) Nom. Rated voltage (VDC) Capacitance value (nF) Case size ESL (pH) ESR (mΩ) 150 50 10 pF W0101 15 185 150 50 100 pF W0101 17 150 50 16.6 1 W0101 12 33 30 10 1 W0101 - - 150 50 10 pF W0201 3 <10 150 50 47 pF W0201 6 62 150 50 330 pF W0201 20 20 150 50 100 pF W0202 10 <10 150 50 1 W0202 8 <10 50 16.6 10 W0303 6 14 50 16.6 22 W0504 6 7 30 10 10 W0202 3 <5 Table 17: UWSC specific electrical performances UWSC 26 GHz+ - Frequency Response(*) 0101 - BV150 - UWSC capacitor: Impedance value vs. frequency UWSCxx2.xxx 50Ω 50Ω Fig. 36: 10 pF-250 µm thick- P/N: 935.153.522.210 (red curve), 100 pF-250 µm thick- P/N: 935.153.522.310 (green curve) and 150 pF-250 µm thick- P/N: 935.153.522.315 (blue curve) frequency response of impedance. Rev. 1.0 22 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical 0201 - BV150 - UWSC capacitor: Impedance value vs. frequency UWSCxx8.xxx 50Ω 50Ω Fig. 37: 10 pF-250 µm thick- P/N: 935.153.528.210 (red curve), 15 pF-250 µm thick- P/N: 935.153.528.215 (green curve), 22 pF-250 µm thick- P/N: 935.153.528.222 (blue curve), 33 pF-250 µm thick- P/N: 935.153.528.233 (turquoise curve), 47 pF-250 µm thick- P/N: 935.153.528.247 (yellow curve), 68 pF-250 µm thick- P/N: 935.153.528.268 (fuchsia curve), 150 pF-250 µm thick- P/N: 935.153.528.315 (grey curve), 220 pF-250 µm thickP/N: 935.153.528.322 (brown curve) and 330 pF-250 µm thick- P/N: 935.153.528.333 (green-blue curve) frequency responses of impedance in reflection mode 0202 – BV150 – UWSC capacitor : Impedance value vs. frequency UWSCxx1.xxx 50Ω 50Ω Fig. 38: 100 pF-250 µm thick- P/N: 935.153.521.310 (red curve), 680 pF-250 µm thickP/N: 935.153.521.368 (green curve) and 1 nF-250 µm thick- P/N: 935.153.521.410 (blue curve) frequency responses of impedance in reflection mode. (*) The measurement results are only valid for the described test set up. Other configurations will lead to different results. Rev. 1.0 23 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical UWSC 26 GHz+ - RF Perfomances 0202 – BV30 – UWSC capacitor : Impedance value vs. frequency UWSCxx1.xxx 50Ω 50Ω Fig. 39: 10 nF-250 µm thick- P/N: 935:153.821.510 (red curve) frequency responses of impedance in reflection mode 0303/0504 – BV50 – UWSC capacitor : Impedance value vs. frequency UWSCxxx.xxx 50Ω 50Ω Fig. 40: 10 nF-250 µm thick- P/N: 935:153.620.510 (red curve) and 22 nF-250 µm thick P/N: 935:153.624.522 (blue curve) frequency responses of impedance in reflection mode Fig. 41: 10 nF-250 µm thick- P/N: 935:153.620.510 Impedance characteristic versus Freq. in shunt mode Fig. 42: 10 nF-250 µm thick- P/N: 935:153.620.510 ESL characteristic versus Frequency in shunt mode Rev. 1.0 24 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical UWSC 26 GHz+ - Component Dimensions ( mm ) W0101 W0201 W0202 W0302 W0303 W0402 W0404 W0503 W0504 W0505 W0805 Pad dimension a b >0.15 >0.15 >0.40 >0.15 >0.40 >0.40 >0.70 >0.40 >0.70 >0.70 >0.94 >0.40 >0.94 >0.94 >1.17 >0.72 >1.28 >0.92 >1.15 >1.15 >1.90 >1.15 Case size (typ. ±0.01mm) L W T 0.25(*) 0.25(*) 0.50 0.25 0.50 0.50 0.80 0.50 0.25 0.80 0.80 (standard 1.04 0.50 profile) or 0.10 (low 1.04 1.04 profile) 1.27 0.82 1.38 1.02 1.25 1.25 2 1.25 W L a b T Table 18: UWSC component dimensions (*): except for 1nF /0101/BV 50 V, case size = 0.294 x 0.294 mm For landing pad dimensions on your PCB layout, please refer to the assembly chapter. Package Outline and Orientation Mark The UWSC capacitor is delivered as a bare die, with opening for contacts. Die name Fig. 43: Microphotograph of a 10 nF/0303 UWSC capacitor UWSC 26 GHz+ - Capacitance Range Available parts—For other values, contact your IPDiA sales representative Rev. 1.0 25 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical UWSC 26 GHz+ - Global Part Number Information Example of a 10 nF – 0303 UWSC capacitor delivered in a 1000 unit Tape and Reel 935.153.62.0.5.10-T3O T BV S Type 935.153 = UWSC thickness 250µm 935.154 = UWSC thickness 100µm Breakdown voltage 9 = 11 V 8 = 30 V 6 = 50 V 5 =150 V B = 450 V Size 2 = 0101 8 = 0201 1 = 0202 5 = 0302 0 = 0303 7 = 0402 3 = 0404 G = 0503 4 = 0504 H = 0505 J= 0606 6 = 0805 9 = Array4 A = Array8 B = Binary . . U . 0 = 10f 1 = 0.1p 2 = 1p 3 = 10p 4 = 0.1n Unit 5 = 1n 6 = 10n 7 = 0.1µ 8 = 1µ 9 = 10µ XX . PK / F Value 10 15 22 33 47 68 - Packing W0: 2" x 2" waffle pack F1: 6” film frame carrier T3: T&R 1 000 units T4: T&R 10 000 units T5: T&R 5 000 units Finishing Top O: electroplated TiCuNiAu (Ti:0.2 µm; Cu:3.4 µm; Ni :3 µm; Au:1.5 µm) A: Al (Al/Si/Cu: 98.96%/1%/0;.04%) Bottom TiNiAu (Ti: 0.1 µm; Ni: 0.3 µm; Au: 0.2 µm) UWSC 26 GHz+ - Available Parts Part number UWSC.xxx Product description Ultra large band Wire bondable vertical Silicon Capacitor, from -55°C to 150°C, 250 µm/100 µm of thickness, 26 GHz with: • Top: electroplated TiCuNiAu (Ti: 0.2 µm; Cu: 3.4 µm; Ni :3 µm; Au: 1.5 µm) • Bottom: TiNiAu (Ti: 0.1 µm; Ni: 0.3 µm; Au: 0.2 µm) Thickness Case Size S2P files 935 153 528 247 Ultra large band Wire bondable vertical Silicon capacitor 47 pF, BV=150 V 250 µm W0201 Yes (**) 935 153 522 310 Ultra large band Wire bondable vertical Silicon capacitor 100 pF, BV=150 V 250 µm W0101 Yes (**) 935 153 521 310 Ultra large band Wire bondable vertical Silicon capacitor 100 pF, BV=150 V 250 µm W0202 Yes (*) 935 153 822 410 Ultra large band Wire bondable vertical Silicon capacitor 1 nF, BV=30 V 250 µm W0101 Yes (**) 935 153 622 410 Ultra large band Wire bondable vertical Silicon capacitor 1 nF, BV=50 V 250 µm W0101 Yes (**) 935 153 521 410 Ultra large band Wire bondable vertical Silicon capacitor 1nF, BV=150 V 250 µm W0202 Yes (**) 935 153 821 510 Ultra large band Wire bondable vertical Silicon capacitor 10nF, BV=30 V 250 µm W0202 Yes (**) 935 153 620 510 Ultra large band Wire bondable vertical Silicon capacitor 10nF, BV=50 V 250 µm W0303 Yes (**) 935 153 624 522 Ultra large band Wire bondable vertical Silicon capacitor 22nF, BV=50 V 250 µm W0504 Yes (**) 935 154 528 247 Ultra large band low profile Wire bondable vertical Silicon capacitor 47 pF, BV=150 V 100 µm W0201 Yes (**) 935 154 522 310 Ultra large band low profile Wire bondable vertical Silicon capacitor 100 pF, BV=150 V 100 µm W0101 Yes (**) 935 154 521 310 Ultra large band low profile Wire bondable vertical Silicon capacitor 100 pF, BV=150 V 100 µm W0202 Yes (*) 935 154 822 410 Ultra large band low profile Wire bondable vertical Silicon capacitor 1 nF, BV=30 V 100 µm W0101 Yes (**) 935 154 622 410 Ultra large band low profile Wire bondable vertical Silicon capacitor 1 nF, BV=50 V 100 µm W0101 Yes (**) 935 154 521 410 Ultra large band low profile Wire bondable vertical Silicon capacitor 1nF, BV=150 V 100 µm W0202 Yes (**) 935 154 821 510 Ultra large band low profile Wire bondable vertical Silicon capacitor 10nF, BV=30 V 100 µm W0202 Yes (**) 935 154 620 510 Ultra large band low profile Wire bondable vertical Silicon capacitor 10nF, BV=50 V 100 µm W0303 Yes (**) 935 154 624 522 Ultra large band low profile Wire bondable vertical Silicon capacitor 22nF, BV=50 V 100 µm W0504 Yes (**) (*) FREE S-Parameters-Based Linear Simulation Models for ADS: http://www.modelithics.com/mvpIpdia.asp. FREE S-Parameters-Based Linear Simulation Models for ADS: http://www.ipdia.com. (**) Rev. 1.0 26 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical UWSC 26 GHz+ - Packing Format Tape and Reel format definition: Cavity dimensions Carrier Tape width Carrier Tape pitch Reel size Qty per reel 8 mm 4 mm 7” 1 000 0.31 mm 8 mm 4 mm 7” 1 000 1.00 mm 0.30 mm 8 mm 4 mm 7” 1 000 1.68 mm 0.42 mm 8 mm 4 mm 7” 1 000 Case size (Thickness) Tape Ref W0201 tbd W0202 YJ194 0.56 mm 0.56 mm W0303 LO-618 1.00 mm W0504 LO-719 1.27 mm Ao Bo Ko Table 19: Tape & Reel references Width Pitch Fig. 45: Die orientation (no flip) within the carrier (Pocket) related to tape and reel orientation Fig. 44: Tape & Reel dimensions Tape Width A Diameter C D (min) N Hub W1 W2 (max) 8 mm 178 mm +/- 1.0 13.5 mm ± 0.5 20.2 mm 60 mm + 0.1 -0.0 93 mm ± 0.5 11.5 Table 20: Reel references used for tape width 8 mm Fig. 46: Reel references and dimensions used for tape width 8 mm Rev. 1.0 27 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical Film frame carrier format definition: Ref: FF070 (Perfection products) Wafer diameter Frame type Inside diameter (A) 7.639” (***) 6.0” (150 mm) Type A Outside diameter (B) 8.976” Width (C) 8.346” (***) other size and type on request. Like FF108 and F123 frame type A respectively for 8” and 12” wafer diameter Thickness (D) Pin location (E) 2.370” 0.048 Fig. 47: Dimension of film frame carrier Pin location (F) 2.500” Frame style DTF-2-6-1 Weight (lbs) (stainless) 0.21 Table 21: Details of film frame carrier Waffle pack format definition: (Entegris product) Pocket details Case size (Thickness) Waffle Ref W0101 tbd W0101* (100 µm) Max Qty per waffle X ±0.05 mm Y ±0.05 mm Z ±0.05 mm A ±0.5° H20-015-66C02 0.38 0.38 0.23 18° 20x20 (400) W0101* (250 µm) H20-018-12-66C02 0.46 0.46 0.3 14° 20x20 (400) W0201 tbd W0202 (250 µm) H20-022-12-66CO2 0.58 0.58 0.3 5° 20x20 (400) W0303 (250 µm) H20-035-66C02 0.89 0.89 0.38 18° 20x20 (400) W0504 (250 µm) H20-N126706-66C02 1.85 1.45 0.36 7° 19x16 (304) Table 22a: Details of waffle pack (*): except for 1 nF /0101/BV 50 V, case size = 0.294 mm x 0.294 mm Overall tray size Size Height Flatness 50.8 mm ±0.10 mm 3.96 mm +0.05 -0.08 0.1 mm Table 22b: Details of waffle pack Fig. 48: Dimensions of waffle pack The die orientation (no flip) within the pocket is related to the waffle pack orientation. Rev. 1.0 28 IPDiA Capacitors – UWSC Series - Wire Bondable Vertical Assembly by Wirebonding The attachment techniques recommended by IPDiA for the UWSC capacitors on the customers substrates are fully detailed in specific documents available on our website. To assure the correct use and proper functioning of IPDiA capacitors please download the assembly instructions on www.ipdia.com/ assembly and read them carefully. For UWSC assembly instructions, please go to: ww w. i p d i a .c om /as s em b l y a n d download the pdf file called ‘UWSC Capacitors - Assembly by Wirebonding’ Rev. 1.0 29 IPDiA Ultra Broadband Silicon Capacitors Definitions Data sheet status Objective specification This data sheet contains target or goal specifications for product development. Preliminary specification This data sheet contains preliminary data; supplementary data may be published later. Product specification This data sheet contains final product specifications. Limiting values Limiting values given are in accordance with the Absolute Maximum Rating System (IEC 134). Stress above one or more of the limiting values may cause permanent damage to the device. These are stress ratings only and operation of the device at these or any other conditions above those given in the Characteristics sections of this specification is not implied. Exposure to limiting values for extended periods may affect device reliability. Application information Where application information is given, it is advisory and does not form part of the specification. Life Support Applications These products are not designed for use in life support appliances, devices, or systems where malfunction of these products can reasonably be expected to result in personal injury. IPDiA customers using or selling these products for use in such applications do so at their own risk and agree to fully indemnify IPDiA for any damages resulting from such improper use or sale. Reproduction in whole or in part is prohibited without the prior written consent of the copyright owner. The information presented in this document does not form part of any quotation or contract, is believed to be accurate and reliable and may be changed without notice. No liability will be accepted by the publisher for any consequence of its use. Publication thereof does not convey nor imply any license under patent- or other industrial or intellectual property rights. For more information, please visit: http://www.ipdia.com To contact us, email to: sales@ipdia.com Date of release: 01/03/2016 Rev 1.0 Document ID: Product Line Technical Datasheet