ISSN 10637834, Physics of the Solid State, 2010, Vol. 52, No. 12, pp. 2589–2595. © Pleiades Publishing, Ltd., 2010. Original Russian Text © S.E. Kulkova, S.V. Eremeev, S. Hocker, S. Schmauder, 2010, published in Fizika Tverdogo Tela, 2010, Vol. 52, No. 12, pp. 2421–2427. LOWDIMENSIONAL SYSTEMS AND SURFACE PHYSICS Electronic Structure and Adhesion on Metal–AluminumOxide Interfaces S. E. Kulkovaa, b, *, S. V. Eremeeva, b, S. Hockerc, and S. Schmauderc a Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences, Akademicheskii pr. 2/4, Tomsk, 634055 Russia b Tomsk State University, pr. Lenina 36, Tomsk, 634050 Russia * email: kulkova@ispms.tsc.ru c Institute of Materials Testing, Materials Science and Strength of Materials, University of Stuttgart, Pfaffenwaldring 32, Stuttgart, 70569 Germany Received January 13, 2010; in final form, April 23, 2010 Abstract—This paper reports on the results of the systematic analysis of the atomic and electronic structure of the Me/αAl2O3(0001) interfaces for two series of isoelectronic metals (Me = Cu, Ag, Au and Ni, Pd, Pt), depending on the termination of the oxide substrate and the configuration of oxide films. The calculations have been performed by the pseudopotential method in the planewave basis set. The adhesion energy of metal films has been calculated depending on the cleavage plane. It has been shown that the adhesion energy is maximum at the oxygen interface, which is caused by the ion component in chemical bonding at this inter face. The aluminum and aluminumenriched interfaces are characterized by the metallic type of bonding. The local densities of states and the charge distribution near the interface have been analyzed. It has been demonstrated that oxygen vacancies at the interface substantially weaken the adhesion due to the partial breaking of Me–O bonds. DOI: 10.1134/S1063783410120243 1. INTRODUCTION The structural and physicochemical properties of metal oxides remain the subject of experimental and theoretical studies due to their important technologi cal applications in microelectronics, laser optics, chemistry, highpressure physics, medicine, etc. [1]. Since the phenomena occurring at metal–oxide inter faces are important for technical applications and pro duction of materials, they have been intensively stud ied in recent years in terms of the density functional theory [2–13]. The majority of the works have been devoted to studying the electronic structure of the (0001) surface of aluminum oxide with the corundum structure (αAl2O3), i.e., the material with a high bulk modulus (320 GPa), and the Nb(111)/αAl2O3(0001) interface with a high adhesion energy of ~9.8–10.6 J/m2 [2, 3, 5, 6, 13]. Despite the increasing number of publications in the last decade, the mechanisms of chemical bonding at metal–oxide interfaces remain unclear. The available results of the study of the adhe sion at the interfaces differ both in the values of ener gies and in the conclusions regarding the stability of different atomic configurations of films at the inter faces and even in mechanisms of chemical bonding. For example, the difference in the calculated energies of adhesion of the copper film from the oxygen termi nation of the surface is ~1.4 J/m2 [8, 12] and the values on the aluminum termination of the surface [4, 8] sub stantially differ from experimental data. Nearly equal values (0.672 and 0.679 J/m2 [7]) were obtained for sil ver at the interface with aluminum and aluminum enriched terminations, whereas the difference of ~1.5 J/m2 was obtained in [11]. It should be emphasized that the existing theoretical works give different values of the relaxation of interface layers, splitting of the first metal layer, and other structural and electronic char acteristics. Since the mechanism of bonding of metal adatoms and films with an oxide substrate is essentially affected by the electronic structure of metals, system atic and comparative theoretical studies of the atomic and electronic structure of the interface between the d metals and oxides in the framework of a unified model of interface are needed. The aim of the present work is to study the atomic and electronic structure of the Me(111)/α Al2O3(0001) interface with two series of isoelectronic metals: Ni, Pd, and Pt (the first series) and Cu, Ag, and Au (the second series), including the case with interface defects, and to determine the electronic and structural factors responsible for the metal–oxide bonding. 2. CALCULATION TECHNIQUE The atomic and electronic structures of three pos sible terminations of an aluminum oxide surface with 2589 2590 KULKOVA et al. (a) (b) (c) Ag2 Ag1 Al0 Al1 O2 Al3 Al4 O5 Al6 Fig. 1. Atomic structure of the Me(111)/αAl2O3(0001) interface: (a) Me in the Altop configuration on the oxide surface termi nated with Al (Me/(Al2O3)Al), (b) Me in the Altop configuration on the oxygen termination of the surface (Me/(Al2O3)O), and (c) Me in the hollow Hposition on the surface terminated with a double aluminum layer (Me/(Al2O3)Al2). the corundum structure αAl2O3(0001) and of Me(111)/Al2O3(0001) interfaces were studied in the framework of the pseudopotential approach imple mented in the VASP computer code [14–17] with the generalized gradient approximation [18] for the exchange–correlation functional. The interface was simulated by multilayer repeated oxidecontaining films and two metal films on both sides of the oxide. The metal films were separated by a vacuum gap of ~8 Å in order to exclude the interaction between metal atoms on two surfaces. In contrast to the model used in [13], where the metal layers fill the entire space of the cell between oxide surfaces and which encounters dif ficulties with correct preliminary estimation of the interface volume, our approach is devoid of these drawbacks. The calculation cell for describing alumi num oxide with aluminum termination of the surface contained six layers of oxygen atoms (three atoms in a layer) and 12 aluminum atom layers (one atom in a layer). For a surface terminated with a double alumi num layer or oxygen, the number of aluminum layers increased or decreased by two layers, respectively. The thickness of metal films was limited by four atomic lay ers on both sides of the oxide film. The structural parameters of αAl2O3 are a = 4.763 Å and c = 13.003 Å. In consideration of metal films on an oxide substrate, we took into account their tetragonal distor tion. The parameters of metal lattices were expanded in the case of Cu (6.34%) and Ni (9.48%) and com pressed for Ag (–6.70%) and Au (–7.00%). For Pd (0.05%) and Pt (0.91%), we have a good agreement between the parameters of metal and oxide. For each termination of oxide surface, we considered three configurations of metal film: over aluminum (Altop) or oxygen (Otop) atoms and the hollow (H) position. The interface structure was optimized using a 4 × 4 × 1 grid of kvectors until the minimum forces on atoms, not exceeding 0.01 eV/Å, were attained. The atomic structure of several possible configurations of metal films at the Me(111)/Al2O3 interface is presented in Fig. 1. The adhesion energy (or the ideal work of separa tion) was calculated from the formula W sep = ( E 1 – E 2 – E 12 )/2A, (1) where E12 is the total energy of a supercell containing oxide and metal films, E1 and E2 are the total energies of the same cell containing either oxide or metal films, A is the interface area, and the divider 2 takes into account the presence of two equivalent interfaces in the supercell. In the modeling of oxygen vacancies at the interface, their concentration is one vacancy per considered interface area. 3. RESULTS AND DISCUSSION First of all, we determined the most stable configu rations of Me(111) metal films at different termina tions of the oxide surface. As is evident from Table 1, metals Ni, Pd, Pt, and Cu at the aluminum interface prefer the Otop configuration over oxygen atoms, which agrees with the results of [10] for Ni and Cu. The energy gain in this configuration in the case of copper as compared to the Altop configuration is 0.13 eV/atom (the value is given per surface atom), whereas a greater difference (0.45 eV/atom) was found in the case of nickel film. In [7], the Hconfiguration for Ag(111) film was found to be more stable. How ever, our calculations show that both for Ag film and Au, the Altop configuration is more stable among the three considered configurations. This conclusion is in agreement with the results of [11]. It should be noted that Pt in the monolayer cover also prefers the Altop configuration. In this case, our results for a monolayer of Pt and Ag agree with the data of [19]. A similar result was obtained for an Ag monolayer in [9], where PHYSICS OF THE SOLID STATE Vol. 52 No. 12 2010 ELECTRONIC STRUCTURE 2591 Table 1. Stable configurations of the metal films at the Me(111)/Al2O3(0001) interfaces Me(111)/Al2O3(0001) Altermination Ni/Al2O3 Otop Otop [10] H Altop Pd/Al2O3 Otop H Otop Pt/Al2O3 Otop H Otop Cu/Al2O3 Otop Otop [10] H Altop H [10] Ag/Al2O3 Altop H [7] Altop [11] H H [11] Altop Altop [11] Au/Al2O3 Altop Altop [11] H H [11] Altop Altop [11] the Hartree–Fock method with electron correlation corrections was used. All the studied metals at the aluminumenriched interface (the oxide surface is terminated with a dou ble layer of Al–Al2termination) prefer the hollow H configuration, which agrees with the results for silver and gold films [11]. However, the difference between the energies of this and Otop configurations is small and comprises 0.02 and 0.05 eV for silver and copper films, respectively. All metals isoelectronic with Cu prefer the Altop configuration in the case of an interface terminated with oxygen, whereas, among metals of the first series, this configuration is most stable only for Ni(111). For palladium and platinum, which are isoelectronic with nickel, the Otop configuration is preferable. It should be noted that the more stable configuration found in [10] for Cu(Al2O3)O was the Hconfiguration; more over, the authors emphasized the insignificant energy difference between the H and Otop configurations. In our calculation, the difference between the Otop and Hconfigurations is substantial and comprises ~0.20 eV/atom. At the same time, the difference between the H and Otop configurations for a mono layer copper cover is insignificant, indeed (~0.04 eV/atom). As is evident from Fig. 1, in the case of the Altop configuration of films on aluminum or oxygen terminations on relaxation of interfaces, the first metal layer is split. In the case of an aluminum interface, this splitting for silver and gold is 0.88 and 0.66 Å, respectively. As a rule, the second metal layer from the interface is practically plane. As a whole, metal atoms on the substrate with aluminum termina tion tend to preserve the same interatomic distances as in bulk metals. It is worth to note a substantial increase in the distance between Al and O atoms, which, in the case of a pure surface, lie practically in one layer. At the oxygen termination of the interface, the first metal layer for the Altop configuration is also split, because PHYSICS OF THE SOLID STATE Vol. 52 No. 12 Al2termination Otermination one of the atoms of the film also tends to occupy the position of the next aluminum atom. The calculated splitting of 0.46 Å for Ni is comparable with the corre sponding value of 0.57 Å for Cu but is substantially less than the values obtained for Ag and Au (0.82 and 1.06 Å, respectively). Our calculation demonstrates the presence of a plane first metal layer at the alumi numenriched interface. In order to analyze the interaction mechanisms at different interfaces, we will consider the difference charge density distribution Δρ(r) = ρ ox ( r ) + ρ Me ( r ) – ρ Me/ox ( r ) at interfaces in the case of copper (Fig. 2). For example, in the case of Cu/(Al2O3)Al, in addition to the metal type of bonding between aluminum and copper, a weak ion bonding of copper atoms with oxy gen of the second layer from the interface is observed. The stability of the Otop configuration can be caused by increasing the ion component. The distance (2.32 Å) between the metal and aluminum layers, which is greater than the interatomic distances in oxide (0.42 Å), correlates with the Cu–Al bond, which is weaker than the Al–O bond in the oxide. The increase in the distance between Ag(Au) in the split layer and aluminum leads to weakening of the ion component. The variation in the local density of states of nonequivalent metal atoms in the interface layer leads to their polarization, which, along with hybrid ization of the s and d orbitals of Ag(Au) with the s and p orbitals of Al, can provide the preference of the Al top configuration in the given case. In the case of a monolayer cover, the interaction of the metal layer with the oxide substrate has a more pronounced ion character [13] than in the case of thick films, in which the metal bonding between atoms in films is strength ened, which, in its turn, weakens the bonding of met als with oxygen of the second layer from the interface. As a whole, we can distinguish the following types of bonding at the aluminum interface: the metal Me–Al 2010 2592 KULKOVA et al. (a) (b) (c) Fig. 2. Charge density difference Δρ(r) = ρ ox ( r ) + ρ Me ( r ) – ρ Me/ox ( r ) on three terminations of the Cu(111)/αAl2O3(0001) interface in the plane perpendicular to the interface and passing through the interface atoms: (a) the Altop configuration of the film at the Cu/(Al2O3)Al interface, (b) the Hconfiguration at the aluminumenriched Cu/(Al2O3)Al2 interface, and (c) the Altop configuration at the oxygen Cu/(Al2O3)O interface. PHYSICS OF THE SOLID STATE Vol. 52 No. 12 2010 ELECTRONIC STRUCTURE (a) 4 Pd Pdbulk N(E), electrons/eV 2 0 ~ ~ (b) EF (c) Pd1 EF 0 Al1 in Al2O3 ~ ~ 0~ ~ O2 in Al2O3 1 0 Al0 in Al2O3 Al1 in Al2O3 –8 E, eV 0 0 Pd1 EF ~ ~ O2 in Al2O3 1 0~ ~ O2 in Al2O3 1 –16 4 2 1 ~ 0 4 2 1 0~ 2593 Al3 in Al2O3 1 –16 –8 E, eV 0 0 –16 –8 E, eV 0 Fig. 3. Local densities of electron states of the interface atoms at the Pd (111)/αAl2O3(0001) interface: (a) the Otop configura tion at the Pd/(Al2O3)Al interface, (b) the Hconfiguration at the aluminumenriched Pd/(Al2O3)Al2 interface, and (c) Otop configuration at the oxygen Pd/(Al2O3)O interface. The numeration of the interface atoms is given in accordance with Fig. 1. bond, polarization of atoms in films, and the weak Me–O bond. For an aluminumenriched interface, the metal bonding is strengthened, which is clearly seen in Fig. 2b. Finally, on the oxygen termination of the interface, the ion type of bonding caused by the charge transfer from the metal to the substrate prevails (Fig. 2c). The change in the type of bonding depending on the atomic composition of the interface can be illus trated by the curves of local densities of electron states of interface atoms. For example, Fig. 3 presents the calculated local densities of electron states for a Pd/Al2O3(0001) interface. It is readily seen in Fig. 3a that there are insignificant changes in the local densi ties of electron states of palladium atoms near the interface as compared to those in depth. In this case, a relatively weak overlap of the states of Pd and Al is observed. In Ag and Au films, where the Altop con figuration is realized, the aluminum interface exhibits a greater variation in the local densities of electron states and a shift in the center of gravity of the valence band of the metal atom nearest to the interface toward the Fermi level. It is readily seen in Fig. 3b that the metal bonding is strengthened for the aluminum enriched interface, owing to a greater overlap of states of Me and the interface Al layer. In this case, the oxy gen band shifts from the Fermi level, which reduces the overlap of Me–O orbitals. For the oxygen interface (Fig. 3c), we observe a significant shift of local densi ties of electron states of oxygen atoms to the Fermi level and strong hybridization of oxygen orbitals and palladium atoms. Such trends were obtained for all metals that we considered. Moreover, the local densi ties of electron states of metals of the second series are situated closer to the Fermi level than the metals of the PHYSICS OF THE SOLID STATE Vol. 52 No. 12 first series, which causes their higher chemical activity at interfaces. The energies of separation of metal films from oxide substrates are presented in Table 2. As expected Table 2. Adhesion energies of the films (J/m2) at the stable Me/Al2O3(0001) interfaces Interface Altermination Al2termi nation Ni/Al2O3 Otermi nation 1.24 3.91 1.30 [10] 3.78 [10] Experiment 1.11 [20], 1.17 [21] 5.82 6.84 [10] Pd/Al2O3 0.90 1.05 [22] 4.66 4.80 Pt/Al2O3 0.74 0.57 [19] 4.84 5.23 Cu/Al2O3 0.47 2.50 0.58 [10] 2.66 [10] 0.9 [4] 1.02 [8] Experiment 0.44–0.50 [20, 21] 5.79 5.94 [10] 5.62 [8] Ag/Al2O3 1.80 1.83 [11] 0.679 [7] 4.03 3.93 [11] 4.7 [9] 1.92 2.31 [11] 2.64 2.78 [11] Au/Al2O3 0.41 0.33 [11] 0.672 [7] 0.27 [9] 0.36 [19] 0.17 0.29 [11] Experiment 0.3–0.43 [23] 2010 2594 KULKOVA et al. Cu1 (a) Cu3 N(E), electrons/eV 6 4 2 0 ~ ~ EF 4 2 0 O2 in Al2O3 1 ~ ~ (b) EF ~ O2 in Al2O3 ~ 1 0~ ~ Al3 in Al2O3 1 –16 –8 E, eV 0 0 ~ ~ (c) EF O2 in Al2O3 1 0~ Al3 in Al2O3 Cu2 Cu3 6 4 2 0 1 0~ 0 Cu1 Cu3 6 Al3 in Al2O3 1 –16 –8 E, eV 0 0 –16 –8 E, eV 0 Fig. 4. Local densities of electron states of the interface atoms at (a) the perfect Cu/(Al2O3)O interface and (b, c) the Cu/(Al2O3)O interface with (b) oxygen vacancies and (c) a vacancy in the first layer of the copper film. The numeration of the interface atoms is given in accordance with Fig. 1. Symbols Cu1, Cu2, and Cu3 correspond to different atoms of the first metal layer. from the analysis of electronic characteristics, the maximum work of separation was obtained for Me/(Al2O3)O interfaces, which points to the impor tance of the ion component in the chemical bonding for strong adhesion at metal oxide interfaces. It is worth noting that the maximum values of Wsep were obtained for interfaces with nickel or copper. Our obtained value of the work of separation for nickel film is less practically by 1 J/m2 than that obtained in [10], although the results for other Ni/Al2O3 interfaces are in a good agreement with [10]. It should be noted that the work of separation is somewhat lower for films with metals isoelectronic with nickel. A substantially greater reduction in the work of separation is observed for the second series, where the Altop configuration at the oxygen interface is more stable, which causes a sharp decrease in Wsep. The lowest work of separation of metal films was obtained for interfaces with alumi num termination. In this case, the results for the first series of metals (Ni, Pd, and Pt) are practically twice the values for the second series of metals (Cu, Ag, and Au), which is caused by the presence of practically totally filled d band for these metals. Our results are, generally, in a good agreement with the experiment [20, 21], except gold, for which the calculated values are less than in the experiment [23]. It should be noted that, as a whole, the adhesion energies in the case of the aluminumenriched interface have intermediate values but, for Pd, Pt, and Au, they are close to the results obtained for the oxygen interface. Moreover, the further filling of the d shell of metals from the sec ond series favors weakening of the chemical bonding at all studied interfaces as compared to the first series. Since oxygen vacancies can substantially affect the chemical bonding at interfaces, we calculated the work of separation with allowance for the vacancies in the interface layers at the interface with oxygen termina tion. We found that oxygen vacancies reduce the value of Wsep practically by a half. For example, the values of the work of separation of 2.49 and 2.01 J/m2 were cal culated for Cu/(Al2O3)O and Ag/(Al2O3)O. The nature of reduction of adhesion in the presence of oxygen vacancies can be understood from the analysis of den sities of electron states. It is evident from comparison of Figs. 4a and 4b that there is a substantial variation in the local density of electron states of oxygen: namely, a shift of the valence band of oxygen from the Fermi level, which reduces hybridization of the p states of oxygen with s and d orbitals of metal. At the same time, vacancies in metal films near the oxygen inter face influence the structure of the density of states of oxygen and of copper atoms nearest to the interface to a less extent. It is readily seen (Fig. 4c) that the local density of states of metal atoms suffers a less change as compared to the aboveconsidered case. It is worth noting a decrease in the density of states at the Fermi level and widening of the valence band of copper atoms. Such insignificant changes are also observed in the local density of states of oxygen in the given case. Thus, a decrease in the number of Me–O bonds at the interface at the expense of oxygen vacancies substan tially reflects in the adhesion energy at the oxygen ter mination of the interface, whereas the vacancies in the interface layer of oxide films influence the adhesion at interfaces to a less extent (the decrease in the work of separation is 0.7–0.8 J/m2). 4. CONCLUSIONS A comparative study of the atomic and electronic structure of interfaces between two series of isoelec PHYSICS OF THE SOLID STATE Vol. 52 No. 12 2010 ELECTRONIC STRUCTURE tronic metals and aluminum oxide with the corundum structure αAl2O3(0001) depending on the termina tion of oxide film and configuration of metal films is performed. It is shown that the stable configuration of the aluminum interface in the case of metals isoelec tronic with nickel is the Otop configuration. Stability of this configuration is provided—in addition to metal bonding—by the ion component due to the interac tion of film atoms nearest to the interface with oxygen of the second layer. For Ag and Au films, the Altop configuration is more stable because of the weakening of the interaction between metal atoms and oxygen due to an increase in the distance between atoms of the film and the oxygen layer. In this case, the main mech anism of chemical bonding is the hybridization of metal Me–Al orbitals and polarization of Me atoms. In the case of an aluminumenriched interface, the metal type of bonding prevails. The ion type of chemical bonding is the main one at oxygen interfaces. Since one of interface metal atoms tends to occupy the posi tion of aluminum at the given interface, this results in the splitting of the interface metal layer and leads to increasing adhesion at the interface. 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PHYSICS OF THE SOLID STATE Vol. 52 No. 12 Translated by E. Chernokozhin 2010