Power Device In-house Seminar "Power Devices" Industrial use IGBT MODULE 1 Index Index 1. House style type name 2. Technical development overview 3. IGBT z NF, A, NFH, MPD series 2 1. House style type name 3 Kinds Kinds of of Mitsubishi Mitsubishi power power module module CM:IGBT module FM:MOSFET module PM:IPM (Intelligent Power Module) PS:ASIPM (Application Specific Intelligent Power Module) DIP-IPM (Dual In-Line Package Intelligent Power Module) TM:Thyristor module RM:Diode module SR、FD:Rectifire/First recovery diode(High power) CR、FT:Rectifire thyristor/First switching thyristor(High power) FG:GTO thyristor(Gate Turn-off Thyristor) FGC:GCT thyristor(Gate Commutated Turn-off Thyristor) GCU:GCT thyristor unit Others: HVIC(M639xx/M817xx) Transistor array(M545xx、M5466x、M638xx) Semiconductor sensor(MPSxxxx、MASxxxx) 4 Structure Structure of of type type name name((IGBT IGBT module module)) CM 100 T U −12 NF Kinds of main chip(series name as usual) :F, NF, NFH,etc. ex. LPT-IGBT:K, LPT-IGBT+First1700V-FWDi:KA Rated voltage Vces of IGBT "−" mean to 1/50, "−0", "non−"mean to 1/10 (ex.−12:600V)。 "−" with or without means industrial or EV in IGBT module Other specification of package, and so on. One or more character. Internal circuit R:7in1(with brake) T:6in1(3-phase inverter) B:4in1(Full Bridge inverter) D:Dual H:Single E2:IGBT(P-side)+FRDi E3:Chopper,Brake(IGBT:N-side) Rated collector current of main IGBT chip (ex.100:Ic=100A) Traditionally it shows the index of application, now changing to the one of IEC IGBT module in Mitsubishi(C means IGBT, M means case type module) This part have been bankruptcy, by many local definitions. So it is better to learn each name instead of system. See follows page. 5 Lot Lot number number S 5 1 AA1 C -001 Serial No. (ex. for sample) Parallel rank symbol Product serial number Month Jan.∼Sept.:1∼9 Oct:O(not zero),Nov:N,Dec:D Year (1) UL ID code 6 2. Technical development overview 7 Loss Loss reduction reduction history history of of inverter inverter Conditions: Vcc= 240V Io = 9A fc = 3kHz PF = 0.8 12 10.2W 10 Loss (W) 8 FWDiLoss 8.6W Tr SWoff Loss (for A/C IPM/DIP-IPM ) 7.1W 6.65W 6 4 2 IGBT SWoff Loss Tr DC Loss IGBT DC Loss IGBT SWon Loss Tr SWon Loss 0 QM20TD-9B PM20CEF060 PM20CTM060 PS21245 Bip.transistor 2nd Gen.IGBT 3rd Gen. IGBT 4th Gen. IGBT 8 Size Size history history of of inverter inverter (0.75KW) (0.75KW) 100 100 Mass%(1981=100%) 90 Source:JEMA"growing inverter"'1999 80 70 61.4 Mass (%) 60 50 36.5 40 30 20 16.8 8.9 10 8.9 0 1981 Topics 1984 1987 1991 1994 1998 Fiscal year ASIPM & 32 bit MCU IPM & ASIC MCU IGBT module & DSP Highβ・Bip. Transistor module & 16 bit MCU Bip. Transistor module 9 Sales Sales promotion promotion device device for for Industrial Industrial use use Market Inverter NF series IGBT New Design In Mega Power Dual Medical use IH 1700Vseries Compete Econo+ UPS Elevator NFH series CSTBT H-series replace High power − − − for ac690V 30k-60KHz Fresh market − 10 TM CSTBT CSTBTTM:: New New 5th 5th Generation Generation IGBT IGBT chip chip feature: "CSTBTTM" chip New Better Eoff-VCE(sat) trade off CSTBT:Carrier Stored Trench-Gate Bipolar Transistor LPT (Light Punch Through) is used in 1200V Good paralleling characteristic PCM (Plugging Cell Merged) Short circuit capability/ Lower driving power 11 Hole Hole injection injection of of IGBT IGBT Power MOSFET IGBT n+ emitter n+ emitter n- layer n- layer n+ buffer layer n+ buffer layer p + substrate Existent electron Injected hole(plus charge) Attracted electron 12 TM CSTBT CSTBTTM structure structure CSTBTTM trench IGBT p base n+ emitter n+ emitter n barred layer Here is n- layer Hole Density n- layer n+ buffer layer n+ buffer layer p + substrate p + substrate Emitter CSTBTTM Collector Improve Tradeoff Conventiona l IGBT Low VCE(sat) vs. Eoff High Eoff advantage : Stored charge is wiped by the depression layer at turn off. Then it can reduce Vce(sat) without increasing Esw(off) Trench IGBT CSTBTTM VCE(sat) 13 NF NF // A A // NFH NFH series series Trade Trade off off NF / A series trade off is decide Structure No lifetime controlled chip NFH series trade off decide by Injection 14 TM CSTBT CSTBTTM Chip Chip Structure Structure 15 PCM PCM (Plugging (Plugging Cell Cell Merged) Merged) Control IC(sat) by chip itself Decrease input capacitance PCM-CSTBT p base Plugged Cell n+ emitter n barred layer n- layer n+ buffer layer p + substrate Item Trench IGBT CSTBTTM CSTBTTM (Full gate) with PCM VCE(sat) Low Very Low Low Cies Large Large Small SCSOA Narrow Narrow Wide 16 Cross Cross Point Point LPT-CSTBT PT-TIGBT 250 250 200 200 398K 150 2 Jc [A/cm ] Jc [A/cm 2 ] 298K 398K Cross Point 100 50 150 298K 100 50 LPT-CSTBT(298K) PT-TIGBT(298K) LPT-CSTBT(398K) PT-TIGBT(398K) 0 0 0.0 1.0 2.0 VCE(sat) [V] 3.0 4.0 0.0 1.0 2.0 3.0 4.0 VCE(sat) [V] 17 Comparison Comparison of of chip chip (1200V) (1200V) Chip for IGBT module 3rd Planer 4th Trench 5th CSTBT 2.4V 1.9V 1.8V 0.4 1 0.5 Short Circuit ≧ 10μs ≧ 2μs ≧ 10μs (without RTC) (with PCM) Cross Point 2 0.6 0.4 VCE(sat) Cies (4th=1) (Rated Current=1) 18 TM Expansion of CSTBT Expansion of CSTBTTM Standard IPM H series replace L series (6/7 pack) (Low noise, Compact) NF series (Dual) NF series (6/7 pack) A series (1200V, Dual/Single) CSTBT High Current IPM HP-IPM (High Performance) High Current Quick Turn-off MPD (Dual) NFH series (Dual) 19 IGBT IGBT Module Module Road Road map map CY 2002 2003 NF series (1) Dual (2) MPD* 2004 2006 NF-Advance (LPT thin FZ wafer) NF series 6 & 7 pack A series A series Dual Single MPD*-series 1700V/1000A IGBT 2005 * MPD: Mega Power Dual NFH series High Frequency IGBT ( 30 ~ 60kHz ) High Frequency IGBT ( 100kHz ) Matrix converter RB-IGBT RC-IGBT 20 55ththGeneration IGBT GenerationTM IGBTModules Moduleswith with new newCSTBT CSTBTTMTechnology Technology:: Concept Concept NF series Concept Optimized for: A series • Best performance ∆T(j-f) Æ one rank better compared to competition • Superior performance ∆T(j-f) to European Trench IGBT • Conventional H-series Rth(j-c) and Rth(c-f) definition • European Rth(j-c) and Rth(c-f) definition • Full package compatible to H series • Cost optimized package size • drop-in replacement of H series in existing inverter designs • performance & cost competitive solution for new inverter designs 21 Common Common features features of of A A and and NF NF series series Features: 1. By using the latest CSTBT Chip technology: • Low Vce(sat), low Esw(on), low Esw(off) • High short circuit robustness (without RTC) • Reduced gate capacitance:gate drive power similar to planar IGBTs 2. Low internal package inductance ( except A series single ) 3. Excellent thermal resistance by using AlN isolation substrate 4. Improved temperature cycling capability ∆Tc (solder fatigue) by controlling the solder thickness between base-plate and AlN-substrate 5. Significantly improved power cycling capability ∆Tj (wire bond fatigue) by new wire bonding technology Target Applications: AlN:Aluminium Nitride 1. Motor control (General purpose inverters, Servo drives, Elevators, etc.) 2. Power supply (CVCF, UPS, etc.) 3. Kinds of industrial use power electric equipments (kW to MW) 22 Package Package comparison comparison NF NF with with A A series series (Dual) (Dual) H series (3rd) Silicone Gel Case Epoxy Resin Aluminum Wire Semiconductor Base plate Ceramic NF/A series (5th) Silicone Gel Cover Solder Case Aluminum Wire Base plate Semiconductor ceramic Without solder Comparison of Inductance NF/A:H=1:2 23 Improved Improvedtemperature temperaturecycling cyclingcapability capability(solder (solderfatigue) fatigue) Chip Solder a 1000000 NF series substrate Solder b Fig 1:Conventional H series soldering process: Solder b thickness may vary by tilting Solder a Solder b substrate Base plate Cycle Number ΔTc=55℃ Base plate Chip >6 times at 100000 10000 H series 1000 Not a failure point, but a starting point of erosion into the area under the chip. 100 0 10 20 30 40 50 60 70 80 90 100 ΔTc (℃) Wire bump Fig 2:A/NF series:Solder b thickness is kept uniform by „wire bump“ spacers Fig 3:Temperature cycling capability 24 Improved Improved Power Power Cycle Cycle 1,000,000,000 NF series 100,000,000 100 times at ΔTj=30℃ 10,000,000 Cycle F series 1,000,000 H series 100,000 Failure rate;1% 10,000 1,000 1 10 ∆Tj [℃] 100 1000 25 Comparison Comparison with with competitors competitors 1,000,000,000 NF series 100,000,000 Cycle 10,000,000 F series S 1,000,000 H series 100,000 Failure rate;1% E 10,000 1,000 1 10 ∆Tj [℃] 100 1000 26 3.1 NF series -Dual- 27 NF NF series series IGBT IGBT Modules Modules Features: 1) Best thermal performance ∆T(j-f): one rank better for easier replacement from H series 2) Conventional H series Rth(j-c) and Rth(c-f) definition 3) Full package compatibility with H series Target Applications: 1) Drop-in replacement of H series in existing inverter designs. (It may need some Rg adjustment.) 2) High performance power conversion designs 28 HHseries seriesPackage Packagecompatible compatible(NF (NFseries, series,Dual) Dual) Lefts are H series, Rights are NF series 29 H H series series Package Package compatible compatible CM300DY-24H CM300DY-24NF H series NF series 30 IDC Comparison with other IGBT DC collector current (A) 1000 900 Mitsubishi(NF series) 800 Company A(IGBT3) 700 Company B(Trench) NF-series is offering > 1 rank better DCperformance compared to competition Company C 600 500 400 300 * Calculation value 200 at Tc=80℃ 100 0 0 100 200 300 400 Rated current (A) 500 600 700 31 IIDC Comparison with other IGBT DC Comparison with other IGBT IDC is DC current calculated by following equation for comparison with other manufacture IGBT. Tc’+Rth(j-c’)xVCE(sat)(@IDC)xIDC =Tj(max) Rth(j-c’):Thermal resistance between junction and case directly under the chip Tc’ :Case temperature directly under the chip 32 Ipeak Ipeakvs. vs.fc fc (CM150DY-24NF (CM150DY-24NFvs. vs.150A/100V 150A/100VIGBT IGBTModule Moduleof ofcompetitors) competitors) 200 CM150DY-24NF Company C Ipeak (A) 150 Company A Trench 100 Conditions: Vcc=600V VGE=±15V Tj=125ºC RG=typical value ( of each module) P.F.=0.8 ∆T(j-c)=20ºC IGBT part 3Ø PWM Control (Sinusoidal) 50 0 1 10 fc (kHz) 100 33 NF NF series series IGBT IGBT Module Module ((Dual Dual)) Loss Losscomparison comparisonto toHHseries series fc=10kHz, Io=71Arms Power loss (W) 150 100 SW loss 50 16% reduce DC loss 0 CM150DY-24NF CM150DY-24H 34 NF NF series series vs. vs. H H series series Comparison Comparison Dual type Series (Design rule) 1200V VCE(sat) 600V Driving Power (Relative ratio) Short Circuit Capability H series NF series Planer(3um) CSTBT(0.8um) 2.4V 2.0V 2.1V 1.7V 0.75 1 ≧10μs ≧10μs 35 Comparison Comparison of of drive drive power power (Qg) (Qg) Series Type Name Qg (μC) (0V to 15V) H series (3rd) CM200DY-24H 1 F series (4th) CM200DU-24F 2.2 NF series (5th) CM200DY-24NF 1.35 36 Compatibility Compatibility about about desat desat short short circuit circuit detection detection Tj=25℃ VGE=15V F series (without RTC) Ic F series (with RTC) NF-series Vce become higher from lower over current (NF series) Vce 37 IGBT IGBT Tc Tc vs. vs. Ipeak Ipeak Conditions: Vcc=600V, VGE= ±15V ,Tj=125° C, fc=15kHz, PF=0.8, IGBT part, 3 φ PWM (sinusoidal) 130 Tc limit (℃) 120 CM200DY-24NF 110 C-company (200A/1200V) 100 A-company (200A/1200V) (trench) 90 80 B-company (200A/1200V) 37kW 45kW 55kW 70 60 0 50 100 150 Ipeak (A) 200 250 38 Line Line up up (NF (NF series series Dual) Dual) 100A 150A 200A 300A 400A 600A 600V − CM150DY -12NF CM200DY -12NF CM300DY -12NF CM400DY -12NF CM600DY -12NF 1200V CM100DY -24NF CM150DY -24NF CM200DY -24NF CM300DY -24NF CM400DY -24NF CM600DU -24NF 39 NF NF series series IGBT IGBT Module Module Dual Dual (600V) (600V) 150A 200A 300A 400A 94×48 108×62 600A 110x80 NF 108x62 94x48 H 94x48 108x62 U/F 40 NF NF series series IGBT IGBT Module Module Dual Dual (1200V) (1200V) 100A 150A 200A 94×48 108×62 94x48 108x62 300A 400A 600A 110×80 140×130 NF H U/F 110x80 ---- 94x48 108x62 110x80 140×130 41 3.2 A series -European model- 42 What What is is A A series series ?? Strategy product to compete to Eupec in Europe IEC standard base. Use one rank up IGBT chip from NF series by special chip selection. Small change from NF series. (Not exact same.) Price down by changing definition which based upon & cutting a margin. Only 1200V line-up 43 A A series series IGBT IGBT Module Module Features: 1) Superior thermal performance ∆T(j-f) versus European Trench IGBT 2) Competitive cost structure versus European Trench IGBT 3) Datasheets using the European style definition of thermal resistances Rth(j-c) and Rth(c-f) Æ direct data comparison with competition possible Target: Performance & cost competitive solution (vs. European Trench IGBT) for new inverter designs 44 Superior Superior∆∆T(j-f) T(j-f)Performance: Performance: AAseries seriesvs. vs.European EuropeanTrench TrenchIGBT IGBT Thermal Equivalent Circuit: P(IGBT)=Pss + Psw IGBT Junction Temperature Tj Rth(j-c) Module Case Temperature Tc P(IGBT) is calculated under identical sinewave PWM inverter application conditions: Vcc=600V fc=5kHz and 15kHz Tj(max)=150℃ Power Factor PF=0.8 ∆T(j-f) = P(IGBT) × [(Rth(j-c) + Rth(c-f)] Rth(c-f) Heatsink („Fin“) Temperature Tf Rth(f-a) Ambient Temperature Ta Rth(j-c) and Rth(c-f) specification values of A series are defined under identical to company „E“ conditions: the Tc and Tf reference points are located just below the IGBT chips 45 Ideal possible case temp., Tc (℃) Tc Tc vs. vs. Ipeak Ipeak comparison comparison (200A/1200V (200A/1200V IGBT) IGBT) 130 CM200DY-24A 120 Conditions; Vcc=600V, Tj=125℃ P.F.=0.8, fc=10kHz 110 Ideal possible case temp. is calculated at the conditions of Tj=125℃, by the average loss simulation of sinusoidal PWM operation. It is not show an actual possible Tc but show a relation for comparison , because it is not considered the temperature ripple. 100 Company A 90 Company 80 70 C Company B 60 0 50 100 150 200 250 Sinusoidal peak output current Io(peak) (A) 46 Ideal Heatsink Temperature Capability Tf (℃) Superior Superior∆∆T(j-f) T(j-f)Performance: Performance: AAseries seriesvs. vs.European EuropeanTrench TrenchIGBT IGBT 150 140 Conditions:fc=15kHz, PF=0.8 Tj=150℃ 130 ∆T(j-f) = P(av)(IGBT) x [ Rth(j-c) + Rth(c-f)] 120 110 100 CM300DY-24A 90 80 Company A (300A/1200V) 70 60 50 0 50 100 150 200 250 300 350 400 450 500 Inverter output current Io/A(rms) Note: Tf= 150℃ - ∆T(j-f) 47 AAseries seriesIGBT IGBTModules Modules::with withEuropean EuropeanRth(j-c) Rth(j-c)and andRth(c-f) Rth(c-f)definition definition H series definition: A series definition: (Mitsubishi traditional method) (according to Draft IEC 747-15) Tj Tj IGBT-chip Top AlN-substrate view: Cu-Baseplate Tc reference point Side Tj view: Tf reference point Tc reference point Heatsink Tf reference point Tj 2mm ÆLarger Rth-values for conservative thermal design Æ easy access to Tc and Tf reference points Ø 2mm Rth(j-c)= ∆T(j-c)/P Rth(c-f)= ∆T(c-f)/P Æ smaller, but more exact Rthvalues for cost optimised design Ædifficult access to Tc and Tf 48 Package Packageoutline outline AAseries seriesvs. vs.European EuropeanTrench TrenchIGBT IGBT 1200V Dual Modules: 100A 150A 200A 300A 400A 108×62 94×48 600A 110×80 A 108×62 “E” “S” 108×62 49 A A series series line line up up All VCES=1200V 100A 150A 200A 300A 400A 600A Single − − − − CM400HA -24A CM600HA -24A CM600HB -24A Dual CM100DY -24A CM150DY -24A CM200DY -24A CM300DY -24A CM400DY -24A CM600DY -24A Note: Single use just H series package. Dual use NF series structure package. 50 55thth Generation Generation IGBT IGBT Modules Modules with with new new CSTBT CSTBT Technology: Technology: Concept Concept A series Concept • Superior performance ∆T(j-f) to European Trench IGBT • Best performance ∆T(j-f) Æ one rank better compared to competition • European Rth(j-c) and Rth(c-f) definition • Conventional H series Rth(j-c) and Rth(c-f) definition • Cost optimized package size Optimized for: NF series • performance & cost competitive solution for new inverter designs • Full package compatible to H series • drop-in replacement of H series in existing inverter designs 51 3.3 NF series - 6 / 7 pack - 52 NF NF series series IGBT IGBT module module (6 (6 // 77 pack) pack) Compact PKG (use IPM package parts) Screw terminals (Main electrode) & Connector (Signal electrode) 75A∼200A/600V : 7 pack & 6 pack, 50A∼200A/1200V : 7 pack & 6 pack Note: Chips are not a same one of Dual. 53 Line Line up up NF NF series series 6/7 6/7 pack pack 7 600V in 1 1200V 6 600V in 1 1200V 50A 75A 100A 150A 200A − CM75RL -12NF CM100RL -12NF CM150RL -12NF CM200RL -12NF CM50RL -24NF CM75RL -24NF CM100RL -24NF CM150RL -24NF CM200RL -24NF − CM75TL -12NF CM100TL -12NF CM150TL -12NF CM200TL -12NF CM50TL -24NF CM75TL -24NF CM100TL -24NF CM150TL -24NF CM200TL -24NF 54 3.5 MPD series 55 Mega Mega Power Power Dual Dual series series ((High Highcurrent currentIGBT IGBTmodule module)) Type Name Vces Ic CM900DU-24NF 1200V 900A CM1400DU-24NF 1200V 1400A 150×131mm CM1000DU-34NF 1700V 1000A Feature Apply CSTBT(LPT) Compact:60% of CM1000HA-24H, for base plate area Applications:High power UPS, Inverter, etc. 56 Features Features of of the the structure structure in in MPD MPD Connector Three holes Step terminal Flat top nut Same M5 hole & Main terminal, Enough distance Into the hole 57 Image Image of of the the outside outside wiring wiring AC output U V W Signals N P DC input 58 3.6 1700V series 59 Line Line up up of of NF NF series series IGBT IGBT Module Module NF series 1700V dual are under development Recognized the UL as a module. Limit:No correspond to the high reliability request as traction. No correspond to the water cooling. 60 KA KA series series (for (for AC690V) AC690V) IGBT IGBT module module Features z 1700V IGBT in F series Package z Low VCE(sat) by LPT structure z First recovery FWDi z Isolation voltage=AC3500V Limit:Couldn't recognized the UL as a module. No correspond to the high reliability request as traction. No correspond to the water cooling. 61 Line Line up up of of KA KA series series IGBT IGBT Module Module Devices Vces Ic (V ) (A) 6 in 1 1700 2 in1 Type Name PKG 50 CM50TU -34KA 75 CM75TU -34KA 100 CM100DU -34KA 150 CM150DU -34KA 200 CM200DU -34KA C 300 CM300DU -34KA D 400 CM400DU -34KA Circuit A B 62 3.4 NFH series 63 High High frequency frequency IGBT IGBT Module Module NFH NFH series series ① Quick turn-off CSTBT ;Target switching frequency 30kHz∼60kHz ② Low impedance package ③ High power cycle Conditions: Vcc=600V, Ic=150A, Tj=125℃ 50A/div Eoff @400K A-guy B-guy 1.9V quarter from standard 5V Vce(sat) @400K Trade-off Eoff vs. VCE(sat) Rg=2Ω, Vge=±15V Inductive load hard turn off CM150DY-24H CM150DU-24NFH 50ns/div Comparison of turn-off waveform 64 Target Target applications applications Transformer load≒turn-on:Resistive load turn-off:Inductive load ① Single phase half bridge ② Single phase half bridge Out put Out put G/A G/A G/A Vcc G/A Vcc G/A NFH IGBT module G/A NFH IGBT module Application for output frequency=switching frequency 65 Total Total loss loss vs. vs. Vce(sat) Vce(sat) trade-off trade-off 1200V/100A Hard SW 30kHz 600 100A 30A 10A 400 100A 30A 10A 800 loss(W) loss(W) 500 Hard SW 60kHz 1000 300 200 600 400 200 100 0 0 0 5 Vce(sat) (V) 10 0 5 Vce(sat) (V) 10 Conditions:Full-bridge, rectangular, duty=50%, Loss/device Loss become quite high if Vce(sat) is lower than 3V =Standard 1200V IGBT is not suitable for high freq. 66 In (1200V/300A) In Exam. Exam. Appli. Appli. (1200V/300A) Vce(sat) Company Some medical application Esw(off) 125℃ 125℃ Hard switching Static loss Dynamic loss (Esw(off)) sum NF 2.0 V 33.0 mJ 45W 840W 885W NFH 5.0 V 7.5 mJ 116W 156W 272W A-company 3.9 V 15.0 mJ 96W 290W 386W B-company 4.8 V 15.5 mJ 121W 311W 432W ※loss is for one device. Wave form of this medical application operate 300A 200A rest 100A 0A 50ms 200ms 250ms 50ms: while operation, wave form is as right. 200ms: rest the operation -100A -200A -300A 9.76ms - I(D1) 9.78ms IC(SW1) 9.80ms 9.82ms 9.84ms Time 10us 50us(20kHz) 9.86ms 9.88ms 9.90ms 67 Line-up Line-up of of High-freq. High-freq. IGBT IGBT module module 100A 600V Dual 1200V Dual 150A 200A 300A 400A CM100DUS CM150DUS CM200DU CM300DU CM400DU -12F -12F -12NFH -12NFH -12NFH CM100DU -24NFH CM150DU -24NFH 600A - CM200DU CM300DU CM400DU CM600DU -24NFH -24NFH -24NFH -24NFH 68 Line Lineup upof ofIGBT IGBTModule Module Rated Current(A) 50 75 100 150 200 300 400 (450) 600 900 1200 1400 (1000) Single 600V Dual 6or7 pack Single 1200V Dual 6or7 pack Single 1400V Dual 6or7 pack Single 1700V Dual 6or7 pack H series NFH series NF series Mega Power Dual series KA series A series Note; H & KA series : 6 pack , NF series: 7 pack 69