Subject Description Form
Subject Code
EIE3306 (for 42470 and 42479)
Subject Title
IC Technology and Processes
Credit Value
3
Level
3
Pre-requisite/
Co-requisite/
Exclusion
Nil
Objectives
To enable students to gain basic knowledge and understanding in the
following aspects:
1. Fundamentals of semiconductors
2. The operating principles of pn junctions and MOSFETs
3. CMOS processes and basic CMOS logic gates
4. Fabrication processes of semiconductor devices
Intended Subject
Learning Outcomes
Upon completion of the subject, students will be able to:
Category A: Professional/academic knowledge and skills
1. Understand the basic physical mechanisms of modern semiconductor
transistors.
2. Hands-on experience in the fabrication of basic semiconductor devices.
Category B: Attributes for all-roundedness
3. Present ideas and findings effectively.
4. Think critically.
5. Learn independently.
6. Work in a team and collaborate effectively with others.
Subject Synopsis/
Indicative Syllabus
Syllabus:
1. Semiconductor Fundamentals
Energy band, extrinsic semiconductor, carrier concentration, mobility,
drift and diffusion currents, Einstein Relationship.
2. MOS Field-Effect Transistors
MOS fundamentals; basic structure and operation of MOSFETs.
3. Fabrication Process
Basics of device fabrication, oxidation, diffusion, photolithography, thin
film deposition, MOSFET fabrication process.
Laboratory Experiments:
Fabrication of Semiconductor Device
Session 1: Cleaning of wafers and oxidation and windows opening and
doping;
Session 2: Thin film deposition, photolithography, mask alignment, pattern
definition and etching; and
Session 3: Device characterization.
Teaching/Learning
Methodology
Teaching and
Learning
Method
Intended
Subject
Learning
Outcome
Remarks
Lectures,
supplemented
with interactive
questions and
answers, and
short quizzes
1,2,6
In lectures, students are introduced to
the knowledge of the subject.
Comprehension is strengthened with
interactive Q&A and short quizzes.
State-of-the-art development of the
technology will be discussed whenever
possible. Students will be capable of
appreciating
underlying
physical
mechanisms of the electronic devices.
Tutorials where
case studies are
conducted, and
problems are
given to students
for them to solve
1,2,3,4
In tutorials, students apply what they
have learnt in analyzing the cases and
solving the problems given by the tutor.
They will analyze the properties of the
devices and their dependencies on the
structure of the devices.
4-5 laboratory
exercises, where
students will
fabricate an
electronic/
optoelectronic
devices in the
micro-fabrication
laboratory.
3,4,5,6
1 special lecture on safety issues and
fabrication procedures will be given.
After that will fabricate a device in the
micro-fabrication laboratory. They will
learn the practices of a class 1000
clean room. They will be able to
operate equipments in a typical
fabrication facility such as evaporator,
mask aligner … etc. They will analyze
and interpret the data they obtain from
the devices fabricated in the laboratory.
Each laboratory session will be
conducted in small groups to ensure
that each student will have hands-on
experience on the operation of the
equipment.
Assignment and
Homework,
solving end-ofchapter
problems
1,2,3,4
Through working assignment and
homework,
and
end-of-chapter
problems in text books, students will
develop a firm understanding and
comprehension of the knowledge
taught. They will analyze given
information and apply knowledge in
solving problem. For some design type
of questions (e.g. designing a simple
protocol to guarantee error-free data
exchange), they will have to synthesize
solutions
by
evaluating
different
alternatives.
Assessment Methods
in Alignment with
Intended Subject
Learning Outcomes
Specific Assessment
Methods/Tasks
%
Weighting
1. Continuous Assessment
Intended Subject Learning
Outcomes to be Assessed
(Please tick as appropriate)
1
2


3
4
5


6
40%

Assignment/Homework

Laboratory works and
reports

Mid-semester test



End-of-semester test









2. Examination
60%
Total
100%


Explanation of the appropriateness of the assessment methods in
assessing the intended learning outcomes:
The continuous assessment consists of assignments, quizzes, and two
tests.
Assessment Methods
Remarks
Assignment/Homework
Assignment/Homework are given to students to
assess their competence level of knowledge
and comprehension, ability to analyze given
information, ability to apply knowledge and
skills in new situation, ability to synthesize
structure, and ability to evaluate given data to
make judgment. The criteria and level of
achievement will be graded and marks will be
given accordingly. These will be made known
to
the
students
before
an
assignment/homework is given. Feedback
about their performance will be given promptly
to students to help them improvement their
learning.
Laboratory works and
reports
Students will be required to perform 4-5
laboratory sessions and write an individual
laboratory report. The emphasis is on
assessing their performance in the laboratory,
and their ability to apply, synthesize and
evaluate. Expectation and grading criteria will
be given.
Mid-semester test
There will be a mid-semester test to evaluate
students’ achievement of all the learning
outcomes and give feedback to them for
prompt improvement. Expectation and grading
criteria will be given as in the case of
assignment/homework.
End-of-semester test
and Examination
There will be an end-of-semester test and
examination to assess students’ achievement
of all the learning outcomes. These are mainly
summative in nature. Expectation and grading
criteria will be given.
Student Study Effort
Expected
Class contact (time-tabled):

Lecture
24 Hours

Tutorial/Laboratory/Practice Classes
15 hours
Other student study effort:

Lecture: preview/review of notes;
homework/assignment; preparation for
test/quizzes/examination
36 Hours

Tutorial/Laboratory/Practice Classes: preview of
materials, revision and/or reports writing
30 Hours
Total student study effort:
Reading List and
References
105 Hours
Textbook:
1. Betty Lise Anderson and Richard L. Anderson, Fundamentals of
Semiconductor Devices, McGraw-Hill, 2005.
Reference Books:
1. Robert F. Pierret, Semiconductor Device Fundamentals, AddisonWesley, 1966.
Last Updated
June 2015
Prepared by
Prof. Charles Surya