Metal–oxide films with magnetically-modulated nanoporous architectures Craig A. Grimesa) and R. Suresh Singh Department of Electrical Engineering & Materials Research Institute, 204 Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802 Elizabeth C. Dickey and Oomman K. Varghese Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802 (Received 13 November 2000; accepted 22 March 2001) A magnetically-driven method for controlling nanodimensional porosity in sol-gel-derived metal–oxide films, including TiO2, Al2O3, and SnO2, coated onto ferromagnetic amorphous substrates, such as the magnetically-soft Metglas1 alloys, is described. On the basis of the porous structures observed dependence on external magnetic field, a model is suggested to explain the phenomena. Under well-defined conditions it appears that the sol particles coming out of solution, and undergoing Brownian motion, follow the magnetic field lines oriented perpendicularly to the substrate surface associated with the magnetic domain walls of the substrate; hence the porosity developed during solvent evaporation correlates with the magnetic domain size. I. INTRODUCTION Metal–oxide films of controlled nanoporosity offer an exciting opportunity for developing a new class of materials with unique physical, electrical, and magnetic properties. In recent years porous metal oxide films have attracted considerable attention for application in photovoltaic cells,2,3 catalysis,4 –9 gas sensors,10 –12 biotemplates,13–16 and electrochromic displays.17 Sol-gel self-assembly deposition methods are of great interest due to their inherent flexibility and low cost. Considerable effort has focused on the ordered alignment of a template around which the material of interest is assembled. Depending upon the desired pore size, organic polymers,18,19 block copolymers,20,21 latex22–24 and polystyrene25 spheres, water-in-oil emulsions,26 and water droplets27 have been used as templates. A templatefree method for fabrication of micrometer-sized honeycomb structures by self-assembly of block copolymers has been described in Refs. 28–30. We have recently discovered that within certain processing windows TiO2, Al2O3, and SnO2 metal–oxide films dip-coated onto magnetically-soft ferromagnetic substrates exhibit unique nanodimensional porous architectures; see Fig. 1. We have not been able to replicate this porous structure on nonferromagnetic substrates, prompting us to consider the influence of a magnetic field on the charged sol particles. The thick-film Metglas a) e-mail: cgrimes@engr.psu.edu 1686 J. Mater. Res., Vol. 16, No. 6, Jun 2001 FIG. 1. SEM image of sol-gel-derived 400-nm-thick TiO2 nanoporous coating made while exposed to a 0.0-Oe static magnetic field. The average pore size is approximately 60 nm. 2826MB1 substrate used in this work, Fe40Ni38Mo4B18, is a magnetically soft alloy made by rapid meltquenching, and while it maintains no long-range order, it does have short-range order over several atom lengths;31–34 hence, the as-cast material has magnetic ordering on the scale of tens of nanometers. It appears that as the sol layer upon the 2826MB substrate evaporates the moving charged sol particle comes out of solution and, under well-defined conditions (e.g., sol concentration, pH, drying rate), follows the Lorentz force © 2001 Materials Research Society C.A. Grimes et al.: Metal – oxide films with magnetically-modulated nanoporous architectures arising from the magnetic field lines associated with the perpendicularly oriented (normal to the surface) magnetization vector of the domain walls. This force is a function of the stray magnetic field strength associated with the vertically oriented magnetization vector of the domain wall (a function of alloy composition and thermal processing history), the relative strength of an applied magnetic field (which determines the size and number of domains), the charge of the sol particle coming out of solution (largely a function of sol pH), and the rate at which the sol particle comes out of solution which is a function of the drying rate, coating rate, particle mass, sol concentration, and ambient humidity level. Using the aforementioned Metglas substrate, we have found that the presence of the nanoporous structure and the pore size can be controlled by application of a direct current (dc) magnetic biasing field which alters the domain structure of the substrate. Figure 1 shows the surface features of a TiO2 film coated onto an as-cast, demagnetized substrate in a zero magnetic field (earth’s field was canceled by use of Helmholtz coils). Figure 2 shows an identical film coated upon a magnetically saturated substrate, through application of an 8 Oe dc magnetic field, which contains only one magnetic domain and no domain walls. As seen in Fig. 2, the resulting film is smooth on the nanometer length scale indicating uniform deposition of the metal–oxide film and is indistinguishable from films coated using identical process parameters on nonmagnetic substrates including Si, Al, Ag, Cu, quartz, and glass. The origin of this unique nanoporous architecture appears to arise from the interaction of charged sol particles with the magnetic flux lines of the substrate. A charged particle moving in a magnetic field is acted upon by the Lorentz force F, given by F ⳱ Q(v × B), where Q is the charge of the particle, v the velocity, and B the magnetic flux density with bold font used to indicate vectors.35 The Lorentz force alters the trajectory of moving charged particles, forcing them into a spiral about the magnetic field vector. This same principle is used in magnetron sputtering where a dc magnetic field, created by placing magnets under the sputtering target, is used to collect electrons near the target surface resulting in an enhanced plasma density.36 For thick ferromagnetic films, the magnetization vector of a domain wall rotates out of plane;37,38 see Fig. 3. Hence, the moving, charged sol particles collect on the surface of the substrate at the domain wall, as illustrated in Fig. 4, replicating the domain wall pattern upward in sol composition. The electromagnetic dual of this effect has been used for many decades to image domain walls, i.e. Bitter patterns.38,39 Our work has shown realization of the nanoarchitectures to be dependent upon the following: (i) magnetic state of the substrate; (ii) pH of the sol; (iii) drying rate of the film per relative humidity, temperature, and particle density. Since each of these three variables affects the nanoporous structure, the effect of each will be discussed separately. FIG. 3. Illustrative drawing showing the change in the magnetization vector orientation across domain wall38,39 for a thick film (i.e., a Bloch wall). FIG. 2. SEM image of 400-nm-thick sol-gel-derived TiO2 film. Coating was done while the substrate was exposed to a 8-Oe static magnetic field. FIG. 4. Schematic drawing illustrating the Lorentz force attraction of moving charged particles to the surface at the domain wall. J. Mater. Res., Vol. 16, No. 6, Jun 2001 1687 C.A. Grimes et al.: Metal – oxide films with magnetically-modulated nanoporous architectures II. FABRICATION OF NANOPOROUS METAL OXIDE FILMS Nanoporous films of Al2O3, SnO2, and TiO2 have been deposited using sol-gel. As the steps employed for obtaining the nanoporous films of these materials are similar, we discuss here the details of sol preparation and film deposition of TiO2, taking it as a representative case. The sol for TiO2 films was prepared through controlled hydrolysis and condensation reactions of a metal alkoxide dissolved in corresponding alcohol in the presence of an acid catalyst.40 The reagents used in the experiment, titanium tetraisopropoxide (TTIP) (99.999%), 2-propanol (99.5%), and nitric acid (70% redistilled), were procured from Aldrich. A 1 ml volume of TTIP, 0.05 ml of HNO3, 0.1 ml of deionized water, and 32.7 ml of 2-propanol were used for preparing a 0.1 M TiO2 sol.41 The first step in the sol preparation process was to dissolve TTIP in 2-propanol. While the solution was stirred under a nitrogen ambient, deionized water or nitric acid mixed with deionized water was added to it drop by drop. The sol resulted after stirring the solution for 2 h, which was then covered with parafilm and stored in a nitrogen environment. Prior to coating the substrates were cleaned by spraying acetone across the sample, rinsed in deionized water, and then dried in flowing nitrogen. The substrates were handled with stainless-steel tweezers throughout the cleaning and coating process. The coated substrates were dried in a humidity chamber. Nitrogen was passed through a bubbler at room temperature, with the humidity controlled by the flow rate of the nitrogen gas (approximately 1.3 cm/s through the chamber). The humidity and temperature of the chamber were monitored with a digital hygrometer. netic field serves to increase both the size of the magnetic domain and the thickness of the domain wall42 over that seen in Fig. 1. We have not yet been able to image the magnetic domain structures of the as-cast 2826MB substrates; the very properties that make this substrate interesting to use make the domain images difficult to obtain. The magnetically soft properties of the substrate are a result of the alloy having nanodimensional domains, without the grain boundaries or pinning features associated with magnetically hard materials. However, we have been able to correlate the topography of the metal oxide structures seen in Figs. 1, 5, and 6 with the domain structures found in the magnetically harder amorphous melt-cast Metglas FIG. 5. SEM image of sol-gel-derived 400-nm-thick Al2O3 nanoporous coating made while exposed to a 0.6-Oe static magnetic field. The average pore size is approximately 250 nm. A. Magnetic state of substrate The influence of the substrates’ magnetic state can be seen from comparison of Figs. 1, 2, 5, and 6. Figures 5 and 6 show nanoporous features coated onto 2826MB substrates at applied magnetic field biasing values, 0.6 and 4.2 Oe, respectively, intermediate to those of Figs. 1 and 2. The 3.0 cm × 1.2 cm as-cast 2826MB ribbons coated in this work have a coercive force of approximately 0.72 Oe. The nanoporous structures are not dependent upon the particular oxide and have been reproduced for Al2O3, TiO2, and SnO2 when coated on substrates of similar magnetic state. The substrate of Fig. 5 was exposed to a 0.6 Oe dc magnetic field while dip-coated with TiO2. The biasing field has increased the approximate domain size42 by a factor of 10 over that seen in Fig. 1, resulting in a pore size of approximately 250 nm. Application of the mag1688 FIG. 6. SEM image of sol-gel-derived 400-nm-thick TiO2 nanoporous coating made while exposed to a 4.2-Oe static magnetic field. J. Mater. Res., Vol. 16, No. 6, Jun 2001 C.A. Grimes et al.: Metal – oxide films with magnetically-modulated nanoporous architectures 2605SC, alloy composition Fe81B13.5Si3.5C21 (upon which we have not succeeded in realizing the nanoporous architectures). Figure 7, from Ref. 43, shows the generic domain structure of a 2605SC film, an alloy similar to the 2826MB composition but magnetically harder and hence with significantly larger domains.44 – 46 Comparison of Fig. 7 with our nanoporous metal oxide coatings shows similarly shaped features which, while not conclusive, we interpret as evidence that the nanoporous structure is replicating the magnetic domain structure of the 2826MB substrate, a magnetically softer alloy and hence with smaller magnetic domains than its 2605SC counterpart. The 2826MB substrate of Fig. 6 was coated while exposed to a 4.2-Oe dc magnetic field. At this applied field value the film is not quite completely saturated, with scattered domain walls of 1 mm length and 1 micron thickness still existing between the few remaining domains. As seen in Fig. 6, the nanoporous structure is established atop the magnetic domain wall; the full structure is approximately 0.6 mm long with an aspect ratio of approximately 1000. The nanoporous structure atop the domain wall is indicative that the wall itself, see Fig. 3, has split into regions having different magnetizationvector orientations. This fractionalization of the domain wall has been reported43 in Metglas alloy 2605SC; Fig. 8, a line drawing of a differential phase contrast domain image from Ref. 43, shows how the domain wall has split into subregions of different magnetization vector orientation. The size of a magnetic domain is proportional to the anisotropy constant K (approximately 4.3 × 104 J/m3 for Fe50Ni50) and inversely proportional to the saturation magnetization (0.57 T for 2826MB).44 The thickness of a domain wall is the result of two competing forces, ex- change energy and the anisotropy energy.37–39 To a first approximation the thickness of a Bloch wall is given by approximately (0.32kTc/4Ka)0.5 37,38 where k is Boltzman’s constant, Tc the Curie temperature (626 K for 2826MB), and a the nearest neighbor distance (approximately 0.32 nm for Fe50Ni50, assuming a simple cubic lattice). Calculations show a domain wall thickness of approximately 45 nm for Fe50Ni50, with the magnetization vector of one-third this thickness, 15 nm, significantly oriented out of the plane of the substrate, which is in agreement with the wall thicknesses seen in Fig. 1. For a given substrate the anisotropy constant K, and hence the domain size and domain wall thickness, can be controlled through by application of a magnetic biasing field or annealing the substrate in the presence of a saturating magnetic field. B. pH of the sol Sol formation generally occurs through two reaction steps, namely hydrolysis and condensation. In the case of alkoxide precursors, the hydroxyl ions attach to the metal atom replacing alkoxy groups. For titanium isopropoxide the overall hydrolysis and condensation reaction can be represented as the following:40,47– 49 Ti(OC3H7)4 + 2H2O → TiO2 + 4HOC3H7. The condensation reaction leads to the formation of colloidal particles, which can be polymeric or particulate depending on the type of precursors and pH of the sol.40,49 The colloidal particles within the sol undergo Brownian motion and have a tendency to aggregate spontaneously upon meeting47 to reduce their surface energies. Colloidal particle aggregation may be inhibited by the formation of surface charge47,49,50 developed by either preferential dissociation of one of the lattice ions of the FIG. 7. Fresnel image and pair of Foucault images (sensitive to vertical and horizontal components of the magnetization vector, respectively) of two magnetic domain structures seen on Metglas alloy 2605SC. From Ref. 43. J. Mater. Res., Vol. 16, No. 6, Jun 2001 1689 C.A. Grimes et al.: Metal – oxide films with magnetically-modulated nanoporous architectures sol particle or preferential adsorption of charged species from solution. The surface charge is formed either by protonating, Ti–OH + H+ → Ti–OH2+, or deprotonating, Ti–OH + OH− → Ti–O− + H2O, the Ti–OH bonds.49 The pH at which the surface is electrically neutral is called the point of zero charge (PZC); the surface is negatively charged at a pH > PZC and positively charged at pH < PZC.51 For TiO2 the PZC has been reported as 5.250 and 5.5.52 Opposite charges that may be present within the solution tend to accumulate adjacent to the charged surface of the sol particles and act to screen the charges of the potential-determining ions40,47,51 forming a double charge layer. This is illustrated schematically in Fig. 9, which shows a stationary oxide particle with a surface positive charge surrounded by diffuse layer of negative charges in the solution. Figure 10, redrawn from Ref. 40, shows the potential distribution in the double layer. According to the standard theory, the potential drops linearly through the tightly bound layer of surface charge and counterions called the Stern layer. Beyond the Helmholtz plane, in the Gouy layer, the counterions diffuse freely40 in the solution. The thermal energy and electrical energy of counterions in the solution decide the spatial extent of the diffuse layer.47,53 As the particle moves, the cloud of opposite charge lags behind; hence, a moving particle has a net charge associated with it. If an electric field is applied to a colloid, the charged particles move toward the electrode of opposite charge (i.e., electrophoresis).40,54,55 When the particle moves, it carries along with it the adsorbed layer and part of the cloud of counterions (negatively charged in this case), while the more distant portion of the double layer is drawn toward the opposite electrode.40 The slip plane (Fig. 10) separates the region of fluid that moves along with the particle from the region that flows freely. The rate of movement is controlled by the potential at the slip plane z56 (see Fig. 10) which is lower for a higher amount of countercharge screening. During the drying portion of the dip-coating process the particles move in random directions, with the continuous evaporation of water and solvent changing the surface charge and counterion concentration.57,58 In the magnetic analog of electrophoresis, the Lorentz force originating with the Bloch domain walls of the magnetic substrate guides moving charged particles. Hence the particles agglomerate in a space determined by the magnetic field, leaving solvent in the remaining portions. For a given domain-wall magnetic field strength, if the domain is too large, the sol particles will be unaffected by the Lorentz force and deposit within the interior of the domain walls resulting in a continuous smooth film. FIG. 8. Drawing of fractionated submicron domain wall structures in Metglas alloy 2605SC film. The original figure was obtained using differential phase contrast microscopy.43 Regions within the domain wall have different magnetization vector orientations. FIG. 9. Schematic representation of a positively charged sol particle surrounded by negatively charged ions in the solution. 1690 FIG. 10. Variation of potential in the double layer. Redrawn from Ref. 40. J. Mater. Res., Vol. 16, No. 6, Jun 2001 C.A. Grimes et al.: Metal – oxide films with magnetically-modulated nanoporous architectures For a given sol concentration and drying rate there exists a critical sol pH at which the nanoporous architectures are obtained. Figure 11 shows the topologies of the TiO2 films coated onto 2826MB substrates, in earth’s field, as a function of acid and water content in the sol. Beginning with 20 ml of a 0.01 M TiO2 sol, different amounts of a HNO3:H2O (1:2) solution were added and the resulting films imaged: (a) 20 l of solution added, pH ≈ 1.17; (b) 12 l of solution added, pH ≈ 1.29; (c) 6 l of solution added, pH ≈ 1.37. All films were dried in a 98% relative humidity environment. As seen in Fig. 11, the nanoporous structure appears only at specific acid/water concentrations. C. Sol particle velocity The rotation radius of the particle spiraling about the magnetic field vector due to the Lorentz force, commonly called the Larmor radius,35 is R= mv⊥ . QB For all sol concentrations, realization of the nanoporous structure requires the films to be dried slowly, over a period of approximately 15 min, with the films kept at 98% humidity and 27 °C; rapid drying results in smooth uniform films like that seen in Fig. 2. The NP structure is much easier to achieve at low sol concentrations. The 0.01 M sol, of correct acid content, dried in 98% humidity shows the nanoporous structure over 100% of the substrate. With the 0.01 M sol drying at lower humidity levels the nanoporous structure appears in isolated islands across the surface of the substrate, covering approximately 5% of the surface when dried at 77% humidity and approximately 1% of the surface when dried at 56% humidity. The islands seen at the lower humidity levels appear to be due to the formation of slower drying droplets during the coating process. The nanoporous structures are more difficult to achieve at higher sol concentrations and result in nanoporous structures with thicker walls; for a 0.1 M sol the nanoporous structure covers approximately 10% of the surface when dried at 98% humidity. (1) m is the particle mass and vⲚ the particle velocity perpendicular to B. For any given magnetic field strength, a too heavy, too fast, neutral, or quasi-neutral particle will not be significantly affected (directed), resulting in deposition of a uniform film. Alternatively too great a sol particle concentration or too large a stray magnetic field would result in a cascade of particles upon the surface, arriving at such a rate that the Lorentz force has little effect on the particle trajectories resulting in a uniformly smooth coating. III. CONCLUSIONS A new method for fabricating nanoporous metal oxide thin films is presented. The process appears to involve the attraction of the moving charged sol particles to the out-of-plane magnetization vector of the substrate’s domain walls through the associated Lorentz force, thereby replicating the domain wall structure of the substrate in the deposited metal oxide film. The substrate used in this work is a rapid melt-quenched ferromagnetic glass, FIG. 11. Variation in topology of TiO2 films coated onto 2826MB substrates, in earth’s magnetic field (approximately 0.4 Oe), as a function of acid content. Beginning with 20 ml of a 0.01 M TiO2 sol, different amounts of a HNO3:H2O (1:2) solution were added to the 20 ml and the resulting films imaged: (a) 20 l of solution added, pH ⳱ 1.17; (b) 12 l of solution added, pH ⳱ 1.29; (c) 6 l of solution added, pH ⳱ 1.37. J. Mater. Res., Vol. 16, No. 6, Jun 2001 1691 C.A. Grimes et al.: Metal – oxide films with magnetically-modulated nanoporous architectures Metglas 2826MB,1 of composition Fe40Ni38Mo4B18, which has no long-range order (hence the magnetically soft properties) but has short-range order over a few atom lengths. Pore sizes ranging from approximately 40 to 400 nm have been obtained, with the nanoporous structure disappearing completely on magnetically saturated substrates. Under identical coating conditions we have seen no evidence of the nanoporous structure when coating nonmagnetic substrates including Al, Ag, Si, Cu, quartz, and glass. To date we have proceeded through trial and error, finding a range of conditions within which we can fabricate nanoporous films of variable pore size. The nanoporous architectures appear to follow the magnetic domain structure of the substrate, disappearing when the substrate is magnetically saturated. We have been unsuccessful within our parameter space in achieving the nanoporous architectures upon magnetically hard surfaces, i.e., those having large stray fields such as Alnico and cobalt–samarium magnets, as well as magneticallyharder ferromagnetic glass ribbons of composition Fe87B3Nb5Si3C2 and Fe81B13.5Si3.5C2 (Metglas alloy 2605SC). It is possible that for the sol concentrations and drying rates investigated the magnetic attraction is too strong, leading to such a rapid cascade of particles upon the substrate that the magnetic template is covered. However for magnetically hard substrates presumably the right set of templating conditions could be achieved. For example, it may be possible to fabricate the nanoporous structures on nonmagnetic substrates, such as silicon, by adjacent placement of magnetically hard substrates during the coating process. It should also be noted that some metallic glasses spontaneously form a surface passivation layer,59 which could interfere with the formation of the nanoporous thin film. As evidenced in Fig. 11, realization of the nanoporous architectures is highly dependent upon the acid content of the sol, which thereby determines the charge of the sol particle. The nanoporous structures are reliably found only when dried slowly at high humidity levels; for an otherwise identical coating process, 100% nanoporous coverage when dried at 98% humidity (approximately 15 min) goes to approximately 1% coverage when dried in 56% humidity. The pore size ranges from approximately 60 nm when coated in a 0.0-Oe field to 120 nm when coated in a 0.4-Oe field and to 250 nm when coated in a 0.6-Oe field. Though the results of our experiments show the nature of the porous structure to be dependent on the magnetic state of the substrates, other factors like the interaction of alloy composition with sols having high acid-water concentrations, and their susceptibility to form oxides, need to be considered. Nanoporous films of controllable pore size and surface area should find great utility in catalysis,4 –9 biotemplating,13–16 filtration,60 and sensing61– 63 applications. 1692 ACKNOWLEDGMENTS This work was supported by the National Science Foundation under Contracts ECS-9988598, ECS9875104, and NSF DMR-9976851. The authors wish to thank Professor Marc A. Anderson of the Water Chemistry and Materials Program, University of Wisconsin—Madison, for many helpful conversations and suggestions. REFERENCES 1. The Metglas alloys are a registered trademark of Honeywell Corporation. For product information see: http://www.electronicmaterials. com:80/businesses/sem/amorph/page5 1 2.htm. 2. K. 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