A TEMPERATURE COMPENSATED L-BAND H Y B R I D SAW OSCILLATOR AND RESONATOR FILTER J. Ladd, C. A b d a l l a h , and T. O’Shea Sawtek I n c . P o s t O f f I c e Box 1 8 0 0 0 O r l a n d o , FL 32860 ABSTRACT A 950 MHz submlnlature temperature compensated SAW resonator o s c I I Ia t o r are (TCSO) and a SAW r e s o n a t o r f l l t e r developed I n h y b r l d form f o r a p p l l c a t l o n a s l o c a l o s c l I l a t o r and b a n d p a s s f I I t e r for a communlcatlon system. The o s c l I l a t o r p a c k a g e v o l u m e Is a p p r o x l m a t e l y 0.02 c u b l c i n c h e s and t h e f l l t e r p a c k a g e Is a p p r o x l m a t e i y 0.01 c u b l c I n c h e s . The extremely t l g h t packaging requirements are met by utlllzlng chip resistors and c a p a c i t o r s , p r l n t e d s p l r a l I n d u c t o r s , and c h i p t r a n s i s t o r s and d l o d e s . SAW oscll lator consists of a The t e m p e r a t u r e sensing network, a varactor dlode tuning c l r c u l t , and a s l n g l e p o r t SAW resonator osc 1 I I a t o r . The SAW r e s o n a t o r bandpass f l l t e r c o n s l s t s o f a four-element i n p u t matchlng network, a t w o - p o r t t w o - p o l e SAW r e s o n a t o r , and f o u r element o u t p u t matchlng network I n h y b r l d form. Thls paper describes the design, f a b r l c a t l o n and p e r f o r m a n c e of a SAW r e s o n a t o r c o n t r o l l e d o s c l I l a t o r and a SAW resonator f l l t e r . These c i r c u i t s u t l l l z e hybrld technlques t o achieve extremely small size. Temperature compensatlon I s 1 nc I uded i n t h e o s c I I I a t o r t u n I n g n e t w o r k I n order t o minimize frequency s h i f t s . The o s c i l l a t o r p e r f o r m a n c e g o a l s a r e low phase noise (-50 dBc/Hz at 10 Hz), m o d e r a t e RF o u t p u t power (0 dBm), m l n l m a l DC power drain, and good frequency s t a b l l i t y over t h e o p e r a t l n g temperature r a n g e o f OOC t o + 5 O o C . The g o a l f o r s e t on f r e q u e n c y a c c u r a c y and f r e q u e n c y d r i f t due t o t e m p e r a t u r e I s 2 1 5 ppm. The r e s o n a t o r fllter was d e s l g n e d and modeled uslng a transmlsslon matrix approach. Low i n s e r t i o n loss ( 5 d B ) and mlnlmum r i p p l e I n t h e p a s s band w e r e a c h i e v e d by I n c l u d l n g a m a t c h l n g network I n s i d e t h e m i n i a t u r e p a c k a g e and u s l n g an overlap apodlzatlon scheme on the transducers. QSClLLAIQBQ€3lEl A s i n g l e - p o r t SAW r e s o n a t o r was u s e d I n a Plerce-type hybrid osclllator clrcuit utlllzing chip transistors, dlodes, r e s l s t o r s and c a p a c l t o r s , and a p r l n t e d s p l r a l Inductor. The c l r c u r t d l a g r a m o f t h e v o l t a g e t u n e d o s c i l l a t o r Is shown In F lgure 1 .The P ie r c e o s c II I a t o r c o n f l g u r a t l o n has been shown t o r e q u l r e f e w e r t u n l n g e l e m e n t s and p r o v i d e b e t t e r s t a b i Ii t y than other conf 1gurations.l The t r a n s l s t o r c h o s e n was a b i p o l a r d e v l c e (HXTR 2 0 0 1 ) w l t h 1 8 dB g a i n and 2 dB n o l s e A blpolar translstor f l g u r e a t 1 0 0 0 MHz. t y p l c a l l y e x h i b i t s 1 0 t o 1 5 dB l o w e r p h a s e nofse than a comparable fleld-effect t r a n s l s t o r when u s e d I n an o s c l l l a t o r o f t h l s type.2 A r e s o n a t o r was c h o s e n o v e r a d e l a y I I n e as t h e frequency c o n t r o l l l n g f e e d b a c k e l e m e n t because o f t h e low phase noise requirement. The s i n g l e - p o r t SAW resonator swings I n d u c t i v e a t t h e resonant f r e q u e n c y and i s s e r l e s r e s o n a n t w l t h t h e A v a r a c t o r d l o d e was b a s e c a p a c i t o r , cb. included i n serles wlth capacltor c b i n of order to vary the frequency osclllatlon. The v a r a c t o r d l o d e c h o s e n was an M S I E l e c t r o n i c s M V 1 4 1 2 . Thls dlode a tunlng has a n o m i n a l v a l u e o f 1 0 p f , and a Q o f 2 0 0 a t 1 MHz. r a t l o o f 7.5:1, of the Typical frequency put I I n g osclllator was 40 PPM w i t h a t u n l n g v o l t a g e o f 0 t o +6 v o l t s . The RF o u t p u t power was e x t r a c t e d v l a a t a p p e d I n d u c t o r I n an LC t a n k c l r c u i t on t h e c o l l e c t o r o f the translstor. T h l s a p p r o a c h y l e l d s good o u t p u t power and l o w h a r m o n l c c o n t e n t . SAW 1-PORT RESONATOR VOLTAGE CONTROLLED OSCILLATOR PIERCE COHFIGURATION p” TUHING Pow Figure 1 0090-5607/84/oooO-0191$1 .OO 0 1984 IEEE I - 1984 ULTRASONICS SYMPOSIUM - 191 J . Ladd, C . Abdallah, and T. O'Shea sets the voltage Intercept point and res I stor adjusts t h e voltage slope. These twoR4 components were varied t o achieve the deslred voltage versus temperature c u r v e t o be appl l e d t o t h e varactor dlode I n order t o minlmlze the frequency d r i f t over temperature o f t h e osclllator. IEMEEBAIUBE CQMEENSAIIQN to meet the SAW OSCll lator accuracy of 215 PPM, compensation i s r e q u l r e d f o r t h e f r e q u e n c y drift of the SAW resonator due t o environmental t e m p e r a t u r e c h a n g e s . The well-known temperature dr I f t characterlstlc of a SAW resonator on Is p a r a b o l I C w l t h a frequency quartz maxlmum a t t h e t e m p e r a t u r e t u r n o v e r p o i n t . K 1 nsman3 has d e s c r I bed a Cornpensat I on c l r c ~ l tc o n s l s t l n g o f t w o s e r l e s c o n n e c t e d v a r a c t o r d l o d e s d r l v e n by a I l n e a r v o l t a g e versus temperature generator. Thls approach r e s u l t s I n a technlque t h a t can b e u s e d t o c o m p e n s a t e a n y c r y s t a l which has a parabollc frequency versus t e m p e r a t u r e dependance. In order frequency VOLTAGE VS. TEMPERATURE 0 TEMPERANRE ("C) Figure 3 OSClLLATORCO" The h y b r l d o s c l l l a t o r c l r c u i t development u t l l i z e d Epsliam-10 (E-10) f o r t h e I n i t i a l b r e a d b o a r d d e s i g n and a l u m l n a s u b s t r a t e I n the flnal deslgn. Epsllam-10 Is a ceramic-Impregnated t e f l o n s u b s t r a t e t h a t Is e l e c t r l c a l l y s l m l l a r t o a l u m l n a . I t Is flexible, e a s i l y c u t and d r i l l e d and I s e t c h a b l e In f e r r i c c h l o r l d e 4 s i m l l a r t o t h e o t h e r common PC m a t e r i a l s . The u s e o f c h l p components on the E-10 substrate allowed d l r e c t conversion t o t h e alumlna s u b s t r a t e used I n t h e f l n a l c l r c u l t . CIRCUIT DIAGRAMS -CAPACITANCE VS. VOLTAGE "'l4 W"7.12 CIRCUIT 1 VIM L Y"1.12 P Y U z 6CIRCUIT 9 CI U < 4- - VdC 1 T h e I l m l t e d t e m p e r a t u r e r a n g e o f OOC t o +5OoC a n d t h e r e q u i r e m e n t t o o p e r a t e f r o m a slx-volt battery requlred a modlfled approach t o compensate t h e frequency d r i f t o n o n l y one s l d e o f t h e p a r a b o l l c c u r v e . I n t h l s approach, t h e S A W r e s o n a t o r was f a b r i c a t e d on a q u a r t z s u b s t r a t e w l t h a 36O c u t a n g l e t o p l a c e t h e f r e q u e n c y turnover near the hlgh end of the temperature range. A slngle varactor d l o d e Is u s e d t o c o m p e n s a t e t h e f r e q u e n c y d r l f t on t h e low s l d e o f t h e temperature range. T h i s approach y l e l d s a g r e a t e r capacitance change (and therefore, a greater frequency change) for a glven v o l t a g e range. The c a p a c i t a n c e v e r s u s v o l t a g e curves f o r t h e two approaches a r e s h o w n I n F i g u r e 2. *c CIRCUIT DIAGRAM CIRCUIT 2 ' 8 ~ 4 F""' -1 Figure 2 Klnsman s u g g e s t s t h a t t h e I l n e a r v o l t a g e v e r s u s t e m p e r a t u r e f u n c t l o n r e q u r e d may be obtalned by uslng the ter >erature s e n s l t l v e b a s e - e m l t t e r J u n c t l o n v o l t a g e of a b i p o l a r t r a n s l s t o r connected as a D t amp1 I f l e r In a common-emltter conflguratlon. In order to achleve g r e a t e r s e n s l t l v l t y t o t e m p e r a t u r e change a D a r l l n g t o n p a l r t r a n s l s t o r c h l p (MPSA13) w l t h a c u r r e n t g a l n ( h F E ) o f 5 0 0 0 was used. T h e r e s l s t o r l a b e l e d Rp I n F l g u r e 3 192 - 1984 ULTRASONICS SYMPOSIUM C o n d u c t l v e s i l v e r e p o x y was u s e d t o a t t a c h a1 I c o m p o n e n t s t o t h e s u b s t r a t e . Wlre bondlng was used t o form electrlcal lnterconnectlons between the RF translstor, varactor dlode, temperature sensor translstor, and SAW resonator. A d d l t l o n a l w l r e bonds were used t o a t t a c h Vcc, g r o u n d , a n d t o " t a p " t h e t a n k c l r c u l t f o r RF o u t p u t p o w e r . The I n d u c t o r used I n t h e o s c l l l a t o r Is a p l a n a r s p i r a l d e s l g n and an I n t e g r a l p a r t o f t h e h y b r l d c l r c u l t photomask. The hybrld osclllator Is h o u s e d i n a x 0.75"L x c u s t o m f l a t p a c k t h a t Is 0.30"W 0.085"H. The p a c k a g e has a s t e p p e d I I d t h a t Is s e a m - w e l d e d t o t h e f l a t p a c k . QSCLLAIPB EEBfQBMK€ T h e t e m p e r a t u r e c o m p e n s a t e d SAW o s c l l l a t o r performance Is s u m m a r l z e d I n Table 1. P h a s e n o l s e o f t h e o s c l l l a t o r Is shown I n Figure 4. Typlcal frequency versus temperature for both temperature compensated and uncompensated o s c l l l a t o r s Is s h o w n I n F l g u r e 5 . O u t p u t p o w e r was 0 J . Ladd, C . A b d a l l a h , and T. O'Shea Greater dBm 20.5 d 0 o v e r OOC t o +5OoC. output power may be achieved at the e x p e n s e o f I n c r e a s e d DC p o w e r c o n s u m p t i o n . The f r e q u e n c y a c c u r a c y v e r s u s t e m p e r a t u r e c o u l d be h e l d over a wlder temperature range i f a g r e a t e r supply v o l t a g e were a v a l l a b l e w l t h whlch t o tune t h e varactor dlode. Also, t h e one-port resonator c o u l d b e r e p l a c e d by a t w o - p o r t r e s o n a t o r o r a delay l i n e w i t h a corresponding Increase In phase nolse and increased clrcult comp I e x I t y T h e SAW o n e - p o r t resonator controlled oscillator typically exhlblts 3 0 t o 35 d 0 b e t t e r p h a s e n o l s e t h a n a SAW delay Iine c o n t r o l l e d oscil lator. The TCSO c l r c u l t d l a g r a m I s s h o w n i n F l g u r e 6. TCSO C I R C U I T D I A G R A M . TABLE 1 fVARACTOh I DIODE I TEMPERATURE SENSOR I NETWORK I QSCIUBIQB EEBEQBMMCE PIERCE TYPE OSCILLATOR Figure 5 Frequency 950.0 MHz RF P o w e r 0 dBm 2.5 Accuracy/Stab I I i t y 21 5 ppm Temperature O°C Phase N o i s e - 5 0 d B c / H z @ 1 0 HZ -75 d B c / H z @ 100 Hz -100 dBc/Hz e 1000 HZ dB TCSO FREQUENCY vs. TEMPERATURE t o +5OoC (7= 1 s e c ) A l l a n Variance (0-Y (7-1) 1 x 10-9 Supply Voltage 6 V 50.2 Supply C u r r e n t 15 mA Size .30n Package Custom F l a t p a c k Compenseted'f 10- - 20- E V 30- L a 40- x .75" x .085" 50- 4 -10 TCSO PHASE N O I S E IO 30 TEMPERATURE SO 70 ('C) Figure 6 E L I E B QE5lGN -lZO1 -130f 10 100 OFFSET FROM CARRIER ( H t ) Figure 4 I 1000 In order t o realize a practlcal SAW r e s o n a t o r f i l t e r t h e SAW f i l t e r d e s i g n e r 1) must be concerned w i t h t h e f o l l o w l n g : filter synthesis, 2) analysis, 3) p r a c t l c a l f a b r l c a t l o n parameters, and 4 ) t h e l m p l i c a t l o n s o f packaglng constralnts. M u l t l p o l e SAW r e s o n a t o r f l l t e r s y n t h e s i s and d e s l g n has r e a c h e d a h i g h l e v e l o f m a t u r l t y w l t h t h e work o f Rosenberg and Coldren,' Mattae18 and others.9 The Is a c h l e v l n g low c h a l l e n g e o f o u r work l o s s w i t h m o d e r a t e r e J e c t l o n a t 9 5 0 MHz u t l l l z l n g i n t e g r a t e d m a t c h t n g n e t w o r k s and w l t h l n a s u b m i n l a t u r e package. 1984 ULTRASONICS SYMPOSIUM - 193 J . Ladd, C. Abdallah, and T. O’Shea for the e Ie c t r 1 c a I The goa I s speclflcatlons of t h l s f l l t e r are Ilsted i n T a b l e 2. Uslng these speclflcatlons, It was determlned that a two-pole Butterworth, in-I Ine a c o u s t i c a l l y coupled SAW r e s o n a t o r f l l t e r w o u l d b e a n o p t l m u m cholce. In-line a c o u s t i c c o u p l l n g was chosen s i n c e It is a rellable deslgn technique that can provlde sufflclent bandwidth t o accommodate the various m a n u f a c t u r l n g t o l e r a n c e s and because t h i s c o u p l i n g has been d e m o n s t r a t e d t o a c h l e v e low loss.9 The t e m p e r a t u r e s t a b l l l t y o f t h i s f l l t e r was I m p o r t a n t t o t h e e x t e n t t h a t I t s h o u l d not Increase t h e bandwidth requirement beyond a p r a c t i c a l l y a z h l e v a b l e I l m l t o f 0.2%. T h e r e f o r e , a 40 slngle rotated Y c u t g u a r t z s u b s t r a t e was c h o s e n t o p r o v l d e a 25 C t u r n o v e r t e m p e r a t u r e . 7 Is the predicted frequency Flgure r e s p o n s e o f t h l s f l l t e r i n t h e unmatched s t a t e r e s u l t l n g from a computer model u t i l l z l n g the scatterlng matrix analysis t e c h n l q u e d e s c r i b e d e a r l l e r I s shown. TABLE 2 THEORETICAL FILTER RESPONSE SAM f L I E B ELECIRU;AL SE€ClfU;AIlPA GQMS Frequency 9 5 0 MHZ Bandw I d t h 300 KHz Minlmum 2.5 MHz Maximum I n s e r t i o n Loss ( 6 dB, R e j e c t i o n @ Fo 10 MHz 3 0 dB M l n l m u m T e m p e r a t u r e Range O°C Input/Output 5 0 Ohm, 1 . 5 : 1 Max. -+ -10.0 5 dB G o a l t o 5OoC 3 Package S i z e Impedance VSWR 0.30nx0.24wx 0.06” The design of thls fllter utlllzed a s c a t t e r l n g m a t r l x a n a l y s i s d e v e l o p e d from t h e e a r l l e r w o r k of t h o s e a t S a w t e k 9 b u t is slmllar t o that of Rosenberg and Colderen.’ U s l n g t h l s t e c h n l q u e we w e r e able t o include the effects of the m a t c h l n g and c o u p l i n g e l e m e n t s . T h i s Is lmperatlve since the parasltlcs of these elements have a profound I n f l u e n c e on t h e overall achlevement of the electrical speclflcatlons. The following design p a r a m e t e r s were used I n t h i s a n a l y s i s . Number o f W a v e l e n g t h s / T r a n s d u c e r Aperture ( I n wavelengths) Apodlzatlon Number o f O u t s l d e R e f l e c t o r s Number o f M i d d l e R e f l e c t o r s Metal Thickness = = = = = = 45 100 Overlap 500 150 700A I n o r d e r t o m l n i m l z e t h e In-band r i p p l e t h e t r a n s d u c e r s o f t h l s f 1 I t e r have been apodlze weighted t o mlnlmlze t h e coupllng t o h i g h e r o r d e r t r a n s v e r s e mode. This w e l g h t l n g t e c h n l q u e Is n o t a s e f f e c t l v e I n suppresslng t h e frequency sldelobes o f t h e t r a n s v e r s a l response as t h e apodizatlon/ wlthdrawal technlque descrlbed In R e f e r e n c e 9 b u t i t Is s u f f l c l e n t t o m e e t of thls the electrical speclflcatlons program. 194 - 1984 ULTRASONICS SYMPOSIUM FREQUENCY I M H I ) Figure 7 BESQHAIPB EllIER EBBBlCAIlQli The l i n e w i d t h s o f t h e r e f l e c t o r g r a t i n g s and i n t e r d i g l t a l t r a n s d u c e r p a t t e r n s o f t h l s f i l t e r a r e n o m i n a l l y 0.82 um. The f i l t e r was p a t t e r n g e n e r a t e d a t l o x s i z e u s l n g an e l e c t r o m a s k p a t t e r n g e n e r a t o r a n d t h e n s t e p p e d and r e p e a t e d t o f i n a l s i z e o n a u l t r a f l a t dark chrome photomask p l a t e . The r e p l i c a t i o n o f t h i s photo-mask was accompllshed by c o n t a c t p h o t o l i t h o g r a p h y u s l n g a mid UV l i g h t source. A 700 Anstrom alumlnum f i l m was magnetron s p u t t e r e d on t h e q u a r t z s u b s t r a t e s and a f t e r r e s i s t p a t t e r n l n g t h e excess metal was r e m o v e d b y c h e m i c a l etching. The w a f e r was t h e n d l c e d f o r f i n a l a s s e m b l y . For the lnitlal electrical evaluation these filters were assembled In TO-5 packages and matched with air wound i n d u c t o r s and a d j u s t a b l e c a p a c i t o r s . In the final form these fllters w i l l be packaged In a flatpack configuration s l m l l l a r t o t h a t shown I n F l g u r e 1 1 . The inductors I n t h i s configuration are spiral planar chlps which are Internally m a n u y a c t u r e d a n d t h e c a p a c i t o r s a r e MOS types. € l L I € B €!€B€QBMAli€€ The experlmental unmatched t r a n s m i s s i o n r e s p o n s e Is p l o t t e d I n F l g u r e 8 . Good J . Ladd, C. Abdallah, and T . O'Shea agreement Is obtained between thls a n d the theoretical response shown In Figure 7. The input and output return l o s s are shown on a Smith Chart In Figure 9 a from which a matchlng network Is obtained. RESONATOR MATCHING NETWORK . , - - - two-element matching network wl I I theoretlcally transfer the fllter 50 ohm. characteristlc Impedance to However, the bandwldth a n d lnsertlon loss o f the filter wlII b e extremely sensltlve to the rnanufacturlng tolerances o f the matching elements. To mlnlmlze these effects, a four-element matching network i s chosen as shown on the Smith Chart I n Figure 9b. The matched response is shown ' P Figure 1 0 . The experlmental results of the filter are listed In Table 3 . A EXPERIMENTAL UNMATCHED FILTER RESPONSE . F i g u r e 9b EXPERIMENTAL MATCHED FILTER RESPONSE J INSERTION \ LOSS (dB1 -40*o.- -*,o SI1 2 dUl0lY , -50.0- 947 . INSERTION LOSS (dB1 -60.0- 948.5 950 951.5 953 FREQUENCY (MHd Figure 8 TWO-PORT SAW RESONATOR 947 948.5 950 951.6 FREQUENCY (MHr] 953 F i g u r e 10 TABLE 3 ElLXEB TXEEBlM€dXbL BESULlS FREQUENCY APERTURE (In wavelsngths) TRANSDUCER LENGTH (In wavslsnsthm) APODlZAl" NUMBER OF OUTSIDE REFLECTORS NUMBER OF MIDDLE REFLECTORS METAL THICKNESS SUBSTRATE Figure 9a 950 MHz 100 Frequency 949.9 45 OVERLAP B a n d ki I d t h 900 KHz 500 150 Insert Ion Loss 4.1 Temperature Range 00 VSWR 51.1 roo 8 40" QUARTZ REJECTION @ Fo+10 MHz MHz D0 - 5OoC 27 d 0 1984 ULTRASONICS SYMPOSIUM - 195 J . Ladd, C. Abdallah, and T. O'Shea The f l a t p a c k c o n f i g u r a t i o n o f t h i s f i l t e r Thls figure i s i l l u s t r a t e d i n F i g u r e 11. shows t h e t w o - p o l e SAW f l i t e r c e n t e r e d I n t h e package and on e i t h e r s i d e o f It a r e two spiral inductors and two chip capacitors. The package used i s a custom made f l a t p a c k .30Of1W x . 2 4 0 " L x .085"H. The elements are mounted inside the f l a t p a c k u s i n g a c o n d u c t i v e epoxy. The spiral inductors5 are designed t o d e l i v e r t h e n e c e s s a r y i n d u c t a n c e and f i t i r t h e package. They a l s o s e r v e t o s u p p o r t t h e chip capacitors. The a u t h o r s w i s h to t h a n k E.C. Register and D. Jordan for device testing, B. H o r i n e a n d D r . H. v a n d e V a a r t f o r t h e i r suggestions, B. Laffler for her preparation of the Illustrations, a n d C. Green for her preparation of this manuscript. REFERENCES Frerking, C r y s f x ~ l Ps.Gilla3tsr ~ a P J i 2 H X ~ Y . E . SCQEQSMaIlQn, Van N o s t r a n d R e i n h o l d Co., New Y o r k , 1978, L i b r a r y o f C o n g r e s s C a r d No. 7 7 - 1 7 8 7 6 . 1. H Y B R I D FILTER PACKAGE D.E. Pasign and 2. T. O'Shea, V.Suliivan, R.Kindell, SAW Oscillator for "Precision L-Band S a t e l I i t e Appl i c a t l o n , f f Proc. 3 7 t h Annual S y m p o s i u m on F r e q u e n c y C o n t r o l , U.S. Army ERADCOM, pp 394-404. "Tern p e r a t u r e K In s m a n , 3. R.C. Compensation o f C r y s t a l s w l t h P a r a b o l i c Temperature Coefficients," Proceed1ngs 32nd Annual Symposium on Frequency C o n t r o l , U.S. Army ERADCOM, pp 1 0 2 - 1 0 7 . U OUT U ONO Figure 11 SILMNABI The electrical performance of the SAW r e s o n a t o r c o n t r o l I e d o s c i i I a t o r a n d SAW resonator fllter are shown t o be t h e state-of-the-art f o r components in thls f r e q u e n c y r a n g e and o f t h i s p h y s i c a l s l z e . The c i r c u i t d e s i g n s a r e f l e x i b l e enough t o be t a i l o r e d for other applications or f r e q u e n c i e s i n t h e 2 0 0 MHz t o 1 2 5 0 MHz range. The temperature compensation scheme demonstrates a relatlvely slmple and straight forward means wlth whlch t o c o n t r o l t h e f r e q u e n c y of a SAW o s c l l l a t o r over a l i m i t e d temperature range. f iIter performance The resonator I ow 1nsertion I oss, demonstrates that mlnimum r i p p l e and good r e j e c t i o n c a n b e obtained in this frequency range. A subminiature configuration is suggested whlch includes all Impedance matching elements. A t present t h e flatpack I s consldered t o be t h e s m a l l e s t r e a l i z a b l e c o n v e n t i o n a l t y p e o f package a v a i l a b l e . F u r t h e r work i s underway t o d e v e l o p a method o f s e a i l n g h y b r i d c i r c u i t s i n s l t u b y means of a m u l t l l e v e l CO-fired ceramic r i n g w l t h a seam welded lid. Thls approach is d i r e c t e d a t a c h i e v i n g a p a c k a g e h e i g h t of 0.06 I n c h e s . 196 - 1984 ULTRASONICS SYMPOSIUM 4. W.D. Hutchins, ffMlcrowave Deslgn HighU t i l i z a t i o n w i t h A New N o n - C e r a m i c , D le1e c t r i c Substrate,!$ 1977 Conference P r o c e e d l n g s o f ISHM. 5. S. Gopani, R. Brown, D. Shumate, " I n t e g r a t e d P h a s l n g and M s t c h i n g N e t w o r k s in Printed Form for a Three-phase U n i d i r e c t i o n a l Transducer," Proceedings o f 1 9 8 3 U l t r a s o n i c s Symposium, p p 41-46. 6. N.A. Howard, "GHz T h i c k F i l m H y b r i d SAW Osci I lators," Proceedings of 1983 U l t r a s o n i c Symposium, pp 2 8 3 - 2 8 6 . 7. R.L. Rosenberg, L.A. Coldren, I 1 S c a t t e r i n g A n a l y s i s a n d D e s i g n o f SAW R e s o n a t o r F I l t e r ~ , I~E E~ E T r a n s a c t i o n s on S o n i c s a n d U l t r a s o n i c s , V o l . SU-26, No. 3, May 1 9 7 9 . 8. G.S. Matthael, E.B. Savage and F. SAW Resonator Barman, "Synthesis of F i l t e r s U s i n g Any of Various Coupling Mechanisms," IEEE T r a n s a c t i o n s o n S o n i c s and U l t r a s o n i c s , Vol. SU-26, p p 72-84, March 1978. 9. T. O'Shea, R. Rosenfeld, "SAW With Opt 1m i zed Resonator F II t e r s T r a n s d u c e r R e j e c t i o n , I f P r o c e e d l n g s o f 1981 U l t r a s o n l c s Symposlum, pp 1 0 5 - 1 1 0 .