IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 58, NO. 12, DECEMBER 2011 4241 Asymmetrically Doped FinFETs for Low-Power Robust SRAMs Farshad Moradi, Member, IEEE, Sumeet Kumar Gupta, Student Member, IEEE, Georgios Panagopoulos, Student Member, IEEE, Dag T. Wisland, Member, IEEE, Hamid Mahmoodi, Member, IEEE, and Kaushik Roy, Fellow, IEEE Abstract—We propose FinFETs with unequal source and drain doping concentrations [asymmetrically doped (AD) FinFETs] for low-power robust SRAMs. The effect of asymmetric source/drain doping on the device characteristics is extensively analyzed, and the key differences between conventional and AD FinFETs are clearly shown. We show that asymmetry in the device structure leads to unequal currents for positive and negative drain biases, which is exploited to achieve mitigation of read–write conflict in 6T SRAMs. The proposed device exhibits superior short-channel characteristics compared to a conventional FinFET due to reduced electric fields from the terminal that has a lower doping. This results in significantly lower cell leakage in AD-FinFET-based 6T SRAM. Compared to the conventional FinFET-based 6T SRAM, AD-FinFET SRAM shows 5.2%–8.3% improvement in read static noise margin (SNM), 4.1%–10.2% higher write margin, 4.1%–8.8% lower write time, 1.3%–3.5% higher hold SNM, and 2.1–2.5× lower cell leakage at the cost of 20%–23% higher access time. There is no area penalty associated with the proposed technique. Index Terms—Asymmetric doping, FinFET, SRAM. I. I NTRODUCTION A GGRESSIVE device scaling has led to statistical variability in device parameters and increased short-channel effects (SCEs) [1], [2]. Thinner gate oxide helps to improve the SCEs. However, thinner gate oxide leads to exponentially higher gate leakage. Thus, to overcome SCE, different candidate transistor structures have been investigated to replace the bulk MOSFETs [3]–[10]. Among them, FinFETs are considered to be a promising candidate for scaled CMOS devices in scaled technology nodes. FinFETs show increased immunity to SCE due to improved channel control by the gate voltage [11]. Furthermore, threshold voltage (VTH ) can be easily controlled Manuscript received March 1, 2011; revised August 21, 2011; accepted September 14, 2011. Date of publication October 19, 2011; date of current version November 23, 2011. The review of this paper was arranged by Editor H. S. Momose. F. Moradi is with the Integrated Circuit and Electronics Laboratory, Aarhus School of Engineering, Aarhus University, 8000 Aarhus, Denmark (e-mail: famo@ase.au.dk). S. K. Gupta, G. Panagopoulos, and K. Roy are with the School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47907 USA (e-mail: guptask@purdue.edu; gpanagop@purdue.edu; Kaushik@purdue.edu). D. T. Wisland is with Novelda AS, 0319 Oslo, Norway, and also with the Nanoelectronics Research Group, University of Oslo, 0316 Oslo, Norway (e-mail: dagwis@ifi.uio.no). H. Mahmoodi is with the School of Engineering, San Francisco State University, San Francisco, CA 94132 USA (e-mail: Mahmoodi@sfsu.edu). Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TED.2011.2169678 by engineering the metal gate work function. Moreover, VTH variations due to random dopant fluctuation in the channel region are reduced due to almost intrinsic channel doping [12], [13]. Since memories take up 80% of the die area in highperformance processors, there is a need for high-performance, low-leakage, and highly robust SRAMs [14]. Unfortunately in scaled technologies, particularly under scaled supply voltages, the read and write stabilities of SRAMs are affected by process variations. Due to a large number of small geometry transistors in a memory array, process variations have a significant impact—leading to possible read, write, and access failures, particularly at lower supply voltages. Furthermore, in conventional 6T SRAMs, the conflict between read and write stabilities is an unavoidable design constraint [15] and aggravates the effect of process variations on SRAM stability and performance. One option to improve the conflicting read and write requirements is to decouple the read/write operations, for which researchers have considered new bit cells such as 8T and 10T [16], [17]. However, such cells come with an increased area. Several other techniques have been proposed to improve the 6T SRAM stability, performance, and/or leakage by introducing optimized devices [18]–[28]. Although these techniques improve device characteristics, the tradeoffs are not clearly addressed, and improvement in conflicting read and write margins is marginal. An interesting design option to achieve mitigation of read–write conflict is to introduce asymmetry in the access transistor such that unequal currents flow for positive and negative VDS ’s. One such technique uses asymmetric halo in bulk MOSFETs [27]. However, this leads to aggravation of SCEs and an increase in leakage of the device. For FinFETs, another technique has been proposed in [28] in which asymmetric drain underlap is introduced in the device (by employing asymmetric spacers). In this technique, the drain-induced barrier lowering (DIBL), subthreshold swing (SS), and subthreshold leakage current are improved. However, asymmetric spacer FinFETs may lead to increased variations in such devices. In this paper, we propose to achieve asymmetry in the device by unequally doping the drain and source terminals of FinFETs [asymmetrically doped (AD) FinFETs]. Depending on the device biasing, the proposed modification to the device structure leads to different currents from the source and the drain sides, respectively. Based on that, we design a FinFET SRAM bit cell to simultaneously improve read and write margins in scaled 0018-9383/$26.00 © 2011 IEEE 4242 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 58, NO. 12, DECEMBER 2011 and NDopS ], AD FinFETs exhibit asymmetry in the device characteristics for positive and negative drain-to-source biases (VDS ). In the rest of this paper, the polarity of VDS and the dopant concentrations in the source/drain will be defined by considering the terminal with lower doping as the drain and the other terminal as the source. Therefore, VDS > 0 implies that a higher bias is applied at the terminal with lower doping and drain current (ID ) flows from the terminal with lower doping to that with higher doping. Similarly, VDS < 0 implies that a higher bias is applied at the terminal with higher doping and ID flows from the terminal with higher doping to that with lower doping. Furthermore, lower dopant concentration is represented as NDopD , i.e., NDopD < NDopS for AD FinFETs. In order to understand the effect of asymmetric source/drain doping on the device characteristics, we now present a physicsbased discussion on the device electrostatics, drain current, gate leakage, and capacitance of AD FinFETs. Two-dimensional simulations are performed on AD and SD FinFETs using Taurus [29] to analyze the effect of asymmetric source/drain doping. The device parameters are shown in Table I. For SD FinFETs, NDopD = NDopS = 1020 cm−3 is used. For the discussion in this section, AD FinFETs are simulated with NDopS = 1020 cm−3 and NDopD = 1019 cm−3 . We present the discussion for n-type FinFETs only. This discussion can be extended for p-type FinFETs as well. A. Electrostatics of AD FinFETs Fig. 1. (a) Device structure of AD FinFET. (b) Circuit symbols for n-type and p-type AD FinFETs (the thicker line indicates the terminal with lower doping). (c) Doping profile for asymmetric FinFET device. technologies, thus mitigating the read–write conflict. In addition, AD FinFETs exhibit improved short-channel characteristics (lower DIBL, SS, and subthreshold current), which results in significant reduction in leakage of AD-FinFET SRAM cell. AD-FinFET SRAMs also show improvement in hold stability and write time at the cost of increase in access time with no area penalty. The remainder of this paper is organized as follows. In Section II, we present the proposed asymmetric FinFET, explaining the benefits compared to the conventional symmetric FinFET. AD-FinFET SRAM is introduced in Section III and compared with the conventional FinFET SRAM cell in terms of cell stability, performance, leakage, and area. Finally, the conclusions are drawn in Section IV. II. AD FinFETs Fig. 1 shows the structure and circuit symbols of the proposed AD FinFET. The device structure is similar to a conventional FinFET except for the doping concentrations in the source and drain regions. In a conventional FinFET, the source and drain regions are doped symmetrically. [Henceforth, conventional FinFET is referred to as symmetrically doped (SD) FinFET.] On the other hand, the source and drain regions of AD FinFETs are doped differently, such that one of the terminals (defined as drain in Fig. 1) has a lower dopant concentration than the other terminal (source in Fig. 1). Due to unequal dopant concentrations in the two terminals [Fig. 1(c)NDopD Fig. 2 shows the conduction band profiles for n-type AD and SD FinFETs at gate voltage (VG ) = 0 V and VDS = 0, 0.9, and −0.9 V. For VDS = 0 V, AD FinFETs show the conduction band edge in the drain region (ECD ) at a higher energy than that in the source region (ECS ). This is due to the fact that NDopD < NDopS , which implies that (EF − ECD ) < (EF − ECS ). (Here, EF is the Fermi level in the source and drain regions at VDS = 0 V). Fig. 2 also shows a wider depletion region on the drain side. At VDS = 0.9 V, a significant improvement in DIBL can be observed for AD FinFETs compared to SD FinFETs. This is due to reduced electric fields from the drain terminal due to the wider depletion region. Even at VDS = −0.9 V (i.e., VD = 0 and VS = 0.9 V), DIBL improvement can be observed. However, the improvement is less compared to VDS = 0.9 V since the drain bias is applied at the terminal with a higher dopant concentration. (Note that DIBL is defined as the lowering of the barrier on the side of the terminal with the lower bias induced by the terminal at the higher bias. For VDS > 0, DIBL is induced by the terminal with lower doping, defined as drain in Fig. 1, while for VDS < 0, DIBL is induced by the terminal with higher doping, defined as source in Fig. 1.) Fig. 2(a) also shows that the barrier height for AD FinFETs is more compared to SD FinFETs, which implies lower OFF current, which we shall discuss in the next section. It may be mentioned that improvement in SCEs in AD FinFETs is not due to the asymmetry in the device but because of lower electric fields from the terminal with lower doping. Fig. 3 shows the conduction band profiles for AD and SD n-type FinFETs at VG = 0.9 V for positive and negative VDS ’s. While SD FinFETs exhibit symmetric conduction band profiles MORADI et al.: ASYMMETRICALLY DOPED FinFETs FOR LOW-POWER ROBUST SRAMs 4243 TABLE I D EVICE PARAMETERS Fig. 3. Conduction band profiles of SD and AD FinFETs for positive and negative VDS ’s at VG = 0.9 V (SD: NDopS = NDopD = 1020 cm−3 ; AD: NDopS = 1020 cm−3 and NDopD = 1019 cm−3 ). Fig. 2. Conduction band profiles of SD and AD FinFETs for (a) positive and (b) negative VDS ’s at VG = 0 V (SD: NDopS = NDopD = 1020 cm−3 ; AD: NDopS = 1020 cm−3 and NDopD = 1019 cm−3 ). for VDS = 0.9 and −0.9 V, asymmetry in the conduction band profiles for AD FinFETs can be observed. The effect of increase in the drain resistance due to lower doping is manifested in the conduction band profile by more gradual (less sharp) band bending in the drain region. The asymmetry in the conduction band profiles shown in Fig. 3 results in asymmetry in the drain and gate currents at positive and negative VDS ’s, which we discuss next. B. Current–Voltage Characteristics of AD FinFETs Fig. 4 shows the drain current (ID ) versus VG characteristics of n-type AD and SD FinFETs. For VDS > 0, AD FinFETs exhibit 10× reduction in subthreshold current (ISUB ), 2.5× reduction in DIBL, and 14% reduction in SS compared to SD FinFETs. Improvement in short-channel characteristics is obtained due to lower drain doping and, hence, reduced electric field lines from the drain terminal affecting the source barrier. Lower ISUB is due to higher source barrier, as is evident from Fig. 2. For VDS < 0 (i.e., VD = 0 and VS = −VDS ), 3.5× reduction in ISUB , 1.7× reduction in DIBL, and 4% reduction in SS are achieved compared to SD FinFETs. Improvement in subthreshold characteristics of AD FinFETs comes at the cost of ON current (ION ), which can also be seen in Fig. 5. AD FinFETs show 7% and 36% degradations in ION with respect to SD FinFETs for VDS > 0 and VDS < 0, respectively. Reduction in ION for VDS > 0 can be attributed to the increase in drain resistance due to lower NDopD . For VDS < 0, degradation in ION is higher because the terminal which acts as the source for the carriers (electrons, in this case) has a lower doping and lower carrier concentration in its vicinity which leads to reduction in current. The asymmetry in ID for positive and negative VDS ’s is evident in Fig. 5, and this property of AD FinFETs is exploited to achieve mitigation in read–write conflict in SRAMs, as will be discussed in the next section. The differences in current–voltage characteristics of AD and SD FinFETs are summarized in Fig. 6. C. Gate Leakage in AD FinFETs Gate current (IG ) characteristics of AD and SD FinFETs are shown in Fig. 7. IG has two components—direct tunneling 4244 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 58, NO. 12, DECEMBER 2011 Fig. 6. Comparison of device characteristics of AD and SD FinFETs (SD: NDopS = NDopD = 1020 cm−3 ; AD: NDopS = 1020 cm−3 and NDopD = 1019 cm−3 ). Fig. 4. Transfer characteristics of AD and SD FinFETs for (a) positive VDS and (b) negative VDS ’s (SD: NDopS = NDopD = 1020 cm−3 ; AD: NDopS = 1020 cm−3 and NDopD = 1019 cm−3 ). Fig. 7. (a) IG –VG and (b) IG –VDS for AD and SD FinFETs (SD: NDopS = NDopD = 1020 cm−3 ; AD: NDopS = 1020 cm−3 and NDopD = 1019 cm−3 ). channel. On the other hand, IET is dominant for VGS < VTH . Let us discuss each of these cases one by one. For high VGS , AD FinFETs show higher IG at VDS = 0.9 V [Fig. 7(a)]. This can be explained by considering the following relationship between gate voltage and surface potential (ψS ): VGS = ψS + EOX ∗ tOX . Fig. 5. Output characteristics of AD and SD FinFETs for (a) positive VDS and (b) negative VDS ’s (SD: NDopS = NDopD = 1020 cm−3 ; AD: NDopS = 1020 cm−3 and NDopD = 1019 cm−3 ). current (IDT ) and edge tunneling current (IET ). For VGS > VTH (VTH is the transistor threshold voltage), IDT is the dominant component of IG due to high carrier concentration in the (1) Here, EOX is the electric field in the gate dielectric and tOX is the oxide thickness. From Fig. 3, it can be observed that the conduction band edge in the channel for AD FinFET is higher than that for SD FinFET at VDS = 0.9 V. This implies lower ψS in the channel region (which is negative of conduction band in electronvolts) and, hence, higher EOX , as suggested by (1). Higher EOX leads to larger IDT and higher IG . At VDS = −0.9 V, the conduction band edge for AD FinFET is MORADI et al.: ASYMMETRICALLY DOPED FinFETs FOR LOW-POWER ROBUST SRAMs Fig. 8. 4245 Variation of ION −IOFF ratio with (a) tSi (b) tOX , and (c) LG for AD and SD FinFETs. lower, which implies higher ψS , lower EOX , and lower IG , as can be observed in Fig. 7(a) at high VG . At VDS = 0 V, ψS for SD and AD FinFETs are similar, which results in similar IG . Fig. 7(b) shows that, as |VDS | increases, the difference between IG ’s for AD and SD FinFETs increases. For low VGS , AD FinFETs exhibit lower IG for VDS = 0.9 V [Fig. 7(a)]. This is because the dominant component IET flows between gate and drain (terminal at a higher bias), and since drain has a lower doping and a reduced carrier concentration, reduction in IET and IG is achieved. For VDS < 0 (VD = 0 and VS = −VDS ), IET flows between the gate and the terminal with higher doping (which is the same as in SD FinFETs). Hence, AD and SD FinFETs show similar IET and IG for VDS < 0. D. Effect of Parameter Variations on Device Characteristics In this section, we investigate the impact of variations in device parameters like silicon body thickness (tSi ), gate oxide thickness (tOX ), and gate length (LG ) on the characteristics of AD and SD FinFETs. We vary the device parameters around its nominal value (listed in Table I) and evaluate the degradation of ION − IOFF ratio with respect to each parameter. (Note that the OFF current IOFF is the sum of subthreshold current ISUB and gate current (IG ) at VG = 0 V and |VDS | = 0.9 V). In order to quantify the increase in ION −IOFF ratio over its nominal value due to variation in device parameter (x—where x is tSi , tOX , and LG ), we define degradation in ION −IOFF ratio (D) as ION ION ION nom IOF /nom IOF F − min IOF F F D= . (2) |ext(x) − min(x)| /nom(x) Here, max, ext, and nom refer to maximum, extreme, and nominal values of their arguments. Note that the extreme value is the maximum or minimum value of the parameter which results in minimum ION −IOFF ratio. D, as defined in (2), indicates the percent degradation in ION −IOFF ratio for 1% change in the device parameter with respect to its nominal value. Fig. 8 shows the plot of ION −IOFF ratio versus the device parameters. It can be observed that AD FinFETs exhibit consistently higher ION −IOFF ratio compared to SD FinFETs for VDS > 0 and comparable ION −IOFF ratio for VDS < 0 for a range of tSi , tOX , and LG due to superior short-channel characteristics of AD FinFETs. Also note that, as tSi and tOX decrease or LG increases, ION −IOFF ratio for AD FinFETs with VDS < 0 approaches that of SD FinFETs. This is because, as tSi and tOX decrease or LG increases, ISUB starts to decrease exponentially while IG is either relatively insensitive (e.g., with respect to tSi and LG ) or increases exponentially (e.g., with respect to tOX ). As a result, for small tSi , small tOX , and large LG , IG starts to dominate IOFF . Recall that the IG at VG = 0 and |VDS | = 0.9 V is similar for SD and AD FinFETs when VDS < 0, while ION is relatively lower for AD FinFETs. Hence, ION −IOFF ratio for AD FinFETs (VDS < 0) starts to approach that of SD FinFETs for small tSi , small tOX , and large LG . On the other hand, for VDS > 0, AD FinFETs have lower IG at VG = 0 and |VDS | = 0.9 V compared to SD FinFETs and hence show higher ION −IOFF ratio across the entire range of parameters. Let us now compare the degradation in ION −IOFF ratio of AD and SD FinFETs due to the variation in the device parameters. Fig. 8 shows the degradation of ION −IOFF ratio with increasing tSi , increasing tOX , and decreasing LG due to degradation of SCEs. Since AD FinFETs exhibit superior shortchannel characteristics compared to SD FinFETs, the effect of variation in device parameters is reduced. SD FinFETs show 3.87%, 3.74%, and 3.98% degradations in ION −IOFF ratio for 1% tSi , tOX , and LG variations, respectively. AD FinFETs show 3.63%, 3.44%, and 3.88% degradations in ION −IOFF ratio for VDS > 0 and 3.47%, 5.4%, and 3.92% degradations in ION −IOFF ratio for VDS < 0 for 1% variations in tSi , tOX , and LG , respectively. Higher variation with respect to tOX in AD FinFETs at VDS < 0 compared to SD FinFETs is due to the effect of the gate current, as described previously in this section. Fig. 8(c) shows another important advantage of AD FinFETs. As LG is scaled, larger improvement in ION −IOFF ratio of AD FinFETs with respect to SD FinFETs is observed. Hence, the proposed technique provides an alternate method to control SCEs in scaled technology nodes, at which other device design techniques like scaling of fin thickness and oxide thickness may be challenging due to quantum mechanical effects and increase in gate leakage, respectively. E. Comparison With Previously Proposed Asymmetric MOSFETs In this section, we compare AD FinFETs with the MOSFETs with asymmetric halo proposed in [27] and FinFETs with asymmetric drain underlap proposed in [28]. In [27], MOSFETs with 4246 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 58, NO. 12, DECEMBER 2011 Fig. 9. Schematic of AD-FinFET-based 6T SRAM showing voltages at different nodes during (a) read operation and (b) write operation and (c) thin-cell layout of AD-FinFET-based SRAM. asymmetric halo suffer from increased SCEs compared to the conventional MOSFETs. On the other hand, AD FinFETs show significant improvement in SCEs compared to SD FinFETs. The asymmetric FinFETs proposed in [28] show improvement in SCEs like AD FinFETs compared to conventional FinFETs. However, introducing asymmetric underlap in FinFETs is much more challenging from the point of view of fabrication than doping the source and drain terminals with different dopant concentrations. Although both AD FinFETs and the FinFETs proposed in [28] require an extra mask, AD FinFETs are much simpler to fabricate. With the understanding of the device characteristics of AD FinFETs discussed in this section, let us now present AD-FinFET-based 6T SRAMs and evaluate their benefits over conventional FinFET 6T SRAMs. III. AD-FinFET-BASED 6T SRAM Fig. 9 shows the schematic of the proposed AD-FinFETbased 6T SRAM (during read and write operations) along with the thin-cell layout. The thick line on the transistors indicates the terminal with lower doping. Note that, for the pull-down (NL and NR) and access transistors (AXL and AXR), the terminals with lower doping are connected to the same nodes (the storage nodes). Hence, the contacts of access transistors can be shared with those of the corresponding pull-down transistors [Fig. 9(c)], as in conventional FinFET SRAMs. Thus, there is no area penalty associated with the proposed technique. Let us now discuss the operation of AD-FinFET SRAM and explain the mitigation of read–write conflict achieved by exploiting the asymmetry. A. Cell Operation During the read operation, bitlines BL and BLB are precharged to the power supply voltage (VDD ). Let us assume (without any loss of generality) that node “Q” stores “0” and “QB” stores “1.” On asserting the wordline, the voltage at node “Q” (VQ ) rises to a positive voltage VREAD , which depends on the resistive divider action of AXL and NL. Read failure may occur if VREAD becomes greater than the trip point (VM ) of the inverter formed by AXR, NR, and PR. Hence, for higher read stability, low strength of the access transistors is desired. During the write operation, BL is precharged to VDD , and BLB is discharged to GN D. On asserting the wordline, the voltage at QB (VQB ) is discharged to a voltage VWRITE depending on the resistive divider action of PR and AXR. If VWRITE is less than VM of the inverter formed by PL and NL, write operation occurs successfully. For superior write ability, high strength of AXR is desired. Note the conflicting requirements for the strength of the access transistor in a conventional FinFET SRAM for high read and write stabilities. In AD-FinFET-based SRAM, mitigation of the aforementioned read–write conflict is achieved. During the read operation of AD-FinFET SRAM [Fig. 9(a)], the terminal of AXL with the lower doping (indicated by the thick lines) is at a lower voltage than the other terminal (i.e., VDS < 0 for AXL; recall in Section II that the terminal with the lower doping was defined as the drain). Hence, the strength of AXL is reduced (see Figs. 5 and 6), which lowers VREAD and increases the read stability. During the write operation of AD-FinFET SRAM [Fig. 9(b)], the terminal of AXR with a lower doping concentration (drain) is at a higher voltage than the other terminal (source), i.e., VDS > 0. Therefore, the strength of AXR is larger (see Figs. 5 MORADI et al.: ASYMMETRICALLY DOPED FinFETs FOR LOW-POWER ROBUST SRAMs 4247 Fig. 10. (a) Read SNM and write margin. (b) Hold SNM and cell leakage. (c) Cell write time and access time versus drain doping (NDopD ). NDopD = 1020 cm−3 corresponds to SD FinFET SRAM. The rest of the points on the x-axis are for AD-FinFET SRAMs with different values of drain doping. Fig. 11. (a) Read SNM, (b) write margin, (c) hold SNM, (d) cell access time, (e) cell write time, and (f) cell leakage versus VDD . (SD FinFET SRAM: NDopS = NDopD = 1020 cm−3 ; AD-FinFET SRAM: NDopS = 1020 cm−3 and NDopD = 2 × 1019 cm−3 ). and 6), which results in higher write ability. The mitigation of read–write conflict in AD-FinFET SRAMs comes at the cost of larger access time due to weak access transistors during the read operation. Let us now quantify the stability, performance, and leakage of an AD-FinFET SRAM and compare it with a conventional (SD) FinFET SRAM. We simulate AD-FinFET SRAMs with different drain dopant concentrations (NDopD ) less than the source doping (NDopS = 1020 cm−3 ). For SD FinFET, NDopD = NDopS = 1020 cm−3 . B. Comparison of AD and SD FinFET SRAMs Fig. 10(a) shows the read static noise margin (SNM) versus NDopD . An increase ranging from 2.1%–7.3% in read SNM can be observed for AD-FinFET SRAM compared with SD FinFET SRAM (corresponding to NDopD = 1020 cm−3 ). At the same time, 2.9%–23% improvement in write margin [30] is achieved for AD FinFETs [Fig. 10(a)], thus resulting in the mitigation of read–write conflict. In addition, due to superior short-channel characteristics of AD FinFETs, 0.5%–1.3% increase in hold SNM and 1.3–2.8× reduction in cell leakage can be observed [Fig. 10(b)]. Improvement in cell write time ranging from 3%–12% is also achieved [Fig. 10(c)] due to lower NDopD and, hence, lower capacitance at the storage nodes in AD-FinFET SRAM compared to SD FinFET SRAM. Fig. 10(c) also shows the 6%–42% higher cell access time, which is due to weaker access transistor during read. To sum up, AD-FinFET SRAM shows simultaneous improvement in the read stability, write ability, cell write time, hold stability, and cell leakage at the cost of increase in the access time. There is no area penalty associated with the proposed technique [Fig. 9(c)]. C. Analysis Across a Range of VDD ’s In this section, we compare SD FinFET SRAM (NDopD = NDopS = 1020 cm−3 ) with AD-FinFET SRAM (NDopD = 2 × 1019 cm−3 and NDopS = 1020 cm−3 ) across a range of supply voltages (0.6–0.9 V). Fig. 11 shows the comparison 4248 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 58, NO. 12, DECEMBER 2011 of read SNM, write margin, hold SNM, cell leakage, cell access time, and cell write time for different VDD ’s. Compared with SD FinFET SRAM, AD-FinFET SRAM shows 5.2%–8.3% higher read SNM, 4.1%–10.2% higher write margin. 1.3%–3.5% improved hold SNM, 2.1–2.5× lower cell leakage, and 4.1%–8.8% lower cell write time at the cost of 20%–23% larger cell access time. The benefits of AD-FinFET SRAM in terms low power and high cell stability are evident across a range of VDD ’s. IV. C ONCLUSION We have proposed AD FinFETs in which the source and drain regions are doped with different dopant concentrations. Asymmetry in the device structure results in unequal currents for positive and negative drain biases, which is exploited to achieve mitigation of read–write conflict in 6T SRAMs. AD FinFETs also show superior short-channel characteristics, viz., lower DIBL, reduced SS, and lower subthreshold current. As a result, AD-FinFET SRAMs show significant reduction in cell leakage and increase in hold stability. Simultaneous improvement in read stability, write ability, cell write time, hold stability, and cell leakage is achieved for AD-FinFET SRAMs compared to conventional SD FinFET SRAMs, at the cost of increase in cell access time. There is no increase in the cell area of AD-FinFET SRAMs compared to SD FinFET SRAMs. R EFERENCES [1] International Technology Roadmap for Semiconductors, 2006. [2] K. Bernstein, D. J. Frank, A. E. Gattiker, W. Haensch, B. L. Ji, S. R. 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Farshad Moradi (S’09–M’11) received the B.S. degree in electrical engineering from Isfahan University of Technology, Isfahan, Iran, in 2001, the M.S. degree in electrical engineering from Ferdowsi University of Mashhad, Mashahd, Iran, in 2005, and the Ph.D. degree from the University of Oslo, Oslo, Norway, in 2011. From 2005 to 2008, he was a Senior Lecturer with Ilam University, Ilam, Iran. From 2009 to 2010, he visited the Nanoelectronic Laboratory, Purdue University, West Lafayette, IN. He is currently an Assistant Professor with the Integrated Circuit and Electronics Laboratory, Aarhus School of Engineering, Aarhus University, Aarhus, Denmark. His current research interests include ultralow-power digital/memory circuit/device design for low-power applications. MORADI et al.: ASYMMETRICALLY DOPED FinFETs FOR LOW-POWER ROBUST SRAMs Sumeet Kumar Gupta (S’05) received the B.Tech degree in electrical engineering from the Indian Institute of Technology, Delhi, India, in 2006 and the M.S. degree in electrical and computer engineering from Purdue University, West Lafayette, IN, in 2008, where he is currently working toward the Ph.D. degree in the School of Electrical and Computer Engineering. In 2007, he was an intern with Advanced Micro Devices Inc. In 2010, he was a summer intern with Intel Corporation, Hillsboro, OR. His research interests include nanoscale device modeling and low-power digital circuit design. Mr. Gupta was the recipient of the Magoon Award and the Outstanding Teaching Assistant Award from Purdue University in 2007 and the Intel Ph.D. Fellowship Award in 2009. Georgios Panagopoulos (S’05) received the Diploma degree (with honors) in computer and communication engineering from the University of Thessaly, Volos, Greece, in 2006. Since 2007, he has been working toward the Ph.D. degree in electrical and computer engineering in the School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN. From 2006 to 2007, he was a Research Assistant with the University of Thessaly, Greece, where he designed analog circuits. He was a summer intern with Intel Corporation in 2011. His current research interests include very large scale integration device/circuit codesign for nanoscaled silicon and nonsilicon technologies for reliable and low-power applications. Mr. Panagopoulos has received Academic Excellence Awards and several scholarships during his studies. Dag T. Wisland (M’00) received the M.Sc. and Dr.Sc. degrees in electrical engineering from the University of Oslo, Oslo, Norway, in 1996 and 2003, respectively. He is a Cofounder and currently the CEO of the fabless semiconductor company Novelda AS, Oslo, and is also a part-time Associate Professor with the Nanoelectronics Group, University of Oslo. From 2004 to 2008, he was heading the Nanoelectronics Research Group, University of Oslo. His current research interests include low-power analog/mixedsignal CMOS design, ultrawideband radio, and design of ADC/DAC with a particular focus on delta–sigma data converters. In his research, he has focused on conceptually new methods and topologies combined with low-power design. Dr. Wisland is a TC member of the IEEE CAS Society Analog Signal Processing and Biomedical Circuits and Systems technical committees. 4249 Hamid Mahmoodi (S’00–M’05) received the B.S. degree in electrical engineering from Iran University of Science and Technology, Tehran, Iran, in 1998, the M.S. degree in electrical and computer engineering from the University of Tehran, Tehran, in 2000, and the Ph.D. degree in electrical and computer engineering from Purdue University, West Lafayette, IN, in 2005. He is currently an Associate Professor of electrical and computer engineering with the School of Engineering, San Francisco State University, San Francisco, CA. His research interest includes low-power, reliable, and high-performance circuit design for nanoscale technologies. He has many publications in journals and conferences and is the holder of five U.S. patents. Dr. Mahmoodi was a recipient of the 2008 SRC Inventor Recognition Award, the 2006 IEEE Circuits and Systems Society VLSI Transactions Best Paper Award, the 2005 SRC Technical Excellence Award, and the Best Paper Award of the 2004 International Conference on Computer Design. He is a technical program committee member of the International Symposium on Low Power Electronics Design and the International Symposium on Quality Electronics Design. Kaushik Roy (F’02) received the B.Tech. degree in electronics and electrical communications engineering from the Indian Institute of Technology (IIT), Kharagpur, India, and the Ph.D. degree from the Electrical and Computer Engineering Department, University of Illinois, Urbana, in 1990. He was with the Semiconductor Process and Design Center, Texas Instruments, Dallas, where he worked on FPGA architecture development and lowpower circuit design. He was a Research Visionary Board Member of Motorola Laboratories (in 2002) and held the M. K. Gandhi Distinguished Visiting Faculty at IIT, Bombay, India. Since 1993, he has been with the School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, where he is currently a Professor and holds the Roscoe H. George Chair of Electrical and Computer Engineering. He is Purdue University Faculty Scholar. He has published more than 500 papers in refereed journals and conferences, is the holder of 15 patents, has graduated 51 Ph.D. students, and is the coauthor of two books on Low Power CMOS VLSI Design (John Wiley and McGraw Hill). His research interests include spintronics, VLSI design/CAD for nanoscale silicon and nonsilicon technologies, low-power electronics for portable computing and wireless communications, VLSI testing and verification, and reconfigurable computing. Dr. Roy has been in the editorial board of the IEEE D ESIGN AND T EST, IEEE T RANSACTIONS ON C IRCUITS AND S YSTEMS, and IEEE T RANSAC TIONS ON VLSI S YSTEMS . He was a Guest Editor for the Special Issue on Low-Power VLSI in the IEEE D ESIGN AND T EST (in 1994), IEEE T RANSAC TIONS ON VLSI S YSTEMS (in June 2000), and IEE Proceedings—Computers and Digital Techniques (in July 2002). He was a recipient of the National Science Foundation Career Development Award in 1995, IBM Faculty Partnership Award, ATT/Lucent Foundation Award, the 2005 SRC Technical Excellence Award, SRC Inventors Award, Purdue College of Engineering Research Excellence Award, Humboldt Research Award in 2010, the 2010 IEEE Circuits and Systems Society Technical Achievement Award, Distinguished Alumnus Award from IIT, Kharagpur, the 2005 IEEE Circuits and System Society Outstanding Young Author Award (with Chris Kim), the 2006 IEEE T RANSACTIONS ON VLSI S YSTEMS Best Paper Award, and the Best Paper Awards at the 1997 International Test Conference, the 2000 IEEE International Symposium on Quality of IC Design, the 2003 IEEE Latin American Test Workshop, the 2003 IEEE NANO, the 2004 IEEE International Conference on Computer Design, and the 2006 IEEE/ACM International Symposium on Low Power Electronics and Design.