Experimental Verification of Role of Ballast Resistors in SiGe Power HBTs by Yuanyuan Yang A project report submitted in partial fulfillment of the requirements for the degree of Master of Science (Electrical Engineering) at the UNIVERSITY OF WISCONSIN–MADISON 2011 i ACKNOWLEDGEMENTS I would like to express my great gratitude to my advisor Prof. Zhenqiang (Jack) Ma. It is a precious experience to receive guidance from him. He gave me a lot of support, encouragement and valuable advice during my two-year graduate school study. I would like to thank my research-mentor Namki Cho. He taught me a lot, including all the use of facilities and research tools. As a mentor, he showed me to learn how to do research work and how to solve problems. He also contributes a lot to this thesis. I would like to thank all the other group members and friends: Gui Gui, Jung-Hun Seo, Kan Zhang, Hongyi Mi, Tzu-Hsuan Chang, Munho Kim and Han Zhou. They gave me a lot of help and advice, and their support makes my graduate life more enjoyable. I am most grateful to my parents who support my every decision in my life, not only financially but also spiritually. They gave me all the courage and care I need to finish my academic life. Their proud and smile are the greatest reward for me. ii ABSTRACT To prevent the dramatic degradation of the device performance of SiGe power heterojunction bipolar transistors (HBTs) and maintain the power efficiency, emitter-ballast resistors and base-ballast resistors have been employed in high power bipolar transistors. The microwave performance of emitter-ballast and base-ballast HBTs has been compared and discussed empirically in the previous work. However, it has not been clearly pointed out that which ballasting scheme should be judiciously employed over the entire useful frequency range and under different operation configurations, in order to extract the maximum RF power performance from power devices. This thesis analyzes the role of ballast resistors in SiGe power HBTs theoretically and experimentally. No-ballast resistors, emitter-ballast resistors and base-ballast resistor in both of common-emitter (CE) and common-base (CB) all have been evaluated separately. iii TABLE OF CONTENTS ACKNOWLEDGEMENTS ............................................................................................ i ABSTRACT ...................................................................................................................ii Chapter I Introduction of SiGe HBT power amplifiers ................................................. 1 1. History of SiGe ................................................................................................ 1 2. Principles of SiGe HBTs .................................................................................. 5 Chapter II Previous work on ballast implementations on power performance of SiGe power HBTs ................................................................................................................... 9 1. Introduction ...................................................................................................... 9 2. Influence of ballast resistors on small-signal RF performance of common-emitter SiGe HBTs................................................................................. 11 3. Influence of ballast resistors on common-base SiGe HBTs ........................... 15 Chapter III Simulations and measurements of ballast resistor implementation under common-base configuration......................................................................................... 17 1. Expression for power gain of CB SiGe HBTs in different frequency ranges 17 2. Simulation for power gain of CB SiGe HBTs ............................................... 26 3. Measurement for power gain of CB SiGe HBTs ........................................... 29 Chapter IV Conclusion ................................................................................................ 31 Bibliography ................................................................................................................ 32 1 Chapter I Introduction of SiGe HBT power amplifiers 1. History of SiGe At the 1950s, Shockley and Kroemer have raised the theory of hetero-junction bipolar transistors (HBTs) and band-gap engineering first [1]. However, the fabrication of HBTs was stagnated for 30 years until the epitaxial growth of hetero-structures was obtained. At that time, HBTs were limited to expensive III-V material systems, until the late 1980s the epitaxial growth technique of SiGe/Si structures was used to enable the device fabrication of Si-based HBTs, including SiGe HBTs, which also present the first practical bandgap-engineered transistors in the Si material system. The first SiGe HBT was developed by IBM in December of 1987 [2], with the molecular beam epitaxy (MBE) growth technique, shortly followed by CVD growth technique. Since then, other groups developed more SiGe HBT demonstrations. In June of 1990, the demonstration of a non-self-aligned SiGe HBT, which is grown by ultra-high vacuum/chemical vapor deposition (UHV/CVD) and also with a peak cut-off frequency of 75 GHz, has caught the world’s attention [3, 4]. The performance of this SiGe HBT was almost twice as much as that of Si BJTs. The first SiGe BiCMOS technology was developed in December of 1992 [5], where the new SiGe HBTs were integrated with CMOS process. Considering the low cost and high 2 integration of Si CMOS and the high speed performance of SiGe HBTs, SiGe BiCMOS meet the demands of many different circuit and system applications, such as digital, analog, mixed-signal and RF/microwave applications. Many researchers have been developing SiGe HBT technology facilitating the design and fabrication for high performance RF/microwave circuits, and enable the fast development of SiGe HBT technology. Currently, the performance of high-speed low-power SiGe HBTs is very competitive to that of III-V devices, especially due to aggressive lateral and vertical downscaling of device dimension. Since 2004, IBM researchers first published the SiGe HBT with both peak cutoff frequency (fT) and peak maximum oscillation frequency (fmax) higher than 300 GHz [6, 7], and the technology has been commercialized. Historical events in the development of SiGe HBTs have been listed in Table 1.1, and historical trends in the peak fT and fmax for integrated Si bipolar junction transistor (BJT), SiGe HBT and SiGeC HBT technologies are plotted in Fig. 1.1, Fig. 1.2, and Fig. 1.3, respectively. 3 Historical event Year Fundamental HBT patent 1951 Drift-base HBT concept 1954 Basic HBT theory 1957 First growth of SiGe strained layers 1975 First growth of SiGe epitaxy by MBE 1985 First growth of SiGe epitaxy by UHV/CVD 1986 First SiGe HBT 1987 First ideal SiGe HBT grown by CVD 1989 First high-performance SiGe HBT 1990 First self-aligned SiGe HBT 1990 First SiGe HBT ECL ring oscillator 1990 First pnp SiGe HBT 1990 First SiGe HBT BiCMOS technology 1992 First LSI SiGe HBT Integrated Circuit 1993 First SiGe HBT with peak fT above 100 GHz 1993 First SiGe HBT technology in 200-mm manufacturing 1994 First SiGe HBT technology optimized for 77K 1994 First SiGeC HBT 1996 First high power SiGe HBT 1996 First sub-10 psec SiGe HBT ECL circuit 1997 First SiGe HBT with peak fT above 200 GHz 2001 First SiGe HBT with both peak fT and peak fmax above 300 GHz 2004 Table 1.1 Key steps in the evolution of SiGe HBT technology. [5, 6, 7] 4 Fig 1.1 Historical trends in peak cutoff frequency fT for integrated self-aligned SiGe HBT and SiGeC HBT techenologies. [5] Fig 1.2 Historical trends in peak maximum oscillation frequency fmax for integrated self-aligned SiGe HBT and SiGeC HBT technologies. [5] 5 Fig 1.3 Maximum oscillation frequency fmax versus cutoff frequency fT for different SiGe HBT technology generations. [5] 2. Principles of SiGe HBTs As with the base CMOS technologies, for higher speed and reduced power consumption, each HBT generation has moved toward smaller sizes. In this section we will take the IBM SiGe HBT as an example, discusses importance of employing SiGe HBT. The improvement in device performance can be shown by comparing the energy band diagram of a SiGe HBT to that of a conventional Si BJT [8], as shown in Fig. 1.5. 6 Fig. 1.4 Cross-sectional schematic of a first-generation SiGe HBT. [9] Fig. 1.5 Energy band diagram of a graded-base SiGe HBT compared to a Si BJT. [9] 7 There is significant importance to use SiGe heterostructure. Firstly, because the band-gap offset between emitter and base is intentionally introduced, the energy barrier height for electrons injecting from emitter to base is lowered. Secondly, since bandgap offset reduces the intrinsic carrier density in base region, the collector current density is increased. Consequently, the current gain β is exponentially increased comparing with the homojunction counterpart. While, by using a graded Ge profile, it can improve the output conductance and early voltage VA. Therefore, for a SiGe HBT, the β-VA product, which is an important figure of merit for analog applications, is significantly improved over a comparable Si BJT. What’s more, because of high β, the extremely high base doping concentration is allowed to reduce the base resistance RB, therefore the frequency response which is heavily dependent on RB can be improved. 1/f and board-band noise is also reduced because of the high base doping concentration. With the improvement of the epitaxial growth technique and device structure optimization, the performance of SiGe HBTs has been highly improved. For RF performance, another important figure of merit is the cutoff frequency fT. The base transit time τb limits the maximum fT of a transistor. The built-in electric field, which is introduced by the graded Ge profile across the neutral base region, helps the transport of electron from emitter to collector and effectively decreases τb. Additionally, the emitter transit time τe is reciprocally related to β of the transistor, and therefore greatly reduce τe of SiGe HBTs. The result is the peak fT of a SiGe HBT will improve dramatically over a comparable Si BJT. 8 Although the structure of the majority of the commercial SiGe HBT is as similar as shown above, the other type of device structure with low-to-high emitter-to-base doping profile is also available. This type of SiGe HBTs takes advantage of low base resistance due to the high base doping concentration. It can easily offer high fmax. High percentage box-shape Ge profile is usually employed in this type of SiGe HBTs to counter balance the negative effect of high base doping on current gain, and thus to have enough current gain. Therefore, the two types of SiGe HBTs have different device structures in terms of doping profile and Ge profile. 9 Chapter II Previous work on ballast implementations on power performance of SiGe power HBTs 1. Introduction When devices are working at high power densities, thermal stability becomes an inevitable issue, which may set the ultimate limits on the performance of power HBTs. Both of the electrothermal properties and the optimal thermal design of high power bipolar transistors have been studied theoretically and experimentally [10-26]. An important thermal issue associated with multi-finger high power HBTs is the current gain collapse [10, 17]. This phenomenon is caused by the thermally induced non-uniform distribution of the collector current among all fingers. When the collector current is increased over a critical point for a certain collector voltage, one finger draws most of the collector current, and then causes a sudden decrease of the current gain [10]. Although this phenomenon is not destructive to the device, it should be avoided to prevent the dramatic degradation of the device performance. To achieve this, emitter-ballast resistors have been employed in high power bipolar transistors to ensure thermal stability at high power densities [12, 13, 15, 22, 23]. The disadvantage of emitter ballasting is the reduced power efficiency due to the significant DC power consumption in the emitter-ballast resistors. Thermal shunt is another effective method to maintain thermal stability [16, 21]. The disadvantage of thermal shunt is 10 requiring a thick metal bridge connecting all the emitter fingers, which is not compatible with conventional fabrication processes. To address the efficiency problem encountered in emitter ballasting scheme, the use of base-ballast resistors has been demonstrated [11] and employed in SiGe PA designs [27]. Because of the small base current through base-ballast resistors, the DC power consumption is much smaller than emitter-ballast resistors. To achieve the effective degree of thermal stability (i.e., to achieve the same VBE drop), a much larger value for base-ballast resistors is needed because the base current is much smaller than the emitter current. To maintain high RF performance, capacitors paralleled with base-ballast resistors are necessary to bypass high-frequency signal. In this way, base-ballast transistors can achieve thermal stability, good RF performance and high efficiency at the same time [11]. The disadvantage of base ballasting is the requirement of bypass capacitors, which are large enough to minimize the negative effect of base-ballast resistors on device RF performance. In [11], the microwave performance of emitter-ballast and base-ballast HBTs has been compared and discussed empirically. However, it has not been clearly pointed out that which ballasting scheme should be judicious employed over the entire useful frequency range and under different operation configurations, in order to extract the maximum RF power performance from power devices. Especially, the experimental verification data on the effects of using base-ballast resistors is lacking. Additionally, GaAs based HBTs were studied in [11], which have a good semi-insulating substrate. Unfortunately, SiGe HBTs are fabricated on low resistivity Si substrates, which have the well-known issue of substrate parasitics [28]. The issue 11 of poor substrate properties on the implementation of base ballasting has not been evaluated. Some of the related work on the implementation of ballast resistors, including the calculation and simplification of equations, simulation and measurement analysis of CE SiGe power HBTs, as well as previous simulation of CB SiGe power HBTs are done by Dr. Ningyue Jiang. For completeness of this work, several details are included in this thesis. For more information, please refer to reference [29-31]. Some of the important aspects of Dr. Jiang’s work that are related to this thesis are briefly described in the following section to ease the reading of this thesis. 2. Influence of ballast resistors on small-signal RF performance of common-emitter SiGe HBTs The power HBTs used in this work are high-voltage devices (34 GHz fT, 60 GHz fmax, 6V BVCEO). Three different types of SiGe power HBTs have been implemented: no-ballast HBT, emitter-ballast HBT and base-ballast HBT. They share same device structure but the implementation of the ballast resistors. All three types of devices have 36 subcell units, and in each unit, there are 4 emitter fingers with 0.9x10.16μm 2 emitter area for each finger. No intentional ballast resistors are placed in no-ballast HBTs. In emitter-ballast HBTs, a 7.2Ω resistor is used in series with the emitter in each subcell unit. In base-ballast HBTs, a 144Ω resistor is inserted in series with the base in each subcell unit. Both emitter and base-ballast SiGe power HBTs are thermally stable under high power operations, which indicate the effectiveness of both 12 emitter and base-ballast resistors. The power gain (Gmax) of a CE HBT in different frequency ranges can be expressed, in terms of equivalent circuit parameters, as follows: A. Low-frequency unconditionally stable region: the maximum available power gain (MAG) is flat, which is β β (2.1) B. Intermediate-frequency potentially unstable region: the maximum stable gain (MSG) rolls off with the slope of -10 dB/decade, which is μ (2.2) C. High-frequency unconditionally stable region: MAG generally rolls off with the slope of -20 dB/decade (The stability factor is ignored here. For an accurate expression, please refer to [29].), which is (2.3) where, rb is total base resistance including pinch resistance, link resistance, extrinsic resistance and resistance of the added base ballast resistor, rex is external emitter resistance including added emitter ballast resistance, Cμ is BC junction capacitance, C is BE junction capacitance including depletion and diffusion components, ro is the output resistance, and β is the current gain. In addition, β and , is the transconductance. Since the device structures are the same except for the ballast resistors, the additional emitter and base-ballast resistors will only change the values of and without affecting other parameters. The typical power gain (Gmax) curve spanning the entire frequency range for a 13 CE HBT is showed in Fig. 2.1, including the effects of emitter or base-ballast resistors. Because the frequency of region I is usually very low, it is not of much interest for RF and microwave applications, so it is not sketched in the figure. If the operation frequency is within region II, there is an emitter resistance dependence of MSG for CE HBTs. Thus, MSG will degrade if emitter-ballast resistor is applied, according to (2.2). At the same time, base resistance has no much effect on MSG of CE HBTs, indicating that base ballast resistor should be a reasonable choice in this region, because the power gain characteristics can still be maintained even without high-frequency bypass capacitors. If the operation frequency falls into region III, as shown in (2.3), MAG is dependent on base resistance rb, so the value of rb should be as small as possible. Therefore, use of base ballast resistors should be avoided in this MAG range, while, emitter ballast should be used in this stable high-frequency region. Fig. 2.1 Schematic of the power gain as a function of frequency for no-ballast, emitter-ballast and base-ballast CE SiGe HBTs. [30] 14 The measured MAG/MSG curves of power SiGe HBTs of different types, which is no-ballast, emitter-ballast and base-ballast separately, are shown in Fig. 2.2. For all types of devices, the bias conditions are the same: Ic=180mA and VCE=5V. From the curves of no-ballast and emitter-ballast HBTs, it can be seen that power gain difference is only within the potentially unstable (MSG) region: MSG of emitter-ballast HBT is about 3 dB lower than no-ballast HBT. While, these two MAG curves overlap almost exactly, which shows that emitter ballast resistors do not affect MAG, but MSG, which is consistent with (2.2). Between no-ballast and base-ballast HBTs, the MAG curve of base-ballast HBT is lower than that of no-ballast HBT, but their MSG curves are close enough to overlap, which is also consistent with (2.3). From the figure, we also can see that the MAG/MSG curves of base-ballast and emitter ballast HBTs merge at 0.34 GHz. Based on Fig. 2.2, base ballast resistor should be used below 0.34 GHz, and emitter ballast should be used above 0.34 GHz in order to maximize the power gain values. 15 Fig. 2.2 Measured power gain (MSG/MAG) as a function of frequency for no-ballast, emitter-ballast and base-ballast CE SiGe HBTs. [30] 3. Influence of ballast resistors on common-base SiGe HBTs The power gain (Gmax) of a CB HBT in different frequency ranges can be expressed as the following [29]: A. Low-frequency unconditionally stable region: the maximum available power gain (MAG) is flat, which is β (2.4) B. Intermediate-frequency potentially unstable region: the maximum stable gain (MSG) rolls off with the slope of 10 dB/decade, which is μ (2.5) C. High-frequency unconditionally stable region: MAG generally rolls off with the slope of 20 dB/decade (The stability factor is ignored here. For an accurate expression, please refer to [29].), which is 16 μ (2.6) The simulations of power performance using JazzSemi 0.18μm SiGe HBT large-signal models were conducted. The simulated small-signal MAG/MSG curves of CB SiGe HBTs are shown in Fig. 2.3. According to (2.5) and (2.6), emitter resistance has no significant effect on high frequency power gain of CB HBTs, which is consistent with the simulation results. As shown in Fig. 2.3, emitter-ballast and no-ballast CB HBTs have the same MSG tendency, and emitter ballast resistors only cause a slight degradation in MAG. However, base-ballast resistors significantly degrade over the entire frequency range, which strongly indicates that emitter ballast is the only choice for CB HBTs. It is worth to note that the theoretical prediction on the ballast resistor implementation in common-base configuration by Dr. Jiang did not consider the stability effects of the SiGe HBTs. Fig. 2.3 Simulated power gain (MSG/MAG) as a function of frequency for no-ballast, emitter-ballast and base-ballast CB SiGe HBTs. [30] 17 Chapter III Simulations and measurements of ballast resistor implementation under common-base configuration 1. Expression for power gain of CB SiGe HBTs in different frequency ranges The SiGe power HBTs used in this work are high-voltage devices (35 GHz PA, 100 mW CB, 6V BVCEO). Three types of SiGe power HBTs have been implemented, including no-ballast HBT (Fig. 3.1), emitter-ballast HBT (Fig. 3.2) and base-ballast HBT (Fig. 3.3). Fig. 3.1 No-ballast CB SiGe HBT 18 Fig. 3.2 Emitter-ballast CB SiGe HBT Fig. 3.3 Base-ballast CB SiGe HBT 19 The device structures of these three types of HBTs are the same except for the implementation of the ballast resistors. All of them consist of 16 subcell units. In each one, there are 4 emitter fingers with 0.2×10.16μm2 emitter area for each finger. No ballast resistors have been used in no-ballast HBTs. A 7.2Ω resistor has been implanted in series with the emitter in emitter-ballast HBTs in each subcell unit. A 108Ω resistor has been placed in series with the base in base-ballast HBTs in each subcell unit. With these described ballast schemes, both emitter and base-ballast SiGe power HBTs are thermally stable under high power operations. Device layouts (Fig. 3.4-Fig. 3.9) and simulation circuits (Fig. 3.11-Fig. 3.13) for three different types can be found below. Fig. 3.4 Layout of no-ballast CB SiGe HBT 20 Fig. 3.5 Layout of no-ballast CB SiGe HBT Fig. 3.6 Layout of emitter-ballast CB SiGe HBT 21 Fig. 3.7 Layout of emitter-ballast CB SiGe HBT Fig. 3.8 Layout of base-ballast CB SiGe HBT 22 Fig. 3.9 Layout of base-ballast CB SiGe HBT The parasitic emitter resistance (rex) and collector resistance (rc) are included for analysis in the circuit of small signal T model for CB SiGe HBTs, as showed in Fig. 3.10. They are ignored in the simplified equivalent circuits of SiGe HBTs that have lower base doping concentrations than the emitter doping concentration, because they are negligible comparing to total base resistance (rb). For SiGe HBTs with much higher base doping concentrations than the emitter doping concentration, however, the total base resistance is reduced to a comparable value to the parasitic emitter resistance and collector resistance. Then both of them have to be included in the circuits. 23 Fig. 3.10 Small signal T model for CB SiGe HBTs The H-parameters for the CB configuration equivalent circuit can be derived as the following (i, input port; o, output port; r, reverse transmission; f, forward transmission; b, common-base ) (3.1) (3.2) (3.3) (3.4) Where and . We make reasonable approximations (justified by actual values) to simplify the above H-parameters and the power gain expressions in low, intermediate and high frequency regions. A. Low-frequency Region In the low-frequency region, the H-parameters in the CB configuration can be simplified as (3.5) 24 (3.6) (3.7) (3.8) and the power gain MAGCBl can be simplified as β (3.9) B. Intermediate-Frequency Region Most of the SiGe HBTs are operated in this region, so it is considered as the maximum stable power gain (MSG) in this range. MSG can be expressed as (3.10) So the MSG for the CB configuration is (3.11) C. High-Frequency Region In this region, devices are unconditionally stable. MAG can be expressed as (3.12) Where K is the Rollett’s stability factor (the K-factor). For the CB configuration, the K factor can be derived as (3.13) Where, and . MAG can be roughly simplified as μ (3.14) 25 Fig. 3.11 Simulation circuit for no-ballast CB SiGe HBT by ADS Fig. 3.12 Simulation circuit for emitter-ballast CB SiGe HBT by ADS 26 Fig. 3.13 Simulation circuit for base-ballast CB SiGe HBT by ADS 2. Simulation for power gain of CB SiGe HBTs As shown in the equation (3.13), emitter resistors do affect the K-factor, which can be also seen from the simulation results below. According to the equation of K-factor (3.13) above, for no-ballast CB SiGe HBTs, (3.15) For emitter-ballast CB SiGe HBTs, (3.16) For base-ballast CB SiGe HBTs, (3.17) 27 In this device, and . When K=1, femitter-ballast>fbase-ballast>fno-ballast. The simulated results shown in Fig. 3.14 follow the sequence, which discussed above exactly. The frequency point (femitter-ballast) at which the K-factor of the emitter-ballast CB SiGe HBTs reaches unity (breakpoint of MSG/MAG) is larger than the corresponding frequency point (fbase-ballast) of the base-ballast CB SiGe HBTs, which is also larger than that (fno-ballast) of no-ballast CB SiGe HBTs. Fig. 3.14 Simulated power gain (MSG/MAG) as a function of frequency for no-ballast, emitter-ballast and base-ballast CB SiGe HBTs (VCB=2.2V, VBE=0.9V). 28 (a) VCB=2.2V, VBE=0.9V (b) VCB=2.5V, VBE=0.9V 29 (c) VCB=2.8V, VBE=0.9V Fig. 3.15 Measured power gain (MSG/MAG) under different bias as a function of frequency for no-ballast, emitter-ballast and base-ballast CB SiGe HBTs, (a) VCB=2.2V, VBE=0.9V; (b) VCB=2.5V, VBE=0.9V; (c) VCB=2.8V, VBE=0.9V. 3. Measurement for power gain of CB SiGe HBTs The measured small-signal MAG/MSG curves of three types of CB SiGe HBTs are shown in Fig. 3.15, which fits both of the calculation and simulation results. All the three frequency points (fK=1, emitter-ballast, fK=1, base-ballast and fK=1, no-ballast) arrange in the same order. According to the simulated and measurement results, emitter resistance has no significant effect on high-frequency power gain region. As the figure shown above, emitter-ballast and no-ballast CB HBTs show almost the same MAG. In 30 MSG region, both power gain curves of base and emitter-ballast are degraded. This indicates that emitter-ballast would be a good choice for CB HBTs over the entire frequency range, but not so ideal in MSG range. 31 Chapter IV Conclusion In this thesis, experimental work has been done to clarify role of ballast resistors of SiGe power HBTs in common-base configuration. For the 35 GHz HBTs, as a general example, used in this thesis, according to the simulated and measurement results, emitter resistance has no significant effect on high-frequency power gain region. Emitter-ballast and no-ballast CB HBTs show almost the same MAG. In MSG region, both power gain curves of base and emitter-ballast are degraded. This indicates that emitter-ballast would be a good choice for CB HBTs over the entire frequency range, but not so ideal in MSG range. 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