MODEL 1525 INERTIAL SURFACE MOUNT ACCELEROMETER • • • • • • • • • • • • • Typical Non-Linearity ___ 0.1% of Full Scale Low Noise: 8 μg/√Hz typical for 2g Full Scale Built In DV Self-Test Function Zero Cross Coupling by Design J Lead Packaging for Max Repeatability Responds to DC and AC Acceleration -40 to +85°C Operation Low Power +5 VDC, 5 mA ±4.0V Differential Output Integrated Sensor & Amplifier Internal Temperature Sensor Nitrogen Damped, Hermetically Sealed Lid & Case Serialized for Traceability • RoHS Compliant 0.350 AVAILABLE G-RANGES Full Scale Acceleration ±2g 20 Pin JLCC 1525J-002 20 Pin LCC 1525L-002 ±5g 1525J-005 1525L-005 ± 10 g 1525J-010 1525L-010 ± 25 g 1525J-025 1525L-025 ± 50 g 1525J-050 1525L-050 ± 100 g 1525J-100 1525L-100 LCC package by special order only "J" SUFFIX PACKAGE 0.350 Positive Acceleration 0.350 "L" SUFFIX PACKAGE 0.350 0.165 Positive Acceleration 0.105 DESCRIPTION The Model 1525 is a low-cost, integrated accelerometer for use in tactical navigation, seismic, and zero to medium frequency instrumentation applications that require high repeatability and low noise. The 1525 was designed for maximum stability while maintaining best-in-class noise performance. Each miniature, hermetically sealed package combines a MEMS capacitive sense element and a custom integrated circuit that includes a sense amplifier and differential output stage. It is relatively insensitive to wide temperature changes and gradients. Each device is marked with a serial number on its top and bottom surfaces for traceability. A calibration test sheet is supplied with each unit showing the measured bias, scale factor, linearity, operating current, and frequency response. ZERO (DC) TO MEDIUM FREQUENCY APPLICATIONS PERFORMANCE By Model: VDD=VR=5.0 VDC, TC=25°C. Model Number UNITS 1525-002 1525-005 1525-010 1525-025 1525-050 1525-100 Input Range g ±2 ±5 ±10 ±25 ±50 ±100 Frequency Response (Minimum, 3 dB) Hz 0 – 300 0 – 300 0 - 500 0 - 1100 0 – 1100 0 - 1250 Sensitivity, Differential mV/g 2000 800 400 160 80 40 Output Noise, Differential (RMS, typical) μg/(root Hz) 7 12 18 25 50 100 Vibration Rectification @ 100Hz TYP MAX mg/g2 (RMS) 0.30 0.75 0.20 0.40 0.12 0.20 0.05 0.10 0.03 0.06 0.02 0.05 Max. Mechanical Shock (0.1 ms) g (peak) 2000 5000 100g parts are tested from -65 to +65g. SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE Silicon Designs, Inc. • 13905 NE 128th Street, Kirkland WA 98034 • Phone: 425-391-8329 • Fax: 425-391-0446 www.silicondesigns.com [page 1] 08-May-2015 Model 1525 PERFORMANCE - ALL VERSIONS PARAMETER Bias Calibration Error1 Bias Temperature Coefficient (TC= -40 to +85°C) 1 Scale Factor Calibration Error 1, 3 Scale Factor Temperature Coefficient (TC= -40 to +85°C) 1 Non-Linearity 3 RMS Model Residual (+/- 1g, -30 to +90°C) In Run Bias Stability (Allan Variance minimum) Velocity Random Walk Long Term Bias Stability 4 Long Term Scale Factor Stability 4 Turn-On Transient (in less than 0.5ms) Output Impedance Recommended Operating Temperature Operating Voltage Operating Current (IDD+IVR) 1 Input Axis Misalignment Mass MIN -50 -100 -40 4.75 TYP 0.1 0 0.5 0 0.1 100 3 2.5E-4 150 300 150 90 MAX 0.5 50 1 100 0.5 200 (750) (1000) +85 5.0 5.25 5 6 6 15 LCC 0.62, JLCC 0.68 UNITS % of FS (PPM of FS)/°C % PPM/°C % of FS PPM of FS PPM of FS X FS - m/sec/sqrt(hr) PPM of FS (+1 sigma) PPM (+1 sigma) PPM of FS ohms °C volts mA mrad grams All Models: Unless otherwise specified VDD=VR=5.0 VDC, TC=25°C, Differential Output, J-lead package MAXIMUM RATINGS * Case Operating Temperature 2 Storage Temperature Voltage on VDD to GND Voltage on Any Pin (except DV) to GND 3 Voltage on DV to GND (Self Test) Power Dissipation Cleaning -55 to +125°C -55 to +125°C -0.5V to 6.5V -0.5V to VDD+0.5V ±15V 50 mW The sensor cannot be ultrasonically cleaned * NOTICE: Stresses greater than those listed above may cause permanent damage to the device. These are maximum stress ratings only. Functional operation of the device at or above these conditions is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability and lifespan. Note 1: Tighter tolerances may be available on special order. Note 2: Voltages on pins other than DV, GND or VDD may exceed 0.5 volt above or below the supply voltages provided the current is limited to 1 mA. Note 3: 100g and greater versions are tested from -65 to +65g for scale factor, linearity and vibration rectification. Note 4: Tested as: Power cycle 100x, Shock 500g all axis, storage at -45 and 85°C, temperature cycle 10x -40 to 120°C, vibration 90%FS 125—1000Hz band. RECOMMENDED MODELS • • • Applied Acceleration = Bias + BiasTC*T+ BiasTC2*T**2+ (5.00/VR)*(SF+ SFTC*T+ k2*Vout)*(Vout), where parameters are the least squares fit with T = (Measured Temp – 25C) and Vout = (Vaop-Vaon). The term (5.00/VR) can be ignored if calibrated in a production IMU with a repeatable reference or if the A/D reference and the VR voltage are derived from the same source. When the internal Temp Sensor is used, a recommended model is T = Tbias + Tsens*Vit + Tsens2 * Vit**2, where the temperature parameters are the least squares fit to (oven temperature-25C) and Vit is a voltage proportional to the current out of IT. SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE Silicon Designs, Inc. • 13905 NE 128th Street, Kirkland WA 98034 • Phone: 425-391-8329 • Fax: 425-391-0446 www.silicondesigns.com [page 2] 08-May-2015 Model 1525 OPERATION 5 OUTPUT VOLTAGE The Model 1525 produces a differential output voltage, the value of which varies with acceleration as shown in the figure, right. Two reference voltages, +5.0 and +2.5 volts (nominal), are required; the output scale factor is ratiometric to the +5.0 volt reference voltage relative to GND, and both outputs at zero acceleration are nominally about 50 mV below the +2.5 volt input. The sensitive axis is perpendicular to the bottom of the package, with positive acceleration resulting from a positive force pushing on the bottom of the package. 4 AO N P AO 3 (Di ffer ent ial On ly 2 1 0 -Full Scale 0 ) + Full Scale ACCELERATION SIGNAL DESCRIPTIONS AOP (vdd) GND (gnd) (vdd) VR VDD and GND (power): Pins (14) and (19) respectively. Power (+5 Volts DC) and ground. AOP and AON (output): Pins 12 and 16 respectively. Analog output voltages 3 2 1 20 19 proportional to acceleration. The AOP voltage increases (AON decreases) with 18 (gnd) DV 4 positive acceleration; at zero acceleration both outputs are nominally equal to the +2.5 volt reference. The device experiences positive (+1g) acceleration with its lid (gnd) 5 17 2.5V facing up in the earth’s gravitational field. Use of differential mode is strongly 16 AON TOP VIEW recommended for both lowest noise and highest accuracy operation. Voltages can (gnd) 6 be measured ratio-metrically to VR for good repeatability without requiring a 7 15 separate precision reference voltage for an A/D. 14 VDD IT 8 DV (input): Pin 4. Deflection Voltage. Connect to the 2.5 Volt pin for best 9 10 11 12 13 repeatability. A test input that applies an electrostatic force to the sense element, simulating a positive acceleration. The nominal voltage at this pin is ½ VDD. DV voltages higher than required to bring the output to positive full scale may cause device damage. VR (input): Pin 3. Voltage Reference. Tie to a good reference (not directly to VDD) for best scale factor repeatability. A 0.1μF bypass capacitor is recommended at this pin. VR current is less than 100 uA. 2.5 Volt (input): Pin 17. Sets internal and output common mode value. Tie to a resistive voltage divider from +5 volts. A 0.1μF bypass capacitor is recommended at this pin. IT (output)/ClkIn (Input): Pin 8. Temperature dependent current source or optional external clock input. Tie to VDD if not used. Special Use Pins: Pins 9 and 11 should be tied to VDD; Pins 2,5,6 and 18 to GND; Pins 1,7,10,13,15, and 20 are reserved and should remain unused. RECOMMENDED CONNECTIONS The 2.5V input (pin 17) may be driven from a resistive divider. DEFLECTION VOLTAGE (DV) TEST INPUT: This test input applies an electrostatic force to the sense element to simulate positive acceleration. For most repeatable operation, DV should be tied to the 2.5V input so stray voltage on it will not affect the output. TEST INPUT ESD and LATCH-UP CONSIDERATIONS: (OPTIONAL) The model 1525 accelerometer is a CMOS device subject to damage from large electrostatic discharges. Diode protection is provided on the inputs and outputs, and it is 0.1uF not easily damaged, but care should be exercised during handling. However, individuals and tools should be grounded before coming in contact with the device. Although the 1525 is resistant to latch-up, inserting a 1525 into or removing it from a powered socket may cause damage. 5K 4 0.1 uF 17 + 5V REF + 5V Power 3 VR 14 VDD 11 0.1 uF 9 AOP DV 1525 AON 2.5V IT 5K 2 GND 5 19 6 12 16 OUTPUT (POSITIVE) OUTPUT (NEGATIVE) 8 18 RT 2K TEMPERATURE VOLTAGEOUT (OPTIONAL) SIGNAL CONNECTIONS SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE Silicon Designs, Inc. • 13905 NE 128th Street, Kirkland WA 98034 • Phone: 425-391-8329 • Fax: 425-391-0446 www.silicondesigns.com [page 3] 08-May-2015 Model 1525 INTERNAL TEMPERATURE SENSING The model 1525 accelerometer contains a temperature dependent current source whose output is on pin 8. This signal is useful for measuring the actual internal temperature of the accelerometer. By using it, the previously characterized bias and scale factor temperature coefficient values can be used to correct for instantaneous on-chip temperature, providing more accuracy with changing temperature than with an external sensor. The nominal output current at 25°C is about 500 (±200) μA and the nominal sensitivity is about +1.5 (±0.5) μA/°C. RMS noise is equivalent to about 0.25° C of temperature. If unused, pin 8 should be connected to VDD. PACKAGE DIMENSIONS The J-lead package is the standard package for the 1525 for maximum repeatability. The 1525 is also available in the L-lead package by special order where minimum package height is important. "J" SUFFIX PACKAGE (20 PIN LEADED CHIP CARRIER) *T R F K *U N P B A TERMINAL 20 Positive Acceleration A *M D NOTES: 1. 2. 3. 4. TERMINAL 1 DIM A B D F K *M N P R *T *U INCHES MIN MAX 0.342 0.358 0.346 0.378 0.095 0.115 0.050 BSC 0.010 RTYP 0.048 TYP 0.050 0.070 0.017 TYP 0.023 RTYP 0.085 TYP 0.175 TYP MILLIMETERS MIN MAX 8.69 9.09 8.79 9.60 2.41 2.92 1.27 BSC 0.25 RTYP 1.23 TYP 1.27 1.78 0.43 TYP 0.58 RTYP 2.16 TYP 4.45 TYP CONTROLLINGDIMENSION: INCH. LID IS ELECTRICALLYTIED TOTERMINAL 19 (GND). * DIMENSIONS 'M', 'T' & 'U' LOCATEACCELERATION SENSINGELEMENT'S CENTEROF MASS . TERMINALS AREPLATED WITH 60 MICRO-INCHES MIN GOLD OVER80 MICRO-INCHES MIN NICKEL. (THIS PLATINGSPECIFICATION DOES NOT APPLY TOTHEMETALLIZED PIN-1 IDENTIFIERMARK ON THEBOTTOM OF THEPACKAGE). 5. PACKAGE: 90%MINIMUM ALUMINA (BLACK), LID: SOLDERSEALED KOVAR. SOLDERING RECOMMENDATIONS RoHS Compliance: The model 1525 does not contain elemental lead and is RoHS compliant. F G Pre-Tinning of Accelerometer Leads is Recommended: To prevent gold migration embrittlement of the solder joints, it is best to pre-tin the accelerometer leads. LCC Solder Contact Plating Information: The plating composition and thickness for the solder pads and castellations on the “L” suffix (LCC) package are 60 to 225 micro-inches thick of gold (Au) over 80 to 350 micro-inches thick of nickel (Ni) over a minimum of 5 micro-inches thick of moly-manganese or tungsten refractory material. The J-Lead package top layer is 100 to 225 microinches thick of 99.7% gold (Au) over 80 to 350 microinches thick of electroplated nickel (Ni). Cleaning: The sensor must not be cleaned with an ultrasonic bath. F E A C D B DIM A B C D E F G Inch .230 .430 .100 .033 .050 .013 .120 mm 5.84 10.92 2.54 0.84 1.27 0.33 3.05 SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE Silicon Designs, Inc. • 13905 NE 128th Street, Kirkland WA 98034 • Phone: 425-391-8329 • Fax: 425-391-0446 www.silicondesigns.com [page 4] 08-May-2015