Three-dimensional vector electrochemical strain microscopy N. Balke, E. A. Eliseev, S. Jesse, S. Kalnaus, C. Daniel, N. J. Dudney, A. N. Morozovska, and S. V. Kalinin Citation: Journal of Applied Physics 112, 052020 (2012); doi: 10.1063/1.4746085 View online: http://dx.doi.org/10.1063/1.4746085 View Table of Contents: http://scitation.aip.org/content/aip/journal/jap/112/5?ver=pdfcov Published by the AIP Publishing Articles you may be interested in Determination of three-dimensional orientations of ferroelectric single crystals by an improved rotating orientation x-ray diffraction method Rev. Sci. Instrum. 80, 085106 (2009); 10.1063/1.3204781 Effect of thermal vibrations on the resonant frequency of cantilever for scanning thermal microscopy nanomachining J. Appl. Phys. 105, 013520 (2009); 10.1063/1.3031761 Three-dimensional carbon nanowall structures Appl. Phys. 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Kalinin1 1 The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA 2 Institute for Problems of Materials Science, National Academy of Science of Ukraine, Ukraine 3, Krjijanovskogo, 03142 Kiev, Ukraine 3 Materials Sciences and Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA 4 Institute of Semiconductor Physics, National Academy of Science of Ukraine, Ukraine 41, pr. Nauki, 03028 Kiev, Ukraine (Received 19 December 2011; accepted 27 July 2012; published online 4 September 2012) Three-dimensional vector imaging of bias-induced displacements of surfaces of ionically conductive materials using electrochemical strain microscopy (ESM) is demonstrated for model polycrystalline LiCoO2 surface. We demonstrate that resonance enhanced imaging using band excitation detection can be performed both for out-of-plane and in-plane response components at flexural and torsional resonances of the cantilever, respectively. The image formation mechanism in vector ESM is analyzed and relationship between measured signal and grain orientation is C 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4746085] discussed. V I. INTRODUCTION The growing use of renewable energy sources is strongly tied to the need for development of advanced energy storage technologies.1–3 The functionality of energy storage systems, such as Li-ion and Li-air batteries, is based on and ultimately limited by the rate and localization of ion flows through the device on different length scales ranging from atoms and interfaces to mesoscopic grains and macroscopic grain assemblies.4–7 The improvement of existing and development of future battery technologies are strongly hindered by the fundamental gap in understanding ionic transport processes on the sub-micron length scales, necessitating development of local characterization techniques capable of probing local electrochemical reactions and ionic transport.8–11 Recently, a scanning probe microscopy (SPM) based method referred to as electrochemical strain microscopy (ESM) was developed to probe Li-ion transport dynamics on the nanoscale. The ESM was demonstrated on Li-ion battery cathode materials and thin film battery devices.12,13 During ESM, a high-frequency electrical bias Vac is applied to the SPM tip in contact with Li-containing material. The applied bias results in bias-induced Li-ion transport in the local volume proximal to the tip. The change in local Li-ion concentration is accompanied by a surface deformation induced due to the intrinsic link between Li-ion concentration and molar volume of electrode materials. This deformation can be measured with the SPM tip as surface displacement. The measurement of the ion-flow induced strain, as opposed to Faradaic currents, allows to reduce the probing volume size by a factor of 106–108 compared to existing electrochemical methods, and perform imaging in a spatially resolved manner.14,15 The ESM can be further extended to a broad range of spectroscopic techa) Authors to whom correspondence should be addressed. Electronic addresses: n2b@ornl.gov and morozo@voliacable.com. 0021-8979/2012/112(5)/052020/7/$30.00 niques that allow probing time16 and voltage dynamics of ionic transport and separate transport and reaction stages.17 Commonly used electrode materials exhibit strong anisotropy both in Li-ion transport and chemical expansion. Exemplarily, layered LiCoO2 show enhanced ionic diffusivity in the CoO2 planes perpendicular to the crystallographic c-axis, whereas the volume change upon Li insertion/extraction occurs mainly along c-axis.18 As a result, the ESM response will differ greatly between differently oriented grains or single crystals. Correspondingly, it is of high interest to detect the full surface displacement vector during ESM, as it has been previously achieved for ferroelectric material (Vector Piezoelectric Force Microscopy).19 Here, we demonstrate that ESM can be performed in the vector mode by measuring out-of-plane (OP) and in-plane (IP) components of the surface displacement on a polycrystalline LiCoO2 thin film. We further demonstrate that vector ESM can be performed in the resonance enhanced mode, i.e., at the frequencies corresponding to flexural and torsional cantilever oscillations. The image formation mechanism in ESM for system with anisotropic Vegard and diffusion constant tensors is analyzed. Analytical expressions for OP and IP ESM signal for transversally isotropic material in general orientation are derived. The potential of vector-ESM to probe crystallographic orientation and electrochemical activity of individual electroactive grains is discussed. II. EXPERIMENTAL Layered LiCoO2 was selected as a model system, due to the fact that it is most widely used cathode materials in rechargeable Li-ion batteries and is also relatively stable when in contact with ambient and aqueous environments.20 Due to the layered structure, LiCoO2 shows a strong anisotropy in Li-ion diffusivity and volume expansion upon Li removal.18 Therefore, we expect a strong variation in ESM for 112, 052020-1 C 2012 American Institute of Physics V [This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP: 128.6.218.72 On: Tue, 22 Jul 2014 02:18:35 052020-2 Balke et al. differently oriented grains. Here, LiCoO2 thin films were fabricated by radio frequency sputtering on ceramic Al2O3 substrates with a thin Au film as bottom current collector.6 The roughness of the substrate was measured by AFM to be around 100 nm. The LiCoO2 was annealed at 800 C for 2 h in O2. The cathode area was 1 cm2 and the film thickness was about 530 nm. Electrochemical strain microscopy measurements were performed with a commercial atomic force microscopy system (Cypher, Asylum Research) additionally equipped with LABVIEW/MATLAB based band excitation controller implemented on a National Instrument NI-6115 fast data acquisition (DAQ) card.21 All measurements were performed with the biased tip in direct contact with the LiCoO2 surface in air without any additional protective coating. Note that the use of the band excitation (BE) method allows the surface response and variations of resonant frequency to be decoupled, obviating indirect topographic cross-talk.22 ESM imaging was performed at high (0.1–1 MHz) frequencies with 2Vac band excitation signal applied to a metal coated tip (Nanosensors, Pt/Ir coating). These high frequencies allow us to utilize the contact resonance enhancement of the surface oscillation amplitude with minimal Li-ion motion to keep changes in the material reversible. The applied bias between the SPM tip as a point contact and the bottom electrode results in a heterogeneous field distribution around the tip with field components perpendicular and parallel to the sample surface. Li-ions move under the influence of this field which results in a change in sample volume, and thus a change in surface height. To be able to measure the threedimensional surface displacement, the cantilever deflection and torsion are measured independently. The deflection and torsion signals corresponds to the vertical (OP) and lateral (IP) component of the surface displacement. Here, the OP and IP ESM signals are recorded around the deflection and torsional resonance frequencies of the cantilever at 360 KHz and 710 kHz, respectively. These frequencies are determined by the mechanical properties of the cantilever and the cantilever-sample contact and were established experimentally by using the band excitation method.21 The measured parameters are the maximum surface oscillation (height of the contact resonance peak) which forms the ESM signal, and corresponding resonance frequencies and Q-factors that define mechanical properties of the tip-surface junction and energy dissipation, respectively. III. RESULT AND DISCUSSION Due to the strong anisotropy of the Vegard and diffusion tensors in layered materials, the OP and IP ESM response is expected to depend strongly on the grain orientation.23 This behavior is schematically shown in Fig. 1. If the c-axis of layered LiCoO2 is aligned parallel to the sample surface, the strong OP field component is aligned directly with the Liion/CoO2 planes, resulting in a strong Li-ion concentration change within the probed volume underneath the tip due to high mobility and possible surface reaction. However, the direction of maximum volume change is along c-direction, and is thus purely in-plane. In this case we expect a high IP J. Appl. Phys. 112, 052020 (2012) FIG. 1. Correlation between OP and IP ESM response and the grain orientation. ESM signal and a zero or low OP ESM signal. Note that mechanical clamping can strongly reduce the IP volume change due to mechanical constraints within the film. The opposite behavior is expected if the c-axis is aligned normally to the sample surface. In this case, only minimal changes in Li-ion concentration are expected since only the weaker IP field components give rise to electromigrative Li-ion motion and surface reaction is minimized. However, in this case even small changes in Li will result in strong OP ESM signals since the direction of maximum volume change is OP and mechanical clamping will play a smaller role than for the purely IP volume change. In other grain orientations, nonzero OP and IP ESM signals are expected, with relevant signal strength dependent on exact grain orientation. Figure 2 displays the correlation between topography and the measured OP and IP ESM amplitude and phase signals. To demonstrate the surface characteristics of the LiCoO2 film, topography and deflection signal are shown in Figs. 2(a) and 2(b), respectively. Small grains of LiCoO2 with a diameter of approximately 200-300 nm can be identified. The maximum OP and IP ESM amplitudes are displayed in Figs. 2(c) and 2(d). Both images show strong variations in the ESM response across the scanned area. In addition, the contrast in OP and IP ESM amplitude maps is highly complementary and images show dissimilar features, indicative of no or minimum cross-talk between the cantilever deflection and torsion signals. If Figs. 2(c) and 2(d) are compared, grains with both OP and IP response (#1), no OP but strong IP response (#2), and strong OP but zero IP response (#3) can be identified. It can also be seen that the lowest OP ESM response is non-zero as it is the case for IP ESM. We further note that the cantilever deflection and torsion have different sensitivities and noise levels, making direct comparison of absolute values difficult. 2D-ESM as shown in Fig. 2 can be used to extract information about the OP and IP volume changes. However, the measured IP volume change is only sensitive to the direction perpendicular to the cantilever axis. If the IP volume change occurs parallel to the cantilever axis, the cantilever deformation is pure buckling and no torsion (i.e., IP ESM signal) is recorded. Thus, to realize full 3D-ESM imaging collecting information on all three components of surface displacement vector, it is necessary to physically rotate the sample by 90 and image the same area again. [This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP: 128.6.218.72 On: Tue, 22 Jul 2014 02:18:35 052020-3 Balke et al. J. Appl. Phys. 112, 052020 (2012) FIG. 2. (a) Topography, (b) deflection, (c) OP ESM map, and (d) IP ESM map for a 2 2 lm area on a LiCoO2 thin film. The V-ESM imaging of LCO surface is illustrated in Fig. 3 exhibiting IP ESM amplitude map for the same area as in Fig. 2 under different sample rotations. In order to find the same area again after sample rotation, focused ion beam was used to mark regions on the surface. The images were rotated to show the same orientation. First, it can be seen that the images for 0 and 90 look different. Some areas with a high IP ESM signal under 0 show up as low signal areas under 90 and vice versa. This can be nicely seen in the upper right corner of the image. In contrast, if 0 and 180 (or 90 and 270 ) images are compared, they look almost identical. This was expected since the contrast is given by the relative orientation of the cantilever axis to the sample which is the same for a 180 rotation between the two image pairs. The essential condition for the existence of well-defined solution existence is the absence of dC at the infinity, well satisfied in an SPM experiment with local excitation. GSij is appropriate tensorial Green function.27 Here, we approximate the symmetry of elastic properties as isotropic (well justified to 3D compounds such as spinels and olivines), albeit numerical schemes for Eq. (1) can be developed for lower symmetries in straightforward fashion.28 We consider diagonal Vegard tensor bij ¼ dij bi with b1 6¼ b2 6¼ b3 (dij is the Kroneker delta symbol), but with the general orientation of principal axes. In laboratory coordinate system the tensor components will be: 0 ^ ¼B b @ A. Analytical calculation of ESM signals for flat surfaces cos / 0 sin/ 0 1 0 (1) 0 B ¼@ b1 0 0 10 cos / 0 sin/ CB CB 0 A@ 0 b2 0 A@ 0 sin/ 0 cos / In the following section, we analyze image formation mechanisms for the OP and IP ESM response and derive signal dependence on frequency of the applied electric field and crystallographic orientation of LiCoO2. The general solution of the problem for the elastic displacement of the sample surface is24–26 1 ð e 1 ;k2 ;n3 ;tÞ: es ðk1 ;k2 ;x3 ;n3 ÞdCðk uei ðk1 ;k2 ;x3 Þ ¼ dn3 bkl cjmkl G ij;m 10 0 0 b3 1 b2 C A 0 sin/ 0 cos / b1 cos2 / þ b3 sin2 / 0 ðb1 b3 Þcos /sin / 0 1 0 1 C A ðb1 b3 Þcos /sin / 0 b3 cos2 / þ b1 sin2 / 1 b11 0 b13 B C @ 0 b22 0 A 0 b13 0 b33 (2a) FIG. 3. IP ESM map for a 2 2 lm area on a LiCoO2 thin film for a sample rotation angle of (a) 0 , (b) 90 , (c) 180 , and (d) 270 for the area shown in Fig. 2. The images were rotated to show the same orientation. [This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP: 128.6.218.72 On: Tue, 22 Jul 2014 02:18:35 052020-4 Balke et al. J. Appl. Phys. 112, 052020 (2012) Using Eq. (2a) the OP ESM response ui (1) could rewritten as 1 u3 ðx1 ; x2 ; 0; tÞ ¼ 2p 1 ð 1 ð dk2 1 1 ð e 1 ; k2 ; n3 ; tÞ dk1 dn3 expðik1 x1 ik2 x2 k n3 ÞdCðk 1 0 2k12 þ k22 ð1 k n3 Þ 2k22 þ k12 ð1 k n3 Þ b33 ð1 þ k n3 Þ 2ik1 n3 b13 þ b22 þ b11 k2 k2 1 u1 ðx1 ; x2 ; 0; tÞ ¼ 2p 1 ð 1 ð dk2 1 1 1 ð e 1 ; k2 ; n3 ; tÞ dk1 dn3 expðik1 x1 ik2 x2 k n3 ÞdCðk 0 2k2 ð1 þ Þ þ k12 ð2 k n3 Þ k k12 n3 2k12 k22 k n3 ik1 b11 2 b 2 þ ik b þ ik n b 1 1 3 33 : 13 22 k k3 k3 e 1 ; k2 ; n3 ; tÞ is the 2D Fourier image Here k2 ¼ k12 þ k22 , dCðk of the concentration field dCðx1 ; x2 ; n3 ; tÞ. Note, that the e 1 ; k2 ; n3 ; tÞ is an even probe potential and consequently dCðk function with respect of both k1 and k2 , and thus u2 ð0; xÞ 0. Here, we consider the case of the purely diffusion driven process, in which electrochemical reaction at the tip-surface junction creates modulates concentration or flux of mobile ions, and the ionic transport in the material is dominated by diffusion (corresponding to the presence of supporting electrolyte in solution-based electrochemistry). Here, the concentration dynamics is described by @ @ 2 dCðx; tÞ dCðx; tÞ ¼ Dij ; @t @xi @xj B B D^ ¼ B @ D1 cos2 / þ D3 sin2 / 0 ðD1 D3 Þcos/sin/ 0 D2 0 ðD1 D3 Þcos/sin/ 0 D3 cos2 / þ D1 sin2 / 1 D11 0 D13 B C B C B 0 D22 0 C: @ A D13 0 D33 1 @ @ 2 dCðx;tÞ dCðx;tÞ ¼ Dij @t @xi @xj @2 @2 @2 @2 þD11 2 þD22 2 dCðx;tÞ D33 2 þ2D13 @z @z@x @x @y (6) one should solve the characteristic equation in FourierLaplace representation sdCe ðD33 q2 þ 2iD13 k1 q D11 k12 D22 k22 ÞdCe for a z-wave number, q, defined as iD13 k1 6 qffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi D33 ðs þ D11 k12 þ D22 k22 Þ ðD13 k1 Þ2 D33 (7a) (4) Boundary conditions to Eq. (3) are (a) the absence of the time-dependent part dCðx; tÞ at infinity and (b) the general third kind boundary conditions in the contact area:29 @ dCðx1 ; x2 ; 0; tÞ gdCðx1 ; x2 ; 0; tÞ ¼ V0 ðx1 ; x2 ; tÞ; @x3 (5) dCðx1 ; x2 ; x3 ! 1; tÞ ! 0; dCðx; 0Þ ¼ 0: Here V0 ðx1 ; x2 ; tÞ is the electrostatic potential distribution at the tip electrode x3 ¼ 0. This boundary conditions reduces to the case of either fixed concentration or fixed ionic flux at phenomenological exchange coefficient k ¼ 0 or g ¼ 0, correspondingly. Rewriting Eq. (3) for the tensor Eq. (4) as qðs; kÞ ¼ C C C A 0 k (2c) (3) where diffusion tensor is Dij . Similarly to Vegard tensor, in the laboratory coordinate systems the diffusion tensor can be written as 0 (2b) Only negative term is relevant for a semi-infinite problem. Here the vector k ¼ fk1 ; k2 g. Using Laplace transformation on time t, and Fourier transformation on transverse coordinates, the solution of problem (3), Eq. (5) was found as Mellin integral: e 1 ; k2 ; x3 ; tÞ ¼ dCðk 1 2ip Aþi1 ð ds exp x3 qðs; kÞ þ st Ai1 Ve0 ðk1 ; k2 ; sÞ : kqðs; kÞ þ g (7b) Here Ve0 ðk; sÞ is the Fourier-Laplace image of V0 ðx1 ; x2 ; tÞ. [This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP: 128.6.218.72 On: Tue, 22 Jul 2014 02:18:35 052020-5 Balke et al. J. Appl. Phys. 112, 052020 (2012) Using Fourier transformation on time t, and Fourier transformation on transverse coordinates, the solution of problem (3), Eq. (5) was found as e 1 ; k2 ; x3 ; xÞ ¼ exp x3 qðx; kÞ þ ixt dCðk qðx; kÞ ¼ qffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi iD13 k1 6 D33 ðix þ D11 k12 þ D22 k22 Þ ðD13 k1 Þ2 D33 (8b) Ve ðk ; k ; xÞ 0 1 2 : kqðx; kÞ þ g (8a) : Using the solution (8a) and Eqs. (2b) and (2c), the maximal value of response can be written in the following form: 1 1 ð ð 1 Ve0 ðk1 ; k2 ; xÞexpðixtÞ dk2 dk1 u1 ð0; xÞ ¼ 2p kqðx; kÞ þ g k þ qðx; kÞ 1 1 0 1 1 0 2 ik1 k22 k12 k k 1 Ab13 C B 2 2 ð1 þ Þ þ 2 2 b11 2@1 B k C k k k þ qðx; kÞ k k þ qðx; kÞ B C B C 0 1 B C 2 2 B C k @ þ ik1 @2 k1 k2 A Ab22 þ ik1 b33 k k2 k2 k þ qðx; kÞ k þ qðx; kÞ (9a) and 1 ð 1 ð expð ixtÞVe0 ðk1 ; k2 ; xÞ kqðx; kÞ þ g k þ qðx; kÞ 1 1 0 1 k 2ik1 b13 k12 k22 k þ b b 1 þ 2 þ 1 22 B 33 C k þ qðx; kÞ k2 k 2 k þ qðx; kÞ k þ qðx; kÞ B C B C: @ A k22 k12 k þ b11 2 2 þ 2 1 k k k þ qðx; kÞ 1 u3 ð0; xÞ ¼ 2p dk2 dk1 e R0 qðx; kÞ qeðw; kÞ Results for localized excitation Ve0 ðk1 ; k2 ; xÞ ¼ V0 R20 exp ðk R0 Þ2 =2 ; (10) using dimensionless variables k R0 ¼ ke and w ¼ x R20 =D1 ; (11a) ¼ iD13 ke1 þ qffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi 2 2 iwD1 D33 þ D1 D3 ke1 þ D22 D33 ke2 : D33 (11b) In deriving Eq. (11b), the identity D33 D11 ðD13 Þ2 ¼ D1 D3 was used. After trivial transformations, the response acquires the dimensionless form: e 2 =2 V0 exp ðkÞ dke2 dke1 e e ke þ qeðw; kÞ ke q ðw; kÞ=R 0þg 1 1 0 1 1 0 !! 2 2 2 ~ e e e e ik k k k k1 Ab13 C B 1 2 22 ð1 þ Þ þ 12 2 b11 2@1 B k~ C e e e e e e e e k þ q ðw; kÞ k k þ qeðw; kÞ k k B C C 0 1 B B C 2 2 ~1 e1 b33 e e e B C i k i k k k k 1 2 @ A @ A b22 þ 2 2 2 þ ~ e e k e k þ qeðw; kÞ ke ke ke þ qeðw; kÞ R0 u1 ð0; xÞ ¼ 2p 1 ð (9b) 1 ð (12) [This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP: 128.6.218.72 On: Tue, 22 Jul 2014 02:18:35 052020-6 Balke et al. J. Appl. Phys. 112, 052020 (2012) and 2 e V exp ð kÞ =2 0 1 d ke2 dke1 u3 ð0; xÞ ¼ R0 2p e e ke þ qeðw; kÞ ke q ðw; kÞ=R 0þg 1 1 ! 0 1 2ike1 b13 ke B b33 1 þ e C e e B C ke þ qeðw; kÞ k þ qeðw; kÞ B C: ! ! ! ! B 2 2 2 2 C e e e e e e k1 k2 k k2 k1 k @ A þ b11 2 2 þ 2 1 þb22 2 2 þ 2 1 e e e e k þ qeðw; kÞ k þ qeðw; kÞ ke ke ke ke 1 ð 1 ð High-frequency limit of Eq. (12) is u3 ð0; xÞ ¼ V0 ðb11 þ b22 Þð1 þ 2Þ þ 2b33 rffiffiffiffiffiffiffiffi ix ix 2 kþg D33 D33 (14) and u2 ð0; xÞ 0. Note that for the case D1 ¼ D2 D3 , b1 ¼ b2 b3 the dimensionless response is a universal function of the dimensionless frequency w ¼ x R20 =D1 and rotation angle /, and is virtually independent on the tip radius and material properties (except for Poisson ratio). Similar calculations can be made to derive the IP ESM response u1/u2 and are not shown here. (13) Figures 4(a) and 4(b) demonstrate the frequency dependent OP and IP ESM signal (from Eq. (12)) for the cases of fixed concentration boundary condition (k ¼ 0) for differently oriented grains, respectively. Here, we assume that D1 ¼ D2 ¼ 100D3 and b1 ¼ b2 ¼ 0. The highest OP ESM response is predicted in the low frequency region, defined as that with probing frequencies smaller than the diffusion frequencies of the Li-ions. At the dimensionless frequency w ¼ 1 the probing frequency is equal to the diffusion frequency and the ESM signal starts to drastically decrease with increasing measurement frequency. To demonstrate the correlation of the ESM signal and the crystallographic orientation more clearly, Fig. 3(c) shows the OP ESM signal for different crystallographic orientations for FIG. 4. (a) Absolute amplitude normalized OP ESM responses dependence on the dimensionless frequency w ¼ x R20 =D1 for D1 ¼ D2 ¼ 100D3 , b1 ¼ b2 ¼ b3 =100 and the different values of angle / ¼ 0 , 10 , 30 , 45 , 60 , 75 , 85 , 90 (specified near the curves) for the boundary conditions of fixed concentration (k ¼ 0). (c) Absolute value of OP ESM response as a function of angle for low frequency, close to cross-over frequency, and very high frequency (w ¼ 102, 1, 102, respectively) for the boundary conditions of fixed concentration. (b) Absolute amplitude normalized IP ESM response under the same conditions as (a) and the different values of angle / ¼ 1 , 10 , 30 , 45 , 60 , 75 , 85 , 89 (specified near the curves). (d) Absolute value of IP ESM response as a function of angle for different frequencies as shown in (c). [This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to ] IP: 128.6.218.72 On: Tue, 22 Jul 2014 02:18:35 052020-7 Balke et al. low frequency, close to cross-over frequency, and very high frequency. The latter case is the one corresponding to the experimental conditions, where since the frequencies used to measure the ESM signal (0.1–1 MHz) are estimated to b much higher than the diffusion frequencies in the probed volume (1 Hz for 1 nm diffusion length). Figure 4(d) shows the same calculations for IP ESM. In the case of OP ESM, the measured signal becomes higher with rotation of the Li-ion planes parallel to the surface, i.e., for the c-axis perpendicular to the surface, but never becomes zero. This shows, even if the easy diffusion direction for Li-ions is not aligned with the applied field, the highest surface displacements can be measured due to the strong changes of the c-axis upon deintercalation. For IP ESM, the response is zero (non-detectable) for / ¼ 0 and 90 grain orientations. The difference in OP and IP ESM as function of grain orientation can now be used to make conclusion about the texture of the film. Exemplarily, if OP ESM is low (but non-zero) and IP ESM is zero, then / ¼ 0 is the most likely grain orientation. If OP ESM is high and IP ESM is zero, / ¼ 90 is the most likely grain orientation. Here we note that the calculations shown above are valid only for flat surfaces. The influence of surface morphology, i.e., roughness and features like step edges, are not discussed and may lead to the non-trivial dependence of ESM signal on topography. The first leads to rotated surface normal vectors which are different on different sides of the grain which can lead to additional offsets in the measured OP and IP ESM values.30–33 For the latter, step edges or other topographical features can lead to an enhanced Li-ion extraction and thus an enhanced ESM signal which is not considered in the analytical calculations. This will be subject to future studies as well as the influence of an asymmetric tip shape on the ESM signal. IV. CONCLUSION Vector-ESM can be used to investigate local volume changes in Li-ion battery materials with strong anisotropy in Li-ion conduction as well as volume changes. The cantilever deflection and torsion are measured independent of each other at flexural and torsional resonances respectively, forming the out-of-plane and in-plane components of the volume change due to bias-induced changes in the local Li-ion concentration. Vector-ESM is demonstrated on LiCoO2 thin films sputtered on Al2O3 substrates. Comparison with analytical calculations have shown, that the comparison of OP and IP ESM signals for individual grains can be used to make conclusions about single grain orientations. ACKNOWLEDGMENTS The experiments were performed with support provided by the U.S. Department of Energy, Basic Energy Sciences, Materials Sciences and Engineering Division through the Office of Science Early Career Research Program. 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