References [1]. R. J. Schroeder, R. T. Romos and T. Yamate, “Fiber optic sensors for oilfield services”, Proceedings of SPIE, vol. 3860, pp. 12-22, Boston, MA, USA. 1999. [2]. A. Mendez, R. Dalziel, and N. Douglas, “Applications of optical fiber sensors in subsea and downhole oil well environment”, Proceedings of SPIE, vol. 3860, pp. 2334, Boston, MA, USA. 1999. [3]. A.D. Kersey and F.K. Didden, “CiDRA: leveraging multi-channel telecommunications technology for enhanced downhole monitoring capabilities in the oil & gas industry”, Proceedings of SPIE, vol. 3860, pp. 35-41, Boston, MA, USA. 1999. [4]. G. Fowles, “Flow, level and pressure measurement in the water industry”, Butterworth-Heineman Ltd., 1993. [5]. B.G. Clarke, “Pressuremeters in geotechnical design”, Blackie Academic & Professional, 1995. [6].E. Udd, “Fiber optic sensors: an introduction for engineers and scientists”, John Wiley & Sons, Inc., 1991. [7]. K. Peterson, et. al, Silicon fusion bonding for pressure sensors”, Technical Digests, IEEE Solid-State Sensors and Actuator Workshop, Hilton Head Island, South Carolina, U.S.A., pp. 144, 1988 [8]. B. Kloech, et. al., “Study of electrochemical etch-stop for high precision thickness control of silicon membrane”, IEEE Transaction on Electron Devices, vol. 36, pp. 663-669, 1989. [9]. C. linder, T. Tschan and N.F. deRooij, “Deep dry etching techniques as a new IC compatible tool for silicon micromachining”, Procedding of Transducers’91, pp. 524527, 1991. [10]. H. Jansen, M. deBoer, and M. Elwenspoek, “The black silion method VI: high aspect ration trench etching for MEMS applications”, Proceedings of IEEE international Workshop Micro Electro Mechanical Systems”, San Diego, CA, U.S.A., pp 250-257, 1996, 134 [11]. G. Engelmann, O. Ehrmann, J. Simon, H. Reichl, “Fabrication of high depth-towidth aspect ratio microstructures”, Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE , pp. 93 –98, 1992. [12]. D. R. Sparks, S.C. Chang, and D.S. Eddy, “Application of MEMS Technology in automotive sensors and actuators”, Proceedings of the 1998 International Symposium on Micromechatronics and Human Science, MHS '98, pp. 9-15, 1998. [13]. C.S. Smith, “Piezoresistance in germanium and silicon”, Physics Reviews, vol. 94, no.1, pp.43-49, Apr. 1, 1954. [14]. D. R. Kerr and A.G. Milnes, “Poezoresistance of diffused layers in cubic semiconductors”, Journal of Applied Physics, vol. 34, no.4, pp. 727-731, Apr. 1963. [15]. S. Marco, J. Samitier, O. Ruiz, J. R. Morante, and J. Esteve, High-performance piezoresistive pressure sensors for biomedical applications using very thin structured membranes”, Measurement science and technology, pp. 1195-1203, Sept. 1996. [16]. S. Clark and K. Wise, “Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensor”, IEEE Transactions on Electronic Devices, ED-26, pp. 1887-1896, 1979. [17]. R. Puers, “Capacitive sensors: When and how to use them”, Sensors and Actuators A, vol. 37-38, pp. 93-105, 1993. [18]. W. Kao, M. Bao and Y. Hong, “ A high sensitivity integrated circuit capacitive pressure transducer”, IEEE Transaction on Electronic Devices, ED-29, pp. 48-56, 1983. [19]. M. Mehregany, C.A. Zorman, N Rajan, and C.H. Wu, “Silicon Carbide MEMS for Harsh Environments,” Proc. of the IEEE, Vol. 86, No. 8, Aug. 1998, pp. 1594 – 1610. [20]. I. Ayerdi, E. Castano, A. Garcia-Alonso, and J. Gracia, “High-temperature ceramic pressure sensor”, Sensors and Actuators A, vol. 60, pp. 72-75, 1997. [21]. J.W. Berthold, “Historical review of microbend fiber-optic sensors”, Journal of Lightwave Technology, Vol. 13, no.7 , pp 1193-1199, July 1995. [22]. A. Dandridge, “Acoustic sensor development at NRL”, Acoustic Society of America Annual Meeting, Miami, Fl. U.S.A. Nov. 1987. 135 [23]. A. Dandridge and A. D. Kersey, “Overview of mach-Zehnder sensor technology and applications”, Proceedings of SPIE 985, Fiber Optic and Laser Sensors VI, Boston, Sept. 1988. [24]. Y. J. Rao and D.A. Jackson, “Prototype fiber optic based pressure probe with bilt-in temperature compersation with signal recovery by coherence reading”, Applied Optics, Vol. 32, No.34, Dec. 1993. [25]. W. B. Spillman, “Multimode fiber-optic pressure sensor based on the photoelastic effect”, Optical Letters, vol. 7, no. 8, 1982. [26]. I. P. Giles, S. McNeill and B. Culshaw, “A stable remote intensity based fiber sensor”, Journal of physics, vol. 18, pp. 1124-1126, 1985. [27]. A. Wang, S. He, X. Fang, X. Jin, and J. Lin, “Optical fiber pressure sensor based on photoelastic effect and its applications”, Journal of Lightwave Technology, Vol. 10, No. 10 , pp. 1466-1472, Oct. 1992. [27]. G. Meltz, W.W. Morey, amd W.H. Glenn, “Formation of bragg gratings in optical fibers by a transverse holographic method”, Optical Letters, vol. 14, no.15, pp. 823825, 1989. [28]. A. Arie, B. Lissak, M. Tur, “Static fiber-Bragg grating strain sensing using frequency-locked lasers”, Journal of Lightwave Technology, Vol. 17, no. 10, pp. 1849-1855. Oct. 1999. [29]. P.M. Cavaleiro, F.M. Araujo, L.A. Ferreira, J.L. Santos, F. Farahi, “Simultaneous measurement of strain and temperature using Bragg gratings written in germanosilicate and boron-codoped germanosilicate fibers”, IEEE Photonics Technology Letters, Vol. 11, no. 12, pp. 1635 –1637, Dec. 1999. [30]. Y.J. Rao, D.A. Jackson, “Universal fiber-optic point sensor system for quasi-static absolute measurements of multiparameters exploiting low coherence interrogation”, Journal of Lightwave Technology, vol. 14, no. 4, Pp. 592 –600, April 1996. [31]. D.J. Hill, G.A. Cranch, “Gain in hydrostatic pressure sensitivity of coated fiber Bragg grating”, Electronics Letters, vol. 35, no. 15, pp. 1268 –1269, July 1999. 136 [32]. M.G. Xu, H. Geiger, J.P. Dakin, “Fiber grating pressure sensor with enhanced sensitivity using a glass-bubble housing”, Electronics Letters, vol. 32, no. 2, pp. 128– 129, Jan. 1996. [33]. U. Sennhauser, A. Frank, P. Mauron, P.M. Nellen, “Reliability of optical fiber bragg grating sensors at elevated temperature”, Proceedings of 38th Annual 2000 IEEE International Symposium on Reliability Physics, pp. 264-269, 2000. [34]. Perot, L. Fabry, Journal of Physics, vol. 7, 1898. [35]. D.A. Christensen, “Fiber optic temperature sensing using spectroscopic detection”, Annual meeting of the optical society of America, Oct. 1974. [36]. E.R. Cox, et al, “Fiber optic color sensors based on Fabry-Perot Interferometry”, Proc, Fisrt international conference on optical fiber sensors, London, Apr. 1983. [37]. E.W. Saaski, et al, “A family of fiber optic sensors using cavity resonator microshifts”, Proc. 4th International conference on optical fiber sensors, Tokyo 1986. [38]. L.C. Gunderson, “Fiber optic sensor applications using Fabry-Perot Interferometry”, Proc. Spie, vol. 1267, Fiber optic sensors IV, 1990. [39]. Lee, et al, “Interferometric optical fiber sensors using internal mirrors”, Electronic letters, vol 24m 193-194, 1988. [40]. M. N. Inci, et al, “Fabrication of single-mode fiber optic Fabry-Perot interferometric interferometers using fusion spliced Titanium-dioxide optical coatings,” Measurement science and technology, Vol. 3, No. 7, pp. 678-684 JUL. 1992 [41]. M. N. Inci, et al, “High temperature miniature fiber optic interferometric thermal sensors”, Measurement science and technology, Vol. 4, No. 3, pp. 382-387, MAR. 1993. [42]. A.N. Mamaev, et al, “Simultaneous measurement of temperature and strain in intrinsic interferometric sensors by means of spectral signal processing”, Proc. SPIE, vol, 2510, pp. 297-301, 1995. [43]. H.W. Haslach, et al, “Mechanical design of embedded optical fiber interferometric sensors for monitoring simple combined loads”, Optical Engineering, vol,32, No.3, pp. 494-503, Mar., 1993. 137 [44]. S.X. Zheng, et al, “Intrinsic optical fiber sensor for monitoring acoustic emission”, Sensors and actuators A-physical, vol. 3, pp. 110-114, Mar, 1992. [45]. T.W. Kao, et al, “High-sensitivity intrinsic fiber optic Fabry-Perot pressure sensor,” Optics Letters, vol. 21, No. 8, pp. 615-617, Apr. 1996. [46]. Y. Bao, et al, “Polarization-maintaining fiber Fabry-Perot tunable filters”, Optics Letters, Vol. 19, No. 24, pp. 2098, Dec. 1994. [47]. Miller, et al, “Passively temperature-compensated fiber Fabry-Perot filter and its application in wavelength division multiple access computer network”, Electron. Lett. vol. 26, pp. 2122 - 2124, 1990. [48]. Y. Suemura, et al, “An adaptive wavelength tunable optical filter employing an angle-tuned interference filter and an intelligent digital controller”, Journal of Lightwave Technology, vol. 14, pp. 1048- 1055,1996. [49]. R.C. Steele, et al, “Sensitivity of optically preamplified receivers with optical filtering”, IEEE Photonic Technology Letters., vol. 3, pp. 545 -547, 1991. [50]. Koch, et al, “Fiber optic displacement sensor with 0.02 µm resolution by whitelight interferometry,” Sensors and Actuators, A. 25-27, pp. 201-207, 1991. [51]. T, Li, et al, Optical scanning extrinsic Fabry-Perot interferometer for absolute microdisplacement measurement,” Applied Optics, vol36, No.34, Dec. 1997. [52]. T. Wang, et al, “A high precision displacement sensor using a low finesse fiber optic Fabry-Perot interferometer,” Sensors and Actuators, A 69, pp. 134-138, 1998. [53]. J.C. Hartl, et al, “Fiber optic temperature sensor using spectral modulation”, Proc. SPIE vol. 838, pp. 257-261, 1988. [54]. C.E. Lee, et al, “Performance of a fiber optic temperature sensor for –200 to 1050°C”, Optics Letters, vol. 13, pp. 1038-1040, 1988. [55]. F. Farahi, et al, “Coherence multiplexing of remote fiber optic Fabry-Perot sensing system”, Optical Communication, vol 65, pp. 319-321, 1988. [56]. P.A. Leilababy, et al, “All-Fiber optic remote sensing of temperature employing interferometric techniques”, Optics Letters, vol.12, pp. 772-774, 1987. 138 [57]. S. R. Kidd, et al, “ Unsteady Gas temperature measurement using ultra-short optical fiber Fabry-Perot interferometer,” Measurement science and technology, Vol. 5, No. 7, pp. 816-822, JUL. 1994. [58]. R.O. Claus, et al, “Extrinsic Fabry-Perot sensor for strain and crack opening displacement measurements for –200 to 900°C”, Smart material and structure, pp. 237-242, 1992. [59]. Bhatia, et al, “Recent developments in optical-fiber-based extrinsic Fabry-Perot interferometric strain sensing technology”, Smart materials and structures, vol,4, pp. 246-251, 1995. [60]. R. May, et al, “Combined fiber optic strain sensor and composite cure monitor for smart structure applications”, Proc. SPIE Vol. 2191, p. 46-57, Smart Structures and Materials 1994: Smart Sensing, Processing, and Instrumentation, May, 1994. [61]. J. A. Greene, et al, “Applications of the extrinsic Fabry-Perot interferometer”, Proc. SPIE Vol. 2510, p. 165-171, Fiber Optic and Laser Sensors XIII, Sep., 1995. [62]. K. A. Murphy, et al, “EFPI sensor manufacturing and applications”, Proc. SPIE Vol. 2721, p. 476-482, Smart Structures and Materials 1996: Industrial and Commercial Applications of Smart Structures Technologies, May, 1996. [63]. M. De Vires, et al, “Implementation of EFPI-based optical fiber sensor instrumentation for the NDE of concrete structures”, Cement and concrete composites, Vol.19, pp. 69-79, 1997. [64]. J. Sirkis, “Phase-train-temperature model for structurally embedded interferometric optical fiber strain sensors with applications”, Proc. SPIE, vol. 1588, Fiber optic smart structure and skins IV, 1991. [65]. J. S. Sirkis, “Unified approach to phase-strain-temperature models for smart structure interferometric optical fiber sensors: part 1, development and part 2: applications”, Optical Engineering, vol. 32, No. 4, pp.752-773, 1993. [66]. P. J. Henderson, et al, “Simultaneous multi-parameter monitoring using a serial fiber Fabry-Perot array with low coherence and wavelength domain detection,” Applied Optics, vol. 38, No.12, pp. 2471-2477, Apr., 1999. 139 [67]. T. Liu, et al, “A multiplexed optical fiber based extrinsic Fabry-Perot sensor system for in-situ strain monitoring in composites,” Smart Materials & Structures, vol. 7, No.4, pp. 550-556, Aug., 1998. [68]. B. Culshaw, et al, “Smart structures-the role of fiber optics”, Proc. SPIE vol.2341, interferometric sensing, 134-151, 1994. [69]. R. M. Measures, et al, “Fiber optic sensing for composite smart structures”, Composites Engineering, vol. 3, No. 7-8, pp. 715-750, 1993. [70]. Y. J. Rao and D. A. Jackson, “Prototype fiber-optic-based ultrahigh pressure remote sensor with built-in temperature compensation,” Review of Scientific Instruments, Vol. 65, No. 5, pp. 1695-1698, May 1994. [71]. M. A. Chan, et al, “A micromachined pressure sensor with fiber optic interferometric readout”, Sensors and Actuators, A. 43, pp. 196-201, 1994. [72]. Y. Kim, et al, Micromachined Fabry-Perot cavity pressure transducer,” IEEE photonics technology letters, Vol. 7, No. 12, Dec. 1995. [73]. M. Matsumoto et al, “Fiber optic acoustic sensor based on Febry-Perot interferometer”, Proc. 4th international conference on fiber optic sensors, tokyo, 1986. [74]. N. Furstenau, et al, “Acoustic sensor system for airport ground traffic monitoring”, IEE Proc. Optoelectronics Vol. 144, No.3, pp. 134-144, June, 1997. [75]. N. Furstenau, et al, “Extrinsic Fabry-Perot interferometer fiber-optic microphone”, IEEE transactions on instrumentation and measurement, vol. 47, no.1 Feb, 1998. [76]. W. N. Macpherson, et al, “Miniature fiber optic pressure sensor for turbo-machinery applications”, Review of scientific instruments, vol. 70, No. 3, Mar., 1999. [77]. S. Webster, R. Mcbride, J.S. Barton, J.D. Jones, “passive signal-processing technique for Monomode fiber optic vortex shedding flowmeters”, Measurement Science and Technology, vol. 2, no.3, pp. 223-228, Mar. 1991. [78]. J.X. Fang, et al, Fiber-optic Fabry-Perot flow sensor”, Microwave and optical technology letters, vol.18, No.3, pp. 209-211, Jun., 1998. [79]. K.A. Murphy, et. al., “Quadrature phase shifted extrinsic Fabry-Perot fiber optic sensors”, Optics letters, vol. 16, pp. 273-275, 1991. 140 [80]. D. A. Jackson, et al, “Pseudo-heterodyne detection scheme for optical interferometers”, Electronic letters, Vol. 28, pp. 1081-1083, 1982. [81]. Hogg, et al, “Development of a fiber Fabry-Perot (FFP) strain gauge”, Proc. SPIE vol. 1588, pp. 300-307, 1991. [82]. G. Stewart, et al, “Interferometric signals in fiber optic methane sensors with wavelength modulation of the DFB laser source”, Journal of lightwave technology, vol. 16, No.1, pp. 43-53, JAN 1998. [83]. T. K. Gangopadhyay and P. J. Henderson, “Vibration: history and measurement with an extrinsic Fabry-Perot sensor with solid-state laser interferometry”, Applied Optics, vol. 38, No.12, pp. 2471-2477, Apr., 1999. [84]. C. Chang and J. Sirkis, “ Absolute phase measurement in extrinsic Fabry-Perot optical fiber sensors using multiple path-match conditions,” Experimental mechanics, Vol. 37, No. 1, pp. 26-32, 1996. [85]. Y. Lo and J.S. Sirkis, “Fabry-Perot sensors for dynamic studies using spectrally based passive quadrature signal processing,” Experimental mechanics, vol. 37, No.2, pp. 119-125, 1997. [86]. M. Furstenau and N. Schemidt, “Fiber optic extrinsic Fabry-Perot interferometric sensors with three wavelength digital phase demodulation,” Optics Letters, Vol. 24, No. 9, pp. 599-601. 1999. [87]. N. Schemidt and M. Furstenau, “Fiber optic extrinsic Fabry-Perot interferometric vibration sensor with two wavelength passive quadrature readout,” IEEE transaction on instrumentation and measurement, vol. 47, No.1, pp. 143-146, Feb, 1998. [88]. T. Li, “Optical fiber communications”, Volume 1, Fiber Fabrication, Academic Press, Inc., 1985. [89]. W.X. Zheng, “Real-time control of ARC fusion for optical fiber splicing”, Journal of Lightwave Technology, vol.11, no. 4, pp.548-553, Apr. 1993. [90]. B. B. Muvdi, J. W. McNabb, “Engineering Mechanics Materials”, Macmillian Publishing Company, pp. 597-602,1984. [91]. E. J. Hearn, “Mechanics of Materials”, Pergamon Press, pp. 194-217,1977. 141 [92]. P. N. J. Dennis, “Photodetectors : an introduction to current technology”, New York: Plenum Press, 1986. [93]. J. G. Graeme, “Photodiode amplifiers: op amp solutions”, New York : McGraw Hill, 1996. [94]. T. Okoshi, IEEE Journal of Quantum Electronics. QE-17, no. 6, pp. 879-884, 1981. [95]. J.D. Love, R.A. Sammut, and A.W. Snyder, Electronic Letters. Vol. 15, no. 20, pp. 615-616, 1979. [96]. L. B. Jeunhomme, “Single-mode Fiber Optics: principles and applications”, second edition, Marcel Dekker, Inc., New York and Basel, pp. 66-67, 1990. [97]. R.B. Dyott, J.R. Cozens, and D.G. Morris, Electron. Lett., vol. 15, no. 13, pp. 380382, 1979. [98]. I.P. Kaminow and V. Ramaswamy, Applied Physics Letters, vol. 34, no.4, pp. 268270, 1979. [99]. A. M. Smith, Electronics Letters, vol. 16, No. 20, pp. 773-774, 1981. [100]. R. Ulrich and A. Simon, Applied optics, vol 18, No 13, pp. 2241-2251, 1979. [101]. M. Born and E. Wolf, “Principles of light”, sixth edition, the Press Syndicate of the University of Cambridge, pp. 24-31. 1980. [102]. E. Collett, “Polarized light: fundamentals and applications”, Marcel Deller, Inc., pp. 33-61, 1993. [103]. S. Huard, “Polarization of light”, John Wiley and Sons, pp. 198-202, 1997. [104]. C. R. Pollock, “Fundamentals of optoelectronics”, Richard D. Irwin, Inc., pp. 144, 1995. 142