Instruction Manual EL-FLOW Prestige series Thermal Mass Flow Meters/Controllers Doc. no.: 9.17.084D Date: 14-04-2016 ATTENTION Please read this Instruction Manual carefully before installing and operating the instrument. Not following the guidelines could result in personal injury and/or damage to the equipment. Bronkhorst High-Tech B.V. Disclaimer The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is assumed for inaccuracies. The material in this manual is for information purposes only. Copyright All rights reserved. This documentation is protected by copyright. Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular persons or organizations. The device specifications and the contents of the package may deviate from what is stated in this document. Symbols Important information. Discarding this information could cause injuries to people or damage to the instrument or installation. Helpful information. This information will facilitate the use of this instrument. Additional info available on the internet or from your local sales representative. Receipt of equipment Check the outside packing box for damage incurred during shipment. When the packing box is damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales representative. Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales representative. Check the packing list to ensure that you received all of the items. Do not discard spare or replacement parts with the packing material and inspect the contents for damage. Refer to "Removal and return instructions" about return shipment procedures. Equipment storage The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be taken not to subject the equipment to excessive temperatures or humidity. 2 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. Warranty Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date of shipment provided they are used in accordance with the ordering specifications and not subjected to abuse or physical damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are normally warranted for one year or the balance of the original warranty, whichever is the longer. See paragraph 9 of the Conditions of sales: http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf The warranty includes all initial and latent defects, random failures, and undeterminable internal causes. It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc. Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be charged for. Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is performed under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping methods/carriers are paid by the customer. Safety Precautions The following safety precautions should be observed before using this product and any associated instrumentation. This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read the operating information carefully before using the product. Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables, test leads, cracks, or breaks before each use. The module and accessories must be used in accordance with its specifications and operating instructions or the safety of the equipment may be impaired. If required, replace fuses with the same type and rating for continued protection against fire hazard. Opening of the equipment is not allowed. There are no repairable parts inside. In case of a defect please return the equipment to Bronkhorst High-Tech. The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual. Surfaces near the symbol may be hot. To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst High-Tech B.V. Standard fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are not safety related may be obtained from other suppliers as long as they are equivalent to the original component. (Note that selected parts should be obtained only through Bronkhorst® to maintain accuracy and functionality of the product.) If you are unsure about the applicability of a replacement component, call a Bronkhorst® office for information. 9.17.084 EL-FLOW Prestige 3 Bronkhorst High-Tech B.V. Table of contents 1 . . . . .manual ......................................................................................................6 Scope of .this 1.1 ............................................................................................................6 Introduction ............................................................................................................6 Intended use 1.2 1.3 1.4 ............................................................................................................6 Product description . . . other . . . . . . applicable . . . . . . . . . . . documents .......................................................................................7 References. to 1.5 Model key. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2 ............................................................................................................9 Starting up 2.1 2.2 . . . . . . . .properties ....................................................................................................9 Check functional . . . . . . . conditions .....................................................................................................9 Check operating 2.2.1 Rated pressure . . . . . test . . . . .inspection ..................................................................................................9 2.2.2 Sealings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 2.2.3 Environmental . . . . . ratings .......................................................................................................9 2.3 ............................................................................................................9 Piping requirements . . .mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Instrument 2.4 2.5 2.6 2.7 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Leak check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Electrical connection 2.7.1 . . . . . . . operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Analog / digital Analog / local . . . . . .operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.7.2 Digital RS232 . . . . .operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.7.3 Digital RS485 . . . . ./. bus . . . . .operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.8 . . . . operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Micro switch . . . . . . .micro . . . . . . switch) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 Zeroing (using 2.9 2.10 2.11 2.12 Purging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 Supply pressure 2.13 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 Maintenance 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 Basic operation 3.1 3.1.1 . . . . . . . . . . . . . . .and . . . . control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 Mass flow. .measurement Changing. .fluidset, . . . . . . . . range . . . . . . . or . . .operating . . . . . . . . . . .conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 3.1.2 Valve Safe. . State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 3.2 . . . . . . . . interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 Communication Using multiple . . . . . . .interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15 3.2.1 3.3 3.3.1 3.4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 Analog operation Hook-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 3.4.1 . . . operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 Basic RS232 Hook-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17 3.4.2 FlowDDE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 3.4.3 Software .(DDE . . . . . applications) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19 3.4.4 Baud rate. setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19 3.5 3.5.1 . . . (FLOW-BUS/Modbus) . . . . . . . . . . . . . . . . . . . . . . operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 Basic RS485 Hook-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 3.5.2 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 3.5.3 Baud rate,. .node . . . . . .address . . . . . . . . and . . . . . parity . . . . . . .setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 3.6 3.6.1 . . bus . . . . .configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 Other field Hook-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 3.6.2 Baud rate,. .node . . . . . .address . . . . . . . . and . . . . . parity . . . . . . .setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 4 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 3.7 3.8 3.9 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 LED indications . . . . functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 Micro switch 3.9.1 . . . . . . . . .and . . . . properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 Basic parameters Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 3.9.2 Basic measurement . . . . . . . . . . . and . . . . . control . . . . . . . . parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 3.9.3 Basic identification . . . . . . . . . . . parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 3.9.4 Basic alarm . . . and . . . . .counter . . . . . . . . settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 3.9.5 Zeroing (using . . . . . . .digital . . . . . . .operation) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 3.9.6 Instrument . . .parameter . . . . . . . . . . . list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 4 . . . .operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 Advanced 4.1 4.2 . . . . . . . . compatibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 Sealing material . . . . . . . . . . . .and . . . . properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 Advanced. .parameters 4.2.1 Advanced. .measurement . . . . . . . . . . . . . . and . . . . . control . . . . . . . . parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 4.2.2 Special instrument . . . . . . . . . . .parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 4.2.3 Advanced. .fluidset, . . . . . . . . range . . . . . . . and . . . . .operating . . . . . . . . . . conditions . . . . . . . . . . . . parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 4.2.4 Advanced. .alarm . . . . . . parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37 4.2.5 Advanced. .counter . . . . . . . . parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 4.3 4.3.1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 Field bus .operation FLOW-BUS . . master/slave . . . . . . . . . . . . . . controller . . . . . . . . . . .operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 4.3.2 Changing. .baud . . . . . .rate, . . . . .node . . . . . .address . . . . . . . . and . . . . .parity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 4.4 4.4.1 . . . . . . . . . . .features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 Special instrument Customized . . . .IO . . options . . . . . . . . . (pin . . . . .5). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 4.4.2 Changing. .default . . . . . . . .control . . . . . . . .mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 5 . . . . . . . . . . . . and . . . . . service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 Troubleshooting 5.1 5.2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 Troubleshooting 5.3 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47 6 . . . . . .return . . . . . . . .instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48 Removal. . and 9.17.084 EL-FLOW Prestige 5 Bronkhorst High-Tech B.V. 1 Scope of this manual 1.1 Introduction This manual covers the EL-FLOW Prestige series mass flow meters/controllers for gases. Examples of the instrument series are shown in the pictures below. This manual includes product information, installation instructions, operation, maintenance and troubleshooting. 1.2 Intended use The intended use of the EL-FLOW Prestige instruments is to accurately measure and/or control gas flow rates of a specified gas at conditions noted on the instrument label. The gas in the pressurized system in which the instrument is mounted has to be clean and dry. The instruments are suited for general purpose indoor (dry) applications, like laboratories and in well protected (OEM) housings. The instruments can be used for either (fast) switching gas flow or for controlling a constant flow rate (mass flow controllers only). 1.3 Product description EL-FLOW Prestige is the next generation of Bronkhorst Mass Flow Meters/ Controllers using the latest, highly accurate, thermal by-pass sensor technology and featuring excellent control characteristics. Thanks to the advanced sensor technology in combination with a state-of-the-art pc-board, the instruments feature improved long-term stability as well as an unsurpassed temperature stability. Furthermore, due to a power efficient microprocessor, the power consumption of the instrument is reduced. The mass flow meters and controllers can be supplied in full scale ranges from 0,7 mln/min up to 20 ln/min Air-equivalent at max. 64 or 100 bar (1000 or 1500 psi) pressure rating. EL-FLOW Prestige offers high flexibility due to the multi-gas/multi-range functionality. This function, now extended to 25 gases and mixtures thereof, is easily accessible via the FlowTuneTM software or PLC; there is no need to disconnect the instrument from your system. For additional gas types the user can calculate accurate fluid properties for conversion by means of our free, online software tool Fluidat® on the Net. Users of EL-FLOW Prestige instruments can rescale their instruments on site, saving time and money for dismounting and recalibration. Numerous input/output options can be installed through the programmable sub-D 9-pin connector (from factory). In addition to the various analog signal options and the standard RS232 communication, there are such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output. Furthermore Bronkhorst offers various integrated fieldbus options: DeviceNetTM, PROFIBUS DP, Modbus RTU/ASCII, EtherCAT®, PROFINET and FLOW-BUS. 6 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 1.4 References to other applicable documents Basic instructions Dimensional drawings Document 9.17.083 Document 7.15.176 Quick installation guide EL-FLOW Prestige Dimensional drawing FG-110C Document 7.15.177 Dimensional drawing FG-111B Document 7.15.178 Dimensional drawing FG-200CV / FG-210CV Document 7.15.179 Dimensional drawing FG-201CV / FG-211CV Document 7.15.180 Dimensional drawing FG-201CS Advanced instructions Hook-up diagrams Document 9.17.027 Document 9.16.119 Document 9.17.024 Document 9.16.120 Document 9.17.025 Document 9.16.121 Document 9.17.026 Document 9.16.122 Instruction manual DeviceNetTM interface Hook-up diagram LAB MBC3 DeviceNetTM Document 9.17.035 Document 9.16.123 Document 9.17.063 Document 9.16.124 Document 9.17.095 Document 9.16.147 Instruction manual RS232 interface Instruction manual FLOW-BUS interface Instruction manual PROFIBUS DP interface Instruction manual Modbus interface Instruction manual EtherCAT® interface Instruction manual PROFINET interface Hook-up diagram LAB MBC3 RS232 and Analog Hook-up diagram LAB MBC3 FLOW-BUS Hook-up diagram LAB MBC3 PROFIBUS DP Hook-up diagram LAB MBC3 Modbus Hook-up diagram LAB MBC3 EtherCAT® Hook-up diagram LAB MBC3 PROFINET Document 9.16.118 Hook-up diagram LAB MBC3 Custom bus & IO configurations i www 9.17.084 These documents can be found at: http://www.bronkhorst.com/en/downloads EL-FLOW Prestige 7 Bronkhorst High-Tech B.V. 1.5 8 Model key EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 2 Starting up 2.1 Check functional properties Before installing your EL-FLOW Prestige mass flow meter/controller it is important to read the label on the backside of the instrument and check: · Flow rate · Fluid to be measured · Up- and downstream pressures · Temperature · Valve type (N.C.= Normally Closed, N.O.= Normally Opened) · Input/output signal (see also section 2.6) 2.2 Check operating conditions 2.2.1 Rated pressure test inspection Each EL-FLOW Prestige instrument is pressure tested to at least 1.5 times the maximum operating pressure of the instrument. Each instrument is helium leak tested to at least 2x10-9 mbar l/s Helium outboard. The tested pressure is stated on the instrument with a red-colored sticker. Before installation, make sure that the test pressure is in accordance with normal safety factors for your application. If there is no Pressure Testing Sticker on the device or if the test pressure is incorrect, the instrument should not be mounted in the process line and be returned to the factory. 2.2.2 Sealings EL-FLOW Prestige instruments are equipped from factory with sealings compatible with the requested gas type. However the instruments have multi-gas/multi-range functionality on board. If another gas or mixture is used, always make sure that the gas/mixture is compatible with the installed sealing materials. Refer to Section 4.1 for a compatibility list. 2.2.3 Environmental ratings EL-FLOW Prestige instruments are suitable for use in conditions between -10…70 °C and relative humidity of 10…90 %RH, unless specified otherwise. Please note that EL-FLOW Prestige instruments have an ingress protection of IP-40, implying that the electronics housing and electrical connection do not offer any protection against moist environments. Make sure that process gases do not condensate in the instrument due to (changing) environmental conditions, condensed process fluids may seriously harm the instrument's functionality! E.g. do not use moist air as process gas at low temperatures. 2.3 Piping requirements For reliable measurement always make sure the fluid stream is clean. Use filters to assure a moisture-, oil- and particle free gas stream. Recommended pore-size: 5 µm. If back flow can occur, a downstream filter and a check valve are recommended too. For high flow rates select a suitable filter size, to avoid too high pressure drop. Do not install small diameter piping on high flow rates, because the inlet jet flow may affect the accuracy Do not mount abrupt angles directly on in- and outlet, especially not on high flow rates. At least 10 pipe diameters distance between the angle and the instrument is recommended. Do not mount pressure regulators directly on the inlet of gas flow meters/controllers, but allow at least 25 pipe diameters of piping. 9.17.084 EL-FLOW Prestige 9 Bronkhorst High-Tech B.V. 2.4 Instrument mounting Install the EL-FLOW Prestige meter/controller in the line, in accordance with the direction of the FLOW arrow. The arrow for flow direction is indicated on the body of the instrument. Tighten the fittings according to the instructions of the supplier of the fittings. The use of Swagelok RS-type stainless steel adapters is recommended. For EL-FLOW Prestige instruments the upright position is preferred. When mounting an instrument in up- or downward position, zeroing of the instrument is advised (see section 2.9), especially at high pressures (> 10 bar). Avoid installation in close proximity of mechanic vibration and/or heat sources. At the bottom side of the instrument a number of mounting holes are present, for stable fixation of the instrument. Refer to the dimensional drawing for the instrument for the exact position of the mounting holes. i www 2.5 Dimensional drawings can be found at: http://www.bronkhorst.com/en/downloads Leak check Check the system for leaks before applying (fluid) pressure. Especially if toxic, explosive or other dangerous fluids are used! 2.6 Electrical connection Electrical connection must be made with standard cables or according to the applicable hook-up diagrams. The factory installed 9-pin sub-D settings are indicated on the instrument back-side label. Make sure that the power supply is suitable for the power ratings as indicated on the instrument label and that double or reinforced insulation is used for the power supply. i www Applicable hook-up diagrams for EL-FLOW Prestige can be found at: http://www.bronkhorst.com/en/downloads EL-FLOW Prestige instruments are powered with +15…+24 Vdc. Several hook-up examples and standard cables are found in chapter 3. Do not power the instrument simultaneously from two different power sources (e.g. bus connection and PiPS). Doing so will blow the fuse on the pc-board, requiring the return of the instrument for repair. The instruments contain electronic components that are susceptible to damage by electrostatic discharge. Proper handling procedures must be taken during installation, removing and connecting the electronics. The instruments described in this manual carry the CE-mark and are compliant with the EMC requirements. However compliance with the EMC requirements is not possible without the use of proper cables and connector/gland assemblies. Bronkhorst High-Tech B.V. recommends the use of their standard cables. These cables have the right connectors and if loose ends are used, these will be marked to prevent wrong connection. When using other cables, cable wire diameters should be sufficient to carry the supply current and voltage losses must be kept as low as possible. When in doubt: contact your distributor. When connecting the system to other devices (e.g. PLC), be sure that the integrity of the shielding is not affected. Do not use unshielded wire terminals. 10 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 2.7 Analog / digital operation 2.7.1 Analog / local operation If the instrument has FLOW-BUS, Modbus or DeviceNetTM communication and is set in digital mode, a dust cover is placed over the 9-pin sub-D connector. This cover can be removed for accessing analog/local operation, by pushing the lower end of the cover. Connect the EL-FLOW Prestige to the power supply/readout unit using a cable with 9-pin sub-D connector. 2.7.2 Digital RS232 operation Digital operation over RS232 can be established when using the following setup or using a Bronkhorst E-8000 readout/control unit. See section 3.4.1 for connecting to an E-8000. Connecting the instrument with an RS232 cable or an RS232 cable with a USB to RS232 converter to a PC will allow you to use (free) Bronkhorst software for Windows, such as FlowDDE and FlowPlot. Make sure that the instrument back-side label indicates RS232 settings for the 9pin sub-D connector and apply the proper baud rate settings. If the instrument is not set for RS232 communication, please refer to section 3.4 for switching to RS232 communication settings via the 'Configuration Mode'. i www 2.7.3 A PiPS (Plug-in Power Supply, art.nr.: 7.03.422) is available to power a single instrument and can be used instead of the DB9 Loose-end cable as shown in the example above. Detailed information can be found in the manual PiPS (9.17.055) which can be downloaded at the download section from the website: http://www.bronkhorst.com/en/downloads Digital RS485 / bus operation With digital operation over RS485 or Ethernet a bus-system with multiple instruments can be set up. For RS485 FLOW-BUS or Modbus operation over the 9-pin sub-D connector or via an additional field bus driver (if installed), see section 3.5. For operation via other additional field bus systems (e.g. DeviceNetTM, EtherCAT®), refer to section 3.6 or the specific field bus manual. 2.8 Micro switch operation Using the two colored LEDs and the micro switch on the EL-FLOW Prestige, several actions can be monitored and started. The green LED is used for status indication. The red LED is used for errors, warnings and messages. The switch can be used to start several actions, such as auto-zero, restore factory settings and bus-initialization actions, if applicable. See specific zero-procedure below (section 2.9) for more details. The micro switch on top of the EL-FLOW Prestige can be operated with a thin, metal or hard plastic pin. For example the end of a paperclip. 9.17.084 EL-FLOW Prestige 11 Bronkhorst High-Tech B.V. 2.9 Zeroing (using micro switch) The zero-point of each instrument is factory adjusted. If so required the zero point may be re-adjusted over RS232, fieldbus or by means of using the micro switch. Procedure for zeroing by micro switch (for zeroing through a command via BUS/ RS232 see section 3.9.5): 1. 2. 3. 4. Warm-up, pressure up the system and fill the instrument according to the process conditions. Make sure no flow is going through the instrument by closing valves near the instrument. The setpoint must be zero. Press micro switch and hold it. After a short time the red LED will go ON and OFF, then the green LED will go ON. At that moment (which is 8...12 s after pressing) release the switch. 5. The zeroing procedure will start at that moment and the green LED will blink fast. The procedure will take approx. 5 seconds. 6. When the indication is showing 0% signal and the green indication LED is burning continuously again, then the zeroing action was successful. • • • • 2.10 Purging Do not apply pressure until electrical connections are made. When applying pressure to the system, avoid pressure shocks in the system and increase pressure gradually. Also decrease pressure gradually when required. In systems for use with corrosive or reactive fluids, purging for at least 30 minutes with a dry, inert gas (like Nitrogen or Argon) is absolutely necessary before use. After use with corrosive or reactive fluids, complete purging is also required before exposing the system to air. Let the EL-FLOW Prestige warm-up for at least 30 minutes for best accuracy. 2.11 Supply pressure It is recommended to turn on power before applying pressure on the instrument and to switch off power after removing pressure. Turn on fluid supply gently. Avoid pressure shocks and bring the instrument gradually up to the level of the actual operating conditions. Also switch off fluid supply gently. 2.12 Calibration Each EL-FLOW Prestige instrument is factory calibrated. Bronkhorst High-Tech B.V. certifies that all instruments meet the rated accuracy. Calibration is performed using measurement standards traceable to the Dutch Metrology Institute (VSL). Calibration certificates are included in the shipment. Periodical inspection, recalibration or verification of the accuracy may be subject to individual requirements of the end-user. Unless specified otherwise, EL-FLOW Prestige instruments are Air or N 2 calibrated. The calibration is converted to the customer’s fluid and conditions using a detailed conversion model. This conversion model provides all the fluid data and calculations for the applicable process conditions and is also used for the multi-gas/multi-range functionality of the instrument. 2.13 Maintenance No routine maintenance is required to be performed on the meters/controllers when they are used with clean gas, compatible with the wetted materials in the instruments. Units may be flushed with clean, dry inert gas. In case of severe contamination it may be required to clean the inside of the instrument. After cleaning a recalibration is needed. Bronkhorst High-Tech B.V. has a trained staff available. Contact your local supplier for cleaning and recalibration options. If the equipment is not properly serviced, serious personal injury and/or damage to the equipment could be the result. It is therefore important that servicing is performed by trained and qualified personnel. 12 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 3 Basic operation 3.1 Mass flow measurement and control After correct installation of the EL-FLOW Prestige Mass Flow Meter (MFM) or Mass Flow Controller (MFC) and when all safety precautions have been taken into account (see chapter 2) the instrument can immediately be used for measuring/ controlling the required flow rate in the system by means of the selected communication interface(s). Here are some general guidelines for mass flow measurement/control: EL-FLOW Prestige MFMs/MFCs are most accurate at the specified inlet/outlet pressure, temperature and process gas conditions, however the instrument will function properly in a wide range of varying conditions. It is strongly advised to use the FlowTune™ software available with the instrument to set the correct process conditions if the actual process conditions differ from the conditions for which the instrument is set (see section 3.1.1). Although EL-FLOW Prestige MFMs/MFCs have excellent temperature stability, the best accuracy is achieved when temperature gradients across the instruments are avoided; so make sure that the gas temperature equals the ambient temperature and mount the instruments on a rigid (heat conducting) surface. EL-FLOW Prestige MFCs handle pressure shocks in the system well, but are not insensitive to pressure fluctuations. For optimum control stability, provide a stable (pressure controlled) inlet pressure with sufficient buffer volume between the pressure regulator and the MFC and avoid installing multiple MFCs or other control valves in close proximity to another with small volume piping in between. Mass Flow control When an MFC (either with normally closed (n.c.) or normally opened (n.o.) valve) is hooked-up, the control valve closes when no setpoint is given. When the MFC receives a setpoint from the active setpoint source, the internal PID controller will immediately open the control valve until the required flow rate is achieved and it will maintain that flow rate until another setpoint is given. 3.1.1 Changing fluidset, range or operating conditions When the EL-FLOW Prestige instrument is used for other processes/conditions than indicated on the instrument label, use the FlowTuneTM software for setting the instrument for the required conditions. With FlowTune the following settings can be changed: · Store up to eight different fluid sets · Select one of 25 pre-installed gases per fluidset or compose any mixture consisting of these gases · Insert fluid properties for any other gas/mixture per fluidset · Change inlet- and/or outlet pressure according to actual process conditions · Re-range the full scale (FS) flow rate within the instrument's accepted flow range · Change the control speed per fluidset for faster or slower (smoother) flow control 9.17.084 EL-FLOW Prestige 13 Bronkhorst High-Tech B.V. The multi-gas/multi-range functionality is available for the full temperature and pressure range for the instrument, within the limitations of the instrument that is connected. FlowTune checks the changes for the following limitations: · · · · · Rangability of the flow sensor for the selected fluid Rangability of the control valve for the selected fluid Accuracy indication for the given flow range Compatibility of selected gases with the installed sealing materials (see also section 4.1) Limitations to the operation conditions For connection to FlowTune, make sure that the instrument back-side label indicates RS232 settings for the 9-pin sub-D connector and apply the proper baud rate settings. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration Mode’. • • The EL-FLOW Prestige instrument will automatically adjust the controller settings to the new process conditions. there is no need to adjust controller PID settings manually. It is advised to use FlowTune only in a non-operational environment. FlowTune will force the instrument to the 'Valve Safe State' mode (see section 3.1.2) when the connection is made. Be sure to close the communication properly to restore the instrument to its normal operating mode. i www The FlowTune software for EL-FLOW Prestige and the applicable manual document 9.17.046 can be downloaded at the download section from the website: http://www.bronkhorst.com/en/downloads Using custom fluids or fluid properties With FlowTuneTM it is possible to insert fixed fluid properties for any other gas/mixture. The required fluid properties are density, heat capacity, thermal conductivity and dynamic viscosity. It is possible to use custom fluid data, however Bronkhorst advises to use the FLUIDAT® on the Net website for calculation of fluid properties at the customer process conditions. FLUIDAT® is a collection of routines to calculate physical properties of gases (and liquids). These routines are made available at the FLUIDAT® on the Net website. i www 3.1.2 FLUIDAT® on the Net can be accessed via the website: http://www.fluidat.com . FLUIDAT® on the Net is free to use, but only registered users have full access to fluids and functionality. Registration is possible via the FLUIDAT® website. Valve Safe State When an MFC is not powered, the control valve automatically returns to its 'Safe State', which is closed for a 'normally closed (n.c.)' valve and fully opened for a 'normally opened (n.o.)' valve. During operation, certain communication errors may cause the MFC to go to the 'Valve Safe State' mode to protect the system, e.g. when fieldbus communication fails (PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET only). Also when fluidset configuration of the instrument is incorrect, the instrument may go to the 'Valve Safe State' mode. See section 3.7 for more information and the LED indications for the 'Valve Safe State' mode or section 4.2.3 for the fluidset configuration parameters. 3.2 Communication interfaces Numerous input/output options can be installed on EL-FLOW Prestige instruments via both the 9-pin sub-D connector on the side of the instrument and the optional field bus connector on top of the instrument. Analog and RS232 (or RS485) 14 FLOW-BUS and Modbus PROFIBUS EL-FLOW Prestige DeviceNet™ EtherCAT® and PROFINET 9.17.084 Bronkhorst High-Tech B.V. Via the 9-pin sub-D side connector the instrument can be operated by means of: · Analog interface (section 3.3): 0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA · Digital RS232 interface (section 3.4 and document 9.17.027): (FLOW-BUS (Propar) protocol) · Digital RS485 interface (section 3.5): (Modbus RTU, Modbus ASCII or FLOW-BUS protocols) The following optional field bus interfaces can be installed: · · · · · · FLOW-BUS interface (section 3.5 and document 9.17.024) Modbus (RTU or ASCII) interface (section 3.5 and document 9.17.035) PROFIBUS DP interface (section 3.6 and document 9.17.025) DeviceNetTM interface (section 3.6 and document 9.17.026) EtherCAT® interface (section 3.6 and document 9.17.063) PROFINET interface (section 3.6 and document 9.17.095) The interpretation of the LED indications and use of the micro switch button on top of the instrument is discussed in section 3.7 and section 3.8 respectively. 3.2.1 Using multiple interfaces The analog interface is always present on EL-FLOW Prestige instruments. An interface to any available field bus is optional. Operation via analog interface, RS232/RS485 (side connector) and an optional field bus (top connector) can be performed at the same time. When using multiple interfaces, reading of parameters can be done simultaneously. When changing a parameter value, the last value sent by any of the interfaces will be valid. Control mode A controller setpoint is accepted from either the analog or digital interface, but not both. Analog or digital operation is selected at ordering and indicated on the instrument backside label. The inactive setpoint source is indicated between brackets (…), see example below. The parameter ‘Control Mode’ indicates from which source a controller setpoint is accepted: analog or digital. See section 4.2.2 for more information regarding the ‘Control Mode’ parameter. Factory communication settings The factory selected communication and side connector pinning settings are indicated on the instrument backside label. See example below for a description of the communication information indicated on the instrument label: 1. Model key (see explanation of the model key in section 1.5) 2. Field bus (top connector) (example: none) 3. Customized IO settings (pin 5), see section 4.4.1 for more information (example: default setting) 4. Analog interface (pin 2, 3) (example: inactive setpoint source, measure always available) 5. Digital interface (pin 1, 6) (example: RS232, active setpoint source) 6. Side connector digital interface settings (protocol, medium, baud rate, parity) (example: FLOW-BUS (Propar) communication over RS232 interface with baud rate 115200 Baud and no parity) 9.17.084 EL-FLOW Prestige 15 Bronkhorst High-Tech B.V. 3.3 Analog operation The following analog signals are available for each instrument through the 9-pin sub-D side connector: · Measured value (analog output) at pin 2 · Setpoint (analog input/setpoint) at pin 3 The factory selected analog interface (0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA) can be found in the model key of the instrument (section 1.5) and in the pin description at the instrument backside label. Pin 5 is used for customized I/O configurations. However, by default it is set as an analog output: · Valve output (control signal only) 0…10 Vdc at pin 5 (default) For customized pin 5 I/O configurations see section 4.4.1. The factory selected pin 5 configuration can be found in the model key of the instrument (section 1.5) and in the pin description at the instrument backside label. When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to RS232 for reading/changing parameters (e.g. settings or fluid selection). 3.3.1 Hook-up Refer to the hook-up diagram for analog operation (document 9.16.119) or use a 9-pin sub-D loose-end cable to connect the required signals. 3.4 Basic RS232 operation Digital RS232 (or bus) operation adds a lot of extra features to the instruments compared to analog operation, such as: · Up to eight selectable and customizable fluids (section 3.1.1) · Multi gas / multi range functionality (section 3.1.1) · Direct reading at readout/control module or host computer (section 3.4.1) · Self-testing and diagnostics (section 5.1) · Identification (section 3.9.3) · Adjustable minimum and maximum alarm limits (section 3.9.4) · (Batch) counter (section 3.9.4) Each instrument process is controlled (internally) by specific parameters. The instrument parameter values are accessible through the available digital interfaces to influence the instrument behavior. In this section it is explained how to operate an instrument using RS232 communication. Make sure that the instrument back-side label indicates RS232 settings for the 9-pin sub-D connector and apply the proper Baud rate settings. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration Mode’. • 16 • EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 3.4.1 Hook-up A special T-part cable (7.03.366) is required for connecting the 9-pin sub-D side connector of an EL-FLOW Prestige instrument to a COM port of a pc for RS232 communication. Optionally use an RS232 to USB2.0 converter (9.09.122) to connect to a USB port. Use a Plug-in Power Supply (PiPS) (7.03.422) for powering the instrument. Alternatively use a 9-pin sub-D loose-end cable and refer to the hook-up diagram for RS232 operation (document 9.16.119) to connect the required signals, typically for connection to PLC or microcontroller devices. If an instrument is powered through the bus connector on top of the instrument (if present), the 9-pin sub-D side connector can be connected to a COM port directly using the T-part cable 7.03.366 or cable 7.03.367. The figure on the right shows a hook-up example for DeviceNet™. Keep in mind that the 9-pin sub-D configuration of a Bronkhorst instrument differs from the 9-pin sub-D configuration of a PC COM-port. Make sure the correct cables are used for hook-up. When in doubt, always check the hook-up diagrams associated with the instruments. E-8000 When an EL-FLOW Prestige instrument is used in combination with an E-8000 readout/ control unit equipped with an RS232 interface, the instrument can be powered and operated using the 9-pin sub-D (female) connector at the rear of the E-8000 module and a cable 7.03.016 or equivalent. With the display interface and control buttons most digital functions described in this document can be used. See E-8000 manual (document 9.17.076) for more information. BRIGHT When an EL-FLOW Prestige instrument is used in combination with a BRIGHT B1 or B2 readout/control module, most digital functions are available by using the display interface and control buttons. If a BRIGHT module is connected, no other RS232 communication with the instrument can be established. For more information see the BRIGHT manual (document 9.17.048). 9.17.084 EL-FLOW Prestige 17 Bronkhorst High-Tech B.V. 3.4.2 FlowDDE RS232 communication can be used for operating the instrument using the Bronkhorst FlowDDE server application. Dynamic Data Exchange (DDE) provides the user a basic level of interprocess communication between Windows applications. FlowDDE is a DDE server application. Together with a client application, either self-made or with a SCADA-program from third parties, it is possible to create an easy way of data exchange between the flow meter/controller and a Windows application. For example, a cell in Microsoft Excel could be linked to the measured value of the EL-FLOW Prestige and when the measured value changes, it will be updated automatically in the Excel spreadsheet. The FlowDDE server offers the user a different and user-friendly interface to the instrument. FlowDDE makes use of specific parameter numbers for communicating with the instrument. A DDE-parameter number is a unique number in a special FlowDDE instruments/parameter database and not the same as the parameter number from the process on an instrument. Node-address and process number will be translated by FlowDDE to a channel number. DDE-client applications communicate to the FlowDDE server by using DDE messages. Before messages can be exchanged, a DDE link has to be made. A DDE link consists of three parts: the server, the topic and an item. For separation the characters '|' and '!' may be used, so a DDE link in e.g. Microsoft Excel becomes: Server|Topic!Item. For standard instrument parameters and the FlowDDE server, these are: · Server: FlowDDE or FlowDDE2 · Topic: ‘C(X)’ for channel number X · Item: ‘P(Y)’ for parameter number Y An example of a DDE link in a Microsoft Excel cell is =FlowDDE|’C(1)’!’P(8)’ to read parameter 8 of channel 1. How to setup a DDE link with FlowDDE is described in the help-file of the FlowDDE application and in the instruction manual document 9.17.067. Programming examples are available for making applications in: Visual Basic, LabVIEW and Microsoft Excel. When not using FlowDDE for communication with the instrument, each parameter value is addressed by: · Node address of the instrument · Process number on the instrument · Parameter number on the instrument Refer to section 3.9 for more information regarding instrument parameters. i www 18 For more information regarding FlowDDE, see document 9.17.067 'Instruction manual FlowDDE' which can be found on: http://www.bronkhorst.com/files/downloads/manuals_english/917067manual_flowdde.pdf EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 3.4.3 Software (DDE applications) Examples of free Bronkhorst DDE client applications: FlowDDE, FlowPlot and FlowView. Other software programs supporting DDE are for example MS-Office, LabVIEW, InTouch and Wizcon. Bronkhorst® software applications 'FlowView' (left) and 'FlowPlot' (right) i FlowDDE and other Bronkhorst applications are available on the support CD or can be downloaded from the Bronkhorst internet site: http://www.bronkhorst.com/en/products/accessories_and_software/ bronkhorst_flowware/ www 3.4.4 Baud rate setup EL-FLOW Prestige instruments support the following baud rates for RS232 communication. The factory selected baud rate is indicated on the instrument back-side label. Refer to section 4.3.2 for changing the baud rate settings for the instrument. The default baud rate for RS232 communication is 38400 Baud. Mode: Digital Interface/medium: RS232 Protocol: FLOW-BUS (Propar) Baud rate: 9600 16200 38400 57600 115200 230400 460800 3 Node address: None Parity: RS232 communication options Changing RS232 settings of the 9-pin sub-D side connector interface Refer to section 4.3.2 for changing the baud rate settings for the instrument. Make sure that the instrument’s baud rate corresponds with the baud rate of the application the instrument is communicating with, otherwise no communication can be established. For RS232 communication, the maximum cable length is 10 m for baud rates up to 38400 Baud. For higher baud rates, use cable lengths of maximum 3 m. i www 9.17.084 For more information regarding communication through an RS232 interface, see document 9.17.027: RS232 interface with FLOW-BUS for digital instruments. http://www.bronkhorst.com/files/downloads/ manuals_english/917027manual_rs232_interface.pdf EL-FLOW Prestige 19 Bronkhorst High-Tech B.V. 3.5 Basic RS485 (FLOW-BUS/Modbus) operation This section is limited to RS485 FLOW-BUS or Modbus communication. For communication through other field bus interfaces see section 3.6. FLOW-BUS or Modbus communication is available only if either the FLOW-BUS or Modbus RJ-45 connector on top of the instrument is present, or if the 9-pin sub-D side connector is set for FLOW-BUS or Modbus communication. The label at the back of the instrument indicates the factory settings of the connector pinning. FLOW-BUS FLOW-BUS is a Bronkhorst designed field bus, based on RS485 technology, for digital communication between devices, offering the possibility of host-control by a pc. Characteristics: · Baud rates of 187500 (default) or 400000 Baud · +15…24 Vdc supply voltage · Easy installation and communication with other Bronkhorst devices · Automatic node search and bus optimization (gap fixing) · PC communication via (local host) FLOW-BUS – RS232 interface · Connection of max. 120 instruments on a single bus · Maximum bus length: 600 m See document 9.17.024 for more information about FLOW-BUS communication. Modbus Modbus is a 3-wire, RS485-based field bus communication system for parameter value exchange. In this system each instrument/device is equipped with a micro-controller for its own dedicated task but also for exchanging parameter value information with other devices connected to the same Modbus system. In a Modbus system Bronkhorst instruments always serve as Modbus slaves. There is no mutual communication between Modbus slaves, only between master and slave. The master device is for example a pc. Characteristics: · Several selectable baud rates between 9600 and 256000 Baud (default: 19200 Baud) · +15…24 Vdc supply voltage · connection of max. 247 instruments on a single bus · supports RTU and ASCII protocols See document 9.17.035 for more information about Modbus communication. i www 20 More detailed information about Modbus can be found at http://www.modbus.org or any website of the (local) Modbus organization of your country (when available). EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 3.5.1 Hook-up The illustrations below show examples of a number of EL-FLOW Prestige instruments in an RS485 bus-system. Note that many other bus configurations are possible, contact your local sales representative for more information. Please check the total power consumption of your instruments and do not exceed the maximum power of the power supply. FLOW-BUS setup (example) In the example below an E-8000 power supply/readout control unit with FLOW-BUS is connected to two EL-FLOW Prestige instruments via the RJ-45 top-connector FLOW-BUS interface. In this example one instrument serves as 'local host' for communicating with a pc to all instruments on the bus via an available RS232 connector. Note: communication with all the instruments on the FLOW-BUS system is possible when using an EL-FLOW Prestige instrument as local-host RS232/FLOWBUS interface. It is also possible to use multiple local-host RS232/FLOW-BUS interfaces in a FLOW-BUS system simultaneously. Power the instruments in a FLOW-BUS local-host system by hooking-up the power supply directly on the FLOW-BUS line and not by powering a set of instruments through the 9-pin sub-D connector on one of the digital instruments. Modbus setup (example) In the example below the Modbus power supply is provided by an E-8000. The EL-FLOW Prestige instruments are connected to the bus via RS485 cables with RJ-45 connector and a Multiport connector. The RS485 - USB2.0 adapter can be used to connect the system to a Modbus master device. i www 9.17.084 For possible power supply and communication options, refer to document 9.17.076 'Instruction manual E-8000 PS / readout and control module': http://www.bronkhorst.com/files/downloads/manuals_english/917076-manual_e-8000.pdf EL-FLOW Prestige 21 Bronkhorst High-Tech B.V. 3.5.2 Software When using a pc to communicate with EL-FLOW Prestige instruments only the FLOW-BUS protocol is supported by Bronkhorst software. When using Modbus operation, software from third parties, such as LabVIEW, ModScan or a Modbus PLC must be used to serve as Modbus master. Note: an instrument with 9-pin sub-D side connector set for RS485 FLOW-BUS or Modbus communication will not respond when connecting to an RS232 configuration. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration Mode’. • 3.5.3 • Baud rate, node address and parity setup EL-FLOW Prestige instruments are configured from factory as indicated on the instrument back-side label. If there is a need of changing any of the specified RS485 settings, see the tables below for the supported configurations. The default selections are presented in bold. Mode: Digital Interface/medium: RS485 Protocol: FLOW-BUS Modbus RTU Modbus ASCII Baud rate: 187500 400000 9600 19200 38400 56000 57600 115200 128000 256000 9600 19200 38400 56000 57600 115200 128000 256000 Node address: 3…125 1…247 1…247 None; Even; Odd None; Even; Odd Parity: None RS485 FLOW-BUS/Modbus communication options Changing RS485 settings of the RJ-45 top connector interface In case the FLOW-BUS or Modbus RJ-45 field bus connector is used for bus communication, the node address can be easily set by using the rotary switches on the side of the instrument. Use the ‘MSD’ (Most Significant Digit) to set the ‘tens’ of the busaddress and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the bus-address (the example on the right reads ‘63’). Set the rotary switches to '00' for automatic installation. Refer to the corresponding field bus manual, document 9.17.024 (FLOW-BUS) or document 9.17.035 (Modbus) for more details. For changing the baud rate or parity settings use the RS232 interface to change the corresponding parameters (see section 4.3.2). Changing RS485 settings of the 9-pin sub-D side connector interface In case the 9-pin sub-D side connector is set for RS485 communication, the baud rate or node address can be changed by using the micro switch or by changing the settings in the ‘Configuration Mode’. Refer to section 3.8 for changing node address and baud rate with the micro switch. Other communication parameters can be changed only in the ‘Configuration Mode’. Activate the ‘Configuration Mode’ by pressing the micro switch at start-up according the description in section 3.5.2 above. In ‘Configuration Mode’ the bus type and baud rate are set to RS232 FLOW-BUS (Propar) at 38400 Baud. Change the appropriate parameters as described in section 4.3.2. When finished, deactivate the ‘Configuration Mode’ using the same procedure. Now the instrument is ready to use in the desired configuration with the adjusted baud rate, node address or parity. Any changes made to the instrument communication settings will not be restored after a factory reset. See section 5.2 for more details. 22 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 3.6 Other field bus configurations The following field buses are optionally available for the EL-FLOW Prestige instruments. For all mentioned field bus systems the EL-FLOW Prestige instruments serve as slaves on the master/slave bus system. There is no mutual communication between slaves, only between master and slave. PROFIBUS DP PROFIBUS DP is a 2-wire, RS485-based industrial data communication standard (field bus) which allows automation components (like sensors, actuators and controllers) to exchange information. For more information regarding the PROFIBUS DP interface refer to document 9.17.025. DeviceNetTM The DeviceNetTM interface offers direct connection to a DeviceNetTM network a ccordi ng to the Ma s s Fl ow Control l er Profi l e s peci fi ed by the ODVA. The Bronkhorst DeviceNetTM instrument is a Group 2 Only Server device which messages comply with the Controlled Area Network (CAN) 2.0A standard and with the DeviceNetTM protocol. See document 9.17.026 for more information about the DeviceNetTM interface. EtherCAT® Ethernet for Control Automation Technology (EtherCAT®) is an open high performance Ethernet-based field bus system. The EtherCAT® interface is described in more detail in document 9.17.063. PROFINET The PROFINET interface is 100% Ethernet-compatible and is used for data exchange between IO controllers (PLC, etc.) and IO devices (slaves, field devices). PROFINET uses the proven communication model and application view of PROFIBUS DP. Refer to document 9.17.095 for more information. 3.6.1 Hook-up See the following documents for hook-up diagrams and instructions for setting up bus communication with the following communication interfaces: · PROFIBUS DP interface: hook-up diagram 9.16.121 and manual 9.17.025 · DeviceNetTM interface: hook-up diagram 9.16.122 and manual 9.17.026 · EtherCAT® interface: hook-up diagram 9.16.124 and manual 9.17.063 · PROFINET interface: hook-up diagram 9.16.147 and manual 9.17.095 3.6.2 Baud rate, node address and parity setup In the table below for the supported configurations for PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET are shown. The default selections are presented in bold. Digital Mode: Connector: 9-pin D-sub (female) 5-pin M12 (male) 2x RJ45 (in/out) 2x RJ45 RS485 RS485 Ethernet Ethernet Protocol: PROFIBUS DP DeviceNetTM EtherCAT® PROFINET Baud rate: Autodetect (9600) (19200) (45450) (93750) (187500) (500000) (1500000) (3000000) (6000000) (12000000) 125000 250000 500000 100000000 100000000 0…126 0...63 0 (n/a) 0 (n/a) None None Interface/medium: Node address: Even None Parity: PROFIBUS DP, DeviceNet™, EtherCAT® and PROFINET communication options 9.17.084 EL-FLOW Prestige 23 Bronkhorst High-Tech B.V. Changing PROFIBUS DP node address The node address can be easily set by using the rotary switches on the side of the instrument. Use the ‘MSD’ (Most Significant Digit) to set the ‘tens’ of the bus-address and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the bus-address. Changing DeviceNet node address and data rate The node address and data rate can be easily set by using the rotary switches on the side of the instrument. Use the ‘MSD’ (Most Significant Digit) to set the ‘tens’ of the bus-address and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the bus-address. Set the 'MSD' rotary switch to 'P' to select programmable bus-address. For the data rate setting select '1' for 125000 Baud, '2' for 250000 Baud, '5' for 500000 Baud and 'P' for programmable data rate. Changing EtherCAT Second Address EtherCAT supports the use of a Second Address. Bronkhorst instruments have 3 rotary switches, with which a Second Address can be set in the range of 0 – 4095 (0xFFF). This value of the rotary switches will be copied to the Configured Station Alias register (address 0x0012:0x0013) at instrument start-up. 3.7 LED indications The following LED indicators are present on top of the instrument: ‘Mode’ ‘Error’ ‘NET’ ‘MOD’ ‘Status’ · · · · · LED: green LED: red LED: green/red LED: green/red LED: green/red • •/ • /• • /• •• used for operation mode indication used for error/warning messages used for Network status ( DeviceNet™ only) used for Module status ( DeviceNet™ only) used for status indication ( EtherCAT® and PROFINET only) For EtherCAT® and PROFINET the following LED indicators are integrated in the RJ-45 connectors: Amber LED: Ethernet Speed indicator Green LED: Ethernet Link/Activity indicator For an example of the different fieldbus configuration see section 3.2, 'Communication interfaces'. The tables below list the possible indications by the LEDs on top of the instrument: •LEDGreen 'Mode' • Off Time Indication Continuous Power-off or program not running On Continuous Normal Operation Mode • Short flash 0.1 sec on, 2 sec off Valve Safe State Mode There is no bus communication (PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET only). Valves are in safe state. This LED indication is also active when the instrument is in ‘Initialization Mode' (Init Reset = '73') • Normal flash • Long flash 0.2 sec on, 0.2 sec off Special Function Mode The instrument is busy performing a special function, e.g. auto-zero or self-test 2 sec on, 0.1 sec off Configuration Mode The instrument is in configuration mode. In the configuration mode the baud rate and bus type for the 9-pin sub-D side connector are set to 38k4 and RS232 FLOW-BUS (Propar) Time Indication Continuous No error Continuous Critical error message A serious error occurred in the instrument. The instrument needs servicing before further use. 0.1 sec on, 2 sec off Field bus specific warning message FLOW-BUS: Node occupied: re-install instrument PROFIBUS DP: No data exchange between master and slave (automatic recovery) Modbus: Data is received or transmitted DeviceNetTM: Not used Green LED indications • red 'Error' LED • Off • On • Short flash 24 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. • red 'Error' LED Time • Normal flash 0.2 sec on, 0.2 sec off Incorrect fluidset configuration and/or field bus specific warning message The fluidset configuration of the instrument is incorrect (in this case the valves are in safe state, see section 4.2.3) and/or: FLOW-BUS: Waiting for communication, check communication settings of all FLOW-BUS devices in the field bus setup. Usually the ‘last node address’ setting of one of the devices is incorrect. PROFIBUS DP: Not used Modbus: Not used DeviceNetTM: Not used EtherCAT®: Not used PROFINET: Not used • Long flash 2 sec on, 0.1 sec off Field bus specific warning message FLOW-BUS: Not used PROFIBUS DP: A requested parameter is not available (see PROFIBUS DP manual document 9.17.025 for more details) Modbus: Not used DeviceNetTM: Not used EtherCAT®: Error detected in EtherCAT® configuration (see EtherCAT® manual document 9.17.063 for more details) PROFINET: Configuration error. For example a requested parameter is not available (see PROFINET manual document 9.17.095 for more details). Indication EtherCAT®: Instrument is not in OP mode (see EtherCAT® manual document 9.17.063 for more details) PROFINET: No application relation established Red LED indications Wink mode: Wink • green ‘Mode’ LED / • red ‘Error’ LED turn by turn • /• Slow wink • /• Normal wink • /• Fast wink Time Indication 1 sec on, 1 sec off Alarm indication Minimum alarm, limit/maximum alarm, power-up alarm, limit reached or batch reached. 0.2 sec on, 0.2 sec off Wink mode By sending a command via ‘Wink’ parameter the instrument can wink with the LEDs to indicate its position in a (large) system. 0.1 sec on, 0.1 sec off Switch released Selected action started. LED wink indications DeviceNetTM LED indications Specific LED indications are applicable to instruments with DeviceNetTM interface. Note: the ‘NET’ and ‘MOD’ LEDs are bicolored LEDs (green/red). Refer to the DeviceNetTM manual, document 9.17.026, for more information. EtherCAT® LED indications Specific LED indications are applicable to instruments with EtherCAT® interface. Refer to the EtherCAT® manual, document 9.17.063, for more information. PROFINET LED indications Specific LED indications are applicable to instruments with PROFINET interface. Refer to the PROFINET manual, document 9.17.095, for more information. 9.17.084 EL-FLOW Prestige 25 Bronkhorst High-Tech B.V. 3.8 Micro switch functions By means of manual operation of the micro push-button switch some important actions for the instrument can be selected or started. These options are available in both analog and digital operation mode. These functions are: · Reset alarm · Reset instrument (firmware program reset) · Auto-zero · Restore factory settings (in case of accidentally changing of the settings) · Activate 'Configuration Mode' (for changing communication settings via RS232) Using digital RS485 operation via the 9-pin sub-D side connector it is also possible to read/set: · Bus-address (node-address) (only required for RS485) The micro switch on top of the EL-FLOW Prestige can be operated with a thin, metal or hard plastic pin, for example the end of a paperclip. When the micro switch is pressed, both LEDs will start indicating different patterns in a loop. The switch has to be pressed down until the two LEDs are indicating the right pattern. When the switch is released, the selected action is started. The tables below describe the micro switch functions that can be started in normal operation mode and during power-up: LEDs Time red ‘Error’ LED pushed • • Off • • Off • Off green ‘Mode’ LED Indication 0…1 sec. No action Pressing a switch briefly by accident will not start any unwanted reaction of the instrument. • Off 1…4 sec. In case of min/max alarm or counter batch reached: Reset alarm (only if reset by micro switch has been enabled). For FLOW-BUS only: if the node address is occupied, this function will install a free node-address on FLOW-BUS. • Off • On (red) 4…8 sec. Reset instrument. Instrument program will be restarted and all warning and error messages will be cleared. During start-up the instrument will perform a (new) self-test. • On (green) • Off 8…12 sec. Auto-zero Instrument will be re-adjusted for measurement of zero-flow, see section 2.9. • On (green) • On (red) 12…16 sec. Prepare instrument for FLASH mode for firmware update. Instrument shuts down and both LEDs turn off. At next power-up the instrument will be active again. LED indications using micro switch at normal operation mode of an instrument LEDs • green ‘Mode’ LED • red ‘Error’ LED • Off • Off • Off flash •0.2Normal sec on, Time pushed Indication 0…4 sec. No action Pressing a switch briefly by accident will not start any unwanted reaction of the instrument. 4…8 sec. Restore factory settings All parameter settings (except field bus/communication settings) will be restored to the original factory settings. 8…12 sec. For FLOW-BUS only: install a free node-address on FLOW-BUS. 0.2 sec off flash •0.2Normal • On (red) sec on, 0.2 sec off flash •0.2Normal • Normal flash sec on, 0.2 sec off 0.2 sec on, 12…16 sec. Activate ‘Configuration Mode’ The baud rate and bus type for the 9-pin sub-D side connector are 0.2 sec off set to 38k4 and RS232 FLOW-BUS (Propar). The ‘Configuration Mode’ is recognized by the green LED blinking 2 sec on, 0.1 sec off. The ‘Configuration Mode’ is deactivated only after applying this micro switch action again. LED indications using micro switch at power-up situation of an instrument 26 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 3.9 Basic parameters and properties 3.9.1 Introduction Most instrument parameters can only be accessed with digital communication. For each communication protocol the instrument parameters are accessed differently. When using Bronkhorst software programs FlowView or FlowPlot, easy access is provided to the mostly used parameters by menu interfaces. When using other communication methods the addressing method for the supported communication protocol is presented for a number of basic parameters in a table as shown below: Type Access Range FlowDDE FLOW-BUS Modbus [type] RW [x]…[y] [DDE par] [Pro]/[Par] [address]/[index] Type Unsigned char Unsigned int Unsigned long Float Unsigned char [x] Access R RW RW 1 byte unsigned integer (0...255) 2 byte unsigned integer, MSB first (0...65535) 4 byte unsigned integer, MSB first (0...4294967295) 4 byte floating point, IEEE 32-bit single precision, MSB first x byte array (text string) The parameter is read-only The parameter can be read and written The parameter is protected and can only be written when the ‘Init Reset’ parameter is set to 64. See section 4.2.2 for more details. Range Some parameters only accept values within a certain range: [x] Minimum value of the range [y] Maximum value of the range FlowDDE Parameter number within FlowDDE. Refer to section 3.4.2 for more information about FlowDDE. Within this manual, a reference to a parameter name is denoted by writing the DDE parameter number in front of the parameter name, e.g ‘8Measured Value’. See section 3.9.6 for a parameter list, sorted by DDE parameter number. FLOW-BUS Within the FLOW-BUS protocol (Propar when using RS232) parameters are divided into a ‘Process’ and a ‘Parameter’ number. To address parameters using the FLOW-BUS/Propar protocol write both numbers: [Pro] Process number [Par] Parameter number i www See document 9.17.027: ‘RS232 interface with FLOW-BUS for digital instruments’ for detailed information. http:// www.bronkhorst.com/files/downloads/manuals_english/917027manual_rs232_interface.pdf Modbus Parameters can be read or written via the Modbus protocol by specifying either the PDU Address or the register number. The PDU Address is a hexadecimal number (identifiable by the ‘0x’ prefix), which corresponds to the decimal register number minus one, e.g. PDU Address 0x0000 equals register number 1, PDU Address 0x000A equals register number 11 etc.: [address] Hexadecimal PDU Address [index] Decimal register number For the Modbus protocol every two bytes are addressed separately. PROFIBUS DP, DeviceNetTM, EtherCAT® or PROFINET Refer to the specific field bus manual for reading/changing parameters via field bus communication. 9.17.084 EL-FLOW Prestige 27 Bronkhorst High-Tech B.V. 3.9.2 Basic measurement and control parameters The list below provides the most basic parameters for digital communication with the instrument. The parameters below are most easily accessible via FlowPlot or FlowView software or any of the Bronkhorst readout/ control units (BRIGHT, E-8000). Measured Value (Measure) Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int R 0…41942 (65535*) 8 1/0 0x0020/33 The ‘8Measured Value’ indicates the amount of mass flow metered by the instrument. The signal of 0…100% is presented in a range of 0…32000. The maximum measured value output is 131.07%, which is 41942. A floating point variable of the measured value, ‘205Fmeasure’, is also available in the capacity and capacity unit for which the instrument has been set, see section 4.2.1. *In case the instrument is prepared for bi-directional measurement, the negative signals with an output range of -73.73...-0.003% are presented in a range of 41943…65535 (so value 65535 represents -0.003%), whereas the positive signals 0…131.07% are still presented in the range 0…41942. (In FlowDDE the numbers are converted to negative values automatically). Setpoint Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int RW 0…32000 9 1/1 0x0021/34 The ‘9Setpoint’ is used to set the required mass flow rate for the controller. The signals have the same range as the ‘8Measured Value’, only the setpoint is limited between 0 and 100% (0…32000). A floating point variable of the setpoint, ‘206Fsetpoint’, is also available in the capacity and capacity unit for which the instrument has been set, see section 4.2.1. 3.9.3 Basic identification parameters User Tag Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[16] RW - 115 113/6 0xF130…0xF136/ 61745…61751 The ‘115User Tag’ parameter allows the user to give the instrument a custom tag name, with a maximum of 16 characters. Customer Model Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[16] RW - 93 113/4 0xF120…0xF127/ 61729…61736 This parameter is used to add extra information to the model number information, such as a customer-specific model number. Serial Number Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[20] R - 92 113/3 0xF118…0xF11F/ 61721…61728 This parameter consists of a max. 20-byte string with instrument serial number for identification, e.g.: ‘M1111111A’. BHT Model Number Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[27] RW - 91 113/2 0xF111…0xF117/ 61713…61719 This parameter shows the Bronkhorst instrument model type information. 28 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 3.9.4 Basic alarm and counter settings The alarm and counter settings are most easily accessible via FlowPlot or FlowView software or any of the Bronkhorst readout/control units (BRIGHT, E-8000). For more information about the alarm parameters see section 4.2.4, for the counter parameters see section 4.2.5. 3.9.5 Zeroing (using digital operation) The auto-zero function is most easily accessible via FlowPlot software. Select 'Instrument Settings' and use the 'Auto zero' button in the 'Basic' tab. To start the auto-zero function by digital operation use the following procedure: 1. 2. 3. 4. • Set parameter ‘12Control Mode’ to value 9 (Calibration Mode); the green LED will flash normally (0.2 sec on, 0.2 sec off) Set parameter ‘58Calibration Mode’ to value 9 (Auto-zero) The auto-zero function has started Check parameter ‘58Calibration Mode’: o value 0 = idle (auto-zeroing succeeded), ‘12Control Mode’ is set to previous value. o value 9 = auto-zero active o value 255 = error: restart auto-zero (step 2), ‘12Control Mode’ is set to previous value. 3.9.6 Instrument parameter list The table below lists the relevant parameters for the EL-FLOW Prestige, sorted by FlowDDE parameter number. FlowDDE parameter Parameter name Purpose Section 1 Wink Special instrument parameter Section 4.2.2 7 Init Reset Special instrument parameter Section 4.2.2 8 Measured Value (Measure) Measurement/control Section 3.9.2 9 Setpoint Measurement/control Section 3.9.2 11 Analog Input Measurement/control Section 4.2.1 12 Control Mode Special instrument parameter Section 4.2.2 21 Capacity Fluidset property Section 4.2.3 22 Sensor Type Special instrument parameter Section 4.2.1 24 Fluid Number Fluidset property Section 4.2.3 25 Fluid Name Fluidset property Section 4.2.3 28 Alarm Info Alarm settings Section 4.2.4 55 Valve Output Measurement/control Section 4.2.1 58 Calibration Mode Special instrument parameter Section 3.9.5 86 IOStatus Special instrument parameter Section 4.4.2 90 Device Type Diagnostics Section 5.1 91 BHT Model Number Identification Section 3.9.3 92 Serial Number Identification Section 3.9.3 93 Customer Model Identification Section 3.9.3 105 Firmware Version Diagnostics Section 5.1 114 Reset Special instrument parameter Section 4.2.2 115 User Tag Identification Section 3.9.3 116 Alarm Maximum Limit Alarm settings Section 4.2.4 117 Alarm Minimum Limit Alarm settings Section 4.2.4 118 Alarm Mode Alarm settings Section 4.2.4 120 Alarm Setpoint Mode Alarm settings Section 4.2.4 9.17.084 EL-FLOW Prestige 29 Bronkhorst High-Tech B.V. FlowDDE parameter Parameter name Purpose Section 121 Alarm New Setpoint Alarm settings Section 4.2.4 122 Counter Value Counter settings Section 4.2.5 124 Counter Limit Counter settings Section 4.2.5 126 Counter Setpoint Mode Counter settings Section 4.2.5 127 Counter New Setpoint Counter settings Section 4.2.5 128 Counter Unit Counter settings Section 4.2.5 129 Capacity Unit Fluidset property Section 4.2.3 130 Counter Mode Counter settings Section 4.2.5 139 Slave Factor FLOW-BUS master/slave control Section 4.3.1 142 Temperature Fluidset property Section 4.2.3 156 Reset Alarm Enable Alarm settings Section 4.2.4 157 Reset Counter Enable Counter settings Section 4.2.5 158 Master Node FLOW-BUS master/slave control Section 4.3.1 170 Density Fluidset property Section 4.2.3 175 Identification Number Diagnostics Section 5.1 178 Pressure Inlet Fluidset property Section 4.2.3 179 Pressure Outlet Fluidset property Section 4.2.3 181 Fluid Temperature Fluidset property Section 4.2.3 182 Alarm Delay Time Alarm settings Section 4.2.4 201 Fieldbus 1 baudrate Fieldbus settings Section 4.3.2 205 Fmeasure Measurement/control Section 4.2.1 206 Fsetpoint Measurement/control Section 4.2.1 245 Capacity unit type temperature Fluidset property Section 4.2.3 246 Capacity unit type pressure Fluidset property Section 4.2.3 250 Heat Capacity Fluidset property Section 4.2.3 251 Thermal Conductivity Fluidset property Section 4.2.3 252 Viscosity Fluidset property Section 4.2.3 254 Controller Speed (Kspeed) Fluidset property Section 4.2.3 288 IO Switch Status Special instrument parameter Section 4.4.1 309 Fieldbus 2 address Fieldbus settings Section 4.3.2 310 Fieldbus 2 baudrate Fieldbus settings Section 4.3.2 335 Fieldbus 1 parity Fieldbus settings Section 4.3.2 336 Fieldbus 2 parity Fieldbus settings Section 4.3.2 346 Mix Fraction Type Fluidset property Section 4.2.3 347 Mix Fraction Temperature Fluidset property Section 4.2.3 348 Mix Fraction Pressure Fluidset property Section 4.2.3 349 Mix Fraction Index Fluidset property Section 4.2.3 350 Mix Fraction Fluidset property Section 4.2.3 351 Mix Component Name DDE parameter list Fluidset property Section 4.2.3 30 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 4 Advanced operation 4.1 Sealing material compatibility EL-FLOW Prestige instruments are equipped from factory with sealings compatible with the requested gas type. However the instruments have multi-gas/multi-range functionality on board, if another gas or mixture is used, always make sure that the gas/mixture is compatible with the installed sealing materials. As factory standard, the instruments are provided with Viton® static seals with FFKM dynamic seals. EPDM sealed instruments or full Kalrez®/FFKM are available as an option, see the model key indication ...-V-..., ...-E-... or ...-K-... on the instrument back-side label. Each sealing material has its specific compatibility with used process gases. See the table below for compatibility with the 25 most used process gases: Gas Modelkey: ...-V-... Static seals: Viton® Dynamic seals: FFKM (viton for n.o. valves or FDA/USP class VI) Modelkey: ...-E-... Static seals: EPDM Dynamic seals: EPDM Modelkey: ...-K-... Static seals: Kalrez®/FFKM Dynamic seals: FFKM Air Ar (Argon) CH4 (Methane) CO (Carbon monoxide) max: 10 bar(g), 50°C max: 10 bar(g), 50°C C2F6 (Freon-116) C2H2 (Acetylene) /* C2H4 (Ethylene) max: 10 bar(g) max: 10 bar(g) max: 10 bar(g) max: 58 bar(g) CO2 (Carbon dioxide) C2H6 (Ethane) max: 10 bar(g) C3H8 (Propane) Cl2 (Chlorine) He (Helium) H2 (Hydrogen) H2S (Hydrogen sulfide) Kr (Krypton) NF3 (Nitrogen trifluoride) NH3 (Ammonia) C3H6 #2 (Propylene) NO (Nitric oxide) N2 (Nitrogen) max: 20 bar(g), 50°C O2 (Oxygen) SF6 (Sulfur hexafluoride) SiH4 (Silane) /* N2O (Nitrous oxide) Xe (Xenon) Sealing material compatibility list Remarks * FFKM dyn. seal only Dry gas only * FFKM dyn. seal only Do not use process gases/mixtures that are incompatible with the sealing materials the EL-FLOW Prestige instrument is equipped with and do not exceed the indicated maximum operating pressure/temperature. Using the instrument outside the given operating limits may lead to serious damage to the instrument. 9.17.084 EL-FLOW Prestige 31 Bronkhorst High-Tech B.V. 4.2 Advanced parameters and properties 4.2.1 Advanced measurement and control parameters Measured Value (Fmeasure) Type Access Range FlowDDE FLOW-BUS Modbus Float R -3.4E+38… 3.4E+38 205 33/0 0xA100…0xA101/ 41217…41218 Floating point variable of the ‘8Measured Value’. The ‘205Fmeasure’ parameter shows the measured value in the capacity and capacity unit for which the instrument has been set. The ‘205Fmeasure’ parameter is dependent of ‘129Capacity Unit’ and ‘22Sensor Type’. Setpoint (Fsetpoint) Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0…3.4E+38 206 33/1 0xA119…0xA11A/ 41241…41242 Floating point variable of the ‘9Setpoint’. The ‘206Fsetpoint’ parameter shows the setpoint in the capacity and capacity unit for which the instrument has been set. The ‘206Fsetpoint’ parameter is dependent of ‘129Capacity Unit’ and ‘22Sensor Type’. Valve Output Type Access Range FlowDDE FLOW-BUS Modbus Unsigned long RW 0… 16777215 55 114/1 0x001F/32 This parameter is the digital steering signal for driving the control valve, where 0…16777215 corresponds with 0…100%. Analog Input Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int R 0…65535 11 1/3 0x0023/36 Depending on the analog mode, 0…5 Vdc, 0…10 Vdc, 0…20 mA or 4…20 mA is converted to a number in the range 0… 32000. The digitized ‘11Analog Input’ is in the same range as ‘8Measured Value’ (0…32000 corresponds to 0…100%). This parameter can be used as setpoint or slave factor when the instrument is used as ‘analog slave’ or ‘FLOW-BUS analog slave’, see ‘12Control Mode’. 4.2.2 Special instrument parameters All parameters described in this section have influence on the behavior of the EL-FLOW Prestige. Please be aware that wrong settings can disorder the output. To avoid unintentional changes, some parameters are locked (shown by the symbol). To unlock parameters set parameter ‘7Init Reset’ to ‘Unlocked’. Init Reset Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 82/64 7 0/10 0x000A/11 The ‘7Init Reset’ parameter is used to unlock secured parameters for writing (see the symbol). This parameter can be set to the following values: · Value 82: Locked mode, secured parameters are read-only · Value 64: Unlocked mode, secured parameters are writeable and readable This parameter is always set to ‘Locked’ (value 82) at power-up. Reset Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char R 0…5 114 115/8 0x0E68/3689 32 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. This parameter is used to reset program, counter or alarms. · Value 0: no reset · Value 3: Reset counter · Value 1: Reset counter · Value 4: Reset counter and counter off · Value · Value 5: Reset firmware program (soft reset) Make sure the ‘114Reset’ value is accepted by sending a 0 first. The ‘114Reset’ parameter may be disabled by the ‘156Reset Alarm Enable’ or ‘157Reset Counter Enable’ parameters. Wink Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char [27] W 0…9 1 0/0 0x0000/1 Any text string value between '1' and '9' lets the instrument wink (normal wink) (red and green turn by turn) for that number of seconds for identifying its position. Default value = '0'. Control Mode Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int RW 0…255 12 1/4 0x0024/37 The ‘12Control Mode’ is used to select different controlling modes of the instrument and determines from which sources controller setpoints are accepted. The following control modes are available: Mode Instrument action Setpoint source 0 Value BUS/RS232 Normal operation, controlling Bus or RS232 1 Analog Input Normal operation, controlling Analog input 2 FLOW-BUS Slave Controlling as slave of other instrument on bus ‘FLOW-BUS master output’ x ‘139Slave Factor’ / 100% 3 Valve Close Close valve 4 Controller Idle Stand-by on bus/RS232, controlling is stopped; Valve Output freezes in current position 7 Setpoint 100% Controlling at setpoint 100% 8 Valve Fully Open Valve fully opened 9 Calibration Mode Calibration mode enabled (factory only) 10 Analog Slave Controlling as slave of other instrument on analog input ‘11Analog Input’ x ‘139Slave Factor’ /100% 12 Setpoint 0% Controlling at setpoint 0% Fixed 0% 13 FLOW-BUS Analog Slave Controlling as slave of other instrument on bus, slave factor is set with signal on analog input ‘FLOW-BUS master output’ x ‘11Analog Input’ x ‘139Slave Factor’ / 100% 18 RS232 Normal operation, controlling RS232 20 Valve Steering Setpoint is redirected to ‘55Valve Output’ with controller idle 21 Analog Valve Steering Analog input is redirected to ‘55Valve Output’ with the controller idle 22 Valve Safe State valve is in safe (unpowered) state (closed for N.C. valves and fully opened for N.O. valves) Slave factor ‘139Slave Factor’ Fixed 100% ‘139Slave Factor’ ‘11Analog Input’ Instrument control modes 9.17.084 EL-FLOW Prestige 33 Bronkhorst High-Tech B.V. After power-up the ‘12Control Mode’ will be set to ‘Analog input’ or ‘BUS/RS232’, depending on the customer’s default setting for analog or digital operation. If however the ‘12Control Mode’ is set to a value other than 0, 1, 9 or 18 the actual control mode setting is maintained after power-up. For information about master/slave controller operation through the FLOW-BUS interface, see section 4.3.1. See section 4.4.2 for changing the default control mode using the ‘86IOStatus’ parameter. 4.2.3 Advanced fluidset, range and operating conditions parameters For changing fluidset, flow range or operating conditions it is strongly advised to use the FlowTuneTM software available with the EL-FLOW Prestige instrument. FlowTune checks any changes for compatibility of the process conditions with the instrument. When the parameters discussed in this section are changed manually, no such checks are performed and the instrument output may become disordered or the instrument may even be damaged if used in conditions the instrument is not suited for. Consult Bronkhorst service personnel when in doubt. Fluid Number Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…7 24 1/16 0x0030/49 With the ‘24Fluid Number’ parameter any of the maximum 8 available fluid sets can be selected. Each fluid set has its specific (configurable) properties, such as ‘25Fluid Name’, ‘21Capacity’, etc. Default value = 0 (0 = fluid 1, 1 = fluid 2, 2 = fluid 3, etc.). The '24Fluid Number' parameter is also accessible via FlowPlot or FlowView software or any of the Bronkhorst readout/ control units (BRIGHT, E-8000). Fluid Name Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[10] RW - 25 1/17 0x8188…0x818C/33161…33165 This parameter consists of the fluid name for the selected ‘24Fluid Number’. This parameter may contain three value types: · Gas name, e.g. 'N2', 'He', 'C3H6 #2'. · CAS number, e.g. '7727-37-9', '7440-59-7', '115-07-1' · 'Mix': when the ‘25Fluid Name’ value is 'Mix', the instrument will use the gas mixture stored in the parameters '346Mix Fraction Type', '347Mix Fraction Temperature', '348Mix Fraction Pressure', '349Mix Fraction Index', '350Mix Fraction', '351Mix Component Name'. The instrument will ignore custom (fixed) fluid properties stored in the parameters '170Density', '250Heat Capacity', '251Thermal Conductivity' and '252Viscosity'. Use the FlowTuneTM software to set the instrument for using (fixed) custom fluid properties, e.g. obtained from FLUIDAT on the Net. When no valid '25Fluid Name' is entered or when insufficient or invalid fluid properties are entered, the instrument will be forced into the 'Valve Safe State' mode until a valid fluidset configuration is made. Capacity Type Access Range FlowDDE FLOW-BUS Modbus Float RW 1E-10...1E+10 21 1/13 0x8168...0x8169/33129...33130 This parameter sets the maximum readout/control value (100%) for the active ‘24Fluid Number’ in readout units corresponding to the '129Capacity Unit' parameter. The '21Capacity' is scaled when '178Pressure Inlet', '181Fluid Temperature' or '25Fluid Name' (or any of the mixture parameter) are changed for the active fluidset. Capacity Unit Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[7] RW See below 129 1/31 0x81F8...0x81FB/33273...33276 34 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. For EL-FLOW Prestige the following units can be set: Mass flow Normal volume flow (1.01325 bar(a), 0 °C) Standard volume flow (1.01325 bar(a), 20 °C) (Custom) volume flow (246Capacity Unit Pressure, 245Capacity Unit Type Temperature) ug/h, ug/min, ug/s, mg/h, mg/min, mg/s, g/h, g/min, g/s, kg/h, kg/min, kg/s uln/h, uln/min, uln/s, mln/h, mln/min, mln/s, ln/h, ln/min, ln/s, ccn/h, ccn/min, ccn/s, mm3n/h, mm3n/m, mm3n/s, cm3n/h, cm3n/m, cm3n/s, m3n/h, m3n/min, m3n/s, scfh, scfm, scfs, sccm, slm uls/h, uls/min, uls/s, mls/h, mls/min, mls/s, ls/h, ls/min, ls/s, ccs/h, ccs/min, ccs/s, mm3s/h, mm3s/m, mm3s/s, cm3s/h, cm3s/m, cm3s/s, m3s/h, m3s/min, m3s/s ul/h, ul/min, ul/s, ml/h, ml/min, ml/s, l/h, l/min, l/s, cc/h, cc/min, cc/s, mm3/h, mm3/m, mm3/s, cm3/h, cm3/min, cm3/s, m3/h, m3/min, m3/s, cfh, cfm, cfs Unit type list Due to compatibility the maximum string length is limited to 7 characters. Therefore some unit names are truncated. For instance mm3n/m means mm3n/min. Controller Speed (Kspeed) Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0.2...5 254 114/30 0xF2F0...0xF2F1/62193...62194 This parameter sets the controller speed factor for the selected fluidset. The '254Kspeed' parameter is set from factory between value '0.5' (slow) and '2' (fast). The default value is '1'. Slower or faster settings are possible between values 0.2 and 5 at the customer's responsibility. Actual Temperature Type Access Range FlowDDE FLOW-BUS Modbus Float R -250...500 142 33/7 0xA138...0xA139/41273...41274 Indication of the actual ambient temperature in °C. Pressure Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...3.4E+38 143 33/8 0xA140...0xA141/41281...41282 Indication of the actual (inlet) pressure in bar(a). By default this parameter value is equal to the value of '178Inlet pressure'. This parameter can be used for active pressure correction by setting parameter '354Conversion Condition Selection' to value 3 and writing the actual pressure to '143Pressure'. After power reset the parameter value is reset to the value of '178Inlet pressure'. Pressure Inlet Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...3.4E+38 178 113/13 0xF168...0xF169/61801...61802 (Fixed) inlet pressure in bar(a), used for capacity calculations. Pressure Outlet Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...3.4E+38 179 113/14 0xF170...0xF171/61809...61810 (Fixed) Outlet pressure in bar(a), used for capacity calculations (valve capacity only). 9.17.084 EL-FLOW Prestige 35 Bronkhorst High-Tech B.V. Fluid Temperature Type Access Range FlowDDE FLOW-BUS Modbus Float RW -250...500 181 113/16 0xF180...0xF181/61825...61826 (Fixed) temperature, used for capacity calculations. Density Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...3.4E+38 170 33/21 0xA1A8...0xA1A9/41385...41386 Density for the selected fluidset in kg/m3 for given temperature and pressure ('245 Capacity unit type temperature' and '246 Capacity unit type pressure'). Read-only parameter. Heat Capacity Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...3.4E+38 250 113/18 0xF190...0xF191/61841...61842 Heat capacity for the selected fluidset in J/kg·K for given temperature and pressure ('245 Capacity unit type temperature' and '246 Capacity unit type pressure'). Read-only parameter. Thermal Conductivity Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...3.4E+38 251 113/20 0xF1A0...0xF1A1/61857...61858 Thermal conductivity for the selected fluidset in W/m·K for given temperature and pressure ('245 Capacity unit type temperature' and '246 Capacity unit type pressure'). Read-only parameter. Viscosity Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...3.4E+38 252 113/21 0xF1A8...0xF1A9/61865...61866 Dynamic viscosity for the selected fluidset in Pa·s for given temperature and pressure ('245 Capacity unit type temperature' and '246 Capacity unit type pressure'). Read-only parameter. Mix Fraction Type Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0...2 346 126/4 0x0FC4/4037 Set the fraction type for the mixture: · Value 0: Volume fraction · Value 1: Mass fraction · Value 2: Mole fraction Mix Fraction Temperature Type Access Range FlowDDE FLOW-BUS Modbus Float RW -250...500 347 126/5 0xFE28...0xFE29/65065...65066 Temperature for the mixture specification in °C (only needed for '346 Mix Fraction Type' value 0 (volume fraction). Mix Fraction Pressure Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...3.4E+38 348 126/6 0xFE30...0xFE31/65073...65074 Pressure for the mixture specification in bar(a) (only needed for '346 Mix Fraction Type' value 0 (volume fraction). 36 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. Mix Fraction Index Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0...4 349 126/7 0x0FC7/4040 Index for the gas component in the mixture (max. 5 components). Mix Fraction Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0...1 350 126/8 0xFE40...0xFE41/65089...65090 Mix fraction for the active mix component between 0 and 1, 0 = 0%, 1 = 100%. The sum of the mix fractions of all mix components must be equal to 1. Mix Component Name Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[10] RW - 351 126/9 0xFE48…0xFE4C/65097…65101 This parameter consists of the fluid name for the active mix component. This parameter may contain three value types: · Gas name, e.g. 'N2', 'He', 'C3H6 #2'. · CAS number, e.g. '7727-37-9', '7440-59-7', '115-07-1' · no name (spaces), empty mix component slot, next slots will be ignored (note: '350 Mix Fraction' value 0 gives the same result) 4.2.4 Advanced alarm parameters Bronkhorst digital instruments have a built-in alarm function. It is used to indicate several types of alarm: · System errors · System warnings · Min/max alarms · Response alarms · Batch alarm · Master/slave alarms The alarm types can be set with the parameter ‘118Alarm Mode’. When an alarm occurs, the type of alarm can be read out using parameter ‘28Alarm Info’. After an alarm, an automatic setpoint change can be set using the parameters ‘120Alarm Setpoint Mode’ and ‘121Alarm New Setpoint’. It is also possible to set an alarm delay to prevent overreaction to small disturbances using the parameter ‘182Alarm Delay Time’. How an alarm can be reset is controlled by the parameter ‘156Reset Alarm Enable’. It can bit-wise be set to automatic, reset, external or keyboard/micro switch. Note: when an alarm is disabled, it will only switch off after the set ‘156Alarm Delay Time’ has passed. Alarm Mode Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0...3 118 97/3 0x0C23/3108 Available alarm modes: · Value 0: Alarm off · Value 1: Alarm on absolute limits · Value 2: Alarm on limits related to setpoint (response alarm) · Value 3: Alarm when instrument powers-up (e.g. after power-down) For DeviceNet TM only modes 0 and 1 are available. 9.17.084 EL-FLOW Prestige 37 Bronkhorst High-Tech B.V. Alarm Info Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char R 0…255 28 1/20 0x0034/53 This parameter contains 8 bits with status information about (alarm) events in the instrument (convert value to binary number to see which bits are active). Low (0) High (1) Description 0 Bit No error An error occurred Alarm register 2 contains an error LED indication 1 No error A warning occurred Alarm register 1 contains a warning 2 No error Minimum alarm ‘Measured Value’ < ‘Alarm Minimum Limit’ 3 No error Maximum alarm ‘Measured Value’ > ‘Alarm Maximum Limit’ 4 No error Batch counter alarm Batch counter reached its limit 5 No error This bit only: Together with bit 2 or 3: Power-up alarm (probably a power dip occurred) Response alarm (too much difference between ‘8Measured Value’ and ‘9Setpoint’) 6 No error Master/slave alarm 'Setpoint' out of limits due to ‘Slave Factor’ (> 100%) N/A 7 Alarm events No error Hardware alarm Hardware error • On (red) On (red) / •normal flash On (red) / •normal flash / Slow • • wink • /• Slow wink • /• Slow wink • /• Slow wink Alarm Delay Time Type Access Range FlowDDE FLOW-BUS Unsigned char RW 0…255 182 97/7 Modbus 0x0C27/3112 This value represents the time in seconds the alarm action will be delayed when an alarm limit has been exceeded. This value also delays the alarm off action if an alarm limit is no longer exceeded. Default value = '0'. Alarm Maximum Limit Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int RW 0…32000 116 97/1 0x0C21/3106 Maximum limit for the ‘8Measured Value’ to trigger the maximum alarm situation (after ‘182Alarm Delay Time’). Range 0… 32000 represents 0…100% signal. The ‘116Alarm Maximum Limit’ value must be greater than the ‘117Alarm Minimum Limit’ value. Default value = '0'. Alarm Minimum Limit Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int RW 0…32000 117 97/2 0x0X22/3107 Minimum limit for the ‘8Measured Value’ to trigger the minimum alarm situation (after ‘182Alarm Delay Time’). Range 0… 32000 represents 0…100% signal. The ‘117Alarm Minimum Limit’ value must be smaller than the ‘118Alarm Maximum Limit’ value. Default value = '0'. Alarm Setpoint Mode Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…1 120 97/5 0x0C25/3110 · Value 0: No setpoint change at alarm (default) · Value 1: New setpoint at alarm enabled (set at value ‘121Alarm New Setpoint’) 38 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. Alarm New Setpoint Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int RW 0…32000 121 97/6 0x0C26/3111 New (safe) setpoint during an alarm until reset. Range 0…32000 represents 0…100% setpoint. Default value = '0'. Reset Alarm Enable Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…15 156 97/9 0C029/3114 Available alarm reset options (convert value to binary number to see which bits are active): Bit Low (0) High (1) Description 0 Off On Reset by micro switch 1 Off On External reset (not used) 2 Off On Reset by parameter ‘Reset’ 3 Off Alarm reset options On Automatic reset (when alarm conditions no longer apply) Default value: value 15, all conditions above are enabled. 4.2.5 Advanced counter parameters Counter Mode Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0...2 130 104/8 0x0D08/3337 Available counter modes: · Value 0: Counter off (default) · Value 1: Counting upwards continuously · Value 2: Counting up to limit in ‘124Counter Limit’ (batch counter) Counter Value Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0… 10000000 122 104/1 0x0D01/3330 Actual counter value in units selected at parameter ‘128Counter Unit’. Counter Limit Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0…9999999 124 104/3 0x0D03/3332 Counter limit/batch size in units selected at parameter ‘128Counter Unit’. Default setting is 0 ln. Counter Setpoint Mode Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…1 126 104/5 0x0D05/3334 · Value 0: No setpoint change at batch limit (default) · Value 1: Setpoint change at batch limit (set at value ‘127Counter New Setpoint’) Counter New Setpoint 9.17.084 EL-FLOW Prestige 39 Bronkhorst High-Tech B.V. Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int RW 0…32000 127 104/6 0x0D06/3335 New (safe) setpoint when a counter limit is reached until reset. Range 0…32000 represents 0…100% setpoint. Default value = '0'. Reset Counter Enable Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…15 157 104/9 0x0D09/3338 Available counter reset options (convert value to binary number to see which bits are active): Low (0) High (1) Description 0 Bit Off On Reset by micro switch 1 Off On External reset (not used) 2 Off On Reset by parameter ‘114Reset’ On Automatic reset (when alarm conditions no longer apply) 3 Off Counter reset options Default value: value 7; bits 0, 1 and 2 are enabled. 4.3 Field bus operation 4.3.1 FLOW-BUS master/slave controller operation EL-FLOW Prestige instruments offer possibilities for master/slave control via FLOW-BUS. The output value of any instrument connected to FLOW-BUS is automatically available to all other instruments (without extra wiring). To setup master/slave control the ‘12Control Mode’ of the instrument can be set to ‘FLOW-BUS Slave’ (value 2) or to ‘FLOW-BUS Analog Slave’ (value 13), depending on how the ‘139Slave Factor’ should be set. Via the parameter ‘158Master Node’ the master device for the instrument is set. It is possible to have multiple masters and slaves in a FLOW-BUS system. A slave instrument can also be a master for other instruments. Setpoints from master instruments can be received via FLOW-BUS only. The parameters for master/slave control can be changed through both RS232 and FLOW-BUS. Master Node Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 1…125 158 33/14 0x042E/1071 Set the master node for the instrument. Slave Factor Type Access Range FlowDDE FLOW-BUS Modbus Float RW 0…500 139 33/1 0x0421/1058 The controller output from the master instrument is multiplied by the ‘139Slave Factor’/100% to get the slave instrument setpoint. Example: if a master output is 80% and the ‘139Slave Factor’ value = 50, then the slave instrument setpoint is 80% x 50%/100% = 40%. 40 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 4.3.2 Changing baud rate, node address and parity Any changes made to the instrument communication settings will not be restored after a factory reset. See section 5.2 for more details. Top connector communication Change the node address of the instrument by using the instructions for the applicable field bus in chapter 3. Change the baud rate or parity of the installed field bus (top connector) with the following parameters using the RS232 interface: Fieldbus 1 baudrate Type Access Range FlowDDE FLOW -BUS Modbus Unsigned long RW 0…10000000000 201 125/9 0xFD48...0xFD49/64841...64842 For the accepted values see the applicable field bus in chapter 3. Fieldbus 1 parity Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…2 335 125/12 0x0FAC/4013 The following values are accepted: 0 – no parity 2 – even parity 1 – odd parity Side connector RS485 communication Change the baud rate, node address or parity of the side-connector RS485 (FLOW-BUS or Modbus) interface (if installed) with the following parameters in the 'Configuration Mode'. Note: an instrument with 9-pin sub-D side connector set for RS485 FLOW-BUS or Modbus communication will not respond when connecting to an RS232 configuration. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration Mode’. • • Fieldbus 2 address Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…255 309 124/10 0xFC50/64593 For the accepted values see the applicable field bus in chapter 3. Fieldbus 2 baudrate Type Access Range FlowDDE FLOW -BUS Modbus Unsigned long RW 0…10000000000 310 124/9 0xFC48...0xFC49/64585...64586 For the accepted values see the applicable field bus in chapter 3. Fieldbus 2 parity Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0…2 336 124/12 0xFC60/64609 The following values are accepted: 0 – no parity 2 – even parity 1 – odd parity 9.17.084 EL-FLOW Prestige 41 Bronkhorst High-Tech B.V. 4.4 Special instrument features 4.4.1 Customized IO options (pin 5) EL-FLOW Prestige instruments offer various customized input/output functions through pin 5 of the 9-pin sub-D side connector as an option. A number of the (factory installed) programmable IO options are offered as standard, these options are described in this section. The last three characters of the model key (presented on the back-side label of the instrument) indicate the installed IO configuration, see also section 1.5. The standard options are described below (the default selection is …-A1V). Refer to document 9.16.118 for the applicable hook-up diagrams. The customized IO options are factory installed, as indicated by last three characters of the model key (presented on the back-side label of the instrument). These IO options cannot be changed manually. A1V 0…10 Vdc output, controller (default selection) Analog signal for pump or external valve steering (control signal only). When the controller output is used for pump or external valve steering (Mass Flow Meters only), make sure the ‘231Valve Maximum’ is set to 0.3 [A]. For Mass Flow Controllers, the controller output is limited to a value below 10 Vdc due to the maximum valve current restriction. B1V 4…20 mA output, controller Analog signal for pump or external valve steering (control signal only). When the controller output is used for pump or external valve steering (Mass Flow Meters only), make sure the ‘231Valve Maximum’ is set to 0.3 [A]. For Mass Flow Controllers, the controller output is limited to a value below 20mA due to the maximum valve current restriction. C3A Digital output, min/max alarm During a min/max alarm, pin 5 is pulled down to 0 Vdc. C4A Digital output, counter alarm During a counter alarm, pin 5 is pulled down to 0 Vdc. C5S Digital output, enabled by setpoint (for shut-off control) Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation. For factory selected analog control (…-A#-C5S): When the ‘12Control Mode’ is set for analog control by factory, the minimum setpoint at which the device (shut-off valve) connected to pin 5 is activated is 1.9%, to avoid that possible noise on the analog input does accidentally activate the device. For factory selected digital control (…-D#-C5S): When the ‘12Control Mode’ is set for digital control by factory, the setpoint threshold for activating the device connected to pin 5 is any value > 0. Note: If the instrument is forced into ‘Valve Safe State’, the digital output is not affected, so a (n.c.) shut-off valve connected to pin 5 will not close when the (n.c.) controller is in ‘Valve Safe State’. Make sure to use 24Vdc power supply corresponding to the shut-off valve specifications. Cable 7.03.572 (Tpart 9-pin D-sub/loose end) or 7.03.603 (T-part 9-pin D-sub/DIN43650C) can be used for this operating option. \ Example for -C5S- or -C0I- hook-up 42 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. C0I Digital output, high/low switch via remote parameter (for shut-off control) Pin 5 is pulled down to 0 Vdc when writing value 1 to parameter ‘288IO Switch Status’, this is undone by writing value 0. A device connected to pin5 (e.g. a shut-off valve) can be activated/de-activated by writing the parameter ‘288IO Switch Status’. Note: If the instrument is forced into ‘Valve Safe State’, the digital output is also affected, so a (n.c.) shut-off valve connected to pin 5 will be closed when the (n.c.) controller is in ‘Valve Safe State’. Make sure to use 24Vdc power supply corresponding to the shut-off valve specifications. Cable 7.03.572 (Tpart 9-pin D-sub/loose end) or 7.03.603 (T-part 9-pin D-sub/DIN43650C) can be used for this operating option. D9E Digital frequency output, measure Measurement value is translated to a frequency within given frequency range. The default frequency range to represent 0…100% flow is 0…10000 Hz. Any other frequency range must be specified on order. F9B Digital pulse output, batch counter Pin 5 is pulled down to 0 Vdc when a given batch size is reached (during a given pulse length). By default, a pulse is given at each 1x the ‘128Counter Unit’ batch value, with a pulse length of 1 s. For instance, when the ‘128Counter Unit’ is set to ln, a pulse is given each time 1 ln has passed through the instrument. An alternative pulse length must be specified on order. Provide a pull-up resistor of 5...10 kOhm to create 15...24 Vdc at pin 5 according to the hook-up diagram document 9.16.118. Example for -F9B- hook-up H1E 4…20 mA input, external sensor Sensor input, this function disables the internal sensor. I3C Digital input, controller mode valve close Valve closes when pin 5 is connected to 0 Vdc. This function switches between the default ‘12Control Mode’ and mode (‘Valve Close’) (value 3). When the default ‘12Control Mode’ is ‘digital’ the default value is 0 (‘BUS/RS232’ mode), when the default ‘12Control Mode’ is ‘analog the default value is 1 (‘Analog Input’ mode). I8C Digital input, controller mode valve purge Valve is fully opened when pin 5 is connected to 0 Vdc. This function switches between the default ‘12Control Mode’ and mode (‘Valve Fully Open’) (value 8). When the default ‘12Control Mode’ is ‘digital’ the default value is 0 (‘BUS/RS232’ mode), when the default ‘12Control Mode’ is ‘analog' the default value is 1 (‘Analog Input’ mode). I1R Digital input, reset counter The counter resets when pin 5 is connected to 0 Vdc. Example for -I1R- or -I2R- hook-up I2R 9.17.084 Digital input, reset alarm The alarm resets when pin 5 is connected to 0 Vdc. EL-FLOW Prestige 43 Bronkhorst High-Tech B.V. 4.4.2 Changing default control mode Instruments are factory-set with the control mode set for either analog or digital setpoint source. See parameter ‘12Control Mode’ to change the control mode. However after every (power-up) reset the instrument will return to its default control mode. To change the control mode permanently use the following procedure: Changing default digital operation to default analog operation: 1. Set parameter ‘7Init Reset’ to 64 2. Read parameter ‘86IOStatus’ 3. Add 64 to the read value 4. Write the new value to parameter ‘86IOStatus’ 5. Set parameter ‘7Init Reset’ to 82 Changing default analog operation to default digital operation: 1. Set parameter ‘7Init Reset’ to 64 2. Read parameter ‘86IOStatus’ 3. Subtract 64 from the read value 4. Write the new value to parameter ‘86IOStatus’ 5. Set parameter ‘7Init Reset’ to 82 Note: do not use this procedure if customized IO options -C5S- (digital output, enabled by setpoint), -I3C- (digital input, controller mode valve close) or - I8C- (digital input, controller mode valve purge) are installed. 44 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 5 Troubleshooting and service 5.1 Diagnostics When errors or warnings occur, connect the instrument to the Bronkhorst support software to determine the cause of the error or warning. For any fluidset related errors/warnings, make connection to the FlowTune software for diagnostics. For other errors/warnings, connect the instrument to FlowPlot and open the 'Alarm & Count' section under 'Instrument Settings' to determine the cause of the alarm/warning message. Firmware Version Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[6] R - 105 113/5 0xF128…0xF12A/ 61737…61739 Revision number of firmware. Identification Number Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char RW 0...255 175 113/12 0x0E2C/3629 Bronkhorst (digital) device/instrument identification number. For EL-FLOW Prestige instruments the following values are applicable: · Value 7: DMFC (Digital Mass Flow Controller) · Value 8: DMFM (Digital Mass Flow Meter) Device Type Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[6] R - 90 113/1 0xF108…0xF10A/ 61705…61707 The device type: DMFC or DMFM is stored in this read-only parameter. 5.2 Troubleshooting In this section a number of possible errors/malfunctions of the instrument are listed. LED indications See section 3.7 for interpretation of specific LED indications of the instrument Factory reset In case (re)setting of the instrument has led to unexpected or non-recoverable behavior, it is possible to reset the instrument to the settings applied at the factory during production. Use the 'Restore Settings' tab under 'Instrument Settings' in FlowPlot or use the micro switch on top of the instrument (section 3.8) to restore the instrument to the original factory settings. Note that any changes made to the instrument communication settings will not be restored after a factory reset. If digital communication with the instrument can not be re-established, see section 3.4 to overrule the actual 9-pin sub-D communication settings with the 'Configuration Mode' (using the micro switch) and use the RS232 communication mode to re-establish communication. 9.17.084 EL-FLOW Prestige 45 Bronkhorst High-Tech B.V. Troubleshooting list Symptom Possible cause Action No power (LEDs not burning) No power supply Check power supply Check cable connection Internal fuse blown due to long lasting shortage Return to factory No setpoint accepted, incorrect control mode No setpoint given, setpoint too low Check analog/digital control mode (section 4.2.2) Give setpoint >2% Valve in 'Safe State' (normally closed valves) Remove cause of 'Valve Safe State' (see section 3.1.2) Pcb/sensor failure Laminar flow element blocked/ contaminated Flow too high, valve fully open Return to factory Return to factory Pcb/sensor failure Return to factory Valve in 'Safe State' (normally opened valves) Remove cause of 'Valve Safe State' (see section 3.1.2) Pressure difference across instrument insufficient to achieve requested flow rate Check inlet/outlet pressure Valve blocked or damaged Stoppage Pressure difference across instrument insufficient to achieve requested flow rate Return to factory Remove contamination Check inlet/outlet pressure Process gas condensation occurs Decrease pressure or increase gas temperature Zero output signal Maximum output signal (131.07%) Setpoint cannot be achieved Flow signal is gradually decreasing without setpoint change Oscillating controller output Non-zero output signal when valve is closed Close valve Controller adjustment wrong, PID settings too fast Set '254Controller Speed (Kspeed)' to lower value Inlet/outlet pressure too high or too low Adjust pressure/set correct instrument pressure with FlowTune Wrong gas selected Set correct process gas with FlowTune Inlet pressure control is oscillating Replace pressure regulator or increase buffer volume between controller instruments (section 2.3) 'Cross-talk' with other controller Increase buffer volume between instruments in process line controller instruments (section 2.3) Valve is damaged Valve is leaking (through valve) Return to factory Check valve specifications for leaktightness through valve Non-zero offset signal (occurs at Auto-zero instrument (section 2.4/ upward/downward placement at higher section 2.9) pressures) 46 EL-FLOW Prestige 9.17.084 Bronkhorst High-Tech B.V. 5.3 Service For current information on Bronkhorst® and service addresses please visit our website: http://www.bronkhorst.com Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. Contact sales by e-mail: › sales@bronkhorst.com For after-sales questions, our Customer Service Department is available with help and guidance. To contact CSD by e-mail: › support@bronkhorst.com No matter the time zone, our experts within the Support Group are available to answer your request immediately or ensure appropriate further action. Our experts can be reached at: +31 859 02 18 66 Bronkhorst High-Tech B.V. Nijverheidsstraat 1A NL-7261 AK Ruurlo The Netherlands 9.17.084 EL-FLOW Prestige 47 Bronkhorst High-Tech B.V. 6 Removal and return instructions Instrument handlings: · Purge gas lines · When toxic or dangerous fluids have been used, the customer should pre-clean the instrument · Remove instrument from line · The instrument must be at ambient temperature before packaging · Insert the instrument into a plastic bag and seal the bag · Place the bag in a appropriate shipping container Add documentation: · Reason of return · Failure symptoms · Contaminated condition · Declaration on Contamination form: 9.17.032 When returning material, always describe the problem and if possible the work to be done, in a covering letter. It is absolutely required to notify the factory if toxic or dangerous fluids have been metered with the instrument! This to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair department. Take proper care of packing, if possible use the original packing box. All instruments must be dispatched with a completely filled in 'declaration on contamination form'. Instruments without this declaration will not be accepted. Important: Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely: NL801989978B01 If applicable, otherwise contact your distributor for local arrangements. The declaration on contamination form is available at the Bronkhorst® download site: http://www.bronkhorst.com/files/support/safety_information_for_returns.pdf 48 EL-FLOW Prestige 9.17.084