Instruction Manual
EL-FLOW Prestige series
Thermal Mass Flow Meters/Controllers
Doc. no.: 9.17.084D Date: 14-04-2016
ATTENTION
Please read this Instruction Manual carefully before installing and operating the instrument. Not
following the guidelines could result in personal injury and/or damage to the equipment.
Bronkhorst High-Tech B.V.
Disclaimer
The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is
assumed for inaccuracies. The material in this manual is for information purposes only.
Copyright
All rights reserved. This documentation is protected by copyright.
Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to
change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its
products and modify the contents without being obliged to inform any particular persons or organizations. The device
specifications and the contents of the package may deviate from what is stated in this document.
Symbols
Important information. Discarding this information could cause injuries to people or damage to the instrument or
installation.
Helpful information. This information will facilitate the use of this instrument.
Additional info available on the internet or from your local sales representative.
Receipt of equipment
Check the outside packing box for damage incurred during shipment. When the packing box is damaged, then the local
carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your
local sales representative.
Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment.
Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At
the same time a report should be submitted to your local sales representative.
Check the packing list to ensure that you received all of the items.
Do not discard spare or replacement parts with the packing material and inspect the contents for damage.
Refer to "Removal and return instructions" about return shipment procedures.
Equipment storage
The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be taken not to
subject the equipment to excessive temperatures or humidity.
2
EL-FLOW Prestige
9.17.084
Bronkhorst High-Tech B.V.
Warranty
Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date
of shipment provided they are used in accordance with the ordering specifications and not subjected to abuse or physical
damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are
normally warranted for one year or the balance of the original warranty, whichever is the longer.
See paragraph 9 of the Conditions of sales:
http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf
The warranty includes all initial and latent defects, random failures, and undeterminable internal causes.
It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock
etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is
performed under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to
our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping
methods/carriers are paid by the customer.
Safety Precautions
The following safety precautions should be observed before using this product and any associated instrumentation.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety
precautions required to avoid possible injury. Read the operating information carefully before using the product.
Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables, test leads, cracks, or breaks before each use.
The module and accessories must be used in accordance with its specifications and operating instructions or the safety of
the equipment may be impaired.
If required, replace fuses with the same type and rating for continued protection against fire hazard.
Opening of the equipment is not allowed. There are no repairable parts inside. In case of a defect please return the
equipment to Bronkhorst High-Tech.
The
symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.
Surfaces near the
symbol may be hot.
To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst High-Tech
B.V. Standard fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other
components that are not safety related may be obtained from other suppliers as long as they are equivalent to the original
component. (Note that selected parts should be obtained only through Bronkhorst® to maintain accuracy and functionality
of the product.) If you are unsure about the applicability of a replacement component, call a Bronkhorst® office for
information.
9.17.084
EL-FLOW Prestige
3
Bronkhorst High-Tech B.V.
Table of contents
1
. . . . .manual
......................................................................................................6
Scope of .this
1.1
............................................................................................................6
Introduction
............................................................................................................6
Intended use
1.2
1.3
1.4
............................................................................................................6
Product description
. . . other
. . . . . . applicable
. . . . . . . . . . . documents
.......................................................................................7
References. to
1.5
Model key. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2
............................................................................................................9
Starting up
2.1
2.2
. . . . . . . .properties
....................................................................................................9
Check functional
. . . . . . . conditions
.....................................................................................................9
Check operating
2.2.1
Rated pressure
. . . . . test
. . . . .inspection
..................................................................................................9
2.2.2
Sealings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.2.3
Environmental
. . . . . ratings
.......................................................................................................9
2.3
............................................................................................................9
Piping requirements
. . .mounting
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Instrument
2.4
2.5
2.6
2.7
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Leak check
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Electrical connection
2.7.1
. . . . . . . operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Analog / digital
Analog / local
. . . . . .operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.7.2
Digital RS232
. . . . .operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.7.3
Digital RS485
. . . . ./. bus
. . . . .operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.8
. . . . operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Micro switch
. . . . . . .micro
. . . . . . switch)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Zeroing (using
2.9
2.10
2.11
2.12
Purging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Supply pressure
2.13
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Calibration
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Maintenance
3
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Basic operation
3.1
3.1.1
. . . . . . . . . . . . . . .and
. . . . control
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Mass flow. .measurement
Changing. .fluidset,
. . . . . . . . range
. . . . . . . or
. . .operating
. . . . . . . . . . .conditions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.1.2
Valve Safe. . State
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.2
. . . . . . . . interfaces
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Communication
Using multiple
. . . . . . .interfaces
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.2.1
3.3
3.3.1
3.4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Analog operation
Hook-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.4.1
. . . operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Basic RS232
Hook-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.4.2
FlowDDE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.4.3
Software .(DDE
. . . . . applications)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.4.4
Baud rate. setup
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.5
3.5.1
. . . (FLOW-BUS/Modbus)
. . . . . . . . . . . . . . . . . . . . . . operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Basic RS485
Hook-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.5.2
Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.5.3
Baud rate,. .node
. . . . . .address
. . . . . . . . and
. . . . . parity
. . . . . . .setup
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.6
3.6.1
. . bus
. . . . .configurations
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Other field
Hook-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.6.2
Baud rate,. .node
. . . . . .address
. . . . . . . . and
. . . . . parity
. . . . . . .setup
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
4
EL-FLOW Prestige
9.17.084
Bronkhorst High-Tech B.V.
3.7
3.8
3.9
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
LED indications
. . . . functions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Micro switch
3.9.1
. . . . . . . . .and
. . . . properties
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Basic parameters
Introduction
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.9.2
Basic measurement
. . . . . . . . . . . and
. . . . . control
. . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.9.3
Basic identification
. . . . . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.9.4
Basic alarm
. . . and
. . . . .counter
. . . . . . . . settings
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.9.5
Zeroing (using
. . . . . . .digital
. . . . . . .operation)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.9.6
Instrument
. . .parameter
. . . . . . . . . . . list
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
4
. . . .operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Advanced
4.1
4.2
. . . . . . . . compatibility
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Sealing material
. . . . . . . . . . . .and
. . . . properties
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Advanced. .parameters
4.2.1
Advanced. .measurement
. . . . . . . . . . . . . . and
. . . . . control
. . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.2.2
Special instrument
. . . . . . . . . . .parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.2.3
Advanced. .fluidset,
. . . . . . . . range
. . . . . . . and
. . . . .operating
. . . . . . . . . . conditions
. . . . . . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
4.2.4
Advanced. .alarm
. . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.2.5
Advanced. .counter
. . . . . . . . parameters
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
4.3
4.3.1
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Field bus .operation
FLOW-BUS
. . master/slave
. . . . . . . . . . . . . . controller
. . . . . . . . . . .operation
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
4.3.2
Changing. .baud
. . . . . .rate,
. . . . .node
. . . . . .address
. . . . . . . . and
. . . . .parity
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.4
4.4.1
. . . . . . . . . . .features
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Special instrument
Customized
. . . .IO
. . options
. . . . . . . . . (pin
. . . . .5). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
4.4.2
Changing. .default
. . . . . . . .control
. . . . . . . .mode
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
5
. . . . . . . . . . . . and
. . . . . service
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Troubleshooting
5.1
5.2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Diagnostics
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Troubleshooting
5.3
Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
6
. . . . . .return
. . . . . . . .instructions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Removal. . and
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1
Scope of this manual
1.1
Introduction
This manual covers the EL-FLOW Prestige series mass flow meters/controllers for gases. Examples of the instrument series
are shown in the pictures below. This manual includes product information, installation instructions, operation,
maintenance and troubleshooting.
1.2
Intended use
The intended use of the EL-FLOW Prestige instruments is to accurately measure and/or control gas flow rates of a specified
gas at conditions noted on the instrument label. The gas in the pressurized system in which the instrument is mounted has
to be clean and dry. The instruments are suited for general purpose indoor (dry) applications, like laboratories and in well
protected (OEM) housings. The instruments can be used for either (fast) switching gas flow or for controlling a constant flow
rate (mass flow controllers only).
1.3
Product description
EL-FLOW Prestige is the next generation of Bronkhorst Mass Flow Meters/ Controllers using the latest, highly accurate,
thermal by-pass sensor technology and featuring excellent control characteristics. Thanks to the advanced sensor
technology in combination with a state-of-the-art pc-board, the instruments feature improved long-term stability as well as
an unsurpassed temperature stability. Furthermore, due to a power efficient microprocessor, the power consumption of the
instrument is reduced. The mass flow meters and controllers can be supplied in full scale ranges from 0,7 mln/min up to 20
ln/min Air-equivalent at max. 64 or 100 bar (1000 or 1500 psi) pressure rating.
EL-FLOW Prestige offers high flexibility due to the multi-gas/multi-range functionality. This function, now extended to 25
gases and mixtures thereof, is easily accessible via the FlowTuneTM software or PLC; there is no need to disconnect the
instrument from your system. For additional gas types the user can calculate accurate fluid properties for conversion by
means of our free, online software tool Fluidat® on the Net. Users of EL-FLOW Prestige instruments can rescale their
instruments on site, saving time and money for dismounting and recalibration.
Numerous input/output options can be installed through the programmable sub-D 9-pin connector (from factory). In
addition to the various analog signal options and the standard RS232 communication, there are such options as RS485
communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output.
Furthermore Bronkhorst offers various integrated fieldbus options: DeviceNetTM, PROFIBUS DP, Modbus RTU/ASCII,
EtherCAT®, PROFINET and FLOW-BUS.
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EL-FLOW Prestige
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1.4
References to other applicable documents
Basic instructions
Dimensional drawings
Document 9.17.083
Document 7.15.176
Quick installation guide EL-FLOW Prestige
Dimensional drawing FG-110C
Document 7.15.177
Dimensional drawing FG-111B
Document 7.15.178
Dimensional drawing FG-200CV / FG-210CV
Document 7.15.179
Dimensional drawing FG-201CV / FG-211CV
Document 7.15.180
Dimensional drawing FG-201CS
Advanced instructions
Hook-up diagrams
Document 9.17.027
Document 9.16.119
Document 9.17.024
Document 9.16.120
Document 9.17.025
Document 9.16.121
Document 9.17.026
Document 9.16.122
Instruction manual DeviceNetTM interface
Hook-up diagram LAB MBC3 DeviceNetTM
Document 9.17.035
Document 9.16.123
Document 9.17.063
Document 9.16.124
Document 9.17.095
Document 9.16.147
Instruction manual RS232 interface
Instruction manual FLOW-BUS interface
Instruction manual PROFIBUS DP interface
Instruction manual Modbus interface
Instruction manual EtherCAT® interface
Instruction manual PROFINET interface
Hook-up diagram LAB MBC3 RS232 and Analog
Hook-up diagram LAB MBC3 FLOW-BUS
Hook-up diagram LAB MBC3 PROFIBUS DP
Hook-up diagram LAB MBC3 Modbus
Hook-up diagram LAB MBC3 EtherCAT®
Hook-up diagram LAB MBC3 PROFINET
Document 9.16.118
Hook-up diagram LAB MBC3 Custom bus & IO
configurations
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9.17.084
These documents can be found at: http://www.bronkhorst.com/en/downloads
EL-FLOW Prestige
7
Bronkhorst High-Tech B.V.
1.5
8
Model key
EL-FLOW Prestige
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Bronkhorst High-Tech B.V.
2
Starting up
2.1
Check functional properties
Before installing your EL-FLOW Prestige mass flow meter/controller it is important
to read the label on the backside of the instrument and check:
· Flow rate
· Fluid to be measured
· Up- and downstream pressures
· Temperature
· Valve type (N.C.= Normally Closed, N.O.= Normally Opened)
· Input/output signal (see also section 2.6)
2.2
Check operating conditions
2.2.1
Rated pressure test inspection
Each EL-FLOW Prestige instrument is pressure tested to at least 1.5 times the maximum operating pressure of the
instrument. Each instrument is helium leak tested to at least 2x10-9 mbar l/s Helium outboard.
The tested pressure is stated on the instrument with a red-colored
sticker. Before installation, make sure that the test pressure is in
accordance with normal safety factors for your application. If there is no
Pressure Testing Sticker on the device or if the test pressure is incorrect,
the instrument should not be mounted in the process line and be
returned to the factory.
2.2.2
Sealings
EL-FLOW Prestige instruments are equipped from factory with sealings compatible with the requested gas type. However
the instruments have multi-gas/multi-range functionality on board. If another gas or mixture is used, always make sure that
the gas/mixture is compatible with the installed sealing materials. Refer to Section 4.1 for a compatibility list.
2.2.3
Environmental ratings
EL-FLOW Prestige instruments are suitable for use in conditions between -10…70 °C and relative humidity of 10…90 %RH,
unless specified otherwise. Please note that EL-FLOW Prestige instruments have an ingress protection of IP-40, implying that
the electronics housing and electrical connection do not offer any protection against moist environments.
Make sure that process gases do not condensate in the instrument due to (changing) environmental conditions, condensed
process fluids may seriously harm the instrument's functionality! E.g. do not use moist air as process gas at low
temperatures.
2.3
Piping requirements
For reliable measurement always make sure the fluid stream is clean. Use
filters to assure a moisture-, oil- and particle free gas stream.
Recommended pore-size: 5 µm. If back flow can occur, a downstream filter
and a check valve are recommended too. For high flow rates select a
suitable filter size, to avoid too high pressure drop.
Do not install small diameter piping on high flow rates, because the inlet jet flow may affect the accuracy
Do not mount abrupt angles directly on in- and outlet, especially not on high flow rates. At least 10 pipe diameters distance
between the angle and the instrument is recommended.
Do not mount pressure regulators directly on the inlet of gas flow meters/controllers, but allow at least 25 pipe diameters
of piping.
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2.4
Instrument mounting
Install the EL-FLOW Prestige meter/controller in the line, in accordance
with the direction of the FLOW arrow. The arrow for flow direction is
indicated on the body of the instrument. Tighten the fittings according to
the instructions of the supplier of the fittings. The use of Swagelok RS-type
stainless steel adapters is recommended.
For EL-FLOW Prestige instruments the upright position is preferred. When mounting an instrument in up- or downward
position, zeroing of the instrument is advised (see section 2.9), especially at high pressures (> 10 bar). Avoid installation in
close proximity of mechanic vibration and/or heat sources.
At the bottom side of the instrument a number of mounting holes are present, for stable fixation of the instrument. Refer to
the dimensional drawing for the instrument for the exact position of the mounting holes.
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2.5
Dimensional drawings can be found at: http://www.bronkhorst.com/en/downloads
Leak check
Check the system for leaks before applying (fluid) pressure. Especially if toxic, explosive or other dangerous fluids are used!
2.6
Electrical connection
Electrical connection must be made with standard cables or according to the
applicable hook-up diagrams. The factory installed 9-pin sub-D settings are
indicated on the instrument back-side label. Make sure that the power supply is
suitable for the power ratings as indicated on the instrument label and that
double or reinforced insulation is used for the power supply.
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Applicable hook-up diagrams for EL-FLOW Prestige can be found at:
http://www.bronkhorst.com/en/downloads
EL-FLOW Prestige instruments are powered with +15…+24 Vdc. Several
hook-up examples and standard cables are found in chapter 3.
Do not power the instrument simultaneously from two different power sources (e.g. bus connection and PiPS). Doing so will
blow the fuse on the pc-board, requiring the return of the instrument for repair.
The instruments contain electronic components that are susceptible to damage by electrostatic discharge. Proper
handling procedures must be taken during installation, removing and connecting the electronics.
The instruments described in this manual carry the CE-mark and are compliant with the EMC requirements. However
compliance with the EMC requirements is not possible without the use of proper cables and connector/gland assemblies.
Bronkhorst High-Tech B.V. recommends the use of their standard cables. These cables have the right connectors and if loose
ends are used, these will be marked to prevent wrong connection. When using other cables, cable wire diameters should be
sufficient to carry the supply current and voltage losses must be kept as low as possible. When in doubt: contact your
distributor.
When connecting the system to other devices (e.g. PLC), be sure that the integrity of the shielding is not affected. Do not use
unshielded wire terminals.
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2.7
Analog / digital operation
2.7.1
Analog / local operation
If the instrument has FLOW-BUS, Modbus or DeviceNetTM communication
and is set in digital mode, a dust cover is placed over the 9-pin sub-D
connector. This cover can be removed for accessing analog/local operation,
by pushing the lower end of the cover.
Connect the EL-FLOW Prestige to the power supply/readout unit using
a cable with 9-pin sub-D connector.
2.7.2
Digital RS232 operation
Digital operation over RS232 can be established when using the
following setup or using a Bronkhorst E-8000 readout/control unit.
See section 3.4.1 for connecting to an E-8000. Connecting the
instrument with an RS232 cable or an RS232 cable with a USB to
RS232 converter to a PC will allow you to use (free) Bronkhorst
software for Windows, such as FlowDDE and FlowPlot. Make sure
that the instrument back-side label indicates RS232 settings for the 9pin sub-D connector and apply the proper baud rate settings. If the
instrument is not set for RS232 communication, please refer to
section 3.4 for switching to RS232 communication settings via the
'Configuration Mode'.
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2.7.3
A PiPS (Plug-in Power Supply, art.nr.: 7.03.422) is available to power a single instrument and can be used instead of the
DB9 Loose-end cable as shown in the example above. Detailed information can be found in the manual PiPS (9.17.055)
which can be downloaded at the download section from the website: http://www.bronkhorst.com/en/downloads
Digital RS485 / bus operation
With digital operation over RS485 or Ethernet a bus-system with multiple instruments can be set up. For RS485 FLOW-BUS
or Modbus operation over the 9-pin sub-D connector or via an additional field bus driver (if installed), see section 3.5. For
operation via other additional field bus systems (e.g. DeviceNetTM, EtherCAT®), refer to section 3.6 or the specific field bus
manual.
2.8
Micro switch operation
Using the two colored LEDs and the micro switch on the EL-FLOW Prestige,
several actions can be monitored and started. The green LED is used for
status indication. The red LED is used for errors, warnings and messages.
The switch can be used to start several actions, such as auto-zero, restore
factory settings and bus-initialization actions, if applicable. See specific
zero-procedure below (section 2.9) for more details.
The micro switch on top of the EL-FLOW Prestige can be operated with a thin, metal or hard plastic pin. For example the
end of a paperclip.
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2.9
Zeroing (using micro switch)
The zero-point of each instrument is factory adjusted. If so required the zero point may be re-adjusted over RS232, fieldbus
or by means of using the micro switch. Procedure for zeroing by micro switch (for zeroing through a command via BUS/
RS232 see section 3.9.5):
1.
2.
3.
4.
Warm-up, pressure up the system and fill the instrument according to the process conditions.
Make sure no flow is going through the instrument by closing valves near the instrument.
The setpoint must be zero.
Press micro switch and hold it. After a short time the red LED will go ON and OFF, then the green LED will go ON. At
that moment (which is 8...12 s after pressing) release the switch.
5. The zeroing procedure will start at that moment and the green LED will blink fast. The procedure will take approx. 5
seconds.
6. When the indication is showing 0% signal and the green indication LED is burning continuously again, then the
zeroing action was successful.
•
•
•
•
2.10
Purging
Do not apply pressure until electrical connections are made. When applying pressure to the system, avoid pressure shocks in
the system and increase pressure gradually. Also decrease pressure gradually when required.
In systems for use with corrosive or reactive fluids, purging for at least 30 minutes with a dry, inert gas (like Nitrogen or
Argon) is absolutely necessary before use. After use with corrosive or reactive fluids, complete purging is also required before
exposing the system to air.
Let the EL-FLOW Prestige warm-up for at least 30 minutes for best accuracy.
2.11
Supply pressure
It is recommended to turn on power before applying pressure on the instrument and to switch off power after removing
pressure. Turn on fluid supply gently. Avoid pressure shocks and bring the instrument gradually up to the level of the actual
operating conditions. Also switch off fluid supply gently.
2.12
Calibration
Each EL-FLOW Prestige instrument is factory calibrated. Bronkhorst High-Tech B.V. certifies that all instruments meet the
rated accuracy. Calibration is performed using measurement standards traceable to the Dutch Metrology Institute (VSL).
Calibration certificates are included in the shipment. Periodical inspection, recalibration or verification of the accuracy may
be subject to individual requirements of the end-user.
Unless specified otherwise, EL-FLOW Prestige instruments are Air or N 2 calibrated. The calibration is converted to the
customer’s fluid and conditions using a detailed conversion model. This conversion model provides all the fluid data and
calculations for the applicable process conditions and is also used for the multi-gas/multi-range functionality of the
instrument.
2.13
Maintenance
No routine maintenance is required to be performed on the meters/controllers when they are used with clean gas,
compatible with the wetted materials in the instruments. Units may be flushed with clean, dry inert gas.
In case of severe contamination it may be required to clean the inside of the instrument. After cleaning a recalibration is
needed. Bronkhorst High-Tech B.V. has a trained staff available. Contact your local supplier for cleaning and recalibration
options.
If the equipment is not properly serviced, serious personal injury and/or damage to the equipment could be the result. It is
therefore important that servicing is performed by trained and qualified personnel.
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3
Basic operation
3.1
Mass flow measurement and control
After correct installation of the EL-FLOW Prestige Mass Flow Meter (MFM) or Mass Flow Controller (MFC) and when all safety
precautions have been taken into account (see chapter 2) the instrument can immediately be used for measuring/
controlling the required flow rate in the system by means of the selected communication interface(s).
Here are some general guidelines for mass flow measurement/control:
EL-FLOW Prestige MFMs/MFCs are most accurate at the specified inlet/outlet pressure, temperature and process gas
conditions, however the instrument will function properly in a wide range of varying conditions. It is strongly advised to use
the FlowTune™ software available with the instrument to set the correct process conditions if the actual process conditions
differ from the conditions for which the instrument is set (see section 3.1.1).
Although EL-FLOW Prestige MFMs/MFCs have excellent temperature stability, the best accuracy is achieved when
temperature gradients across the instruments are avoided; so make sure that the gas temperature equals the ambient
temperature and mount the instruments on a rigid (heat conducting) surface.
EL-FLOW Prestige MFCs handle pressure shocks in the system well, but are not insensitive to pressure fluctuations. For
optimum control stability, provide a stable (pressure controlled) inlet pressure with sufficient buffer volume between the
pressure regulator and the MFC and avoid installing multiple MFCs or other control valves in close proximity to another
with small volume piping in between.
Mass Flow control
When an MFC (either with normally closed (n.c.) or normally
opened (n.o.) valve) is hooked-up, the control valve closes
when no setpoint is given. When the MFC receives a setpoint
from the active setpoint source, the internal PID controller
will immediately open the control valve until the required
flow rate is achieved and it will maintain that flow rate until
another setpoint is given.
3.1.1
Changing fluidset, range or operating conditions
When the EL-FLOW Prestige instrument is used for other processes/conditions than indicated on the instrument label, use
the FlowTuneTM software for setting the instrument for the required conditions. With FlowTune the following settings can
be changed:
· Store up to eight different fluid sets
· Select one of 25 pre-installed gases per fluidset or compose
any mixture consisting of these gases
· Insert fluid properties for any other gas/mixture per fluidset
· Change inlet- and/or outlet pressure according to actual
process conditions
· Re-range the full scale (FS) flow rate within the instrument's
accepted flow range
· Change the control speed per fluidset for faster or slower
(smoother) flow control
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The multi-gas/multi-range functionality is available for the full temperature and pressure range for the instrument, within
the limitations of the instrument that is connected. FlowTune checks the changes for the following limitations:
·
·
·
·
·
Rangability of the flow sensor for the selected fluid
Rangability of the control valve for the selected fluid
Accuracy indication for the given flow range
Compatibility of selected gases with the installed sealing materials (see also section 4.1)
Limitations to the operation conditions
For connection to FlowTune, make sure that the instrument back-side label indicates RS232 settings for the 9-pin sub-D
connector and apply the proper baud rate settings. If the instrument is not set for RS232 communication, use the micro
switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and
hold the micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off).
Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin
sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after
power down. Use the same procedure to deactivate the ‘Configuration Mode’.
•
•
The EL-FLOW Prestige instrument will automatically adjust the controller settings to the new process conditions. there is
no need to adjust controller PID settings manually.
It is advised to use FlowTune only in a non-operational environment. FlowTune will force the instrument to the 'Valve Safe
State' mode (see section 3.1.2) when the connection is made. Be sure to close the communication properly to restore the
instrument to its normal operating mode.
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The FlowTune software for EL-FLOW Prestige and the applicable manual document 9.17.046 can be downloaded at the
download section from the website: http://www.bronkhorst.com/en/downloads
Using custom fluids or fluid properties
With FlowTuneTM it is possible to insert fixed fluid properties for any other gas/mixture. The required fluid properties are
density, heat capacity, thermal conductivity and dynamic viscosity. It is possible to use custom fluid data, however
Bronkhorst advises to use the FLUIDAT® on the Net website for calculation of fluid properties at the customer process
conditions. FLUIDAT® is a collection of routines to calculate physical properties of gases (and liquids). These routines are
made available at the FLUIDAT® on the Net website.
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3.1.2
FLUIDAT® on the Net can be accessed via the website: http://www.fluidat.com . FLUIDAT® on the Net is free to use, but
only registered users have full access to fluids and functionality. Registration is possible via the FLUIDAT® website.
Valve Safe State
When an MFC is not powered, the control valve automatically returns to its 'Safe State', which is closed for a 'normally closed
(n.c.)' valve and fully opened for a 'normally opened (n.o.)' valve. During operation, certain communication errors may cause
the MFC to go to the 'Valve Safe State' mode to protect the system, e.g. when fieldbus communication fails (PROFIBUS DP,
DeviceNetTM, EtherCAT® and PROFINET only). Also when fluidset configuration of the instrument is incorrect, the instrument
may go to the 'Valve Safe State' mode. See section 3.7 for more information and the LED indications for the 'Valve Safe State'
mode or section 4.2.3 for the fluidset configuration parameters.
3.2
Communication interfaces
Numerous input/output options can be installed on EL-FLOW Prestige instruments via both the 9-pin sub-D connector on
the side of the instrument and the optional field bus connector on top of the instrument.
Analog and RS232
(or RS485)
14
FLOW-BUS and Modbus
PROFIBUS
EL-FLOW Prestige
DeviceNet™
EtherCAT® and PROFINET
9.17.084
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Via the 9-pin sub-D side connector the instrument can be operated by means of:
· Analog interface (section 3.3): 0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA
· Digital RS232 interface (section 3.4 and document 9.17.027): (FLOW-BUS (Propar) protocol)
· Digital RS485 interface (section 3.5): (Modbus RTU, Modbus ASCII or FLOW-BUS protocols)
The following optional field bus interfaces can be installed:
·
·
·
·
·
·
FLOW-BUS interface (section 3.5 and document 9.17.024)
Modbus (RTU or ASCII) interface (section 3.5 and document 9.17.035)
PROFIBUS DP interface (section 3.6 and document 9.17.025)
DeviceNetTM interface (section 3.6 and document 9.17.026)
EtherCAT® interface (section 3.6 and document 9.17.063)
PROFINET interface (section 3.6 and document 9.17.095)
The interpretation of the LED indications and use of the micro switch button on top of the instrument is discussed in
section 3.7 and section 3.8 respectively.
3.2.1
Using multiple interfaces
The analog interface is always present on EL-FLOW Prestige instruments. An interface to any available field bus is optional.
Operation via analog interface, RS232/RS485 (side connector) and an optional field bus (top connector) can be performed at
the same time. When using multiple interfaces, reading of parameters can be done simultaneously. When changing a
parameter value, the last value sent by any of the interfaces will be valid.
Control mode
A controller setpoint is accepted from either the analog or digital interface, but not both. Analog or digital operation is
selected at ordering and indicated on the instrument backside label. The inactive setpoint source is indicated between
brackets (…), see example below. The parameter ‘Control Mode’ indicates from which source a controller setpoint is
accepted: analog or digital. See section 4.2.2 for more information regarding the ‘Control Mode’ parameter.
Factory communication settings
The factory selected communication and side connector pinning settings are indicated on the instrument backside label. See
example below for a description of the communication information indicated on the instrument label:
1. Model key (see explanation of the model key in section
1.5)
2. Field bus (top connector) (example: none)
3. Customized IO settings (pin 5), see section 4.4.1 for more
information (example: default setting)
4. Analog interface (pin 2, 3) (example: inactive setpoint
source, measure always available)
5. Digital interface (pin 1, 6) (example: RS232, active setpoint
source)
6. Side connector digital interface settings (protocol,
medium, baud rate, parity) (example: FLOW-BUS (Propar)
communication over RS232 interface with baud rate
115200 Baud and no parity)
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3.3
Analog operation
The following analog signals are available for each instrument through the 9-pin sub-D side connector:
· Measured value (analog output) at pin 2
· Setpoint (analog input/setpoint) at pin 3
The factory selected analog interface (0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA) can be found in the model key of the
instrument (section 1.5) and in the pin description at the instrument backside label.
Pin 5 is used for customized I/O configurations. However, by default it is set as an analog output:
· Valve output (control signal only) 0…10 Vdc at pin 5 (default)
For customized pin 5 I/O configurations see section 4.4.1. The factory selected pin 5 configuration can be found in the
model key of the instrument (section 1.5) and in the pin description at the instrument backside label.
When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to
RS232 for reading/changing parameters (e.g. settings or fluid selection).
3.3.1
Hook-up
Refer to the hook-up diagram for analog operation (document 9.16.119)
or use a 9-pin sub-D loose-end cable to connect the required signals.
3.4
Basic RS232 operation
Digital RS232 (or bus) operation adds a lot of extra features to the instruments compared to analog operation, such as:
· Up to eight selectable and customizable fluids (section 3.1.1)
· Multi gas / multi range functionality (section 3.1.1)
· Direct reading at readout/control module or host computer (section 3.4.1)
· Self-testing and diagnostics (section 5.1)
· Identification (section 3.9.3)
· Adjustable minimum and maximum alarm limits (section 3.9.4)
· (Batch) counter (section 3.9.4)
Each instrument process is controlled (internally) by specific parameters. The instrument parameter values are accessible
through the available digital interfaces to influence the instrument behavior. In this section it is explained how to operate
an instrument using RS232 communication.
Make sure that the instrument back-side label indicates RS232 settings for the 9-pin sub-D connector and apply the proper
Baud rate settings. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to
overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up
and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the
‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to
RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same
procedure to deactivate the ‘Configuration Mode’.
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3.4.1
Hook-up
A special T-part cable (7.03.366) is required for connecting the
9-pin sub-D side connector of an EL-FLOW Prestige instrument
to a COM port of a pc for RS232 communication. Optionally
use
an RS232 to USB2.0 converter (9.09.122) to connect to a USB
port. Use a Plug-in Power Supply (PiPS) (7.03.422) for powering
the instrument.
Alternatively use a 9-pin sub-D loose-end cable and refer to
the
hook-up diagram for RS232 operation (document 9.16.119) to
connect the required signals, typically for connection to PLC or
microcontroller devices.
If an instrument is powered through the bus connector on top
of the instrument (if present), the 9-pin sub-D side connector
can be connected to a COM port directly using the T-part cable
7.03.366 or cable 7.03.367. The figure on the right shows a
hook-up example for DeviceNet™.
Keep in mind that the 9-pin sub-D configuration of a Bronkhorst instrument differs from the 9-pin sub-D configuration of a
PC COM-port. Make sure the correct cables are used for hook-up. When in doubt, always check the hook-up diagrams
associated with the instruments.
E-8000
When an EL-FLOW Prestige instrument is used in combination
with an E-8000 readout/ control unit equipped with an RS232
interface, the instrument can be powered and operated using
the 9-pin sub-D (female) connector at the rear of the E-8000
module and a cable 7.03.016 or equivalent. With the display
interface and control buttons most digital functions described
in this document can be used. See E-8000 manual (document
9.17.076) for more information.
BRIGHT
When an EL-FLOW Prestige instrument is used in combination
with a BRIGHT B1 or B2 readout/control module, most digital
functions are available by using the display interface and
control buttons. If a BRIGHT module is connected, no other
RS232 communication with the instrument can be established.
For more information see the BRIGHT manual (document
9.17.048).
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3.4.2
FlowDDE
RS232 communication can be used for operating the instrument using the Bronkhorst FlowDDE server application. Dynamic
Data Exchange (DDE) provides the user a basic level of interprocess communication between Windows applications.
FlowDDE is a DDE server application. Together with a client application, either self-made or with a SCADA-program from
third parties, it is possible to create an easy way of data exchange between the flow meter/controller and a Windows
application. For example, a cell in Microsoft Excel could be linked to the measured value of the EL-FLOW Prestige and when
the measured value changes, it will be updated automatically in the Excel spreadsheet.
The FlowDDE server offers the user a different and user-friendly interface to the instrument. FlowDDE makes use of specific
parameter numbers for communicating with the instrument. A DDE-parameter number is a unique number in a special
FlowDDE instruments/parameter database and not the same as the parameter number from the process on an instrument.
Node-address and process number will be translated by FlowDDE to a channel number.
DDE-client applications communicate to the FlowDDE server by using DDE messages. Before messages can be exchanged, a
DDE link has to be made. A DDE link consists of three parts: the server, the topic and an item. For separation the characters '|'
and '!' may be used, so a DDE link in e.g. Microsoft Excel becomes: Server|Topic!Item.
For standard instrument parameters and the FlowDDE server, these are:
· Server: FlowDDE or FlowDDE2
· Topic: ‘C(X)’ for channel number X
· Item: ‘P(Y)’ for parameter number Y
An example of a DDE link in a Microsoft Excel cell is =FlowDDE|’C(1)’!’P(8)’ to read parameter 8 of channel 1.
How to setup a DDE link with FlowDDE is described in the
help-file of the FlowDDE application and in the instruction
manual document 9.17.067. Programming examples are
available for making applications in: Visual Basic, LabVIEW
and Microsoft Excel.
When not using FlowDDE for communication with the
instrument, each parameter value is addressed by:
· Node address of the instrument
· Process number on the instrument
· Parameter number on the instrument
Refer to section 3.9 for more information regarding
instrument parameters.
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For more information regarding FlowDDE, see document 9.17.067 'Instruction manual FlowDDE' which can be found
on: http://www.bronkhorst.com/files/downloads/manuals_english/917067manual_flowdde.pdf
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Bronkhorst High-Tech B.V.
3.4.3
Software (DDE applications)
Examples of free Bronkhorst DDE client applications: FlowDDE, FlowPlot and FlowView. Other software programs supporting
DDE are for example MS-Office, LabVIEW, InTouch and Wizcon.
Bronkhorst® software applications 'FlowView' (left) and 'FlowPlot' (right)
i
FlowDDE and other Bronkhorst applications are available on the support CD or can be downloaded from the
Bronkhorst internet site: http://www.bronkhorst.com/en/products/accessories_and_software/
bronkhorst_flowware/
www
3.4.4
Baud rate setup
EL-FLOW Prestige instruments support the following baud rates for RS232 communication. The factory selected baud rate is
indicated on the instrument back-side label. Refer to section 4.3.2 for changing the baud rate settings for the instrument.
The default baud rate for RS232 communication is 38400 Baud.
Mode:
Digital
Interface/medium:
RS232
Protocol:
FLOW-BUS (Propar)
Baud rate:
9600
16200
38400
57600
115200
230400
460800
3
Node address:
None
Parity:
RS232 communication options
Changing RS232 settings of the 9-pin sub-D side connector interface
Refer to section 4.3.2 for changing the baud rate settings for the instrument.
Make sure that the instrument’s baud rate corresponds with the baud rate of the application the instrument is
communicating with, otherwise no communication can be established.
For RS232 communication, the maximum cable length is 10 m for baud rates up to 38400 Baud. For higher baud rates, use
cable lengths of maximum 3 m.
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For more information regarding communication through an RS232 interface, see document 9.17.027: RS232 interface
with FLOW-BUS for digital instruments. http://www.bronkhorst.com/files/downloads/
manuals_english/917027manual_rs232_interface.pdf
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3.5
Basic RS485 (FLOW-BUS/Modbus) operation
This section is limited to RS485 FLOW-BUS or Modbus communication. For communication through other field bus
interfaces see section 3.6.
FLOW-BUS or Modbus communication is available only if either the FLOW-BUS or Modbus RJ-45 connector on top of the
instrument is present, or if the 9-pin sub-D side connector is set for FLOW-BUS or Modbus communication. The label at the
back of the instrument indicates the factory settings of the connector pinning.
FLOW-BUS
FLOW-BUS is a Bronkhorst designed field bus, based on RS485 technology, for digital communication between devices,
offering the possibility of host-control by a pc.
Characteristics:
· Baud rates of 187500 (default) or 400000 Baud
· +15…24 Vdc supply voltage
· Easy installation and communication with other Bronkhorst devices
· Automatic node search and bus optimization (gap fixing)
· PC communication via (local host) FLOW-BUS – RS232 interface
· Connection of max. 120 instruments on a single bus
· Maximum bus length: 600 m
See document 9.17.024 for more information about FLOW-BUS communication.
Modbus
Modbus is a 3-wire, RS485-based field bus communication system for parameter value exchange. In this system each
instrument/device is equipped with a micro-controller for its own dedicated task but also for exchanging parameter value
information with other devices connected to the same Modbus system. In a Modbus system Bronkhorst instruments always
serve as Modbus slaves. There is no mutual communication between Modbus slaves, only between master and slave. The
master device is for example a pc.
Characteristics:
· Several selectable baud rates between 9600 and 256000 Baud (default: 19200 Baud)
· +15…24 Vdc supply voltage
· connection of max. 247 instruments on a single bus
· supports RTU and ASCII protocols
See document 9.17.035 for more information about Modbus communication.
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More detailed information about Modbus can be found at http://www.modbus.org or any website of the (local) Modbus
organization of your country (when available).
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3.5.1
Hook-up
The illustrations below show examples of a number of EL-FLOW Prestige instruments in an RS485 bus-system. Note that
many other bus configurations are possible, contact your local sales representative for more information. Please check the
total power consumption of your instruments and do not exceed the maximum power of the power supply.
FLOW-BUS setup (example)
In the example below an E-8000 power supply/readout control unit with FLOW-BUS is connected to two EL-FLOW Prestige
instruments via the RJ-45 top-connector FLOW-BUS interface. In this example one instrument serves as 'local host' for
communicating with a pc to all instruments on the bus via an available RS232 connector. Note: communication with all the
instruments on the FLOW-BUS system is possible when using an EL-FLOW Prestige instrument as local-host RS232/FLOWBUS interface. It is also possible to use multiple local-host RS232/FLOW-BUS interfaces in a FLOW-BUS system
simultaneously.
Power the instruments in a FLOW-BUS local-host system by hooking-up the power supply directly on the FLOW-BUS line
and not by powering a set of instruments through the 9-pin sub-D connector on one of the digital instruments.
Modbus setup (example)
In the example below the Modbus power supply is provided by an E-8000. The EL-FLOW Prestige instruments are connected
to the bus via RS485 cables with RJ-45 connector and a Multiport connector. The RS485 - USB2.0 adapter can be used to
connect the system to a Modbus master device.
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For possible power supply and communication options, refer to document 9.17.076 'Instruction manual E-8000 PS /
readout and control module': http://www.bronkhorst.com/files/downloads/manuals_english/917076-manual_e-8000.pdf
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3.5.2
Software
When using a pc to communicate with EL-FLOW Prestige instruments only the FLOW-BUS protocol is supported by
Bronkhorst software. When using Modbus operation, software from third parties, such as LabVIEW, ModScan or a Modbus
PLC must be used to serve as Modbus master.
Note: an instrument with 9-pin sub-D side connector set for RS485 FLOW-BUS or Modbus communication will not respond
when connecting to an RS232 configuration. If the instrument is not set for RS232 communication, use the micro switch on
top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the
micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off). Release
the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D
side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power
down. Use the same procedure to deactivate the ‘Configuration Mode’.
•
3.5.3
•
Baud rate, node address and parity setup
EL-FLOW Prestige instruments are configured from factory as indicated on the instrument back-side label. If there is a need
of changing any of the specified RS485 settings, see the tables below for the supported configurations. The default
selections are presented in bold.
Mode:
Digital
Interface/medium:
RS485
Protocol:
FLOW-BUS
Modbus RTU
Modbus ASCII
Baud rate:
187500
400000
9600
19200
38400
56000
57600
115200
128000
256000
9600
19200
38400
56000
57600
115200
128000
256000
Node address:
3…125
1…247
1…247
None; Even; Odd
None; Even; Odd
Parity:
None
RS485 FLOW-BUS/Modbus communication options
Changing RS485 settings of the RJ-45 top connector interface
In case the FLOW-BUS or Modbus RJ-45 field bus connector is used for bus
communication, the node address can be easily set by using the rotary switches on the
side of the instrument. Use the ‘MSD’ (Most Significant Digit) to set the ‘tens’ of the busaddress and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the bus-address (the
example on the right reads ‘63’). Set the rotary switches to '00' for automatic installation.
Refer to the corresponding field bus manual, document 9.17.024 (FLOW-BUS) or
document 9.17.035 (Modbus) for more details.
For changing the baud rate or parity settings use the RS232 interface to change the
corresponding parameters (see section 4.3.2).
Changing RS485 settings of the 9-pin sub-D side connector interface
In case the 9-pin sub-D side connector is set for RS485 communication, the baud rate or node address can be changed by
using the micro switch or by changing the settings in the ‘Configuration Mode’. Refer to section 3.8 for changing node
address and baud rate with the micro switch. Other communication parameters can be changed only in the ‘Configuration
Mode’. Activate the ‘Configuration Mode’ by pressing the micro switch at start-up according the description in section 3.5.2
above. In ‘Configuration Mode’ the bus type and baud rate are set to RS232 FLOW-BUS (Propar) at 38400 Baud. Change the
appropriate parameters as described in section 4.3.2. When finished, deactivate the ‘Configuration Mode’ using the same
procedure. Now the instrument is ready to use in the desired configuration with the adjusted baud rate, node address or
parity.
Any changes made to the instrument communication settings will not be restored after a factory reset. See section 5.2 for
more details.
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3.6
Other field bus configurations
The following field buses are optionally available for the EL-FLOW Prestige instruments. For all mentioned field bus systems
the EL-FLOW Prestige instruments serve as slaves on the master/slave bus system. There is no mutual communication
between slaves, only between master and slave.
PROFIBUS DP
PROFIBUS DP is a 2-wire, RS485-based industrial data communication standard (field bus) which allows automation
components (like sensors, actuators and controllers) to exchange information. For more information regarding the
PROFIBUS DP interface refer to document 9.17.025.
DeviceNetTM
The DeviceNetTM interface offers direct connection to a DeviceNetTM network a ccordi ng to the Ma s s Fl ow Control l er Profi l e
s peci fi ed by the ODVA. The Bronkhorst DeviceNetTM instrument is a Group 2 Only Server device which messages comply
with the Controlled Area Network (CAN) 2.0A standard and with the DeviceNetTM protocol. See document 9.17.026 for more
information about the DeviceNetTM interface.
EtherCAT®
Ethernet for Control Automation Technology (EtherCAT®) is an open high performance Ethernet-based field bus
system. The EtherCAT® interface is described in more detail in document 9.17.063.
PROFINET
The PROFINET interface is 100% Ethernet-compatible and is used for data exchange between IO controllers (PLC, etc.)
and IO devices (slaves, field devices). PROFINET uses the proven communication model and application view of
PROFIBUS DP. Refer to document 9.17.095 for more information.
3.6.1
Hook-up
See the following documents for hook-up diagrams and instructions for setting up bus communication with the following
communication interfaces:
· PROFIBUS DP interface: hook-up diagram 9.16.121 and manual 9.17.025
· DeviceNetTM interface: hook-up diagram 9.16.122 and manual 9.17.026
· EtherCAT® interface: hook-up diagram 9.16.124 and manual 9.17.063
· PROFINET interface: hook-up diagram 9.16.147 and manual 9.17.095
3.6.2
Baud rate, node address and parity setup
In the table below for the supported configurations for PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET are shown. The
default selections are presented in bold.
Digital
Mode:
Connector:
9-pin D-sub (female)
5-pin M12 (male)
2x RJ45 (in/out)
2x RJ45
RS485
RS485
Ethernet
Ethernet
Protocol:
PROFIBUS DP
DeviceNetTM
EtherCAT®
PROFINET
Baud rate:
Autodetect
(9600)
(19200)
(45450)
(93750)
(187500)
(500000)
(1500000)
(3000000)
(6000000)
(12000000)
125000
250000
500000
100000000
100000000
0…126
0...63
0 (n/a)
0 (n/a)
None
None
Interface/medium:
Node address:
Even
None
Parity:
PROFIBUS DP, DeviceNet™, EtherCAT® and PROFINET communication options
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Changing PROFIBUS DP node address
The node address can be easily set by using the rotary switches on the side of the instrument. Use the ‘MSD’ (Most
Significant Digit) to set the ‘tens’ of the bus-address and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the bus-address.
Changing DeviceNet node address and data rate
The node address and data rate can be easily set by using the rotary switches on the side of the instrument. Use the
‘MSD’ (Most Significant Digit) to set the ‘tens’ of the bus-address and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the
bus-address. Set the 'MSD' rotary switch to 'P' to select programmable bus-address. For the data rate setting select '1' for
125000 Baud, '2' for 250000 Baud, '5' for 500000 Baud and 'P' for programmable data rate.
Changing EtherCAT Second Address
EtherCAT supports the use of a Second Address. Bronkhorst instruments have 3 rotary switches, with which a Second
Address can be set in the range of 0 – 4095 (0xFFF). This value of the rotary switches will be copied to the Configured Station
Alias register (address 0x0012:0x0013) at instrument start-up.
3.7
LED indications
The following LED indicators are present on top of the instrument:
‘Mode’
‘Error’
‘NET’
‘MOD’
‘Status’
·
·
·
·
·
LED: green
LED: red
LED: green/red
LED: green/red
LED: green/red
•
•/
• /•
• /•
••
used for operation mode indication
used for error/warning messages
used for Network status ( DeviceNet™ only)
used for Module status ( DeviceNet™ only)
used for status indication ( EtherCAT® and PROFINET only)
For EtherCAT® and PROFINET the following LED indicators are integrated in the RJ-45 connectors:
 Amber LED: Ethernet Speed indicator
 Green LED: Ethernet Link/Activity indicator
For an example of the different fieldbus configuration see section 3.2, 'Communication interfaces'.
The tables below list the possible indications by the LEDs on top of the instrument:
•LEDGreen 'Mode'
• Off
Time
Indication
Continuous
Power-off or program not running
On
Continuous
Normal Operation Mode
•
Short flash
0.1 sec on,
2 sec off
Valve Safe State Mode There is no bus communication (PROFIBUS DP, DeviceNetTM,
EtherCAT® and PROFINET only). Valves are in safe state. This LED indication is also
active when the instrument is in ‘Initialization Mode' (Init Reset = '73')
• Normal flash
• Long flash
0.2 sec on,
0.2 sec off
Special Function Mode The instrument is busy performing a special function, e.g.
auto-zero or self-test
2 sec on,
0.1 sec off
Configuration Mode The instrument is in configuration mode. In the configuration
mode the baud rate and bus type for the 9-pin sub-D side connector are set to 38k4
and RS232 FLOW-BUS (Propar)
Time
Indication
Continuous
No error
Continuous
Critical error message A serious error occurred in the instrument. The instrument
needs servicing before further use.
0.1 sec on,
2 sec off
Field bus specific warning message
FLOW-BUS:
Node occupied: re-install instrument
PROFIBUS DP:
No data exchange between master and slave (automatic
recovery)
Modbus:
Data is received or transmitted
DeviceNetTM:
Not used
Green LED indications
• red 'Error' LED
• Off
• On
• Short flash
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• red 'Error' LED
Time
• Normal flash
0.2 sec on,
0.2 sec off
Incorrect fluidset configuration and/or field bus specific warning message
The fluidset configuration of the instrument is incorrect (in this case the valves are in
safe state, see section 4.2.3) and/or:
FLOW-BUS:
Waiting for communication, check communication settings of all
FLOW-BUS devices in the field bus setup. Usually the ‘last node address’ setting of
one of the devices is incorrect.
PROFIBUS DP:
Not used
Modbus:
Not used
DeviceNetTM:
Not used
EtherCAT®:
Not used
PROFINET:
Not used
• Long flash
2 sec on,
0.1 sec off
Field bus specific warning message
FLOW-BUS:
Not used
PROFIBUS DP:
A requested parameter is not available (see PROFIBUS DP
manual document 9.17.025 for more details)
Modbus:
Not used
DeviceNetTM:
Not used
EtherCAT®:
Error detected in EtherCAT® configuration (see EtherCAT®
manual document 9.17.063 for more details)
PROFINET:
Configuration error. For example a requested parameter is not
available (see PROFINET manual document 9.17.095 for more
details).
Indication
EtherCAT®:
Instrument is not in OP mode (see EtherCAT® manual document
9.17.063 for more details)
PROFINET:
No application relation established
Red LED indications
Wink mode:
Wink
• green ‘Mode’ LED / • red ‘Error’ LED turn by turn
• /• Slow wink
• /• Normal wink
• /• Fast wink
Time
Indication
1 sec on,
1 sec off
Alarm indication Minimum alarm, limit/maximum alarm, power-up alarm, limit
reached or batch reached.
0.2 sec on,
0.2 sec off
Wink mode By sending a command via ‘Wink’ parameter the instrument can wink
with the LEDs to indicate its position in a (large) system.
0.1 sec on,
0.1 sec off
Switch released Selected action started.
LED wink indications
DeviceNetTM LED indications
Specific LED indications are applicable to instruments with DeviceNetTM interface. Note: the ‘NET’ and ‘MOD’ LEDs are bicolored LEDs (green/red). Refer to the DeviceNetTM manual, document 9.17.026, for more information.
EtherCAT® LED indications
Specific LED indications are applicable to instruments with EtherCAT® interface. Refer to the EtherCAT® manual, document
9.17.063, for more information.
PROFINET LED indications
Specific LED indications are applicable to instruments with PROFINET interface. Refer to the PROFINET manual, document
9.17.095, for more information.
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3.8
Micro switch functions
By means of manual operation of the micro push-button switch some important actions for the instrument can be selected
or started. These options are available in both analog and digital operation mode. These functions are:
· Reset alarm
· Reset instrument (firmware program reset)
· Auto-zero
· Restore factory settings (in case of accidentally changing of the settings)
· Activate 'Configuration Mode' (for changing communication settings via RS232)
Using digital RS485 operation via the 9-pin sub-D side connector it is also possible to read/set:
· Bus-address (node-address) (only required for RS485)
The micro switch on top of the EL-FLOW Prestige can be operated with a thin, metal or hard plastic pin, for example the
end of a paperclip.
When the micro switch is pressed, both LEDs will start indicating different patterns in a loop. The switch has to be pressed
down until the two LEDs are indicating the right pattern. When the switch is released, the selected action is started. The
tables below describe the micro switch functions that can be started in normal operation mode and during power-up:
LEDs
Time
red ‘Error’ LED pushed
•
• Off
•
• Off
• Off
green ‘Mode’ LED
Indication
0…1 sec.
No action
Pressing a switch briefly by accident will not start any unwanted
reaction of the instrument.
• Off
1…4 sec.
In case of min/max alarm or counter batch reached: Reset alarm
(only if reset by micro switch has been enabled).
For FLOW-BUS only: if the node address is occupied, this function
will install a free node-address on FLOW-BUS.
• Off
• On (red)
4…8 sec.
Reset instrument. Instrument program will be restarted and all
warning and error messages will be cleared. During start-up the
instrument will perform a (new) self-test.
• On (green)
• Off
8…12
sec.
Auto-zero
Instrument will be re-adjusted for measurement of zero-flow, see
section 2.9.
• On (green)
• On (red)
12…16
sec.
Prepare instrument for FLASH mode for firmware update.
Instrument shuts down and both LEDs turn off. At next power-up
the instrument will be active again.
LED indications using micro switch at normal operation mode of an instrument
LEDs
• green ‘Mode’ LED • red ‘Error’ LED
• Off
• Off
• Off
flash
•0.2Normal
sec on,
Time
pushed
Indication
0…4 sec.
No action
Pressing a switch briefly by accident will not start any unwanted
reaction of the instrument.
4…8 sec.
Restore factory settings
All parameter settings (except field bus/communication settings)
will be restored to the original factory settings.
8…12
sec.
For FLOW-BUS only: install a free node-address on FLOW-BUS.
0.2 sec off
flash
•0.2Normal
• On (red)
sec on, 0.2 sec off
flash
•0.2Normal
• Normal flash
sec on, 0.2 sec off 0.2 sec on,
12…16
sec.
Activate ‘Configuration Mode’
The baud rate and bus type for the 9-pin sub-D side connector are
0.2 sec off
set to 38k4 and RS232 FLOW-BUS (Propar). The ‘Configuration
Mode’ is recognized by the green LED blinking 2 sec on, 0.1 sec off.
The ‘Configuration Mode’ is deactivated only after applying this
micro switch action again.
LED indications using micro switch at power-up situation of an instrument
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3.9
Basic parameters and properties
3.9.1
Introduction
Most instrument parameters can only be accessed with digital communication. For each communication protocol the
instrument parameters are accessed differently. When using Bronkhorst software programs FlowView or FlowPlot, easy
access is provided to the mostly used parameters by menu interfaces. When using other communication methods the
addressing method for the supported communication protocol is presented for a number of basic parameters in a table as
shown below:
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
[type]
RW 
[x]…[y]
[DDE par]
[Pro]/[Par]
[address]/[index]
Type
Unsigned char
Unsigned int
Unsigned long
Float
Unsigned char [x]
Access
R
RW
RW 
1 byte unsigned integer (0...255)
2 byte unsigned integer, MSB first (0...65535)
4 byte unsigned integer, MSB first (0...4294967295)
4 byte floating point, IEEE 32-bit single precision, MSB first
x byte array (text string)
The parameter is read-only
The parameter can be read and written
The parameter is protected and can only be written when the ‘Init Reset’ parameter is set to 64.
See section 4.2.2 for more details.
Range
Some parameters only accept values within a certain range:
[x]
Minimum value of the range
[y]
Maximum value of the range
FlowDDE
Parameter number within FlowDDE. Refer to section 3.4.2 for more information about FlowDDE.
Within this manual, a reference to a parameter name is denoted by writing the DDE parameter number in front of the
parameter name, e.g ‘8Measured Value’. See section 3.9.6 for a parameter list, sorted by DDE parameter number.
FLOW-BUS
Within the FLOW-BUS protocol (Propar when using RS232) parameters are divided into a ‘Process’ and
a ‘Parameter’ number. To address parameters using the FLOW-BUS/Propar protocol write both numbers:
[Pro]
Process number
[Par]
Parameter number
i
www
See document 9.17.027: ‘RS232 interface with FLOW-BUS for digital instruments’ for detailed information. http://
www.bronkhorst.com/files/downloads/manuals_english/917027manual_rs232_interface.pdf
Modbus
Parameters can be read or written via the Modbus protocol by specifying either the PDU Address or the register number. The
PDU Address is a hexadecimal number (identifiable by the ‘0x’ prefix), which corresponds to the decimal register number
minus one, e.g. PDU Address 0x0000 equals register number 1, PDU Address 0x000A equals register number 11 etc.:
[address] Hexadecimal PDU Address
[index]
Decimal register number
For the Modbus protocol every two bytes are addressed separately.
PROFIBUS DP, DeviceNetTM, EtherCAT® or PROFINET
Refer to the specific field bus manual for reading/changing parameters via field bus communication.
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3.9.2
Basic measurement and control parameters
The list below provides the most basic parameters for digital communication with the instrument.
The parameters below are most easily accessible via FlowPlot or FlowView software or any of the Bronkhorst readout/
control units (BRIGHT, E-8000).
Measured Value (Measure)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
R
0…41942 (65535*)
8
1/0
0x0020/33
The ‘8Measured Value’ indicates the amount of mass flow metered by the instrument. The signal of 0…100% is presented in
a range of 0…32000. The maximum measured value output is 131.07%, which is 41942. A floating point variable of the
measured value, ‘205Fmeasure’, is also available in the capacity and capacity unit for which the instrument has been set, see
section 4.2.1.
*In case the instrument is prepared for bi-directional measurement, the negative signals with an output range of
-73.73...-0.003% are presented in a range of 41943…65535 (so value 65535 represents -0.003%), whereas the positive
signals 0…131.07% are still presented in the range 0…41942. (In FlowDDE the numbers are converted to negative values
automatically).
Setpoint
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
RW
0…32000
9
1/1
0x0021/34
The ‘9Setpoint’ is used to set the required mass flow rate for the controller. The signals have the same range as the
‘8Measured Value’, only the setpoint is limited between 0 and 100% (0…32000). A floating point variable of the setpoint,
‘206Fsetpoint’, is also available in the capacity and capacity unit for which the instrument has been set, see section 4.2.1.
3.9.3
Basic identification parameters
User Tag
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[16]
RW
-
115
113/6
0xF130…0xF136/ 61745…61751
The ‘115User Tag’ parameter allows the user to give the instrument a custom tag name, with a maximum of 16 characters.
Customer Model
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[16]
RW 
-
93
113/4
0xF120…0xF127/ 61729…61736
This parameter is used to add extra information to the model number information, such as a customer-specific model
number.
Serial Number
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[20]
R
-
92
113/3
0xF118…0xF11F/ 61721…61728
This parameter consists of a max. 20-byte string with instrument serial number for identification, e.g.: ‘M1111111A’.
BHT Model Number
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[27]
RW 
-
91
113/2
0xF111…0xF117/ 61713…61719
This parameter shows the Bronkhorst instrument model type information.
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3.9.4
Basic alarm and counter settings
The alarm and counter settings are most easily accessible via FlowPlot or FlowView software or any of the Bronkhorst
readout/control units (BRIGHT, E-8000). For more information about the alarm parameters see section 4.2.4, for the
counter parameters see section 4.2.5.
3.9.5
Zeroing (using digital operation)
The auto-zero function is most easily accessible via FlowPlot software. Select 'Instrument Settings' and use the 'Auto zero'
button in the 'Basic' tab.
To start the auto-zero function by digital operation use the following procedure:
1.
2.
3.
4.
•
Set parameter ‘12Control Mode’ to value 9 (Calibration Mode); the green LED will flash normally (0.2 sec on, 0.2 sec off)
Set parameter ‘58Calibration Mode’ to value 9 (Auto-zero)
The auto-zero function has started
Check parameter ‘58Calibration Mode’:
o value 0 = idle (auto-zeroing succeeded), ‘12Control Mode’ is set to previous value.
o value 9 = auto-zero active
o value 255 = error: restart auto-zero (step 2), ‘12Control Mode’ is set to previous value.
3.9.6
Instrument parameter list
The table below lists the relevant parameters for the EL-FLOW Prestige, sorted by FlowDDE parameter number.
FlowDDE
parameter
Parameter name
Purpose
Section
1
Wink
Special instrument parameter
Section 4.2.2
7
Init Reset
Special instrument parameter
Section 4.2.2
8
Measured Value (Measure)
Measurement/control
Section 3.9.2
9
Setpoint
Measurement/control
Section 3.9.2
11
Analog Input
Measurement/control
Section 4.2.1
12
Control Mode
Special instrument parameter
Section 4.2.2
21
Capacity
Fluidset property
Section 4.2.3
22
Sensor Type
Special instrument parameter
Section 4.2.1
24
Fluid Number
Fluidset property
Section 4.2.3
25
Fluid Name
Fluidset property
Section 4.2.3
28
Alarm Info
Alarm settings
Section 4.2.4
55
Valve Output
Measurement/control
Section 4.2.1
58
Calibration Mode
Special instrument parameter
Section 3.9.5
86
IOStatus
Special instrument parameter
Section 4.4.2
90
Device Type
Diagnostics
Section 5.1
91
BHT Model Number
Identification
Section 3.9.3
92
Serial Number
Identification
Section 3.9.3
93
Customer Model
Identification
Section 3.9.3
105
Firmware Version
Diagnostics
Section 5.1
114
Reset
Special instrument parameter
Section 4.2.2
115
User Tag
Identification
Section 3.9.3
116
Alarm Maximum Limit
Alarm settings
Section 4.2.4
117
Alarm Minimum Limit
Alarm settings
Section 4.2.4
118
Alarm Mode
Alarm settings
Section 4.2.4
120
Alarm Setpoint Mode
Alarm settings
Section 4.2.4
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FlowDDE
parameter
Parameter name
Purpose
Section
121
Alarm New Setpoint
Alarm settings
Section 4.2.4
122
Counter Value
Counter settings
Section 4.2.5
124
Counter Limit
Counter settings
Section 4.2.5
126
Counter Setpoint Mode
Counter settings
Section 4.2.5
127
Counter New Setpoint
Counter settings
Section 4.2.5
128
Counter Unit
Counter settings
Section 4.2.5
129
Capacity Unit
Fluidset property
Section 4.2.3
130
Counter Mode
Counter settings
Section 4.2.5
139
Slave Factor
FLOW-BUS master/slave control
Section 4.3.1
142
Temperature
Fluidset property
Section 4.2.3
156
Reset Alarm Enable
Alarm settings
Section 4.2.4
157
Reset Counter Enable
Counter settings
Section 4.2.5
158
Master Node
FLOW-BUS master/slave control
Section 4.3.1
170
Density
Fluidset property
Section 4.2.3
175
Identification Number
Diagnostics
Section 5.1
178
Pressure Inlet
Fluidset property
Section 4.2.3
179
Pressure Outlet
Fluidset property
Section 4.2.3
181
Fluid Temperature
Fluidset property
Section 4.2.3
182
Alarm Delay Time
Alarm settings
Section 4.2.4
201
Fieldbus 1 baudrate
Fieldbus settings
Section 4.3.2
205
Fmeasure
Measurement/control
Section 4.2.1
206
Fsetpoint
Measurement/control
Section 4.2.1
245
Capacity unit type temperature
Fluidset property
Section 4.2.3
246
Capacity unit type pressure
Fluidset property
Section 4.2.3
250
Heat Capacity
Fluidset property
Section 4.2.3
251
Thermal Conductivity
Fluidset property
Section 4.2.3
252
Viscosity
Fluidset property
Section 4.2.3
254
Controller Speed (Kspeed)
Fluidset property
Section 4.2.3
288
IO Switch Status
Special instrument parameter
Section 4.4.1
309
Fieldbus 2 address
Fieldbus settings
Section 4.3.2
310
Fieldbus 2 baudrate
Fieldbus settings
Section 4.3.2
335
Fieldbus 1 parity
Fieldbus settings
Section 4.3.2
336
Fieldbus 2 parity
Fieldbus settings
Section 4.3.2
346
Mix Fraction Type
Fluidset property
Section 4.2.3
347
Mix Fraction Temperature
Fluidset property
Section 4.2.3
348
Mix Fraction Pressure
Fluidset property
Section 4.2.3
349
Mix Fraction Index
Fluidset property
Section 4.2.3
350
Mix Fraction
Fluidset property
Section 4.2.3
351
Mix Component Name
DDE parameter list
Fluidset property
Section 4.2.3
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4
Advanced operation
4.1
Sealing material compatibility
EL-FLOW Prestige instruments are equipped from factory with sealings compatible with the requested gas type. However
the instruments have multi-gas/multi-range functionality on board, if another gas or mixture is used, always make sure that
the gas/mixture is compatible with the installed sealing materials. As factory standard, the instruments are provided with
Viton® static seals with FFKM dynamic seals. EPDM sealed instruments or full Kalrez®/FFKM are available as an option, see the
model key indication ...-V-..., ...-E-... or ...-K-... on the instrument back-side label. Each sealing material has its specific compatibility with
used process gases. See the table below for compatibility with the 25 most used process gases:
Gas
Modelkey: ...-V-...
Static seals: Viton®
Dynamic seals: FFKM
(viton for n.o. valves
or FDA/USP class VI)
Modelkey: ...-E-...
Static seals: EPDM
Dynamic seals:
EPDM
Modelkey: ...-K-...
Static seals: Kalrez®/FFKM
Dynamic seals: FFKM
Air



Ar (Argon)



CH4 (Methane)



CO (Carbon monoxide)



max: 10 bar(g), 50°C

max: 10 bar(g), 50°C
C2F6 (Freon-116)



C2H2 (Acetylene)
/*


C2H4 (Ethylene)
max: 10 bar(g)
max: 10 bar(g)
max: 10 bar(g)



max: 58 bar(g)
CO2 (Carbon dioxide)
C2H6 (Ethane)
max: 10 bar(g)

C3H8 (Propane)



Cl2 (Chlorine)



He (Helium)



H2 (Hydrogen)



H2S (Hydrogen
sulfide)



Kr (Krypton)



NF3 (Nitrogen
trifluoride)



NH3 (Ammonia)



C3H6 #2 (Propylene)
NO (Nitric oxide)



N2 (Nitrogen)



max: 20 bar(g), 50°C


O2 (Oxygen)



SF6 (Sulfur
hexafluoride)



SiH4 (Silane)
/*





N2O (Nitrous oxide)
Xe (Xenon)
Sealing material compatibility list
Remarks
* FFKM dyn. seal
only
Dry gas only
* FFKM dyn. seal
only
Do not use process gases/mixtures that are incompatible with the sealing materials the EL-FLOW Prestige instrument is
equipped with and do not exceed the indicated maximum operating pressure/temperature. Using the instrument outside
the given operating limits may lead to serious damage to the instrument.
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4.2
Advanced parameters and properties
4.2.1
Advanced measurement and control parameters
Measured Value (Fmeasure)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
R
-3.4E+38…
3.4E+38
205
33/0
0xA100…0xA101/ 41217…41218
Floating point variable of the ‘8Measured Value’. The ‘205Fmeasure’ parameter shows the measured value in the capacity and
capacity unit for which the instrument has been set. The ‘205Fmeasure’ parameter is dependent of ‘129Capacity Unit’ and
‘22Sensor Type’.
Setpoint (Fsetpoint)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW
0…3.4E+38
206
33/1
0xA119…0xA11A/ 41241…41242
Floating point variable of the ‘9Setpoint’. The ‘206Fsetpoint’ parameter shows the setpoint in the capacity and capacity unit
for which the instrument has been set. The ‘206Fsetpoint’ parameter is dependent of ‘129Capacity Unit’ and ‘22Sensor Type’.
Valve Output
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned long
RW
0…
16777215
55
114/1
0x001F/32
This parameter is the digital steering signal for driving the control valve, where 0…16777215 corresponds with 0…100%.
Analog Input
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
R
0…65535
11
1/3
0x0023/36
Depending on the analog mode, 0…5 Vdc, 0…10 Vdc, 0…20 mA or 4…20 mA is converted to a number in the range 0…
32000. The digitized ‘11Analog Input’ is in the same range as ‘8Measured Value’ (0…32000 corresponds to 0…100%). This
parameter can be used as setpoint or slave factor when the instrument is used as ‘analog slave’ or ‘FLOW-BUS analog slave’,
see ‘12Control Mode’.
4.2.2
Special instrument parameters
All parameters described in this section have influence on the behavior of the EL-FLOW Prestige. Please be aware that
wrong settings can disorder the output. To avoid unintentional changes, some parameters are locked (shown by the 
symbol). To unlock parameters set parameter ‘7Init Reset’ to ‘Unlocked’.
Init Reset
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
82/64
7
0/10
0x000A/11
The ‘7Init Reset’ parameter is used to unlock secured parameters for writing (see the  symbol). This parameter can be set to
the following values:
· Value 82: Locked mode, secured parameters are read-only
· Value 64: Unlocked mode, secured parameters are writeable and readable
This parameter is always set to ‘Locked’ (value 82) at power-up.
Reset
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
R
0…5
114
115/8
0x0E68/3689
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This parameter is used to reset program, counter or alarms.
· Value 0: no reset
· Value 3: Reset counter
· Value 1: Reset counter
· Value 4: Reset counter and counter off
· Value
· Value 5: Reset firmware program (soft reset)
Make sure the ‘114Reset’ value is accepted by sending a 0 first. The ‘114Reset’ parameter may be disabled by the ‘156Reset
Alarm Enable’ or ‘157Reset Counter Enable’ parameters.
Wink
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char [27]
W
0…9
1
0/0
0x0000/1
Any text string value between '1' and '9' lets the instrument wink (normal wink) (red and green turn by turn) for that number
of seconds for identifying its position. Default value = '0'.
Control Mode
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
RW
0…255
12
1/4
0x0024/37
The ‘12Control Mode’ is used to select different controlling modes of the instrument and determines from which sources
controller setpoints are accepted. The following control modes are available:
Mode
Instrument action
Setpoint source
0
Value
BUS/RS232
Normal operation, controlling
Bus or RS232
1
Analog Input
Normal operation, controlling
Analog input
2
FLOW-BUS Slave
Controlling as slave of other
instrument on bus
‘FLOW-BUS master output’ x
‘139Slave Factor’ / 100%
3
Valve Close
Close valve
4
Controller Idle
Stand-by on bus/RS232, controlling is
stopped; Valve Output freezes in
current position
7
Setpoint 100%
Controlling at setpoint 100%
8
Valve Fully Open
Valve fully opened
9
Calibration
Mode
Calibration mode enabled
(factory only)
10
Analog Slave
Controlling as slave of other
instrument on analog input
‘11Analog Input’ x ‘139Slave
Factor’ /100%
12
Setpoint 0%
Controlling at setpoint 0%
Fixed 0%
13
FLOW-BUS
Analog Slave
Controlling as slave of other
instrument on bus, slave factor is set
with signal on analog input
‘FLOW-BUS master output’ x
‘11Analog Input’ x ‘139Slave
Factor’ / 100%
18
RS232
Normal operation, controlling
RS232
20
Valve Steering
Setpoint is redirected to ‘55Valve
Output’ with controller idle
21
Analog Valve
Steering
Analog input is redirected to ‘55Valve
Output’ with the controller idle
22
Valve Safe State
valve is in safe (unpowered) state
(closed for N.C. valves and fully opened
for N.O. valves)
Slave factor
‘139Slave
Factor’
Fixed 100%
‘139Slave Factor’
‘11Analog
Input’
Instrument control modes
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After power-up the ‘12Control Mode’ will be set to ‘Analog input’ or ‘BUS/RS232’, depending on the customer’s default setting
for analog or digital operation. If however the ‘12Control Mode’ is set to a value other than 0, 1, 9 or 18 the actual control
mode setting is maintained after power-up.
For information about master/slave controller operation through the FLOW-BUS interface, see section 4.3.1.
See section 4.4.2 for changing the default control mode using the ‘86IOStatus’ parameter.
4.2.3
Advanced fluidset, range and operating conditions parameters
For changing fluidset, flow range or operating conditions it is strongly advised to use the FlowTuneTM software available
with the EL-FLOW Prestige instrument. FlowTune checks any changes for compatibility of the process conditions with the
instrument. When the parameters discussed in this section are changed manually, no such checks are performed and the
instrument output may become disordered or the instrument may even be damaged if used in conditions the instrument is
not suited for. Consult Bronkhorst service personnel when in doubt.
Fluid Number
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0…7
24
1/16
0x0030/49
With the ‘24Fluid Number’ parameter any of the maximum 8 available fluid sets can be selected. Each fluid set has its specific
(configurable) properties, such as ‘25Fluid Name’, ‘21Capacity’, etc. Default value = 0 (0 = fluid 1, 1 = fluid 2, 2 = fluid 3, etc.).
The '24Fluid Number' parameter is also accessible via FlowPlot or FlowView software or any of the Bronkhorst readout/
control units (BRIGHT, E-8000).
Fluid Name
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[10]
RW 
-
25
1/17
0x8188…0x818C/33161…33165
This parameter consists of the fluid name for the selected ‘24Fluid Number’. This parameter may contain three value types:
· Gas name, e.g. 'N2', 'He', 'C3H6 #2'.
· CAS number, e.g. '7727-37-9', '7440-59-7', '115-07-1'
· 'Mix': when the ‘25Fluid Name’ value is 'Mix', the instrument will use the gas mixture stored in the parameters '346Mix
Fraction Type', '347Mix Fraction Temperature', '348Mix Fraction Pressure', '349Mix Fraction Index', '350Mix Fraction', '351Mix
Component Name'. The instrument will ignore custom (fixed) fluid properties stored in the parameters '170Density', '250Heat
Capacity', '251Thermal Conductivity' and '252Viscosity'.
Use the FlowTuneTM software to set the instrument for using (fixed) custom fluid properties, e.g. obtained from FLUIDAT on
the Net.
When no valid '25Fluid Name' is entered or when insufficient or invalid fluid properties are entered, the instrument will be
forced into the 'Valve Safe State' mode until a valid fluidset configuration is made.
Capacity
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
1E-10...1E+10
21
1/13
0x8168...0x8169/33129...33130
This parameter sets the maximum readout/control value (100%) for the active ‘24Fluid Number’ in readout units
corresponding to the '129Capacity Unit' parameter. The '21Capacity' is scaled when '178Pressure Inlet', '181Fluid Temperature' or
'25Fluid Name' (or any of the mixture parameter) are changed for the active fluidset.
Capacity Unit
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[7]
RW
See below
129
1/31
0x81F8...0x81FB/33273...33276
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For EL-FLOW Prestige the following units can be set:
Mass flow
Normal volume flow
(1.01325 bar(a), 0 °C)
Standard volume flow
(1.01325 bar(a), 20 °C)
(Custom) volume flow
(246Capacity Unit Pressure,
245Capacity Unit Type
Temperature)
ug/h, ug/min, ug/s,
mg/h, mg/min, mg/s,
g/h, g/min, g/s,
kg/h, kg/min, kg/s
uln/h, uln/min, uln/s,
mln/h, mln/min, mln/s,
ln/h, ln/min, ln/s,
ccn/h, ccn/min, ccn/s,
mm3n/h, mm3n/m, mm3n/s,
cm3n/h, cm3n/m, cm3n/s,
m3n/h, m3n/min, m3n/s,
scfh, scfm, scfs,
sccm, slm
uls/h, uls/min, uls/s,
mls/h, mls/min, mls/s,
ls/h, ls/min, ls/s,
ccs/h, ccs/min, ccs/s,
mm3s/h, mm3s/m, mm3s/s,
cm3s/h, cm3s/m, cm3s/s,
m3s/h, m3s/min, m3s/s
ul/h, ul/min, ul/s,
ml/h, ml/min, ml/s,
l/h, l/min, l/s,
cc/h, cc/min, cc/s,
mm3/h, mm3/m, mm3/s,
cm3/h, cm3/min, cm3/s,
m3/h, m3/min, m3/s,
cfh, cfm, cfs
Unit type list
Due to compatibility the maximum string length is limited to 7 characters. Therefore some unit names are
truncated. For instance mm3n/m means mm3n/min.
Controller Speed (Kspeed)
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW
0.2...5
254
114/30
0xF2F0...0xF2F1/62193...62194
This parameter sets the controller speed factor for the selected fluidset. The '254Kspeed' parameter is set from factory
between value '0.5' (slow) and '2' (fast). The default value is '1'. Slower or faster settings are possible between values 0.2 and 5
at the customer's responsibility.
Actual Temperature
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
R
-250...500
142
33/7
0xA138...0xA139/41273...41274
Indication of the actual ambient temperature in °C.
Pressure
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW
0...3.4E+38
143
33/8
0xA140...0xA141/41281...41282
Indication of the actual (inlet) pressure in bar(a). By default this parameter value is equal to the value of '178Inlet pressure'.
This parameter can be used for active pressure correction by setting parameter '354Conversion Condition Selection' to value 3
and writing the actual pressure to '143Pressure'. After power reset the parameter value is reset to the value of '178Inlet
pressure'.
Pressure Inlet
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
0...3.4E+38
178
113/13
0xF168...0xF169/61801...61802
(Fixed) inlet pressure in bar(a), used for capacity calculations.
Pressure Outlet
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
0...3.4E+38
179
113/14
0xF170...0xF171/61809...61810
(Fixed) Outlet pressure in bar(a), used for capacity calculations (valve capacity only).
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Fluid Temperature
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
-250...500
181
113/16
0xF180...0xF181/61825...61826
(Fixed) temperature, used for capacity calculations.
Density
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
0...3.4E+38
170
33/21
0xA1A8...0xA1A9/41385...41386
Density for the selected fluidset in kg/m3 for given temperature and pressure ('245 Capacity unit type temperature' and '246 Capacity unit
type pressure'). Read-only parameter.
Heat Capacity
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
0...3.4E+38
250
113/18
0xF190...0xF191/61841...61842
Heat capacity for the selected fluidset in J/kg·K for given temperature and pressure ('245 Capacity unit type temperature' and '246 Capacity unit
type pressure'). Read-only parameter.
Thermal Conductivity
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
0...3.4E+38
251
113/20
0xF1A0...0xF1A1/61857...61858
Thermal conductivity for the selected fluidset in W/m·K for given temperature and pressure ('245 Capacity unit type temperature' and
'246 Capacity unit type pressure'). Read-only parameter.
Viscosity
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
0...3.4E+38
252
113/21
0xF1A8...0xF1A9/61865...61866
Dynamic viscosity for the selected fluidset in Pa·s for given temperature and pressure ('245 Capacity unit type temperature' and
'246 Capacity unit type pressure'). Read-only parameter.
Mix Fraction Type
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW 
0...2
346
126/4
0x0FC4/4037
Set the fraction type for the mixture:
· Value 0: Volume fraction
· Value 1: Mass fraction
· Value 2: Mole fraction
Mix Fraction Temperature
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
-250...500
347
126/5
0xFE28...0xFE29/65065...65066
Temperature for the mixture specification in °C (only needed for '346 Mix Fraction Type' value 0 (volume fraction).
Mix Fraction Pressure
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW 
0...3.4E+38
348
126/6
0xFE30...0xFE31/65073...65074
Pressure for the mixture specification in bar(a) (only needed for '346 Mix Fraction Type' value 0 (volume fraction).
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Mix Fraction Index
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0...4
349
126/7
0x0FC7/4040
Index for the gas component in the mixture (max. 5 components).
Mix Fraction
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW
0...1
350
126/8
0xFE40...0xFE41/65089...65090
Mix fraction for the active mix component between 0 and 1, 0 = 0%, 1 = 100%. The sum of the mix fractions of all mix
components must be equal to 1.
Mix Component Name
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[10]
RW 
-
351
126/9
0xFE48…0xFE4C/65097…65101
This parameter consists of the fluid name for the active mix component. This parameter may contain three value types:
· Gas name, e.g. 'N2', 'He', 'C3H6 #2'.
· CAS number, e.g. '7727-37-9', '7440-59-7', '115-07-1'
· no name (spaces), empty mix component slot, next slots will be ignored (note: '350 Mix Fraction' value 0 gives the same
result)
4.2.4
Advanced alarm parameters
Bronkhorst digital instruments have a built-in alarm function. It is used to indicate several types of alarm:
· System errors
· System warnings
· Min/max alarms
· Response alarms
· Batch alarm
· Master/slave alarms
The alarm types can be set with the parameter ‘118Alarm Mode’. When an alarm occurs, the type of alarm can be read out
using parameter ‘28Alarm Info’. After an alarm, an automatic setpoint change can be set using the parameters ‘120Alarm
Setpoint Mode’ and ‘121Alarm New Setpoint’. It is also possible to set an alarm delay to prevent overreaction to small
disturbances using the parameter ‘182Alarm Delay Time’. How an alarm can be reset is controlled by the parameter ‘156Reset
Alarm Enable’. It can bit-wise be set to automatic, reset, external or keyboard/micro switch. Note: when an alarm is disabled,
it will only switch off after the set ‘156Alarm Delay Time’ has passed.
Alarm Mode
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0...3
118
97/3
0x0C23/3108
Available alarm modes:
· Value 0: Alarm off
· Value 1: Alarm on absolute limits
· Value 2: Alarm on limits related to setpoint (response alarm)
· Value 3: Alarm when instrument powers-up (e.g. after power-down)
For DeviceNet TM only modes 0 and 1 are available.
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Alarm Info
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
R
0…255
28
1/20
0x0034/53
This parameter contains 8 bits with status information about (alarm) events in the instrument (convert value to binary
number to see which bits are active).
Low (0)
High (1)
Description
0
Bit
No error
An error occurred
Alarm register 2 contains an error
LED indication
1
No error
A warning occurred
Alarm register 1 contains a warning
2
No error
Minimum alarm
‘Measured Value’ < ‘Alarm Minimum Limit’
3
No error
Maximum alarm
‘Measured Value’ > ‘Alarm Maximum Limit’
4
No error
Batch counter alarm
Batch counter reached its limit
5
No error
This bit only:
Together with bit 2 or 3:
Power-up alarm (probably a power dip occurred)
Response alarm (too much difference between
‘8Measured Value’ and ‘9Setpoint’)
6
No error
Master/slave alarm
'Setpoint' out of limits due to ‘Slave Factor’
(> 100%)
N/A
7
Alarm events
No error
Hardware alarm
Hardware error
• On (red)
On (red) /
•normal
flash
On (red) /
•normal
flash
/
Slow
• • wink
• /• Slow wink
• /• Slow wink
• /• Slow wink
Alarm Delay Time
Type
Access
Range
FlowDDE
FLOW-BUS
Unsigned char
RW
0…255
182
97/7
Modbus
0x0C27/3112
This value represents the time in seconds the alarm action will be delayed when an alarm limit has been exceeded. This
value also delays the alarm off action if an alarm limit is no longer exceeded. Default value = '0'.
Alarm Maximum Limit
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
RW
0…32000
116
97/1
0x0C21/3106
Maximum limit for the ‘8Measured Value’ to trigger the maximum alarm situation (after ‘182Alarm Delay Time’). Range 0…
32000 represents 0…100% signal. The ‘116Alarm Maximum Limit’ value must be greater than the ‘117Alarm Minimum Limit’
value. Default value = '0'.
Alarm Minimum Limit
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
RW
0…32000
117
97/2
0x0X22/3107
Minimum limit for the ‘8Measured Value’ to trigger the minimum alarm situation (after ‘182Alarm Delay Time’). Range 0…
32000 represents 0…100% signal. The ‘117Alarm Minimum Limit’ value must be smaller than the ‘118Alarm Maximum Limit’
value. Default value = '0'.
Alarm Setpoint Mode
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0…1
120
97/5
0x0C25/3110
· Value 0: No setpoint change at alarm (default)
· Value 1: New setpoint at alarm enabled (set at value ‘121Alarm New Setpoint’)
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Alarm New Setpoint
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
RW
0…32000
121
97/6
0x0C26/3111
New (safe) setpoint during an alarm until reset. Range 0…32000 represents 0…100% setpoint. Default value = '0'.
Reset Alarm Enable
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0…15
156
97/9
0C029/3114
Available alarm reset options (convert value to binary number to see which bits are active):
Bit
Low (0)
High (1)
Description
0
Off
On
Reset by micro switch
1
Off
On
External reset (not used)
2
Off
On
Reset by parameter ‘Reset’
3
Off
Alarm reset options
On
Automatic reset (when alarm conditions no longer apply)
Default value: value 15, all conditions above are enabled.
4.2.5
Advanced counter parameters
Counter Mode
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0...2
130
104/8
0x0D08/3337
Available counter modes:
· Value 0: Counter off (default)
· Value 1: Counting upwards continuously
· Value 2: Counting up to limit in ‘124Counter Limit’ (batch counter)
Counter Value
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW
0…
10000000
122
104/1
0x0D01/3330
Actual counter value in units selected at parameter ‘128Counter Unit’.
Counter Limit
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW
0…9999999
124
104/3
0x0D03/3332
Counter limit/batch size in units selected at parameter ‘128Counter Unit’. Default setting is 0 ln.
Counter Setpoint Mode
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0…1
126
104/5
0x0D05/3334
· Value 0: No setpoint change at batch limit (default)
· Value 1: Setpoint change at batch limit (set at value ‘127Counter New Setpoint’)
Counter New Setpoint
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Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned int
RW
0…32000
127
104/6
0x0D06/3335
New (safe) setpoint when a counter limit is reached until reset. Range 0…32000 represents 0…100% setpoint. Default value =
'0'.
Reset Counter Enable
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0…15
157
104/9
0x0D09/3338
Available counter reset options (convert value to binary number to see which bits are active):
Low (0)
High (1)
Description
0
Bit
Off
On
Reset by micro switch
1
Off
On
External reset (not used)
2
Off
On
Reset by parameter ‘114Reset’
On
Automatic reset (when alarm conditions no longer apply)
3
Off
Counter reset options
Default value: value 7; bits 0, 1 and 2 are enabled.
4.3
Field bus operation
4.3.1
FLOW-BUS master/slave controller operation
EL-FLOW Prestige instruments offer possibilities for master/slave control via FLOW-BUS. The output value of any instrument
connected to FLOW-BUS is automatically available to all other instruments (without extra wiring). To setup master/slave
control the ‘12Control Mode’ of the instrument can be set to ‘FLOW-BUS Slave’ (value 2) or to ‘FLOW-BUS Analog Slave’ (value
13), depending on how the ‘139Slave Factor’ should be set. Via the parameter ‘158Master Node’ the master device for the
instrument is set. It is possible to have multiple masters and slaves in a FLOW-BUS system. A slave instrument can also be a
master for other instruments.
Setpoints from master instruments can be received via FLOW-BUS only. The parameters for master/slave control can be
changed through both RS232 and FLOW-BUS.
Master Node
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
1…125
158
33/14
0x042E/1071
Set the master node for the instrument.
Slave Factor
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Float
RW
0…500
139
33/1
0x0421/1058
The controller output from the master instrument is multiplied by the ‘139Slave Factor’/100% to get the slave instrument
setpoint. Example: if a master output is 80% and the ‘139Slave Factor’ value = 50, then the slave instrument setpoint is 80% x
50%/100% = 40%.
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4.3.2
Changing baud rate, node address and parity
Any changes made to the instrument communication settings will not be restored after a factory reset. See section 5.2 for
more details.
Top connector communication
Change the node address of the instrument by using the instructions for the applicable field bus in chapter 3. Change the
baud rate or parity of the installed field bus (top connector) with the following parameters using the RS232 interface:
Fieldbus 1 baudrate
Type
Access
Range
FlowDDE
FLOW
-BUS
Modbus
Unsigned long
RW 
0…10000000000
201
125/9
0xFD48...0xFD49/64841...64842
For the accepted values see the applicable field bus in chapter 3.
Fieldbus 1 parity
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW 
0…2
335
125/12
0x0FAC/4013
The following values are accepted:
0 – no parity
2 – even parity
1 – odd parity
Side connector RS485 communication
Change the baud rate, node address or parity of the side-connector RS485 (FLOW-BUS or Modbus) interface (if installed) with
the following parameters in the 'Configuration Mode'.
Note: an instrument with 9-pin sub-D side connector set for RS485 FLOW-BUS or Modbus communication will not respond
when connecting to an RS232 configuration. If the instrument is not set for RS232 communication, use the micro switch on
top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the
micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off). Release
the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D
side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power
down. Use the same procedure to deactivate the ‘Configuration Mode’.
•
•
Fieldbus 2 address
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW 
0…255
309
124/10
0xFC50/64593
For the accepted values see the applicable field bus in chapter 3.
Fieldbus 2 baudrate
Type
Access
Range
FlowDDE
FLOW
-BUS
Modbus
Unsigned long
RW 
0…10000000000
310
124/9
0xFC48...0xFC49/64585...64586
For the accepted values see the applicable field bus in chapter 3.
Fieldbus 2 parity
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW 
0…2
336
124/12
0xFC60/64609
The following values are accepted:
0 – no parity
2 – even parity
1 – odd parity
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4.4
Special instrument features
4.4.1
Customized IO options (pin 5)
EL-FLOW Prestige instruments offer various customized input/output functions through pin 5 of the 9-pin sub-D side
connector as an option. A number of the (factory installed) programmable IO options are offered as standard, these options
are described in this section. The last three characters of the model key (presented on the back-side label of the instrument)
indicate the installed IO configuration, see also section 1.5. The standard options are described below (the default selection
is …-A1V). Refer to document 9.16.118 for the applicable hook-up diagrams.
The customized IO options are factory installed, as indicated by last three characters of the model key (presented on the
back-side label of the instrument). These IO options cannot be changed manually.
A1V
0…10 Vdc output, controller (default selection)
Analog signal for pump or external valve steering (control signal only).
When the controller output is used for pump or external valve steering (Mass Flow Meters only), make sure
the ‘231Valve Maximum’ is set to 0.3 [A]. For Mass Flow Controllers, the controller output is limited to a value
below 10 Vdc due to the maximum valve current restriction.
B1V
4…20 mA output, controller
Analog signal for pump or external valve steering (control signal only).
When the controller output is used for pump or external valve steering (Mass Flow Meters only), make sure
the ‘231Valve Maximum’ is set to 0.3 [A]. For Mass Flow Controllers, the controller output is limited to a value
below 20mA due to the maximum valve current restriction.
C3A
Digital output, min/max alarm
During a min/max alarm, pin 5 is pulled down to 0 Vdc.
C4A
Digital output, counter alarm
During a counter alarm, pin 5 is pulled down to 0 Vdc.
C5S
Digital output, enabled by setpoint (for shut-off control)
Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation.
For factory selected analog control (…-A#-C5S):
When the ‘12Control Mode’ is set for analog control by factory, the minimum setpoint at which the device
(shut-off valve) connected to pin 5 is activated is 1.9%, to avoid that possible noise on the analog input
does accidentally activate the device.
For factory selected digital control (…-D#-C5S):
When the ‘12Control Mode’ is set for digital control by factory, the setpoint threshold for activating the
device connected to pin 5 is any value > 0.
Note: If the instrument is forced into ‘Valve Safe State’, the digital output is not affected, so a (n.c.) shut-off
valve connected to pin 5 will not close when the (n.c.) controller is in ‘Valve Safe State’.
Make sure to use 24Vdc power supply corresponding to the shut-off valve specifications. Cable 7.03.572 (Tpart 9-pin D-sub/loose end) or 7.03.603 (T-part 9-pin D-sub/DIN43650C) can be used for this operating
option.
\
Example for -C5S- or -C0I- hook-up
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C0I
Digital output, high/low switch via remote parameter (for shut-off control)
Pin 5 is pulled down to 0 Vdc when writing value 1 to parameter ‘288IO Switch Status’, this is undone by
writing value 0.
A device connected to pin5 (e.g. a shut-off valve) can be activated/de-activated by writing the parameter
‘288IO Switch Status’.
Note: If the instrument is forced into ‘Valve Safe State’, the digital output is also affected, so a (n.c.) shut-off
valve connected to pin 5 will be closed when the (n.c.) controller is in ‘Valve Safe State’.
Make sure to use 24Vdc power supply corresponding to the shut-off valve specifications. Cable 7.03.572 (Tpart 9-pin D-sub/loose end) or 7.03.603 (T-part 9-pin D-sub/DIN43650C) can be used for this operating
option.
D9E
Digital frequency output, measure
Measurement value is translated to a frequency within given frequency range.
The default frequency range to represent 0…100% flow is 0…10000 Hz. Any other frequency range must be
specified on order.
F9B
Digital pulse output, batch counter
Pin 5 is pulled down to 0 Vdc when a given batch size is reached (during a given pulse length).
By default, a pulse is given at each 1x the ‘128Counter Unit’ batch value, with a pulse length of 1 s. For
instance, when the ‘128Counter Unit’ is set to ln, a pulse is given each time 1 ln has passed through the
instrument. An alternative pulse length must be specified on order.
Provide a pull-up resistor of 5...10 kOhm to create 15...24 Vdc at pin 5 according to the hook-up diagram
document 9.16.118.
Example for -F9B- hook-up
H1E
4…20 mA input, external sensor
Sensor input, this function disables the internal sensor.
I3C
Digital input, controller mode valve close
Valve closes when pin 5 is connected to 0 Vdc.
This function switches between the default ‘12Control Mode’ and mode (‘Valve Close’) (value 3). When the
default ‘12Control Mode’ is ‘digital’ the default value is 0 (‘BUS/RS232’ mode), when the default ‘12Control
Mode’ is ‘analog the default value is 1 (‘Analog Input’ mode).
I8C
Digital input, controller mode valve purge
Valve is fully opened when pin 5 is connected to 0 Vdc.
This function switches between the default ‘12Control Mode’ and mode (‘Valve Fully Open’) (value 8). When
the default ‘12Control Mode’ is ‘digital’ the default value is 0 (‘BUS/RS232’ mode), when the default
‘12Control Mode’ is ‘analog' the default value is 1 (‘Analog Input’ mode).
I1R
Digital input, reset counter
The counter resets when pin 5 is connected to 0 Vdc.
Example for -I1R- or -I2R- hook-up
I2R
9.17.084
Digital input, reset alarm
The alarm resets when pin 5 is connected to 0 Vdc.
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4.4.2
Changing default control mode
Instruments are factory-set with the control mode set for either analog or digital setpoint source. See parameter ‘12Control
Mode’ to change the control mode. However after every (power-up) reset the instrument will return to its default control
mode. To change the control mode permanently use the following procedure:
Changing default digital operation to default analog operation:
1. Set parameter ‘7Init Reset’ to 64
2. Read parameter ‘86IOStatus’
3. Add 64 to the read value
4. Write the new value to parameter ‘86IOStatus’
5. Set parameter ‘7Init Reset’ to 82
Changing default analog operation to default digital operation:
1. Set parameter ‘7Init Reset’ to 64
2. Read parameter ‘86IOStatus’
3. Subtract 64 from the read value
4. Write the new value to parameter ‘86IOStatus’
5. Set parameter ‘7Init Reset’ to 82
Note: do not use this procedure if customized IO options -C5S- (digital output, enabled by setpoint), -I3C- (digital input,
controller mode valve close) or - I8C- (digital input, controller mode valve purge) are installed.
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5
Troubleshooting and service
5.1
Diagnostics
When errors or warnings occur, connect the instrument to the Bronkhorst support software to determine the cause of the
error or warning. For any fluidset related errors/warnings, make connection to the FlowTune software for diagnostics. For
other errors/warnings, connect the instrument to FlowPlot and open the 'Alarm & Count' section under 'Instrument
Settings' to determine the cause of the alarm/warning message.
Firmware Version
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[6]
R
-
105
113/5
0xF128…0xF12A/ 61737…61739
Revision number of firmware.
Identification Number
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char
RW
0...255
175
113/12
0x0E2C/3629
Bronkhorst (digital) device/instrument identification number. For EL-FLOW Prestige instruments the following values are
applicable:
· Value 7: DMFC (Digital Mass Flow Controller)
· Value 8: DMFM (Digital Mass Flow Meter)
Device Type
Type
Access
Range
FlowDDE
FLOW-BUS
Modbus
Unsigned char[6]
R
-
90
113/1
0xF108…0xF10A/ 61705…61707
The device type: DMFC or DMFM is stored in this read-only parameter.
5.2
Troubleshooting
In this section a number of possible errors/malfunctions of the instrument are listed.
LED indications
See section 3.7 for interpretation of specific LED indications of the instrument
Factory reset
In case (re)setting of the instrument has led to unexpected or non-recoverable behavior, it is possible to reset the instrument to the settings
applied at the factory during production. Use the 'Restore Settings' tab under 'Instrument Settings' in FlowPlot or use the micro switch on
top of the instrument (section 3.8) to restore the instrument to the original factory settings. Note that any changes made to the instrument
communication settings will not be restored after a factory reset. If digital communication with the instrument can not be re-established,
see section 3.4 to overrule the actual 9-pin sub-D communication settings with the 'Configuration Mode' (using the micro switch) and use
the RS232 communication mode to re-establish communication.
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Troubleshooting list
Symptom
Possible cause
Action
No power (LEDs not burning)
No power supply
Check power supply
Check cable connection
Internal fuse blown due to long lasting
shortage
Return to factory
No setpoint accepted, incorrect control
mode
No setpoint given, setpoint too low
Check analog/digital control mode
(section 4.2.2)
Give setpoint >2%
Valve in 'Safe State' (normally closed
valves)
Remove cause of 'Valve Safe
State' (see section 3.1.2)
Pcb/sensor failure
Laminar flow element blocked/
contaminated
Flow too high, valve fully open
Return to factory
Return to factory
Pcb/sensor failure
Return to factory
Valve in 'Safe State' (normally opened
valves)
Remove cause of 'Valve Safe
State' (see section 3.1.2)
Pressure difference across instrument
insufficient to achieve requested flow
rate
Check inlet/outlet pressure
Valve blocked or damaged
Stoppage
Pressure difference across instrument
insufficient to achieve requested flow
rate
Return to factory
Remove contamination
Check inlet/outlet pressure
Process gas condensation occurs
Decrease pressure or increase gas
temperature
Zero output signal
Maximum output signal (131.07%)
Setpoint cannot be achieved
Flow signal is gradually decreasing
without setpoint change
Oscillating controller output
Non-zero output signal when valve is
closed
Close valve
Controller adjustment wrong, PID
settings too fast
Set '254Controller Speed (Kspeed)' to
lower value
Inlet/outlet pressure too high or too low Adjust pressure/set correct
instrument pressure with FlowTune
Wrong gas selected
Set correct process gas with
FlowTune
Inlet pressure control is oscillating
Replace pressure regulator or
increase buffer volume between
controller instruments (section 2.3)
'Cross-talk' with other controller
Increase buffer volume between
instruments in process line
controller instruments (section 2.3)
Valve is damaged
Valve is leaking (through valve)
Return to factory
Check valve specifications for leaktightness through valve
Non-zero offset signal (occurs at
Auto-zero instrument (section 2.4/
upward/downward placement at higher section 2.9)
pressures)
46
EL-FLOW Prestige
9.17.084
Bronkhorst High-Tech B.V.
5.3
Service
For current information on Bronkhorst® and service addresses please visit our website:
 http://www.bronkhorst.com
Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for
your application. Contact sales by e-mail:
› sales@bronkhorst.com
For after-sales questions, our Customer Service Department is available with help and guidance.
To contact CSD by e-mail:
› support@bronkhorst.com
No matter the time zone, our experts within the Support Group are available to answer your request immediately or ensure
appropriate further action. Our experts can be reached at:
 +31 859 02 18 66
Bronkhorst High-Tech B.V.
Nijverheidsstraat 1A
NL-7261 AK Ruurlo
The Netherlands
9.17.084
EL-FLOW Prestige
47
Bronkhorst High-Tech B.V.
6
Removal and return instructions
Instrument handlings:
· Purge gas lines
· When toxic or dangerous fluids have been used, the customer should pre-clean the instrument
· Remove instrument from line
· The instrument must be at ambient temperature before packaging
· Insert the instrument into a plastic bag and seal the bag
· Place the bag in a appropriate shipping container
Add documentation:
· Reason of return
· Failure symptoms
· Contaminated condition
· Declaration on Contamination form: 9.17.032
When returning material, always describe the problem and if possible the work to be done, in a covering letter.
It is absolutely required to notify the factory if toxic or dangerous fluids have been metered with the instrument!
This to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair department. Take
proper care of packing, if possible use the original packing box.
All instruments must be dispatched with a completely filled in 'declaration on contamination form'. Instruments without this
declaration will not be accepted.
Important:
Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely:
NL801989978B01
If applicable, otherwise contact your distributor for local arrangements.
The declaration on contamination form is available at the Bronkhorst® download site:
http://www.bronkhorst.com/files/support/safety_information_for_returns.pdf
48
EL-FLOW Prestige
9.17.084