ISBN 978-4-86348-408-5
Conference Program
8th International Conference on Reactive Plasmas
and
31st Symposium on Plasma Processing
February 4-7, 2014
Fukuoka International Congress Center, Fukuoka, Japan
Edited by
Masaharu Shiratani and Toshiro Kaneko
Sponsored by
The Japan Society of Applied Physics
Supported by
Plasma Electronics Division, the Japan Society of Applied Physics
Center of Plasma Nano-interface Engineering, Kyushu University, Japan
Plasma Nanotechnology Research Center, Nagoya University, Japan
Plasma Medical Science Global Innovation Center, Nagoya University, Japan
“Grant-in-Aid for Scientific Research on Innovative Areas” Frontier Science of Interactions
between Plasmas and Nano-interfaces
“Grant-in-Aid for Scientific Research on Innovative Areas” Plasma Medical Innovation
― 2 ―
Tutorial 1
"Plasma
Nano
Process"
A
19:20
20:30
18:30
16:00 16:20
16:20
Tutorial 3
"Modeling
and
Simulation"
Break
Tutorial 2
"Atmos
pheric
Pressure
Plasma and
Plasma in
Liquid"
12:00 13:00 Lunch
13:00
9:00
B
C
Registration
A
14:30
Reception
B
4A‐PM‐I3
4A‐PM‐O3
4A‐PM‐O4
4A‐PM‐O5
4A‐PM‐O6
18:10 4A‐PM‐O7
4B‐PM‐I3
4B‐PM‐O2
4B‐PM‐O3
4B‐PM‐I4
4B‐PM‐O4
Chair：
Chair
Prof. Fridman Dr.Ventzek
TEL
Drexel Univ.
Session 7
Break
4B‐PM‐I1
4B‐PM‐I2
4B‐PM‐O1
Chair：
Prof. Toyoda
Nagoya Univ.
Chair：
Prof. Choi
Inha Univ.
4A‐PM‐I1
4A‐PM‐O1
4A‐PM‐O2
4A‐PM‐I2
Session1,14
Session 11
Lunch
C
4C‐PM‐A1
4C‐PM‐A2
4C‐PM‐A3
4C‐PM‐A4
Meijo Univ.
Nanocarbon
Prof. Hiramatsu
Arranged 3
4C‐PM‐I1
4C‐PM‐I2
4C‐PM‐O1
Chair：
Prof. Mariotti
Univ. of Ulster
Session 5
Plenary A
Prof. Masaru Hori / Nagoya Univ.
11:20 12:30
12:30
Poster
4P‐PM‐P
S7: 8
S8: 12
S9: 12
S11: 8
PD: 6
Total：46
10:20
10:00 10:20 Opening
9:00
Tuesday
Feb. 4
Prof.
Prof. Hori
Hatakeyama
&
Prof.
16:10 16:30
Shiratani
16:30
Session 12
Workshop Workshop
Monday
Feb. 3
5B‐PM‐I1
5B‐PM‐O1
5B‐PM‐O2
5B‐PM‐I2
5B‐PM‐O3
5A‐PM‐I1
5A‐PM‐O1
5A‐PM‐O2
5A‐PM‐O3
5A‐PM‐O4
Poster
5P‐PM‐P
S3: 1
S8: 13
S9: 12
S12: 11
PD: 6
Total：43
Chair：
Prof.
Suanpoot
Maejo Univ.
Chair：
Prof.
O'Connell
Univ. of York
Break
5B‐PM‐O4
5B‐PM‐O5
5B‐PM‐O6
5B‐PM‐O7
Chair：
Prof. Ishikawa
Nagoya Univ.
Session 2
Break
Session 2
Lunch
5B‐AM‐O6
5B‐AM‐O7
5B‐AM‐O8
5B‐AM‐O9
5B‐AM‐O10
Chair：Dr.Kim
AIST
Session 8
Session 12
Poster
5P‐AM‐P
S2: 16
S5: 8
S11: 8
S12: 10
PD: 5
Total：47
5B‐AM‐I1
5B‐AM‐O1
5B‐AM‐O2
5B‐AM‐O3
5B‐AM‐O4
5B‐AM‐O5
Break
5A‐AM‐I1
5A‐AM‐I2
5A‐AM‐O1
5A‐AM‐O2
5C‐PM‐I1
5C‐PM‐I2
5C‐PM‐I3
5C‐PM‐O1
5C‐PM‐O2
Chair：
Prof.
Kinoshita
Tohoku Univ.
Session 6
5C‐AM‐I1
5C‐AM‐I2
5C‐AM‐I3
5C‐AM‐O1
Chair:
Chair： Prof.
Dr.Klages TU Murakami
Braunschweig Titech
Chair:
Prof.Gans
Univ. of York
C
Session 3
Session 8
Session 9
Night Session
18:00 20:00
"Safe and Secure World"
17:30 18:00
15:10 15:30
15:30
12:30 13:30
13:30
10:10 10:30
10:30
8:30
Wednesday
Feb. 5
A
B
ICRP‐8/SPP‐31 Program
B
C
Poster
6P‐PM‐P
S4: 9
S9: 12
S13: 5
S14: 9
PD: 30
Total：65
6A‐PM‐I1
6A‐PM‐O1
6A‐PM‐O2
6A‐PM‐O3
6A‐PM‐O4
6A‐PM‐O5
TMU
Prof.
Tochikubo
Chair：
Session1,14
Poster
6P‐AM‐P
S1: 13
S6: 13
S8: 11
S10: 14
PD: 6
Total：57
Banquet
Break
Break
6B‐PM‐I1
6B‐PM‐O1
6B‐PM‐O2
6B‐PM‐O3
6B‐PM‐O4
6B‐PM‐O5
Chair：
Arranged 2
6C‐PM‐A1
6C‐PM‐A2
6C‐PM‐A3
6C‐PM‐A4
7A‐AM‐I1
7A‐AM‐I2
7A‐AM‐O1
7A‐AM‐O2
7A‐AM‐O3
12:10 12:30
17:50
IST
7C‐AM‐I1
7C‐AM‐I2
7C‐AM‐I3
7C‐AM‐O1
7B‐AM‐O2
7B‐AM‐O3
7B‐AM‐O4
7B‐AM‐O5
7B‐AM‐O6
TI
KJ Workshop
Solar Cells
Symposium
7C‐AM‐I4
7C‐AM‐O2
7C‐AM‐I5
7C‐AM‐O3
7C‐AM‐O4
Ruhr Univ.
Session 2
Chair： Prof.
Dr. Colombo Czarnetzki
Chair：
Closing
Award ceremony
7A‐AM‐A1
7A‐AM‐A2
7A‐AM‐A3
7A‐AM‐A4
IPP
Dr.Lukes
Chair：
Plasma in Liquid
Session 8
Break
7B‐AM‐I1
7B‐AM‐I2
7B‐AM‐I3
7B‐AM‐O1
Chair：
Chair：
Kyushu Univ.
C
Session 4
Kyoto Univ.
B
Session 13
Prof. Tomita Prof.Guerra
A
Session 9
Chair：
Prof.Sakai
10:10 10:30
Arranged 1
10:30
8:30
Plasma
13:00
Agriculture
Prof. Ogino
Chair：Prof. Ito
Shizuoka Univ.
Meijo Univ.
Session10
Lunch
Break
Plenary B
Prof. Mark Kushner / Univ. of Michigan
A
Friday
Feb. 7
*RoomA / 409.410, RoomB / 411.412, RoomC / 413.414
*Plenary talk at 3rd Floor, Exhibition & Poster session at 2nd Floor
*Invited Talk 25min = 20min talk + 5min Q&A, General Talk 15min = 10min talk + 5min Q&A
18:00 20:00
17:30 18:00
15:10 15:30
15:30
12:30 13:30
13:30
10:00 10:30
10:30
9:00
Thursday
Feb. 6
Contents
Contents 3
Preface 4
Committees 5
Venue Layout 6
Map & Access 7
Cooperative Societies 9
Acknowledgment 10
Session List 11
Exhibition 11
List of Exhibitors 11
Program 12
Author Index 54
― 3 ―
Preface
The 8th International Conference on Reactive Plasmas (ICRP) and the 31st Symposium on Plasma Processing
(SPP), and satellite workshops are held in Fukuoka, Japan between 3 and 8 February 2014. ICRP and SPP are
Japanese triennial and annual meetings covering the entire field of reactive plasmas: generation, diagnostics
and modeling of plasmas and their interaction with surfaces, and their applications. This ICRP-8/SPP-31
conference was organized under the sponsorship of the Japan Society of Applied Physics (JSAP).
The scientific scope of this conference is focused on both experimental and theoretical aspects of physics of
ionized gases and on its industrial applications. It covered the following topics:
1. Production and Control of Reactive Plasmas
2. Plasma Diagnostics and Monitoring
3. Transport Phenomenon and Atomic/Molecular Processes
4. Modeling and Simulation
5. Particle Production and Behavior
6. Plasma-Solid Interaction and Surface Modification
7.Etching
8.Deposition
9. Micro/Atmospheric-Pressure Plasmas and Plasmas in Liquids
10. Applications for Nano-Technologies
11. Applications for Green Technologies
12. Applications for Life Sciences
13. New Trends of Reactive Plasmas / Emerging Technologies
14. Special Session on Interactions between Plasmas and Nanointerfaces
The ICRP-8/SPP-31 conference is attended more than 600 scientists from 20 countries. 2 plenary, 45 invited
talks, and 84 oral talks are presented. The 258 contributed papers are presented in 5 poster sessions.
Three tutorials are provided on “Plasma nano-processes”, “Atmospheric pressure plasma and plasma in
liquids”, and “Modelling and simulation”. Beside this, four workshops were held on “Plasma applications
in nanocarbon materials and devices”, “Control of fluctuation of plasma processes”, “Advanced plasma
processing and diagnostics”, and “Solar cells”. The abstracts of all oral and poster contributions are published
in the proceedings of the conference. Some of the papers will be published in the special issue of Japanese
Journal of Applied Physics.
I would like to thank the committee members of ICRP-8, especially the members of the Local Organizing
Committee for their indispensable contributions for the success of this conference. Thanks are also due to the
sponsors of the conference, particularly JSAP.
Masaharu Shiratani
Chairman
Organizing Committee of ICRP-8/SPP-31
― 4 ―
Committees
Organizing committee
Executive Committee
Chair
Masaharu Shiratani
Chair
Hirotaka Toyoda
Vice-Chair
Kazuo Terashiima
Secretary
Kazunori Koga
Vice-Chair
Amy Wendt
Members
Vice-Chair
Uwe Czarnetzki
Vice-Chair
Wonho Choe
Secretary
Kazunori Koga
Members
Yuichi Setsuhara
Tatsuru Shirafuji
Takayuki Watanabe
Pascal Chabert
Jenq-Gong Duh
Tony Murphy
Michael G. Kong
Pietro Favia
Satomi Tajima
Naho Itagaki
Giichiro Uchida
Kungen Teii
Kentaro Tomita
Haruhiko Himura
Kazuo Shimizu
Hiroki Kondo
International Adviser / Advisory Committee
Program Committee
Chair
Toshiro Kaneko
Vice-Chair
Mineo Hiramatsu
Members
Kenji Ishikawa
Hajime Sakakita
Katsuhisa Kitano
Yasunori Tanaka
Koji Eriguchi
Masaru Izawa
Jae Koo Lee
Hubertus Thomas
Yi-Kang Pu
JinHyo Boo
Publishing Committee
Chair
Koichi Sasaki
Vice-Chair
Keizo Kinoshita
Members
Seiichiro Higashi
Tatsuo Ishijima
Tsuyohito Ito
Toshiki Nakano
Masafumi Ito
Takehiko Sato
Osamu Sakai
Ed Barnat
Richard Engeln
Junghoon Joo
― 5 ―
Vice-Chair
Masaaki Nagatsu
Members
Masafumi Jinno
Masaru Hori
Koichi Ono
Hiroshi Fujiyama
Michio Kondo
Seiji Samukawa
Seiichi Miyazaki
Tanemasa Asano
Biswa Ganguly
Bill Graham
JeonGeon Han
Riccardo d’Agostino
Richard van de Sanden
Alexander Fridman
Venue Layout
1F Registration
3F Main Hall
2F Exhibition & Poster
4F Room A, B, C
― 6 ―
Map & Access
博多駅周辺
Bus Timetable to Venue
Hakata Station Center Building E ⇒ Kokusai Center Sunpalace-mae
博多駅センタービル前 E ⇒ 国際センターサンパレス前 方面
No
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
88
04 10 23 38 42 51 51 57
04 07 09 15 21 21 26 37 50 51
01 05 08 16 26 31 36 46
00 01 08 16 23 31 46 50
01 16 25 31 46
01 20 21 41 48
01 13 21 40 41
01 09 21 33 41 58
01 16 17 31 33 46 52
01 13 16 28 31 46 52 56
00 08 17 18 29 29 38 41 45 51
01 02 03 18 18 20 38 43 56
02 03 19 26 27 44 50
14 30
99
16 44 52
06 14 24 30 37 47 58
04 13 25 27 37 57
08 15 27 42 51
02 12 27 42 57
13 22 35 50
06 22 32 40 57
12 22 30 37 52
02 17 32 40 47 55
02 12 22 31 42 54
02 19 28 38 54
04 12 27 35 45 53
02 18 27 34 51
04 23 30 55
13 31 40 51
01 29
9
1
天神駅周辺
Tenjin Soralia Stage Mae 2A ⇒ Kokusai Kaigijo Sunpalace-mae
天神ソラリアステージ前 2A ⇒ 国際会議場サンパレス前 方面
No
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
― 7 ―
80
12 29 39
07 14 25 33 48 52 56 58
08 15 15 18 20 28 35 40 42 50 59
00 06 19 36 44 48
05 16 19 32 46 49 57
04 07 19 39 47 58
04 17 29 54 57
14 15 29 47 54
04 19 27 39 59
07 19 26 37 39 47
04 09 13 30 44 45 53
01 19 25 31 54
04 21 41 44
00 20 50
30
19
Bus Timetable to Hakata, Tenjin
Kokusai Kaigijo Sunpalace Mae (Weekday) ⇒ Hakata Station
国際会議場サンパレス前（平日）⇒ 博多駅地区 方面
No
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
11
47
02 24 34 44 54 59
04 14 24 34 49
04 19 34 49
04 19 32 49
04 19 39 59
19 39 59
19 39 59
19 39 54
09 24 39 53
08 24 36 48 58
06 14 24 36 51
05 21 36
21 41
14
19
19
50
55
31
41
11 31 54
17
01 19
4
24
16 53
14 31 56
14 56
31
56
39
44
44
34
27 55
42
12
17 54
11
41
04 49
17 44
02 19 44
1
80
12 45
10 55
40
02 25 45
06 26 46
6
14 54
12
7
Kokusai Kaigijo Sunpalace Mae (Weekday) ⇒ Tenjin
国際会議場サンパレス前（平日 ）⇒ 天神地区 方面
No
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
55
12 27 42 52
1 16 31 46
11 36 56
11 26 41
01 26 51
21 41 56
09 36
01 21 46
6 26
00 15 30 45
35
03 25 53
80
56
39
44
44
34
152
151
47
01 57
40
09 29
09 49
10 50
10 36
04 24 59
39
19 59
09 49
19 59
12 45
10 55
12
49
27
09 47
35
14 54
42
39
5
02 18
11
31
22
7
Fukuoka International Congress Center (Fukuoka Kokusai Kaigijyo)
2-1 Sekijo-machi, Hakata-ku, Fukuoka City, Japan
― 8 ―
Cooperative Societies
■
The Ceramic Society of Japan
http://www.ceramic.or.jp/
■
The Chemical Society of Japan
http://www.chemistry.or.jp/index-e.html
■
The Fullerenes, Nanotubes and Graphene Research Society
http://www.fullerene-jp.org/en/main21_news.html
■
The Japan Society of Plasma Science and Nuclear Fusion Research
http://www.jspf.or.jp/index.html.en
■
The Physical Society of Japan
http://www.jps.or.jp/
■
The Society of Chemical Engineers, Japan
http://www.scej.org/index_E.htm
■
The Society of Polymer Science, Japan
http://www.spsj.or.jp/english-index.htm
■
The Surface Society of Japan
http://www.sssj.org/eng/
■
The Illuminating Engineering Institute of Japan
http://www.ieij.or.jp/english/
■
The Institute of Electrostatics Japan
http://www.iesj.org/
■
The Japan Institute of Metals and Materials
http://jim.or.jp/e/index-e.shtml
■
The Japan Society for Aeronautical and Space Sciences
http://www.jsass.or.jp/webe/
■
Japan Ozone Association
http://www.j-ozone.org/ (Japanese Only)
■
Society of Biomechanisms, Japan
http://www.sugano.mech.waseda.ac.jp/biomech/ (Japanese Only)
― 9 ―
Acknowledgment
The Organizing Committee of ICRP-8/SPP-31 greatly acknowledges the financial support provide by
the following organizations.
Impedans Ltd.
JEOL Ltd.
Cosmotec Co., Ltd.
Thamway Co., Ltd. / Arise Technology Co., Ltd.
Kyokuto Boeki Kaisha, Ltd.
Astech Co., Ltd.
Brux Japan Co., Ltd.
EMD Co., Ltd.
NU System Incorporated
Keisoku Engineering System Co., Ltd.
Ocean Photonics Co., Ltd.
Thermo Riko Co., Ltd.
Ushio Inc.
Hitachi High-Technologies Corporation
Kyushu Keisokki Co., Ltd.
Sigma Koki Co., Ltd.
Goodfellow Cambridge Limited
Publication Office
Chair: Prof. Masaharu Shiratani
Secretary: Prof. Kazunori Koga
Address: Graduate School of Information Science and Electrical Engineering
Center of Plasma Nano-Interface Engineering
Kyushu University
744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Tel&Fax:+81-92-802-3723
E-mail:icrp-8@plasma.ed.kyushu-u.ac.jp
― 10 ―
Session List
1. Production and Control of Reactive Plasmas
2. Plasma Diagnostics and Monitoring
3. Transport Phenomenon and Atomic/Molecular Processes
4. Modeling and Simulation
5. Particle Production and Behavior
6. Plasma-Solid Interaction and Surface Modification
7. Etching
8. Deposition
9. Micro/Atmospheric-Pressure Plasmas and Plasmas in Liquids
10. Applications for Nano-Technologies
11. Applications for Green Technologies
12. Applications for Life Sciences
13. New Trends of Reactive Plasmas / Emerging Technologies
14. Special Session on Interactions between Plasmas and Nanointerfaces
Exhibition
Venue: 2nd Floor Multi-Purpose Hall
Hours: Feb.4 12:00-18:00
Feb.5-6 10:00-18:00
Free Coffee and Wi-Fi service
The exhibit is open to everyone. Visit the exhibition showcasing latest products and technical solutions.
List of Exhibitors
Impedans Ltd.
Cosmotec Co., Ltd.
Thamway Co., Ltd. / Arise Technology Co., Ltd.
Kyokuto Boeki Kaisha, Ltd.
Astech Co., Ltd.
Brux Japan Co., Ltd.
EMD Co., Ltd.
NU System Incorporated
Keisoku Engineering System Co., Ltd.
JEOL Ltd.
― 11 ―
8th International Conference on Reactive Plasmas /
31st Symposium on Plasma Processing
Program
Monday, February 3, 2014
Room A Tutorial 1 Plasma Nano Process (9:00–12:00)
Chair: Prof. Eriguchi (Kyoto Univ.)
Seiji Samukawa (Tohoku University)
Demetre J. Economou (University of Houston)
Tutorial 2 Atmospheric Pressure Plasma and Plasma in Liquid (13:00–16:00)
Chair: Prof. Hayashi (Kyushu Univ.)
Alexander Fridman (Drexel University)
Osamu Takai (Kanto Gakuin University)
Tutorial 3 Modeling and Simulation (16:20–19:20)
Chair: Prof. Tanaka (Kanazawa Univ.)
Kei Ikeda (Athenasys Co., Ltd.)
Lizhu Tong (Keisoku Engineering System Co., Ltd.)
Room B Workshop (13:00–19:20)
[3B-WS-01]
Prof. Hori & Prof. Shiratani
Characteristics of discharge microplasmas generated in highly fluctuating fluids and their application to
the synthesis of molecular diamond
Sven Stauss, Kazuo Terashima
(The University of Tokyo)
[3B-WS-02]
“Nano-Interface” and “Fluctuation” in material processing using plasma in liquid
Tatsuru Shirafuji
(Osaka City University)
[3B-WS-03]
Plasma-liquid interaction of atmospheric DC glow discharge using liquid electrode for synthesis of
metal nanoparticles
Naoki Shirai, Yudai Shimokawa, Satoshi Uchida, Fumiyoshi Tochikubo
(Tokyo Metropolitan University)
[3B-WS-04]
Control of cellular activities by oxygen radical treatment
Takayuki Ohta, Hiroshi Hashizume, Keigo Takeda, Kenji Ishikawa, Masaru Hori, Masafumi Ito
(Meijo University)
The Conference Proceedings will be distributed on a USB drive to each conference participant and archived on the web.
― 12 ―
[3B-WS-05]
Plasma-liquid interactions: from nano-colloids to bacteria-containing aerosols
Davide Mariotti, Jenish Patel, Charles Mahony, David Rutherford, Declan Diver, Hugh Potts, Euan Bennet,
David McDowell, Paul Maguire
(University of Ulster, UK)
[3B-WS-06]
Discharge Characteristics of Plasma Jet Operated in Gas-Mixture System for Plasma
Biomedicine
Giichiro Uchida, Kosuke Takenaka, Atsushi Miyazaki, Kazufumi Kawabata, Yuichi Setsuhara
(Osaka University)
[3B-WS-07]
Electron spin resonance analyses of plasma-biological material interactions in atmospheric
pressure plasmas
Kenji Ishikawa, Hiroshi Hashizume, Takayuki Ohta, Masafumi Ito, Hiromasa Tanaka, Keigo Takeda,
Satomi Tajima, Hiroki Kondo, Makoto Sekine, Masaru Hori
(Nagoya University)
[3B-WS-08]
Diagnostics of activated species generated by AC excited non-equilibrium atmospheric pressure
Ar plasma jet for plasma medical and bio applications
Keigo Takeda, Kenji Ishikawa, Hiromasa Tanaka, Hiroyuki Kano, Makoto Sekine, Masaru Hori
(Nagoya University)
[3B-WS-09]
Dispersion and waves in bounded plasmas with subwavelength inhomogeneities: focused ion
beams for plasma nanotechnology
Sudeep Bhattacharjee1
(1Indian Institute of Technology - Kanpur)
[3B-WS-10]
Analysis of DNA damage and cellular responses induced by atmospheric pressure plasma jet
exposure
Hirofumi Kurita, Kaori Sano, Mika Shimizu, Tomoko Nakajima, Hachiro Yasuda, Kazunori Takashima,
Akira Mizuno
(Toyohashi University of Technology)
[3B-WS-11]
High efficiency and low damage plasma gene transfection using micro-capillary electrode
Jinno Masafumi, Hideki Motomura, Susumu Satoh, Yugo Kido, Kunihide Tachibana
(Ehime University)
[3B-WS-12]
Minimization of contact surface to prevent blood platelet activation
Miran Mozetic
(Jozef Stefan institute, Slovenia)
[3B-WS-13]
Toxicity of indium compounds in laboratory animals
Akiyo Tanaka, Miyuki Hirata, Yutaka Kiyohara
(Kyushu University)
[3B-WS-14]
Coupling between radicals and nanoparticles in initial growth phase in reactive plasmas with
amplitude modulation
Kazunori Koga, Yasuhiko Morita1, Kunihiro Kamataki1, Daisuke Yamashita1, Naho Itagaki1,
Giichiro Uchida2, Masaharu Shiratani1
(1Kyushu University, 2Osaka University)
[3B-WS-15]
Fluctuation and Nanotechology
Masaharu Shiratani
(Kyushu University)
― 13 ―
Room C Workshop (13:00–18:30)
[3C-WS-01]
Prof. Hatakeyama
Overview of the nanocarbon network
Rikizo Hatakeyama
(Tohoku University)
[3C-WS-02]
Carbon nanotubes and graphene in industrial applications
Young Hee Lee, Duong Dinh Loc1, Si Young Lee1, Sang Hoon Chae
(Sungkyunkwan University)
[3C-WS-03]
Plasma-enabled nano-carbons for sustainable future applications
Kostya Ostrikov
(CSIRO Materials Science & Engi.)
[3C-WS-04]
Electron-transfer devices using lithium ion encapsulated fullerene
Kei Ohkubo
(Osaka University)
[3C-WS-05]
High-mobility and low-strain graphene grown by room-temperature plasma-enhanced chemical
vapor deposition
Chih-I Wu1, Wei-Hsiang Lin1,2, Jieh-I Taur1, Nai-Chan Yeh2
(1National Taiwan University, 2California Institute of Technology)
[3C-WS-06]
Synthesis of carbon nanohorns using gas-injected arc-in-water method for energy applications
Noriaki Sano, Chantamanee Poonjarernsilp, Daisuke Hirama, Kosuke Taniguchi, Hajime Tamon
(Kyoto University)
[3C-WS-07]
Carbon nanowalls: plasma synthesis and applications
Mineo Hiramatsu1, Hiroki Kondo2, Masaru Hori2
(1Meijo University, 2Nagoya University)
[3C-WS-08]
Plasma deposition and applications of nanodiamond films
Kungen Teii
(Kyushu University)
Restaurant “RACONTER” (1F) Reception
(18:30–20:30)
― 14 ―
Tuesday, February 4, 2014
Registration (9:00–10:00)
Main Hall (3F) Opening (10:00–10:20)
Plenary A (10:20–11:20)
[Prenary A]
Chair: Prof. Shiratani (Kyushu Univ.)
Radical-controlled plasma processing towards global innovations
Masaru Hori
(Nagoya University)
Multi-Purpose Hall (2F) Poster
(12:30–14:30)
[4P-PM-S07-P01] A study on evaluation of the damage induced by plasma processes using XPS
Kazuaki Kurihara1, Msahiko Yoshiki1, Yasushi Nakasaki1
(1Corporate R&D Center, Toshiba Corp.)
[4P-PM-S07-P02] Silicon etching characteristics of Br+ and SiBrx+
Kazuhiro Karahashi1, Yu Muraki1, Hu Li1, Tomoko Ito1, Masaaki Matsukuma2, Satoshi Hamagichi1
(1Osaka University, 2Tokyo Electron Ltd.)
[4P-PM-S07-P03]SiO2 etching characteristics of pulse-time modulation with increasing source frequency in
dual-frequency capacitive coupled plasma
Hoe Jun Kim1, Min Hwan Jeon2, Geun Young Yeom1,2
(1Department of Materials Science and Engineering, Sungkyunkwan University, 2SKKU Advanced
Institute of Nano Technology (SAINT), Sungkyunkwan University)
[4P-PM-S07-P04] Etching characteristics of organic polymers in inductively coupled fluorocarbon plasmas
Shunsuke Matsue1, Kazuo Takahashi1
(1Kyoto Institute of Technology)
[4P-PM-S07-P05] Observation of instantaneously generated many flaked particles in mass production plasma
etching equipment
Yuji Kasashima1, Taisei Motomura1, Natsuko Nabeoka1, Fumihiko Uesugi1
(1National Institute of Advanced Industrial Science and Technology (AIST))
[4P-PM-S07-P06] Development of the the technology to control the spatial distribution of plasma using double
ICP coil
Toshiyuki Sakuishi1,2, Takahide Murayama1,2, Yasuhiro Morikawa1,2, Koukou Suu1,2
(1NMEMS, 2ULVAC.,Inc)
[4P-PM-S07-P07] Hybrid etching technologies for TSV and SiO2 in 300mm TSV
Takahide Murayama1,2, Toshiyuki Sakuishi1,2, Yasuhiro Morikawa1,2, Koukou Suu1,2
(1NMEMS Technology Research Organization, 2ULVAC Inc., Institute of Semiconductor and
Electronics Technologies)
― 15 ―
[4P-PM-S07-P08] Numerically controlled sacrificial oxidation using atmospheric-pressure plasma to improve
SOI layer uniformity
Hiroyasu Takei1, Satoshi Kurio1, Yasuhisa Sano1, Satoshi Matsuyama1, Kazuto Yamauchi2
(1Department of Precision Science and Technology, Graduate School of Engineering, Osaka
University,, 2Research Center for Ultra-Precision Science and Technology, Graduate School of
Engineering, Osaka University)
[4P-PM-S08-P09] Development of magnet-free uniform sputtering system by RF and microwave power
superposition
Toshiya Hagihara1, Tomoniri Noda1, Hirotaka Toyoda1,2
(1Nagoya University, 2Plasma Nanotechnology Center)
[4P-PM-S08-P10] Epitaxial growth of ZnO films on sapphire substrates by magnetron sputtering: Effects of
buffer layers prepared via nitrogen mediated crystallization
Tomoaki Ide1, Koichi Matsushima1, Ryota Shimizu1, Daisuke Yamashita1, Hyunwoong Seo1,
Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1
(1Kyushu University)
[4P-PM-S08-P11] Plasma enhanced atomic layer deposition of HfO2 on graphene
Takeshi Kitajima1, Toshiki Nakano1
(1National Defense Academy of Japan)
[4P-PM-S08-P12] Growth of highly-conformal and amorphous WSiN films by plasma-enhanced atomic layer
deposition and application to diffusion barrier for Cu metallization
Jaehoon Jung1, Taek Mo Jung2, Chang Gyun Kim2, So Jeong Yeo2, Taehoon Cheon1,3,
Sang-Kyung Choi4, Soo-Hyun Kim1
(1Yeungnam University, 2Korea Research Institute of Chemical Technology, 3Deagu Gyeonbuk institute
of Science & Technology, 4Chungnam National University)
[4P-PM-S08-P13] Charateristics of WO3-x thin films prepared by reactive sputtering with input power
Min Hong Kim1, Hyung Wook Choi1, Sang Joon Park2, Kyung Hwan Kim1
(1Department of Electrical Engineering, Gachon University, 2Department of chemical engineering,
Gachon University)
[4P-PM-S08-P14] Effects of residual stress on the ionic conductivity of yttria stabilized zirconia nano-films
J.S. Cherng1,2, T.H. Yeh1, R.D. Lin2
(1Center for Thin Film Technologies and Applications, Ming Chi University of Technology,
2
Department of Materials Engineering, Ming Chi University of Technology)
[4P-PM-S08-P15] Thickness dependence of Cu2O thin film prepared by RF magnetron sputtering
Gye Cheol Lee1, Hyung Wook Choi 1, Hyon Hee Yoon2, Kyung Hwan Kim1
(1Department of Electical Engineering, Gachon University, 2Department of Chemical Engineering,
Gachon University)
[4P-PM-S08-P16] A study on chemical and mechanical properties of NiCr alloys on polyimide substrates
Jong Hyun Seo1, Hong Sik Kim1, In-sun Park2, Joong-kyu Ahn3
(1Korea Aerospace University, 2Deaduck electronics, 3LSMTRON)
[4P-PM-S08-P17] Leakage current behaviors of Al/ZrO2/Al and Al/YSZ/Al devices
J.S. Cherng1,2, T.H. Yeh1, R.D. Lin2, B.R. Cherng2
(1Center for Thin Film Technologies and Applications, Ming Chi University of Technology,
2
Department of Materials Engineering, Ming Chi University of Technology)
― 16 ―
[4P-PM-S08-P18] Characteristics of AZO thin film using RF and ICP power at facing magnetron sputtering
system
HyeRan Kim1, Jay Bum Kim1, Yoon Seok Choi1, Jeon Geon Han1
(1NU-SKKU Joint Institute Plasma-Nano Materials, Sungkyunkwan University)
[4P-PM-S08-P19] Preparation of GAZO transparent conductive thin film for top-emission OLED by low
voltage sputtering
Jinseon Lee1, Yu sup Jung1, Yong Seo Park1, Kyung Hwan Kim1
(1Gachon University)
[4P-PM-S08-P20] Synthesis of hydrogen-doped zinc oxide transparent conductive film by RF magnetron
sputtering
Ikki Takahashi1, Yasuaki Hayashi1
(1Kyoto Institute of Technology)
[4P-PM-S09-P21] Parallelization and discharge timing control of microgap barrier discharge at atmospheric
pressure
Yuki Kubota1, Takuya Kameyama1, Shizuka Tada1, Kazunobu Fujiwara1, Seiji Mukaigawa1,
Koichi Takaki1
(1Iwate University)
[4P-PM-S09-P22] Characteristics of pulsed discharge plasma processing on water surface for radical generation
Ruma1, K. Yoshihara1, H. Nagaoka1, S.H.R. Hosseini1, T. Sakugawa1, H. Akiyama1
(1Kumamoto University, Japan)
[4P-PM-S09-P23] Spectroscopic measurements of radiofrequency plasmas in NaCl solution within ceramic
tube on insulating plate
Ayaka Rachel Tanaka1, Kohken Hayashi1, Shinobu Mukasa1, Hiromichi Toyota1, Shinfuku Nomura1,
Ayato Kawashima2, Tsunehiro Maehara1
(1Graduate School of Science and Engineering, Ehime University, 2Faculty of Agriculture, Ehime
University)
[4P-PM-S09-P24] Simulation of self-organization in DBD micro plasma and control of hexagonal pattern
structure by pressure change
Kazunobu Fujiwara1, Koichi Takaki1, Seiji Mukaigawa1, Yuki Kubota1, Sizuka Tada1,
Takuya Kameyama1
(1Iwate University)
[4P-PM-S09-P25] Visualization of oxidizing substances generated by atmospheric pressure non-thermal plasma
jet with water
Toshiyuki Kawasaki1, Kota Kawano1, Hiroshi Mizoguchi1, Yuto Yano1, Keisuke Yamashita1,
Miho Sakai1, Giichiro Uchida2, Kazunori Koga3, Masaharu Shiratani3
(1Nippon Bunri University, 2Osaka University, 3Kyushu University)
[4P-PM-S09-P26] Reaction-diffusion simulation of ROS/RNS in liquid exposed to an atmospheric-pressure
plasma
Kazumasa Ikuse1, Tatsuya Kanazawa1, Satoshi Hamaguchi1
(1Center for Atomic and Molecular Technologies, Oaka University)
[4P-PM-S09-P27] Behaviors on liquid surface by atmospheric pressure plasma discharge with high-frequency
power supply
Kotaro Iwasaki1, Takashi Kikuchi1, Kohei Yamagami1, Kenta Hamatani1, Ariyuki Kato1, Toru Sasaki1,
Tsukasa Aso1, Kazumasa Takahashi1, Nob. Harada1
(1Nagaoka University of Technology)
― 17 ―
[4P-PM-S09-P28] Basic study on EHD flow induced by pulsed power microplasma
Yoshinori Mizuno1, Marius Blajan2, Kazuo Shimizu2
(1Graduate school of Engineering, Shizuoka University, 2Organization for Innovation and Social
Collaboration, Shizuoka University)
[4P-PM-S09-P29] Surface treatment of dye-sensitized solar cells by atmospheric pressure plasma
Shogo Kaneta1, Marius Blajan2, Kenta Ogi1, Akinori Konno3, Kazuo Shimizu2
(1Graduate School of Engineering, Shizuoka University, 2Organization for Innovation and Social
Collaboration, Shizuoka University, 3Graduate School of Science and Technology, Shizuoka
University)
[4P-PM-S09-P30] Chemical reaction in liquid induced by atmospheric DC glow discharge with liquid electrode
Yudai Shimokawa1, Naoki Shirai1, Satoshi Uchida1, Fumiyoshi Tochikubo1
(1Tokyo Metropolitan University)
[4P-PM-S09-P31] Water treatment using discharge generated in cavitation field with micro bubble cloud
Satoshi Ihara1, Hironori Itoh1, Yasuyuki Takatsuki1, Hiroaki Terato2
(1Saga University)
[4P-PM-S09-P32] Characteristics of electrical discharges between orifice and needle electrodes in micro-gas jet
injected into vacuum
Yosuke Mori1, Khanit Matra1, Jun-Seok Oh1, Akimitsu Hatta1,2
(1Kochi University of Technology, 2Institute of Nanotechnology)
[4P-PM-S11-P33] Visible-light photocatalytic activity of TiO2-x prepared with Ar/H2 plasma surface treatment
Takuma Nakano1, Shota Yazawa2, Shota Araki1, Sumio Kogoshi1, Noboru Katayama1, Yusuke Kudo2,
Tetsuya Nakanishi2
(1Tokyo University of Science, 2Nihon University)
[4P-PM-S11-P34] Control of optical bandgap in doped bismuth titanates for novel optoelectric device
Jun Young Han1, Chung Wung Bark1
(1Gachon University of Electrical Engineering)
[4P-PM-S11-P35] Electron emission characteristics of photon enhanced thermionic energy converter for lowtemperature operation
Akihisa Ogino1, Takahito Setsuda1
(1Shizuoka University)
[4P-PM-S11-P36] Quantum characterization and photovoltaic application of Si nano-particles fabricated by
multi-hollow plasma discharge chemical vapor deposition
Hyunwoong Seo1, Daiki Ichida1, Giichiro Uchida2, Naho Itagaki1, Kazunori Koga, Masaharu Shiratani1
(1Kyushu University, 2Osaka University)
[4P-PM-S11-P37] An energy-saving UV lamp without mercury for photo-curing hard-coat by applying a ployphase ac discharge/plasma in a magnetic field
Kazunori Matsumoto1, Seiji Oda1, Shigeharu Eikoshi1, Hidefumi Uchiyama2, Koji Shimizu2,
Nobuyuki Nojima2, Masahide Kato 3, Katsutoshi Katsutoshi 3
(1Toyama Prefectural University, 2Tateyama Machine Co., LTD., 3Techno Quartz Inc.)
[4P-PM-S11-P38] The potential use of ZrO2-nanoparticles for non-thermal plasma-catalytic decomposition of
volatile organic compounds
Mani Sanjeeva Gandhi1, Young Sun Mok1
(1Jeju National University)
― 18 ―
[4P-PM-S11-P39] Effect of electrode temperature in dielectric barrier discharge type ozonizer driven by pulsed
discharge
Fumiaki Fukawa1, Yuuya Satoh1, Susumu Suzuki1, Haruo Itoh1
(1Chiba Institute of Technology)
[4P-PM-S11-P40] Properties of femtosecond laser ablation plasma for organic thin film spin coated on grass
substrate
Shusuke Ono1, Norio Tsuda1, Jun Yamada1, Shizuyasu Ochiai1
(1Aichi Institute of Technology)
[4P-PM-SPD-P01] Effect of applying negative DC cathode bias in RF magnetron sputtering
Kohei Osuga1, Toshinori Yamada, Haruo Shindo1, Masao Isomura1
(1Tokai University)
[4P-PM-SPD-P02] Iodine doped pulsed DC plasma polymerized aniline nanostructures with tunable
morphology
Tapan Barman1, Arup_R Pal1
(1Institute of Advanced Study in Science and Technology)
[4P-PM-SPD-P03] Advanced phase modulation technology for Gen5-Size VHF plasma generation and its
application to thin film silicon solar cells
Tsukasa Yamane1, Sachiko Nakao1, Kenji Tagashira1, Takuro Masuda1, Eiichiro Otsubo1,
Yoshiaki Takeuchi1
(1Mitsubishi Heavy Industries, LTD.)
[4P-PM-SPD-P04] Effect of Spiral Microwave Antenna Configuration on the Production of Nano-crystalline
Film by Chemical Sputtering in ECR Plasma
Camille Faith P. Romero1, Motoi Wada1
(1Doshisha University)
[4P-PM-SPD-P05] Effect of spiral microwave antenna configuration on the production of nano-crystalline film
by chemical sputtering in ECR plasma
Hiroki Kondo1, Lingyun Jia1, Da Xu1, Masayuki Nakamura1, Kenji Ishikawa1, Makoto Sekine1,
Masaru Hori1
(1Nagoya University)
[4P-PM-SPD-P06] Discharge Characteristics of Dielectric Barrier Discharges
Generated by Silicon Diode for Alternating Current(SIDAC)
Yoshihiko Uesugi1, Yusuke Heira1, Yasunori Tanaka1, Tatsuo Ishijima1
(1Kanazawa University)
Room A Session 11
[4A-PM-I1]
Invited
[4A-PM-O1]
(14:30–15:50)
Chair: Prof. Choi (Inha Univ.)
Non-thermal plasma catalysis of methane: new approach to gas-to-liquid (GTL)
Tomohiro Nozaki1
(1Tokyo Institute of Technology)
A diagnostic study of the plasma assisted dissociation of CO2 in a dielectric barrier discharge
Richard Engeln1, Florian Brehmer1,2, Stefan Welzel3, Richard van de Sanden3
(1Eindhoven University of Technology, The Netherlands, 2AFS GmbH, Germany,
― 19 ―
3
Dutch Institute for Fundamental Energy Research, The Netherlands)
[4A-PM-O2]
Development of Environmentally-friendly photoresist removal process using microwave-excited
plasma in pure water
Tatsuo Ishijima1, Kohei Nosaka1, Yosuke Goto2, Hideo Horibe3, Yasunori Tanaka1, Yoshihiko Uesugi1
(1Kanazawa University, 2Kanazawa Institute of Technology, 3Osaka City University)
[4A-PM-I2]
Invited
Photovoltaic applications of band gap and surface engineered silicon-tin nanocrystals by
spatially confined plasma
Vladimir Svrcek1
(1National Institute of Advanced Industrial Science and Technology (AIST))
Session 12
[4A-PM-I3]
Invited
(16:30–18:10)
Chair: Prof. Fridman (Drexel Univ.)
Characteristics of biocompatible nonthermal atmospheric pressure plasma and its interactions
with biomaterials and biological cells in the biological fluids
Eun Ha Choi1, Young June Hong1, Yong Hee Kim1, Ku Yeon Baik1, Gyungsoon Park1, Pankaj Attri1,
Geon Jun Lee1, Nagendra Kaushik1, Gi Chung Kwon1, Byoung_C. Park1, Jin Joo Choi1, Guangsup Cho1,
Hansup Uhm1
(1Kwangwoon University)
[4A-PM-O3]
Strong bactericidal activity of the plasma treated water for medical application based on the
reduced pH method
Katsuhisa Kitano1,4, Satoshi Ikawa2, Atsushi Tani3, Yoichi Nakashima2, Tomoko Ohshima1,4
(1Graduate School of Engineering, Osaka University, Suita, Osaka, Japan, 2Technology Research Institute
of Osaka Prefecture, Izumi, Osaka, Japan, 3Graduate School of Science, Osaka University, Toyonaka,
Osaka, Japan, 4School of Dental Medicine, Tsurumi University, Yokohama, Kanagawa, Japan)
[4A-PM-O4]
Detection of reactive oxygen species in non-thermal plasma-treated water
Kaori Sano1, Hirofumi Kurita1, Tomoko Nakajima1, Hachiro Yasuda1, Kazunori Takashima1, Akira Mizuno1
(1Toyohashi University of Technology)
[4A-PM-O5]
Survival and proliferation signaling pathways are downregulated by plasma-activated medium in
glioblastoma brain tumor cells
Hiromasa Tanaka1, Masaaki Mizuno1, Kenji Ishikawa1, Keigo Takeda1, Kae Nakamura1, Fumi Utsumi,
Hiroaki Kajiyama1, Hiroyuki Kano2, Shoichi Maruyama1, Fumitaka Kikkawa1, Masaru Hori1
(1Nagoya University, 2NU Eco-Engineering Co., Ltd.,)
[4A-PM-O6]
Effects of plasma irradiation energy at atmospheric pressure on gene transfection efficiency and
cell viability
Shota Sasaki1, Makoto Kanzaki1, Toshiro Kaneko1
(1Tohoku University)
[4A-PM-O7]
Study on international standardization of medical plasma equipment for blood coagulation
Hajime Sakakita1, Yuzuru Ikehara2, Nobuyuki Shimizu3, Jaeho Kim1
(1Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology
(AIST), 2Research Center for Medical Glycoscience, National Institute of Advanced Industrial Science and
Technology (AIST), 3SANNO Hospital, International University of Health and Welfare)
― 20 ―
Room B Session 1, 14
[4B-PM-I1]
Invited
(14:30–15:35)
Chair: Prof. Toyoda (Nagoya Univ.)
A model for capacitive discharges with arbitrary RF waveform excitation including the electrical
asymmetry effect and the associated self-bias
Pascal Chabert1, Trevor Lafleur1, Jean-Paul Booth1, Miles Turner2
(1LPP Ecole Polytechnqiue, France, 2Dublin City University, Ireland)
[4B-PM-I2]
Invited
[4B-PM-O1]
An analytical model for the radio-frequency sheath
Uwe Czarnetzki
(Ruhr University Bochum)
A model for correlation between plasma fluctuation and fluctuation of nanoparticle growth in
reactive plasmas
Masaharu Shiratani1, Kazunori Koga1, Kunihiro Kamataki1, Shinya Iwashita1, Yasuhiko Morita1,
Hyunwoong Seo1, Naho Itagaki1, Giichiro Uchida2
(1Kyushu University, 2Osaka University)
Session 7
[4B-PM-I3]
Invited
[4B-PM-O2]
(16:30–18:05)
Chair: Dr. Ventzek (TEL)
Novel plasma etch chemistries for the 10nm node and beyond
Eric A Joseph1, Sebastian_U Engelmann1, Nathan Marchack1, Robert_L Bruce1, Mark Nakamura2,
Takefumi Suzuki2
(1IBM T. J. Watson Research Center, 2ZEON Chemicals, L.P.)
Surface roughening during Si etching in inductively coupled Cl2 plasmas
Nobuya Nakazaki1, Yoshinori Takao1, Koji Eriguchi1, Kouichi Ono1
(1Kyoto University)
[4B-PM-O3]
Effect of HBr plasma cure for reduction of roughness formation on ArF photoresist surface
during plasma etching process
Yan Zhang1, Takuya Takeuchi1, Hiroki Nagano1, Kenji Ishikawa1, Makoto Sekine1, Keigo Takeda1,
Hiroki Kondo1, Masaru Hori1
(1Nagoya University)
[4B-PM-I4]
Invited
[4B-PM-O4]
Plasma process for spintronics devices
Keizo Kinoshita1, Hiroaki Honjo1,2, Keiichi Tokutome2, Michio Murahata1, Sadahiko Miura2, Naoki Kasai1,
Shoji Ikeda1, Hideo Ohno1
(1Tohoku University, 2NEC Corporation)
Ta sputtering by energetic Ar+, CO+ and N+ ion injections at oblique angles
Hu Li1, Kazuhiro Karahashi1, Satoshi Hamaguchi1
(1Osaka University)
Room C Session 5
[4C-PM-I1]
Invited
(14:30–15:35)
Chair: Prof. Mariotti (Univ. of Ulster)
Advancing nanoscience with atmospheric pressure plasmas
Davide Mariotti1, Somak Mitra1, Vladimir Svrcek2
(1University of Ulster, 2AIST)
― 21 ―
[4C-PM-I2]
Invited
[4C-PM-O1]
Nanoparticle Synthesis and Its Formation Mechanism in Thermal Plasmas
Takayuki Watanabe1
(1Kyushu University)
Fabrication of SiC nanoparticles as high capacity electrodes for Li-ion batteries
Giichiro Uchida1, Kunihiro Kamataki2, Daiki Ichida2, Yasuhiko Morita2, Hyunwoong Seo2, Naho Itagaki2,
Kazunori Koga2, Tastumi Ishihara2, Masaharu Shiratani2
(1Osaka University, 2Kyushu University)
Arranged 3
(16:30–18:10)
[4C-PM-A1]
Invited
Graphene crystal growth and device integration
[4C-PM-A2]
Invited
Chair: Prof. Hiramatsu (Meijo Univ.)
Luigi Colombo1, Yufeng Hao2, Stephen McDonnell3, Robert M. Wallace3, Rodney S. Ruoff2
(1Texas Instruments, 2University of Texas at Austin, 3University of Texas at Dallas)
High-quality graphene synthesis by plasma treatment of copper foil using extremely lowconcentration of carbon source
Masataka Hasegawa1,2, Kazuo Tsugawa2, Ryuichi Kato2, Yuki Okigawa1,2, Masatou Ishihara1,2,
Takatoshi Yamada1,2
(1Nanotube Research Center, National Institute of Advance Industrial Science and Technology (AIST),
2
Technology Research Association for Single Wall Carbon Nanotubes (TASC))
[4C-PM-A3]
Invited
Plasma-assisted non-equilibrium reaction for growth of high quality graphene and graphene
nanoribbon
Toshiaki Kato1, Rikizo Hatakeyama1, Toshiro Kaneko1
(1Tohoku University)
[4C-PM-A4]
Invited
Ultrasensitive physical, chemical and biological sensing using graphene channel field-effect
transistors
Nae-Eung Lee1,2,3, Tran Quang Trung1, Duckjin Kim3, Doil Kim1, Ilyung Son1, Boyeong Kim2,
Jinheak Jung2
(1School of Advanced Materials Science & Engineering, Sungkyunkwan University, 2SKKU Advanced
Institute for Nanotechnology (SAINT), Sungkyunkwan University, 3Samsung Advanced Institute of Health
Sciences and Technology (SAIHST), Sungkyunkwan University)
― 22 ―
Wednesday, February 5, 2014
Room A Session 9
(8:30–9:50)
[5A-AM-I1]
Invited
[5A-AM-I2]
Invited
[5A-AM-O1]
Chair: Prof. Gans (Univ. of York)
Elementary chemical processes induced by electrical discharge plasmas in water
Petr Lukes1, Bruce R. Locke2
(1Institute of Plasma Physics AS CR, 2Florida State University)
Atmospheric pressure plasma jets: chemistry, plasma-liquid interaction and related applications
Peter J Bruggeman1
(1University of Minnesota)
Control of plasma-liquid interaction of atmospheric DC glow discharge in contact with liquid
Naoki Shirai1, Yudai Shimokawa1, Satoshi Uchida1, Fumiyoshi Tochikubo1
(1Tokyo Metropolitan University)
[5A-AM-O2]
Decomposition of acetic acid molecules on three-dimensionally Integrated micro solution
plasma in Ar/H2O mixture
Yuta Himeno1, Tatsuru shirafuji1
(1Osaka City University)
Multi-Purpose Hall (2F) Poster
(10:30–12:30)
[5P-AM-S02-P01] Dependence on vibrational quantum number of H2 rotational temperature of a low-pressure
microwave discharge plasma
Hiroshi Akatsuka1, Yoshihiro Shimizu1, Atsushi Nezu1, Haruaki Matsuura1
(1Tokyo Institute of Technology)
[5P-AM-S02-P02] Quantitative analysis of ionization rates of depositing particles in reactive plasma deposition
equipment using mass-energy analyzer and Langmuir probe
Hisashi Kitami1, Masaru Miyashita1, Toshiyuki Sakemi1, Yasushi Aoki1, Takanori Kato1
(1Sumitomo Heavy Industries, ltd.)
[5P-AM-S02-P03] Measurement of Hydrogen Negative Ions by Omegatron Mass Analyzer in Sheet Plasma
Satoki Matsumoto1, Yukinobu Kawada1, Takaaki Iijima1, Shoudai Koyano1, Akira Tonegawa1,
Kohnosuke Sato2, Kazutaka Kawamura1
(1Tokai University , 2Chubu Electric Power Co. Inc.)
[5P-AM-S02-P04] Accuracy of substrate temperature measurement using optical low coherence interferometry
Takayuki Ohta1, Hiroto Kato1, Takayoshi Tsutsumi2, Keigo Takeda2, Masaru Hori2, Masafumi Ito1
(1Meijo university, 2Nagoya university)
[5P-AM-S02-P05] Measurement of energy flux to a substrate by thermal and langmuir probes during ICP
assisted DC magnetron sputtering
Yoshinobu Matsuda1, Kenji Mine1, Shintaro Wakiyama1, Masanori Shinohara1
(1Nagasaki University)
― 23 ―
[5P-AM-S02-P06] Production of high-density meter-length plasma with metal-covered slot antenna
Noriharu Takada1, Shogo Kondo1, Suguru Nakano1, Kensuke Sasai1, Hirotaka Toyoda1
(1Nagoya University)
[5P-AM-S02-P07] Positive and Negative Ionic Species in Plasma Plume of Atmospheric-pressure Plasma Jets
Using an Ambient Mass Spectroscopy
Jun-Seok Oh1, Akimitsu Hatta1,2, James W Bradley3
(1Electronic & Photonic Systems Engineering, Kochi University of Technology, 2Institute of
Nanotechnology, Kochi University of Technology, 3Electrical Engineering and Electronics, University
of Liverpool)
[5P-AM-S02-P08] Dependence of electron density on pulse-off time in an atmospheric-pressure pulse
microwave discharge
Kazuki Egashira1, Hirotaka Toyoda1,2
(1Nagoya University of Electrical Engineering and Computer Science, 2Nagoya University of Plasma
Nanotechnology Research Center)
[5P-AM-S02-P09] Effect of gas flow on spatial distribution of O (3Pj) atoms in ac power excited non-equilibrium
atmospheric pressure O2/Ar plasma jet
Keigo Takeda1, Fengdong Jia2, Kenji Ishikawa1, Hiroyuki Kano3, Makoto Sekine1, Masaru Hori1
(1Nagoya University, 2University of Chinese Academy of Sciences, 3NU-eco Engineering Co., Ltd.)
[5P-AM-S02-P10] Analysis of fluctuation of Ar metastable density and nanoparticle amount in capacitively
coupled discharges with amplitude modulation
Yasuhiko Morita1, Teppei Ito1, Shinya Iwashita1,2, Daisuke Yamashita1, Giichiro Uchida3,
Hyunwoong Seo1, Kunihiro Kamataki1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1
(1Graduate School / Faculty of Information Science and Electrical Engineering, Kyushu University,
2
Institute for Plasma and Atomic Physics, Ruhr University, 3Department of Energy Transfer Dynamics,
Joining and Welding Research Institute, Osaka University)
[5P-AM-S02-P11] Simple real-time load impedance monitoring system during plasma etching process
Taisei Motomura1, Yuji Kasashima1, Osamu Fukuda1, Fumihiko Uesugi1, Hiroyuki Kurita2,
Naoya Kimura2
(1National Institute of Advanced Industrial Science and Technology, 2ADVANTEST Corporation)
[5P-AM-S02-P12] Study on VHF Plasma Characteristics by Laser Thomson Scattering
Weiting Chen1, Kohei Ogiwara1, Koichiro Koge1, Kentaro Tomita1, Kiichiro Uchino1,
Yoshinobu Kawai1
(1Kyushu University)
[5P-AM-S02-P13] Easy and quick measurements of electron temperature and plasma density by a sheath
compensated Langmuir probe
Kazunori Takahashi1, Hiroki Higashiyama2, Koichi Takaki2, Ando Akira1
(1Tohoku University, 2Iwate University)
[5P-AM-S02-P14] Characteristics of pulsed plasma using dual frequency inductively coupled plasma(DF-ICP)
source
Jin Seock Seo1, Kyong Nam Kim1, Ki Seok Kim1, Tae Hyung Kim1, Jeoung Oun Bae1,
Geun Young Yeom1,2
(1Department of Materials Science and Engineering, Sungkyunkwan University, 2SKKU Advanced
Institute of Nano Technology (SAINT), Sungkyunkwan University)
[5P-AM-S02-P15] Diagnostics of two-dimensional gas temperature distribution in DC glow discharge plasma
Daisuke Shimizu1, Yoichi Inada1, Koji Kijima1, Takao Matsumoto1, Yasuji Izawa1, Kiyoto Nishijima1
(1Fukuoka University)
― 24 ―
[5P-AM-S02-P16] Energy transfer from self-excited buneman instability to a temporally growing short-pulse
microwave plasma
Shail Pandey1, Sudeep Bhattacharjee1
(1Department of Physics, Indian Institute of Technology Kanpur, Kanpur)
[5P-AM-S05-P17] Fine response of deposition rate of Si films deposited by multi-hollow discharge plasma CVD
with amplitude modulation
Susumu Toko1, Yuji Hashimoto1, Yoshinori Kanemitu1, Yoshihiro Torigoe1, Hyunwoong Seo1,
Kunihiro Kamataki1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1
(1Kyushu University)
[5P-AM-S05-P18] Formation of nanoparticles of zinc oxide using a coaxial gas-flow low-pressure pulse plasma
Hiroki Shirahata1, Satoru Iizuka2
(1Tohoku University, 2Tohoku University)
[5P-AM-S05-P19] Sputter Deposition of Ga-doped Zinc Oxide (GZO) Films with Buffer Layers Fabricated via
Nitrogen Mediated Crystallization
Takahiko Nakanishi1
(1Kyushu University of Engineering)
[5P-AM-S05-P20] Synthesis of SiO-Ti nano structured composites by PS-PVD for negative electrode of lithium
ion batteries
Toru Tashiro1, Mashiro Kaga1, Makoto Kambara1
(1The university of Tokyo)
[5P-AM-S05-P21] Spatial profile of flux of dust particles in hydrogen helicon plasmas
Mizuki Tateishi1, Kazunori Koga1, Daisuke Yamashita1, Kunihiro Kamataki2, Hyunwoong Seo1,
Naho Itagaki1,3, Masaharu Shiratani1, Naoko Ashikawa4, Suguru Masuzaki4, Kiyohiko Nishimura4,
Akio Sagara4, the LHD Experimental Group4
(1Graduate School of Information Science and Electrical Engineering, Kyushu University, 2Faculty
of Arts and Science, Kyushu University, 3PRESTO Japan Science and Technology Agency, 4National
Institute for Fusion Science)
[5P-AM-S05-P22] Formation mechanism of metal nanoparticles coated by amorphous silicate in induction
thermal plasma
Manabu Tanaka1, Jun Noda1, Takayuki Watanabe2, Junya Matsuno3, Akira Tsuchiyama3
(1Tokyo Institute of Technology, 2Kyushu University, 3Kyoto University)
[5P-AM-S05-P23] Raman spectroscopy of a fine particle optically trapped in plasma
Daisuke Yamashita1, Kazunori Koga1, Giichiro Uchida2, Kunihiro Kamataki1, Naho Itagaki1,3,
Masaharu Shiratani1
(1Kyushu University, 2Oasaka University, 3PRESTO)
[5P-AM-S05-P24] Study on the effects of different temperature on photo catalytic activity of synthesized zinc
oxide powder
Jin-Hyo Boo1, Sang-Hun Nam1, Ki-Hwan Hwang1, So-Hyoun Jeon1, Jung-Hoon Yu1, Jin-Su Lee1
(1Sungkyunkwan University)
[5P-AM-S11-P25] Oxidation of BON thin films
Dong Bok Lee1, Poonam Yadav1, Muhammad Ali Abro1, Min Jung Kim1
(1Sungkyunkwan University)
[5P-AM-S11-P26] Plasma-chemical degradation of phorbol 12-myristate 13-acetate in methanol
Santi Kongmany1, Yuma Onishi1, Hiroto Matsuura1, Masakazu Furuta1, Shuichi Okuda1,
Kiyoshi Imamura1, Yasuaki Maeda1
― 25 ―
(1Osaka Prefecture University)
[5P-AM-S11-P27] Numerical analysis of nitrogen thermal plasma for gasification processes
Sooseok Choi1, Im Jun Cho1, Hyun-Woo Park1, Eun Ha Ko1, Ye-Seul Na1, Dong-Wha Park1
(1Inha University)
[5P-AM-S11-P28] Comparison of pulsed power generator using SOS diodes with DBD on ozone yield and NO
removal efficiency
Takatoshi Kakuta1, Koichi Takaki1, Ippei Yagi2
(1Iwate University, 2The University of Tokyo)
[5P-AM-S11-P29] The study on degradation of algae in the underwater dielectric barrier discharge(UDBD)
plasma system
Jin Oh Jo1, Sang Don Kim2, Young Sun Mok1
(1Department of Chemical and Biological Engineering, Jeju National University, 2Yeongsan River
Environment Research Center, National Institute of Environmental Research)
[5P-AM-S11-P30] Improvement of growth rate of plants by bubble discharge in water
Junichiro Takahata1, Koichi Takaki1, Naoya Satta2, Katsuyuki Takahashi3, Takuya Fujio4, Yuji Sasaki4
(1Faculty of Engineering, Iwate University, 2Faculty of Agriculture, Iwate University, 3Shishido
Electrostatic, LTD., 4Iwate Agricultural Research Center)
[5P-AM-S11-P31] Ignition and combustion control by dielectric barrier discharge for HCCI engine
Eiichi Takahashi1, Hirokazu Kojima1, Seiya Yamaguchi2, Takashi Kashiwazaki2, Hirohide Furutani
(1National Institute of Advanced Industrial Science and Technology (AIST), 2University of Tsukuba)
[5P-AM-S11-P32] Decomposition of acetone by using a plasma-adsorbent catalyst reactor packed with silvernanoparticles loaded zeolite
Quang Hung Trinh1, Quang Hung Trinh1, Suji Gim1, Sanjeeva Gandhi Mani1, Sang Baek Lee1,
Young Sun Mok1
(1Jeju National University )
[5P-AM-S12-P33] Burn wounds healing using atmospheric pressure plasma irradiation
Takamichi Hirata1, Takumi Kishimoto1, Chihiro Tsutsui1, Takao Kanai2, Akira Mori1
(1Department of Medical Engineering, Tokyo City University, 2Institute of Laboratory Animals,
Tokyo Women's Medical University)
[5P-AM-S12-P34] Near-infrared emission measurements of a minimally invasive plasma used for medical
applications
Hiromasa Yamada1,2, Jaeho Kim2, Hajime Sakakita1,2, Yuzuru Ikehara3, Toshiya Okazaki4,
Akiko Kubota2, Satoru Kiyama2, Yusuke Yamagishi1,2, Masanori Fujiwara2, Sanae Ikehara3,
Hayao Nakanishi5, Nobuyuki Shimizu6, Dr. Masao Ichinose7; Dr. Toru Niwa8
(1Graduate School of Systems and Information Engineering at the University of Tsukuba, 2Innovative
Plasma Technologies Group, Energy Technology Research Institute, National Institute of Advanced
Industrial Science and Technology (AIST), 3 Molecular Medicine Team, Research Center for Medical
Glycoscience, AIST, 4Advanced Functional Nanotube Team, Nanotubu Research Center, AIST,
5
Division of Oncological Pathology, Aichi Cancer Center Research Institute, 6SANNO Hospital,
International University of Health and Welfare, 7Wakayama Medical University, 8Hashimoto Municipal
Hospital)
[5P-AM-S12-P35] Subacute toxicity of gallium arsenide, indium arsenide and arsenic trioxide following
intermittent intrantracheal instillations to the lung of rats
Akiyo Tanaka1, Miyuki Hirata1, Kazunori Koga2, Naho Itagaki2, Masaharu Shiratani2, Nobuya Hayashi,
Giichiro Uchida4
(1Department of Environmental Medicine, Graduate School of Medical Sciences, Kyushu University,
2
Department of Electronics, Graduate School of Information Science and Electrical Engineering,
― 26 ―
Kyushu University, 3Interdisciplinary Graduate School of Engineering Sciences, Kyushu University,
Department of Energy Transfer Dynamics, Joining and Welding Research Institute, Osaka University)
4
[5P-AM-S12-P36] Evaluation of dose of active oxygen species generated by discharge using chemical indicator
method
Satoshi Kitazaki1, Nobuya Hayashi1
(1Kyushu University)
[5P-AM-S12-P37] Sterilization treatment of inner surface of a narrow tube using ozone and UV light irradiation
Akimasa Tanaka1, Shohei Uchida1, Reoto Ono1, Tomomasa Itarashiki1,2, Satoshi Kitazaki1,
Nobuya Hayashi1
(1 Kyushu University of Interdisciplinary Graduate School of Engineering Sciences, 2Saraya Co., Ltd.)
[5P-AM-S12-P38] Effect of plasma irradiation on lipid bilayer membrane
Yoshiyuki Suda1, Ryo Kato1, Hideto Tanoue1, HIrofumi Takikawa1, Ryugo Tero2, Akinori Oda3
(1Department of Electrical and Electronic Information Engineering, Toyohashi University of
Technology, 2Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University
of Technology, 3Department of Electrical, Electronics and Computer Engineering, Chiba Institute of
Technology)
[5P-AM-S12-P39] Effect of nitrogen atoms in N2/O2 surface-wave plasma on the inactivation of spore-forming
microorganisms
Xiaoli Yang1,2, Xijiang Chang1, Reitou Tei2, Masaaki Nagatsu1,2
(1Graduate School of Science and Technology, Shizuoka University, Hamamatsu, Japan,
2
Graduate School of Engineering, Shizuoka University, Hamamatsu, Japan)
[5P-AM-S12-P40] Molecular-structure variation of soft material irradiated with atmospheric-pressure plasma jet
Kosuke Takenaka1, Atsushi Miyazaki1, Giichiro Uchida1, Yuichi Setsuhara1
(1Osaka University)
[5P-AM-S12-P41] Plasma Gene Transfection to Human Skin Cells Using Microcapillary Electrode
Hideki Motomura1, Takuya Yamasaki1, Masafumi Jinno1, Kunihide Tachibana2, Susumu Satoh3,
Yugo Kido4
(1Ehime University, 2Osaka Electro-Communication University, 3Y's Corp., 4Pearl Kogyo Co., Ltd.)
[5P-AM-S12-P42] Generation of diffuse coplanar surface barrier discharge plasma for self-sterilization of planar
surface
Hiroshi Akamatsu1
(1Kobe City College of Technology)
[5P-AM-SPD-P01] Nanoparticle amount in reactive plasmas with amplitude modulation detected by twodimensional laser light scattering method
Teppei Ito1, Yasuhiko Morita1, Shinya Iwashita1,2, Daisuke Yamashita1, Giichiro Uchida3,
Hyunwoong Seo1, Kunihiro Kamataki1, Naho Itagaki1,4, Kazunori Koga1, Masaharu Shiratani1
(1Department of Electronics, Faculty of Information Science and Electrical Engineering, Kyushu
University, 2Institute for Plasma and Atomic Physics, Ruhr University Bochum, 3Joining and Welding
Research Institute, Osaka University, 4PRESTO, Japan Science and Technology Agency)
[5P-AM-SPD-P02] Properties of micro-discharge plasma in cryogenic-gaseous and liquid helium
Viacheslav Anatol'evich Shakhatov1, Nelly Bonifaci2, Frederic Aitken2, Hai Van Nguyen Thi2,
Vladimir Atrazhev3, Klaus Von Haeften4, Jussi Eloranta5, Gerard Vermeulen6
(1Topchiev of Petrochemical Synthesis Institute, RAS, Moscow, Russia, 2Laboratoire G2Elab CNRS
& Grenoble University, France, 3Joint Institute for High Temperatures, RAS,Russia, Moscow,
4
Department of Physics and Astronomy, University of Leicester, UK, 5Department of Chemistry
and Biochemistry, University of Northridge, USA, 6Laboratoire IN CNRS & Grenoble University,
Grenoble)
― 27 ―
[5P-AM-SPD-P03] Cold plasma treatment of corneal infections
Matteo Zuin1,2, Paola Brun3, Paola Brun4, Roberto Cavazzana2, Velika Deligianni5, Andrea Leonardi6,
Emilio Martines1,2, Elena Tarricone4
(1Istituto Gas Ionizzati del CNR, Padova, Italy, 2Consorzio RFX, Associazione Euratom-ENEA sulla
Fusione, Padova, Italy, 3Department of Molecular Medicine, University of Padova, Padova, Italy,
4
Department of Biomedical Sciences, University of Padova, Italy,, 5Ophthalmology Unit, S. Antonio
Hospital, Padova, Italy, 6Department of Neuroscience, Ophthalmology Unit, University of Padova,
Padova, Italy)
[5P-AM-SPD-P04] Disinfection of Escherichia Coli using Atmospheric-Pressure Plasma Jet
Hiroshi Kuwahata1, Takeshi Yamaguchi1, Ryu-ichiro Ohyama1, Atsushi Ito2
(1Department of Electrical and Electronic Engineering, Tokai University, 2Department of Nuclear
Engineering, Tokai University)
[5P-AM-SPD-P05] APPJ System for Surface Treatment of HIPS
Joanna Pawlat1
(1Lublin University of Technology)
Room A Session 12
[5A-PM-I1]
Invited
(13:30–14:55)
Chair: Prof. O'Connell (Univ. of York)
A clinical need for medical plasma equipment in line with progression of minimally invasive
surgical procedure
Yuzuru Ikehara1, Hajime Sakakita2, Nobuyuki Shimizu3, Sanae Ikehara1, Hayao Nakanishi4
(1Molecular Medicine Team, Research Center for Medical Glycoscience, National Institute of Advanced
Industrial Science and Technology (AIST), 2Innovative Plasma Technologies Group, Energy Technology
Research Institute, AIST, 3SANNO Hospital, International University of Health and Welfare, 4Division of
Oncological Pathology, Aichi Cancer Center Research Institute)
[5A-PM-O1]
Chemical analyses of edible meat irradiated atmospherics-pressure-plasmas
Kenji Ishikawa1, Hiroshi Hashizume2, Takayuki Ohta2, Masafumi Ito2, Hiromasa Tanaka1, Keigo Takeda1,
Satomi Tajima1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1
(1Nagoya University, 2Meijo University)
[5A-PM-O2]
Fluorescent and structural observations of P. digitatum spores inactivated with oxygen radical
treatment
Hiroshi Hashizume1, Takayuki Ohta1, Keigo Takeda2, Kenji Ishikawa2, Masaru Hori2, Masafumi Ito1
(1Meijo University, 2Nagoya University)
[5A-PM-O3]
Study on production and distribution of NO in an atmospheric-pressure helium plasma jet
Seiya Yonemori1, Ryo Ono1, Tetsuji Oda1
(1The University of Tokyo)
[5A-PM-O4]
Improving the healing effect of cold plasma treatment on wound using water adding
Nasruddin Nasruddin1,2, Komatsu Emi1, Mukai Kanae1, Nakajima Yukari1, Heni Setyowati Esti Rahayu2,
Nur Muhammad3, Ishijima Tatsuo4, Enomoto Hiroshi4,5, Uesugi Yoshihiko4,6, Sugama Junko,
Nakatani Toshio7
(1Department of Clinical Nursing, Graduate School of Medical Science, Kanazawa University, Kanazawashi, Japan, 2Faculty of Health Science, Universitas Muhammadiyah Magelang, Magelang, Central
Java, Indonesia, 3Department of Physics, Diponegoro University, Semarang, Indonesia, 4Research
Center for Sustainable Energy and Technology, Division of Energy and Environmental Technology,
― 28 ―
Kanazawa University, Kanazawa-shi, Japan, 5Faculty of Mechanical Engineering, Institute of Science
and Engineering, Kanazawa University, Kanazawa-shi, Japan, 6Faculty of Electrical and Computer
Engineering, Institute of Science and Engineering, Kanazawa University, Kanazawa-shi, Japan, 7Division
of Nursing, Faculty of Health Sciences, Institute of Medical, Pharmaceutical and Health Sciences,
Kanazawa University, Kanazawa-shi, Japan)
Multi-Purpose Hall (2F) Poster
(15:30–17:30)
[5P-PM-S03-P01] Characteristics of hydrogen recombining plasma with pulse plasma flow
Takaaki Iijima1, Hiroaki Kobayashi1, Suguru Tanaka1, Akira Tonegawa1, Kohnosuke Sato2,
Kazutaka Kawamura1
(1Tokai University, 2Chubu Electric Power Co.lnc.)
[5P-PM-S08-P02] Fabrication of In-rich ZnInON filmswith narrow band gap by RF magnetron sputtering
Koichi Matsushima1, Ryota Shimizu1, Tomoaki Ide1, Daisuke Yamashita, Giichiro Uchida1,
Hyunwoong Seo1, Kunihiro Kamataki1, Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1,2
(1PRESTO)
[5P-PM-S08-P03] Sputtering fabrication of a novel widegap semiconductor ZnGaON for optoelectronic devices
with wide bandgap for optical devices
Ryota Shimizu1, Koichi Matsushima1, Tomoaki Ide1, Daisuke Yamashita1, Hyunwoong Seo1,
Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1
(1Kyushu University)
[5P-PM-S08-P04] Electrical and optical properties of gallium-doped zinc oxide (GZO) thin films prepared by
ion-beam-assisted deposition (IBAD)
Jang Hsing Hsieh1, Y. J. Cho, J Lin1, C. K. Chang1
(1Ming Chi University of Technology)
[5P-PM-S08-P05] Study on nitrogen desorption behavior of sputtered ZnO for transparent conducting oxide
Iping Suhariadi1, Kouichiro Oshikawa1, Daisuke Yamashita1, Hyunwoong Seo1, Kazunori Koga1,
Masaharu Shiratani1, Naho Itagaki1,2
(1Graduate School of Information Science and Electrical Engineering, Kyushu University, 2PRESTO,
Japan Science and Technology Agency)
[5P-PM-S08-P07] Magnetron sputtering of low-resistive In2O3:Sn films with buffer layers fabricated via
nitrogen mediated crystallization
Koichiro Oshikawa1, Iping Suhariadi1, Daisuke Yamashita1, Hyunwoong Seo1, Kunihiro Kamataki1,
Giichiro Uchida1, Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1,2
(1Kyushu University, 2PRESTO, Japan Science and Technology Agency)
[5P-PM-S08-P08] Structure and properties of titanium nitride films prepared by oblique angle deposition
Jae-In Jeong1, Ji-Hoon Yang1, Jae-Hun Jung1, Min-A Song
(1Research Institute of Industrial Science and Technology )
[5P-PM-S08-P09] Nucleation control of carbon nanowalls for device application
Ryosuke Tsukada1, Mineo Hiramatsu1, Hiroki Kondo2, Masaru Hori2
(1Meijo University, 2Nagoya University)
― 29 ―
[5P-PM-S08-P10] Formation of amorphous CNx films by reactive Ar/N2 high power impulse magnetron
sputtering
Takashi Kimura1, Ryotaro Nishimura1
(1Nagoya Institute of Technology)
[5P-PM-S08-P11] Global model of high power impulse magnetron sputter plasma
Takashi Kimura1, Hikaru Kamata1
(1Nagoya Institute of Technology)
[5P-PM-S08-P12] Optical transmittance of electrical insulating and conductive diamond-like carbon films
prepared by bipolar-type plasma based ion implantation
Setsuo Nakao1, Hiroshi Kakiuchida1, Masato Sasase2, Komei Baba3
(1National Institute of Advanced Industrial Science and Technology, 2Wakasa wan Energy Research
Center, 3Industrial Technology Center of Nagasaki)
[5P-PM-S08-P13] Characterization of diamond-like carbon fIlms fabricated by RF plasma CVD from CO
source gas
Yuki Yasuoka1, Toru Harigai1, Jun-Seok Oh1, Hiroshi Furuta1,2, Akimitsu Hatta1,2, Tsuneo Suzuki3,
Hidetosih Saitoh3
(1Kochi University of Technology, 2Institute for Nanotechnology, Kochi University of Technology,
3
Nagaoka University of Technology)
[5P-PM-S08-P14] Pressure dependence of carbon film deposition using H-assisted plasma CVD
Xiao Dong1, Kazunori Koga1,4, Daisuke Yamashita1, Hyunwoong Seo1, Naho Itagaki1,
Masaharu Shiratani1,4, Kosuke Takenaka2, Yuichi Setsuhara2,4, Makoto Sekine3,4, Masaru Hori3,4
(1Kyushu University, 2Osaka University, 3Nagoya University, 4JST, CREST)
[5P-PM-S09-P15] Characterization of amino-group-functionalized Y2O3:Er,Yb nanoparticles prepared by laser
plasma in liquid
Hiroyuki Wada1, Hikaru Kobayashi1, Kunio Fujii1, Takashi Nunokawa1, Osamu Odawara1
(1Tokyo Institute of Technology)
[5P-PM-S09-P16] Generation of self-organized structure of microgap dielectric-barrier discharge with MgO
surface layer
Shizuka Tada1, Yuki Kubota1, Kazunobu Fujiwara1, Takuya Kameyama1, Seiji mukaigawa1,
Koichi Takaki1
(1Iwate University)
[5P-PM-S09-P17] Water treatment by bubbling of atmospheric-pressure plasma radical flow
Hiroyuki Yoshiki1, Kouhei Sato1, Syafiq1, Tetuya Sugawara2
(1Tsuruoka National College of Technology, 2Yamagata Reseach Institute of Technology)
[5P-PM-S09-P18] Mechanism of efficient generation of cavitation bubbles in a sonoplasma production system
assisted by a punching metal plate: effect of power deposition
Yushi Iwata1, Shusuke Nishiyama1, Satoshi Tomioka1, Noriharu Takada2, Koichi Sasaki1
(1Hokkaido University, 2Nagoya University)
[5P-PM-S09-P19] Routes to tailoring plasma jet polymerization of functional thin films
Kirsty McKay1, Fred Moix1, Jun Seok Oh1, James W. Bradley1
(1University of Liverpool, UK)
[5P-PM-S09-P20] Study on electrostatic characteristics of the neutral gas flow along the atmospheric pressure
plasma jet
Yusuke Yamagishi1, Hajime Sakakita1,2, Syuichiro Tsunoda1, Jiro Kasahara3, Jaeho Kim2,
Yuzuru Ikehara2, Hiromasa Yamada1, Akiko Kubota2
― 30 ―
(1University of Tsukuba, 2National Institute of Advanced Industrial Science and Technology (AIST),
Nagoya University)
3
[5P-PM-S09-P21] Enhancement of in-liquid plasma reduction in KSrPO4:Eu phosphor under hydrogen
introduced atmospheric pressure plasma irradiation
Kohei Yamagami1, Ariyuki Kato1, Kotaro Iwasaki1, Kenta Hamatani1, Kazumasa Takahashi1,
Toru Sasaki1, Takashi Kikuchi1, Tsukasa Aso1, Nob. Harada1
(1Nagaoka University of Technology)
[5P-PM-S09-P22] Optical emission spectroscopy on 3D integrated micro-solution plasma
Yuhei Ogura1, Yuta Himeno1, Tatsuru Shirafuji1
(1Osaka City University)
[5P-PM-S09-P23] Chemical vapor deposition of SiO thin films using an atmospheric pressure helium plasma jet
and hexamethyldisiloxane
Ryosuke Taga1, Daisuke Usa2, Tatsuru Shirafuji1
(1Osaka City University, 2Unitika)
[5P-PM-S09-P24] Time-resolved optical emission spectroscopy on micro-solution plasma in a single bubble in
a capillary tube
Ryutaro Tashiro1, Kazuhiko Obana1, Tatsuru Shirafuji1
(1Osaka City University)
[5P-PM-S09-P25] Effect of water vapor addition on fundamental properties in non-thermal helium plasmas at
atmospheric pressure
Akinori Oda1, Junya Sakashita1, Yoshiyuki Suda2
(1Chiba Institute of Technology, 2Toyohashi University of Technology)
[5P-PM-S09-P26] Flexible microwave waveguide composed of negative-permittivity microplasma array
Osamu Sakai1, Jun Maeda1
(1Kyoto University)
[5P-PM-S12-P27] Measurement of electrical characteristics of ozone mist for agricultural application
Takuya Nagatomo1, Keisuke Takigawa1, Yuki Yamasaki1, Fumiaki Mitsugi1, Tomoaki Ikegami1,
Kenji Ebihara2, Norihito Nakamura3, Yukio Hashimoto3, Yoshitaka Yamashita3
(1Kumamoto University, 2Environment and Energy Laboratory, 3Sanwa hi-tech Co.Ltd)
[5P-PM-S12-P28] Study on ozone treatment of soil in agriculture
Yuki Yamasaki1, Keisuke Takigawa1, Takuya Nagatomo1, Takamasa Sakai1, Fumiaki Mitsugi1,
Tomoaki Ikegami1, Kenji Ebihara2, Norihiro Nakamura3, Yukio Hashimoto3, Yoshitaka Yamashita3,
Kazuhiro Nagahama4
(1Kumamoto University, 2Environment and Energy Laboratory, 3Sanwa hi-tech Co. Ltd, 4Sojo
University)
[5P-PM-S12-P29] Improving seed germination using atmospheric pressure plasma jet
Kodai Sakuramoto1, Yosuke Mori1, Jun-seok Oh1, Akimitsu Hatta1,2
(1Kochi University of Technology, 2Institute of Nanotechnology)
[5P-PM-S12-P30] Effect of antioxidative activity of plants by low pressure oxygen plasma irradiation
Reoto Ono1, Shohei Uchida1, Akimasa Tanaka1, Tomomasa Itarashiki1,2, Satoshi Kitazaki1,
Nobuya Hayashi1
(1Kyushu University, 2Saraya Co.,Ltd)
[5P-PM-S12-P31] Growth enhancement of plant by plasma and UV irradiation to seeds
Shohei Uchida1, Reoto Ono1, Akimasa Tanaka1, Tomomasa Itarashiki1,2, Satoshi Kitazaki1,
Nobuya Hayashi1
― 31 ―
(1Kyushu University, 2Saraya Co.,Ltd)
[5P-PM-S12-P32] Effects of growth enhancement by plasma irradiation to seeds in water
Thapanut Sarinont1, Kazunori Koga1, Satoshi Kitazaki2, Masaharu Shiratani1, Nobuya Hayashi2
(1Kyushu University,Graduate School of Information Science and Electrical Engineering, 2Kyushu
University, Interdisciplinary Graduate School of Engineering Science)
[5P-PM-S12-P33] Long term growth of radish sprouts after atmospheric pressure DBD plasma irradiation to
seeds
Takaaki Amano1, Thapanut Sarinont2, Satoshi Kitazaki3, Nobuya Hayashi3, Kazunori Koga2,
Masaharu Shiratani2
(1Department of Electrical Engineering and Computer Science, School of Engineering, Kyushu
University, 2Graduate School of Information Science and Electrical Engineering, Kyushu University,
3
Interdisciplinary Graduate School of Engineering Science, Kyushu University)
[5P-PM-S12-P34] DLC coating to guide wire by quadrupole magnetron plasmas
Sho Matsuyama1, Hiroshi Fujiyama1, Masanori Shinohara1
(1Nagasaki University)
[5P-PM-S12-P35] Vibrational analysis of biological samples using multiplex coherent anti-stokes raman
scattering microspectroscopy using multiplex coherent anti-Stokes Raman scattering
microspectroscopy
Hiroto Kato1, Takayuki Ohta1, Keigo Takeda2, Hiroshi Hashizume1, Masaru Hori2, Masafumi Ito1
(1Meijo University, 2Nagoya University)
[5P-PM-S12-P36] Effects of oxygen radical treatment in liquid phase on inactivation of microorganism
Takuya Towatari1, Hiroshi Hashizume1, Takayuki Ohta1, Masaru Hori2, Masafumi Ito1
(1Meijo University, 2Nagoya University)
[5P-PM-S12-P37] Application of O2 plasma for chloroplasts separation and collection from plant leaves
Min-Sheng Hung1, Yi-Dong Shao1
(1National Chiayi University)
[5P-PM-SPD-P01] Fabrication of ZnO-Al2O3 composite particles by microwave plasma torch
Jia-Jhih Shen1, Ta-Chin Wei1
(1Chung-Yuan University)
[5P-PM-SPD-P02] The effect of liquid volume on the preparation of silicon nanoparticles
Pattarin Chewchinda1, Osamu Odawara1, Hiroyuki Wada1
(1Tokyo Institute of Technology)
[5P-PM-SPD-P03]Y2O3:Er,Yb nano-string prepared by laser ablation in liquid
Takashi Nunokawa1, Osamu Odawara1, Hiroyuki Wada1
(1Tokyo Institute of Technology)
[5P-PM-SPD-P04] Fabrication of Single-Walled Carbon Nanotubes Based Stable PN Junction Diodes by
Position Selective Doping of Cs Atoms
Yoshihiro Abiko1, Toshiaki Kato1, Rikizo Hatakeyama1, Toshiro Kaneko1
(1Tohoku University)
[5P-PM-SPD-P05] Development of Novel Plasma CVD Method Aiming for Chirality-Controlled Synthesis of
Single-Walled Carbon Nanotubes
Bin Xu1, Toshiaki Kato1, Koshi Murakoshi1, Toshiro Kaneko1
(1Tohoku University)
― 32 ―
[5P-PM-SPD-P06] Preparation of Au nano particles from Au electrodes by solution plasma without addition of
surfactants
Naoki Matsuda1, Tatsurou Nakashima1
(1National Institute of Advanced Industrial Science and Technology)
Room B Session 8
(8:30–10:10, 10:30–11:45)
Chair: Dr. Klages (TU Brauschweig)
Dr. Kim (AIST)
[5B-AM-I1]
Invited
Enhanced capacity retention for plasma sprayed SiOx nano composite powders as negative
electrode of lithium ion batteries
Makoto Kambara1, Nobuhiko Oda1, Keiichiro Homma1
(1The University of Tokyo)
[5B-AM-O1]
Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of
sp3-bonded BN films
Shojiro Komatsu1
(1National Institute for Materials Science)
[5B-AM-O2]
Impacts of plasma process parameters on mechanical properties of c-BN thin films
Masao Noma1, Koji Eriguchi2, Shigehiko Hasegawa3, Michiru Yamashita4, Yoshinori Takao2,
Nobuyuki Terayama1, Kouichi Ono2
(1Shinko Seiki Co., Ltd., 2Kyoto University, 3Osaka University, 4Hyogo Prefectural Institute of Technology)
[5B-AM-O3]
Effect of film property on friction coefficients of Si-containing diamond-like carbon sliding
against polymer
Yan Kuang Lim1, Hiroyuki Kousaka1, Takayuki Tokoroyama1, Noritugu Umehara1
(1Nagoya University)
[5B-AM-O4]
Plasma-Enhanced Reactivity-Controlled Sputter Deposition Process for Low-Temperature
Formation of Semiconductor Films
Yuichi Setsuhara1, Kosuke Takenaka1, Hirofumi Ohtani1, Atsuki Kanai1, Soichiro Osaki1
(1Osaka University)
[5B-AM-O5]
Wafer-scale and conformal growth of MoS2 thin films using atomic layer deposition
Yujin Jang1, Soo-Hyun Kim1, Teahoon Cheon1,2, Eok-Su Kim3, Jang-Yeon Kwon4, Suk Yang4,
Sang-Kyung Choi5
(1Yeungnam University, 2Daegu Gyeongbuk Institute of Science & Technology, 3Samsung Advanced
Institute of Technology, 4Yonsei University, 5Chungnam National University)
[5B-AM-O6]
Mobility in highly transparent conductive Al-doped ZnO polycrystalline films deposited by RF,
DC and RF-superimposed DC magnetron sputtering: grain boundary effect and scattering in the
grain bulk
Junichi Nomoto1, Huaping Song1, Hisao Makino1, Tetsuya Yamamoto1
(1Research Institute, Kochi University of Technology)
[5B-AM-O7]
Electrical, optical, and structural properties of Al doped ZnO films prepared by mirror type
facing target sputtering
Jay Bum Kim1, Kyung. S. Shin1, Hye Ran. Kim1, Jeon G. Han1
(1NU-SKKU Joint Institute Plasma-Nano Materials, Sungkyunkwan University)
― 33 ―
[5B-AM-O8]
Surface Plasmon Polariton Based Wavelength Selective IR Emitter Combined with MEMS
Heater with Reduced Thermal Loss
Minoru Sasaki1, Takahiro Sawada1, Takuo Chikuba1, Shinya Kumagai1, Katsuya Masuno2, Makoto Ishii2,
Shouichi Uematsu2
(1Toyota Technological Institute, 2Yazaki Corporation)
[5B-AM-O9]
Effects of annealing on the properties of Cu2O thin film using reactive sputtering
Yu Sup Jung1, Hyung Wook Choi1, Kyung Hwan Kim1
(1Department of Electrical Engineering, Gachon University)
[5B-AM-O10]TiO2 Macrocrystal Deposition via Compact Planar Magnetron Sputtering Device
Michelle Marie S. Villamayor1, Julius Andrew P. Nuñez1, Henry J. Ramos1, Motoi Wada2
(1University of the Philippines, 2Doshisha University)
Session 2
(13:30–15:05, 15:30–16:30)
Chair: Prof. Suanpoot (Maejo Univ.)
Prof. Ishikawa (Nagoya Univ.)
[5B-PM-I1]
Invited
[5B-PM-O1]
Feature Profile Evolution in Plasma Processing using On-wafer Monitoring System
Tomohiro Kubota1, Seiji Samukawa1,2
(1Institute of Fluid Science, Tohoku University, 2WPI-AIMR, Tohoku University)
Curling probe analysis and simulation for collisional plasma
Anil Pandey1, Keiji Nakamura1, Hideo Sugai1
(1Chubu University)
[5B-PM-O2]
Rapid non-contact measurements of heat fluxes to substrate in nitorogen plasmas
Takayoshi Tsutsumi1, Kenji Ishikawa1, Keigo Takeda1, Takayuki Ohta2, Masafumi Ito2, Hiroki Kondo1,
Makoto Sekine1, Masaru Hori1
(1Nagoya University, 2Meijo University)
[5B-PM-I2]
Invited
Evolution of electron density and temperature in atmospheric pressure nanosecond
microdischarges
Yi-Kang Pu1, Bang-Dou Huang1, Xi-Ming Zhu1, Keisuke Takashima1, Yi-Kang Pu
(1Tsinghua University)
[5B-PM-O3]
Electrical discharges at atmospheric pressure for nanoparticle production: spectroscopic,
photographic and electrical monitoring
Jose Maria Palomares1, Esther Hontanon2, Attila Kohut3, Richard Engeln1
(1Eindhoven University of Technology, 2University of Duisburg-Essen, 3University of Szeged)
[5B-PM-O4]
Effect of different kinds of plasma electrode metals on stable molecules in N2-H2 plasmas
Atsushi Suzuki1, Shuichi Asahina2
(1National Institute of Advanced Industrial Science and Technology, 2Shimane Institute for Industrial
Technology)
[5B-PM-O5]
Calculation and spectroscopic examination of NO molecule by using microwave discharge N2O2 mixture plasma
Hao Tan1, Atsushi Nezu1, Haruaki Matsuura1, Hiroshi Akatsuka1
(1Tokyo Institute of Technology)
[5B-PM-O6]
Gas temperature distribution of DC glow corona plasma in atmospheric air
Takao Matsumoto1, Daisuke Shimizu1, Yoichi Inada1, Yasuji Izawa1, Kiyoto Nishijima1
(1Fukuoka University)
― 34 ―
[5B-PM-O7]
Plasma propagation speed for electron temperature investigation of mixture Ar and N2 In
atmospheric pressure non-thermal bioplasma jet
Pradoong Suanpoot1,2, Gook Hee Han2, Han Sup Uhm2, Guang Sup Cho2, Eun Ha Choi2
(1Maejo University Phrae Campus, 2Department of Electro Biological Physics, Kwangwoon University,
3
Department of Electro Biological Physics, Kwangwoon University, 4Department of Electro Biological
Physics, Kwangwoon University, 5Department of Electro Biological Physics, Kwangwoon University)
Room C Session 3
(8:30–10:00)
[5C-AM-I1]
Invited
Chair: Prof. Murakami (Titech)
Elementary processes in oxygen and oxygen-containing afterglows: NO2 formation on pyrex
surfaces
Vasco Guerra1, Daniil Marinov2, Olivier Guaitella3, Antoine Rousseau3
(1Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Portugal,
2
Department of Physical Sciences, Faculty of Science, The Open University, Milton Keynes, UK,
3
Laboratoire de Physique des Plasmas, Ecole Polytechnique, France)
[5C-AM-I2]
Invited
On mechanisms of physico - chemical processes in nitrogenated low temperature plasma:
experiment and numerical modelling
Viacheslav Anatol'evich Shakhatov1
(1A.V. Topchiev Institute of Petrochemical Synthesis of Russian Academy of Science)
[5C-AM-I3]
Invited
Computational and experimental atomic-scale analyses of surface damage formation in reactive
ion etching (RIE) processes for Si based materials
Satoshi Hamaguchi1
(1Osaka University)
[5C-AM-O1]
A set of electron collision cross sections for CHF3
Satoru Kawaguchi1, Kohki Satoh1, Hidenori Itoh1
(1Muroran Institute of Technology)
Session 6
[5C-PM-I1]
Invited
(13:30–15:15)
Chair: Prof. Kinoshita (Tohoku Univ.)
Diffusion and segregation of under-layer metal in sputter-deposited films: experiments,
prediction and applications
Michiko Yoshitake1
(1National Institute for Materials Science)
[5C-PM-I2]
Invited
Growth of magnesium hydride assisted by distributed microwave plasma sources:
performance improvement through control of process parameters.
Ana Lacoste1, Laetitia Laversenne
(1Joseph Fourier University)
[5C-PM-I3]
Invited
Chemical derivatization and chemical nature of polymer surfaces treated in afterglows of N2-H2
DBDs
Claus-Peter Klages1, Zohreh Khosravi1
(1Technische Universitat Braunschweig - Institut fur Oberflachentechnik)
[5C-PM-O1]
Infrared spectroscopy of hydrogenation of Si surface exposed to hydrogen plasma
Masanori Shinohara1, Naoki Maruno1, Shohei Yagi1, Yujiro Taniguchi1, Takayoshi Tsumura1,
Yoshinobu Matsuda1, Hiroshi Fujiyama1
(1Nagasaki University)
― 35 ―
[5C-PM-O2]
Nanostructuring of metal surfaces by high fluxes of low energy He ion irradiation
Irem Tanyeli1, Laurent Marot2, Mauritius_C. M. van de Sanden1, Gregory de Temmerman1
(1FOM Institute DIFFER, 2University of Basel, Department of Physics)
Room A Night Session
(18:00–20:00)
Coordinator: Dr. Vanni Antoni (CNR)
Stategies to realize safe and secure world by using the plasma technology
― 36 ―
Thursday, February 6, 2014
Main Hall (3F) Plenary B (8:30–10:00)
[Prenary B]
Chair: Prof. Toyoda (Nagoya Univ.)
Plasma-surface interactions with complex materials: inorganic, liquid and organic (living)
surfaces
Mark J. Kushner1
(1University of Michigan)
Multi-Purpose Hall (2F) Poster
(10:30–12:30)
[6P-AM-S01-P01] Temporal- and Spatial Ion Distribution of Carbon Shunting Arc
Koichi Takaki1, Takumi Konishi1, Ryota Mikawa1, Kazunori Takahashi2, Ken Yukimura1,3
(1Iwate University, 2Tohoku University, 3National Institute of Advanced Industrial Science and
Technology)
[6P-AM-S01-P02] Development of new device for producing ZnO based on Coulomb recombination process
Masayoshi Yamamoto1, Haruhiko Himura1, Naruhiro Mizuike1, Akira Kiyohara1, Akio Sanpei,
Shigefumi Okada2, Sadao Masamune1
(1Kyoto Institute of Technology, 2Osaka University)
[6P-AM-S01-P03] Kinetics of the thin film preparation by sputtering deposition using powder target
Hiroharu Kawasaki1, Yoshiaki Suda1, Tamiko Ohshima1, Yoshihito Yagyu1, Takeshi Ihara1
(1Sasebo National College of Technology)
[6P-AM-S01-P04] Development of RF magnetron sputtering plasma by rotating racetrack-shaped rubber
magnet for target uniform utilization
Shohei Tsuruta1, Yasunori Ohtsu1
(1Saga University)
[6P-AM-S01-P05] Characteristics of capacitively coupled collisional plasma with RF ring-shaped hollow
electrode
Naoki Matsumoto1, Yasunori Ohtsu1
(1Saga University)
[6P-AM-S01-P06] Research on Spatial Distribution Control of Electric Fields Radiated from a Slot Antenna in
Microwave-Excited Plasma
Kazuhiro Kobayashi1, Yasuyoshi Yasaka1
(1Kobe University)
[6P-AM-S01-P07] Research on Producing Large-Diameter Microwave Plasmas and Controlling Distributions
Using the Antenna Emission Electric Field Characteristic
Ryo Naruiwa1, Yasuyoshi Yasaka1
(1Kobe University)
[6P-AM-S01-P08] Meter-Scale Production of Atmospheric Pressure Microwave Plasma by Travelling Wave
Haruka Suzuki1, Suguru Nakano1, Hitoshi Itoh2,3, Makoto Sekine1,2, Masaru Hori1,2, Hirotaka Toyoda
― 37 ―
(1Department of Electronic Engineering and Computer Science, Nagoya University, 2Plasma
Nanotechnology Research Center, Nagoya University, 3Tokyo Electron Limited)
[6P-AM-S01-P09] A Production of Low Electron-Temperature and High Density Plasma
by using a Grid-Cage Electrode for RF Discharge
Satoru Iizuka1, Takuma Gohda1, Kohgi Kato1
(1Tohoku University)
[6P-AM-S01-P10] Simulation of a Very High Frequency Plasma Produced by Balanced Power Feeding
Kohei Ogiwara1, Weiting Chen1, Kiichiro Uchino1, Yoshinobu Kawai1
(1Kyushu University)
[6P-AM-S01-P11] A high power FET-based radiofrequency plasma source for a negative hydrogen ion source
Shota Komizunai1, Kohei Oikawa1, Yuta Saito1, Kazunori Takahashi1, Akira Ando1
(1Department of Electrical Engineering, Tohoku University)
[6P-AM-S01-P12] Measurements of the electron density and temperature in an ion source of the low energy ion
beam system
Akihisa Nakamiya1,2, Yutaka Fujiwara1,2, Hajime Sakakita1,2, Yoichi Hirano2, Satoru Kiyama2,
Haruhisa Koguchi2
(1University of Tsukuba, 2National Institute of Advanced Industrial Science and Technology)
[6P-AM-S01-P13] Profile Measurements of Electron Temperature and Space Potential at a Self-Focusing State
in High-Current-Density and Low-Energy Ion Beam
Yutaka Fujiwara1,2, Hajime Sakakita1,2, Yoichi Hirano2,3, Satoru Kiyama2, Akihisa Nakamiya1,2,
Haruhisa Koguchi2
(1University of Tsukuba, 2National Institute of Advanced Industrial Science and Technology (AIST),
3
Nihon University)
[6P-AM-S06-P14] Nitriding of Pure Titanium using Pulsed-Arc Atmospheric-Pressure Plasma Jet
Yuki Yoshimitsu1, Ryuta Ichiki1, Shogo Kanda1, Masashi Yoshida2, Shuichi Akamine1, Seiji Kanazawa1
(1Oita University, 2Shizuoka Institute of Science and Technology)
[6P-AM-S06-P15] Low-temperature Plasma Nitriding of Cold Sprayed AISI 316L Coating by Laser Remelting
Shinichiro Adachi1, Nobuhiro Ueda1
(1Technology Research Institute of Osaka Prefecture)
[6P-AM-S06-P16] Reduction Treatment of KSrPO4:Eu Phosphor by Inductively Coupled Plasma
Masuo Takachi1, Kohei Ymagami1, Kazumasa Takahashi1, Toru Sasaki1, Takashi Kikuchi1,
Ariyuki Kato1
(1Nagaoka University of Technology)
[6P-AM-S06-P17] In-situ monitoring of the GaN surface under the exposure of a low-pressure inductivelycoupled plasma.
Daisuke Ogawa1, Tatsufumi Goto1, Takahiro Yamada1, Yohei Ueda1, Keiji Nakamura1
(1Chubu University)
[6P-AM-S06-P18] Recovery of Plasma-induced Damage in GaN by In situ Radical Exposure
Makoto Sekine1, Zecheng Liu1, Shang Chen1, Yi Lu1, Ryosuke Kometani1, Kenji Ishikawa1,
Hiroyuki Kano2, Keigo Takeda1, Hiroki Kondo1, Masaru Hori1
(1Nagoya University, 2Nu-Eco Eng. Co., Ltd.)
[6P-AM-S06-P19] Effect of properties on AZ31B Mg alloy treated by Electrolytic Plasma Processing in
electrolytes included different compositions
Keun-young Park1, Sung-Jae Kim1, Hyeon-Ji Cho1, Eun Ji Kim1, Bon-Heun Koo1
(1Changwon National University)
― 38 ―
[6P-AM-S06-P20] pH dependent properties of Al7075 alloys prepared by Electrolytic plasma processing (EPP)
Yeong Seung Jeong1, BobHeun Koo1, SungJae Kim1, MoonYoul Ryu1, SuKyung Cha1, Nam Hyun Kim1
(1Changwon National University)
[6P-AM-S06-P21] Atomic Composition on Surface and I-V Characteristics of Pr1-xCaxMnO3 treated in H2
Plasmas
Takuya Ishida1, Kazuo Takahashi1, Toshihiro Nakamura2
(1Department of Electronics, Kyoto Institute of Technology, 2Division of Electronics and Applied
Physics, Osaka Electro-Communication Univercity)
[6P-AM-S06-P22] Effects of carbon sources on deposition process of amorphous carbon film with plasma
enhanced chemical vapor deposition, investigated with infrared spectroscopy: benzene and
naphthalene
Masaniri Shinohara1, Shohei Yagi1, Yujiro Taniguchi1, Naoki Maruno1, Yoshinobu Matsuda1,
Hiroshi Fujiyama1
(1Nagasaki University)
[6P-AM-S06-P23] Reactions of Plasma with Self-Assemble Monolayer for plasma-bio application
Naoki Maruno1, Yuta Yoshida1, Yujiro Taniguchi1, Shohei Yagi1, Masanori Shinohara1,
Yoshinobu Matsuda1, Hiroshi Fujiyama1
(1Nagasaki University)
[6P-AM-S06-P24] Improving Antibiofouling Property of Microfiltration Membranes by Plasma-Induced
Hydrophilic Surface Modifications
Young Haeng Lee1, Yangsoo Han1,2, Jae-Chang Cho2, Myung-Hwa Jung3
(1Korea Institute of Science and Technology, 2Hankuk University of Foreign Studies,
3
Sogang University)
[6P-AM-S06-P25] Study on the characteristics of plasma-polymer thin films using various precursors for low-k
applications
Dong-Woo Ju1, Ki-Hwan Hwang1, Hyeon-Jin Seo2, Jung-Hoon Yu2, Jin-Su Lee2, So-Hyeon Jeon2,
Sang-Ho Yun3, Jin-Hyo Boo2
(1Sungkyunkwan University)
[6P-AM-S06-P26] Investigation of non-uniformity in nitriding-quenching of steels using atmospheric-pressure
plasma jet
Takashi Inoue1, Ryuta Ichiki1, Hirohumi Yamamoto1, Shuichi Akamine1, Masashi Yoshida2,
Seiji Kanazawa1
(1Oita University, 2Shizuoka Institute of Science and Technology)
[6P-AM-S08-P27] Fabrication of wrinkled graphene-diamond composite films and their field emission
properties
Chunyuan Lu1
(1Pusan National University)
[6P-AM-S08-P28] Fabrication of graphene films using microwave plasma-enhanced CVD in surface wave mode
Yohei Kashima1, Mineo Hiramatsu1, Hiroki Kondo2, Masaru Hori2
(1Meijo University of Electrical and Electronic Engineering, 2Nagoya University of Electrical
Engineering and Computer Science)
[6P-AM-S08-P29] Properties of ZnO Film Deposited by Plasma-Assisted Mist Chemical Vapor Deposition
Kosuke Takenaka1, Yuichi Setsuhara1
(1Osaka University)
― 39 ―
[6P-AM-S08-P30] Structual control of SiC thick film by fast rate mesoplasma CVD
Shotaro Atsumi1, Makoto Kambara1, Takuya Akiyama1
(1Tokyo University of Engineering)
[6P-AM-S08-P31] Enhancing the Electron Field Emission Properties of Ultra-nanocrystalline Diamond Films
by Growing on Textured Si Substrate
Wen-Ching Shih1,2, Pin-Chang Huang1, I-Nan Lin2
(1Tatung University, 2Tamkang University)
[6P-AM-S08-P32] Deposition of Crystalline Ge Nanoparticle Films Varying H2 Dilution Ratio Using High
Pressure rf Magnetron Sputtering
Shinji Hashimoto1, Daiki Ichida1, Giichiro Uchida2, Hyunwoong Seo1, Kunihiro Kamataki3,
Naho Itagaki1,4, Kazunori Koga1, Masaharu Shiratani1
(1Graduate School of Information Science and Electrial Engineering, Kyushu University, 2Joining
and Welding Reasearch Institute, Osaka University, 3Faculty of Arts and Science, Kyushu University,
4
PRESTO, Japan Science and Technology Agency)
[6P-AM-S08-P33] Fabrication of size-controlled Ge nanoparticle films varying gas flow rate using high pressure
rf magnetron sputtering method
Daiki Ichida1, Shinji Hashimoto1, Giichiro Uchida2, Hyunwoong Seo1, Daisuke Yamashita1,
Kunihiro Kamataki3, Naho Itagaki1,4, Kazunori Koga1, Masaharu Shiratani1
(1Graduate School of Information Science and Electrical Engineering, Kyushu University, 2Jointing
and Welding Research Institute, Osaka University, 3Faculty of Arts and Science, Kyushu University,
4
PRESTO, Japan Science and Technology Agency)
[6P-AM-S08-P34] Application research of nano-multilayer coatings for high-speed dry cutting tools and precise
molds
Shi Hong Zhang1
(1Anhui University of Technology)
[6P-AM-S08-P35] Combinatorial evaluation of optical properties of crystalline Si nanoparticle embedded Si
films deposited by a multi-hollow discharge plasma CVD method
Yoshinori Kanemitsu1, Giichiro Uchida2, Daiki Ichida1, Hyunwoong Seo1, Kunihiro Kamataki3,
Naho Itagaki1,4, Kazunori Koga1, Masaharu Shiratani1
(1Graduate School of Information Science and Electrical Engineering, Kyushu University, 2Jointing and
Welding Research Institute, Osaka University, 3Faculty of Arts and Science, Kyushu University, 4Presto,
Japan Science and Technology Agency)
[6P-AM-S08-P36] Effects of amplitude modulation on deposition of hydrogenated amorphous silicon films
using multi-Hollow discharge plasma CVD method
Yoshihiro Torigoe1, Yuji Hashimoto2, Susumu Toko2, Yeonwon Kim2, Daisuke Yamashita2,
Hyunwoong Seo2, Naho Itagaki2, Kunihiro Kamataki2, Kazunori Koga2, Masaharu Shiratani2
(1Kyushu University of Engeering, 2Kyushu University of Information Science and Electrical
Engeering)
[6P-AM-S08-P37] Substrate temperature dependence of hydrogen content of a-Si:H film deposited with a
cluster-eliminating filter
Yuji Hashimoto1, Susumu Toko1, Hyunwoong Seo1, Kunihiro Kamataki1, Naho Itagaki1,
Kazunori Koga1, Masaharu Shiratani1
(1Graduate School of Information Science and Electrical Engineering, Kyushu University)
[6P-AM-S10-P38] Morphology Changes in Multi-Walled Carbon Nanotubes Synthesized by Arc Plasma under
High Magnetic Fields up to 5 T
Haruo Yokomichi1, Masaki Ichihara2
(1Toyama Prefectural University, 2Hosei University)
― 40 ―
[6P-AM-S10-P39] Comparison of gas sensors based on oxygen plasma treated carbon nanotube network films
with different semiconducting content
Hyun Pyo Hong1, Seoung Woo Ham1, Chan Won Park2, Nam Ki Min1
(1Korea University, 2Kangwon National University)
[6P-AM-S10-P40] Growth of carbon nanotubes on surface of metal paticles in C4F8 - added CH4/H2 Plasmas(II)
Masanari Kuroda1, Kazuo Takahashi1, Koji Nishio2
(1Department of Electronics, Kyoto Institute of Technology, 2Department of Mathematical and Physical
Sciences, Kyoto Institute of Technology)
[6P-AM-S10-P41] Evaluation of field emission properties of vertically aligned carbon nanotubes
Yuya Fujiwara1, Yasuaki Hayashi1
(1Kyoto Institute of Technology )
[6P-AM-S10-P42] Removal mechanism of cesium ion from aqueous solution with bentoniteand carbon
nanotube-based composites
Shubin Yang1,2, Chou Han3, Xiangke Wang2, Masaaki Nagatsu1,3
(1Graduate School of Science and Technology, Shizuoka University, Japan., 2Institute of Plasma
Physics, Chinese Academy of Science, China, 3Graduate School of Engineering, Shizuoka University,
Japan)
[6P-AM-S10-P43] Mechanism of surface Functionalization onto Graphite-Encapsulated Magnetic
Nanoparticles Using RF Excited NH3 Plasma
Han Chou1, Enbo Yang2, Masaaki Nagatsu1,2
(1Graduate School of Engineering, Shizuoka University, 2Graduate School of Science and Technology,
Shizuoka University)
[6P-AM-S10-P44] Doping process of Nitrogen Atom into Graphene by the First Principles Molecular Dynamics
Yasuhiro Oda1, Atushi M Ito1, Arimichi Takayama1, Hiroaki Nakamura1,2
(1National Institute for Fusion Science, 2Nagoya University)
[6P-AM-S10-P45] Synthesis of Gold Nanoparticles by Radiofrequency Plasmas in Aqueous Solution
Shoma Mizukuni1, Yuta Fuseno1, Shinobu Mukasa1, Hiromichi Toyota1, Shinfuku Nomura1,
Ayato Kawashima2, Tsunehiro Maehara1
(1Graduate School of Science and Engineering, Ehime University, 2Faculty of Agriculture, Ehime
University)
[6P-AM-S10-P46] Dielectric barrier discharge (DBD) plasma mediated synthesis of few oxide nanomaterials
and their characterization
Ananth Antony1, Mok Young Sun1
(1Jeju National University)
[6P-AM-S10-P47] Etching of MoS2 by the inward plasma
Jun Miyawaki1, Tetsuo Shimizu1, Toshitaka Kubo1, Miyuki Tanaka1, Satoshi Takahashi1,2,
Shun'ichiro Shimbori2, Hiroshi Tokumoto1,2, Atsushi Ando3
(1Nanosystem Research Institute, AIST, 2Sanyu Co., Ltd., 3Nanoelectronics Research Institute, AIST)
[6P-AM-S10-P48] High Efficient Generation of Magnetized Microwave Plasmas for Minimal Fablication of
Semiconductor Devices
Koji Sakai1, Hiroshi Fujiyama1, Masanori Shinohara1
(1Nagasaki University)
[6P-AM-S10-P49] Optical Observations of Post-Discharge Phenomena of Laser-Triggered Discharge Produced
Plasma for EUVL
Soowon Lim1, Peng Lu1, Seiya Kitajima1, Takashi Sakugawa1, Hidenori Akiyama1, Sunao Katsuki1
― 41 ―
(1Kumamoto University)
[6P-AM-S10-P50] The fabrication of new spin device by Fe3Si/FeSi2/Fe3Si trilayer film
Ken-ichiro Sakai1,2, Yuki Asai1, Yuta Noda1, Kaoru Takeda3, Tsuyoshi Yoshitake1
(1Kyushu University, 2Kurume National College of Technology, 3Fukuoka Institute of Technology)
[6P-AM-S10-P51] Electrical Conduction and Bipolar Switching Properties in Transparent Manganese Oxide
Resistive Random Access Memory (RRAM) Devices
Kai-Huang Chen1, Chien-Min Cheng2, Yu-Zung Chiou2, Wen-Shan Chen 2, Chun-Kai Wang2,
Da-Huei Lee2, Jing Lee2
(1Tung-Fang Design Institude, 2Southern Taiwan University of Science and Technology)
[6P-AM-SPD-P01] Effect of Atmospheric Pressure Dielectric Barrier Discharge Plasma on Inactivation of
Penicillium digitatum Spore on Citrus unshiu
Yoshihito Yagyu1, Naoki Matsumoto1, Nobuya Hayashi2, Takashi Yamasaki1, Hiroharu Kawasaki1,
Tamiko Ohshima1, Takeshi Ihara1, Yoshiaki Suda1
(1Sasebo National College of Technology, 2Kyushu University)
[6P-AM-SPD-P02] Microwave plasma with localized power absorption: from elementary sources to device and
applications.
Alexandre Bes1, Long Tan Phan1, Stephane Bechu1, Jacques Pelletier1, Ana Lacoste1
(1CNRS LPSC)
[6P-AM-SPD-P03] Electroless Cu plating on Poly(ethylene 2,6-naphthalate) with Surface Modification by
Oxygen Plasma
Akihiro Ikeda1, Tanemasa Asano1
(1Kyushu Univ.)
[6P-AM-SPD-P04] Modelling of High-Intensity Laser Driven Reconnection in a Hall MHD Regime
Jiaqi Wang1, Jiayong Zhong2, Xiaogang Wang3, Liwei Liu1
(1Sichuan University, 2National Astronomical Observatorie, 3Peking University)
[6P-AM-SPD-P05] Evaluation of the loss of F during the Si chemical dry etching using the reaction of F2 + NO
→ F + FNO
Satomi Tajima1, Toshio Hayashi1, Koji Yamakawa2, Kenji Ishikawa1, Minoru Sasaki3, Shoji Den2,
Makoto Sekine1, Masaru Hori1
(1Nagoya University, 2Katagiri Engineering Co., LTD, 3Toyota Technological Institute)
[6P-AM-SPD-P06] Isolation of neutral species generated from the Ar/O2 non-equilibrium atmospheric-pressure
micro hollow-cathode discharge for the modification of the A549 cells
Satomi Tajima1, Makoto Sekine1, Hiroshi Hashizume2, Masafumi Ito2, Takayuki Ohta2, Keigo Takeda1,
Kenji Ishikawa1, Masaru Hori1
(1Nagoya University, 2Meijo University)
Room A Session 1, 14
[6A-PM-I1]
Invited
(13:30–15:10)
Chair: Prof. Tochikubo (TMU)
Magnetron sputtering deposition of catalysts for the growth control of carbon nanotubes
Hiroshi Furuta1,2
(1Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, 2Institute
for Nanotechnology, Kochi University of Technology)
― 42 ―
[6A-PM-O1]
Carbon Fiber as Hot Cathode Filament for Carbon-based Material Synthesis
Magdaleno Jr R. Vasquez1, Henry J. Ramos2, Motoi Wada3
(1Department of Mining, Metallurgical, and Materials Engineering, College of Engineering, University
of the Philippines, Diliman, Quezon City 1101 Philippines , 2National Institute of Physics, University of
the Philippines, Diliman, Quezon City 1101 Philippines, 3Graduate School of Science and Engineering,
Doshisha University, Kyotanabe, Kyoto 610-0321, Japan)
[6A-PM-O2]
Ablation process by Nanosecond Laser Pulses in Supercritical CO2 Medium
Motonobu Goto1, Siti Machmudah1,2, Wahyudiono1, Noriharu Takada1, Koichi Sasaki3
(1Nagoya University, 2Sepuluh Nopember Institute of Technology, 3Hokkaido University)
[6A-PM-O3]
Temperature on Surface of Dust Particles Determined by Spectroscopic Method and Verified by
Measurement of Ion Density and Electron Temperature in RF Plasmas
Kazuo Takahashi1
(1Kyoto Institute of Technology)
[6A-PM-O4]
On the contribution of electrons, Ar(3P), H2O+, and H3O+ to production of OH(A) in a micro
DBD of Ar/H2O
Tatsuru Shirafuji1, Tomoyuki Murakami2
(1Osaka City University, 2Tokyo Institute of Technology)
[6A-PM-O5]
Mechanical Response in Nanoscale TiB2/ZrCuNiAl Multilayer Coatings
Jenq-Gong Duh1, Yu-Chen Chan1
(1National Tsing Hua University)
Multi-Purpose Hall (2F) Poster
(15:30–17:30)
[6P-PM-S04-P01] The study of hearth coil dependence of flux distribution in reactive plasma deposition
equipment by hybrid particle in cell simulation
Masaru Miyashita1, Hisashi Kitami1, Toshiyuki Sakemi1, Yasushi Aoki1, Takanori Kato1
(1Sumitomo Heavy Industries, Ltd.)
[6P-PM-S04-P02] Particle-in-cell simulation for photon-enhanced thermionic emission energy converter with
contact ionization rate enhancement
Haruki Takao1, Mark A Cappelli2, Tsuyohito Ito1
(1Osaka University, 2Stanford University)
[6P-PM-S04-P03] 2D PIC modeling of the EUV induced hydrogen plasma and comparison to the observed
carbon etching rate
Dmitry Igorevich Astakhov1, Wim_J Goedheer1, Dmitry_V Lopaev2, Vladimir_V Ivanov3,
Vladimir_M Krivtsun3, Oleg Yakushev3, Konstantin_N Koshelev3, Fred Bijkerk1,4
(1FOM Institute DIFFER - Dutch Institute for Fundamental Energy Research, 2Institute of Nuclear
Physics, Moscow State University, 3Institute for Spectroscopy, Russian Academy of Sciences, 4MESA+
Institute for Nanotechnology, University of Twente)
[6P-PM-S04-P04] Electromagnetic effect in capacitively coupled plasma
Hyowon Bae1, Ho-Jun Lee1, Hae June Lee1
(1Pusan National University)
― 43 ―
[6P-PM-S04-P05] Studies on hyper simulation for a new control of microwave-excited plasmas
Rie Taniguchi4, Yasuyoshi Yasaka4, Hiromasa Takeno4
(1Kobe University, 2Kobe University, 3Kobe University)
[6P-PM-S04-P06] Radial sustenance of dense dusty plasmas
Dmitry Nikolaevich Polyakov1, Valeria V. Shumova1, Leonid M. Vasilyak1
(1Joint Institute for High Temperatures)
[6P-PM-S04-P08] Relativistic ponderomotive self-focusing of electromagnetic beam in cold quantum plasma
under plasma density transition
Sonu Sen1, Meenu Asthana Varshney2, Dinesh Varshney3
(1Department of Engineering Physics, Indore Institute of Science and Technology, Indore 453331,
India., 2Department of Physics, M. B. Khalsa College, Indore–452002, India., 3School of Physics, Devi
Ahilya University, Khandwa road Campus, Indore 452001, India.)
[6P-PM-S04-P09] Thermal-flow characteristics of high-current vacuum arcs of the axial magnetic field contacts
in the vacuum interrupter
Youn-Jea Kim1, Hyeon-Seok Seo2
(1School of Mechanical Engineeirng, Sungkyunkwan Univ., 2Graduate School of Mechanical
Engineeirng, Sungkyunkwan Univ.)
[6P-PM-S09-P10] Gas-liquid plasma discharge in bubbled water and application to sterilization
Ryosuke Ohno1, Guanyang Tang1, Kazunori Takahashi1, Akira Ando1
(1Department of Electrical Engineering, Tohoku University)
[6P-PM-S09-P11] Large-scale synthesis of nanographene using in-liquid plasma and chemical reduction
process
Jerome Jolibois1, Jagath Kularatne1, Hiroyuki Kano2, Masafumi Ito3, Mineo Hiramatsu3, Hiroki Kondo1,
Kenji Ishikawa1, Masaru Hori
(1Nagoya University, 2NU Eco Engineering Co. Ltd., 3Meijo University)
[6P-PM-S09-P12] Effect of power supply on metal emission intensity induced by non-equilibrium atmospheric
pressure plasma
Jagath S. Kularatne1, Jerome Jolibois1, Takayuki Ohta2, Masafumi Ito2, Hiroyuki Kano3, Keigo Takeda1,
Hiroki Kondo1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori
(1Nagoya University, 2Meijo University, 3NU Eco Engineering Co.Ltd)
[6P-PM-S09-P13] Sterilization effect by high frequency plasma using air
Tomomasa Itarashiki1,2, Nobuya Hayashi2, Akira Yonesu3
(1Kyusyu University, 2Kyusyu University, 3University of Ryukyus)
[6P-PM-S09-P14] Polymerization of maleic anhydride induced by non-equilibrium atmospheric pressure
plasma
Jun Yan1, Shin-ichi Kuroda2, Katsuhiko Hosoi3
(1Department of Production Science and Technology, Gunma University, 2Faculty of Science and
Technology, Gunma University, 3Cresur Corporation)
[6P-PM-S09-P15] Sterilization of micro-organism spores using plasma excited gas in atmospheric pressure
Kei Matsui1, Noriaki Ikenaga1, Noriyuki Sakudo1
(1Kanazawa Institute of Technology Research Laboratory for Integrated Technological Systems)
[6P-PM-S09-P16] Study on inactivation of marine microorganisms by dielectric barrier discharge utilizing
hydrogen mixed buffer gas
Tadahiro Horinouchi1, Satoru Hida1, Kazumasa Takahashi1, Toru Sasaki1, Takashi Kikuchi1,
Tsukasa Aso, Nob. Harada1
― 44 ―
(1Nagaoka University of Technology)
[6P-PM-S09-P17] Optical emission characteristics of atmospheric-pressure plasma jet for plasma biomedicine
Giichiro Uchida1, Kosuke Takenaka1, Atsushi Miyazaki1, Kazufumi Kawabata1, Yuichi Setsuhara1,
Masaru Hori2
(1Osaka University, 2Nagoya University)
[6P-PM-S09-P18] The influence of the repetition frequency on generation of atmospheric-pressure nonequilibrium plasma by 500-ns rectangular voltage pulses
Toshiki Nakano1, Takeshi Kitajima1, Hiroyuki Shirai1
(1National Defense Academy)
[6P-PM-S09-P19] Analysis of ions formed in low-frequency atmospheric-pressure plasma jets
Tomoko Ito1, Kanako Sekimoto2, Satoshi Hamaguchi1
(1Center for Atomic and Molecular Technologies, Osaka University, 2Yokohama City University)
[6P-PM-S09-P20] Characterization of helium cryoplasmas below 60 K with continuous gas temperature control
Hitoshi Muneoka1, Keiichiro Urabe1, Jai_H Choi1, Stauss Sven1, Kazuo Terashima1
(1The University of Tokyo)
[6P-PM-S09-P21] Diagnostics of atmospheric pressure plasmas using laser thomson scattering
Kentaro Tomita1, Nima Bolouki1, Kazutaka Nishikawa1, Kazuhiko Nagai, Yukihiko Yamagata,
Kiichiro Uchino
(1Interdisciplinary graduate school of engineering and sciences, Kyushu University)
[6P-PM-S13-P22] LIF imaging of OH radicals and their collisional quenching
in gas-liquid interface helium dc glow plasma
Hiroaki Ishigame1, Shusuke Nishiyama1, Koichi Sasaki1
(1Hokkaido University of Engineering)
[6P-PM-S13-P23] Temporal variation of OH density in DBD-enhanced premixed flame measured by planer
laser-induced fluorescence
Kazunori Zaima1, Koichi Sasaki1
(1Hokkaido University)
[6P-PM-S13-P24] Development of misty plasmas for sterilization
Atsushi Yuri1, Kazuo Takahashi1
(1Kyoto Institute of Technology)
[6P-PM-S13-P25] Effects of excited Ar species in atmospheric pressure Ar plasmas on G. Stearothermophilus
spores
Jumpei Mano1, Kazuo Takahashi1
(1Kyoto Institute of Technology)
[6P-PM-S13-P26] Microwave plasma diagnostics during sintering nano-particle paste for Ag film formation
Kazuya Kodani2, Hideo Sugai1, Kimitaka Kato1, Hideyuki Nanya1, Tsuyoshi Honda2
(1Chubu University, 2Nissin Inc.)
[6P-PM-S14-P27] XRR analysis on multi-layer structure of DLC film on Si substrate by single pulse RF plasma
CVD
Toru Harigai1, Yuki Yasuoka1, Yoshiaki Kakuta1, Jun-Seok Oh1, Hiroshi Furuta1,2, Akimitsu Hatta1,2
(1Department of Electronic and Photonic Systems Engineering, Kochi University of Technology,
2
Institute for Nanotechnology, Kochi University of Technology)
― 45 ―
[6P-PM-S14-P28] In-situ conductance measurement of Ni ultra-thin film in sputtering deposition for CNTs
growth
Yuji Kusumoto1, Kazuki Sekiya1, Hirofumi Koji1, Hiroshi Furuta1,2, Akimitsu Hatta1,2
(1Kochi University of Technol., 2Institute for Nanotechnol., Kochi University of Technol.)
[6P-PM-S14-P29] Investigation of effect of microwave on bacteria membrane adsorbing carbon nanotube
Michihiko Nakano1, Junya Suehiro1
(1Kyushu University)
[6P-PM-S14-P30] Plasma surface functionalization of graphite-encapsulated gold nanoparticles prepared by
DC arc discharge
Enbo Yang1, Han Chou1, Masaaki Nagatsu1
(1Shizuoka University)
[6P-PM-S14-P31] Quantification of amine groups introduced on the surface of zinc oxide nanoparticles by Ar/
NH3 plasma processing
Mihai Alexandru Ciolan1,3, Iuliana Motrescu2, Dumitru Luca3, Masaaki Nagatsu1
(1Graduate School of Science and Technology, Shizuoka University, 2Research Institute of Electronics,
Shizuoka University, 3Department of Physics, “Alexandru Ioan Cuza” University, 11, Carol I blvd.,
700506-Iasi, Romania.)
[6P-PM-S14-P32] Prebiotic synthesis by electric discharge at pressurized gas/aqueous solution
interface with metal salt
Yui Hayashi1, Wahyudiono1, Siti Machmudah1,2, Motonobu Goto2
(1Nagoya University, 2Sepuluh Nopember Institute of Technology)
[6P-PM-S14-P33] Elucidation of reaction pathway and mechanism for alanylalanine elongation under pulsed
discharge plasma in water
Yuka Sakai1, Atsusi Nagira1, Mitsuru Sasaki1, Armando T. Quitain1, Motonobu Goto2,
Kunio Kawamura3
(1Kumamoto University, 2Nagoya University, 3Hiroshima Shudo University)
[6P-PM-S14-P34] Observation of the transient state of the femtosecond laser ablation phenomena
on various metals
Takuro Tomita1, Noboru Hasegawa2, Masaharu Nishikino2, Takashi Eyama1, Yasuo Minami3,
Ryota Takei3, Motoyoshi Baba3, Takeshi Kaihori2, Toshimasa Morita2, Yusuke Hirano2,
Tetsuya Kawachi2, Mitsuru Yamagiwa2, Tohru Suemoto3
(1The University of Tokushima, 2Japan Atomic Energy Agency, 3The University of Tokyo)
[6P-PM-S14-P35] A microplasma reactor chip for utilizing gas-gas interface
Minoru Sasaki1, Masahiro Hashimoto1, Katsuki Tsukasaki1, Ryoto Sato1, Shinya Kumagai1
(1Toyota Technological Institute)
[6P-PM-SPD-P01] Real-Time Endpoint Detection of Small Exposed Area Dielectric Films in Plasma Etching
with Modified Principal Component Analysis
Heeyeop Chae1,2, Haegyu Jang1, Hak-Seung Lee2
(1SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University (SKKU),
2
School of Chemical Engineering, Sungkyunkwan University (SKKU))
[6P-PM-SPD-P02] Multi-GPUs based 3D feature profile simulation for fluorocarbon plasma etch process
Deog-Gyun Cho1, Kwang-Sung Choi1, Yeong-Geun Yook1, Se-A Lee1, Poo-Reum Chun1,
Dong-Hun Yu1,3, Won-Seok Chang1,2, Yeon-Ho Im1
(1Chonbuk National University, 2Plasma Technology Research Center, National Fusion Research
Institute, 3Kyung Won Tech. Inc)
― 46 ―
[6P-PM-SPD-P03] Changes of Electrical Conductivity and Temperature Caused by Cathode Erosion in a FreeBurning Argon Arc
Hong-Pil Jeon1, Youn-Jea Kim2, Jong-Chul Lee1
(1Gangneung-Wonju National University, 2Sungkyunkwan University)
[6P-PM-SPD-P04] Synthesis of CZTS Nano Particle by Thermal Decomposition for Low Cost Solar Cell
Fabrication
Sooho Lee1, Dongwuk Kim1, Jaehyeong Lee1
(1Sungkyunkwan University)
[6P-PM-SPD-P05] Super-hydrophobic treatment of ship hull surface by atmospheric pressure plasmas for anticorrosion and high loading capacity
Sooryun Noh2, Hyebin Choi1, Gyubeom Kim1, Ayoung Mun1, Se Youn Moon3
(1Chonbuk National University)
[6P-PM-SPD-P06] Fast hydrophobic surface formation by atmospheric pressure He/CH4 plasmas
Sooryun Noh1, Se Youn Moon2
(1Chonbuk National University, 2High-enthalpy Plasma Research Center, Chonbuk National
University)
[6P-PM-SPD-P07] Plasma-induced graft copolymerization of novel phosphorous-nitrogen containing flame
retardant onto cotton
Boonchoat Paosawatyanyong1, Katahut Thanomwong2, Worawan Bhanthumnavin3
(1Department of Physics, Faculty of Science, Chulalongkorn University, Bangkok 10330, Thailand,
2
Program of Petrochemistry and Polymer Science, Faculty of Science, Chulalongkorn University,
Bangkok 10330, Thailand, 3Department of Chemistry, Faculty of Science, Chulalongkorn University,
Bangkok 10330, Thailand)
[6P-PM-SPD-P08] Surface nano-modification of cellulose membrane by oxygen plasma treatment
Boonchoat Paosawatyanyong1,2, Worawan Bhanthumnavin3, Pikul Wanichapichart4
(1Department of Physics, Faculty of Science, Chulalongkorn University, Bangkok 10330, Thailand,
2
ThEP Center, Commission on Higher Education, Thailand, 3Department of Chemistry, Faculty of
Science, Chulalongkorn University, Bangkok 10330, Thailand, 4Membrane Science and Technology
Research Center, Faculty of Science, Prince of Songkla University, Songkhla, Thailand)
[6P-PM-SPD-P09] A study of optimal dye-coating conditions for DSSCs using the repeated process of dye
adsorption
Young Ho Seo1, Eun Chang Choi1, Byungyou Hong1
(1Sungkyunkwan University)
[6P-PM-SPD-P10] Effect of boron-rich layer etched-back and oxygen treatment in boron diffused emitter for
crystalline silicon solar cell applications
Jungmo Kim1, Seunghwan Lee1, Sungyoun Chung1, Sungjae Bong1, Jiwoong Kim1, Taeyong Kim,
Cheolmin Park2, Minkyu Ju1, Nagarajan Balaji2, Junsin Yi1,2
(1College of Information and Communication Engineering, Sungkyunkwan University, 2Department of
Energy Science, Sungkyunkwan University)
[6P-PM-SPD-P11] Passivation effect of SiO2 / SiNx double-stacked layer for high efficiency crystalline silicon
solar cell applications
Seunghwan Lee1, Jungmo Kim1, Sungyoun Chung1, Jiwoong Kim1, Sungjae Bong1, Taeyong Kim1,
Cheolmin Park2, Balaji Nagarajan2, Minkyu Ju1, Junsin Yi1,2
(1College of Information and Communication Engineering, Sungkyunkwan University, 2Department of
Energy Science, Sungkyunkwan University)
― 47 ―
[6P-PM-SPD-P12] Influence of iron oxide nanoparticle in different layer of organic solar cell on the roughness
of surface
Eung-Kyu Park1, Jae-Hyoung Kim1, Min-Ho Park1, Ki-Tae Lim1, Yong-Sang Kim1
(1Dept. of Electronic and Electrical Engineering, Sungkyunkwan University)
[6P-PM-SPD-P13] Characteristics of P3HT:PCBM OSCs with cadmium selenide nanostructures
Jae-Hyoung Kim1, Ki-Tae Lim1, Eung-Kyu Park1, Rohit Chand1, Yong-Sang Kim1
(1Sungkyunkwan university of School of electronic and Electrical engineering)
[6P-PM-SPD-P14] Effect of post oxidation anneal on silicon surface passivation qualities in c-Si solar cells
Sungyoun Chung1, Nagarajan Balaji2, Cheolmin Park2, Minkyu Ju1, Jungmo Kim1, Seunghwan Lee1,
Junsin Yi1,2
(1College of Information and Communication Engineering, Sungkyunkwan University, 2Department of
Energy Science, Sungkyunkwan University)
[6P-PM-SPD-P15] Effect of DC pulse-biasing on the etching of magnetic tunneling junction using inductively
coupled plasma
Kyung Chae Yang1, Min Hwan Jeon2, Geun Young Yeom1,2
(1Department of Advanced Materials Science and Engineering, Sungkyunkwan University,
2
SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University)
[6P-PM-SPD-P16] The prospect of photovoltaic industry
Youn-Jung Lee1, Cheolmin Park1, Byung-Sung Kim1, SM Iftiquar1, Junsin Yi1
(1Sungkyunkwan University)
[6P-PM-SPD-P17] Fabrication method for high performance CIGS solar cells
Byoungdeog Choi1, Pyungho Choi1, Dohyun Baek1, Soonkon Kim1
(1Sungkyunkwan university)
[6P-PM-SPD-P18] Direct growth of vertically standing graphene on glass substrates by low-temperature
PECVD process
Yifei Ma1, Haegyu Jang1, Heeyeop Chae1
(1Sungkyunkwan University)
[6P-PM-SPD-P19] Spin-coated and thermally-evaporated silver films for SPR image sensor modules
Jung Han Son1, Dong Hun Lee1, Myung-Hyun Lee1
(1Sungkyunkwan University)
[6P-PM-SPD-P20] A study on the characteristics of CdS thin film of CIGS solar cell
Jae ha Cheon1, Jaehyeong Lee2, Chaehwan Jeong3
(1Photovoltaic System Engineering Sungkyunkwan University, 2School of Information and
Communication Engineering, Sungkyunkwan University, 3Applied Optics & Energy Research Group,
Korea Institute of Industrial Technology)
[6P-PM-SPD-P21] Growth and characterization of AZO thin film for Low Cost Applications
Donguk Kim1, Sooho Lee1, Jaehyeong Lee1
(1School of Electronic and Electrical Engineering, Sungkyunkwan University)
[6P-PM-SPD-P22] Durable hydrophobic films synthesized by controlling the plasma process of simple PECVD
Joon S. Lee1, JinXiang Piao1, Yoon S. Choi1, Jeon G. Han1
(1NU-SKKU Joint Institue for Plasma-Nano Materials, Sungkyunkwan University)
[6P-PM-SPD-P23] Integration and characterization of Ni(Co)WP film for metal capping layer in CMOS image
sensor
Eunmi Choi1, Yinhua Cui1, Areum Kim1, Seon Jea Lee1, Soon Hyeong Kwon1, Keunwon Kang1,
― 48 ―
Soyeon Park1, Sung Gyu Pyo1
(1Chung-Ang University)
[6P-PM-SPD-P24] Discharge channel formation in a self-pulsing transient spark
Je-Hyun Lee1, Dong-Hyun Kim1, Hae June Lee1, Ho-Jun Lee1
(1Pusan National University)
[6P-PM-SPD-P25] Surface treatment of Glass and PDMS using atmospheric-pressure plasma and analysis of
discharge characteristics
Kwon-Sang Seo1, Ju-Hong Cha1, Moon-Ki Han1, Chang-Seung Ha1, Dong-Hyun Kim1, Hae June Lee1,
Ho-Jun Lee1
(1Pusan National University)
[6P-PM-SPD-P26] Discharge characteristics of plasma jet operated in gas-mixture system for plasma
biomedicine
Jung-Yeol Lee1, Hyo Won Bae1, Ho-Jun Lee1, Hae June Lee1
(1Pusan National University)
[6P-PM-SPD-P27] Fabrication of hybrid nanofibers embedded with aligned multi-block nanorod(Au/Ni/Au/
Ppy) by electrospinning
SeungHyun Kim1, KukRo Yoon1
(1Hannam University of Chemistry)
[6P-PM-SPD-P28] Synthesis of ionic liquids as supporting electrolytes for non-aqueous vanadium redox flow
batteries
Min-Seok Oh1, Seong-Ho Choi1
(1Hannam University)
[6P-PM-SPD-P29] Effects of encapsulation on the current density - voltage characteristics of organic solar cells
Donggeun Jung1, Jaewon Lee1, Jihye Lee1, Beomhee Won1, Hoonbae Kim1, Soowon Kim1,
Wonjin Ban1, Sungruel Kwon1
(1Department of Physics, Institute of Basic Science, Brain Korea 21 Physics Research Division,
Sungkyunkwan University)
[6P-PM-SPD-P30] Variation of polymer latex shape according to the different etching process.
JungHoon Yu1, Sang-Hoon Nam1, Jin-Su Lee1, Sang H. Yun1,2, Jin-Hyo Boo1
(1Department of Chemistry and Institute of Basic Science, Sungkyunkwan University,
2
Surface Chemistry, Royal Institute of Technology)
Room B Session 10
[6B-PM-I1]
Invited
(13:30–15:10)
Chair: Prof. Ogino (Shizuoka Univ.)
Recent Progress on the Development of Atmospheric-Pressure Plasma Jet Assisted Processes for
Thin Film Deposition and Rapid Annealing
Cheng-che Jerry Hsu1, Chun-Min Hsu1, Hao-Ming Chang2, Shao-Tzu Lien2, Yao-Jhen Yang1, Jian Zhang
Chen2, I-Chun Cheng3
(1National Taiwan University, 2National Taiwan University, 3National Taiwan University)
[6B-PM-O1]
Influence of Coil-current Modulation for Induction Thermal Plasmas on Large Amount
Synthesized Al-doped TiO2 Nanopowder
Naoto Kodama1, Kentaro Kita1, Yasunori Tanaka1, Yoshihiko Uesugi1, Tatsuo Ishijima1, Shu Watanabe2,
Keitaro Nakamura2
― 49 ―
(1Kanazawa University , 2Research Center for Production and Technology, Nisshin Seifun Group Inc.)
[6B-PM-O2]
Effects of Electron Irradiation Energy on Synthesis of Gold-Nanoparticles Using Gas-Liquid
Interfacial Plasmas
Shohei Takahashi1, Toshiro Kaneko1
(1Tohoku University)
[6B-PM-O3]
Plasma-Synthesized Silver Nanoparticles Embedded in the Electrospun Chitosan Nanofibers
Changshu Kuo1, Dhyah Annur1, Jiunn-Der Liao1
(1Department of Materials Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan
R.O.C.)
[6B-PM-O4]
First Principle Molecular Dynamics Simulation for the Formation of Nitrogen-Atom Endohedral
Fullerene by Plasma Irradiation
Atsushi M. Ito1, Toshiro Kaneko2, Yasuhiro Oda1, Hiroaki Nakamura1,3
(1National Institute for Fusion Science, 2Tohoku University, 3Nagoya University)
[6B-PM-O5]
Low-cost activated carbon materials produced from used coffee grounds for electric double-layer
capacitors
Daisuke Tashima1, Nobuhito Kamikuri2, Yoshihiro Hamasuna2, Masumi Fukuma3, Seiji Kumagai4,
John D. W. Madden5
(1Interdisciplinary Research Organization, University of Miyazaki, 2Department of Electrical and
Electronic Engineering, University of Miyazaki, 3Matsue College of Technology, 4Akita University,
5
The University of British Columbia)
Room C Arranged 2
[6C-PM-A1]
Invited
[6C-PM-A2 ]
Invited
(13:30–15:10)
Chair: Prof. Ito (Meijo Univ.)
Plasma Farming
SukJae Yoo1
(1National Fusion Research Institute)
Sterilization characteristics of agricultural products using active oxygen species generated by
plasma and UV light
Nobuya Hayashi 1, Yoshihito Yagyu2, Akira Yonesu3, Masaharu Shiratani1
(1Kyushu University, 2Sasebo National Collage of Technology, 3Ryukyu University)
[6C-PM-A3]
Invited
[6C-PM-A4]
Invited
Biological Effects of Intense Pulsed Electric Fields
Sunao Katsuki1, Kazunori Mitsutake1, Keisuke Abe2, Hidenori Akiyama1
(1Kumamoto University, 2National Center for Geriatrics and Gerontology)
Multi-generation evaluation of plasma growth enhancement to arabidopsis thaliana
Kazunori Koga1, Thapanut Sarinont1, Satoshi Kitazaki1, Nobuya Hayashi1, Masaharu Shiratani1
(1Kyushu University)
Hakata Hyakunengura, Ishikura Brewery Banquet
(18:00–20:00)
― 50 ―
Friday, February 7, 2014
Room A Session 9
(8:30–10:05)
[7A-AM-I1]
Invited
Chair: Prof. Sakai (Kyoto Univ.)
Tailoring electron dynamics and chemical kinetics in reactive cold atmospheric pressure
plasmas: measurements & simulations
Timo Gans1
(1University of York)
[7A-AM-I2]
Invited
Instantaneous annealing by using elongated inductively coupled thermal plasma torch operable
in atmospheric pressure (invited)
Tomohiro Okumura1, Koji Eriguchi2, Mitsuo Saitoh1, Hiroshi Kawaura3
(1Panasonic Corp., 2Kyoto Univ., 3CV Research Corp.)
[7A-AM-O1]
Diamondoid synthesis using plasmas generated inside microreactors in adamantane - argon methane - hydrogen gas mixtures
Sven Stauss1, Chikako Ishii1, Keiichiro Urabe1, Kazuo Terashima1
(1The University of Tokyo)
[7A-AM-O2]
Cu thin film coating on polyimide prepared by RF-driven atmospheric pressure plasma spraying
Peng Zhao1, Wei Zheng2, Masaaki Nagatsu1
(1Graduate School of Science and Technology, Shizuoka University, 2Research and Technology Center,
Yazaki Corp.)
[7A-AM-O3]
Investigation on crack generation mechanism and reduction of cracks using buffer layer in
thermal-plasma-jet crystallization of amorphous silicon films on glass substrate
Keisuke Tanaka1, Shohei Hayashi1, Takahiro Kamikura1, Tsubasa Mizuno1, Seiichiro Higashi1
(1Hiroshima University)
Arranged 1
(10:30–12:10)
[7A-AM-A1]
Invited
Plasma generated reactive oxygen and nitrogen species for potential prostate cancer therapy
[7A-AM-A2]
Invited
[7A-AM-A3]
Invited
[7A-AM-A4]
Invited
Chair: Dr. Lukes (IPP)
Deborah O'Connell1
(1University of York)
Plasma-induced reactive oxygen species in atmospheric pressure plasma processing in liquids
Atsushi Tani1, Satoshi Fukui1, Satoshi Ikawa2, Katsuhisa Kitano3
(1Graduate School of Science, Osaka University, 2Technology Research Institute of Osaka Prefecture,
3
Graduate School of Engineering, Osaka University)
The science and emerging technology of plasma-based water purification: vistas of the future
John E. Foster1, Sarah Gucker1, Bradley Sommers1
(1The University of Michigan)
Sterilization treatment using pulsed discharge plasma in water
Yasuhiro Tanimura1, Koji Ohta1
(1Mitsubishi Electric Corporation)
― 51 ―
Room B Session 13
[7B-AM-I1]
Invited
(8:30–10:00)
Chair: Prof. Tomita (Kyushu Univ.)
Plasma applications in the R&D of nanodiagnostic devices
Takanori Ichiki1
(1The University of Tokyo)
[7B-AM-I2]
Invited
Direct measurement of thrust components arising from physical boundaries and a magnetic
nozzle in a helicon plasma thruster
Kazunori Takahashi
(Tohoku University)
[7B-AM-I3]
Invited
In situ plasma activated low temperature chemistry and ignition in DME/Oxygen/Helium
mixture
Yiguang Ju1, Wenting Sun1, Sang Hee Won1
(1Princeton University)
[7B-AM-O1]
Nanostructuring of vascular grafts to prevent blood platelets activation
Miran Mozetic1, Alenka Vesel1, Martina Modic1, Ita Junkar1
(1Jozef Stefan Institute)
Session 8
(10:30–11:45)
[7B-AM-O2]
Chair: Dr. Colombo (TI)
Toward uniform and efficient fabrication of single-crystal diamond wafers with inch-size area
Hideaki Yamada1, Akiyoshi Chayahara1, Yoshiaki Mokuno1, Shinichi Shikata1
(1AIST, Japan)
[7B-AM-O3]
Microwave-excited atmospheric pressure plasma jet with a wide aperture for carbon
nanomaterials depositions
Jaeho Kim1, Hajime Sakakita1
(1National Institute of Advanced Industrial Science and Technology)
[7B-AM-O4]
Local enhancement of deposition rate by gas blowing in microwave-assisted high-speed DLC
coating
Kazuki Miyazaki1, Hiroyuki Kousaka2, Noritsugu Umehara2
(1Department of Micro-Nano Systems Engineering, Nagoya University, 2Department of Mechanical
Science and Engineering, Nagoya University)
[7B-AM-O5]
Growth of highly conformal Ru thin film using a new Ru metallorganic precursor and NH3
plasma or NH3 molecules as a seed layer for Cu electroplating
Jaehoon Jung1, Soo-Hyun Kim1, Seung-Joon Lee1, Hyun-Jung Lee1, Taehoon Cheon1,2, Sang-Kyung Choi3,
Saito Masayuki4, Shunichi Nabeya4
(1Yeungnam University, 2Deagu Gyeonbuk Institute of Science & Technology, 3Chungnam National
University, 4Tanaka Precious Metals)
[7B-AM-O6]
Synthesis and characterization of polythiophene-like films by PECVD
Long Wen1,2, Dong Cheol Jeong3,4, Sang Hoon Kim5,6, Jae Do Nam5,6, Chang sik Song3,4, Jeon Geon Han1,2
(1NU-SKKU Joint Institute for Plasma-Nano Materials, 2Center for Advanced Plasma Surface Technology,
3
Department of Chemistry, 4Chemical and Biological Defense Research Center, 5Department of Energy
Science , 6Department of Polymer Science and Engineering)
― 52 ―
Room C Session 4
(8:30–10:00)
[7C-AM-I1]
Invited
Chair: Prof. Guerra (IST)
Chemical kinetics of atmospheric pressure plasmas operated in ambient air
Tomoyuki Murakami1, Kari Niemi2, Timo Gans2, Deborah O'Connell2, William G. Graham3
(1Tokyo Institute of Technology, 2University of York, 3Queen's University Belfast)
[7C-AM-I2]
Invited
Simulations of plasma processes and equipment for semiconductor device fabrication: status and
outlook
Peter Ventzek1, L Chen1, K Denpoh2, K Ishibashi3, G Hwang4, T Iwao3, S Kang3, Y Kobayashi3,
M Matsukuma3, P Moroz3, T Nozawa3, L Raja4, A. Ranjan,5 I. Sawada,3 A. Suzuki,3 H. Ueda, 3 J. Yoshikawa3
(1Tokyo Electron America, 2Tokyo Electron Yamanashi, 3Tokyo Electron, 4University of Texas, 5Tokyo
Electron Technology Center)
[7C-AM-I3]
Invited
Towards an atomic scale insight in plasma catalysis, plasma medicine and plasma-based growth
of nanomaterials
Erik C. Neyts1, Annemie Bogaerts1
(1University of Antwerp)
[7C-AM-O1]
Validation of hybrid particle-in-cell simulation for application to reactive plasma deposition
equipment
Rei Kawashima1, Hisashi Kitami2, Masaru Miyashita2, Toshiyuki Sakemi2, Yoshihiro Arakawa3
(1The University of Tokyo, 2Sumitomo Heavy Industries, Ltd., 3The University of Tokyo)
Session 2
(10:30–12:05)
[7C-AM-I4]
Invited
[7C-AM-O2]
Chair: Prof. Czarnetzki (Ruhr Univ.)
Nanosecond repetitively pulsed discharges in plasma-assisted combustion
Christophe O. Laux1, D. Rusterholtz1, D.A. Xu1, D.A. Lacoste1, G.D. Stancu1
(1Ecole Centrale Paris)
Application of saturation spectroscopy to the measurement of electron density in an argoncontaining plasma
Huimin Wang1, Shusuke Nishiyama2, Koichi Sasaki3
(1Graduate School of Engineering,Hokkaido University)
[7C-AM-I5]
Invited
[7C-AM-O3]
Development of curling probe for monitoring of reactive plasmas
Keiji Nakamura1, Hideo Sugai1
(1Chubu University)
Development of near-infrared laser heterodyne interferometer for microplasma diagnostics
generated at high pressure
Keiichiro Urabe1,2, Hitoshi Muneoka1, Sven Stauss1, Kazuo Terashima1
(1The University of Tokyo, 2Japan Society for the Promotion of Science)
[7C-AM-O4]
High enthalpy CO2 flow characterization by wavelength modulation spectroscopy
Ryo Morita1, Yusuke Sato1, Makoto Matsui1, Yoshiki Yamagiwa1
(1Shizuoka University)
Room A Closing & Award Ceremony
(12:10–12:30)
― 53 ―
Author Index
A
Keisuke Abe B
6C-PM-A3
Komei Baba 5P-PM-S08-P12
Yoshihiro Abiko 5P-PM-SPD-P04
Motoyoshi Baba 6P-PM-S14-P34
Muhammad Ali Abro 5P-AM-S11-P25
Hyowon Bae 6P-PM-S04-P04
Shinichiro Adachi 6P-AM-S06-P15
6P-PM-SPD-P26
Ishaq Ahmed 6P-PM-S04-P07
Jeoung Oun Bae 5P-AM-S02-P14
Joong-kyu Ahn 4P-PM-S08-P16
Dohyun Baek 6P-PM-SPD-P17
Frederic Aitken 5P-AM-SPD-P02
Ku Yeon Baik 4A-PM-I3
5P-AM-S12-P42
Nagarajan Balaji Hiroshi Akamatsu Shuichi Akamine 6P-AM-S06-P14, P26
Hiroshi Akatsuka 5P-AM-S02-P01
5B-PM-O5
6P-PM-SPD-P10, P14
Wonjin Ban 6P-PM-SPD-P29
Chung Wung Bark 4P-PM-S11-P34
Tapan Barman 4P-PM-SPD-P02
6P-AM-SPD-P02
Hidenori Akiyama 4P-PM-S09-P22
Stephane Bechu 6P-AM-S10-P49
Euan Bennet 6C-PM-A3
Alexandre Bes 3B-WS-05
6P-AM-SPD-P02
Takuya Akiyama 6P-AM-S08-P30
Worawan Bhanthumnavin Takaaki Amano 5P-PM-S12-P33
Sudeep Bhattacharjee Antony Ananth 6P-AM-S10-P46
Akira Ando 5P-AM-S02-P13
Fred Bijkerk 6P-AM-S01-P11
Marius Blajan 6P-PM-S09-P10
Annemie Bogaerts Atsushi Ando 6P-AM-S10-P47
Nima Bolouki 6P-PM-S09-P21
Dhyah Annur 6B-PM-O3
Sungjae Bong 6P-PM-SPD-P10, P11
Yasushi Aoki 5P-AM-S02-P02
Nelly Bonifaci 5P-AM-SPD-P02
6P-PM-S04-P01
Jin-Hyo Boo 5P-AM-S05-P24
7C-AM-O1
6P-AM-S06-P25
4P-PM-S11-P33
6P-PM-SPD-P30
Yoshihiro Arakawa Shota Araki Shuichi Asahina 5B-PM-O4
6P-PM-SPD-P07, P08
3B-WS-09
5P-AM-S02-P16
Jean-Paul Booth 6P-PM-S04-P03
4P-PM-S09-P28, P29
7C-AM-I3
4B-PM-I1
Yuki Asai 6P-AM-S10-P50
James W. Bradley 5P-AM-S02-P07
Tanemasa Asano 6P-AM-SPD-P03
5P-PM-S09-P19
Naoko Ashikawa 5P-AM-S05-P21
Florian Brehmer 4A-PM-O1
Tsukasa Aso 4P-PM-S09-P27
Robert L. Bruce 4B-PM-I3
5P-PM-S09-P21
Peter J. Bruggeman 5A-AM-I2
6P-PM-S09-P16
Paola Brun Dmitry Igorevich Astakhov 6P-PM-S04-P03
Vladimir Atrazhev 5P-AM-SPD-P02
Shotaro Atsumi 6P-AM-S08-P30
Pankaj Attri 4A-PM-I3
5P-AM-SPD-P03
C
Mark A. Cappelli 6P-PM-S04-P02
Roberto Cavazzana 5P-AM-SPD-P03
Ju-Hong Cha 6P-PM-SPD-P25
SuKyung Cha 6P-AM-S06-P20
― 54 ―
Pascal Chabert 4B-PM-I1
Heeyeop Chae 6P-PM-SPD-P01, P18
Jin Joo Choi 4A-PM-I3
Kwang-Sung Choi 6P-PM-SPD-P02
Sang Hoon Chae 3C-WS-02
Pyungho Choi 6P-PM-SPD-P17
Yu-Chen Chan
6A-PM-05
Sang-Kyung Choi 4P-PM-S08-P12
Rohit Chand 6P-PM-SPD-P13
5B-AM-O5
C. K. Chang 5P-PM-S08-P04
7B-AM-O5
Seong-Ho Choi 6P-PM-SPD-P28
6P-PM-SPD-P02
Sooseok Choi 5P-AM-S11-P27
5P-AM-S12-P39
Yoon Seok Choi 4P-PM-S08-P18
6P-PM-SPD-P22
Han Chou 6P-AM-S10-P43
Hao-Ming Chang 6B-PM-I1
Won-Seok Chang Xijiang Chang Akiyoshi Chayahara 7B-AM-O2
Jian Zhang Chen 6B-PM-I1
Kai-Huang Chen 6P-AM-S10-P51
6P-PM-S14-P30
7C-AM-I2
Poo-Reum Chun 6P-PM-SPD-P02
Shang Chen 6P-AM-S06-P18
Sungyoun Chung 6P-PM-SPD-P10, P11, P14
Weiting Chen 5P-AM-S02-P12
Mihai Alexandru Ciolan 6P-AM-S01-P10
Luigi Colombo Wen-Shan Chen 6P-AM-S10-P51
Yinhua Cui Chien-Min Cheng 6P-AM-S10-P51
Uwe Czarnetzki L. Chen I-Chun Cheng 6P-PM-S14-P31
4C-PM-A1
6P-PM-SPD-P23
4B-PM-I2
6B-PM-I1
Jae ha Cheon 6P-PM-SPD-P20
Taehoon Cheon 4P-PM-S08-P12
D
5B-AM-O5
Gregory de Temmerman 7B-AM-O5
Velika Deligianni 5P-AM-SPD-P03
5C-PM-O2
B.R. Cherng 4P-PM-S08-P17
Shoji Den 6P-AM-SPD-P05
J.S. Cherng 4P-PM-S08-P14, P17
K. Denpoh 7C-AM-I2
Declan Diver 3B-WS-05
Pattarin Chewchinda 5P-PM-SPD-P02
Takuo Chikuba 5B-AM-O8
Yu-Zung Chiou 6P-AM-S10-P51
Deog-Gyun Cho 6P-PM-SPD-P02
Guang Sup Cho 5B-PM-O7
Guangsup Cho 4A-PM-I3
Xiao Dong Jenq-Gong Duh 5P-PM-S08-P14
6A-PM-O5
E
Hyeon-Ji Cho 6P-AM-S06-P19
Kenji Ebihara Im Jun Cho 5P-AM-S11-P27
Kazuki Egashira 5P-AM-S02-P08
Jae-Chang Cho 6P-AM-S06-P24
Shigeharu Eikoshi 4P-PM-S11-P37
Y. J. Cho 5P-PM-S08-P04
Jussi Eloranta 5P-AM-SPD-P02
Byoungdeog Choi 6P-PM-SPD-P17
Sebastian U. Engelmann Eun Chang Choi 6P-PM-SPD-P09
Richard Engeln 4A-PM-O1
5B-PM-O3
Koji Eriguchi 4B-PM-O2
5B-AM-O2
Eun Ha Choi Eunmi Choi Hyebin Choi Hyung Wook Choi Jai H. Choi 4A-PM-I3
5B-PM-O7
6P-PM-SPD-P23
6P-PM-SPD-P05
4P-PM-S08-P13, P15
Takashi Eyama 5B-AM-O9
6P-PM-S09-P20
― 55 ―
5P-PM-S12-P27, P28
4B-PM-I3
7A-AM-I2
6P-PM-S14-P34
F
John E. Foster H
7A-AM-A3
Chang-Seung Ha 6P-PM-SPD-P25
Kunio Fujii 5P-PM-S09-P15
Toshiya Hagihara 4P-PM-S08-P09
Takuya Fujio 5P-AM-S11-P30
Seoung Woo Ham 6P-AM-S10-P39
Kazunobu Fujiwara 4P-PM-S09-P21, P24
Satoshi Hamagichi 4B-PM-O4
5P-PM-S09-P16
4P-PM-S07-P02
Masanori Fujiwara 5P-AM-S12-P34
4P-PM-S09-P26
6P-AM-S01-P12, P13
5C-AM-I3
6P-AM-S10-P41
6P-PM-S09-P19
Yutaka Fujiwara Yuya Fujiwara Hiroshi Fujiyama 5C-PM-O1
5P-PM-S12-P34
6P-AM-S06-P22, P23
Yoshihiro Hamasuna 6B-PM-O5
Kenta Hamatani 4P-PM-S09-P27
5P-PM-S09-P21
6P-AM-S10-P48
Chou Han 6P-AM-S10-P42
Fumiaki Fukawa 4P-PM-S11-P39
Gook Hee Han Osamu Fukuda 5P-AM-S02-P11
Jeon Geon Han 5B-PM-O7
4P-PM-S08-P18
Satoshi Fukui 7A-AM-A2
5B-AM-O7
Masumi Fukuma 6B-PM-O5
6P-PM-SPD-P22
5P-PM-S08-P13
7B-AM-O6
Hiroshi Furuta 6A-PM-I1
Jun Young Han 4P-PM-S11-P34
6P-PM-S14-P27, P28
Moon-Ki Han 6P-PM-SPD-P25
Masakazu Furuta 5P-AM-S11-P26
Yangsoo Han 6P-AM-S06-P24
Hirohide Furutani 5P-AM-S11-P31
Yufeng Hao 4C-PM-A1
Yuta Fuseno 6P-AM-S10-P45
Nob. Harada 4P-PM-S09-P27
5P-PM-S09-P21
6P-PM-S09-P16
Toru Harigai 5P-PM-S08-P13
6P-PM-S14-P27
G
Mani Sanjeeva Gandhi 4P-PM-S11-P38
Timo Gans 7A-AM-I1
Masataka Hasegawa 7C-AM-I1
Noboru Hasegawa 4C-PM-A2
6P-PM-S14-P34
Suji Gim 5P-AM-S11-P32
Shigehiko Hasegawa 5B-AM-O2
Wim J. Goedheer 6P-PM-S04-P03
Masahiro Hashimoto 6P-PM-S14-P35
Takuma Gohda 6P-AM-S01-P09
Shinji Hashimoto Motonobu Goto Tatsufumi Goto Yosuke Goto 6A-PM-O2
6P-PM-S14-P32, P33
6P-AM-S06-P17
4A-PM-O2
Yuji Hashimoto 6P-AM-S08-P32, P33
5P-AM-S05-P17
6P-AM-S08-P36, P37
Yukio Hashimoto 5P-PM-S12-P27, P28
Hiroshi Hashizume 3B-WS-04, 07
William G. Graham 7C-AM-I1
5A-PM-O1, O2
Olivier Guaitella 5C-AM-I1
5P-PM-S12-P35, P36
Sarah Gucker 7A-AM-A3
6P-AM-SPD-P06
Vasco Guerra 5C-AM-I1
Rikizo Hatakeyama 3C-WS-01
4C-PM-A3
5P-PM-SPD-P04
Akimitsu Hatta 4P-PM-S09-P32
― 56 ―
5P-AM-S02-P07
4A-PM-O5
5P-PM-S08-P13
4B-PM-O3
5P-PM-S12-P29
4P-PM-SPD-P05
6P-PM-S14-P27, P28
5A-PM-O1, O2
Kohken Hayashi 4P-PM-S09-P23
5B-PM-O2
Nobuya Hayashi 5P-AM-S12-P35, P36, P37
5P-AM-S02-P04, P09
5P-PM-S12-P30, P31, P32, P33
5P-PM-S08-P09, P14
6C-PM-A4
5P-PM-S12-P35, P36
6P-AM-SPD-P01
6P-AM-S01-P08
6P-PM-S09-P13
6P-AM-S06-P18
Shohei Hayashi 7A-AM-O3
6P-AM-S08-P28
Toshio Hayashi 6P-AM-SPD-P05
6P-PM-S09-P11, P12, P17
Yasuaki Hayashi 4P-PM-S08-P20
6P-AM-SPD-P05, P06
6P-AM-S10-P41
Hideo Horibe Yui Hayashi Tadahiro Horinouchi 6P-PM-S09-P16
6C-PM-A2
Katsuhiko Hosoi 6P-PM-S09-P14
Yusuke Heira 4P-PM-SPD-P06
S.H.R. Hosseini 4P-PM-S09-P22
Satoru Hida 6P-PM-S09-P16
Jang Hsing Hsieh Nobuya Hayashi Seiichiro Higashi Hiroki Higashiyama 6P-PM-S14-P32
7A-AM-O3
5P-AM-S02-P13
4A-PM-O2
5P-PM-S08-P04, P06
Cheng-che Jerry Hsu 6B-PM-I1
Chun-Min Hsu 6B-PM-I1
5A-AM-O2
Bang-Dou Huang 5B-PM-I2
5P-PM-S09-P22
Pin-Chang Huang 6P-AM-S08-P31
Haruhiko Himura 6P-AM-S01-P02
Min-Sheng Hung 5P-PM-S12-P37
Yuta Himeno Daisuke Hirama 3C-WS-06
G. Hwang Mineo Hiramatsu 3C-WS-07
Ki-Hwan Hwang 5P-AM-S05-P24
6P-AM-S06-P25
5P-PM-S08-P09
6P-AM-S08-P28
6P-PM-S09-P11
Yoichi Hirano Yusuke Hirano Miyuki Hirata I
6P-AM-S01-P12, P13
6P-PM-S14-P34
7C-AM-I2
Daiki Ichida 4C-PM-O1
3B-WS-13
4P-PM-S11-P36
5P-AM-S12-P35
6P-AM-S08-P32, P33, P35
Takamichi Hirata 5P-AM-S12-P33
Masaki Ichihara Enomoto Hiroshi 5A-PM-O4
Keiichiro Homma 5B-AM-I1
Ryuta Ichiki Takanori Ichiki 6P-AM-S10-P38
6P-AM-S06-P14, P26
7B-AM-I1
Tsuyoshi Honda 6P-PM-S13-P26
Masao Ichinose 5P-AM-S12-P34
Byungyou Hong 6P-PM-SPD-P09
Tomoaki Ide 4P-PM-S08-P10
Hyun Pyo Hong 6P-AM-S10-P39
5P-PM-S08-P02, P03
Young June Hong 4A-PM-I3
S. M. Iftiquar 6P-PM-SPD-P16
Hiroaki Honjo 4B-PM-I4
Satoshi Ihara 4P-PM-S09-P31
5B-PM-O3
Takeshi Ihara 6P-AM-S01-P03
6P-AM-SPD-P01
Esther Hontanon Masaru Hori 3B-WS-04, 07, 08
3C-WS-07
Takaaki Iijima 5P-AM-S02-P03
Prenary A
5P-PM-S03-P01
― 57 ―
Satoru Iizuka 5P-AM-S05-P18
4P-PM-S08-P10
6P-AM-S01-P09
4P-PM-S11-P36
Satoshi Ikawa 4A-PM-O3
5P-AM-S02-P10
7A-AM-A2
5P-AM-S05-P17, P21, P23
6P-AM-SPD-P03
5P-AM-S12-P35
4B-PM-I4
5P-AM-SPD-P01
5P-PM-S12-P27, P28
5P-PM-S08-P02, P03, P05, P07, P14
5P-AM-S12-P34
6P-AM-S08-P32, P33, P35, P36, P37
Akihiro Ikeda Shoji Ikeda Tomoaki Ikegami Sanae Ikehara Yuzuru Ikehara 5A-PM-I1
Tomomasa Itarashiki 5P-PM-S12-P30, P31
4A-PM-O7
5P-AM-S12-P37
5P-AM-S12-P34
6P-PM-S09-P13
5A-PM-I1
Atsushi Ito 5P-AM-SPD-P04
5P-PM-S09-P20
Atsushi M. Ito 6P-AM-S10-P44
Noriaki Ikenaga 6P-PM-S09-P15
Kazumasa Ikuse 4P-PM-S09-P26
Masafumi Ito Yeon-Ho Im 6P-PM-SPD-P02
5P-AM-S02-P04
Kiyoshi Imamura 5P-AM-S11-P26
5A-PM-O1, O2
Yoichi Inada 5P-AM-S02-P15
5B-PM-O2
5B-PM-O6
5P-PM-S12-P35, P36
6P-AM-S06-P26
6P-AM-SPD-P06
6P-PM-S09-P11, P12
Takashi Inoue K. Ishibashi 7C-AM-I2
6B-PM-O4
3B-WS-04, 07
Takuya Ishida 6P-AM-S06-P21
Teppei Ito Hiroaki Ishigame 6P-PM-S13-P22
5P-AM-SPD-P01
Masatou Ishihara 4C-PM-A2
Tomoko Ito 4P-PM-S07-P02
Tastumi Ishihara 4C-PM-O1
6P-PM-S09-P19
Chikako Ishii 7A-AM-O1
Tsuyohito Ito 6P-PM-S04-P02
Makoto Ishii 5B-AM-O8
Haruo Itoh 4P-PM-S11-P39
Tatsuo Ishijima 4A-PM-O2
Hidenori Itoh 5C-AM-O1
4P-PM-SPD-P06
Hironori Itoh 4P-PM-S09-P31
6B-PM-O1
Hitoshi Itoh 6P-AM-S01-P08
Vladimir V. Ivanov 6P-PM-S04-P03
Kenji Ishikawa 3B-WS-04, 07, 08
5P-AM-S02-P10
4A-PM-O5
T. Iwao 4B-PM-O3
Kotaro Iwasaki 4P-PM-S09-P27
4P-PM-SPD-P05
5P-PM-S09-P21
5A-PM-O1, O2
5B-PM-O2
5P-AM-S02-P10
5P-AM-S02-P09
5P-AM-SPD-P01
6P-AM-S06-P18
Yushi Iwata 5P-PM-S09-P18
6P-AM-SPD-P05, P06
Yasuji Izawa 5B-PM-O6
6P-PM-S09-P11, P12
Masao Isomura Shinya Iwashita 7C-AM-I2
4B-PM-O1
5P-AM-S02-P15
4P-PM-SPD-P01
Naho Itagaki 3B-WS-14
4B-PM-O1
4C-PM-O1
J
Haegyu Jang ― 58 ―
6P-PM-SPD-P01, P18
5B-AM-O5
Hong-Pil Jeon 6P-PM-SPD-P03
5P-PM-S08-P02, P07
Min Hwan Jeon 4P-PM-S07-P03
6P-AM-S08-P32, P33, P35, P36, P37
6P-PM-SPD-P15
Makoto Kambara So-Hyoun Jeon 5P-AM-S05-P24
5P-AM-S05-P20
6P-AM-S06-P25
6P-AM-S08-P30
Chaehwan Jeong 6P-PM-SPD-P20
Takuya Kameyama Yujin Jang Dong Cheol Jeong 7B-AM-O6
5P-AM-SPD-P01
5B-AM-I1
4P-PM-S09-P21, P24
5P-PM-S09-P16
Jae-In Jeong 5P-PM-S08-P08
Takahiro Kamikura 7A-AM-O3
Yeong Seung Jeong 6P-AM-S06-P20
Nobuhito Kamikuri 6B-PM-O5
Fengdong Jia 5P-AM-S02-P09
Mukai Kanae 5A-PM-O4
Lingyun Jia 4P-PM-SPD-P05
Atsuki Kanai 5B-AM-O4
Masafumi Jinno 5P-AM-S12-P41
Takao Kanai 5P-AM-S12-P33
Jin Oh Jo 5P-AM-S11-P29
Seiji Kanazawa Jerome Jolibois 6P-PM-S09-P11, P12
Eric A. Joseph 4B-PM-I3
Dong-Woo Ju 6P-AM-S06-P25
6P-AM-S06-P14, P26
Tatsuya Kanazawa 4P-PM-S09-P26
Shogo Kanda 6P-AM-S06-P14
Toshiro Kaneko 4A-PM-O6
6P-PM-SPD-P10, P11, P14
4C-PM-A3
7B-AM-I3
5P-PM-SPD-P04, P05
Donggeun Jung 6P-PM-SPD-P29
6B-PM-O2, O4
Jaehoon Jung 4P-PM-S08-P12
Yoshinori Kanemitsu 5P-AM-S05-P17
6P-AM-S08-P35
Shogo Kaneta 4P-PM-S09-P29
Keunwon Kang 6P-PM-SPD-P23
Minkyu Ju Yiguang Ju 7B-AM-O5
Jae-Hun Jung 5P-PM-S08-P08
Jinheak Jung 4C-PM-A4
Myung-Hwa Jung 6P-AM-S06-P24
S. Kang 7C-AM-I2
Taek Mo Jung 4P-PM-S08-P12
Hiroyuki Kano 3B-WS-08
Yu Sup Jung 4P-PM-S08-P19
4A-PM-O5
5B-AM-O9
6P-AM-S06-P18
Ita Junkar 7B-AM-O1
6P-PM-S09-P11, P12
Hiroyuki Kano K
5P-AM-S02-P09
Makoto Kanzaki 4A-PM-O6
Kazuhiro Karahashi 4B-PM-O4
Mashiro Kaga 5P-AM-S05-P20
4P-PM-S07-P02
Takeshi Kaihori 6P-PM-S14-P34
Jiro Kasahara 5P-PM-S09-P20
Hiroaki Kajiyama 4A-PM-O5
Naoki Kasai 4B-PM-I4
Hiroshi Kakiuchida 5P-PM-S08-P12
Yuji Kasashima 4P-PM-S07-P05
Takatoshi Kakuta 5P-AM-S11-P28
5P-AM-S02-P11
Yoshiaki Kakuta 6P-PM-S14-P27
Yohei Kashima 6P-AM-S08-P28
Hikaru Kamata 5P-PM-S08-P11
Takashi Kashiwazaki 5P-AM-S11-P31
Kunihiro Kamataki 3B-WS-14
Noboru Katayama 4P-PM-S11-P33
4B-PM-O1
Ariyuki Kato 4P-PM-S09-P27
4C-PM-O1
5P-PM-S09-P21
5P-AM-S02-P10
6P-AM-S06-P16
5P-AM-S05-P17, P21, P23
Hiroto Kato 5P-AM-S02-P04
― 59 ―
5P-PM-S12-P35
Chang Gyun Kim Kimitaka Kato 6P-PM-S13-P26
Doil Kim Kohgi Kato 6P-AM-S01-P09
Dong-Hyun Kim Ryo Kato 5P-AM-S12-P38
Donguk Kim 6P-PM-SPD-P21
Dongwuk Kim 6P-PM-SPD-P04
Ryuichi Kato 4C-PM-A2
4P-PM-S08-P12
4C-PM-A4
6P-PM-SPD-P24, P25
Takanori Kato 5P-AM-S02-P02
Duckjin Kim 4C-PM-A4
6P-PM-S04-P01
Eok-Su Kim 5B-AM-O5
Toshiaki Kato Masahide Kato Sunao Katsuki 4C-PM-A3
5P-PM-SPD-P04, P05
4P-PM-S11-P37
6C-PM-A3
Eun Ji Kim 6P-AM-S06-P19
Gyubeom Kim 6P-PM-SPD-P05
Hoe Jun Kim 4P-PM-S07-P03
Hong Sik Kim 4P-PM-S08-P16
6P-AM-S10-P49
Hoonbae Kim 6P-PM-SPD-P29
Katsutoshi Katsutoshi 4P-PM-S11-P37
Hye Ran Kim 4P-PM-S08-P18
Nagendra Kaushik 4A-PM-I3
5B-AM-O7
Kazufumi Kawabata 3B-WS-06
Jaeho Kim 4A-PM-O7
6P-PM-S09-P17
5P-AM-S12-P34
Tetsuya Kawachi 6P-PM-S14-P34
5P-PM-S09-P20
Yukinobu Kawada 5P-AM-S02-P03
7B-AM-O3
Satoru Kawaguchi 5C-AM-O1
Jae-Hyoung Kim Jay Bum KIM 6P-PM-SPD-P12, P13
4P-PM-S08-P18
Yoshinobu Kawai 5P-AM-S02-P12
6P-AM-S01-P10
Kazutaka Kawamura 5P-AM-S02-P03
Jiwoong Kim 6P-PM-SPD-P10, P11
5P-PM-S03-P01
Jungmo Kim 6P-PM-SPD-P10, P11, P14
Kunio Kawamura 6P-PM-S14-P33
Ki Seok Kim 5P-AM-S02-P14
Kota Kawano 4P-PM-S09-P25
Kyong Nam Kim 5P-AM-S02-P14
Hiroharu Kawasaki 6P-AM-S01-P03
Kyung Hwan Kim 6P-AM-SPD-P01
Toshiyuki Kawasaki 4P-PM-S09-P25
Min Hong Kim 4P-PM-S08-P13
Ayato Kawashima 4P-PM-S09-P23
Min Jung Kim 5P-AM-S11-P25
6P-AM-S10-P45
Nam Hyun Kim 6P-AM-S06-P20
Rei Kawashima 7C-AM-O1
Sang Don Kim 5P-AM-S11-P29
Hiroshi Kawaura 7A-AM-I2
Sang Hoon Kim 7B-AM-O6
Zohreh Khosravi 5C-PM-I3
SeungHyun Kim 6P-PM-SPD-P27
Yugo Kido 3B-WS-11
Soo-Hyun Kim 4P-PM-S08-P12
5B-AM-O7
4P-PM-S08-P13, P15, P19
5B-AM-O9
5P-AM-S12-P41
5B-AM-O5
Koji Kijima 5P-AM-S02-P15
7B-AM-O5
4A-PM-O5
Soonkon Kim 6P-PM-SPD-P17
Takashi Kikuchi 4P-PM-S09-P27
Soowon Kim 6P-PM-SPD-P29
5P-PM-S09-P21
Sung-Jae Kim 6P-AM-S06-P19, P20
6P-AM-S06-P16
Tae Hyung Kim 6P-PM-S09-P16
Taeyong Kim Areum Kim 6P-PM-SPD-P23
Yeonwon Kim 6P-AM-S08-P36
4C-PM-A4
Yong Hee Kim 4A-PM-I3
Fumitaka Kikkawa Boyeong Kim Byung-Sung Kim 6P-PM-SPD-P16
Yong-Sang Kim ― 60 ―
5P-AM-S02-P14
6P-PM-SPD-P10, P11
6P-PM-SPD-P12, P13
Youn-Jea Kim 6P-PM-S04-P09
6P-AM-S08-P36
6P-PM-SPD-P03
Koichiro Koge 5P-AM-S02-P12
Naoya Kimura 5P-AM-S02-P11
Sumio Kogoshi 4P-PM-S11-P33
Takashi Kimura 5P-PM-S08-P10, P11
Keizo Kinoshita 4B-PM-I4
Takumi Kishimoto Kentaro Kita 5P-AM-S12-P33
6B-PM-O1
Haruhisa Koguchi Attila Kohut 6P-AM-S01-P12, P13
5B-PM-O3
Hirofumi Koji 6P-PM-S14-P28
Hirokazu Kojima 5P-AM-S11-P31
Seiya Kitajima 6P-AM-S10-P49
Emi Komatsu 5A-PM-O4
Takeshi Kitajima 6P-PM-S09-P18
Shojiro Komatsu 5B-AM-O1
4P-PM-S08-P11
Ryosuke Kometani 6P-AM-S06-P18
Hisashi Kitami 5P-AM-S02-P02
Shota Komizunai 6P-AM-S01-P11
6P-PM-S04-P01
Hiroki Kondo 3B-WS-07
7C-AM-O1
3C-WS-07
Katsuhisa Kitano 4A-PM-O3
4B-PM-O3
7A-AM-A2
4P-PM-SPD-P05
5P-AM-S12-P36, P37
5A-PM-O1
5P-PM-S12-P30, P31, P32, P33
5B-PM-O2
6C-PM-A4
5P-PM-S08-P09
5P-AM-S12-P34
6P-AM-S06-P18
6P-AM-S01-P12, P13
6P-AM-S08-P28
6P-PM-S09-P11, P12
Satoshi Kitazaki Satoru Kiyama Akira Kiyohara 6P-AM-S01-P02
Yutaka Kiyohara 3B-WS-13
Shogo Kondo 5P-AM-S02-P06
Claus-Peter Klages 5C-PM-I3
Santi Kongmany 5P-AM-S11-P26
Eun Ha Ko 5P-AM-S11-P27
Takumi Konishi 6P-AM-S01-P01
Hikaru Kobayashi 5P-PM-S09-P15
Akinori Konno 4P-PM-S09-P29
Hiroaki Kobayashi 5P-PM-S03-P01
Bon-Heun Koo 6P-AM-S06-P19, P20
Kazuhiro Kobayashi 6P-AM-S01-P06
Konstantin N. Koshelev Y. Kobayashi 7C-AM-I2
Naoto Kodama 6B-PM-O1
Kazuya Kodani 6P-PM-S13-P26
6P-PM-S04-P03
Hiroyuki Kousaka 5B-AM-O3
7B-AM-O4
Shoudai Koyano 5P-AM-S02-P03
Kazunori Koga 3B-WS-14
Vladimir M. Krivtsun 6P-PM-S04-P03
4B-PM-O1
Toshitaka Kubo 6P-AM-S10-P47
4C-PM-O1
Akiko Kubota 5P-AM-S12-P34
4P-PM-S08-P10
5P-PM-S09-P20
4P-PM-S09-P25
Tomohiro Kubota 4P-PM-S11-P36
Yuki Kubota 5P-AM-S02-P10
5P-PM-S09-P16
5P-AM-S05-P17, P21, P23
Yusuke Kudo 4P-PM-S11-P33
5P-AM-S12-P35
Jagath Kularatne 5P-AM-SPD-P01
Seiji Kumagai 5P-PM-S08-P02, P03, P05 P07, P14
5P-PM-S12-P32, P33
6P-AM-S08-P32, P33, P35, P37
6C-PM-A4
Shinya Kumagai Changshu Kuo Kazuaki Kurihara ― 61 ―
5B-PM-I1
4P-PM-S09-P21, P24
6P-PM-S09-P11, P12
6B-PM-O5
5B-AM-O8
6P-PM-S14-P35
6B-PM-O3
4P-PM-S07-P01
Satoshi Kurio 4P-PM-S07-P08
Jung-Yeol Lee 6P-PM-SPD-P26
6P-PM-SPD-P19
Hirofumi Kurita 3B-WS-10
Myung-Hyun Lee 4A-PM-O4
Nae-Eung Lee 4C-PM-A4
Hiroyuki Kurita 5P-AM-S02-P11
Sang Baek Lee 5P-AM-S11-P32
Masanari Kuroda 6P-AM-S10-P40
Se-A Lee 6P-PM-SPD-P02
Shin-ichi Kuroda 6P-PM-S09-P14
Seon Jea Lee 6P-PM-SPD-P23
Mark J. Kushner Prenary B
Seunghwan Lee 6P-PM-SPD-P10, P11, P14
Yuji Kusumoto 6P-PM-S14-P28
Seung-Joon Lee 7B-AM-O5
Hiroshi Kuwahata 5P-AM-SPD-P04
Si Young Lee 3C-WS-02
Gi Chung Kwon 4A-PM-I3
Jang-Yeon Kwon 5B-AM-O5
Sooho Lee Young Haeng Lee 6P-PM-SPD-P04, P21
6P-AM-S06-P24
Soon Hyeong Kwon 6P-PM-SPD-P23
Young Hee Lee 3C-WS-02
Sungruel Kwon 6P-PM-SPD-P29
Youn-Jung Lee 6P-PM-SPD-P16
Andrea Leonardi 5P-AM-SPD-P03
the LHD Experimental Group 5P-AM-S05-P21
L
Ana Lacoste Hu Li 5C-PM-I2
4B-PM-O4
4P-PM-S07-P02
6P-AM-SPD-P02
Jiunn-Der Liao 6B-PM-O3
D.A. Lacoste 7C-AM-I4
Shao-Tzu Lien 6B-PM-I1
Trevor Lafleur 4B-PM-I1
Ki-Tae Lim Christophe O. Laux 7C-AM-I4
Soowon Lim 5C-PM-I2
Yan Kuang Lim Laetitia Laversenne 6P-PM-SPD-P12, P13
6P-AM-S10-P49
5B-AM-O3
Da-Huei Lee 6P-AM-S10-P51
I-Nan Lin 6P-AM-S08-P31
Dong Bok Lee 5P-AM-S11-P25
J. Lin 5P-PM-S08-P04
Dong Hun Lee 6P-PM-SPD-P19
R.D. Lin Geon Jun Lee 4A-PM-I3
Gye Cheol Lee 4P-PM-S08-P15
Liwei Liu 6P-AM-SPD-P04
Hae June Lee 6P-PM-S04-P04
Zecheng Liu 6P-AM-S06-P18
Ho-Jun Lee 3C-WS-02
6P-PM-SPD-P01
Bruce R. Locke 5A-AM-I1
6P-PM-S04-P04
Dmitry V. Lopaev 6P-PM-S04-P03
Chunyuan Lu 6P-AM-S08-P27
Peng Lu 6P-AM-S10-P49
Yi Lu 6P-AM-S06-P18
6P-PM-S14-P31
6P-PM-SPD-P24, P25, P26
Hyun-Jung Lee 7B-AM-O5
Jaehyeong Lee 6P-PM-SPD-P04, P20, P21
Jaewon Lee 6P-PM-SPD-P29
Dumitru Luca Je-Hyun Lee 6P-PM-SPD-P24
Petr Lukes Jihye Lee 6P-PM-SPD-P29
Jing
6P-AM-S10-P51
Lee 3C-WS-05
Duong Dinh Loc 6P-PM-SPD-P24, P25, P26
Hak-Seung Lee Wei-Hsiang Lin 4P-PM-S08-P14, P17
5A-AM-I1
M
Jinseon Lee 4P-PM-S08-P19
Jin-Su Lee 5P-AM-S05-P24
Yifei Ma 6P-AM-S06-P25
Siti Machmudah 6P-PM-SPD-P30
6P-PM-S14-P32
Jong-Chul Lee 6P-PM-SPD-P03
John D. W. Madden Joon S. Lee 6P-PM-SPD-P22
Jun Maeda ― 62 ―
6P-PM-SPD-P18
6A-PM-O2
6B-PM-O5
5P-PM-S09-P26
Yasuaki Maeda 5P-AM-S11-P26
Hiroto Matsuura 5P-AM-S11-P26
Tsunehiro Maehara 4P-PM-S09-P23
Satoshi Matsuyama 4P-PM-S07-P08
6P-AM-S10-P45
Sho Matsuyama 5P-PM-S12-P34
Paul Maguire 3B-WS-05
Stephen McDonnell 4C-PM-A1
Charles Mahony 3B-WS-05
David McDowell 3B-WS-05
Hisao Makino 5B-AM-O6
Kirsty McKay 5P-PM-S09-P19
Sanjeeva Gandhi Mani 5P-AM-S11-P32
Ryota Mikawa 6P-AM-S01-P01
Jumpei Mano 6P-PM-S13-P25
Nam Ki Min 6P-AM-S10-P39
Nathan Marchack 4B-PM-I3
Yasuo Minami 6P-PM-S14-P34
Daniil Marinov 5C-AM-I1
Kenji Mine 5P-AM-S02-P05
Davide Mariotti 3B-WS-05
Arshad Mirza 6P-PM-S04-P07
4C-PM-I1
Somak Mitra Laurent Marot Emilio Martines Naoki Maruno 5C-PM-O2
5P-AM-SPD-P03
5C-PM-O1
6P-AM-S06-P22, P23
Fumiaki Mitsugi 4C-PM-I1
5P-PM-S12-P27, P28
Kazunori Mitsutake 6C-PM-A3
Sadahiko Miura 4B-PM-I4
Masaru Miyashita 5P-AM-S02-P02
Shoichi Maruyama 4A-PM-O5
6P-PM-S04-P01
Jinno Masafumi 3B-WS-11
7C-AM-O1
Sadao Masamune 6P-AM-S01-P02
Jun Miyawaki Atsushi Miyazaki 6P-AM-S10-P47
3B-WS-06
Saito Masayuki 7B-AM-O5
Takuro Masuda 4P-PM-SPD-P03
5P-AM-S12-P40
Katsuya Masuno 5B-AM-O8
6P-PM-S09-P17
Suguru Masuzaki 5P-AM-S05-P21
Kazuki Miyazaki Khanit Matra 4P-PM-S09-P32
Hiroshi Mizoguchi 4P-PM-S09-P25
Naoki Matsuda 5P-PM-SPD-P06
Naruhiro Mizuike 6P-AM-S01-P02
Yoshinobu Matsuda 5P-AM-S02-P05
Shoma Mizukuni 6P-AM-S10-P45
5C-PM-O1
6P-AM-S06-P22, P23
7B-AM-O4
Akira Mizuno 3B-WS-10
4A-PM-O4
Shunsuke Matsue 4P-PM-S07-P04
Masaaki Mizuno 4A-PM-O5
Kei Matsui 6P-PM-S09-P15
Tsubasa Mizuno 7A-AM-O3
Makoto Matsui Masaaki Matsukuma 7C-AM-O4
4P-PM-S07-P02
7C-AM-I2
Yoshinori Mizuno Martina Modic 4P-PM-S09-P28
7B-AM-O1
Fred Moix 5P-PM-S09-P19
4P-PM-S11-P38
Kazunori Matsumoto 4P-PM-S11-P37
Young Sun Mok Naoki Matsumoto 6P-AM-S01-P05
6P-AM-SPD-P01
Yoshiaki Mokuno Satoki Matsumoto 5P-AM-S02-P03
Se Youn Moon Takao Matsumoto 5P-AM-S02-P15
Akira Mori 5P-AM-S12-P33
Yosuke Mori 4P-PM-S09-P32
5P-AM-S05-P22
5P-PM-S12-P29
4P-PM-S08-P10
Yasuhiro Morikawa Junya Matsuno Koichi Matsushima Haruaki Matsuura 5B-PM-O6
5P-PM-S08-P02, P03
5P-AM-S02-P01
5B-PM-O5
Ryo Morita Toshimasa Morita Yasuhiko Morita ― 63 ―
5P-AM-S11-P29, P32
7B-AM-O2
6P-PM-SPD-P05, P06
4P-PM-S07-P06, P07
7C-AM-O4
6P-PM-S14-P34
3B-WS-14
4B-PM-O1
4C-PM-O1
Akihisa Nakamiya 6P-AM-S01-P12, P13
5P-AM-S02-P10
Hiroaki Nakamura 6P-AM-S10-P44
5P-AM-SPD-P01
6B-PM-O4
4A-PM-O4
P. Moroz 7C-AM-I2
Kae Nakamura 4A-PM-O5
Hideki Motomura 3B-WS-11
Keiji Nakamura 5B-PM-O1
5P-AM-S12-P41
6P-AM-S06-P17
Taisei Motomura 4P-PM-S07-P05
7C-AM-I5
5P-AM-S02-P11
Keitaro Nakamura Iuliana Motrescu 6P-PM-S14-P31
Mark Nakamura Miran Mozetic 3B-WS-12
Masayuki Nakamura 6B-PM-O1
4B-PM-I3
4P-PM-SPD-P05
7B-AM-O1
Norihito Nakamura Nur Muhammad 5A-PM-O4
Toshihiro Nakamura 5P-PM-S12-P27, P28
6P-AM-S06-P21
Seiji Mukaigawa 4P-PM-S09-P21, P24
Hayao Nakanishi 5P-AM-S12-P34
5P-PM-S09-P16
Shinobu Mukasa 4P-PM-S09-P23
Takahiko Nakanishi 5P-AM-S05-P19
6P-AM-S10-P45
Tetsuya Nakanishi 4P-PM-S11-P33
Ayoung Mun 6P-PM-SPD-P05
Michihiko Nakano 6P-PM-S14-P29
Hitoshi Muneoka 6P-PM-S09-P20
Suguru Nakano 5P-AM-S02-P06
6P-AM-S01-P08
4B-PM-I4
Takuma Nakano 4P-PM-S11-P33
6A-PM-O4
Toshiki Nakano 4P-PM-S08-P11
6P-PM-S09-P18
7C-AM-O3
Michio Murahata Tomoyuki Murakami 7C-AM-I1
5A-PM-I1
Yu Muraki 4P-PM-S07-P02
Sachiko Nakao 4P-PM-SPD-P03
Koshi Murakoshi 5P-PM-SPD-P05
Setsuo Nakao 5P-PM-S08-P12
Yasushi Nakasaki 4P-PM-S07-P01
Tatsurou Nakashima 5P-PM-SPD-P06
Takahide Murayama 4P-PM-S07-P06, P07
N
Yoichi Nakashima 4A-PM-O3
Nobuya Nakazaki 4B-PM-O2
7B-AM-O6
Ye-Seul Na 5P-AM-S11-P27
Jae Do Nam Natsuko Nabeoka 4P-PM-S07-P05
Sang-Hun Nam 5P-AM-S05-P24
Shunichi Nabeya 7B-AM-O5
6P-PM-SPD-P30
Kazuhiro Nagahama 5P-PM-S12-P28
Hideyuki Nanya 6P-PM-S13-P26
Kazuhiko Nagai 6P-PM-S09-P21
Ryo Naruiwa 6P-AM-S01-P07
Hiroki Nagano 4B-PM-O3
Nasruddin 5A-PM-O4
H. Nagaoka 4P-PM-S09-P22
Erik C. Neyts 7C-AM-I3
Balaji Nagarajan 6P-PM-SPD-P11
Atsushi Nezu 5P-AM-S02-P01
Takuya Nagatomo Masaaki Nagatsu 5P-PM-S12-P27, P28
5P-AM-S12-P39
Kari Niemi Kiyoto Nishijima 5B-PM-O5
7C-AM-I1
5P-AM-S02-P15
6P-AM-S10-P42, P43
6P-PM-S14-P30, P31
7A-AM-O2
Kazutaka Nishikawa 6P-PM-S09-P21
6P-PM-S14-P33
Masaharu Nishikino 6P-PM-S14-P34
3B-WS-10
Kiyohiko Nishimura 5P-AM-S05-P21
Atsusi Nagira Tomoko Nakajima ― 64 ―
5B-PM-O6
Ryotaro Nishimura 5P-PM-S08-P10
Jun-Seok Oh 4P-PM-S09-P32
Koji Nishio 6P-AM-S10-P40
5P-AM-S02-P07
Shusuke Nishiyama 5P-PM-S09-P18
5P-PM-S08-P13
6P-PM-S13-P22
5P-PM-S12-P29
7C-AM-O2
6P-PM-S14-P27
6P-PM-SPD-P28
Toru Niwa 5P-AM-S12-P34
Min-Seok Oh Jun Noda 5P-AM-S05-P22
Kei Ohkubo 3C-WS-04
Tomoniri Noda 4P-PM-S08-P09
Hideo Ohno 4B-PM-I4
Yuta Noda 6P-AM-S10-P50
Ryosuke Ohno 6P-PM-S09-P10
Tamiko Ohshima 6P-AM-S01-P03
6P-AM-SPD-P01
Sooryun Noh Nobuyuki Nojima 6P-PM-SPD-P05, P06
4P-PM-S11-P37
Masao Noma 5B-AM-O2
Tomoko Ohshima 4A-PM-O3
Junichi Nomoto 5B-AM-O6
Koji Ohta 7A-AM-A4
Shinfuku Nomura 4P-PM-S09-P23
Takayuki Ohta 6P-AM-S10-P45
5P-AM-S02-P04
4A-PM-O2
5A-PM-O1, O2
Tomohiro Nozaki 4A-PM-I1
5B-PM-O2
T. Nozawa 7C-AM-I2
5P-PM-S12-P35, P36
5B-AM-O10
6P-AM-SPD-P06
Takashi Nunokawa 5P-PM-S09-P15
6P-PM-S09-P12
5P-PM-SPD-P03
Hirofumi Ohtani 5B-AM-O4
Yasunori Ohtsu 6P-AM-S01-P04, P05
Kohei Nosaka Julius Andrew P. Nuñez O
3B-WS-04, 07
Ryu-ichiro Ohyama 5P-AM-SPD-P04
Kohei Oikawa 6P-AM-S01-P11
Kazuhiko Obana 5P-PM-S09-P24
Shigefumi Okada 6P-AM-S01-P02
Shizuyasu Ochiai 4P-PM-S11-P40
Toshiya Okazaki 5P-AM-S12-P34
Deborah O'Connell 7A-AM-A1
Yuki Okigawa 7C-AM-I1
Shuichi Okuda 4C-PM-A2
5P-AM-S11-P26
Akinori Oda 5P-PM-S09-P25
Tomohiro Okumura 5P-AM-S12-P38
Yuma Onishi 5P-AM-S11-P26
5B-AM-I1
Kouichi Ono 4B-PM-O2
5B-AM-O2
Nobuhiko Oda Seiji Oda 4P-PM-S11-P37
Tetsuji Oda 5A-PM-O3
Reoto Ono Yasuhiro Oda 6B-PM-O4
6P-AM-S10-P44
Ryo Ono Osamu Odawara 5P-PM-S09-P15
Shusuke Ono 5P-PM-SPD-P02, P03
Soichiro Osaki 7A-AM-I2
5P-AM-S12-P37
5P-PM-S12-P30, P31
5A-PM-O3
4P-PM-S11-P40
5B-AM-O4
Daisuke Ogawa 6P-AM-S06-P17
Koichiro Oshikawa Kenta Ogi 4P-PM-S09-P29
Kostya Ostrikov Akihisa Ogino 4P-PM-S11-P35
Kohei Osuga 4P-PM-SPD-P01
Kohei Ogiwara 5P-AM-S02-P12
Eiichiro Otsubo 4P-PM-SPD-P03
6P-AM-S01-P10
Yuhei Ogura 5P-PM-S09-P22
Jun Seok Oh 5P-PM-S09-P19
― 65 ―
5P-PM-S08-P05, P07
3C-WS-03
Ruma P
Arup R Pal 4P-PM-SPD-P02
4P-PM-S09-P22
Rodney S. Ruoff 4C-PM-A1
D. Rusterholtz 7C-AM-I4
3B-WS-05
Jose Maria Palomares 5B-PM-O3
David Rutherford Anil Pandey 5B-PM-O1
MoonYoul Ryu Shail Pandey 5P-AM-S02-P16
Boonchoat Paosawatyanyong 6P-PM-SPD-P07, P08
Byoung C. Park 4A-PM-I3
Chan Won Park 6P-AM-S10-P39
Cheolmin Park 6P-AM-S06-P20
6P-PM-SPD-P10, P11, P14, P16
Dong-Wha Park Eung-Kyu Park 5P-AM-S11-P27
6P-PM-SPD-P12, P13
Gyungsoon Park 4A-PM-I3
Hyun-Woo Park S
Akio Sagara 5P-AM-S05-P21
Yuta Saito 6P-AM-S01-P11
Hidetosih Saitoh 5P-PM-S08-P13
Mitsuo Saitoh 7A-AM-I2
Ken-ichiro Sakai 6P-AM-S10-P50
5P-AM-S11-P27
Koji Sakai 6P-AM-S10-P48
In-sun Park 4P-PM-S08-P16
Miho Sakai 4P-PM-S09-P25
Keun-young Park 6P-AM-S06-P19
Osamu Sakai 5P-PM-S09-P26
Min-Ho Park 6P-PM-SPD-P12
Takamasa Sakai 5P-PM-S12-P28
Sang Joon Park 4P-PM-S08-P13
Yuka Sakai 6P-PM-S14-P33
Soyeon Park 6P-PM-SPD-P23
Hajime Sakakita Yong Seo Park 4P-PM-S08-P19
5P-AM-S12-P34
3B-WS-05
5A-PM-I1
Joanna Pawlat 5P-AM-SPD-P05
5P-PM-S09-P20
Jacques Pelletier 6P-AM-SPD-P02
6P-AM-S01-P12, P13
Long Tan Phan 6P-AM-SPD-P02
7B-AM-O3
JinXiang Piao 6P-PM-SPD-P22
Junya Sakashita 5P-PM-S09-P25
Dmitry Nikolaevich Polyakov 6P-PM-S04-P06
Toshiyuki Sakemi 5P-AM-S02-P02
Chantamanee Poonjarernsilp 3C-WS-06
6P-PM-S04-P01
Hugh Potts 3B-WS-05
7C-AM-O1
Yi-Kang Pu 5B-PM-I2
Noriyuki Sakudo 6P-PM-S09-P15
Takashi Sakugawa 4P-PM-S09-P22
Jenish Patel Sung Gyu Pyo 6P-PM-SPD-P23
Q
Armando T. Quitain 6P-PM-S14-P33
R
Heni Setyowati Esti Rahayu L. Raja Henry J. Ramos A. Ranjan Camille Faith P. Romero Antoine Rousseau 5A-PM-O4
7C-AM-I2
5B-AM-O10
6A-PM-O1
7C-AM-I2
4P-PM-SPD-P04
5C-AM-I1
4A-PM-O7
6P-AM-S10-P49
Toshiyuki Sakuishi 4P-PM-S07-P06, P07
Kodai Sakuramoto 5P-PM-S12-P29
Seiji Samukawa 5B-PM-I1
Kaori Sano 3B-WS-10
4A-PM-O4
Noriaki Sano 3C-WS-06
Yasuhisa Sano 4P-PM-S07-P08
Akio Sanpei 6P-AM-S01-P02
Thapanut Sarinont 5P-PM-S12-P32, P33
6C-PM-A4
Kensuke Sasai 5P-AM-S02-P06
Koichi Sasaki 5P-PM-S09-P18
― 66 ―
6A-PM-O2
6P-PM-S13-P22, P23
4P-PM-S11-P36
7C-AM-O2
5P-AM-S02-P10
Minoru Sasaki 5B-AM-O8
5P-AM-S05-P17, P21
6P-PM-S14-P35
5P-AM-SPD-P01
6P-AM-SPD-P05
5P-PM-S08-P02, P03, P05, P07, P14
Mitsuru Sasaki 6P-PM-S14-P33
6P-AM-S08-P32, P33, P35, P36, P37
4A-PM-O6
Jin Seock Seo 5P-AM-S02-P14
Toru Sasaki 4P-PM-S09-P27
Jong Hyun Seo 4P-PM-S08-P16
5P-PM-S09-P21
Kwon-Sang Seo 6P-PM-SPD-P25
6P-AM-S06-P16
Young Ho Seo 6P-PM-SPD-P09
6P-PM-S09-P16
Takahito Setsuda 4P-PM-S11-P35
Yuji Sasaki 5P-AM-S11-P30
Yuichi Setsuhara 3B-WS-06
Masato Sasase 5P-PM-S08-P12
5B-AM-O4
Kohnosuke Sato 5P-AM-S02-P03
5P-AM-S12-P40
5P-PM-S03-P01
5P-PM-S08-P14
Kouhei Sato 5P-PM-S09-P17
6P-AM-S08-P29
Ryoto Sato 6P-PM-S14-P35
6P-PM-S09-P17
Shota Sasaki Yusuke Sato 7C-AM-O4
Viacheslav Anatol'evich Shakhatov Kohki Satoh 5C-AM-O1
5P-AM-SPD-P02
Susumu Satoh 3B-WS-11
Yi-Dong Shao 5P-PM-S12-P37
5P-AM-S12-P41
Jia-Jhih Shen 5P-PM-SPD-P01
Yuuya Satoh 4P-PM-S11-P39
Wen-Ching Shih 6P-AM-S08-P31
Naoya Satta 5P-AM-S11-P30
Shinichi Shikata 7B-AM-O2
I. Sawada Takahiro Sawada Kanako Sekimoto Makoto Sekine 7C-AM-I2
5B-AM-O8
6P-PM-S09-P19
3B-WS-07, 08
5C-AM-I2
Shun'ichiro Shimbori 6P-AM-S10-P47
Daisuke Shimizu 5P-AM-S02-P15
Kazuo Shimizu 5B-PM-O6
4P-PM-S09-P28, P29
4B-PM-O3
Koji Shimizu 4P-PM-S11-P37
4P-PM-SPD-P05
Mika Shimizu 3B-WS-10
5A-PM-O1
Nobuyuki Shimizu 4A-PM-O7
5B-PM-O2
5P-AM-S12-P34
5P-AM-S02-P09
5A-PM-I1
5P-PM-S08-P14
Ryota Shimizu 6P-AM-S01-P08
6P-AM-S06-P18
Tetsuo Shimizu 6P-AM-S10-P47
6P-AM-SPD-P05, P06
Yoshihiro Shimizu 5P-AM-S02-P01
6P-PM-S09-P12
Yudai Shimokawa 3B-WS-03
Kazuki Sekiya 6P-PM-S14-P28
4P-PM-S09-P30
Sonu Sen 6P-PM-S04-P08
5A-AM-O1
Hyeon-Jin Seo 6P-AM-S06-P25
Kyung. S. Shin 5B-AM-O7
Hyeon-Seok Seo 6P-PM-S04-P09
Hyunwoong Seo 4B-PM-O1
Masanori Shinohara 4C-PM-O1
5P-AM-S02-P05
4P-PM-S08-P10
5P-PM-S12-P34
Haruo Shindo ― 67 ―
4P-PM-S08-P10
5P-PM-S08-P02, P03
4P-PM-SPD-P01
5C-PM-O1
6P-AM-S06-P22, P23
Hideo Sugai 5B-PM-O1
6P-AM-S10-P48
6P-PM-S13-P26
Tatsuru Shirafuji 3B-WS-02
7C-AM-I5
5A-AM-O2
Junko Sugama 5P-PM-S09-P22, P23, P24
6A-PM-O4
Tetuya Sugawara Iping Suhariadi Hiroki Shirahata 5P-AM-S05-P18
Wenting Sun Hiroyuki Shirai 6P-PM-S09-P18
Koukou Suu Naoki Shirai 3B-WS-03
A. Suzuki 5A-PM-O4
5P-PM-S09-P17
5P-PM-S08-P05, P07
7B-AM-I3
4P-PM-S07-P06, P07
7C-AM-I2
4P-PM-S09-P30
Atsushi Suzuki 5B-PM-O4
5A-AM-O1
Haruka Suzuki 6P-AM-S01-P08
3B-WS-14, 15
Susumu Suzuki 4P-PM-S11-P39
4B-PM-O1
Takefumi Suzuki 4B-PM-I3
4C-PM-O1
Tsuneo Suzuki 5P-PM-S08-P13
4P-PM-S08-P10
Stauss Sven 6P-PM-S09-P20
4P-PM-S09-P25
Vladimir Svrcek 4A-PM-I2
4P-PM-S11-P36
4C-PM-I1
5P-AM-SPD-P01
Syafiq 5P-AM-S02-P10
5P-AM-S05-P17, P21, P23
5P-AM-S12-P35
5P-PM-S08-P02, P03, P05, P07, P14
5P-PM-S12-P32, P33
6C-PM-A2, A4
6P-AM-S08-P32, P33, P35, P36, P37
Masaharu Shiratani 5P-PM-S09-P17
T
Kunihide Tachibana Shizuka Tada 3B-WS-11
5P-AM-S12-P41
4P-PM-S09-P21, P24
5P-PM-S09-P16
Valeria V. Shumova 6P-PM-S04-P06
Ryosuke Taga 5P-PM-S09-P23
Sajid Siraj 6P-PM-S04-P07
Kenji Tagashira 4P-PM-SPD-P03
Bradley Sommers 7A-AM-A3
Satomi Tajima 3B-WS-07
Ilyung Son 4C-PM-A4
5A-PM-O1
6P-PM-SPD-P19
6P-AM-SPD-P05, P06
Jung Han Son Chang sik Song 7B-AM-O6
Masuo Takachi 6P-AM-S06-P16
Huaping Song 5B-AM-O6
Noriharu Takada 5P-AM-S02-P06
Min-A Song 5P-PM-S08-P08
5P-PM-S09-P18
G.D. Stancu 7C-AM-I4
6A-PM-O2
Sven Stauss 3B-WS-01
Eiichi Takahashi 5P-AM-S11-P31
7A-AM-O1
Ikki Takahashi 4P-PM-S08-P20
7C-AM-O3
Katsuyuki Takahashi 5P-AM-S11-P30
Pradoong Suanpoot 5B-PM-O7
Kazumasa Takahashi 4P-PM-S09-P27
Yoshiaki Suda 6P-AM-S01-P03
5P-PM-S09-P21
6P-AM-SPD-P01
6P-AM-S06-P16
Yoshiyuki Suda 5P-AM-S12-P38
6P-PM-S09-P16
5P-PM-S09-P25
Kazunori Takahashi 5P-AM-S02-P13
Junya Suehiro 6P-PM-S14-P29
6P-AM-S01-P01, P11
Tohru Suemoto 6P-PM-S14-P34
6P-PM-S09-P10
― 68 ―
7B-AM-I2
Keisuke Takigawa 5P-PM-S12-P27, P28
Kazuo Takahashi 4P-PM-S07-P04
Hirofumi Takikawa 6P-AM-S06-P21
Hajime Tamon 3C-WS-06
6P-AM-S10-P40
Hao Tan 5B-PM-O5
6A-PM-O3
6P-PM-S13-P24, P25
Satoshi Takahashi 6P-AM-S10-P47
Shohei Takahashi 6B-PM-O2
Junichiro Takahata Koichi Takaki 5P-AM-S11-P30
4P-PM-S09-P21, P24
Akimasa Tanaka Akiyo Tanaka 5P-AM-S12-P38
5P-AM-S12-P37
5P-PM-S12-P30, P31
3B-WS-13
5P-AM-S12-P35
Ayaka Rachel Tanaka 4P-PM-S09-P23
Hiromasa Tanaka 3B-WS-07, 08
4A-PM-O5
5A-PM-O1
Keisuke Tanaka 7A-AM-O3
5P-AM-S02-P13
5P-AM-S11-P28, P30
5P-PM-S09-P16
6P-AM-S01-P01
Manabu Tanaka 5P-AM-S05-P22
Haruki Takao 6P-PM-S04-P02
Miyuki Tanaka 6P-AM-S10-P47
Yoshinori Takao 4B-PM-O2
Suguru Tanaka 5P-PM-S03-P01
5B-AM-O2
Yasunori Tanaka Kazunori Takashima 3B-WS-10
4P-PM-SPD-P06
4A-PM-O4
6B-PM-O1
Guanyang Tang 4A-PM-O2
6P-PM-S09-P10
Keisuke Takashima 5B-PM-I2
Yasuyuki Takatsuki 4P-PM-S09-P31
Atsushi Tani 4A-PM-O3
Arimichi Takayama 6P-AM-S10-P44
7A-AM-A2
Kaoru Takeda 6P-AM-S10-P50
Kosuke Taniguchi 3C-WS-06
Keigo Takeda 3B-WS-04, 07, 08
Rie Taniguchi 6P-PM-S04-P05
4A-PM-O5
Yujiro Taniguchi 4B-PM-O3
5P-AM-S02-P04, P09
5A-PM-O1, O2
5B-PM-O2
5P-PM-S12-P35
Elena Tarricone 6P-AM-S06-P18
Daisuke Tashima 6P-AM-SPD-P06
Ryutaro Tashiro 5P-PM-S09-P24
6P-PM-S09-P12
Toru Tashiro 5P-AM-S05-P20
Hiroyasu Takei 4P-PM-S07-P08
Mizuki Tateishi 5P-AM-S05-P21
Ryota Takei 6P-PM-S14-P34
Ishijima Tatsuo 5A-PM-O4
Yasuhiro Tanimura Hideto Tanoue Irem Tanyeli 5C-PM-O1
6P-AM-S06-P22, P23
7A-AM-A4
5P-AM-S12-P38
5C-PM-O2
5P-AM-SPD-P03
6B-PM-O5
Kosuke Takenaka 3B-WS-06
Jieh-I Taur 3C-WS-05
5B-AM-O4
Reitou Tei 5P-AM-S12-P39
5P-AM-S12-P40
Kungen Teii 3C-WS-08
5P-PM-S08-P14
Kazuo Terashima 3B-WS-01
6P-AM-S08-P29
6P-PM-S09-P20
6P-PM-S09-P17
7A-AM-O1
Hiromasa Takeno 6P-PM-S04-P05
7C-AM-O3
Takuya Takeuchi Yoshiaki Takeuchi 4B-PM-O3
4P-PM-SPD-P03
Hiroaki Terato Nobuyuki Terayama ― 69 ―
4P-PM-S09-P31
5B-AM-O2
Ryugo Tero 5P-AM-S12-P38
Katahut Thanomwong 6P-PM-SPD-P07
4C-PM-O1
Hai Van Nguyen Thi 5P-AM-SPD-P02
4P-PM-S09-P25
3B-WS-03
4P-PM-S11-P36
4P-PM-S09-P30
5P-AM-S02-P10
5A-AM-O1
5P-AM-S05-P23
5P-AM-S05-P17
5P-AM-S12-P35, P40
6P-AM-S08-P36, P37
5P-AM-SPD-P01
5B-AM-O3
5P-PM-S08-P02, P07
Hiroshi Tokumoto 6P-AM-S10-P47
6P-AM-S08-P32, P33, P35
Keiichi Tokutome 4B-PM-I4
6P-PM-S09-P17
Satoshi Tomioka 5P-PM-S09-P18
Satoshi Uchida Kentaro Tomita 5P-AM-S02-P12
4P-PM-S09-P30
6P-PM-S09-P21
5A-AM-O1
Takuro Tomita 6P-PM-S14-P34
Shohei Uchida Akira Tonegawa 5P-AM-S02-P03
5P-PM-S03-P01
Kiichiro Uchino 5P-AM-S02-P12
Yoshihiro Torigoe 5P-AM-S05-P17
6P-AM-S01-P10
6P-AM-S08-P36
6P-PM-S09-P21
Hidefumi Uchiyama 4P-PM-S11-P37
Fumiyoshi Tochikubo Susumu Toko Takayuki Tokoroyama 4B-PM-O1
3B-WS-03
5P-AM-S12-P37
5P-PM-S12-P30, P31
Nakatani Toshio 5A-PM-O4
Takuya Towatari 5P-PM-S12-P36
H. Ueda 4P-PM-S08-P09
Nobuhiro Ueda 6P-AM-S06-P15
Yohei Ueda 6P-AM-S06-P17
Hirotaka Toyoda 7C-AM-I2
5P-AM-S02-P06, P08
6P-AM-S01-P08
Shouichi Uematsu Hiromichi Toyota 4P-PM-S09-P23
Fumihiko Uesugi 4P-PM-S07-P05
6P-AM-S10-P45
5P-AM-S02-P11
Quang Hung Trinh 5P-AM-S11-P32
Yoshihiko Uesugi Tran Quang Trung 4C-PM-A4
4P-PM-SPD-P06
Akira Tsuchiyama 5P-AM-S05-P22
6B-PM-O1
Norio Tsuda 4P-PM-S11-P40
Hansup Uhm Kazuo Tsugawa 4C-PM-A2
5B-AM-O8
4A-PM-O2
4A-PM-I3
5B-PM-O7
Ryosuke Tsukada 5P-PM-S08-P09
Noritsugu Umehara 5B-AM-O3
Katsuki Tsukasaki 6P-PM-S14-P35
7B-AM-O4
Takayoshi Tsumura 5C-PM-O1
Keiichiro Urabe 6P-PM-S09-P20
Syuichiro Tsunoda 5P-PM-S09-P20
7A-AM-O1
Shohei Tsuruta 6P-AM-S01-P04
7C-AM-O3
Chihiro Tsutsui 5P-AM-S12-P33
Daisuke Usa 5P-PM-S09-P23
Takayoshi Tsutsumi 5P-AM-S02-P04
Fumi Utsumi 4A-PM-O5
5B-PM-O2
Miles Turner 4B-PM-I1
U
Giichiro Uchida 3B-WS-06, 14
V
Mauritius C. M. van de Sanden 5C-PM-O2
Richard van de Sanden 4A-PM-O1
Dinesh Varshney ― 70 ―
6P-PM-S04-P08
Meenu Asthana Varshney 6P-PM-S04-P08
Leonid M. Vasilyak 6P-PM-S04-P06
Magdaleno R. Vasquez Jr. Peter Ventzek Gerard Vermeulen Alenka Vesel Michelle Marie S. Villamayor Klaus Von Haeften 6A-PM-O1
7C-AM-I2
5P-AM-SPD-P02
7B-AM-O1
5B-AM-O10
5P-AM-SPD-P02
Y
Poonam Yadav 5P-AM-S11-P25
Ippei Yagi 5P-AM-S11-P28
Shohei Yagi 5C-PM-O1
6P-AM-S06-P22, P23
Yoshihito Yagyu 6P-AM-S01-P03
6P-AM-SPD-P01
6C-PM-A2
Oleg Yakushev 6P-PM-S04-P03
Hideaki Yamada W
Hiroyuki Wada 5P-PM-S09-P15
5P-PM-SPD-P02, P03
Motoi Wada 4P-PM-SPD-P04
7B-AM-O2
Hiromasa Yamada 5P-AM-S12-P34
5P-PM-S09-P20
Jun Yamada 4P-PM-S11-P40
Takahiro Yamada 6P-AM-S06-P17
5B-AM-O10
Takatoshi Yamada 4C-PM-A2
6A-PM-O1
Toshinori Yamada 4P-PM-SPD-P01
Wahyudiono 6A-PM-O2
Kohei Yamagami 4P-PM-S09-P27
6P-PM-S14-P32
5P-PM-S09-P21
Shintaro Wakiyama 5P-AM-S02-P05
Yukihiko Yamagata 6P-PM-S09-P21
4C-PM-A1
Yusuke Yamagishi 5P-AM-S12-P34
Robert M. Wallace 5P-PM-S09-P20
7C-AM-O2
Mitsuru Yamagiwa 6P-PM-S14-P34
Jiaqi Wang 6P-AM-SPD-P04
Yoshiki Yamagiwa 7C-AM-O4
Xiangke Wang 6P-AM-S10-P42
Seiya Yamaguchi 5P-AM-S11-P31
Xiaogang Wang 6P-AM-SPD-P04
Takeshi Yamaguchi 5P-AM-SPD-P04
Pikul Wanichapichart 6P-PM-SPD-P08
Koji Yamakawa 6P-AM-SPD-P05
6B-PM-O1
Hirohumi Yamamoto 6P-AM-S06-P26
4C-PM-I2
Masayoshi Yamamoto 6P-AM-S01-P02
Chun-Kai
Wang Huimin Wang Shu Watanabe Takayuki Watanabe 6P-AM-S10-P51
5P-AM-S05-P22
Tetsuya Yamamoto Ta-Chin Wei 5P-PM-SPD-P01
5B-AM-O6
Tsukasa Yamane 4P-PM-SPD-P03
Stefan Welzel 4A-PM-O1
Takashi Yamasaki 6P-AM-SPD-P01
Long Wen 7B-AM-O6
Takuya Yamasaki 5P-AM-S12-P41
Yuki Yamasaki 5P-PM-S12-P27, P28
Beomhee Won 6P-PM-SPD-P29
Sang Hee Won 7B-AM-I3
Daisuke Yamashita Chih-I Wu 3C-WS-05
4P-PM-S08-P10
5P-AM-S02-P10
5P-AM-S05-P21, P23
5P-AM-SPD-P01
5P-PM-S08-P02, P03, P05, P07, P14
6P-AM-S08-P33, P36
X
Bin Xu D.A. Xu Da Xu 5P-PM-SPD-P05
7C-AM-I4
4P-PM-SPD-P05
3B-WS-14
Keisuke Yamashita 4P-PM-S09-P25
Michiru Yamashita 5B-AM-O2
Yoshitaka Yamashita ― 71 ―
5P-PM-S12-P27, P28
Mok Young Sun 6P-AM-S10-P46
6P-PM-S09-P14
Dong-Hun Yu 6P-PM-SPD-P02
6P-AM-S10-P43
JungHoon Yu 5P-AM-S05-P24
6P-PM-S14-P30
6P-AM-S06-P25
Ji-Hoon Yang 5P-PM-S08-P08
6P-PM-SPD-P30
Kyung Chae Yang 6P-PM-SPD-P15
Nakajima Yukari Shubin Yang 6P-AM-S10-P42
Ken Yukimura 6P-AM-S01-P01
Sang-Ho Yun 6P-AM-S06-P25
6P-PM-SPD-P30
Atsushi Yuri 6P-PM-S13-P24
Kazuto Yamauchi 4P-PM-S07-P08
Jun Yan Enbo Yang Suk Yang Xiaoli Yang Yao-Jhen Yang Yuto Yano Yasuyoshi Yasaka 5B-AM-O5
5P-AM-S12-P39
6B-PM-I1
5A-PM-O4
4P-PM-S09-P25
6P-AM-S01-P06, P07
Z
6P-PM-S04-P05
Hachiro Yasuda 3B-WS-10
Kazunori Zaima 6P-PM-S13-P23
4A-PM-O4
Shi Hong Zhang 6P-AM-S08-P34
Yuki Yasuoka 5P-PM-S08-P13
Yan Zhang 4B-PM-O3
6P-PM-S14-P27
Peng Zhao 7A-AM-O2
Shota Yazawa 4P-PM-S11-P33
Wei Zheng 7A-AM-O2
Nai-Chan Yeh 3C-WS-05
T.H. Yeh Jiayong Zhong 6P-AM-SPD-P04
4P-PM-S08-P14, P17
Xi-Ming Zhu 5B-PM-I2
So Jeong Yeo 4P-PM-S08-P12
Matteo Zuin 5P-AM-SPD-P03
Geun Young Yeom 4P-PM-S07-P03
5P-AM-S02-P14
6P-PM-SPD-P15
Junsin Yi 6P-PM-SPD-P10, P11, P14, P16
Kohei Ymagami 6P-AM-S06-P16
Haruo Yokomichi 6P-AM-S10-P38
Seiya Yonemori 5A-PM-O3
Akira Yonesu 6C-PM-A2
SukJae Yoo 6P-PM-S09-P13
6C-PM-A1
Yeong-Geun Yook 6P-PM-SPD-P02
Hyon Hee Yoon 4P-PM-S08-P15
KukRo Yoon 6P-PM-SPD-P27
Masashi Yoshida 6P-AM-S06-P14, P26
Yuta Yoshida 6P-AM-S06-P23
K. Yoshihara 4P-PM-S09-P22
Uesugi Yoshihiko J. Yoshikawa 5A-PM-O4
7C-AM-I2
Hiroyuki Yoshiki 5P-PM-S09-P17
Msahiko Yoshiki 4P-PM-S07-P01
Yuki Yoshimitsu 6P-AM-S06-P14
Michiko Yoshitake Tsuyoshi Yoshitake 5C-PM-I1
6P-AM-S10-P50
― 72 ―