Modular Extension of ATE to 5 Gbps D.C. Keezer1, D. Minier2, M. Paradis2, F. Binette2 (1) Georgia Institute of Technology School of Electrical and Computer Engineering (2) IBM Canada Abstract Existing digital automated test equipment (ATE) can provide signals at about 1 Gbps or slightly higher. To accommodate multi-GHz test needs, some ATE provide options for a few faster channels (up to 3.6 Gbps). However, leading-edge parts may require 100s of these signals and in some cases at even higher speeds (5 and 10 Gbps). This paper describes a modular approach that allows for as many as 144 multiplexing and/or sampling channels to be added to existing ATE. The modules developed, so far include multiplexers, demultiplexers, and high-speed samplers that each support multiple high-speed differential signals. Production units operating up to 2.5 Gbps were introduced in [10]. In this paper we provide more detailed characterization of these modules and describe new modules targeting 3.2 Gbps and 5.0 Gbps applications. Various re-clocking techniques and proprietary calibration methods are used in order to reduce timing errors (especially jitter) to the sub-50ps range. The general system configuration, and key features of the newly developed modules are presented. 1 Introduction and Background Since 1990 researchers have been devising methods to extend the maximum test frequency of existing automated test equipment [1-10]. These approaches typically involve multiplexing of large channel count systems to obtain a smaller number of higher-rate channels. Multi-gigahertz testing presents numerous technical and economic challenges. When the bit time interval is just a fraction of a nanosecond (i.e. 400ps at 2.5 Gbps), the ATE must maintain timing accuracies of just a few tens of picoseconds. This level of accuracy must be maintained throughout very long test sequences and across hundreds of channels. In these situations, bit error rates (BERs) must be very small to avoid false failures. High-channel count (above 512), moderate speed (~1Gbps) test systems are readily available, and are used for more routine testing needs. In this project, an Agilent 93000P1000 with about 900 channels is utilized. Using high-speed multiplexing and sampling techniques, these systems can be enhanced to address the needs of multi-gigahertz devices [110]. However, maintaining tight timing accuracy becomes increasingly difficult at the higher data rates. The use of multiplexing logic and high-speed data sampling in order to apply gigahertz tests (500 Mbps to 1.6 Gbps) is described in [1-8]. Using a 200 Mbps automated test system groups of 2, 4, and 8 signals are combined with simple exclusive-OR gates to synthesize gigabit-per-second stimuli [2,3]. The addition of high-speed flip-flops to the test environment provides a way to sample the DUT outputs at these same rates [3,4]. The critical issue of timing calibration is addressed in [5]. Some refinements to the basic techniques Paper 26.3 748 are described in [6], including an emphasis on modular construction that facilitates calibration and re-use of the highspeed circuits. In [7], Wimmers, et al describe application to testing at 500 MHz and higher. Application of these techniques to a high complexity device is described in [8] where the test frequency was between 500 and 800 MHz. This used 5 high-speed inputs and 34 high-speed outputs. These techniques have been refined to extend the frequency range to 2-4Gbps [1,9,10]. In [10] the practical realities of achieving (and maintaining) acceptable timing accuracies during production testing have been addressed. These include: automated methods for timing calibration, adjustable I/O voltage levels, support for DC testing, and water-cooling of the added electronics for thermal stability. The control and testing of jitter effects plays a critical role in our ability to assure timing accuracy [11,12,13]. 2 Automated Test System Configuration A top-level view of the multiplexing test system is illustrated in Fig.1. The general approach uses multiplexing (“Driver”) modules mounted on the load-board to produce the high-speed stimuli signals, and sampling or demultiplexing (“Receiver”) modules for capturing the DUT output response. The modular approach is used so that the Driver and Receiver electronics can be developed and fully characterized prior to assembling to the load-board. The use of high pin-count high bandwidth connectors between the modules and the load-board, permits replacement or reuse of the modules. The load-board also supports “low” speed connections to the ATE through controlled-impedance transmission lines, and pogo pins. Water-cooling of the modules is required for heat removal, and more critically, for maintaining the module temperature as the DUT is temperature-cycled (see further discussions below, in section 6, and in [10]). DUT Test Socket Application Loadboard Driver Modules Cooling Water Connections Receiver Modules Fig.1 – Multiplexing test configuration that includes multiplexing and sampling modules mounted to the bottom side of the load board. ITC INTERNATIONAL TEST CONFERENCE 0-7803-8580-2/04 $20.00 Copyright 2004 IEEE In a typical application (see Fig.2), the DUT requires several multi-GHz inputs signals and produces several highspeed outputs. The high-speed inputs are synthesized within the Driver modules, which are themselves controlled by the ATE using multiple data channels. The high-speed outputs from the DUT are sampled, and in some cases demultiplexed using Receiver modules of various types. In the figure, “DC Channels” are provided to each module (connected to ATE channels). These are switched within the Modules to permit direct connection of the DUT I/O for DC parametric tests. Other low-speed signals are connected directly to the ATE. Driver Module ~1 Gbps Data (from ATE) Multi-GHz Inputs Driver Module DUT Driver Module Driver Module DC Channels (from ATE) Multi-GHz Outputs “Low” Speed I/O (to/from ATE) Receiver Module Receiver Module Receiver Module ~1 Gbps Data (to ATE) Figures 4a and 4b shows views of five Driver Modules mounted to the bottom of an application board. This particular application test a device requiring over 100 multiGHz input signals, and as many outputs. For this application, four Driver Modules each provide 24-channel, single-ended signals at rates up to 1.8 Gbps. The fifth module produces 12 differential channels. A complimentary arrangement of 5 Receiver Modules (not shown in the figures) provides the necessary test resources for capturing the DUT output signals. For clarity, Fig.4a shows the Driver modules mounted in position without their cooling plates. Only about half of the entire DUT load-board is visible in this picture (the other half supports the Receiver modules). The volume of space available below the load-board is extremely limited, so each module is carefully designed to fit within the limits of the mechanical support structures. These limitations are even more evident in Fig.4b that shows the five Driver modules with their cooling plates installed. The custom-machined cooling plates are designed to fully-exploit (and completely fill) the available space under the load-board. Receiver Module Driver Module PCBs DC Channels (to ATE) Fig.2 – Typical application test configuration. As illustrated in Fig.3, each module is made-up of a multilayer printed circuit board with components mounted on both sides. The PCB measures approximately 5cm x 24cm, and has two multi-pin connectors, which provide the signal connections to the application load-board. For thermal control, two water-cooled plates are machined to match the profiles of the components on the PCB top and bottom surfaces. When assembled, the plates and PCB are tightly sandwiched together so that the total thickness of the module is about 2cm. In this way as many as 12 of the modules can be mounted in the space available below the application loadboard. 80-signal 50-Ohm Connectors “Bottom” Cooling Plate Multi-layer PCB “Top” Cooling Plate Cooling Water Connections Fig.3 – Internal construction of the modules. DUT Socket Fig.4a – Photograph of application load-board (bottom view) with five Driver Modules (cards only) installed. Water Hoses Driver Modules Fig.4b – Photograph of application loadboard (bottom view) with complete Driver Modules installed (including cooling system). Paper 26.3 749 3 Driver Modules The basic logic implemented for each high-speed signal is illustrated in Fig.5. Each Driver module is designed to multiplex groups of signals from the ATE. Typically the multiplexing factor is either 2:1,4:1, or 8:1, although 3:1 is also useful for some applications [1]. With an ATE base frequency of 1 Gbps, this permits the generation of multi-GHz signals within the Driver modules. In addition to the basic multiplexing function, the Driver module also includes a variable-amplitude buffer, embedded calibration logic, and high-performance relays. The calibration logic is used for timing alignment of the signals produced by the multiplexer, in order to achieve the desired time delay at the DUT input. A “Calibration Reference” signal is distributed throughout the system and provided as input to each module. In some Driver modules, the ATE timing control is used to adjust the phase of the data inputs to the multiplexer. In other versions, the phase of a mulit-GHz clock is adjusted. The relays contained in the Driver module permit switching of ATE channels directly to the DUT inputs (bypassing the multiplexing logic). This allows the DC parametric units (PMUs) of the ATE to be used in their normal fashion to measure characteristics such as inputleakage, continuity, and input voltage sensitivity (VIL/VIH). RF Connectors Amplitude Control D1 D2 D3 D4 MUX Logic RF/DC Select + - + + Relays - DC Test Channels (from ATE) Multi-GHz Clock Calib Ref To DUT Embedded Calibration Logic refinements including the use of water-cooling. These modules utilize a well-known exclusive-OR multiplexing approach [1-10], whereby several ATE channels are encoded and phase-delayed and presented at the inputs to an XOR gate. The gate then decodes and multiplexes the data in real-time to produce the desired serial bit stream. Even though suitable XOR gates are available which can multiplex at multi-GHz rates [1], the practical limit of this technique is driven by the timing accuracy of the ATE signals (which is usually in the 100ps to 200ps range). The XOR output timing is directly controlled by the ATE. This direct-control feature has both advantages and drawbacks. The advantage is that it allows the ATE to be iteratively reprogrammed until the optimal timing is achieved. The drawback is that the resulting “optimal” timing is ultimately limited by the ATE accuracy that is usually not tight enough for serial rates above about 2 or 2.5 Gbps[10]. For faster speeds, a low-jitter clock signal is used to separate the critical timing from the ATE data as described below. Table 1 – Driver Modules Design # Function Driver1 4:1 XOR Mux Driver2 4:1 XOR Mux Driver3 4:1 ReClk Mux Driver4 2:1 XOR Mux Driver5 8:1 ReClk Mux Driver6 16:1 ReClk Mux Driver7 4:1 ReClk Mux Driver8* 32:1 ReClk Mux (* under development) #Ch 8 Diff 12 Diff 12 Diff 24 SE 4 Diff 2 Diff 8 Diff 1 Diff Fmax 2.0 Gbps 2.0 Gbps 2.5 Gbps 1.8 Gbps 3.6 Gbps 5.0 Gbps 3.2 Gbps 10.0 Gbps An eye diagram for a 1 Gbps differential output from Driver module “Driver2” is shown in Fig.6. The symmetric rise and fall times on the order of 140ps contribute to a wide eye opening. In this example, the multiplexing logic is operated in a 1:1 mode. Some voltage distortions evident in the figure are attributed to impedance discontinuities in the signal path between the Driver module and the DUT inputs. Fig.5 – Logic implemented by each of the Driver module channels (shaded elements are shared with other channels). To exploit the modularity of this approach, several different Driver modules have been constructed (or are under development), as outlined in Table 1. Each of these is designed to optimize ATE resources while meeting specific DUT test requirements. All implement various types of multiplexing schemes, ranging from 2:1 XOR-based multiplexers [1-10] to 32:1 parallel-to-serial converters. The simpler arrangements (XOR Mux) provide maximum data rates which are limited by the timing accuracy of the ATE to about 2 Gbps. Higher performance (3.2 and 5.0 Gbps) requires re-clocking the multiplexed data using a low-jitter clock source. The first two Driver modules (Driver1 and Driver2) have been described in [10]. Driver1 was an 8-channel, air-cooled prototype, while Driver2 provided 12 channels, and some Paper 26.3 750 Fig.6 – “Driver2” 1 Gbps eye diagram of the multiplexer output (811mV p-p) [10]. Nevertheless, the logic transitions are 2 to 3 times sharper than those produced by the ATE alone. Furthermore, the Driver module signals are true-differential, whereas the ATE produces only single-ended signals. Operating in a 4:1 mode, with the ATE running at 625 MHz, the Driver multiplexers produce 2.5 Gbps. These signals are captured with the embedded calibration logic, and graphically displayed using the “Shmoo plot” utility of the ATE, as shown in Fig.7. Here the data is switching state every 400ps. The timing resolution of this shmoo plot is 64ps and the uncertainty of the logic transitions is about at that resolution limit. Fig.8 – “Driver2” multiplexed output data eye diagram (2Gbps) [10]. Fig.7 – Example showing a 2.5Gbps data pattern as measured with the embedded calibration circuit [10]. Fig.7 – “Driver2” 2.5Gbps clock pattern as measured using the internal embedded calibration circuit [10]. A 2 Gbps eye diagram of a pseudorandom data pattern at the DUT input is shown in Fig.8. Here an open eye is obtained with a nominal signal amplitude of 800mV. The pattern is limited primarily by jitter (about 150ps to 200ps). It should be noted that the displayed jitter is a result of multiple signals provided by the ATE, each including the effects of four timing edge generators. Nevertheless the signal is sufficient to test the high speed performance of the DUT. The same circuit can be run at even higher speeds by reprogramming the ATE. In Fig.9, the Driver2 ouput is shown while producing a “clock” pattern (010101…) at 2.5 Gbps. Because of the regular nature of the pattern, relatively good timing accuracy is achieved. The figure shows that the timing errors are primarily due to jitter and are less than 90ps. Cycle-to-cycle systematic timing errors can be almost entirely eliminated since each edge is associated with a different timing generator in the ATE. Therefore, jitter is the primary contributer to the residual error. In the simple XOR approach used for Drivers 1, 2, and 4, the ATE jitter passes directly to the DUT input signal. A higher-precision TIA measurement of jitter in Fig.10 confirms that it is about 84ps at a BER level of 10-12. Fig.9 – “Driver2” 2.5Gbps clock pattern. Fig.10 – “Driver2” 2.5Gbps clock jitter TIA. Paper 26.3 751 Despite the acceptable performance of the Driver2 module at 2.5 Gbps using a “clock” pattern, the situation is not so good when arbitrary data is used. An eye diagram at 2.5 Gbps is illustrated in Fig.11. Here it can be seen that an open eye is obtained. However, the resulting jitter in the data transitions is measured at about 200ps (leaving about 0.5UI). This measurement, like that of Figs.6 and 9, includes the effects of jitter on the oscilloscope trigger input. To obtain a more accurate measurement, a time interval analysis (TIA) method is used as shown in Fig.12. Here the measured error is 150ps, leaving an open eye of 0.63 UI at a BER of 10E-12. Therefore, a usable eye opening is obtained, but the resulting timing error of +75ps is not as good as desired for testing at 2.5 Gbps, since 0.75 UI or better is normally required. Driver3, an external low-jitter clock source is used to re-clock the multiplexed data. This “reclock” signal generator is phase-locked with the ATE system master clock so that the multiplexed signals produced by Driver3 are also locked to the ATE. The reclocking operation is illustrated in Fig.13 where both the multiplexed data eye and the reclocking signals are displayed for 3 data bit periods at 1.25 Gbps. The data eyes exhibit similar jitter characteristics as in prior designs, although these signals appear a little better because they were measured within the module. The 3 diagonal “lines” in the figure are actually the rising edges of 3 reclock cycles (the falling edges are obscured by the data patterns). The clock was measured separately and found to have random jitter of about 1.5ps rms, or about 20ps peak-to-peak. That small amount of jitter explains why it appears as a sharp “line” in the figure. The difference between it and the data is strikingly clear in the figure. Still, the data eye opening at this speed provides plenty of timing margin for reclocking. Form this point on within the module, the data eyes exhibit jitter characteristics closer to that of the reclock signal. Fig.11 – “Driver2” 2.5Gbps Data eye-diagram. Fig.13 – “Driver3” ReClocking (1/2 channel at 1.25Gbps). Fig.12 – “Driver2” 2.5Gbps Data jitter TIA. In a fundamental shift from earlier work, the design of Driver3 addresses the data-dependant jitter problem illustrated in Driver2 above. Notice that most of the residual timing error in Fig.12 is a result of “deterministic” jitter, while the “random” jitter component is very small. In the design of Paper 26.3 752 After passing through the remaining multiplexing logic and the variable I/O buffer, the data eye is illustrated in Fig.14a. Here the measured peak-to-peak jitter is about 100ps (including oscilloscope trigger jitter). This signal also includes the effects of reflections coming from the relays and RF connectors. After passing through the relays and connectors, the signal (at the DUT) is illustrated in Fig.14b. Here peak-to-peak jitter is about 128ps (including O-scope trigger jitter). Allowing for the effects of trigger jitter, this leaves an improved eye opening at 2.5 Gbps (as compared with Driver2). Despite the improvements obtained in the Driver3 design, there were several lessons learned that suggested ways to get even better performance. One obvious weakness was in the relay/connector arrangement. Comparison of Fig.14a and Fig.14b clearly shows the loss in signal quality as it passes through these structures. In later designs (see below), both the relays and the RF connectors were replaced for this reason. Chip Delay Characterization CH12 CH11 CH10 CH9 CH8 CH7 CH6 CH5 CH4 CH3 CH2 CH1 6500 Measured Delay (ps) 6300 6100 5900 5700 5500 5300 5100 4900 100 960 920 880 840 800 760 720 680 640 600 560 520 480 440 400 360 320 280 240 200 160 80 120 0 40 4700 Delay Code Fig.14a – “Driver3” Data-eye at 2.5Gbps as measured oncard, (before relays and connectors). Fig.14b – “Driver3” Data-eye at 2.5Gbps as measured at DUT input, (after relays and connectors). A drawback to the reclocking approach used in Driver3 is that the signals, once reclocked, are not under the direct control of the ATE. Therefore alignment and changing of signal delays within the Driver modules requires a programmable delay element (IC). Luckily, such circuits are commercially available. The one used in Driver3 provides a 10-bit digital program capability with a 10ps minimum step size. This gives 1024 steps in a 10ns range, which is more than adequate for multi-GHz patterns. However, the delay circuit itself has non-ideal behavior as illustrated in Fig.15. Here the program delay code is incremented along the horizontal axis, with the actual measured delay plotted along the vertical axis. The figure shows only the first 1.0ns of the range. In the figure, 12 such plots are shown, taken from 12 channels in a Driver3 module. Each channel exhibits similar characteristics which is mostly a linear trend with “small” nonlinearities. If these nonlinearities are neglected, then additional timing errors of about 50ps will be encountered. By measuring these effects, look-up tables are constructed which allow the errors to be corrected to within 10ps. These added calibration steps are required for multi-GHz operation. Fig.15 – “Driver3” delay time characterization. Based on the lessons-learned from Driver3, a new design (“Driver5”) was created that targets even higher speeds (3.2 and 5.0 Gbps). The Driver5 design utilizes the “reclocking” strategy. However, it also includes a faster multiplexing circuit, higher-speed (SiGe) output buffers, higher-speed relays and RF connectors. The performance of the new, Driver6, design is illustrated in Fig.16a. Here a data eye diagram at 2.5 Gbps is shown. This measurement is made at the DUT input (after all relays and connectors). The measured jitter is 51ps peak-topeak and includes the oscilloscope trigger jitter (conservatively estimated to be 20 to 30ps). This leaves an eye opening of at least 0.87 UI at 2.5 Gbps. The risetime of the signal was measured separately at about 60ps (20% to 80%) including the bandwidth limitations of an 8GHz resistive probe (the measurements shown were taken with a 5 GHz differential FET probe). This is consistent with the expected SiGe output transitions of about 40ps, and some (small) risetime degradation through the relays and connectors. Overall, the performance of this design was a great improvement over the earlier designs at 2.5 Gbps. In Fig.16b, the Driver6 is demonstrated at 3.2 Gbps. Similar jitter and risetime characteristics result in a usable eye opening of better than 0.80 UI. At 5.0 Gbps, shown in Fig.16c, the eye open appears to be starting to closing-off. Nevertheless, an eye opening of about 0.75 UI is still achieved. When allowances are made for the oscilloscope trigger jitter (about 10ps to 20ps) and the FET probe bandwidth limits, the usable eye is expected to be above 0.80 UI. A 5.0Gbps “clock” pattern is shown in Fig.17. The TIA indicates total jitter of about 53ps at 10-12 BER. Of this about 12ps is deterministic, which may be reduced by improvements to the calibration procedure, part of which is designed to align two 2.5 Gbps data channels used to synthesis the 5.0 Gbps pattern. For this initial measurement, an interactive procedure was used to emulate the planned automated steps. We expect the automated routine will be more accurate and reliable. Random jitter is about 3ps rms. Paper 26.3 753 Fig.16a – “Driver6” Data-eye at 2.5Gbps. Fig.16b – “Driver6” Data-eye at 3.2Gbps. Fig.17 – “Driver6” Clock-pattern at 5.0Gbps. 4 Receiver Modules The basic demultiplexing logic implemented for each of the Receiver channels is illustrated in Fig.18. On the left side, differential data from the DUT is directed through coaxial relays to a differential buffer. The outputs from this buffer are directed to demultiplexing or sampling logic circuits. The resulting data channels are connected to the ATE, and provide the sampled data at slower rates suitable for real-time comparison within the ATE. As with the Driver modules, the receivers also include relays that permit switching of the signals directly into tester channels. These are used for DC parametric measurements of DUT characteristics such as output voltage sensitivity (VOL/VOH). In different Receiver modules, various demultiplexing or sampling methods are implemented, as listed in Table 2. In some cases the clock signals are provided by the ATE, while in others the clocks are generated with external instruments which are themselves phase-locked with the ATE. When such external clocking methods are used, it is necessary to include programmable delay logic within the module so that the desired clock phase can be obtained. The ability to capture multi-GHz DUT outputs is illustrated in Fig.19. This shows the measurement as a shmoo plot in a fashion similar to Fig.7. RF Connectors RF/DC Select From DUT + + - Relays - Differential Receiver + - DeMUX +or - Sampling Logic DC Test Channels (to ATE) D1 D2 D3 D4 Multi-GHz Clock Fig.16c – “Driver6” Data-eye at 5.0Gbps. Paper 26.3 754 Fig.18 – Logic implemented by each of the Receiver module channels. Table 2 – Receiver Modules Design # Function #Ch Fmax Receiver1 1:4 deMux 8 Diff 2.0 Gbps Receiver2 1:4 sampler 12 Diff 2.0 Gbps Receiver3 1:4 ReClk sampler 12 Diff 2.5 Gbps Receiver4 1:2 sampler 24 SE 1.8 Gbps Receiver5 1:8 deMux 4 Diff 3.6 Gpbs Receiver6 1:16 deMux 2 Diff 5.0 Gbps Receiver7* 1:32 deMux 1 Diff 10.0 Gbps (* under development) by Driver6. Furthermore, the 16x multiplexing factor means that the ATE needs to operate at only 312.5 MHz, which provides an additional practical advantage. The ability to accurately measure extremely short bit periods is illustrated in Fig.20. In Fig.20a a single bit from a 3.2 Gbps serial pattern is shown using 10ps resolution. Here the measured pulse with is 3.10ns. Likewise, Fig.20b shows a similar measurement from a 4.0 Gbps signal (measured as 250ps). These are remarkably close to the actual values (within the measurement resolution of 10ps). 310ps Fig.19 – Shmoo plot illustrating the Receiver module capturing 2 Gbps data from a DUT output [10]. Because the Receiver module designs use the same technology as the Driver modules, the performance achieved is similar. In some respects, the Receivers are simpler in that data rates are immediately reduced in the first stages of sampling or demultiplexing. Therefore most of the Receiver module logic runs at lower frequencies. Like the Driver modules, careful selection of high-speed relays and RF connectors is necessary in order to preserve the DUT output response signal integrity as it transitions to the Receiver module. In this respect, the Driver and Receiver designs are almost identical. As implied by the similarity between Fig.7 and Fig.19, the Receivers include sampling logic that is similar to the embedded calibration logic [patent pending]. Therefore, the ability to accurately capture sub-nanosecond data bits at multi-Gbps rates is similar. As shown in [10], the circuits used for Receivers1, 2, 3, and 4, are able to accurately measure bits as short as 160ps. The new SiGe-based receivers are expected to push this limit below 100ps. The recently developed receiver modules are designed to match the performance of available Drivers modules. For example, the 1:16 demultiplexing function of Receiver6 works to capture 5 Gbps from DUTs that are driven Fig.20a – Shmoo plot illustrating the Receiver module capturing 3.2 Gbps data bit using 10ps resoluton. 250ps Fig.20b – Shmoo plot illustrating the Receiver module capturing 4.0 Gbps data bit using 10ps resoluton. Paper 26.3 755 5 Calibration Clearly the need to control and measure timing of the Driver and Receiver module signals is critical to the success of the multi-GHz test system. As described above, each module includes embedded logic that is dedicated for enabling the calibration process. These logic blocks require a common timing reference signal in order to properly deskew the multiGhz signals. At a system level, this is accomplished by using a low-jitter clock source, phase-locked with the ATE, and distributing it to each module as illustrated in Fig.21. Driver Module Driver Module Driver Module Embedded Calibration Logic DUT Driver Module Low-Jitter RF Source Receiver Module Receiver Module Receiver Module Receiver Module Calibration Signal Distribution Fig.21 – Overview of Calibration signal distribution. Ideally this signal should be timed to be synchronous at each module input. However, in practice, the calibration signal itself will be skewed differently at each module. Part of the calibration procedure then involves measurement of the calibration signals input to each module. Once the phases of the calibration reference signals are known, then these timing offsets can be factored into the process of determining the timing delay values needed for each channel. The details of the calibration process will form the basis for a separate paper. 6 Thermal Management The power dissipated by each module ranges from 10 to 25 Watts (depending on the logic and number of channels within the module). Because the critical timing of logic signals depends on the junction temperature, it is necessary to control the module temperature to within 1oC. Inititial prototypes were constructed using aluminum heatsinks with forced-air construction [10]. Even though these provided the required level of heat removal, the internal junction temperature was found to change as the DUT was heated or cooled. And while the multiplexing test system could be calibrated to compensate for this effect, the amount of time needed to reach thermal equillibrium (about 5 minutes) was unacceptable for production testing. In the final production Paper 26.3 756 version, the forced-air approach was replaced with a watercooled system (see Fig.4b) which maintained the junction temperature almost independent of DUT temperature. Figure 22 shows thermocouple measurements taken from the case of one of the most temperature sensitive parts in Driver5. In about one minute, the case temperature stablizes to within 0.2oC at about 26.2oC and maintains this throughout an extensive test lasting a little more than a minute. Depending on the test-flow and the loadboard design, the module power can be left on in between parts, so that the one-minute initial stablization time is incurred only at the beginning of a batch. Fig.22 – Temperature stabilization for the liquid-cooled (production) system. The top curve the case temperature of a critical logic chip. The bottom curve is the temperature of the returned cooling water. 7 Summary and Conclusions This paper has presented a modular approach for testing mulit-GHz digital devices. Furthermore, this approach is suitable for integration with existing ATE and can provide as many as 144 independent differential pair signals. A production system is operational with a maximum channel data rate of 2.5 Gbps. New designs were demonstrated at 3.2 and 5.0 Gbps. The modular nature of the approach permits customization of the test system hardware, and optimization for specific DUT test requirements. While not shown in this paper, the modular nature of the approach is also suitable for integrating mixed-signal test resources with these high-speed digital modules. 8 Acknowledgments This work was conducted as a joint R&D project between Gerogia Tech and IBM Canada. The authors are grateful to IBM engineers for their efforts in designing, constructing, and testing the thermal management systems. The system-level experiments were conducted using equipment at the IBM Canada facility. 9 References [1] D.C. Keezer, Q. Zhou, C. Bair, J. Kuan, B. Poole “Terabit per second Automated Digital Testing,” Proc. of the Intl. Test Conf. (ITC’01), pp. 1143-1151, Oct./Nov. 2001. [8] D.C. Keezer, R.J. Wenzel, G.C. Brower, “Application of Multiplexing Techniques to the Testing of Digital GaAs ASICs,” Proc. of the Government Microelectronics Applications Conf. (GOMAC’94), pp. 151-152, Nov. 1994. [2] D.C. Keezer, “Multiplexing Test System Channels for Data Rates Above 1 Gb/s,” Proc. of the Intl. Test Conf. (ITC’90), pp. 362-368, Sept. 1990. [9] D.C. Keezer, R.J. Wenzel, “Low Cost ATE Pin Electronics for Multigigabit-per-second At-speed Test” Proc. of the Intl. Test Conference (ITC’97), pp. 94-100, Washington, D.C., November 1997. [3] L. Ackner, M.R. 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Shimanouchi, “Periodic Jitter Injection with Direct Time Synthesis by SPP ATE for SerDes Jitter Tolerance Test in Production,” Proc. of the Intl. Test Conf. (ITC’03), pp. 48-57, 2003. [12] T. Yamaguchi, M. Soma, M. Ishida, M. Kurasawa, H. Musha, “Effects of Deterministic Jitter in a Cable on Jitter Tolerance Measurements,” Proc. of the Intl. Test Conf. (ITC’03), pp. 58-66, 2003. [13] K. Taylor, H. Lin, A. Chong, E. Chan, M. Soma, H. Haggag, J. Huard, J. Braatz, , “CMOS Builti-in Test Architecture for High-Speed Jitter Measurement,” Proc. of the Intl. Test Conf. (ITC’03), pp. 67-76, 2003. Paper 26.3 757