A Comparison of Scale: Macro, Micro, Nano

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A Comparison of Scale:
Macro, Micro, Nano
Comparison of Scale PK
Activities (3)
Participant Guide
www.scme-nm.org
Southwest Center for Microsystems Education (SCME)
University of New Mexico
MEMS Introduction Topic
Scale Inquiry Activity: Cut to Size
Shareable Content Object (SCO)
This SCO is part of the Learning Module
Scale
Target audiences: High School, Community College, University
Support for this work was provided by the National Science Foundation's Advanced Technological Education
(ATE) Program through Grants #DUE 0830384 and 0902411.
Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors
and creators, and do not necessarily reflect the views of the National Science Foundation.
Copyright © by the Southwest Center for Microsystems Education
and
The Regents of the University of New Mexico
Southwest Center for Microsystems Education (SCME)
800 Bradbury SE, Suite 235
Albuquerque, NM 87106-4346
Phone: 505-272-7150
Website: www.scme-nm.org
Southwest Center for Microsystems Education (SCME)
Int_Scale_AC12_PG_040413
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Cut to Size Activity
Scale Inquiry Activity: Cut To Size
Activity
Participant Guide
Introduction
To understand microsystems, their applications and fabrication, you need to have a good
understanding of size and scale. This leads to a better understanding of the function of micro-sized
objects and the applications in which they are used.
Microchip containing a nano-sized insulin pump
[Printed with permission from Debiotech S.]
For example, this picture shows a microchip of a nano-sized pump used to supply a continuous
infusion of insulin to a diabetic. This device is small enough to be mounted on a disposable skin
patch. The nanopump inside the micro-size chip is able to control delivery at the nanoliter level, the
amount very close to the physiological delivery of insulin .(1) This pump is constructed using MEMS
technology fabrication techniques.
In this activity you will discover similar devices in the macro, micro, and nano-scales. You will
identify objects that exist in each of these scales given a specific length. You will be asked to think
of ways that these objects can be used to perform a necessary task.
Description and Estimated Time to Complete
This activity allows you to explore the macro, micro and nano- scales and to begin thinking about
the types of objects found in these scales. In this activity you will cut a 20 cm paper ruler in half,
then continue to cut each new piece in half until it becomes too small to cut. For each cut, you will
identify an object that has the length of the remaining size. Even after the ruler becomes too small
to cut, you will continue to identify objects for several lengths all the way down into the nano-scale.
.
Estimated Time to Complete
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Cut to Size Activity
Allow approximately 60 minutes to complete this activity.
Activity Objectives and Outcomes
Activity Objectives
 Demonstrate your knowledge of metric scales by identifying at least 15 objects that range in
size from the nano-scale to the macro-scale.
 Identify at least 3 macro-size objects that perform the same tasks but in the micro-scale.
Activity Outcomes
For each cut of the ruler you will indicate on a chart the length of the new ruler and at least one
object that measures that length. When you are no longer able to cut the ruler in half, you will
continue to identify objects that measure specific micro and nano lengths as indicated on the activity
chart. By the end of this activity you should be able to answer the following questions:
 How many cuts would it take to get to the size of a water molecule (approximately 1 nm)?
 How do you denote lengths using the metric system?
 What are some objects that overlap the micro and nano-scales?
 What is an object in the micro or nano-scale that performs the same function or task as a macrosized object?
 What are some tasks that micro or nano-sized objects perform that affect your life?
Team
It is recommended that you complete this activity with one or two other participants. Working with
others will promote more discussion and ideas.
Supplies
 One 20 cm long strip of ruled paper. (One is provided on the Cut to Size Activity Chart at the
end of this activity).
 One piece of stock paper (or thick printer paper) – if available
 One pair of scissors
 One Cut to Size Activity chart (last 2 pages of this activity)
 One pencil
 Computer with Internet access
 Computer with PowerPoint or Adobe Reader
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Cut to Size Activity - PG
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Documentation
 Record your observations during this activity.
 Complete the Cut to Size Activity Chart.
 Record the results for each step of the activity.
 Revise your hypothesis to reflect the results.
 Summarize your discussions with other participants.
 Answer the Post-activity questions.
Think About the Outcome
Answer the following based on what you think will be the outcome of this activity.
Expectations:
 You will discover functional objects that range from the nano-scale to the macro-scale.
 You will identify micro and nano-sized objects that work as efficiently as macro-sized
objects with equivalent functions.
Observations:
 What is the difference between a micro-sized object and a nano-sized object?
 Describe any previous experience or observations that you have had relating to micro and
nano-sized objects.
 What types of objects do you think of when you think "micro"?
 What types of objects do you think of when you think "nano"?
Hypothesis:
 Write a statement on what you expect to discover in fulfilling the expectations.
Predictions:
 What types of objects will you find in the micro and nano-scales that perform the same
functions as objects macro-scales (> 100 microns)?
 What types of objects will you find in the micro-scale?
 What types of objects will you find in the nano-scale?
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Cut to Size Activity - PG
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Inquiry Activity: Cut To Size
Description
This activity allows you to explore the macro, micro and nano- scales. You will cut a
20 cm long paper ruler as small as you can get it and identify an object that has the
length of each cut size. This activity will help you begin to think about objects in the
micro and nano-scales.
1. View the Presentation: "Macro, Micro, or Nano?"
Description
View either the PowerPoint or Flash version of the presentation
"Macro, Micro, or Nano?"
 How did you do?
 How many did you get correct?
2. Print out the Cut to Size Activity Chart
Description



Print out the Cut to Size Activity Chart at the end of this
handout.
Print page 2 of the chart on stock paper, if available.
Cut out the metric ruler along the red line.
3. Cut the ruler in half.
Description
Cut the ruler in half.
Discard one half of the ruler.
Answer the following questions:
a.
What is the new length of the ruler? Record the length on
the activity chart. (Be sure to use metric notation).
b.
Give an example of an object of this size. (You are
welcome to Google images for ideas)
c.
What is the function (task) of this object? (i.e. red blood
cells (6 to 8 μm in diameter) carry oxygen from the lungs to
the body)
d.
Is this object macro, micro, or nano in length? Refer back
to the presentation if you need to.
e.
Record your answers to these questions on the chart.
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Cut to Size Activity - PG
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4. Repeat Step 3
Description
Repeat step 3 until the ruler gets too small to cut in half.
Use the activity chart to keep track of the number of times you cut.
5. How many cuts did you get?
Description
How many cuts did you get before the ruler got too small to cut?
On the activity chart, highlight the number of cuts you were able to
do before the last piece was too small to cut.
6. Complete the Activity Chart
Description
For the remaining cuts indicated on the chart, answer the following.
a.
Give an example of an object of this size?
b.
What is the function of this object?
c.
Is it macro, micro, or nano?
7. How many cuts to 1 nm?
Description
a. Determine how many cuts it would take to get to 1 nanometer.
b. How many cuts? ______________
c. What are two objects that are 1 nm in length or diameter?
8. Revisit your hypothesis and predictions
Description
a. Revise your hypothesis to reflect your results.
b. How well did your results match your predictions? (Be
specific)
9. Answer the Post-Activity Questions
Description
Answer the Post-Activity Questions at the end of this procedure.
10. Discuss results with other participants
Description
Discuss your activity results with other participants.
11. Write up your documentation
Description
See the Documentation section and complete your documentation
for this activity.
Submit your documentation as required.
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Cut to Size Activity - PG
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Post-Activity Questions
1. How many cuts would it take to get to the size of a molecule approximately 1 nm in
diameter?
2. What types of objects did you find in the micro-scale? Nano-scale?
3. Based on the types of objects that you found in the micro and nano-scales, what types of
professions do you think directly utilize the functional capabilities of these objects? (Be
specific)
4. What are some objects that overlap the micro and nano-scales?
5. What is an object in the micro-scale that performs the same function or task as a macrosized object?
6. What are some functions that micro and nano-sized object perform that affect your life?
Summary
This activity allowed you to explore objects in three different scales – macro, micro, and nano.
Even though nano, and most micro-sized objects cannot be seen with the naked eye, you should
have found that there still exists billions and billions of functional objects within these scales.
It is important that you get a sense of relative size and develop a good understanding of scale and
units. This understanding will assist in all aspects of your life.
References
1 "Debiotech's Insulin Nanopump™". MedGadget. April 23, 2007.
http://medgadget.com/archives/2007/04/debiotechs_insulin_nanopump.html
Support for this work was provided by the National Science Foundation's Advanced Technological
Education (ATE) Program.
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Cut to Size Activity - PG
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Southwest Center for Microsystems Education (SCME)
University of New Mexico
MEMS Introduction Topic
A Comparison of Scale:
Macro, Micro, Nano
Primary Knowledge (PK)
Shareable Content Object (SCO)
This SCO is part of the Learning Module
Scale
Target audiences: High School, Community College, University
Support for this work was provided by the National Science Foundation's Advanced Technological Education
(ATE) Program through Grants #DUE 0830384 and 0902411.
Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors
and creators, and do not necessarily reflect the views of the National Science Foundation.
Copyright © by the Southwest Center for Microsystems Education
and
The Regents of the University of New Mexico
Southwest Center for Microsystems Education (SCME)
800 Bradbury Drive SE, Suite 235
Albuquerque, NM 87106-4346
Phone: 505-272-7150
Website: www.scme-nm.org
Southwest Center for Microsystems Education (SCME)
Int_Scale_PK12_PG_040813
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Comparison of Scale - PK
A Comparison of Scale:
Macro, Micro, Nano
Primary Knowledge
Participant Guide
Description and Estimated Time to Complete
In order to grasp many of the concepts associated with MEMS and MEMS devices and components,
you need to understand scale and the size of objects associated with different scales. This unit
introduces you to various concepts associated with scale, and a comparison of the macro, micro and
nano-scales.
Estimated Time to Complete
Allow approximately 30 minutes to complete.
Introduction
The Milky Way
[Image credit: NASA/JPL-Caltech2]
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Comparison of Scale - PK
At one time or another everyone has asked the question "How big is the universe?" Trying to
develop the answer can be overwhelming because there is no answer. The size of the universe is
unknown; however, the size of objects within the universe is known. These objects are constantly
being studied, measured, and compared. These comparisons are a means of evoking some sense of
scale as to how big the universe could be. For example, the Milky Way (pictured above) is one of
billions of galaxies. Our sun is one of several 100 billion stars within The Milky Way. There are
over 50,000 billion, billion stars. There are more stars in the universe than there are grains of sand
on our planet.1
Our sun is considered a middle-sized star. Giant stars are as much as 10 times larger. However,
when compared to Earth, the sun is approximately 109 times larger in diameter meaning that 1.3
million earths could fit inside the sun! Do the math!
The sun is much larger than Earth. From the sun's center to its
surface, it is about 109 times the radius of Earth. Some of the
streams of gas rising from the solar surface are larger than
Earth.
[Image source: NASA - Image credit: World Book illustration
by Roberta Polfus]
For years astronomers have explored the universe looking
for hints as to how big it really is. At the same time, other
scientists have been exploring how small things are and how
small something has to be before it goes beyond the reach of
manipulation or measurement. In these explorations, another
whole universe has been discovered, but on a much smaller
scale. Instead of objects being measured in kilometers and
light-years, objects are measured in micrometers and
nanometers, and even the number of atoms (see image right).
This unit will explore the concept of scale:
 what is big,
 what is small, and
 how do these objects compare in size?
When working with micro and nanotechnologies it is
important to have an understanding of size and of
scale. This will lead to a better understanding of the
processes and applications used in these technologies.
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This atomic force microscope image by
German physicist Franz Giessibl shows
dozens of silicon atoms. Scientists have
debated whether the light and dark crescents
- or wing-shaped features seen on the atoms
represent orbitals - the paths of electrons
orbiting the atoms. [Printed with
permission. See F. J. Giessibl et al., Science
289, 422 (2000)]
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Comparison of Scale - PK
Objectives



Explain the differences in the macro, micro and nano scales in terms of size, applications, and
properties.
Define microtechnology and nanotechnology.
Identify objects and applications in the micro-scale and the nano-scale.
Size is Relative
Size is Relative
"The sun is big" is a relative statement. Big relative to what? "An ant is small." Again, another
relative statement. Relative to the size of a human being, yes, an ant is small (anywhere from 2mm
long to 25 mm long); however, relative to a human hair (0.1 to 0.06 mm), an ant is huge.
The comparative size of an object in relative terms (big, small, huge) can be illustrated in a scale.
In the top scale of "Size is Relative", the ant is the smallest object. However, in the bottom scale
the ant is the largest object. Additional comparison scales could be created at both ends of these
two scales illustrating even smaller and largest objects.
Question: In the top scale, the ant is the smallest object. What are three additional objects that
could be added to this scale that are bigger than the ant, but smaller than the bumblebee?
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Comparison of Scale - PK
Scale is a Relationship
Scale is the relationship between what is being compared and how
that relationship is represented numerically or visually. Two scales
can look very similar, but be completely different in the range
represented. Two objects can look the same size, but when put in the
correct scale, the difference becomes obvious. Take a look at the two
objects in the figure. They look close to the same size, don't they? In
reality, the ant is approximately 5 mm in length and red blood cells
are approximately 5 μm in diameter or 1,000 times smaller!
How Big is Small?







One light-year is 9,460,730,472,580.8 km or about 9.5 x 1015 meters!
One kilometer (km) is 1000 meters or 1x103 meters.
One micrometer is 10-6 (a millionth) of a meter.
One nanometer is 10-9 (a billionth) of a meter.
One kilogram (kg) is 1000 grams or 1x103 grams.
One milligram (mg) is 10 -3 (a thousandth) of a gram.
An attogram is 10-18 of a gram.
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Comparison of Scale - PK
The Scale of Things
[Graphic courtesy of the Office of Basic Energy Sciences, U.S. DOE]
In the above chart "The Scale of Things – Nanometers and More", you can get a feeling of how
things can look the same size, but when placed next to a scale, the real size becomes more apparent.
Take a few minutes to study the objects on this chart. Which would you consider macro (large than
micro)? Which objects would you place in the micro-scale and which objects in the nano-scale?
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Comparison of Scale - PK
Macro, Micro and Nano – What's the difference?
Macro, Micro, Nano
[Micro image of microgears courtesy of Sandia National Laboratories]
[Nano image Printed with permission Craighead Group/Cornell University and © Cornell
University]
Macro – anything that can be seen with the naked eye or anything greater than ~100 micrometer.
Micro – 100 micrometers to 100 nanometers
Nano – 100 nanometers to 1 nanometer
Electrical and mechanical devices, components and systems are being manufactured in a variety of
sizes from macro to nano. The figure shows such components:
 Standard light bulb with a diameter of ~8 millimeters (mm) or 3.2 inches
 Microgears with individual gear teeth ~8 micrometers (µm) wide
 Microcantilever with a gold nano-dot 50 nanometers (nm) in diameter.
In commercial and residential electrical applications, components such as switches, light bulbs and
fans are macro-size objects (greater than 100 micrometers). Airbag actuation sensors, shock sensors
for computers and implantable drug delivery systems are micro-sized objects. Biomolecular sensors
for proteins and antigens, carbon nanotubes as connectors, and gene analysis devices are nano-sized
objects.
Can you add objects to the following table?
Macro
Switches
Light bulbs
Fans
Pumps
Micro
Microswitches
Inertial sensors
Chemical sensors
Micropumps
Nano
Carbon Nanotubes
Biomolecular sensors
Biomolecular motors
Table 1: Macro, Micro and Nano Objects
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Comparison of Scale - PK
A Sense of Size
A honey bee is approximately 12 mm long
A human hair is 60 to 100 micrometers in diameter
A red blood cell averages about 7 micrometers in
diameter
The DNA helix is 0.002 micrometers wide or 2 nm
wide.
Something for you to do: Estimate the size of other
objects that you are familiar with.
This is a good time to take and break and do one of the activities in this Scale Learning Module. A
good activity to do is "Cut To Size."
Scales
As seen in previous graphics, a good way to compare the size of different objects is to place the
objects on a scale. There are two basic scales that are used: the linear scale and the logarithmic
scale. Following is a brief discussion and illustration of both types of scales.
Linear Scales
Linear Scale
In a linear scale each increment and incremental increase is equal to the one before (in other words –
equal divisions for equal values). For example, the linear scale above goes from 0 millimeters to 25
millimeters in 5 mm increments. This scale works fine when the total range in the size of objects is
small, such as illustrating the sizes of five objects from the size of a bumble bee (~24 mm long) to the
size of a pinhead (~1 mm in diameter).
Can you estimate the size of each object in the scale?
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Comparison of Scale - PK
Logarithmic Scales
Logarithmic Scale
But what happens when the range becomes bigger (e.g. from 1.5 Gm to 5 μm)? In such a
comparison, a linear scale is not practical, nor as effective; therefore, a logarithmic scale could be
used (above). A logarithmic scale uses the logarithm of a physical quantity rather than the quantity
itself. It is effective for comparing the relative size of objects when the actual range in size is huge.
The above graph covers a range from the diameter of the sun (1.39 Gm) to the size of a pin head (1.5
mm). Imagine how long a linear graph would be that compared these objects.
Linear vs. Logarithmic
These two graphs above illustrate the exact same
information, but look how different they look.
They both show the increase in the number of
transistors per die from 1970 to 1995. The graph on
the top is a linear scale and the one on the bottom is
a logarithmic scale. Notice in the linear scale, the
growth is easily seen as being exponential. In the
log scale, it almost looks linear; however, since it is
logarithmic, you can easily see that the growth
between 1970 and 1975 went from over 1000 to just
under 10,000 transistors per die. Between 1990 and
1995, the growth was from 1,000,000 to almost
10,000,000 per die! That's a significantly larger
increase. By 2008 transistors per die has increased
to over 200 million!
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Comparison of Scale - PK
Macro vs. Microdevices
When comparing macroscopic devices to their micro equivalents, the micro devices are
 much smaller,
 much lighter,
 more energy efficient, and
 constructed with fewer materials.
In equivalent applications, such as sensors or transducers, microdevices exceed their macroscopic
equivalents in
 reliability,
 efficiency,
 selectivity,
 response time, and
 energy consumption.
Micro-sized objects allow us to go places where no objects have gone before.
Microtechnology
"Microtechnology is the art of creating, manufacturing or using miniature components, equipment
and systems that have been mass produced. The first and foremost feature in this field is its
multidisciplinary nature, as microtechnology systems use electronic, computerised, chemical,
mechanical and optical elements as well as various other materials." [Federal School of
Polytechnics]5
The products of Microtechnology are microsystems and microsystem components.
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Comparison of Scale - PK
What are Microsystems?
Microsystems are miniaturized integrated systems in a small package or
more specifically, micro-sized components working together as a system
and assembled into a package that fits on a pinhead (see figure above).
In the United States, these devices are referred to as
microelectromechanical systems or MEMS. European countries referred
to such devices as microsystems or MST. These two terms – MEMS and
MST – are often used interchangeably.
Microsystems are microscopic, integrated, self-aware,
stand-alone products that can sense, think, communicate
and act. Some systems can do all of these things, plus
scavenge for power.
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Three MEMS blood pressure
sensors on a pin head
[Photo courtesy of Lucas
NovaSensor, Fremont, CA]
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Comparison of Scale - PK
Microsystems Applications
MicroFluidic pump used for inkjet printheads (The piezoelectric crystal expands and contracts to
move fluid from the reservoir through the nozzle)
 Ink Jet Print Heads (see figure)
 Automobile applications (flowrates, tire and oil pressures, crash sensors, airbag
deployment)
 Biomedical applications (drug delivery, diagnostics, therapeutics)
 Optical applications (digital light processing, microopticalelectromechanical systems,
digital mirror devices)
 Homeland security (gas detections, motion detectors)
 Environmental applications (earthquake, volcano and tsunami sensors, atmospheric sensors)
 RF (Radio Frequency) MEMS (digital communications, switching)
 Mass Storage Devices
 Aerospace (leak detection, vibration sensors, positioning, navigation, monitoring space
personnel health)
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Comparison of Scale - PK
Nano meets Micro
The smaller microsystems become the smaller their
components become. For example, IBM has been working
on a read/write storage device that can fit 1 Terabit of data
on a surface the size of a standard postage stamp. 6 In order
to do this, the "bit-making" component needs to be nanosize, not micro-size. Hence the overlap occurs of micro and
nano devices. In the IBM read/write storage devices, the
cantilevers are approximately 2 microns wide while the
read/write tip is approximately 10 nm wide at the apex (see
figure right).
MEMS Read/Write Storage Device (IBM Millipede –
prototype)
[Photo courtesy of IBM]
Nanotechnology
The term Nanotechnology is so new, that how it is defined, depends on who you ask. Below are
some definitions of Nanotechnology:
"Nanotechnology is the understanding and control of matter at dimensions of roughly 1 to 100
nanometers, where unique phenomena enable novel applications. Encompassing nanoscale
science, engineering and technology, nanotechnology involves imaging, measuring, modeling, and
manipulating matter at this length scale." National Nanotechnology Initiative (NNI)

"Research and technology development at the atomic, molecular or macromolecular levels, in
the length scale of approximately 1-100nm range.
 Creation and use of structures, devices and systems that have novel properties and functions
because of their small and/or intermediate size.
 An ability to control or manipulate on the atomic scale."
MANCEF Roadmap 2nd Edition, p.161 (based on NNI)
"The name nanotechnology originates from [the] nanometer. In the processing of materials, the
smallest bit size of stock removal, accretion or flow of materials is probably of one atom or one
molecule namely 0.1-0.2nm in length. Therefore, the expected limit size of fineness would be of the
order of 1nm. Accordingly, nanotechnology mainly consists of the processing of separation,
consolidation and deformation of materials by one atom or one molecule."
N. Taniguchi, "on the Basic Concept of Nanotechnology," Proc. Intl. Conf. Prod. Eng. Tokyo, Part
II – Japan Society of Precision Engineering, 1974
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Comparison of Scale - PK
Nanoscience
Structure of a bacterial flagellar motor.
The flagellum is used to move the bacterium through the system. The flagellum is powered by the
rotary engine anchor to the cell wall and powered by proton motive force. The rotor can rotate at
speeds as high as 17,000 revolutions per minute, moving the flagellar filament at speeds as high as
1000 rpms. Microtechnology is studying this biomolecular devices to see if it can be manufactured
and use to move cargo such as medicine to specific parts of the body..7
[Image courtesy of LadyofHats]
Nanotechnology, or more specifically, nanoscience has been around for quite a long time.
Nanoscience is concerned with the study of novel phenomena and properties of materials that occur
at extremely small length scales.
Physicists and biologists have been studying nanodevices such as cells, molecules, and atoms for
years, and in some cases, centuries. In the 18th century, John Dalton, a British chemist and
physicist, made the earliest steps toward recognizing that matter was composed of atoms. In 1952,
a series of experiments by Alfred Hershey and Martha Chase, known as the "Hershey-Chase
Blender Experiments", supported the role of DNA as the carrier of genetic information.
Nanotechnology is the application of nanoscale science, engineering and technology to produce
novel materials and devices.
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Comparison of Scale - PK
So what is Nano?
Nano is a lot of things:
 Anything less than 100 nm in any dimension regardless of how it was made.
 Anything made by specifically placing materials atom by atom or molecule by molecule.
 Anything made from the bottom up (one atom at a time).
 Anything with unique properties because of its small size (Some of the laws of physics that
apply to macroscopic objects, do not apply to nano-size objects).
Micro vs. Nanotechnology
In addition to the actual size of the objects, fabrication is another primary difference between micro
and nanotechnology. Nanotechnology normally uses what is referred to as the "bottom up"
approach to fabrication. Microtechnology normally uses the "top down" approach.
Bottom up
Assembling a quantum corral
[Images courtesy of IBM STM Image Gallery]
The bottom up approach means a structure is made by building it atom by atom or molecule by
molecule from the bottom up. Each individual atom or molecule is manipulated or controlled for
correct placement.
The figure on the left (above) shows four stages in the assembly of a quantum corral. The figure on
the right (above) shows the final assembly of a corral that has been made by placing 48 iron atoms
in a circle, one at a time, onto the surface of gold.
So what does the bottom up approach sound like?
Nature or the building of a living object.
 The cells of a seed multiply to become a full blown tree.
 The tree continues to grow by taking individual atoms and molecules and assembling its leaves.
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Top down
Creating suspended cantilevers using the top down approach
The top down approach selectively removes material until the desired structure is achieved. In
semiconductor and some MEMS processes, one
 applies a pattern,
 selectively etches away exposed material and
 ends up with a circuit or component (as illustrated above).
The above graphic shows how microcantilevers (red) are initially incorporated into a block of
layered material. By removing the layer below (green), the microcantilevers are released and
suspended over the substrate (blue).
What does the top down approach sound like?
Sculpturing
A sculptor can start with a tree trunk and by removing select pieces of the tree, end up with a totem
pole, bird, desk, or any desired object. What about Mount Rushmore? How was that made? Start
with a cliff, and remove everything that doesn’t look like a president!
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Shrinking Technology
The space of one transistor, now holds hundreds of transistors (graphic not to scale)
Semiconductors have evolved over the years with technological advancements in the deposition of
materials and the selective removal of materials through the photolithography and etch processes.
Deposition layers have become thinner and etched widths have become smaller (see figure).
A deposited gate oxide layer used to be 20 microns or larger. Now it can be as thin as 1 nm! Gate
widths, patterned and subsequently etched have shrunk from more than 1 micron dimensions to less
that 50 nm! Since today's semiconductor manufacturing processes are creating structures less than
100 nm, this technology can be considered Nanotechnology.
Nano meets Micro
As devices shrink, the necessity to use nanosized objects when constructing micro-sized
devices increases. Take for instance the
electronic electrodes shown in the figure to the
right. The image on the left shows carbon
nanotubes (green) linked to four electronic leads
(gold). The leads were made using a standard
semiconductor technology deposition of metal
by evaporation, followed by lithography and
etch for the electrode pattern. The carbon
nanotubes were deposited onto the chip from
solution and located using an Atomic Force
Microscope (AFM). Attaching the nanotubes to the
leads required the "find 'em and wire 'em" technique.
[University of California – Berkeley]8 This
technique does not lend itself to high volume
production! [The right graphic is an illustration of a
carbon nanotube from the Southwest Center for
Microsystems Education.]
Southwest Center for Microsystems Education (SCME)
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Nanotube connectors for
microelectronics
[University of California – Berkeley,
Image source: Office of Basic Energy
Sciences, U.S. DOE]
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Comparison of Scale - PK
BioMEMS
One of the greatest applications for micro / nano devices is in the biomedical field. The overlap
between microbiology and microsystem feature sizes makes integration between the two possible.
Devices fabricated for the medical field are referred to as bioMEMS.
Examples of BioMEMS
Drug delivery system using a micropump and nanosized needles
Examples of BioMEMS are
 Drug delivery systems with nanosize needles and microsize pumps
 Diagnostics arrays that use microcantilevers and nano coatings (monolayers) to capture
nanosize particles.
 Artificial Retina Prostheses that use an electrode microarray implanted on the retina.
 Micro-sized laboratories for analyzing liquid samples such as blood, urine and sputum.
 Numerous devices used for diagnostic and therapeutic applications
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A Biosensor
A gold dot, about 50 nanometers in diameter, fused to the end of a cantilevered oscillator about 4
micrometers long. A one-molecule-thick layer of a sulfur-containing chemical deposited on the
gold adds a mass of about 6 attograms, which is more than enough to measure.10
[Printed with permission Craighead Group/Cornell University and © Cornell University]
A biosensor is a devices used to detect, capture and analyze analytes (i.e. antibodies, antigens,
proteins) within a sample solution. The biosensor in the figure consists of a gold dot, about 50
nanometers in diameter, fused to the end of a cantilever oscillator about 4 micrometers long. A
one-molecule-thick layer (monolayer) of a sulfur-containing chemical is deposited on the gold. An
external excitation causes the cantilever to oscillate.
This biosensor cantilever could be used to detect and collect e-coli cells in a sample. The cells
would stick to the chemically treated layer on the gold dot adding a few attograms of mass to the
cantilever. Even though a few attograms is very small, it is enough to affect a measurable change
in the oscillations of the cantilever. This allows the concentration of e. coli cells in the sample to
be measured.
Matching Activity
Match the following components with their scale
Component
1
Strain of hair
2
A molecule
3
75 nm
4
233 mm
5
48 microns
6
Pollen
A
B
C
Scale
Macro
Micro
Nano
Table 2: Components and Their Scale
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Summary
Milky Way (left) [Image courtesy of NASA/JPL-Caltech]
Quantum Corral of 48 iron atoms [Courtesy of IBM STM Gallery]
How big is big? How small is small? It depends on the scale. A macro-scale can be millions of
times bigger than a microscale. The microscale is a thousand times bigger than the nanoscale. In
the macro-scale, the earth is small when compared to the sun, but huge compared to a baseball. In
the micro / nano-scales, an 8 micron wide red blood cell is huge compared to a 2 nm diameter
carbon nanotube.
The discovery of nano-sized particles has made an already big universe even bigger. Distances are
now measured in lengths from light years to nanometers (see pictures above). Modern technologies
are taking advantage of the wide range of sizes in order to improve existing processes and develop
new ones.
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Food For Thought
How have discoveries in the microscale affected the study of the universe?
How have discoveries in the micro and nano-scales affected our daily lives?
In today's world, what is small?
References
1.
To see the Universe in a Grain of Taranaki Sand, by glen Mackie.
http://astronomy.swin.edu.au/~gmackie/billions.html
2.
Milky Way Image. "Our Milky Way Gets a Makeover". NASA/JPL-Caltech. 06/03/08.
http://www.nasa.gov/mission_pages/spitzer/multimedia/20080603a.html
3.
Image credits from NASA.gov: Sun and Earth(Image credit: World Book illustration by Roberta
Polfus), Earth (Image credit: NASA/Goddard Space Flight Center), Sun (Image credit:
NASA/Transition Region & Coronal Explorer), Greek Islands (NASA/GSFC/LaRC/JPL, MISR
Team), MEMS Gyroscope (NASA Jet Propulsion Laboratory)
4.
Image of Nanowire looped on human hair. NSF image. Credit: Limin Tong/Harvard University.
http://www.nsf.gov/od/lpa/news/03/pr03147_images.htm
5.
"Microtechnology". Micronora.com. http://www.micronora.com/ref/microtechnologies.htm
6.
"IBM's Millipede Project Demonstrates Trillion-Bit Data Storage Density". IBM Research.
Zurich. June 22, 2002.
7.
"EU supports research towards the construction of nanomotors". Max Planck Institute for
Biophysical Chemistry. Nanowerks News. March 16, 2006.
8.
"Carbon Nanotube Electronics". Nanoelectronics Research Group. Department of Physics.
University of Maryland. http://www.physics.umd.edu/condmat/mfuhrer/ntresearch.htm
9.
Quantum Corral Images. IBM STM Image Gallery.
http://www.almaden.ibm.com/vis/stm/stm.html and
http://www.almaden.ibm.com/vis/stm/corral.html
10.
Silicon Atoms Image. “Observing the Wings of Atoms”. Feng Lui. University of Utah News and
Public Relations. June 2, 2003. http://web.utah.edu/news/releases/03/jun/orbitals.html
11.
Image of micro-sized gears (Macro, micro, nano) – Courtesy of Sandia National Laboratories.
www.mems.sandia.gov
12.
Micro to Nano – An Introduction. Mathius Pleil, SCME, CNM
13.
Microtechnology Education Resource Center (MERC)
Related SCME Units (can be downloaded from scme-nm.org)






Units of Weights and Measures PK
Units of Weights and Measures Activity
Conversion of Weights and Measures Activity
Scale Activity: Cut to Size
Scale Activity: The Scale of Biomolecules
Scale Activity: Zoom In / Zoom Out
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Glossary
Linear Scale: A scale each increment and incremental increase is equal to the one before.
Logarithmic Scale: A scale that uses increments in powers of 10
Macroscopic: Objects greater than 100 microns or visible to the naked eye
MEMS: Microelectromechanical Systems
Micro: A scale between 0.1 μm and 100 μm
Micrometer: One thousandths of a meter (10-6 meter)
Micron: A unit of measurement equal to 1 milli Torr or 1 millionth of a meter.
Nano: A scale between 0.1 nm and 100 nm
Nanometer: One billionth of a meter (10-9 meter)
Nanotechnology: Technology involved with design and fabrication of devices and thin films with
dimensions in the nanometer range (1E-9 m).
Support for this work was provided by the National Science Foundation's Advanced Technological
Education (ATE) Program.
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Comparison of Scale - PK
Southwest Center for Microsystems Education (SCME)
University of New Mexico
MEMS BioMEMS Topic
The Scale of Biomolecules
Activity SCO
This SCO is part of the Learning Modules
Biomolecular Applications for bioMEMS
and
Scale
Target audiences: High School, Community College, University
Support for this work was provided by the National Science Foundation's Advanced Technological Education
(ATE) Program through Grants #DUE 0830384 and 0902411.
This Learning Module was developed in conjunction with Bio-Link, a National Science Foundation Advanced
Technological Education (ATE) Center for Biotechnology @ www.bio-link.org.
Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors
and creators, and do not necessarily reflect the views of the National Science Foundation.
Copyright © by the Southwest Center for Microsystems Education
and
The Regents of the University of New Mexico
Southwest Center for Microsystems Education (SCME)
800 Bradbury Drive SE, Suite 235
Albuquerque, NM 87106-4346
Phone: 505-272-7150
Website: www.scme-nm.org
The Scale of Biomolecules Activity
Participant Guide
Description and Estimated Time to Complete
This activity is an exploration of the scale of biomolecules (nucleic acids, carbohydrates, proteins,
and lipids). You will identify the relationship between the sizes of different biomolecules and cells.
An understanding of the size of cells and biomolecules allows you to better understand how these
components can be used within MEMS devices and as bioMEMS devices.
Estimated Time to Complete
Allow approximately 45 minutes to complete
Introduction
Nanoscience is concerned with the study of novel phenomena and properties of materials that occur
at extremely small scales. Nanotechnology is the application of nanoscale science, engineering and
technology to produce novel materials and devices.
"Nanotechnology is the understanding and control of matter at dimensions of roughly 1 to 100
nanometers, where unique phenomena enable novel applications. Encompassing nanoscale science,
engineering and technology, nanotechnology involves imaging, measuring, modeling, and
manipulating matter at this length scale. " National Nanotechnology Initiative (NNI)
BioMEMS is one of the outcomes of the merging of Nanotechnology and Microelectromechanical
Systems (MEMS). Biomolecules are enabling the design and fabrication of MEMS devices with
components in both the micro and nanoscales. BioMEMS takes advantage of the properties of
biomolecules to do the same work as fabricated components.
To better understand Micro and Nanotechnologies, it is important to understand the components and
the size of these components relative to each other.
Activity Objectives and Outcomes
Activity Objectives
 Demonstrate your understanding of the relative size of biomolecules by creating an illustration
that consists of correctly proportioned molecules joined to other molecules and cells.
 Describe two applications of biomolecules in MEMS.
Activity Outcomes
You will be become familiar with the scale of cells and biomolecules and how they are used in
bioMEMS devices.
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The Scale of Biomolecules Activity
Supplies
This activity can be completed using a graphics software program such as PowerPoint. If no such
program is available, then a paper graphic can be constructed with the following supplies.
Per participant or team
One large sheet of graph paper
Ruler
Colored markers
Pictures of items in the following table - "Relative size of Biomolecules in Nanometers". Pictures
can be drawn or downloaded from the internet. If downloaded, adjust the size of each object
relative to the size given in the activity table before printing.
Activity – The Scale of Biomolecules
Complete one of the following two procedures using the table on the next page – Relative Size of
Biomolecules in Nanometers.
Procedure 1:
Using a graphics program or a large sheet of graph paper and printed or drawn pictures, create a
scaled graphic of the following:






A red blood cell attached to a spore,
which is attached to a bacterium,
which is attached to a liposome vesicle,
attached to a tobacco mosaic virus.
Add a porin channel to the liposome vesicle.
Place a 10,000 nm long flagellum on the bacterium.
Even though your graphic will be in the macroscale, you must maintain the correct proportion to the
actual sizes of the objects. The actual size of each object is listed in the table Relative Size of
Biomolecules in Nanometers..
Procedure II:
Using a graphics program or a large sheet of graph paper and printed or drawn pictures, create a
scaled graphic of ALL of the objects in the table (Relative Size of Biomolecules in Nanometers)
illustrating relative sizes and the correct size proportions.
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The Scale of Biomolecules Activity
Relative Size of Biomolecules in Nanometers
Object
Hydrogen atom
Water molecule, H2O
Amino acid
DNA (width)
Cell membrane
Ferritin iron-storage
protein
Bacterial S-layer
Porin channel
Actin filament
Intermediate filament
Microtubule
Bacterial flagellum
Tobacco mosaic virus
Magnetosome crystals
Liposome vesicle
Pores in synthetic
membrane
Bacterial cell
Spores
Red blood cell
Human hair
Diameter (nm)
0.1
0.3
1
2.5
5-9
12
5-35
4-10
5-9
10
25
12-25
18
35-150
100 (minimum)
Inside diameter (nm)
8
2-8
2-3
12-15
2-3
4
85 (minimum)
200 (minimum)
250 (minimum)
1000 (maximum)
1,000-8,000
6,000-8,000
60,000 to 100,000
Post-Activity Question
Briefly discuss two applications of biomolecules as a component in a MEMS or bioMEMS device.
Your discussions should include the sources of your information as well as how the devices works
and the function of the biomolecule within the device.
Summary
It is important to understand the actual size of an object to better understand its function and
application in a bioMEMS device. The nanoscale of biomolecules enables functions to be
performed that were not possible a few years ago. We now have the technology to incorporate
nanosize particles such as short chains of DNA, antibodies, proteins, and other biomolecules into a
fabricated MEMS.
SCME Resources

Biomolecular Applications for bioMEMS Learning Module (Can be downloaded from scmenm.org. Select Educational Materials/BioMEMS)
Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE)
Program. This Learning Module was developed in conjunction with Bio-Link, a National Science Foundation
Advanced Technological Education (ATE) Center for Biotechnology @ www.bio-link.org.
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The Scale of Biomolecules Activity
Southwest Center for Microsystems Education (SCME)
University of New Mexico
MEMS Introduction Topic
Scale Activity: Zoom In / Zoom Out
Shareable Content Object (SCO)
This SCO is part of the Learning Module
Scale
Target audiences: High School, Community College, University
Support for this work was provided by the National Science Foundation's Advanced Technological Education
(ATE) Program through Grants #DUE 0830384 and 0902411.
Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors
and creators, and do not necessarily reflect the views of the National Science Foundation.
Copyright © by the Southwest Center for Microsystems Education
and
The Regents of the University of New Mexico
Southwest Center for Microsystems Education (SCME)
800 Bradbury Drive SE, Suite 235
Albuquerque, NM 87106-4346
Phone: 505-272-7150
Website: www.scme-nm.org
Scale Activity: Zoom In / Zoom Out
Activity
Participant Guide
Description and Estimated Time to Complete
As you learned in the Scale unit and other activities, macro objects consist of micro and nano-sized
objects. In this activity you will illustrate what you've learned about the various scales by creating
an illustration of an object and the various sized objects that it contains. For example, you could
start with a macro-sized object (such as a human) and slowly zoom in to its nano-sized components
(like DNA). You may also choose to go the other way and zoom out from the nano-sized object to
the macro-sized object.
To get you started, we'll take you through the universe to our galaxy, to earth, to man, and end up
somewhere inside of the human body to parts yet unknown.
Estimated Time to Complete
You should set aside approximately 2 – 3 hours to complete this activity.
Introduction
Exploring the universe involves the study of the objects within it as well as its composition.
Measurements and comparisons are constantly being made in an effort to discover something new
and to move closer to how big the universe could be. While astronomers have been trying to figure
out how big the universe really is, scientists and engineers have been exploring how small things are
and how small something has to be before it cannot be manipulated or measured.
So what have these scientist found?
In this activity, you will illustrate what these scientists have found.
Activity Objectives and Outcomes
Activity Objective
 Illustrate the relationship of scale by breaking an object into its various sized components:
macro (> 100 microns), micro, nano.
 Calculate how much bigger (in powers of 10) one object is over another object in a different
scale.
Activity Outcomes
The outcome of this activity should illustrate your understanding of how objects are constructed
from smaller objects all the way down to the nano-scale and beyond. At the end of this activity you
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Zoom In / Zoom Out Activity
should be able to answer the following questions:
 When constructing micro-sized objects, would it be more logical to construct the object from the
bottom up or from the top down? Be prepared to justify your answer.
 When constructing nano-sized objects, would it be more logical to construct the object from the
bottom up or from the top down? Be prepared to justify your answer.
Team
You can do this activity by yourself or with one other participant.
Supplies
The supplies that you need for this activity is dependent upon how you choose to illustrate the
assignment.
Resources

Exploring the World of Optics and Microscopy. Molecular Expressions.
http://micro.magnet.fsu.edu/index.html

Virtual Scanning Electron Microscopy. Molecular Expressions. Interactive Java Tutorial.
http://micro.magnet.fsu.edu/primer/java/electronmicroscopy/magnify1/index.html

Introduction to Optical Microscopy, Digital Imaging, and Photomicrography. Molecular
Expressions. http://micro.magnet.fsu.edu/primer/index.html

Secret Worlds: The Universe Within. Molecular Expressions. Interactive Tutorial.
http://micro.magnet.fsu.edu/primer/java/scienceopticsu/powersof10/
Documentation
Your documentation will include (but not limited to) the following items:
 A discussion of each on-line tutorial and answers to questions about the tutorials.
 A short description of your project – what you are going to illustrate.
 A visual presentation of your illustration. It could be animated PowerPoint, flash animation,
physical model, manual flip animation, or expanded drawing.
 Answers to Post-Activity Questions
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Zoom In / Zoom Out Activity
Activity: Zoom In / Zoom Out
Description
In this activity you should demonstrate what you have learned about the various scales by
creating an illustration of an object and the various sized objects that it contains.
1. Complete an on-line tutorial.
Description
a. Read the following instructions BEFORE going to the tutorial.
b. Go to
http://micro.magnet.fsu.edu/primer/java/scienceopticsu/powersof10/
and put the tutorial in the Manual Mode. (Click on the "manual"
button)
c. Familiarize yourself with the screen. Find where the name and the
size of the objects are illustrated.
d. Zoom In – Read what the object is and its size.
e. Answer the following questions:
 What is the first object in the micro-scale? How big is this
object?
 What is the first object in the nano-scale? How big is this object?
 How much bigger is the "oak tree leaf" to the "cells on the leaf's
surface"?
 How big is an individual leaf cell?
 How big is the nucleus of a carbon atom? (Use a metric prefix.)
 How much bigger is the nucleus of a leaf cell than the nucleus of
a carbon atom?
 Now Zoom Out.
2. Complete another on-line tutorial.
Description
a. Go to
http://micro.magnet.fsu.edu/primer/java/electronmicroscopy/magnify1/in
dex.html
b. Zoom in and out on several objects in this tutorial.
c. "Play" with the four slider controls and figure out what they do.
 What type of analytical tool was used to capture these images?
 When viewing these images, what effect did the amount of light
(brightness) have on the object's details?
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Zoom In / Zoom Out Activity
3. Layout your illustration.
Description
a. Pick an object that you would like to create your own zoom in or zoom
out.
b. Ideas: Pencil, piece of fruit, any animal (chicken, cat, etc.), MP3 player
c. Outline how you will present this object from the macro to nano-scale or
vice versa.
4. Create your illustration.
Description
Create an illustration with at least 15 steps covering three scales that carry
the viewer from a nano-sized object to a macro-sized object (zoom out) or
vice versa (zoom in).
Here are some ideas on how to create your illustration. You are welcome to
use other methods.
a.
Animated PowerPoint presentation
b.
Flash animation
c.
Physical model
d.
Manual flip animation
e.
Expanded drawing
For each step in your illustration indicate what the object is and its size.
5. Present your illustration.
Description
Present your illustration to your instructor and other participants of this
activity.
Solicit feedback.
 What were the strengths and weaknesses?
 What could have made it better?
 What is accurate? If not, where were the inaccuracies?
 Was this a good illustration for what you were trying to represent? If
not, why not?
6. Answer the Post-Activity Questions.
Description
Answer the Post-Activity Questions at the end of this procedure.
7. Complete your documentation.
Complete your documentation as outlined in the previous Documentation
Section.
8. Submit your illustration and documentation.
Description
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Zoom In / Zoom Out Activity
Post-Activity Questions
1. When constructing micro-sized objects, would it be more logical to construct the object
from the bottom up or from the top down? Explain the reasoning behind your answer.
2. When constructing nano-sized objects, would it be more logical to construct the object from
the bottom up or from the top down? Explain the reasoning behind your answer.
3. What type of analytical tools enable scientist to see objects in the micro and the nanoscales? (List at least three. Briefly discuss each. In your discussion identify the distinct
differences between the tools in relation to "what" they can see.)
Summary
In this activity you continued to explore what matter is made of and how small matter can be.
References
 A Comparison of Scale: Macro, Micro, and Nano PK
 Scale Inquiry Activity: Cut to Size
Support for this work was provided by the National Science Foundation's Advanced Technological
Education (ATE) Program.
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Zoom In / Zoom Out Activity
Southwest Center for Microsystems Education (SCME)
Learning Modules available for download @ scme-nm.org
MEMS Introductory Topics
MEMS Fabrication
MEMS History
MEMS: Making Micro Machines DVD and LM (Kit
available)
Units of Weights and Measures
A Comparison of Scale: Macro, Micro, and Nano
Introduction to Transducers, Sensors and Actuators
Wheatstone Bridge (Pressure Sensor Model Kit
available)
MEMS Applications Overview
Microcantilevers (Dynamic Cantilever Kit available)
Micropumps Overview
Crystallography for Microsystems (Breaking Wafers
and Origami Crystal Kits available)
Oxidation Overview for Microsystems (Rainbow
Wafer Kit available)
Deposition Overview Microsystems
Photolithography Overview for Microsystems
Etch Overview for Microsystems (Rainbow Wafer
and Anisotropic Etch Kits available)
MEMS Micromachining Overview
LIGA Micromachining Simulation Activities (LIGA
Simulation Kit available)
Manufacturing Technology Training Center Pressure
Sensor Process (Three Activity Kits available)
MEMS Innovators Activity (Activity Kit available)
BioMEMS
Safety
BioMEMS Overview
BioMEMS Applications Overview
DNA Overview
DNA to Protein Overview
Cells – The Building Blocks of Life
Biomolecular Applications for bioMEMS
BioMEMS Therapeutics Overview
BioMEMS Diagnostics Overview
Clinical Laboratory Techniques and MEMS
MEMS for Environmental and Bioterrorism
Applications
Regulations of bioMEMS
DNA Microarrays (GeneChip® Model Kit available)
Hazardous Materials
Material Safety Data Sheets
Interpreting Chemical Labels / NFPA
Chemical Lab Safety
Personal Protective Equipment (PPE)
MEMS Applications
Revision: 5/20/11
Check our website regularly for the most recent
versions of our Learning Modules.
For more information about SCME
and its Learning Modules and kits,
visit our website
scme-nm.org or contact
Dr. Matthias Pleil at
mpleil@unm.edu
www.scme-nm.org
Download