Carnegie Mellon University CARNEGIE INSTITUTE OF TECHNOLOGY THESIS SUBMITTED IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF MASTEROF SCIENCE POWER SUPPLY NOISE REDUCTION USING ACTIVE RESISTORS GOK(~E KESKiN ACCEPTED BY THE DEPARTMENTOF ELECTRICAL AND COMPUTERENGINEERING REVIEWED BY DATE DATE Acknowledgements I am thankful to mythesis advisor, Larry Pileggi, for providing megreat guidance during the course of this project. His full support and encouragementhave madethis work possible. He has been a constant inspiration for meduringthe difficult times of the project. I wouldalso like to thank KenMaiand Patrick Yuefor their help during the fabrication of the test chip and excellent advice on the problemsI encountered. I amparticularly grateful to Xin Li for his extremelyvaluable contributions starting from the first day of this project. I have learnt a lot from him, including identifying problemsand finding waysto solve them. Contributions of Marija Ilic and Aleksandar Veselinovic during the early exploration stages of this project have also been very valuable. I owe manythanks to Jaejin Park, KihwaChoi and Hasan Akyol, who have helped me in various stages of the project. I have to acknowledgethe great moral support of myfriends at Carnegie Mellon. UmutArslan, Hasan Akyol, Rohan Batra, Ahmet Gtirkan l~epni, Volkan Ediz, Thiago Hersan, WessamHassanein, Koushik Niyogi, Jonathan Proesel and Aleksandar Veselinovic have mademy stay enjoyable during this time. Most importantly, I owe great thanks to my family. Without them, I would not be here today. I am grateful to mygrandmother, mother, father, sister and brother-in-law for being the meaningof my life. 2 Table of contents Abstract ..................................................................................................................................... 4 1. Introduction .......................................................................................................................... 5 2. Background .......................................................................................................................... 8 2.1Decoupling Capacitance ............................................................................................................. 8 2.2Resistive Damping .................................................................................................................... 11 2.3Analysis ...................................................................................................................................... 12 3. ActiveResistorsfor NoiseReduction ................................................................................ 16 3.1Concept ...................................................................................................................................... 16 3.2Simulation Setup andResults .................................................................................................. 21 3.3Testing ....................................................................................................................................... 27 4. Conclusions ........................................................................................................................ 30 5. References .......................................................................................................................... 31 Abstract Withthe reduction of supply voltages in today’s integrated circuits, maintaining the powersupply voltage integrity within the required range of operation has becomea critical design problem. Furthermore,if clock gating techniques are used to reduce the overall powerconsumption,a large portion of the circuits can be turned on or off simultaneously, thereby introducing substantial transient switchingnoise on the powergrid. Thetraditional solution for this problemis to include both on- and off-chip decouplingcapacitors to reduce transient peaks; however, there is a point of diminishing returns for adding more on-chip capacitance in terms of area and leakage power in modern technologies. In this thesis, we propose the use of active resistors for damping the typically underdampedpower grid distribution network to reduce both the amplitudeand the duration of transient oscillations in the powerand groundrails. Initial simulation results in 130nmCMOStechnology demonstrate more than a 40%reduction in oscillation amplitude and a significant reduction of the oscillation settling time over a conventional design with the same amountof decoupling. A test chip has been built in the same technology and it is currently under test at Carnegie Mellon. 4 1. Introduction Continual scaling in integrated circuit technology has made it possible to achieve higher transistor density in a given die area. Even with the lowering of the power supply voltage for newer process nodes, the maximumpower consumption of high-end microprocessors has been projected to continue to increase for the foreseeable future (Fig. 1) [1]. Power Consumption Projection for High Performance Microprocessors, ITRS 2004 Update 220 200 180 180 16o 140 ~40 12o lOO 2005 2006 2007 2008 2009 Power Currentj Figure I. Power consumption trend in microprocessors [1]. Manyprocessors today include clock gating schemes that turn off unused portions of the chip to reduce power consumption [2]. However, when the idle regions are switched back on as required under normal operation, the current demand increases rapidly in a short period of time (at most a few nanoseconds). Ultimately, this current has to be supplied by the main board to the chip through the inductive bonding connections between the chip, package, and the board. Since the voltage drop across an inductor is proportional to the rate of change of current through it, the voltage on the chip level decreases below the 5 nominal value during switching. This type of noise is commonlycalled Ldi/dt noise, or simultaneous switching noise. An analogous situation occurs whenlarge active blocks are turned off whenthey are not needed. (Figure 2) dV=L.dl/dt Vdd Current Demand I Decap Chip _.L Figure 2. Simplemodeldescribing L.di/dt noise. There are two ways to decrease the voltage drop across the parasitic inductors: decreasing L or decreasing di/dt through the L. The L can be decreased by using a large numberof Vda/Gndconnections, since the effective inductance of two parallel connections is half that of a single one. In fact, in high performance processors, it is not uncommon to use two thirds of the available I/Os for power supply connections. Advanced packaging techniques can further reduce the parasitic inductance of the connections. For example, flip-chip packaging replaces bondwires used in peripheral wire bonding with lower inductance solder bumps. Thetraditional approachto reducing di/dt is to place decouplingcapacitors on the chip, package, and board levels (Figure 3). Decouplingcapacitors function as local charge reservoirs that supply (or absorb) portion of the required (excessive) charge during switching so that di/dt through the parasitic inductors reduced. On-chip decoupling is generally provided by MOSdevice capacitors that might consume significant die area [3]. However,there are diminishing returns for adding moredecoupling capacitance onchip, especially with the high gate leakage of the MOS decoupling capacitors in advancedtechnologies due 6 to thinner gate oxides. Moreover, the resonance caused by the parallel LCtank formed by the parasitic inductors and the decoupling capacitors result in an underdampedsystem and cause oscillations in the powergrid that can last for a significant numberof clock cycles in a high performancemicroprocessor. Package Decaps Chip Package S . Decaps Board Figure 3. Placing decouplingcapacitors on board, packageand chip level. In this thesis, we investigate an alternative wayof reducing power supply noise by using on-chip active devices together with decouplingcapacitors. By implementingactive resistors on the chip, weincrease the power grid damping and, thereby, reduce the power supply noise. Although the resistive damping has previously been applied [6-8], the maincontribution of this thesis is to propose two novel active resistor circuits that provide better noise reduction while consumingless power. 7 2. Background 2.1 Decoupling Capacitance The traditional solution to reducing noise on the power supply is to use on-chip decoupling capacitors, along with on-package and on-board capacitors. However,several resonances formed by these capacitors and parasitic inductors can cause undesired, underdampedoscillations in the powersupply voltage across the chip [4]. Figure 4 shows the frequency response of a typical chip power grid where impedance value is chosen arbitrarily for demonstration. At certain frequencies, the impedanceof the grid shows resonance peaks. Thesepeaks cause oscillations in the transient response whenthe powergrid is excited with a step response, like a clock gating signal. The frequency of those peaks depends on the value of decoupling capacitors placed across the board/package/chipand the parasitic inductors through whichthe current is carried to the chip. 5.0 4.0 l~ower Grid ImpedanceProfile Ill ’ + Package ~ Figure 4. Resonancesformedin the powerdistribution network. The parasitic inductance of the board connections and the inductance of the package-boardconnections are considerably higher than that of package-chip connection, and since larger decoupling capacitors can be afforded on package and board levels, the resonances for those two cases are at a lower frequency. Furthermore, the peaks are lower due to better noise suppression of those large capacitors. The resonance due to the parasitic inductance of package-chipconnections and on-chip decouplingcapacitors are generally at a higher frequency with a higher peak value, causing the primary noise problem in the distribution network. In Fig. 4, peak 3 denotes the resonance caused by the board connections and board decaps. Peak 2 denotes the resonance caused by board-package connections and package decaps, Peak 1 denotes the resonance of package-chip connections and on-chip decaps. In this work, mainly the noise due to peak 1 is investigated since it dominatesthe other two in most cases. Note that it is possible to observe a muchhigher frequency resonancedue to on-chip inductive connections and capacitors, but these are limited to local disturbances in the power supply noise across the chip and can be alleviated by better placement of on-chip capacitors. Since the frequencyof that resonanceis generally pretty far from the clock gating frequency(or, lbr a step disturbance, the amplitudeof the Fourier transformof the step signal at that frequencyis sufficiently low), the inducednoise is less. Since the duration of the noise is short as well, the effect on the chip operation is less of a concern than that caused by the noise caused by peak 1. Fig. 5 shows the noise waveformin the transient domainin response to a step disturbance, where high frequency noise due to on-chip decaps and package-chip connections cause the mainresonant noise. As power supply voltages scale downand noise margins becometighter in new generation process nodes, even more on-chip decoupling will be required for high-performance circuits. Unfortunately, there are diminishing returns for adding more decoupling capacitors on the chip (Figure 6). Doubling the on-chip decoupling capacitance, for example, does not reduce the power supply noise by half. One other important concern is the case for advanced technologies with 65nmand below when one considers not only the 9 increase in area, but also the associated exponential increase in the leakage power for MOScapacitors (Figure 7). Transient Noise on On-chip Power Supply Voltage Figure 5. Transient Noise on the Power Supply Network due to Resonances. Decoupling Capacitance Area vs. Relative Power Supply Noise 120000 100000 --*-- 90nm 80000 ~,-- 65nm 40000 20000 0 0 0.2 0.4 0.6 0.8 Relative PowerSupplyNoise(Overshoot+Undershoot)/Vdd Figure 6. Capacitance area vs. relative power supply noise projected by using ITRS Roadmap[l]. 10 Relative 0.8 0.7 Power Supply Noise vs. Leakage ~ 90nm -~- 65rim Gate K 0.6 0.5 0.4 0.3 0.2 0.1 0 0.001 0.01 0.1 1 10 100 1000 Gate Leakage Power (mW) Figure 7. Relative power supply noise vs. gate leakage of decaps projected by using ITRS Roadmap[1]. 2.2 Resistive The oscillations Damping in the power supply voltage across the chip are due to the underdampednature of the power grid distribution network. Underdamped systems inherently produce oscillations when excited by step responses. Clock gating can be considered as a step disturbance on the power grid since it causes a sudden change in the current demand of the chip. Additional damping may be provided by introducing dissipative elements, such as resistors, into the system. As described by Kundert [5], resistors various ways to the network. They can be placed in series/parallel series/parallel with decoupling capacitors. Resistance placed parallel can be introduced in with inductive bondwires, or in to bondwires reduces the decoupling of different regions, so it is not preferred. In 2003, Ji described a passive resistor the efficiency in series with the decoupling capacitors, but this approach reduces of the capacitors at high frequencies [6]. In the ideal case, one would like to get a fiat, 11 resonant free, very low impedanceacross all the frequencies in the powerdistribution network. Althoughan ideal capacitor would provide a short circuit at sufficiently impedanceof the power grid significantly, high frequencies- that would lower the the added series resistance limits the decoupling effect by imposing a lower bound on the high frequency impedance. This fact causes inadequate suppression of the high frequencynoise on the powersupply due to the switching of individual gates rather than clock gating. Gabaraproposed the use of active devices in series with the inductive bonding to introduce resistance; howeverthis is not applicable in high performance circuits where the IR drop would be significant [7]. Today’s microprocessors can consume more than 100A of peak current, and even 1 milli-ohm series resistance would cause a 100mVdrop in the on-chip power supply. With the power supply voltage on the order of IV, this significant drop must be avoided. Larsson discussed adding a passive resistance in parallel with the decoupling capacitors, but deemedit infeasible due to excessive DCpower dissipation [8]. Anyresistance that needs to be added between and Gndrails in this case is comparable to the total impedance of the power grid, and this would approximately double the powerdissipation. In this work, adding an active resistor in parallel with the decoupling capacitors is proposed, thereby eliminating excessive DCpowerdissipation while achieving the desired damping in ACdomain. 2.3 Analysis For a secondorder parallel RLCcircuit as shownin Figure 8, the characteristic equation is given as: s2 + 2(wos + w02 = 0 (1) The transfer function Z(s) betweencurrent input I and voltage output V is given as: Z(s) = s/C S 2 ~1" 2(WoS+ o where: 12 2 (2) 1 (3) I _1- Vou Figure 8. Parallel RLCcircuit. For an overdampedsystem, the dampingratio ~ has to be greater than 1, resulting in the condition for the resistor as: (4) R<I~V~2 A second order parallel RLCcircuit is a very simplified view of the powergrid. Here, C denotes total onchip decouplingcapacitance, R denotes the total resistance betweenthe rails, and L denotes the parasitic inductance of package-chip connections. Onthe package level, Vddis assumedto be constant and thus acts as small signal ground. IR drop due to inductive connections is ignored, so is any parasitic resistive componentin C. The step disturbance I models the turn on/off of a number of blocks simultaneously, possibly through clock gating. Vo,, is the output waveformon the on-chip supply voltage due to the step disturbance. Althoughthis system is overly simplified, it provides valuable intuition about the effect of dampingin the powergrid. An overdampedsystem does not produce any oscillations in its step response. Furthermore, overshoots are reduced as the dampingratio is increased. Thus, if we can achieve a low enough parallel resistance, oscillations can be eliminated completely. 13 To look into the effect of dampingin the transient domain,wecan calculate the time domainstep response of the systemas: Vou,(t)2 1~_~. The maximum/minimum values of the step response Vout(t) occur at points where d Vo=t(t)/dt =0. After a little bit of algebra, wecan find that the overshoot,the point wherethe first zero crossing for d V,,ut (t)/dt, occursat: t0 = w0 If weinsert t=to in (5), wecan find the overshootof the systemas a function of the dampingratio, ~ It turns out that overshoot decreases as (increases. Figure 9 showsa plot of overshoot with respect to (, normalized to the value where(=/(critically dampedsystem). FromFigure 9 it is evident that to achieve zero overshoot, the dampingratio has to be increased to infinity; meaningthat we cannot avoid overshoots completely with resistive damping.Furthermore, one can see that after (-3, the effect of additional dampingstarts leveling off. The settling time for zero-overshootwill be quite large as well. For (>1, there are no oscillations in the output as seen in Figure 10, whereall plotted step responses are overdamped.On the other hand, the settling times are significantly higher for large dampingratios. Thus, one should determine the amountof damping according to the desired overshoot, settling time and the power budget. This will imposea lower bound on R, thus an upper bound on damping ratio. 14 Relative Overshootvs. Damping Ratio 2.5 2 1.5 1 0.5 O "1 10 10e 2 101 10 Damping Ratio Figure9. Overshoot vs. damping ratio for a secondorderparallel RLC circuit. StepResponse for Second OrderIRLCCircuit 14......... . ................. . ......... : ..................................... . .................. 12 10 8 6 4 2 0 -2 0 ~ 0.1 J 0.2 0.3 0.4 0.5 Time 0,6 0.7 0.8 0.9 ~ x 10 Figure10. Stepresponseof the parallelRLC circuit for differentdamping ratios. 15 3. Active Resistors for Noise Reduction 3.1 Concept Havinganalyzed the second order parallel RLCcircuit, one can see that if minimum overshoot is desired, the dampingratio has to be as high as possible. This can be achieved by lowering R; however, since R is between the Vdaand Gndrails, low R will cause excessive power dissipation. If the passive resistor is replaced with an equivalent active resistor that will act as a dissipative device at the frequency of oscillations, one can achieve significant dampingwithout excessive powerdissipation. Vdd (noisy} 0 /.,.--Rin ~ Vbias2 ~3 I ~t l/(K.gm} M1 M2~~~ Gain Stage (Gain=KI Figure 11. Active resistor implementation. A simple active resistor implementationis given in Figure 11. In this circuit, M1acts as the small signal resistor, whereastransistors M2-M4 form a gain stage that amplifies the noise in the on chip supply voltage. Thesmall-signal input impedanceof this circuit, as looking into the drain of M1,can be found as: Rin -- 1 (7) K.gm~ whereK is the gain of the first stage, and gin1 is the small signal transconductanceof M1.The small signal gain from the node Vddto the gate of M1can be computedas: K- gm,~ (18) gm2 16 wheregin2 and g"4 are the small signal transconductancesof transistors M2and M4.M3is added to increase gm4while keepingg,,2 at a lowervalue, to increase the gain. M1must have a large enoughgm tO achieve smaller resistance and better damping.Thus, there is a trade-off between howmuchdampingwe can provide and the allowable power consumptionof the active resistor. If the active resistor is to respond to both positive and negative peaks in Vad, M1has to be biased at a sufficiently high voltage to be able to remain ONwhena negative peak occurs. However,it is possible to decrease the static powerconsumptionof the resistor circuit in certain cases wherea clock gating signal can be anticipated. Whenthere is not any disturbance, the bias voltage Vbiasl can be tied to Vod via a transmission gate, essentially placing the resistor block in sleep mode. Before gating signal is actually applied, the resistor can be turned on to provide damping.After the powersupply voltage stabilizes, the active resistor can be turned off again. Thus, the settling time of oscillations impacts the ONtime of the active resistor. For a given design, the amountof active resistance R to provide critical dampingcan be found from Eq. 4, where L is the total amountof parasitic inductance of the bondwires, and C is the on-chip decoupling capacitance; this sets an upper boundR for a critically dampedsystem. Havingdetermined the target R, and combiningequations 7 and 8, wehave the target impedanceas: R - g,.2 g,,~ "g,.4 (9) One of the most important considerations for the active resistor block is the power consumption,and M1is the power bottleneck in the design due to its large size comparedto M2-M4.Given a DCpower consumption budget P and assumingthat most of the consumptionis due to MI, wecan find: Ir~,.~x.Ve~ = P where la~l,,,~, (10) is the maximum allowable DCcurrent through M1. The overdrive voltage of M1(~IVu~..M1 V~,~tl - Vth.t~) has to be chosenaccording to the expectednoise voltage on the Vd~.For positive peaks on Vd~, 17 increases and the current through M1increases; whereas in negative peaks, AV~sj decreases. To make sure that M1remains saturation region in negative peaks, 3Vg~qhas to be greater than K.V,,, whereVnis the expectednoise peakon the Vda.Wefirst analyze the effect of the gain, K, in the circuit. Considerthe simplified circuit schematicin Fig. 12. Assumethat the stage betweenthe noisy Vdaline and the gate of MIis an ideal gain stage of K. Assumethat the target resistance value is R, small signal conductance of M1is gm and the current through M1is I. If the overdrive voltage of M1is chosen as K. V, as discussed above, we can write: gm -- 21 (11) K.V,, R- 1 _ K.gr~ I W 1 _V,, K 2~I 2I 2 (12) (13) Vgs Figure 12. Simplified Active Resistor Schematic If weassumethat for a given R, the noise peak on the Vadline is independentof the gain; from Eq. 12 wesee that the total current required through the active resistor is independentof the gain. However,the gain will 18 help reduce the total area for the given current through Eq. 13, whichwill help reduce leakage current of MI. If weignore the powerand area overheadof the gain stage K, wesee that there is not an improvementin the total power consumptionby increasing K, but there is an area saving. One must take into account that K cannot be increased abovea certain limit because of the gain stage overheadand the possibility that positive peaks might not be accommodated by high K values due to the high overdrive required at the gate (namely, K.V,). Once the K value has been determined and the overdrive of M1has been set, and since we knowthe target R from the total parasitic inductance/on-chip decouplingcapacitance as in Eq. 4, wecan determine IMI (current through M1)by the given total powerbudget from Eq. 10. That sets gmJand (W/L)1 through the equations: gin! -- 2IM~ AV~1 ¯ (14) Wecan choose L1 to be the minimumlength provided by the technology to minimize area, and that sets Wj. Oncegin1 is determined, wecan determinethe ratio of gin2 and gin4 using Eq. 9. Since wenowknowWIand L~, we can estimate the total capacitance between gate of M1 and ground, which is predominantly C~.~=Wj.L~.Co~.For a given minimumslew rate requirement SR at that node, and knowingthat 1~2<1~,we can find l~e from: I,~ = C~,.~.SR (15) Since dVe,1=dVe~.2, and we know1~, we can determine (W/L)2, and once again choose L2 to be the minimum length for the process for area minimization. Having determined 1~2 and z/Vg,~2, wenowknowgin2 and can determine gm4from Eq. 9. Wehave to choose dVgs4according to V, to ensure M4is in saturation, and that determinesI~4 by using a similar equation to Eq. 14. Thechoice of zJ Ves~and (W/L),~is not critical as long as the current IM.~ is chosen so that 1~= IM4-- IM2. That is a step-by-step approachto the determination of the sizes and bias voltages for the topology given in Fig. 11. In a real design, a few iterations for the design parameters might be required dependingon V, and the total powerbudget to find an optimal point. 19 An alternative implementationis shownin Fig. 13 that uses a second, higher powersupply. This topology has the potential to greatly reduce the static powerconsumptionwhenthe transistors M1and M5are biased at the edge of conduction. In that case, the upper block (transistors M5-M8) responds to negative peaks in the Vdd, whereas the lower block (M1-M4)responds to the positive peaks. Moreover, there is no need for the anticipation of a gating signal, since the resistors respondautomatically to any voltage swing in the rails. However,in this case the determination of the sizes of the transistors and bias voltages are morecomplicated since the two blocks are not acting in saturation region all the time. One waywouldbe to approximatethe operation of the blocks in the mid range of their swings and assumeit is a linear system swingingaround this midpoint and carry out a similar procedure as described for the previous topology. However,in the dual supply case, the gain of the amplifier block has a certain advantage in powerconsumption,since transistors M1and M5are not biased with overdrives K. V,. A more detailed analysis of the design tradeoffs in this case is one of the future worksfor this project. The optimal point might again require a few iterations. In our design, wehave chosen the samedevice sizes for the two blocks, and those sizes along with the bias voltages are given in Table1. Vddis set at 1.2V, and Vod2is set at 2.4V. 0 Vdd2 Vbias4 0 ’,~IV8 Vbias20 Figure 13. Alternative active resistor implementation. 20 Device/Spec. W/L (#m/#m) M1/M5 720/0.12 M2/M6 9.6/0.12 M3/M7 4.8/0.12 M4/M8 192/0.12 Voltage V) Vbiasl 0.82 Vbias2 0.75 Vbias3 0,9 Vbias4 O.82 Table 1. Transistor sizes and bias voltages used in the design 3.2 Simulation Setup and Results To test the efficiency of the proposedactive resistors for powergrid damping,a test chip has been built in UMC 130nmCMOS technology based on the topology given in Fig. 13. A block diagram of the chip is given in Fig. 14. The test circuit consists of two main blocks; the active resistors and the switching block. The switching circuits include two types of ring oscillators with two different oscillation frequencies, namely 2.35GHzand 5MHz.The high frequency (I-IF) oscillators emulate the latches that are switched on and off using the on-chip clock, typically around 2GHzto 4GHzfor a state-of-the-art microprocessor design in current technologies. These ring oscillators have an AND gate in their feedbackloop, and one of the inputs of the ANDgate is connected to the buffered output of the low frequency (LF) ring oscillator (Fig. 15). Therefore, the LFring oscillator provides the clock gating signal to the HFoscillators. The low frequency of 5MHzwas chosen to generate a step disturbance by turning on the HFoscillators to create noise in the power 21 grid, allowing enoughtime for the oscillations to die out, and perform another step disturbance. The total current consumptionof the switching block whenall oscillators are on is 56 mAfrom a 1,2Vpowersupply. Bondwires Package Vd~2 Active Resistor (Upper Decoupling Block) Ca Vbias4 Vbias3 Vdc External Clock Gating Control Signals Vbias2 Vbias1 Ground Figure 14. Block diagram of the test chip that has been built I nverters Buffer Clock Gater ~ (RingOsc.) ~ ~ GatedRing Oscillator (High Freq.) Figure 15o Switching block in the test chip In the actual implementation,two instances of the block diagramin Fig. 14 have been included with different amountof on-chip decoupling capacitance; one with 253pF, the other with 167pF and both implementedas 22 NMOS capacitors. The powergrids of the two instances are separated but they share the same on-chip ground (substrate). The simulation results that follow are with the 253 pF on-chip decoupling version. The power carded through non-ideal bondwireswith 4nil parasitic inductance and 37 ohmsparallel resistance, providing a quality factor (Q) of 15 at 100MHz.The value of the parasitic inductor is determined by assuming a lnH inductance per millimeter of bondwire length and an approximate total length of 4mm.The Q factor is approximated based on experience. The number of ring oscillators have been determined along with the amountof total on-chip decoupling so that there will be approximately +15%noise on the power supply as well as a resonant frequency of around 100MHz.The resonant frequency is chosen close to the one in a real design, and it is a function of the parasitic inductance and the on-chip decoupling capacitance. The current draw of the oscillators is chosen so that there will be around +_15%powersupply noise with the determined on-chip decoupling capacitance. Since those approximations are highly dependent on the packaging quality, several packagepins for Vaa/Gndhave been allocated to try different values of total parasitic inductance by selectively connecting them on the board level, and two instances with different on-chip decoupling have been included. In a real microprocessor design, more on-chip decoupling is needed due to higher switching currents, necessitating a higher amountof charge transfer from the capacitors to keep the power supply voltage within a safe operation region (generally +_10%).However,due to better packaging techniques and more power/groundpins, the parasitic inductance is reduced; and the resonant frequency does not generally deviate far from 100MHz.For schematic simulations, on-chip inductance and IR drop were neglected. It is very difficult to estimate the on-chip inductancewithout field solvers, and as discussed above, they are not the maincontributors of the global powersupply noise. On-chipIR drop has been neglected because the parasitic resistance of the power/groundlines in the chip are expected to be muchsmaller than the parasitic resistance of the bondwireswith a good layout, and thus they are not expected to change the Q factor of the network. Thebias voltages are assumedto be perfect voltage shifts with respect to ground(Vbiasl, Vbias2)or Vdd (Vbias3, Vbi,~4). Amodeselector determines the numberof high frequencyoscillators that are active, allowing testing at a numberof different current dissipations. Anexternal clock gating signal rather than the one generated on the chip can also be used. The topology in Fig. 13 has been used for active resistors because of its better 23 power performance comparedto the implementation in Figure 11. The total area of the chip, including the ~, and the active resistors active resistors is 0.115 mm occupy 6%of this area. The total static power dissipation of the resistors is less than 2%of the total powerdissipation of the chip. However;it should be noted that due to the use of ring oscillators, the average numberof transitions that makea powerconsuming transition in the test design nodes (i.e., the activity factor) is significantly higher comparedto a real digital circuit. Thus, the actual area penalty in a real design with comparabletotal powerdissipation wouldbe much less than 6%. The simulated power grid impedance, as seen between the Vad and Gndnodes on the chip schematic, is shown in Fig. 16 as a function of frequency. In this simulation setup, we ignore all resonances other than the one caused by on-chip decoupling capacitors and package-chip parasitic inductors. Ideally, the impedanceof the powergrid should be as fiat and low as possible so that oscillations wouldnot occur in the transient domain. Resonant oscillations in the transient domaincorrespond to peaks in the ACdomain. Dampingwith active resistors provides a significant decrease in the powergrid impedance,especially in the resonant frequencies around 100MHz.The peak impedanceis reduced by almost 75%after the active resistors are added. Response ~ith ,sn,d v,,ithout. Active Resist:ors ~¥ilh Act. Res. ,I Figure 16. Impedanceof the powergrid vs. frequency. 24 The schematic simulation results for transient voltage betweenthe Vaaand Gndon the chip are shownin Fig. 17. The oscillations caused by turning off the clock gating signal, or the positive peaks, are significantly reduced both in amplitude and duration. The peak voltage was decreased by more than 60%for positive peaks, whereasthe negative peak improvementis approximately15%.This difference can be attributed to the inherent dampingwhichoccurs whenmore of the digital circuit blocks are active, and thereby providing some amountof decouplingthrough the capacitances at the gate output nodes. Power Supply Noise with and without Active Resistors 1,50 With Resistor .40 "~ 1,20 1.10 1,00 200n 250n 500n time ( s 550n Figure 17. Transient simulation results. It should be noted that reducing positive peaks is very important for the long term reliability of the chip to prevent breakdowns.Because positive oscillations last muchlonger, it is very important to return to safe operation V~dlevels on the chip within a short period of time to avoid loss of processing time. This is especially important whenwe consider that the dominantresonance frequency in the powergrid is at a much lower frequency (around 100MHz)compared to the operating frequency of modern processors (around 3GHz). Without damping, a significant amount of latency would be required. The negative peaks are especially important in the case of memoriesor latches, whereexcessive drop in V~dmight cause the loss of the stored information. Both peaks affect the delay through gates and thus cause problemsin timing. 25 On-chip decoupling capacitors are generally implementedas large-area MOScapacitors, which can contribute substantial leakage current to the system. Byusing active resistors, the sameamountof noise suppression can be achieved with less decoupling capacitance, which results in muchless leakage power. Fig. 18 shows a projection of the leakage powerof the test design projected to 45nm[1], with and without the use of active resistors. For a relative noise ratio of 0.2, an approximatesaving of 25%is projected. For 130nmtechnology, wedon’t have gate leakage models; howeverat this processing node gate leakage is not generally a significant concern. Leakage Power vs. Relative Power Supply Noise 200 180 ¯ 160 140 120 __~ 100 ~ *- 45nm with Active Resistor 45nmNo Resistor 20 0.1 0.3 0.5 0.7 0.9 (Overshoot+Undershoot) / Vdd Figure 18. Leakagepowervs. relative powersupply noise. Projection of the test design to 45nm,ITRS Roadmap[11. 26 3.3 Testing The die shot for the fabricated chip is given in Fig. 19. Twoversions of the same circuit with different amountsof on-chip decouplingwere placed on the test chip, wherepowergrids are separated frorn each other. The power grids consist of parallel power and ground lines in the upper three metal layers and they are strapped with vias at each metal level. Figure 19. Die shot of fabricated testchip. The chip has been packaged in an open-cavity LQFP44-pin package. There are 8 Vod/Gndpads on the chip that are wire-bondedto the packagepins, those pins can then be connected on the board level. This allows a rough control of the total parasitic inductance going into the chip through bondwiresthat determines the total powersupply noise on the chip. There are two pins to supply a high supply voltage, Vda2,for each instance of the circuit. There are 3 control pins for each instance; two of themcontrol whichcircuits are on. Onecan turn on the clock gating oscillator (-5MHz)only, the high frequency oscillators only (~2.35GHz),a third of high-frequencyoscillators and the clock gating oscillator, or all circuits. Thethird control signal is used to 27 select if an external signal or the on-chiposcillator is to be used for the gating signal. Thereis one pin for the external clock gating signal. There are four DCbias voltages for each instance that are generated by an external voltage source and adjusted using potentiometers on the board for the active resistors. Those are supplied through packagepins. The bondedpads can be seen in the perimeter of the chip in Fig. 19. In addition to the bondedpads, there are 9 unbondedVdd/Gndpads for each instance. These are left for wafer probing the chip through a high-impedancewafer probe to see the on-chip supply noise. The wafer probe that is used for this purpose is Picoprobe Model10 with 5k~ input impedance and a bandwidth of DCto 5GHz, whichis sufficient for our purposes. Giventhat the impedanceof the circuits is not expected to exceed 100~ in the resonant frequency,the loading of the probe is negligible. Fig. 20 showsa photo of the populated PCBfor testing. The board has 4 layers, with two in the middle being Vaaand Gndplanes. These planes are separated for the bias voltage inputs and the powersupply, but the Gnd is connected on the chip level. The power supply connections are made through BNCconnectors. The Vd~/Gndconnections are connected through jumpers on the PCBlevel to determine which package pins will be connected. Each power/groundstrip on the PCBis decoupled with two c0805 surface mount capacitors (10pF, 100nF)before it is connected to the board power/groundplanes just near the package pins to reduce any parasitic inductive effect of the PCBconnections. The power/groundplanes on the board are decoupled with four more c0805 capacitors (10pF, lnF, 100nFand 10#F) and a tantalum capacitor (10/~F, 2.9f2 ESR 100kHz). The power supplies and the external clock signal are connected through BNCconnectors. The PCBis placed on a Cascade Microtech probe station, and the probe output is amplified by a wideband amplifier (ZFL-500LN by MiniCircuits). The necessity for this stage is because of 1/100 attenuation of the high impedanceprobe. The amplifier has a gain of 24dB, with bandwidth 0.1-100MHz,and noise figure of 2.9dB. The amplifier output is connected to a widebandoscilloscope. 28 Figure 20. PCBphoto. The initial tests have shownthat the current draw of the chip exceeds 800mA,whichis significantly larger than the expected maximum value of 56mA.It has been seen that the impedanceseen from the bias voltage nodes is in the order of several ohms. Since these nodes are connected to the gates of the active resistor transistors, it is believed that ESDevents have caused the breakdownof the gates since there is no ESD protection on the chip level. Currently the population of a second PCBwith a new packaged chip with ESD protection on the board is being carried out. 29 4. Conclusions In this thesis, a novel methodfor reducing the powersupply noise in integrated circuits was presented. By using active devices, the dampingis increased in powergrid distribution networkand oscillations resulting from the underdampednature of the supply distribution grid are reduced considerably. Simulations conducted in a 130nmCMOS process show a reduction of the oscillation reduction in the duration of oscillations. amplitude by more than 40%with significant Moreover, the same amountof noise suppression can be achieved with less decoupling capacitance, thus providing a promising way of reducing leakage power in newer process generations. The test design has been submitted for manufacturing,and initial tests have been carried out. However,due to ESDprotection problems, experimental results are not yet available. 30 5. 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