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L A S E R S Y S T E M
Attenuator Module
for Excimer Lasers
Any excimer laser application requires precise control of energy levels. The attenuator module is a
compact tool to accurately set the energy transmitted.
Principle of operation:
The laser beam enters the attenuator module
through a shutter which can be set to be closed or
open. Then the laser beam hits the dielectrically
coated attenuator plate. Some portion of the light is
reflected and some is transmitted. The ratio between transmitted and reflected light is determined
by the angle of incidence. The attenuator plate is
rotated to vary the transmitted portion. The compensator plate is of the same thickness as the
attenuator plate but has an anti-reflection coating.
This coating is insensitive to the angle of incidence.
The compensator plate rotates simultaneously with
the attenuator plate to eliminate any beam displacement. The light reflected from the attenuator plate is
absorbed within the attenuator housing
Attenuator module
Cover is opened to allow a view inside.
Typical transmission curve for 248nm
G M B H
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05.12.2000 19:23 Uhr
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Technical data:
dimensions:
beam height:
clear aperture:
housing:
206x180mm
90mm
40x22mm
colorless anodized
aluminum
mounting brackets for standard aluminum extrusion
profiles
attenuator plate:
size:
coating:
compensator plate:
size:
coating:
attenuation:
60x35x2mm
IC attenuator coating on
front AR on back
60x35x2mm
AR on both sides
90%-10% for
351,308 or 248nm
70%-10% for 193nm
SM1E interface
The attenuator module can be used for attenuation
of most excimer lasers as long as the laser beam is
not compressed or focused. Typically the attenuator
module is the very first optical component within a
beam delivery system. For lasers with average
powers above 100W, a water cooled version is
available.
compensator
plate
attenuator
plate
shutter
20 mm
laser
beam
Options of operation:
1. manually
2. with DC motor and encoder
Interface options for motorized version:
A) ATM RS232 interface with mini-controller
(HP48G+) and control software for
Windows™
B) SM1E interface for pulse energy stabilization
with online energy detector and feedback
back loop to interface including control software for Windows™
20 mm
192 mm
absorber
Technical drawing
MICROLAS LASERSYSTEM GMBH
ROBERT-BOSCH-BREITE 10
37079 GÖTTINGEN, GERMANY
AFFILIATED WITH
LAMBDA PHYSIK
AND JENOPTIK
TEL.: 49 - (0) 551 - 50559 - 0
FAX: 49 - (0) 551 - 50559 60
www.microlas.de
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