200 Light Sources • Highest intensity Oriel Solar Simulators • Highly collimated, large area output beam (up to 10 x 10 inches) • Optional air mass filters shape the output spectra • Various beam configurations are possible 92193 Solar Simulator These are our highest intensity solar simulators. They produce a highly collimated, very uniform output beam in various sizes from 2 x 2 to 10 x 10 inches. They deliver a close match to solar radiation. Add an air mass filter (see page 206) to these sources and you can simulate a variety of solar conditions. We offer full spectrum and UV Solar Simulators. Fig. 1 shows the spectral output of both types. These models produce very high intensity UV, and little VIS and IR. Take extreme caution when working with these sources. Table 2 shows the typical output (W m-2) of the 92291, 2 x 2 Inch UV Solar Simulator. Table 2 Typical Output of 92291 UV Solar Simulator -2 With These OptionalTypical Output (W m ) UVC, Below 280 nm UVB, 280 - 320 nm UV Filters 30 -1 25 -2 INCANDESCENT SOURCES MONOCHROMATOR AND FIBER ILLUMINATORS SOLAR SIMULATORS PHOTOLITHOGRAPHY INSTRUMENTS ACCESSORIES FOR ORIEL LIGHT SOURCES UV Solar Simulators 35 IRRADIANCE (W m nm ) ARC SOURCES DEUTERIUM SOURCES CALIBRATION SOURCES TECHNICAL REFERENCE 1600 W Oriel Solar Simulators 20 FULL SPECTRUM SOLAR SIMULATOR UV SOLAR SIMULATOR 15 10 5 0 250 UVA, 320 - 400 nm Atmospheric Attenuation Filter 0 48 1040 Atmospheric Attenuation Filter + VIS-IR Bandpass Blocking Filter 0 40 660 UVC Blocking Filter 1063 0 142 UVB/C Blocking Filter 0 0.43 836 Unfiltered Irradiance 70 369 1150 What Makes up a Solar Simulator? 750 1250 1750 2250 The Illuminator Housing WAVELENGTH (nm) Fig. 1 Spectral output of a full spectrum 1600 W Solar Simulator, compared to the output of a 1600 W UV Solar Simulator. Full Spectrum Solar Simulators We offer 6 models of full spectrum 1600 W Solar Simulators: 5 produce collimated output beams and 1 produces a diverging beam up to 12 x 12 inches (305 x 305 mm). For this model, we replaced the collimating lens with a window. Table 1 shows the typical output, in the design-irradiated plane, for our collimated models. The illuminator housing is a temperature-controlled enclosure equipped with a safety interlock and a thermal interlock system to ensure operator and system safety. An integral fan and filter blower provides forced air-cooling to maintain the lamp, optics and housing at a safe operating temperature. 1000 W Xenon Arc Lamp Both families of Solar Simulators use an ozone free lamp, which has negligible output below 260 nm. Even without the DUV output, these sources emit dangerous levels of UV radiation. Table 1 Typical Output of 2 x 2 to 8 x 8 Inch Full Spectrum Solar Simulators Typical Output (W m-2) With This Optional Air Mass Filter 2 x 2 Inch 250 - 2500 nm 250 - 1100 nm 250 - 2500 nm 250 - 1100 nm 250 - 2500 nm 250 - 1100 nm 250 - 2500 nm 250 - 1100 nm AM 1 Direct 14917 10608 3978 2825 1820 1300 1105 780 AM 1.5 Direct 13470 9555 3595 2548 1650 1170 985 702 AM 2 Direct 12675 8840 3380 2365 1560 1092 936 650 AM 1.5 Global 9295 7940 2485 2120 1138 975 683 585 4 x 4 Inch 6 x 6 Inch 8 x 8 Inch AM 0 17428 12740 4645 3430 2130 1560 1275 930 Unfiltered Irradiance 22256 17810 5935 4745 2730 2185 1625 1300 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 Light Sources Wattage 1600 W Lamp Type Xenon short arc Ordering Information UVB/UVA Dichroic Mirror (For UV Solar Simulators Only) Solar Simulators For the UV Solar Simulators we replace the aluminized mirror with a dichroic, which passes 280 to 400 nm and greatly reduces the VIS and IR. You can further shape the simulator’s output by using UV blocking filters after the dichroic. Please specify upward, downward or sideways beam configuration when ordering. Beam Uniformity ±5 % Light Ripple <1 % r.m.s. Solar Simulator Input 220 V AC 50/60 Hz, 15 A Line Regulation 0.01 % Simulator Type Full Spectrum Solar Simulator Electronic Shutter UV Solar Simulator Certification These systems meet Class B IEC 904-9 requirements, but do not come certified. Model 2 x 2 (51 x 51) 92191 4 x 4 (102 x 102) 92192 6 x 6 (152 x 152) 92193 8 x 8 (203 x 203) 92194 Diverging up to 12 x 12 (305 x 305) 92190 2 x 2 (51 x 51) 92291 4 x 4 (102 x 102) 92292 6 x 6 (152 x 152) 92293 8 x 8 (203 x 203) 92294 10 x 10 (254 x 254) 92295 These sources emit dangerous levels of UV radiation, harmful to the eyes and skin. Personnel working near these sources must wear a UV protective facemask, and gloves (see page 246). All exposed areas of skin must be covered. Model Description 62711 1600 W Xe, OF Accessories Description 92000 Extended Care Program 68955 Remote Switch WEB See our website for more info MONOCHROMATOR AND FIBER ILLUMINATORS Model INCANDESCENT SOURCES Replacement Lamp Safety Considerations ARC SOURCES Our Solar Simulators include an electronic shutter. You can externally control this shutter from the Digital Control Panel on the llluminator housing, or via a hand held switch, contact closure, or logic level input. For automated exposure control, order the 68945 Digital Timer (see page 208). Beam Size inch (mm) DEUTERIUM SOURCES The 69922 Power Supply is highly regulated and maintains a very stable light output. For long-term stability-critical applications (>8 hours), order the 68951 Digital Exposure Controller (see page 208). The 69922 has an RS-232 computer interface (and optional IEEE-488); you can set the lamp parameters, monitor the light output, and turn power on/off remotely. Because of the extremely high intensity of these sources, we suggest operating the lamps remotely. CALIBRATION SOURCES Specifications TECHNICAL REFERENCE Power Supply 201 SOLAR SIMULATORS PHOTOLITHOGRAPHY INSTRUMENTS ACCESSORIES FOR ORIEL LIGHT SOURCES Email: sales@newport.com • Web: newport.com TECHNICAL REFERENCE 202 Light Sources Oriel Solar Simulator Drawings Here we show the dimensional diagrams of our 1000 to 1600 W Class A and Standard Oriel Solar Simulator Housings. A CALIBRATION SOURCES 11.0 (279) 10.6 B (269) 1000 W SYSTEMS BEAM SIZES WARNIN G ULTRAVIOLET This illuminator LIGHT HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATUR at very high E Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area. HAZARD HIGH VOLTAGE WARNIN G HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering. C DEUTERIUM SOURCES G SHUTTER SHUTTER OPEN/CLO SE REPLACE E (WORK PLANE) 11.90 LAMP ON LAMP ON/OFF OPEN LAMP RESET LAMP (302) LAMP HOURS 2X2 4X4 DIVERGING D 11.00 12.31 (279) (313) C D 26.20 7.25 E MIN. MAX. 7.25 11.06 1.25 2.0 (665) (184) (281) A B (184) (32) 2.0 4.0 10.99 19.0 (51) (102) (279) (483) 3.0 17.0 10.99 19.0 (76.2) (432) (279) (483) 29.83 10.88 8.50 10.25 (758) (276) (216) (260) ARC SOURCES 6x6 INCH HOUSING 35.46 (901) (279) 10.63 16.50 MONOCHROMATOR AND FIBER ILLUMINATORS INCANDESCENT SOURCES (270) (419) WARNING! ULTRAVIOLET This illuminator LIGHT HIGH INTENSITY INVISIBLE emits ULTRAVIOLET DELAYED Exposure may LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area. HAZARD HIGH VOLTAGE 19.0 (482) WARNING ! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may cause LIGHT. Use protective EYE AND SKIN BURNS. eye and skin covering. LAMP ON REPLACE 11.50 OPEN LAMP RESET LAMP (292) LAMP HOURS 12.00 WORK PLANE 3.00 MIN. 7.34 5.50 MAX (186) * (305) MOUNTING HOLES 0.281 (7.13) DIA. 12.75 11.0 (324) (279) 12.31 15.37 (313) (390) ** MOUNTING SLOTS 0.281 (7.13) DIA. 8x8 INCH HOUSING 38.34 (974) 11.0 (279) SOLAR SIMULATORS 10.50 19.13 (267) (486) WARNING ! ULTRAVIOLET This illuminator LIGHT HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area. 20.38 HAZARD HIGH VOLTAGE (518) LAMP ON ACCESSORIES FOR ORIEL LIGHT SOURCES PHOTOLITHOGRAPHY INSTRUMENTS LAMP ON/OFF SHUTTER SHUTTER OPEN/CLOSE REPLACE 15.50 OPEN LAMP RESET LAMP LAMP HOURS WARNING ! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering. (394) 15.50 (394) 14.00 (356) MOUNTING HOLES 0.281 (7.13) DIA. 12.00 16.26 (413) (521) 8.12 (216) Fig. 1 Dimensional diagram of 2 x 2 and 4 x 4 inch, and Diverging 1000 W Solar Simulator Housings. SHUTTER 20.5 (225) (206) (276) (324) SHUTTER OPEN/CLOS E 8.87 (51) (758) 12.75 LAMP ON/OFF G 29.83 10.88 8.50 F 11.0 F (305) 12.00 (305) ** * THE DISTANCE FROM THE VERTEX OF THE LENS TO THE WORK PLANE. ** THE DISTANCE FROM THE CENTER OF THE BEAM PATH TO THE CENTER OF THE MOUNTING HOLE. Fig. 2 Dimensional diagram of 6 x 6 and 8 x 8 inch 1000 W Solar Simulator Housings. Phone: 1-800-222-6440 • Fax: 1-949-253-1680 WORK PLANE 4.00 MIN. 7.00 MAX. * Light Sources A MODEL NO. 92190 B 92192/92292 92193/92293 WARNING! 19.0 F MIN. MAX. 10.88 8.63 10.25 (756) (276) (219) (260.4) 26.2 7.25 7.38 12.1 1.25 2.5 11.0 8.86 (225) (279.4) (666) (184) (188) (307) (32) (64) 29.76 10.88 8.63 8.53 2.0 4.0 11.0 (756) (276) (219) (260) (51) (102) (279.4) 35.38 16.5 11.63 7.55 3.0 5.5 15.36 (192) (76) 92194/92294 ULTRAVIOLE T LIGHT This illuminator HIGH INTENSITY INVISIBLE emits ULTRAVIOLET DELAYED Exposure may LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area. E D 29.76 92191/92291 (279.4) (365.7) C TECHNICAL REFERENCE A 11.0 14.4 B 203 (899) (419) (295) (140) (390) 38.0 19.13 15.63 5.0 4.0 7.0 11.75 (965) (486) (397) (127) (102) (178) (298) HAZARD HIGH VOLTAGE CALIBRATION SOURCES (482.6) WARNIN G! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may cause LIGHT. Use protective EYE AND SKIN BURNS. eye and skin covering. LAMP ON LAMP ON/OFF SHUTTER SHUTTER OPEN/CLO SE REPLACE C OPEN LAMP RESET LAMP LAMP HOURS 12.75 E WORK PLANE (323.9) 6x6 INCH HOUSING D 35.46 12.3 11.0 (312.4) (901) (279) F 10.63 16.50 (270) (419) WARNING ! ULTRAVIOLET This illuminator LIGHT HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area. HAZARD HIGH VOLTAGE 19.0 (482) WARNING ! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering. LAMP ON LAMP ON/OFF SHUTTER SHUTTER OPEN/CLOSE REPLACE 11.50 OPEN LAMP RESET LAMP (292) LAMP HOURS 12.00 12.75 11.0 (324) (279) 12.31 15.37 (313) (390) ** MOUNTING SLOTS 0.281 (7.13) DIA. 8x8 INCH HOUSING ARC SOURCES WORK PLANE 3.00 MIN. 7.34 5.50 MAX (186) * (305) MOUNTING HOLES 0.281 (7.13) DIA. DEUTERIUM SOURCES Fig. 3 Dimensional diagram of 2 x 2 , 4x4 and Diverging 1600 W Solar Simulator Housings. 38.34 (974) 11.0 (279) 10.50 INCANDESCENT SOURCES 19.13 (267) (486) * THE DISTANCE FROM THE VERTEX OF THE LENS TO THE WORK PLANE. ** THE DISTANCE FROM THE CENTER OF THE BEAM PATH TO THE CENTER OF THE MOUNTING HOLE. WARNING! ULTRAVIOLET This illuminator LIGHT HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area. 20.38 HAZARD HIGH VOLTAGE (518) LAMP ON LAMP ON/OFF SHUTTER SHUTTER OPEN/CLOSE REPLACE 15.50 OPEN LAMP RESET LAMP LAMP HOURS WARNING! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering. (394) 15.50 (394) MONOCHROMATOR AND FIBER ILLUMINATORS 14.00 (356) MOUNTING HOLES 0.281 (7.13) DIA. 12.00 16.26 (305) 12.00 (413) (305) WORK PLANE 4.00 MIN. 7.00 MAX. * ** 10x10 INCH HOUSING 11.0 47.33 (279) (1202) 18.50 (267) (470) SOLAR SIMULATORS 10.50 WARNING ! ULTRAVIOLET This illuminator LIGHT HIGH INTENSITY INVISIBLE emits ULTRAVIOLET DELAYED Exposure may LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated area. LAMP EXPLOSION HAZARD HIGH VOLTAGE LAMP ON LAMP ON/OFF SHUTTER SHUTTER OPEN/CLOSE REPLACE OPEN LAMP RESET LAMP LAMP HOURS 32.19 (818) PHOTOLITHOGRAPHY INSTRUMENTS HIGH 18.0 WARNIN G! This illuminator INTENSITY INVISIBLE emits DELAYED Exposure ULTRAVIOLET SEVERE may cause LIGHT. Use protective EYE eye andAND SKIN BURNS. skin covering. (457) 16.0 (406) 12.0 (305) 15.6 (396) 18.0 8.16 (457) (207) ** MOUNTING HOLES 0.281 (7.13) DIA. Fig. 4 Dimensional diagram of 6 x 6 to 10 x 10 inch 1300 and 1600 W Solar Simulator Housings. Email: sales@newport.com • Web: newport.com WEB See our website for more info ACCESSORIES FOR ORIEL LIGHT SOURCES WORK PLANE 5.00 MIN. 9.5 8.50 MAX. (241) * MOUNTING SLOTS 0.281 (7.13) DIA.