Cleanroom Equipment Use Policy
revised 10/10
General Rules
1. An Operator is a trained/authorized user who is enabled access to specific equipment after
receiving training and authorization for use.
2. Cleanroom staff provides:
a. training and orientation to machines and capabilities
b. technical assistance as needed upon request by the user
c. service charged separately as an act of labor on a machine for another person, group or
business. Specific machines have been designated for services purposes only
(see table 3 for list)
3. Authorized Users are required to Book the equipment in order to avoid scheduling conflicts.
However, in cases of critical job priority, the Cleanroom staff has the authority to override a
booked session.
4. Users are required to Log -In with his/her own ID to each machine for use. Only the
Logged- In user may use the machine for the specified session. The LOG-IN System document
presents all rules associated with Logging In. (See webpage for details)
5. If a user extends access and/or operation to anyone not adequately trained, then both Users will
be expelled from machine use and suspended from the Cleanroom.
6. Any unusual operation or application of machines should be forwarded to staff member in
charge of the machine via e-mail and copied to Shaloma Malveaux, smalvea@lsu.edu.
7. Once users have completed all training for a machine, Booking and LOGIN access are granted
for that specific machine.
8. Users must present a minimum of (24 hours) of use within six months after training in order to
be considered an active user. If a user does not present the required minimum, then the user
will be removed from the system and will need to be re-trained to continue using the
cleanroom.
9. All machines affiliated with the cleanroom that reside at CAMD are managed under this policy
and are under the supervision of the Cleanroom Staff designees.
10. Failure to follow these rules will result in the consequences outlined in the Cleanroom Policy
and Sanctioning Guidelines.
Maintenance
1. Users should never attempt repair or maintenance of equipment.
2. Only use the equipment for the tasks as described during training and do not attempt to
manipulate machines for additional tasks.
3. Immediate notification of equipment difficulties should be routed to Shaloma Malveaux for
website updates and also to ensure that the appropriate person is contacted regarding machine
repair. Please provide as much detail as possible.
General Use Equipment
1. Training for General Equipment is completed during initial equipment training sessions, which
are required to gain access to the cleanroom. At minimum, this training involves chemical
hood and Nikon 88 Microscope instruction. General equipment is listed in the following table.
Table 1.
General Use Equipment
Chemical Processing Hood
Photo Resist Spinners
Hot Plates
326 Convection Oven
Nikon 88 Microscope
Mann Pattern Generator
Oriel UV Exposure Station
Alpha Step Surface Profiler
Special Training Equipment
1. Training on the Special Training equipment may be given to the user who request use based on
the project demands. Approval for training and access to each machine in this category is
required by the manager of the machine.
2. The users of Special Training equipment are trained for competent operation of the machine
and granted Booking and Login access for its use.
3. Training will be performed by the designated machine manager.
Table 2.
Special Training Equipment
Machine
Hitachi E- Beam Writer
Denton Sputterer
Hitachi SEM
Nikon MM-22 Measurescope
Wyko NT3300 Optical Profiler
Quintel UV Aligner
Oxford DRIE/ICP
Engis Lapping/Polishing
Branson Plasma Asher
Manager
Varshni Singh
Varshni Singh
Varshni Singh
Varshni Singh
Varshni Singh
Jeonghawn Kim
Kungnam Kang
Dawit Yemane
Dawit Yemane
Cleanroom Staff Operated Equipment
1. Staff operated equipment is designated as machines operated by CAMD Cleanroom staff
ONLY. These machines are operated on a service basis to users.
2. These machines can be accessed by completion of a service request form
located on the CAMD/Microfabrication website under the Service Forms icon.
3. Route form to the designated staff member in charge of operations for specified machines.
Table 3.
Staff Operated Equipment
Machine
Temescal E- Beam Evaporator
Hot Embosser
Electroplating Stations
XRLM1 Beamline
XRLM2 Beamline
XRLM4 Beamline
Manager
Kungnam Kang
Sital Tiwari
Varshni Singh
Jost Goettert
Jost Goettert
Jost Goettert
Cleanroom Staff Office Hours
1. Staff assistance to users will be designated due to posted office hours. These hours
are setup to assist users with any needs in regards to additional training to review
machines, adding equipment for use, process/technical assistance.
2. Hours for consultation are posted on the microfabrication calendar. Please contact
the staff member at minimum two days before to assure that the date and time can
commence.
Table 4.
Lithography Tools
Processing Hoods
Photoresist Spinners
Pattern Generator
Oxford DRIE/ICP
Shaloma Malveaux
Mondays, 1pm-3pm
Kungnam Kang
Wednesdays, 1pm-5pm
Branson Plasma Asher
Convection Ovens
Vacuum Oven
Hot Plates
Oriel UV Exposure
Varshni Singh
Dawit Yemane
By appointment
Tuesdays, 1pm-5pm
J.Kim
By appointment
.
Table 5.
Metrology Tools
Hitachi SEM
Varshni Singh
Denton Metal Deposition
Wyko NT 3300 Optical Profiler
Tencor Alpha Step Surface Profiler
Nikon 88 Microscope
Nikon MM-22 Measurescope
By appointment
Table 6.
Miscellaneous Equipment
Flycutting
Polishing
XRLM1 Beamline
XRLM2 Beamline
XRLM4 Beamline
Hot Embossing
Dawit Yemane
Tuesdays, 1pm - 5pm
Jost Goettert
Jost Goettert
Jost Goettert
Sital Tiwari
Tuesdays, 11am-2pm
Tuesdays, 11am-2pm
Tuesdays, 11am-2pm
Fridays, 12pm-5pm