FGL 12 1 Series
Vacuum Break Valves
•Control Range: 0 - 60 sec.
Model No.
Actuation
Flow Rate
Voltage
Model No.
Actuation
Flow Rate
Voltage
FGL11
NC
32 /min
12, 24 VDC
FGL21
NC
50 /min
12, 24 VDC
•Flow Rate Controller
•Vacuum Break Time
Control
Chamber vacuum break time
can be controlled reliably with
this device.
•Zero Particle Generation
•Straight IN - OUT Flow
Path
•Different Piping Sizes
•High Corrosion Resistance
Barbed, JXR Male, JXR
Female Connections available.
Stainless Steel Material used
(SUS316L).
Specifications
FGL11-4S
Model No.
FGL11-4RM
Pressure Range (Primary)
0.15 { 1.5 }
MPa {kgf/cm2}
Pressure Range (Secondary)
1.3 × 10-6 – 1 × 105 { 1 × 10-8 – 760 }
Pa (abs) {Torr}
Flow Rate
32
/min
50
0.5
Valve Seat Leakage cm3/min
External Leakage
Pa⋅m3 / s He {Torr⋅
Read "Precautions" in the introduction 4 - 7
before selection and starting use.
1 Media
2 Follow flow path direction!
3 The solenoid valve coil heats up when energized
and may reach high temperature.
4 Caution! Electric shock may occur upon contact
with exposed electric wires in the solenoid valve.
37
FGL21-4RM
Inert Gases
Media
Use with Caution!
FGL21-4S
1.3 × 10-9 { 1 × 10-8 }
/ sHe}
0.99 { 9.9 }
Proof Pressure MPa {kgf/cm2}
Media Temperature
10 – 30
˚C
10 – 30
Ambient Temperature ˚C
1 / 4"
Barbed
Piping Size
See Note 1 / 4"
JXR Male
1 / 4"
JXR Male
Any Orientation
Position for Installation
Power Consumption
1 / 4"
Barbed
W
8
10
Power Supply Voltage
12, 24 VDC
Operation Signal / Pressure Signal
12, 24 VDC
*Note: JXR fitting can be connected to the VCR fitting.
FGL 12 1 Series
Vacuum Break Valves
Dimensions
FGL 12 1-4RM
A
E
1/4" JXR Male
6
1
5
FGL11-4RM
OUT
B
IN
2
3
4
φD
C
Parts List
A
Model No.
B
FGL11-4RM-32-015 117
FGL21-4RM-50-015 129
C
19 102
25 110
φD
Item No.
E
1
38 (46.5)
50 (46.5)
2
3
Description
Material
O-Ring
Coil Assembly
Plunger Assembly
FKM
Item No.
4
5
6
Description
Diameter
O-Ring
O-Ring
Material
SUS316L
FKM
FKM
E
1
2
A
FGL 1-4S
1/4" Barbed
1
6
5
FGL21-4S
OUT
B
IN
2
3
4
φD
C
Parts List
A
Model No.
B
FGL11-4S-32-015 117
FGL21-4S-50-015 129
C
φD
19 105
25 113
Item No.
E
1
38 (46.5)
50 (46.5)
2
3
Description
O-Ring
Coil Assembly
Plunger Assembly
Material
FKM
Item No.
4
5
6
Description
Diameter
O-Ring
O-Ring
Material
SUS316L
FKM
FKM
How to order
FGL
1 1
Series Model No.
4RM
32
NC Type
015
DC12V
Adjusted Pressure:
0.15MPa
A
A Series
B
B Piping Size
C
C Flow Rate
D
D Voltage
1
2
4RM
4S
32
50
DC12V
DC24V
Description
Flow Rate: 32 / min
Flow Rate: 50 / min
1/4" JXR Male
1/4" Barbed
Available only for FGL11
32 / min
Available only for FGL21
50 / min
12 VDC
24 VDC
38
Vacuum Break Valves with Air Operated Diaphragm Valves
FGL11-X* Series
•Combination Valve
•Space Saving
Model No.
Actuation
Flow Rate
Voltage
Model No.
Actuation
Flow Rate
Voltage
FGL11-X0005
NC
32 /min
12 VDC
FGL11-X0006
NC
32 /min
24 VDC
Modular and Compact
•Integrated Gas Valve
(AGD)
•Flow Rate Controller
•Vacuum Break Time
Control
•Zero Particle Generation
Chamber vacuum break time
can be controlled reliably with
this device.
•Smooth IN - OUT Flow
Path.
•Fitting Size:
IN 1/4" VCR Female,
OUT 1/4" JXR Male
•High Corrosion
Resistance
Stainless Steel Material Used
(SUS316).
Specifications
FGL11-X0005
Model No.
Inert Gases
Media
Pressure Range (Primary)
0.15 { 1.5 }
MPa {kgf/cm2}
Pressure Range (Secondary)
Pa (abs) {Torr}
Flow Rate
1.3 × 10-6 – 1 × 105 { 1 × 10-8 – 760 }
32
/ min
Valve Seat Leakage
1.3 × 10-9 { 1 × 10-8 }
Pa⋅m3 / s {Torr⋅ / sec}
External Leakage
Use with Caution!
Read "Precautions" in the introduction 4 - 7 before
selection and starting use.
1 Media
2 Follow flow path direction!
3 The solenoid valve heats up when energized
and may reach high temperature.
4 Caution! Electric shock may occur upon
contact with exposed electric wires.
39
FGL11-X0006
1.3 × 10-9 { 1 × 10-8 }
Pa⋅m3 / s He {Torr⋅ / sHe}
0.99 { 9.9 }
Proof Pressure MPa {kgf/cm2}
Media Temperature
°C
10 – 30
Ambient Temperature °C
Piping Size
10 – 30
IN : 1/4" VCR Female
OUT : 1/4" JXR Male
Free Orientation
Position for Installation
8
Power Consumption
Power Supply Voltage W
12 VDC
24 VDC
Operation Signal / Pressure Signal
12 VDC
24 VDC
FGL11-X* Series
Vacuum Break Valves with Air Oprated Diaphragm Valves
Dimensions
FGL11-X*
•NC Type with Gas Valve
Rc 1/8
（51）
1
117
2
5
3
6
4
IN
19.1
OUT
7
8
9 10
132
1/4" JXR Male
18
1/4" VCR Female
Parts List
18
35.8
2-M5 (5mm depth)
Item No.
1
2
3
4
5
6
7
8
9
10
Description
Actuator
Diaphragm
Valve Seat
Body
O-Ring
O-Ring
O-Ring
Coil Assembly
Plunger Assembly
Orifice
Material
ASL-350
PCTFE
SUS316L
FKM
FKM
FKM
SUS316L
40