Piezoelectric Ceramics Electro Ceramic Solutions TECHNICAL CERAMICS TECHNICAL CERAMICS Products and Market Sectors About Morgan Advanced Materials Morgan Advanced Materials is a global materials engineering company that offers a wide range of high Security and Defence specification engineered products with extraordinary properties. Morgan is a leader in the design and manufacture of electroceramics products for the security and defence markets, having developed and supplied precise and accurate components for air, land and sea applications for the past 75 years. Our piezoelectric ceramics and transducers are used in highly specialised applications, including sonar, instrumentation and communications systems where performance is critical. From an extensive range of advanced materials we engineer components, assemblies and systems that deliver significantly enhanced performance for our customers’ products or processes. Most are produced to very high tolerances and many are designed for use in extreme environments. The company thrives on innovation. Our materials scientists and applications engineers work in close collaboration with customers to create outstanding, differentiated products that perform more efficiently, more reliably and for longer. Morgan Advanced Materials has a global presence with over 10,000 employees across 50 countries serving specialist markets in the energy, transport, healthcare, electronics, petrochemical and industrial sectors. It is listed on the London Stock Exchange in the engineering sector. Our Piezoelectric Ceramic Capabilities Morgan Advanced Materials has over 75 years experience in helping customers design and develop the Piezoelectric ceramic components and transducers are an essential part of sonar systems used to detect underwater objects and assist in underwater navigation. Our components give a high degree of accuracy for sub-sea detecting and sensing and the development of piezoelectric composite structures has improved the image resolution of sonar systems. Our piezoelectric ceramic is also found in hydrophones, torpedo guidance systems, sonobuoy, gyroscopes, mine detection systems and harbour protection and our transducers are used to give accurate readings in aircraft instrumentation and engine monitoring. Our piezoceramic components are versatile, durable and stable even in difficult operating conditions, making them ideal for use in our custom sensor and transducer systems. Many of the world’s navies specify our specialist materials for their sonar systems. most effective and efficient solutions for piezoelectric ceramic components going into their products. Our applications engineering support is provided as standard across the entire product portfolio. Our extensive advanced materials knowledge enables us to provide an unrivalled range of materials by producing our own specific formulations from raw materials which can be customised to specific requirements in-house. In addition, advanced computer modelling techniques are used throughout the development of new designs, enabling a faster, more efficient product development process. Ideal for when timescales are critical. Our manufacturing sites are ISO 9001 accredited and where required ISO 13485 certified for the production of products for medical applications. Markets Our electroceramic components, transducers and assemblies are utilised in many cutting edge technologies in a range of markets, including: • Defence • Medical • Industrial • Energy • Automotive • Aerospace Morgan continues to develop new materials and value added assemblies to meet the rapidly expanding opportunities in these markets. 2 Medical Morgan is a world leader in the design and manufacture of piezoelectric ceramic, sensors, transducers and dielectric components for the medical market, including medical instrumentation, therapeutic and diagnostic equipment, surgical tools and in drug delivery and dialysis equipment. Our superior piezoelectric ceramic components enable increased resolution of ultrasonic imaging and are used extensively in medical ultrasound. They are also the key technology in applications such as blood flow measurement and foetal heart monitors, providing increased reliability and accurate detection. The high performance piezoelectric material is used in high power transmission of high frequency waves to assist with surgical cutting. We supply efficient materials and complete transducers for small medical tools such as ultrasonic dental descalers and ultrasonic scalpels, which are used in applications such as cataract removal, whilst our custom multilayer, bimorph actuator and sensor capabilities are ideal for valve and drug nebulisation applications. Our range of sensors designed to detect air bubbles and changes in pressure are a critical components for infusion and dialysis equipment, protecting the lives of patients around the globe. 3 TECHNICAL CERAMICS Products & Market Sectors Industrial Electronics – Commercial Sonar Morgan has more than 75 years experience in the manufacture of piezoelectric ceramic components, sensors, transducers and dielectric components for the industrial equipment market. Morgan Advanced Materials provides high performance piezoelectric ceramic components and transducers for sonar systems used in range of marine applications including; depth sounding, navigation and surveillance in the oil exploration industry, and commercial fish finding. Precision-machined piezoceramic discs are used by many OEMs for automatic level and distance sensing in industrial equipment and for gas and liquid flow and level measurement systems. Non-destructive testing equipment and many high power ultrasonic applications such as ultrasonic cleaning, welding, inspection and sono-chemistry also use our piezoelectric ceramics as transducers. Piezoceramic bimorphs are used as actuators in a wide range of industrial applications such as textile knitting machines, inkjet printer heads and viscosity meters. They are also used in coin and bank notes validation systems. Our advanced technology can be adapted to higher frequency ranges and a variety of sizes and shapes that require dual-frequency operation. A key advantage of our dual frequency transducer is that it offers wideband dual frequency operation through the same slot, reducing installation times. We work in partnership with our customers to develop tailored solutions for specific industrial needs. Using our design expertise and specialist manufacturing capabilities, we can produce components within tight specifications in whatever quantity is required. Our specialist manufacturing capabilities enable us to supply high quality components in high volume, at competitive prices. With in-house underwater acoustic test tanks and pressure testing facilities to validate performance, we are able to offer customised solutions in short lead times. Energy Transportation Morgan supplies piezoelectric components for the latest energy management systems and for the most advanced smart metering technologies. From smart metering to energy harvesting, we provide solutions to help designers and manufacturers meet new standards for efficient delivery of cleaner, greener power all over the world. Morgan provides a wide range of piezoelectric components and solutions for the transportation industry, such as transducers and actuators for sophisticated high performance in-vehicle sensing systems used for advanced manufacturing technologies. Working closely with customers we are helping to improve vehicle safety, performance, energy efficiency and comfort. Our piezoelectric ceramic components, sensors and transducers are used in high performance ultrasonic meters to determine gas and water flow measurements for sophisticated heat and smart metering technologies. Our superior piezoceramic bimorphs are used in energy harvesting devices, enabling the efficient conversion of mechanical energy to electrical energy. Energy generation, management and distribution is arguably one of the fastest evolving industries of modern times and we are working closely with customers to provide innovative components and sub-assemblies across the power sector. 4 Our wide bandwidth transducers enable the use of more advanced imaging algorithms such as Chirp, or Synthetic Aperture Focusing Techniques (SAFT). In addition, higher frequencies can be used to increase target resolution, whilst lower frequencies remain available for better deep-water performance. As the transportation industry continues to advance and smarter vehicles are developed, piezoelectric sensors, transducers and actuators are playing an increasingly important role as the critical input/output devices for many electronic systems. Our piezoceramic components are highly versatile, durable and stable even in difficult operating conditions, making them ideal for use in custom vehicle sensor and transducer systems. Our sensor design expertise makes us an ideal partner during design and early production stages. With our world-class design expertise and specialist manufacturing capabilities we work in partnership with our customers to develop competitive tailored solutions to meet their needs. We produce ceramic components, sensors and transducers within tight specifications, in quantities from one-offs to high quality, cost-effective, high volume production. We directly supply to many customers in high performance race automotive applications, as well as other tier one automotive suppliers. 5 TECHNICAL CERAMICS Nature of Piezoelectric Ceramics Shapes and Mechanical Tolerances Piezoelectric Phenomena & Materials Static Performance of Piezoelectric Ceramics Piezoelectricity is the property possessed by some materials of becoming electrically charged when subjected to a mechanical stress. Such materials also exhibit the converse effect i.e. the occurrence of mechanical deformation on application of an electric field. The static performance under the influence of a steady strain is shown in the diagram below which illustrates the direct piezoelectric effect. The effect is exaggerated for clarity. + Poling Axis A) Before Polarisation – B) After Polarisation (Ideal Conditions) A graph of polarisation versus applied field yields a closed curve analogous to the magnetic hysteresis loop. After removal of the electric field there is a remanent polarisation in the ceramic which is responsible for its piezoelectric properties. The resulting ceramic is now anisotropic and can be returned to its unpolarised isotropic condition by raising its temperature above the Curie point or by mechanically overstressing. The diagram below illustrates the reverse piezoelectric effect as shown. The effect is exaggerated for clarity. + + + -Ve OD Polarisation Field 0 Field 0 Field Thickness 0.08mm (0.003”) 25mm (1”) (e) (f) Most of the properties of piezoelectric ceramics change gradually with time. The changes tend to be logarithmic with time after poling. The ageing rate of various properties depends on the ceramic composition, the geometry and on the way the ceramic is processed during manufacture. Because of ageing exact values of various properties such as dielectric constant, coupling, and piezoelectric constants may only be specified for a standard time after poling. The longer the time period after poling, the more stable the material becomes. Exposing the ceramic to one or more combination of the following conditions can accelerate the ageing process in any ceramic: From To 1mm (0.04”) 165mm (6.5”) Width 1mm (0.04") 165mm (6.5”) Standard Mechanical Tolerances Thickness 0.08mm (0.003”) 35mm (1.4”) Tolerances on machined dimensions apply to most components. For large size parts, confirmation of the tolerances achievable will need to be agreed prior to placing an order. From To Outside Diameter 1mm (0.04”) 150mm (5.9”) Inner Diameter 0.5mm (0.02”) 140mm (5.5”) Thickness 0.15mm (0.006”) 25mm (1”) Components can be produced to tighter tolerances (e.g. Concentricity within 0.13mm (0.005”) TIR and surface finish (Ra) within 1.6µm (62µin)). From To Outside Diameter 1mm (0.04”) 150mm (5.9”) Care should be taken not to over-specify a tolerance as this can significantly increase costs. Inner Diameter 0.5mm (0.02”) 140mm (5.5”) Length 1mm (0.04”) 150mm (5.9”) Tube OD L ID Hemisphere T OD ID High mechanical stress. Strong electric de-poling field. High temperatures approaching the Curie point. R Standard Mechanical Tolerances Outside Diameter ±0.15mm Inner Diameter ±0.15mm Length & Width ±0.15mm From To Thickness ±0.05mm Outside Diameter 6mm (0.24”) 254mm (10”) Squareness (edge to face) Within 0.15° Wall Thickness 1mm (0.04”) 10mm (0.39”) Concentricity 0.2mm TIR Surface Flatness (Lapped Parts) 12µm (0.012mm) Surface Flatness (Large Sliced Parts) 15µm (0.015mm) 12µm (0.012mm) Focal Bowl From To Parallelism (Lapped Parts) Diameter 6mm (0.24”) 254mm (10”) Parallelism (Large Sliced Parts) 60µm (0.06mm) Thickness 1mm (0.04”) 10mm (0.39”) Surface Finish (Ra) 3µm (0.003mm) T OD In addition to the shapes shown, custom shapes are also available. Parts can be made to the size ranges shown, but not in every combination of thickness and lateral dimensions. A separate list of standard sizes of parts available can be obtained on request. Length ID Equation for ageing rate Strain a Tapered Stave To predict value X at T days after poling: Where: XT is value of interest at T days after poling, Xt is value at poling date and AR is the Ageing Rate (Positive or Negative) Remanent Stress (Sr) 6 254mm (10”) W1 Virgin Curve Field To 1mm (0.04”) Ring T +Ve Material selection should be based on the conditions of a given application. Remanent Polarisation (Pr) From Plate (Square & Rectangle) T (c) Ageing rates and time stability + – (b) Shapes Diameter L (a) (d) + Disc T W + + Poling Axis Certain compounds can be made piezoelectric by the application of a high electric field (polarisation), these are termed ferroelectric materials. Another important group of piezoelectric materials are the piezoelectric ceramics, such as PZT. The PZT ceramics are solid solutions of lead Titanate (PbTiO3), and lead Zirconate (PbZrO3), modified by additives. The PZT can be fashioned into components of almost any shape and size. As well as being strongly piezoelectric, PZT is hard, strong, chemically inert and completely unaffected by humid environments. Before polarisation the dipoles in the ferroelectric material are randomly oriented. The polarisation process involves the application of an electric field across the ceramic, usually at an elevated temperature, causing switching or realignment of the dipoles. D W2 L XT = Xt + AR(log T − log t ) As “Fired” tolerances ±0.3mm or ±3% whichever is greater L a T Barrel Stave Legend PZT Ceramic Electrode 7 TECHNICAL CERAMICS Modes of Vibration, Displacement & Voltage Shape Axes Polarisation Direction Applied Field Voltage Output Modes of Vibration Displacement Applied Stress Radial 3 Frequency Capacitance fr = 1(r) Thin Disc Thickness fr = fr = 3 Length or Transverse (L or W) Plate 2 Np C= Nt t Radial 3 C= fr = 3(r) Ring Thickness Length (L) 1 Tube t K 3t .ε 0 .L.W t 2.N c ( d o + di ) Nt t fr = N1 L Wall Thickness fr = 2.N c ( d o − di ) Circumferential (Hoop) fr = 2.N c ( d o + di ) C= K .π .ε 0 .(do − di ) 4.t C= 2 2 2π .K 3t .ε 0 .L d In o di r V= g31 .Fr π .d 4.g33 .F3 .t π .d 2 V= d31 .W .V t V= g31 .F1 W L d31 .L.V t V= g31 .F2 L d33 .V V= g33 .F3 .t L.W t t 3 d33 .V Voltage (Static) W Nt t fr = 3(r) K 3t .ε 0 .π .d 2 4.t N1 L or W fr = d31 .d .V t r d 1 Thickness Displacement (Static) d31 .(do − di ).V 2.t t d33 .V L 2.d31 .L.V ( d o − di ) dm d33 .dm .V t where dm = (do + di ) / 2 V= g31 .Fr 2π (do − di ) V= 4.g33 .F3 .t π ( d o 2 − di 2 ) V= V= g31 .F1 π .dm g31 .do .P 2 where P = Pressure 3 Thickness Rod Wall Thickness Hemisphere fa = fr = 3 1 Radial fr = Na L 2.N t ( d o − di ) 2.N p C= K 3t .ε 0 .π .d 2 4.L K t .ε .π .(do + di )2 C= 3 0 4.(do + di ) ( d o + di ) L d33 .V t d33 .V r 2.d31 .r.V t L d 15.L.V t V= 4.g33 .F3 .L π .d 2 V= g31 .do .P 2 1 W Shear Plates 2 5 6 3 thk NOTES: 1 - Equations valid for: (A) plate, disc, ring & shear plate where r, L and W>>thk 2 - All variables are metric; use MKS units 8 Stress or strain indicated by subscript 5 fa = N5 t C= K1t .ε 0 .L.W t V= g15 .F3 .t L.W 3 - Constants g31 and g33 and negative values which result in negative strain (contraction) and negative voltage (opposite polarity) 4 - Each type of material has particular voltage, stress and temperature limitations. 9 TECHNICAL CERAMICS Useful Electromechanical Relationships Equation 7 Under static or quasi-static (below resonance) conditions, the magnitude of the piezoelectric effect is given by piezoelectric “d” and “g” constants. For the case of the direct piezoelectric effect where the material develops an electric charge from an applied stress, the definitions for “d” for constant field and “g” for constant dielectric displacement should be used. For the converse effect where the material develops a strain from an applied electric field, the definitions for “d” and “g” for constant stress should be used. These “d” and “g” coefficients are related by equation 1 for plates and discs, and equation 2 for rods. Where S is the compliance of the material. k2 = d 31 = g31 .ε rT 33 (Discs and plates) Equation 2 d 33 = g33 .ε rT 33 (Rods) The permittivity of the material is related to both the permittivity of free space and the dielectric constant of the material according to equation 3. stored energy converted stored input energy This value, although related, should not be considered the overall efficiency of the electromechanical transduction, since it does not take into account electrical and mechanical dissipation or losses. When a transducer is not operating at resonance or if it is not properly tuned and matched, the efficiency can be quite low. A properly designed transducer can operate at well over 90% efficiency. The pressure P, which a ceramic driver can impart, is given approximately by equation 9. Equation 3 T k33 = Where kT33 is the relative dielectric constant of the material and e0 is the permittivity of free space ( 8.854x10-12 F/m). T r 33 ε ε0 At frequencies far below the mechanical resonance frequency, the electromechanical coupling factor, k, can be calculated by equation 4 for plates, equation 5 for discs, equation 6 for rods, and equation 7 for shear plates. Equation 4 d2 k = E 31T S11 .ε r 33 2 31 (Plates) Equation 5 (Discs) 2 2.d31 k = T ε r 33 .(S11E + S12E ) 2 p (Rods) 10 2 k33 = 2 d33 E S33 .ε rT 33 kP2 = (1 − k p2 ) (Bessel function) (Discs) Equation 9 Where d is equal to d33 for thickness mode operation or dT31 for radial or transverse mode, E is the applied electric field, and YE11 is Young’s Modulus for that material. (Rods) The dielectric losses, tan d, are given by the dissipation factor, D.F., as described in equation 13. k = D.F . = tan δ = Equation 13 Where QE is the electrical damping. 1 QE The mechanical losses can be determined from the mechanical quality or damping factor, Qm, from equation 14. Equation 14 Qm = fa2 2π . fr .Z r .C p .( fa2 − fr2 ) Qm can also be determined approximately from the frequency response curve as follows. the dielectric losses are usually the most significant. Therefore, it is recommended that materials with a low dissipation factor be used for high power applications, particularly since these losses increase with power. For high intensity transducers, the overall electro-acoustical efficiency h is given approximately by equation 15. Equation 15 Where QA is the mechanical quality factor due to the acoustical load alone. π fa π ( fa − fr ) . .tan . 2 fr 2 fr (1 + π ) fa π ( fa − fr ) . .tan . fr fr 2 2 Amax η = 1− 1 Q . A k .QE .QA Qm 2 It should be noted that at high drive levels QE and Qm are not constants. They are usually lower than the low drive level values. The dielectric permittivity of the material, and therefore the dielectric constant and capacitance, decreases as the applied frequency (mechanical or electrical) exceeds each resonant frequency of the particular ceramic part. For static operation, well below the first resonance frequency, the dielectric permittivity is eTr 33 (free). For dynamic operation well above all resonance frequencies of the ceramic part, the material behaves as if it was clamped (strain=0), and the electric permittivity is eSr 33 (clamped). Between each, the permittivity is the product of the static permittivity and a loss term based on the coupling of the resonance mode each resonance point the applied frequency has exceeded, as described in equation 16 (above first resonance), equation 17 (above second resonance), and equation 18 (above third resonance). Equation 16 (Above first resonance) Under dynamic conditions, the behaviour of the piezoelectric material is much more complex. It can be characterised in terms of an equivalent electrical circuit, which exhibits the conditions of parallel and series resonance frequencies. To approximate these frequencies, measure the frequency of the minimum impedance (fr ) and maximum impedance (fa ) for the component, since they differ by a very small amount (<0.1%). The coupling coefficient, K, can be derived from these frequencies. This derivation is somewhat complex as K is dependent on both the shape of the component and the mode of vibration. The most useful of these relationships are described 2 31 π fa π ( fa − fr ) . .tan . 2 fr 2 fa In addition to the coupling coefficient, the total efficiency of a transducer depends on the mechanical and dielectric losses. P = d .E .Y11E Dynamic operation (Plates) 2 k33 = Where CP is the low frequency capacitance and Zr is the minimum impendance at resonance. Equation 10 Equation 6 Equation 11 Equation 12 The coupling factor is a useful expression relating the amount of energy that can be changed from the electrical form to the mechanical form, or vice versa, for the different operational modes. The coupling factor can be expressed as equation 8. Equation 8 Equation 1 d152 k = E T S44 .ε r 11 2 15 ε rT 33 .(1 − k12 ) Equation 17 Amax 2 (Above second resonance) Gain Static And Quasi-Static Operation Equation 18 fr f2 − f1 Only where Q > 3 Qm = (Above third resonance) Frequency (Hz) The frequency difference f2 - f1 is the frequency bandwidth at about 3dB where the amplitude is half of its maximum value. Of these losses, ε rT 33 .(1 − k12 ).(1 − k22 ) ε rT 33 .(1 − k12 ).(1 − k22 ).(1 − k32 ) Where k1, k2, and k3 represent the coupling factors for the particular resonance. For a thin plate, k1 and k2 are k31 and k’31 (length and width respectively), and k3 is kt (thickness). 11 TECHNICAL CERAMICS Useful Electromechanical Relationships For a thin disc, k1 is kp (radial), k2 is kt (thickness), and there is no third resonance. For a rod, k1 is k33 (length), k2 is k’p and there is no third resonance. In addition to fr and fa (series and parallel resonance frequencies), there is a frequency fm, at which the transducer’s electromechanical transduction is maximised. This frequency represents the maximum sensitivity for receivers or the maximum output for drivers. This frequency, the bandwidth, and the output are all dependent on the external resistive load, Rext. When k<<1, fm may be calculated using equation 19. Many of the calculated parameters before are interrelated. Thus, many useful relationships can be derived. A few of the most useful relationships are described in equations 23 through 35. Equation 23 S33D = (Rods) (Rods) Equation 25 d33 = k33 . ε (Rods) where Q = 2π . fa .C p .Rext 1 4.ρ. fa2 .L2 π fa 1 . . 2 fr π fa π fa . − tan π . 2 fr 2 fr f − fr k p ≅ 2.51 × a fr SD E S33 = 33 2 1 − k33 Equation 19 ( f − fa ) f m = fa + r 1 1+ 2 Q k31 = Equation 33 Equation 24 T r 33 .S E 33 Equation 34 kt = and fm = fa for (Q >> 1, Rext small, short circuit condition) fm = fr for (Q >> 1, Rext large, no load condition) fm = fr + fa 2 (Plates) Equation 35 Equation 27 k33 = 2 S11D = S11E .(1 − k31 ) (Plates) The maximum bandwidth, B, obtainable by electrical tuning, is approximately equal to the product of the coupling coefficient and the series or parallel resonance frequency as described in equation 20. f − fr − a fr π fr . . 2 fa 1 S11E = 4.ρ. fr2 .L2 Equation 26 Equation 28 d31 = k31 . ε T r 33 .S E 11 Table 1: High signal properties for PZT400, PZT800 and PZT5A series. In this table units of electrical field are in kV/mm and stress is in MPa. Equation 32 π fr . . 2 fa 2 1 π fr tan . 2 fa 1 π fr tan . 2 fa (a) T he value of tan dat a given electrical field is a function of time after poling or after any major disturbance such as exposure to an elevated temperature. Equation 20 B = k . fr , a (b) A fter appropriate stabilising treatment. This consists of a temperature stabilisation dh = d33 + 2.d31 Equation 29 gh = g33 + 2.g31 (Hydrostatic charge constant & coefficient) If the mechanical quality factor is high (Qm>Q), the external resistance Rext for a fairly flat frequency response can be approximated by equation 21 for parallel inductance, or equation 22 for series inductance. Equation 21 (Parallel inductance) Equation 22 (Series inductance) 12 Rext Equation 30 0.35 ≈ π . fa .C p .k 2 2 .k31 k = E 1− σ where S S is, however, more important than the stress soak. (c) In range to 70MPa (d) In range to 35MPa (e) T hese figures are dependant upon configuration and perfection of fabrication. The static tensile strength figures were obtained from bending tests on thin 2 p E 12 E 11 plus a few minutes soak at the appropriate static stress. The temperature stabilisation Bimorph structures, while the dynamic tensile strength figures were obtained from measurements of high amplitude resonant vibration rings. The latter tests are more (Poisson's ratio) Equation 31 keff High Signal Properties PZT400 Series PZT5A Series PZT800 Series AC depoling field >1.0 0.7 >1.5 AC field for tan d = 0.04@25°C (a) 0.39 0.45 >1.0 % increase of eTr 33 at above electric field 17 11 10 AC field for tan d = 0.04@100°C 0.33 0.045 n/a 82.7 41.4 20.7 20.7 82.7 41.4 Maximum rated static compressive stress (maintained) PARALLEL to the polar axis @25°C @100°C % change of eTr 33 with stress increase to rated maximum compressive stress at 25°C (b) ~25% (c) ~ -3% (d) % change of d33 with stress increase to rated maximum compressive stress at 25°C (b) ±15% (c) ~ 0.1%@20.7 ~ -13%@34.5 6% (c) 55.2 27.6 13.8 13.8 55.2 27.6 Maximum rated hydrostatic pressure 345 138 345 Compressive strength >517 >517 >517 Tensile strength, static (e) 75.8 75.8 75.8 Tensile strength, dynamic (peak) (e) 24.1 27.6 34.5 Maximum rated compressive stress (maintained) PERPENDICULAR to the polar axis @25°C @100°C ~18%(c) sensitive to minor flaws. ( fa2 − fr2 ) = fa2 13 TECHNICAL CERAMICS PZT Flexure Elements: Bimorph Multilayer Actuators Many applications require displacements far greater than are possible with simple PZT transducers operating in the d33 or d31 modes. Moreover, the voltages required to produce these displacements are very high, and because they present a considerable mismatch to air, these elements are unsuitable for use as electro-acoustic transducers. Multilayer Flexure Mode Actuators A much more compliant structure operating in the d31 mode is the flexure element, the simplest form of which is the bilaminar cantilever or bimorph. This consists of two thin PZT strips bonded together. Bimorphs are usually mounted as a cantilever and usually operate in the d31 mode as shown on figure 1. The use of very thin piezoelectric layers in flexure elements requires much lower driving voltages than classical bimorph actuators. Basically these elements can be built up three ways: Gluing a d31 actuator onto an inactive substrate, like a metal strip Combining a d31 actuator with an unpolarised PZT layer Combining layers of piezoelectric ceramic with an intricate electrode structure so that the layers expand or contract like a classical bimorph element. Practical Design Data for PZT500 Series Flexure Elements Figure 4 below illustrates a multilayer parallel bimorph element. F + – H Vin V Z L Figure 1a Lt F V Figure 3: Flexure element (Bimorph) Parameter Deflection Figure 1b In a series bimorph PZT strips are connected to the voltage source in series (See figure 1a), and in a parallel bimorph strips are individually connected to the voltage source (See figure 1b). In the series bimorph, one of the PZT strips will always be subject to a voltage opposite to the polarising voltage, so there is always a danger of depolarisation. This is also true to the parallel bimorph configuration of figure 2, but if it is connected as shown in figure 3, both strips will be driven in the polarisation direction, thereby avoiding drift in characteristics caused by depolarisation. U1 + U2 Bending Resonance Frequency Charge Output Capacitance + Parallel Bimorph 9.10 −10 × 7.10 −11 Series Bimorph L h2 2 L3 × W .h 3 400 × h L2 8.10 −10 × 8.10 −8 × Unit L2 h2 Lt .W h Voltage Output Figure 2 10 −2 × L Lt .h.W Table 2: Summary of equations for bimorphs 14 2 Transversal mode (d31) actuators Multilayer actuators can be produced with layer thicknesses as low as 20-40µm. The manufacturing method is completely different from the classical process of sawing and electroding individual discs or plates. Because of the very thin layers of PZT, an electrical field strength of about 1kV/mm can easily be reached for a drive voltage as low as around 50V. The elongation per unit length or height is roughly the same as for of “classical” actuators. The difference is that the effect is reached for a much lower voltage. A transversal d31-mode type is shown in figure 6. Note that the element shortens for a drive voltage in the polarisation direction. Bimorph Actuator Combination of 2 d31 actuators Figure 4: Multilayer parallel bimorph element (m/V) 7.10 −11 L3 × W .h 3 400 × h L2 4.10 −10 × (m/N) (Hz) L2 h2 Since again the maximum strain is around for 1kV/mm (as with discrete flexure elements), the general rule and formulas in this section also apply to multilayer elements. Axial Mode Multilayer Actuators (d33-mode) As with “classical”, axially-stacked actuators, the strain in the direction of polarisation is twice as large as it is in the transverse direction. However, to get a large absolute elongation, the dimension of the actuator in the direction of polarisation must be large as well. Poling direction Electrical field Displacement Figure 6: Transversal mode (d31) multilayer actuator (C/N) 2.10 −8 × Lt .W h 2.10 −2 × L Lt .h.W (F) – – Figure 5: Axial mode multilayer actuator 2 (V/N) For the multilayer process the thickness is currently limited to about 2mm. Figure 5 shows the structure of such an element. Since the maximum strain is about at 50V supply voltage, the absolute increase of its thickness will be about 2µm. For more information, please visit www.morganelectroceramics.com Disclaimer: Please note that all product, product specifications and data detailed in this brochure are subject to change without notice to improve reliability, For most practical applications it is necessary to stack several of these elements to form a so called multilayer stacked actuator. function, design or otherwise. Morgan Technical Ceramics Ltd and its affiliates Axial mode multilayer d33-mode actuators achieve higher displacements but also retain high blocking forces which are proportional to crosssectional area. for certain types of applications are based on knowledge of typical requirements does not assume any responsibility for the correctness of this information nor for damages consequent to its use. Statements regarding the suitability of products that are often placed on Morgan products in generic applications. 15 TECHNICAL CERAMICS Primary Materials Material Designation Navy Type EN 50324-1 Thermal Properties Curie Temperature Max Operating Temperature Custom Materials Units PZT401 Hard PZT I 100 PZT402 Hard PZT I 100 PZT5A1 Soft PZT II 200 PZT5A3 Soft PZT II 200 PZT802 Hard PZT III 100 PZT807 Hard PZT III 100 PZT5J1 Soft PZT V 600 PZT5H1 Soft PZT VI 600 PZT5H2 Soft PZT VI 600 PZT403 Hard PZT I 100 PZT404 Hard PZT I 100 PZT406 Hard PZT I 100 PZT407 Custom Custom Custom PZT801 Hard PZT III 100 Tc Tmax °C °C 330 165 325 160 370 185 350 175 300 150 300 150 250 125 195 95 195 95 320 160 320 160 325 160 315 155 350 175 r s SE33 SE11 SD33 SD11 YE33 YE11 YD33 YD11 kg/m3 x 10-12 m2/N x 10-12 m2/N x 10-12 m2/N x 10-12 m2/N x 1010 N/m2 x 1010 N/m2 x 1010 N/m2 x 1010 N/m2 7600 0.31 15.60 12.70 7.76 11.10 6.41 7.87 12.89 9.01 7720 0.31 15.57 12.30 7.94 10.89 6.42 8.19 12.59 9.18 7750 7910 0.31 17.69 14.73 8.77 12.79 5.65 6.80 11.40 7.83 7500 7650 7400 13.50 11.50 7600 0.31 18.42 16.93 8.06 14.24 5.43 5.91 12.41 7.03 7600 0.31 16.80 13.30 7650 0.31 16.98 13.23 8.42 11.49 5.89 7.56 11.88 8.70 7800 0.30 15.00 13.00 7900 0.30 15.00 12.00 6.67 7.69 6.67 8.33 9.90 15.65 10.90 8.20 9.90 6.39 9.17 12.20 10.10 7780 0.31 17.65 15.54 7.72 13.29 5.67 6.44 12.95 7.53 7750 0.31 12.50 11.49 7.38 10.33 8.00 8.70 13.55 9.69 KT33 KT11 tan d Ec kV/mm 1395 1320 1303 0.22% 1.50 1800 1936 1616 1.35% 1.44 1150 1290 0.30% 1105 1190 0.16% 2750 2062 1.61% 1.14 3400 3311 2872 1.70% 0.80 1350 1650 1331 0.30% 1.50 1325 0.35% 1225 1400 2.50% 1110 1142 0.17% 1.60 pC/N or pm/V pC/N or pm/V pC/N or pm/V x 10-3 V m/N x 10-3 V m/N x 10-3 V m/N Hz-m Hz-m Hz-m Hz-m - 0.58 0.35 0.67 0.56 0.33 0.70 0.42 0.71 307 125 495 26.3 10.7 38.0 2235 1650 2000 1944 575 0.62 0.34 0.67 0.45 0.69 409 176 0.62 0.36 0.71 0.35 0.69 425 183 585 24.8 10.6 36.2 2012 1400 1880 1750 90 0.54 0.30 0.64 0.55 0.29 0.69 0.47 0.61 0.34 0.70 0.64 0.38 0.74 1000 1200 0.65 0.38 0.75 0.37 0.63 554 234 670 22.7 9.3 32.5 1974 1450 2020 1717 70 0.60 0.35 0.72 0.50 Mechancial Quality Factor kp k31 k33 kt k15 d33 d31 d15 g33 g31 g15 Np N1 N3t N5 Qm 0.54 0.32 0.64 0.34 0.55 275 107 330 28.1 10.9 28.9 2304 1700 2070 2004 982 Time Stability Aging Rate - Dielectric Aging Rate - d constants Aging Rate - Coupling Aging Rate - Frequency a a a a per decade per decade per decade per decade -4.6% -4.8% -5.3% -1.9% 1.2% -1.6% -1.1% -0.6% 0.0% 0.2% -4.0% -6.3% -1.5% 0.9% -3.5% -2.1% -1.7% -0.2% 0.4% -1.5% Mechanical Properties Density Poisson’s ratio Compliances Electrical Properties Dielectric Constant Dielectric Loss Coercive Field Piezoelectric Properties Coupling Factors Charge or Strain Constants Voltage or Stress Constants Frequency Constants 0.20% 0.70 315 132 511 26.8 12.0 2190 1636 1800 600 -1.7% 1.0% 17.20 16.70 9.40 15.00 5.81 5.99 10.64 6.67 2.00% 25.7 11.0 2000 1370 1940 1465 60 -0.4% 0.2% Typical Values measured at 20°C ±1°C are provided for design information only. Standard tolerances are approximately ±20% of these values. 16 10.10 7.41 8.70 0.55 250 97 300 24.6 10.9 28.9 2285 1700 2070 260 93 294 25.1 10.1 28.8 2320 2030 -1.5% 0.8% 20.80 16.40 9.00 14.10 5.43 5.91 12.41 7.03 2.50% 620 250 21.9 8.7 1975 1375 1895 1430 65 -0.2% 0.3% 11.80 5.95 7.52 8.47 0.30% 0.68 0.40 0.75 0.32 0.68 685 240 741 23.4 9.6 25.8 1920 1420 2000 1670 69 0.58 0.33 0.68 600 0.62 0.36 0.71 0.35 0.72 372 159 515 25.5 10.9 38.7 2158 1515 1950 1877 457 -1.7% -1.6% -0.2% 0.4% -4.6% -3.4% -2.1% 1.2% -5.2% -5.3% -1.6% 1.2% 0.60 315 135 26.4 10.5 2120 1515 2000 2015 0.70 325 150 480 30.0 12.0 39.0 2175 1620 2000 750 1200 -6.0% -1.0% -2.5% 0.5% -1.5% 0.5% 315 130 27.0 11.0 2190 -5.6% -5.6% -2.0% 1.1% Material properties are measured according to standard IEEE and DOD definitions and measuring techniques. 17 TECHNICAL CERAMICS Custom Materials Material Designation Navy Type EN 50324-1 Thermal Properties Curie Temperature Max Operating Temperature Units PZT806 Hard PZT III 100 PZT5A2 Soft PZT II 200 PZT5A4 Soft PZT II 200 PZT501 Soft PZT II 200 PZT502 Soft PZT II 200 PZT503 Soft PZT Custom Custom PZT504 Soft PZT Custom Custom PZT505 Soft PZT Custom Custom PZT507 Soft PZT Custom Custom PZT508 Soft PZT Custom Custom PZT5K1 Soft PZT Custom Custom PZT5K2 Soft PZT Custom Custom PZT5K4 Soft PZT Custom Custom PZT701 Custom Custom Custom PZT702 Custom Custom Custom PZT703 Custom Custom Custom Tc Tmax °C °C 300 150 374 185 360 180 330 165 350 175 285 140 270 135 285 140 165 80 215 105 160 80 150 75 150 75 350 175 325 160 270 135 r s SE33 SE11 SD33 SD11 YE33 YE11 YD33 YD11 kg/m3 x 10-12 m2/N x 10-12 m2/N x 10-12 m2/N x 10-12 m2/N x 1010 N/m2 x 1010 N/m2 x 1010 N/m2 x 1010 N/m2 7600 7500 7910 0.31 18.07 15.30 8.96 13.14 5.53 6.54 11.16 7.62 7800 0.30 18.00 15.00 7800 0.30 19.00 15.00 7800 20.00 16.00 5.56 6.67 5.26 6.67 6.06 5.00 6.25 8300 0.31 20.03 15.74 7.53 13.01 4.99 6.37 13.28 7.70 8300 0.31 20.03 15.55 7.53 12.92 4.99 6.43 13.28 7.74 7800 0.31 12.92 10.70 7.12 9.75 7.74 9.35 14.04 10.26 7750 0.31 14.42 12.00 7.75 10.83 6.93 8.34 12.90 9.24 7800 0.30 16.50 7900 0.31 21.04 16.30 7.91 13.46 4.75 6.14 12.64 7.43 8200 18.80 16.40 9.40 14.40 5.32 6.10 10.64 6.94 7890 0.31 18.82 14.83 8.79 12.62 5.31 6.75 11.38 7.93 7800 14.70 11.70 7.40 10.80 6.80 8.55 13.51 9.26 7900 0.35 18.00 16.00 KT33 KT11 tan d Ec kV/mm 1250 1800 1730 2.00% 1850 1650 1.70% 2243 1640 1.42% 1.27 2003 1653 1.48% 1.31 2100 1800 2.00% 2000 2600 1.90% 7066 6129 1.96% 0.42 411 720 1.38% 1.28 1345 978 0.43% 1.61 1100 1.50% 5986 5588 1.88% 0.56 pC/N or pm/V pC/N or pm/V pC/N or pm/V x 10-3 V m/N x 10-3 V m/N x 10-3 V m/N Hz-m Hz-m Hz-m Hz-m - 0.55 0.31 0.71 0.45 0.60 0.34 0.71 0.66 0.37 0.72 450 200 75 80 75 75 0.71 0.42 0.79 0.35 0.71 871 381 950 16.5 6.9 17.0 1903 1410 1980 1656 69 0.70 0.41 0.79 0.37 0.71 926 407 950 14.8 6.5 15.5 1911 1410 1980 1663 63 0.51 0.30 0.67 0.43 0.68 166 59 360 45.7 16.2 50.0 2377 1720 2100 2068 570 0.53 0.31 0.68 0.43 0.68 288 116 450 24.2 9.8 46.0 2252 1700 2020 1959 535 0.63 0.37 0.73 0.68 460 195 550 28.0 13.0 37.0 1970 1400 2060 0.64 0.38 0.71 0.31 0.62 463 196 585 26.1 11.0 35.4 1973 1400 1860 1717 88 0.64 0.37 0.74 0.69 374 171 585 24.8 11.4 38.2 1960 1400 1880 0.66 0.39 0.73 0.31 0.63 493 209 564 24.9 10.5 34.4 2007 1420 1880 1746 85 0.68 0.38 0.75 Mechancial Quality Factor kp k31 k33 kt k15 d33 d31 d15 g33 g31 g15 Np N1 N3t N5 Qm Time Stability Aging Rate - Dielectric Aging Rate - d constants Aging Rate - Coupling Aging Rate - Frequency a a a a per decade per decade per decade per decade -4.1% -0.9% -2.9% -0.1% -2.0% -1.3% -0.9% -0.1% 0.2% -0.9% -1.0% -0.1% 0.1% -1.0% -2.0% -1.0% -0.5% 0.5% -1.5% 0.5% -0.6% 0.3% -1.6% -0.9% -0.1% 0.2% -1.4% -0.9% -0.3% 0.3% 0.2% 0.1% -0.1% -0.0% -0.4% -0.8% 0.1% 0.1% Mechanical Properties Density Poisson’s ratio Compliances Electrical Properties Dielectric Constant Dielectric Loss Coercive Field Piezoelectric Properties Coupling Factors Charge or Strain Constants Voltage or Stress Constants Frequency Constants 0.30% 280 104 26.4 10.9 2155 1660 2060 1780 1200 -2.1% 1.1% 5.56 6.25 -0.1% 0.1% 0.66 500 215 515 24.0 10.0 33.0 1975 1450 1850 4400 3300 1.60% 3910 4048 1.16% 0.91 6200 0.72 0.75 0.39 0.80 610 270 820 360 0.71 0.42 0.79 0.35 0.71 744 313 850 21.5 9.1 21.0 1916 1420 1980 1667 59 0.77 0.40 0.75 0.48 0.63 870 370 684 15.8 6.8 20.1 1935 1420 2100 -3.5% -3.1% -0.6% 0.8% -0.5% 25.0 12.0 2000 18.40 15.10 8.00 12.70 4.99 6.37 13.28 7.70 20.0 10.0 1900 1925 1400 1800 60 80 1900 2.00% 65 -0.5% 15.00 6.67 2.90% 0.68 340 150 500 30.0 10.0 33.0 2100 1500 80 -0.5% -0.5% 0.5% Typical Values measured at 20°C ±1°C are provided for design information only. Standard tolerances are approximately ±20% of these values. 18 19 TECHNICAL CERAMICS Morgan Advanced Materials Manufacturing Locations Many of our manufacturing sites are ISO 9001 and ISO 13485 certified For all enquiries, please contact our specialist sales and manufacturing sites: Europe North America Morgan Advanced Materials Vauxhall Industrial Estate Ruabon Wrexham LL14 6HY United Kingdom T +44 (0) 1978 810 456 F +44 (0) 1978 824 303 ruabonsales@morganplc.com Morgan Advanced Materials 232 Forbes Road Bedford Ohio 44146-5418 USA T +1 (440) 232 8600 F +1 (440) 232 8731 mtcussales@morganplc.com Asia South America Morgan Advanced Materials 150 Kampong Ampat 05-06A KA Centre Singapore 368324 Republic of Singapore T: +65 6595 0000 F: +65 6595 0005 asia.mc@morganplc.com Morgan Advanced Materials Rua Darcy Pereira 83 Distrito Industrial de Santa Cruz Rio de Janeiro-RJ 23565-190 Brazil Tel : +55 (21) 3305 7400 Fax: +55 (21) 24181205 Email : mtcsasales@morganplc.com Morgan Advanced Materials plc Registered in England and Wales, Registration No. 286773, © Copyright 20.04.2013 | Designed and Produced by reflectiondesign.co.uk www.morganadvancedmaterials.com www.morganelectroceramics.com