Low Vacuum
Pump
Oil Rotary Vacuum Pump [VD Series]
VD series is a direct-drive low noise oil rotary vacuum pump. This pump is suitable for a wide range of applications such as
evaporator, sputtering and food packaging.
VD901
Feat ures
A p p lic a tio n s
Evaporation, sputtering, and ion plating
Easy Maintenance
Pump head can be removed without disconnecting the vacuum piping
(except VD151, VD201). ＊ See attached figure.
Oil level gauge and drain valve accessible for easy oil exchange and
daily inspection.
Analytical instrument and leak test system
Forced Oil Circulation System Ensures Stable Pumping Speed Below
Atmospheric Pressure
When equipped with the optional oil mist trap and oil return
mechanism, the VD301, VD401 and VD601 can continuously run at all
pressure ranges below atmospheric pressure.
Gas exchange, gas filling, and vacuum insulation
Vacuum drying, freeze drying, vacuum degassing, vacuum packing,
vacuum chuck and vacuum molding, etc.
Low Vacuum Pump
Optimized Design Operation for Quiet
Oil Rotary Vacuum Pump [VD Series]
Dimensions
V D 151
Inlet (JIS B 8365 KF25 equivalency)
Unit: mm
Oil cap G3/4
Outlet G1
Gas ballast valve
104
260
20 513
Ｇ.Ｌ.
43 42
20 130 20
170
100 9
20
47
18
Rubber legs
Oil level gauge
37 33
Oil drain plug M12
222
53 64 90 84
(395)
Oil mist trap TMX-1
Oil mist trap
（option）
Totally-enclosed fan-cooled
Flange inducton motor
3phase 0.55kW 4P
Filter cap
V D 201
Inlet (JIS B 8365 KF25 equivalency)
Unit: mm
Oil cap G3/4
Outlet G1
Gas ballast valve
Rubber legs
120
260
20 536
116
20
52
242
44 32
20
34
130
170
23
(439)
19 34 90 75 40
Oil level gauge
Oil mist trap TMX-1
Oil mist trap (option)
Totally-enclosed fan-cooled
Flange inducton motor
3phase 0.75kW 4P
20
G.L.
Oil drain valve G3/8
V D 301, 401
Oil cap G1 (PF1)
Outlet flange 4-M8 tap,
Central diameter Ø85
JIS B 2290 VG40 equivalency
40
Oil mist trap (option)
135
Ø166
31140
281
(324)
363 [383]
210 [230] 47 33
232
128
Note :[
]VD401 dimension
365
395
603 [623]
Oil level gauge
4-Ø10
63
150
210
(559)
Oil mist trap TM201
Inlet flange 4-M8 tap,
Central diameter Ø85
JIS B 2290 VG40 equivalency
Oil drain valve G1/2
(629)
Oil mist trap TM401
236
131
200
Drip-proof protected
Flange induction motor
3phase 1.5kW 4P
Unit: mm
(215)
Gas ballast port G3/8
V D 601
Gas ballast port G3/8
Oil cap G1
Unit: mm
Oil mist trap (option)
158
298
Outlet flange 4-M8 tap,
Central diameter Ø85
JIS B 2290 VG40 equivalency
45
Inlet flange 4-M8 tap, Central diameter Ø100
JIS B 2290 VG50 equivalency
281
56 36
Oil level gauge
92
360
390
(724)
87
230
280
4-Ø11
41
164
Ø166
328
(371)
435
255
(676)
Oil mist trap TM401
180
Drip-proof protected
Flange induction motor
3phase 2.2kW 4P
G.L.
Oil drain valve G1/2
V D 901
Gas ballast port G3/8
Oil cap G1
45
Inlet flange 4-M8 tap, Central diameter Ø100
JIS B 2290 VG50 equivalency
486
306
326
Oil mist trap (option)
56 36
182
87
200
230
280
8-Ø11
540
570
(820)
When a pump is removed (VD301〜VD901)
Piping
Motor
Pump
41
164
Ø214
328
(371)
Oil level gauge
(676)
Oil mist trap TM401
151
291
Outlet flange
4-M8 tap, Central diameter Ø85
JIS B 2290 VG40 equivalency
270
Totally-enclosed Fan-cooled
Flange induction
Motor 3phase
3.7kW 4P
Unit: mm
G.L.
Oil drain valve G1/2
Oil Rotary Vacuum Pump [VD Series]
S p e c ific a tio n s
Model
Designed
50Hz
pumping speed
60Hz
Ultimate
GP close
pressure ＊1
GP open
VD151
VD201
VD301
VD401
VD601
m3/h
14.4
20.2
30
40
60
90
L/min
240
336
500
670
1000
1500
CFM
8.47
11.89
17.66
23.54
35.31
52.97
m3/h
17.3
24.2
36
48
72
108
L/min
288
403
600
800
1200
1800
CFM
10.18
14.24
21.29
28.25
42.38
63.57
Pa
0.67
Torr
5×10-3
mbar
6.7×10-3
Pa
6.7
2
Torr
5×10-2
1.5×10-2
6.7×10-2
mbar
Type
＊
Motor 2
2.0×10-2
Totally Enclosed Fan Cooled Motor
0.55 (4)
0.75 (4)
1.5 (4)
2.2 (4)
3.7 (4)
HP (number of poles)
0.75 (4)
1 (2)
2 (4)
2.95 (4)
4.96 (4)
200V / 220V / 230V / 240V / 380V / 400V / 415V-50Hz
200V / 220V / 230V / 240V / 380V / 400V / 440V / 460V-60Hz
200V / 50Hz, 60Hz
220V / 60Hz
Oil ＊4
ULVOIL R-7
Oil capacity
0.7 to 1.1 L
1.0 to 2.5 L
Cooling method
2.5 to 4.0 L
Air cooled
Outlet
JIS KF25
B 2290 (NW25)
VG40 equivalency
G1
Weight
External dimensions W×L×H
JIS B or
2290
VG50(JIS
equivalency
ISO63
VG50
B2290)
B 2290 VG40
equivalency
KF25JIS
(NW25)
or VG40(JIS
B2290)
JIS B 8365
KF25
equivalency
KF25
(NW25)
Inlet
29 kg
34 kg
59 kg
61 kg
88 kg
105 kg
170×514×240mm
170×536×265mm
236×603×324mm
236×623×324mm
298×725×371mm
294×820×371mm
Certification
CE
CE (Option)
Standard accessories
Motor, Oil for 1 pump, Operation manual
Options ＊5
1
2
＊
3
＊
4
＊
5
Totally Enclosed Fan Cooled Motor
Drip-proof protected Flange Motor
kw (number of poles)
Voltage/Freqency ＊3
＊
VD901
Oil mist trap
Oil mist trap, Gas ballast valve, Oil return mechanism, Helium tight, CE
Measured with a Pirani gauge. (Approx. 6.7×10 Pa when measured with a McLeod vacuum gauge.)
Options: The pump is also compatible with a totally-enclosed fan-cooled motor, increased safety explosion-resistant motor, and pressure resistant explosion-resistant flange motor.
Other voltage is available upon request.
Other oil types are available upon request.
TM401 and TM-2 are available oil mist trap for VD601 and VD901. Please use TM-2 if repeated intake pressure exceeds 10,000Pa.
-2
＊
Pu m p in g S p e e d C u r v e s
VD151, 201
VD301, 401
Gas Ballast Closed
Gas Ballast Opened
VD201 60Hz
VD201 50Hz
40
VD601, 901
Gas Ballast Closed
Gas Ballast Opened
10
VD151 60Hz
0
10 –1
10 –3
VD151 50Hz
Pumping Speed (JIS B8316/1985)
Type：VD151,VD201
Power：3φ 0.55kw, 0.75kw 50/60Hz
Oil：ULVOIL R-7
5
1
10 –2
10
10 –1
10 2
1
10 3
10
Pressure
10 4
10 2
Pumping Speed [m3/h]
Pumping Speed [m3/h]
VD401 50Hz
15
10 5
Pa
760
Torr
(Note : 1mbar=100Pa)
VD301 60Hz
30
VD301 50Hz
20
Pumping Speed (JIS B8316/1985)
Type：VD301,VD401
Power：3φ 1.5kw 50/60Hz
Oil：ULVOIL R-7
10
0
10 –1
10 –3
1
10 –2
10
10 –1
10 2
1
10 3
10
Pressure
10 4
10 2
Gas Ballast Closed
Gas Ballast Opened
100
VD401 60Hz
20
Pumping Speed [m3/h]
25
10 5
Pa
760
Torr
(Note : 1mbar=100Pa)
VD901 60Hz
VD901 50Hz
80
VD601 60Hz
60
VD601 50Hz
40
Pumping Speed (JIS B8316/1985)
Type：VD601,VD901
Power：3φ 2.2kw, 3.7kw 50/60Hz
Oil：ULVOIL R-7
20
0
10 –1
10 –3
1
10 –2
10 2
1
10
10 –1
Pressure
10 3
10
10 4
10 2
10 5
Pa
760
Torr
(Note : 1mbar=100Pa)
www.ulvac.co.jp/eng
w w w. u l va c. c o. j p
ULVAC, Inc. Components Division
Overseas Sales in Japan TEL +81-467-89-2261
USA : ULVAC Technologies, Inc.
GERMANY : ULVAC GmbH
CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd.
TAIWAN : ULVAC TAIWAN, Inc. KOREA : ULVAC KOREA, Ltd.
SINGAPORE : ULVAC SINGAPORE PTE LTD
TEL +1-978-686-7550
TEL +49-89-960909-0
TEL +86-21-6127-6618
TEL +886-3-579-5688
TEL +82-31-683-2922
TEL +65-6542-2700
PHILIPPINES : ULVAC Singapore Philippines Branch
VIETNAM : ULVAC Singapore Vietnam Representative Office
THAILAND : ULVAC (THAILAND) LTD
MALAYSIA : ULVAC MALAYSIA SDN. BHD.
INDIA : ULVAC, Inc., India Branch
This catalog is subject to change without notice.
This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.
TEL +63-2-828-7700
TEL +84-8-62556762
TEL +66-2-312-4447
TEL +60-3-5121-4700
TEL +91-40-27007006
1171E/2012062000UYO