Low Vacuum
Pump
Mechanical Booster Pumping Unit
[YM-VD/YM-VS Series]
ULVAC mechanical booster pumping unit contains an oil-sealed rotary vacuum pump and a mechanical booster pump in a
compact frame. All the connection piping are included. The unit has an ergonomic, user friendly design allowing for easy
maintenance. The ULVAC YM-VD/YM-VS Series is perfect for any application from R&D to production.
Feat ures
Evaporation, Sputtering, Ion Plating
Vacuum Packing, Vacuum Absorption, Vacuum Molding
Vacuum Heat Furnace, Sintering Furnace, Blazing Furnace
Easy Maintenance
With a simple and efficient frame design from ULVAC, just the oilsealed rotary vacuum pump is removed from the pump set during
normal maintenance.
Optional Components
Various options are available from ULVAC including oil mist traps,
mountable operational panel, vacuum switches, vacuum circuit
breakers. ULVAC mechanical booster pumping unit can be customized
to suit your needs.
Vacuum Drying, Freeze-drying, Vacuum Air Removal
Gas replacement, packing, vacuum heat insulation, leak tester, etc.
Low Vacuum Pump
Comapct Design
ULVAC mechanical booster pumping unit contains an oil-sealed rotary
vacuum pump and a mechanical booster pump all in a compact frame
including necessary vacuum piping.
A p p lic a tio n s
Mechanical Booster Pumping Unit
[YM-VD/YM-VS Series]
S p e c ific a tio n s
Items
Model
Pump
combination
YM-VD-103C
Mechanical booster pump
YM-VD-103CM
PMB-001C
Cooling water
Oil rotary vacuum pump
Maximum pumping speed
50Hz m3 /hr
L/min
CFM
60Hz m3 /hr
L/min
CFM
Maximum suction pressure
50Hz Pa
Torr
mbar
60Hz Pa
Torr
mbar
Pa
Ultimate pressure ＊1
Torr
mbar
kw
(number
of poles)
Mechanical
booster pump hp (number of poles)
Motor power
(number of poles) Oil rotary
kw (number of poles)
vacuum pump hp (number of poles)
Mechanical booster pump
Motor
Oil rotary vacuum pump
Mechanical booster pump Capacity (L)
Oil
Standard oil
Oil rotary vacuum pump Capacity (L)
Standard oil
Cooling
Mechanical booster pump
method
Oil rotary vacuum pump
Primary side pressure
Inlet/outlet differential pressure
Cooling water temperature
Cooling water volume
L/min
Inlet size JIS B 2290
Outlet size JIS B 2290
Weight
kg
Standard Accessories
Options
8.5×10 3
6.4×10 2
85
4.5×10 3
33.8
45
PMB-001CM
VD301
95
1580
55.91
115
1900
67.69
1.0×10 5
760
1000
1.0×10 5
760
1000
YM-VD-304C
PMB-003C
7.0×10 2
5.3
7
7.0×10 2
5.3
7
0.4 (2)
0.54 (2)
0.35
YM-VD-304CM
YM-VD-304A
YM-VD-304AT
PRC-003A
PRC-003A
PMB-003CM
VD401
250
4100
147.14
290
4800
170.69
1.0×10 5
760
1000
1.0×10 5
760
1000
4.0×10 -1
3.0×10 -3
4.0×10 -3
→
Atomospheric pressure operation model
7.0×10 2
5.3
7
7.0×10 2
5.3
7
1.0×10 5
760
1000
1.0×10 5
760
1000
0.75 (2)
1.0 (2)
1.5 (4)
2.0 (4)
Totally enclosed fan cooled motor
Drip-proof protected flange motor
Canned motor
0.7
ULVOIL R-4
1.0 to 2.5
ULVOIL R-7
Air cooled
Air cooled/Water cooled
Water cooled
Air cooled
0.1 to 0.3MPa (14.5 to 43.5psi)
−
0.05MPa≦ (7.25psi≦)
0.01MPa≦ (1.45psi≦)
−
5 to 30˚C (41 to 86˚F)
−
2.0≦
−
Corresponds to VG50
Corresponds to VG80
Corresponds to VG40
145
150
175
180
185
−
①Oil return mechanism A or B ②Timing leak valve ③Cooling-water sensor ④Oil drain valve ⑤Control box ⑥Terminal block box
⑦Voltage except 200V/50Hz-60Hz, 220V/0Hz ⑧Fluorine oil ⑨Oil mist trap (Low or high loads) ⑩Vacuum pipe with gauge port and leak port
⑪Motor (Totally enclosed fan cooled motor, Pressure/explosion proof and increased safety explosion motor） ＊ 3
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＊1: Measured by pirani vacuum gauge ＊2: Water cooling is required in continuous operation at a pressure higher than 530Pa (4Torr).
＊3: Explosion proof option is only applicable with motor. Other electric system (optional timing leak valve, cooling-water sensor, control box, terminal block box) does not meet explosion proof specification.
D im e n s io n s
580
140
YM-VD-304A (T)
4-φ14 Holes for foundation bolt
Cooling Water Inlet Rc3/8
Cooling Water Outlet Rc3/8
4-φ14 Holes for foundation bolt
580
140
140
Outlet flange
4-M8 Tap, Central diameter φ85
JIS B 2290 VG40 equivalency
Unit: mm
40
40
140
Outlet flange
4-M8 Tap, Central diameter φ85
JIS B 2290 VG40 equivalency
250
621
500
621
500
YM-VD-103C (M)
860
(870)
Totally-Enclosed Fan-Cooled
Flange Induction Motor
3 Phase 0.4kW 2P
AC200V/50, 60Hz AC220V/60Hz
Drip-proof protected Flange Induction Motor
3 Phase 1.5kW 4P
AC200V/50, 60Hz AC220V/60Hz
250
Inlet flange
4-M10 Tap, Central diameter φ100
JIS B 2290 VG50 equivalency
286.2
447
40
40
447
Water-cooled Canned Induction Motor
3 Phase 0.75kW 2P
AC200V/50, 60Hz AC220V/60Hz
TM401 mounting (Option)
TM201 mounting (Option)
Inlet flange
4-M10 Tap, Central diameter φ135
306
860
JIS B 2290 VG80 equivalency
(870)
Drip-proof protected Flange Induction Motor TM401 mounting (Option)
3 Phase 1.5kW 4P
TM201 mounting (Option)
AC200V/50, 60Hz AC220V/60Hz
Inverter for 0.75kW
AC200V class
YM-VD-304A (T)
(676)
(746)
(925)
660
580
580
140
YM-VD-606A (T)
4-φ14 Holes for foundation bolt
Cooling Water Inlet Rc3/8
135
40
140
40
690
Cooling Water Outlet Rc3/8
135
621
500
621
500
Drip-proof protected Flange Induction Motor
3 Phase 1.5kW 4P
AC200V/50, 60Hz AC220V/60Hz
447
306
860
(885)
Totally-Enclosed Fan-Cooled
Flange Induction Motor
3 Phase 0.75kW 2P
AC200V/50, 60Hz AC220V/60Hz
Inlet flange
4-M10 Tap, Central diameter φ135
JIS B 2290 VG80 equivalency
Inlet flange
4-M10 Tap, Central diameter φ135
JIS B 2290 VG80 equivalency
40
250
40
(14)
TM401 mounting (Option)
405
Water-cooled Canned Induction Motor
3 Phase 2.2kW 2P
AC200V/50, 60Hz AC220V/60Hz
TM201 mounting (Option)
4-φ14 Holes for foundation bolt
Outlet flange
4-M8 Tap, Central diameter φ85
JIS B 2290 VG40 equivalency
Outlet flange
4-M8 Tap, Central diameter φ85
JIS B 2290 VG40 equivalency
960
(970)
386.5
Drip-proof protected Flange Induction Motor
3 Phase 2.2kW 4P
AC200V/50, 60Hz AC220V/60Hz
TM-2 mounting (Option)
TM401 mounting (Option)
Inverter for 2.2kW
AC200V class
443
710
630
YM-VD-606A (T)
Cooling Water Inlet Rc3/8
Cooling Water Outlet Rc3/8
(5)
(5)
396
660
580
(676)
(746)
(925)
YM-VD-304C (M)
(793)
(975)
1035
YM-VD-304C (M)
(5)
(5)
396
396
660
580
(676)
(746)
(853)
YM-VD-103C (M)
S p e c ific a tio n s
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→
→
→
→
→
→
→
→
→
→
→
→
→
→
→
→
→
→
→
→
→
YM-VD-606A
YM-VD-606AT
PRC-006A
PRC-006A
YM-VD-609A
YM-VD-609AT
YM-VS-600A
PRC-006A
PRC-006A
PRC-006A
Atomospheric pressure operation model
VD601
450
7500
264.86
520
8670
306.06
1.0×10 3
7.5
10.0
1.0×10 3
7.5
10.0
490
8170
288.40
500
8330
294.29
1.0×10 5
760
1000
1.0×10 5
760
1000
1.3×10 3
10
13
1.1×10 3
8.3
11
4.0×10 -1
3.0×10 -3
4.0×10 -3
Atomospheric pressure operation model
VD901
600
10000
353.15
2.2 (2)
2.95 (2)
2.2 (4)
2.95 (4)
Drip-proof protected flange motor
1.5
PRC-012A
PRC-012A
850
14200
500.29
1000
16700
588.58
VS2401
1000
16700
588.58
1200
20000
706.29
Totally enclosed fan cooled motor
7.5 (4)
10 (4)
1.9
8.0 to 10.5
Water cooled
0.1 to 0.3MPa (14.5 to 43.5psi)
0.05MPa≦ (7.25psi≦)
5 to 30˚C (41 to 86˚F)
2.0≦
Corresponds to VG80
Corresponds to VG40
3.7 (2)
4.96 (2)
5.5 (4)
7.47 (4)
ULVOIL R-7
Water cooled
0.01MPa≦ (1.45psi≦)
1.3×10 3
10
13
1.1×10 3
8.3
11
6.7×10 -1
5.0×10 -3
6.7×10 -3
ULVOIL R-4
Air cooled
265
YM-VS-1202A
VS1501
550
9200
323.72
660
11000
388.46
1.2×10 3
9.0
12.0
9.3×10 2
7.0
9.3
1.0×10 5
760
1000
1.0×10 5
760
1000
3.7 (4)
4.96 (4)
Canned motor
2.5 to 4.0
260
550
9170
323.72
YM-VS-1201A
4.0
Corresponds
285
290
−
①Oil return mechanism A or B ②Timing leak valve ③Cooling-water sensor ④Oil drain valve ⑤Control box
→ ⑥Terminal block box ⑦Voltage except 200V/50Hz-60Hz, 220V/0Hz ⑧Fluorine oil ⑨Oil mist trap (Low or high loads)
⑩Vacuum pipe with gauge port and leak port ⑪Motor (Totally enclosed fan cooled motor） ＊2
G3
515
5.0
Corresponds to VG100
G4
550
630
Oil mist trap
①Vacuum switch ②Vacuum release valve
D im e n s io n s
Cooling Water Inlet Rc3/8
135
40
YM-VD-609A (T)
690
Cooling Water Outlet Rc3/8
135
YM-VS-1201A、YM-VS-1202A
4-φ14 Holes for foundation bolt
100
φ18 Gauge port
Inlet flange
4-M10 Tap, Central diameter φ135
JIS B 2290 VG80 equivalency
Water-cooled Canned Induction Motor
3 Phase 2.2kW 2P
AC200V/50, 60Hz AC220V/60Hz
960
(970)
Leak Port
437.5
30
40
405
Unit: mm
800 [950]
900
840
621
500
Outlet flange
4-M8 Tap, Central diameter φ85
JIS B 2290 VG40 equivalency
Totally-Enclosed Fan-Cooled
Flange Induction Motor 3 Phase 3.7kW 4P
AC200V/50, 60Hz AC220V/60Hz
4-φ24 Holes for foundation bolt
Inverter for 3.7kW
AC200V class
TM-2 mounting (Option)
TM401 mounting (Option)
1000 [1150]
520 [630]
Water-cooled Canned Induction Motor
3 Phase 3.7kW 2P
AC200V/50, 60Hz AC220V/60Hz
300
Inlet flange
8-φ12 Holes, Central diameter φ160
JIS B 2290 VG100 equivalency
(5)
820
1200
443
710
630
(793)
(975)
1035
Inverter for 2.2kW
AC200V class
100
800
175
YM-VS-600A
YM-VS-1201A
[ ]: YM-VS-1202A
φ18 Gauge port
Totally-Enclosed Fan-Cooled 100 150
Flange Induction Motor
3 Phase 5.5kW 4P [3 Phase 7.5kW 4P]
AC200V/50, 60Hz AC220V/60Hz
900
840
Leak Port
175
820
Totally-Enclosed Fan-Cooled 100 150 Cooling Water Inlet G3/8 (PF3/8)
Flange Induction Motor
Cooling Water Outlet G3/8 (PF3/8)
3 Phase 5.5kW 4P
AC200V/50, 60Hz AC220V/60Hz
280
750
290
(1375)
1180
4-φ24 Holes for
foundation bolt
Inverter for 2.2kW AC200V class
Water-cooled Canned Induction Motor
3 Phase 2.2kW 2P AC200V/50, 60Hz AC220V/60Hz
1000
Inlet flange
550
270
4-φ12 Holes, Central diameter φ135
JIS B 2290 VG80 equivalency
Cooling Water Inlet G3/8 (PF3/8)
Cooling Water Outlet G3/8 (PF3/8)
280
750
290
(41)
1375 [1705]
→
30
Mechanical Booster Pumping Unit
[YM-VD/YM-VS Series]
Pu m p in g S p e e d C u r v e s
YM-VD-103C, 304C, 304A
YM-VD-103CM, 304CM, 304AT
m3/h
300
YM-VD-304C/304A
(60Hz)
YM-VD-304C/304A
(50Hz)
200
150
Type ：YM-VD-103C
：YM-VD-304C
：YM-VD-304A
Power：AC200V 50／60Hz 3φ
（ULVOIL R-4）
Oil ：MBP
（ULVOIL R-7）
Oil ：RP
Gauge：Pirani
YM-VD-103C (60Hz)
100
Pumping Speed
YM-VD-304CM
(50Hz)
200
YM-VD-304CM/304AT
(60Hz)
150
YM-VD-304AT
(50Hz)
YM-VD-103CM (60Hz)
100
YM-VD-103C (50Hz)
YM-VD-103CM (50Hz)
50
50
0
10 –1
10 –3
1
10
10 –2
10 –1
10 2
10 3
1
10
Pressure
0
10 –1
10 4
10 5 Pa
10 2
760 Torr
(Note : 1mbar=100Pa)
Atmospheric pressure
YM-VD-606A, 609A
10 –3
YM-VD-606A (60Hz)
600
YM-VD-606A (50Hz)
300
10
10 4
10 Pa
760 Torr
(Note : 1mbar=100Pa)
Atmospheric pressure
5
10 2
100
100
1
10
10 –2
10 –1
10 2
10 3
1
10
Pressure
Type ：YM-VD-606AT
：YM-VD-609AT
Power：AC200V 50／60Hz 3φ
（ULVOIL R-4）
Oil ：MBP
（ULVOIL R-7）
Oil ：RP
Gauge：Pirani
YM-VD-609AT (60Hz)
YM-VD-606AT (50Hz)
YM-VD-609AT
(50Hz)
300
200
10 –3
10 3
1
Pumping Speed
YM-VD-606AT
(60Hz)
400
200
0
10 –1
10 2
500
Pumping Speed
YM-VD-609A (50Hz)
400
10 –1
m3/h
700
Type ：YM-VD-606A
：YM-VD-609A
Power：AC200V 50／60Hz 3φ
（ULVOIL R-4）
Oil ：MBP
（ULVOIL R-7）
Oil ：RP
Gauge：Pirani
YM-VD-609A (60Hz)
500
10
Pressure
Pumping Speed
600
1
10 –2
YM-VD-606AT, 609AT
m3/h
700
Pumping Speed
Type ：YM-VD-103CM
：YM-VD-304CM
：YM-VD-304AT
Power：AC200V 50／60Hz 3φ
（ULVOIL R-4）
Oil ：MBP
（ULVOIL R-7）
Oil ：RP
Gauge：Pirani
250
Pumping Speed
250
Pumping Speed
m3/h
300
Pumping Speed
10 4
10 5 Pa
10 2
760 Torr
(Note : 1mbar=100Pa)
Atmospheric pressure
0
10 –1
10 –3
1
10
10 –2
10 –1
10 2
10 3
1
10
Pressure
10 4
10 Pa
760 Torr
(Note : 1mbar=100Pa)
Atmospheric pressure
5
10 2
YM-VS-600A,1201A, 1202A
Pumping Speed
（L/min）
（m3/h）
25000 1500
1400
Pumping Speed
YM-VS-1202A (60Hz)
Type ：YM-VS-600A
：YM-VS-1201A
：YM-VS-1202A
Power：AC200V 50／60Hz 3φ
（ULVOIL R-4）
Oil ：MBP
（ULVOIL R-7）
Oil ：RP
Gauge：Pirani
1300
20000 1200
YM-VS-1202A (50Hz)
1100
1000
15000 900
800
YM-VS-1201A (60Hz)
700
YM-VS-1201A (50Hz)
10000 600
YM-VS-600A (60Hz)
500
400
YM-VS-600A (50Hz)
5000 300
VS2401
200
VS1501
100
0
0
2
3
4
5
–1
10
1
10
10
10
10
10 Pa
10
10 2
10 –3
10 –2
10 –1
1
760 Torr
(Note : 1mbar=100Pa)
Pressure
Atmospheric pressure
www.ulvac.co.jp/eng
w w w. u l va c. c o. j p
ULVAC, Inc. Components Division
Overseas Sales in Japan TEL +81-467-89-2261
USA : ULVAC Technologies, Inc.
GERMANY : ULVAC GmbH
CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd.
TAIWAN : ULVAC TAIWAN, Inc. KOREA : ULVAC KOREA, Ltd.
SINGAPORE : ULVAC SINGAPORE PTE LTD
TEL +1-978-686-7550
TEL +49-89-960909-0
TEL +86-21-6127-6618
TEL +886-3-579-5688
TEL +82-31-683-2922
TEL +65-6542-2700
PHILIPPINES : ULVAC Singapore Philippines Branch
VIETNAM : ULVAC Singapore Vietnam Representative Office
THAILAND : ULVAC (THAILAND) LTD
MALAYSIA : ULVAC MALAYSIA SDN. BHD.
INDIA : ULVAC, Inc., India Branch
This catalog is subject to change without notice.
This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.
TEL +63-2-828-7700
TEL +84-8-62556762
TEL +66-2-312-4447
TEL +60-3-5121-4700
TEL +91-40-27007006
1964E/2012062000UYO