Page 1 MOS Models (5/23/00) 1.8 - MOSFET MODELS INTRODUCTION Objective The objective of this presentation is: 1.) Understand how the MOS transistor works 2.) Understand and apply the simple large signal model 3.) Understand and apply the small-signal model Outline • MOS Structure and Operation • Large Signal Model • Small-Signal Model • Capacitance • Short Channel Large Signal Model • Subthreshold Large Signal Model • Summary ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 2 MOS Models (5/23/00) MOS STRUCTURE AND OPERATION Metal-Oxide-Semiconductor Structure Bulk/Substrate ,,, ,,, Source Gate Drain Polysilicon p+ n+ Thin Oxide (10-100nm 100Å-1000Å) n+ p- substrate Heavily Doped p Lightly Doped p Intrinsic Doping Lightly Doped n Heavily Metal Doped n Fig1.8-1 Terminals: • Bulk - Used to make an ohmic contact to the substrate • Gate - The gate voltage is applied in such a manner as to invert the doping of the material directly beneath the gate to form a channel between the source and drain. • Source - Source of the carriers flowing in the channel • Drain - Collects the carriers flowing in the channel ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 3 MOS Models (5/23/00) Formation of the Channel for an Enhancement MOS Transistor Subthreshold (VG<VT) VB = 0 ,,, ,,, ,,, ,,, VS = 0 VG < VT VD = 0 Polysilicon p+ p- substrate Threshold (VG=VT) VB = 0 n+ VS = 0 n+ VG =VT VD = 0 Polysilicon p+ p- substrate n+ n+ Inverted Region Strong Threshold (VG>VT) VB = 0 VS = 0 VG >VT VD = 0 Polysilicon p+ p- substrate ECE 4430 - Analog Integrated Circuits and Systems n+ n+ Inverted Region Fig1.8-2 © Phillip E. Allen 2000 Page 4 MOS Models (5/23/00) The MOSFET Threshold Voltage When the gate voltage reaches a value called the threshold voltage (VT), the substrate beneath the gate becomes inverted (it changes from p-type to n-type). Qb QSS V T = φ MS + -2 φ F Cox + Cox where φMS = φF(substrate) - φF(gate) φF = Equilibrium electrostatic potential (Femi potential) kT φF(PMOS) = - q ln(NA/ni) = -Vt ln(NA/ni) kT φF(NMOS) = q ln(ND/ni) = Vt ln(ND/ni) Qb ≈ 2qNAεsi(|-2φF+vSB|) QSS = undesired positive charge present in the interface between the oxide and the bulk silicon Rewriting the threshold voltage expression gives, Q b0 QSS Q b - Q b0 = V T0 + γ |-2 φ F + v S B | V T = φ MS -2φ F - C - C Cox ox ox where Q b0 Q SS 2qεsiNA V T0 = φ MS - 2φ F and γ= Cox - Cox Cox ECE 4430 - Analog Integrated Circuits and Systems |-2φ F | © Phillip E. Allen 2000 Page 5 MOS Models (5/23/00) Signs for the Quantities in the Threshold Voltage Expression Parameter Substrate φ MS Metal n+ Si Gate p+ Si Gate φF Qb0,Qb Qss VSB γ ECE 4430 - Analog Integrated Circuits and Systems N-Channel p-type P-Channel n-type − − + − − + + + − − + + + + − − © Phillip E. Allen 2000 Page 6 MOS Models (5/23/00) Example 1 - Calculation of the Threshold Voltage Find the threshold voltage and body factor γ for an n-channel transistor with an n+ silicon gate if tox = 200 •, NA = 3 × 1016 cm -3, gate doping, ND = 4 × 1019 cm -3, and if the positively-charged ions at the oxide-silicon interface per area is 10 10 cm-2. Solution From above, φF(substrate) is given as 3× 10 16 = −0.377 V 1 0 1.45 × 1 0 φF(substrate) = −0.0259 ln The equilibrium electrostatic potential for the n+ polysilicon gate is found from as 4 × 10 1 9 = 0.563 V 1.45 × 10 1 0 φF(gate) = 0.0259 ln Therefore, the potential φMS is found to be φF(substrate) − φF(gate) = −0.940 V. The oxide capacitance is given as C ox = ε ox /tox = 3.9 × 8.854 × 10 -14 = 1.727 × 10-7 F/cm2 8 200 × 10 The fixed charge in the depletion region, Qb0, is given as Qb0 = − [2 × 1.6 × 10-19 × 11.7 × 8.854 × 10-14 × 2 × 0.377 × 3 × 1016]1/2 = − 8.66 × 10-8 C/cm2. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 7 MOS Models (5/23/00) Example 1 - Continued Dividing Qb0 by Cox gives −0.501 V. Finally, Qss/Cox is given as Qss 10 10 × 1.60 × 10 -19 = = 9.3 × 10-3 V -7 Cox 1.727 × 10 Substituting these values for VT0 gives V T0 = - 0.940 + 0.754 + 0.501 - 9.3 x 10-3 = 0.306 V The body factor is found as γ = 2 × 1.6 × 10 -19 × 11.7 × 8.854 × 10 -14 × 3 × 10 1 6 1.727 × 10 -7 ECE 4430 - Analog Integrated Circuits and Systems 1/2 = 0.577 V1/2 © Phillip E. Allen 2000 Page 8 MOS Models (5/23/00) SIMPLE LARGE SIGNAL MOSFET MODEL Large Signal Model Derivation Derivation+ vGS - 1.) Let the charge per unit area in the channel inversion layer be Q I(y) = -C ox[vGS - v(y) - VT] (coulombs/cm2) 2.) Define sheet conductivity of the inversion layer per p- n+ Source v(y) 0 + v - DS iD dy y y+dy n+ Drain L y square as amps 1 cm2 coulombs σ S = µ oQ I(y) v·s cm2 = volt = Ω/sq. 3.) Ohm's Law for current in a sheet is iD -iD -iDdy dv JS = = σ E = σ dv = dy = S y S dy → µoQ I(y)W W σ SW → iD dy = -Wµ oQ I(y)dv 4.) Integrating along the channel for 0 to L gives vD S vD S L ⌠ ⌡iD dy = - ⌠ ⌡Wµ oQ I(y)dv = ⌠ ⌡Wµ o C ox [v GS -v(y)-V T ] dv 0 0 0 5.) Evaluating the limits gives WµoCox v 2 (y) v D S iD = (v GS -V T )v(y) → L 2 0 ECE 4430 - Analog Integrated Circuits and Systems W µ oC o x v DS 2 (v -V )v iD = - 2 L GS T DS © Phillip E. Allen 2000 Page 9 MOS Models (5/23/00) Saturation Voltage - V D S(sat) Interpretation of the large signal model: iD vDS = vGS - VT Active Region Saturation Region Increasing values of vGS vDS The saturation voltage for MOSFETs is the value of drain-source voltage at the peak of the inverted parabolas. diD µoCoxW [(vGS -V T ) - vDS ] = 0 → v D S (sat) = v G S - V T dvDS = L Useful definitions: µoCoxW K’W = L =β L ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 10 MOS Models (5/23/00) Complete Large Signal Model Regions of Operation of the MOS Transistor: 1.) Cutoff Region: iD = 0, v GS - V T < 0 (Ignores subthreshold currents) 2.) Active Region µoCoxW 0 < v DS < v GS - V T iD = 2L [ 2(v G S - V T ) - v D S] v DS , 3.) Saturation Region µoCoxW v - VT) 2 , 0 < v GS - V T < v D S iD = 2L ( G S Output Characteristics of the MOSFET: iD /ID0 vDS = vGS - VT 1.0 Active Region Saturation Region 0.75 Channel modulation effects 0.5 0.25 Cutoff Region 0 0 0.5 1.0 1.5 ECE 4430 - Analog Integrated Circuits and Systems 2.0 vGS-VT = 1.0 VGS0 - VT vGS-VT = 0.867 VGS0 - VT vGS-VT = 0.707 VGS0 - VT vGS-VT = 0.5 VGS0 - VT vGS-VT = 0 VGS0 - VT vDS VGS0 - VT 2.5 © Phillip E. Allen 2000 Page 11 MOS Models (5/23/00) Influence of VD S on the Output Characteristics Channel modulation effect: As the value of vDS increases, it causes the effective L to decrease which causes the current to increase. Illustration: ,,, ,,,,,,, VG > VT B VD > VDS(sat) S Depletion Region Polysilicon p+ ,,,,,,, n+ n+ Leff p- substrate Xd Fig1.8-3 Note that Leff = L - Xd Therefore the model in saturation becomes, diD dL eff iD dX d K’W K’W 2 2 → iD = 2L (v GS -V T ) dvDS = - 2Leff2 (v GS - V T ) dvDS = Leff dvDS ≡ λiD eff Therefore, a good approximation to the influence of vDS on iD is diD K’W iD ≈ iD(vDS=0) + dv vDS = iD (vDS=0)(1 + λvDS) = 2L (v GS -V T )2(1+ λ v DS ) DS ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 12 MOS Models (5/23/00) Influence of the Bulk Voltage on the Large Signal MOSFET Model Illustration of the influence of the bulk: VSB0 =0V + V SB0 = 0V: Source Bulk VSB1 + Gate VGS>VT Source Bulk Drain VDS>0 Poly n+ p+ n+ Substrate/Bulk V SB2 > V SB1 : - VSB2 Gate VGS>VT + Source Bulk p+ p- n+ Substrate/Bulk V SB1>0V: p- Drain VDS>0 Poly n+ p+ p- Gate VGS>VT Drain VDS>0 Poly n+ n+ Substrate/Bulk ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 13 MOS Models (5/23/00) Influence of the Bulk Voltage on the Large Signal MOSFET Model - Continued Bulk-Source (vBS) influence on the transconductance characteristicsiD Decreasing values of bulk-source voltage VBS = 0 vDS vGS - VT vGS VT0 VT1 VT2 VT3 In general, the simple model incorporates the bulk effect into VT by the following empirically developed equationV T (v BS ) = V T0 + γ 2| φ f | + |v BS | - γ ECE 4430 - Analog Integrated Circuits and Systems 2| φ f | © Phillip E. Allen 2000 Page 14 MOS Models (5/23/00) MOSFET Schematic Symbols Enhancement: VBS ≠0V D NMOS PMOS G B Simple VBS=0V D G D G S S S D D D G B S ECE 4430 - Analog Integrated Circuits and Systems G G S S Fig1.8-4 © Phillip E. Allen 2000 Page 15 MOS Models (5/23/00) Summary of the Simple Large Signal MOSFET Model D N-channel reference convention: iD G + + + vGS B vDS vBS - -S Non-saturationWµoCox vDS2 (v - V T )v D S - 2 (1 + λ vDS ) iD = L GS SaturationWµoCox v DS (sat) 2 Wµ oC ox 2 (v GS - V T )v DS (sat) (1 + λ v DS ) = iD = L 2 2L (v GS - V T ) (1 + λ v DS ) where: µo = zero field mobility (cm2/volt·sec) Cox = gate oxide capacitance per unit area (F/cm2) λ = channel-length modulation parameter (volts-1) V T = V T0 + γ 2| φ f | + |v B S | - 2| φ f| VT0 = zero bias threshold voltage γ = bulk threshold parameter (volts-0.5) 2|φf| = strong inversion surface potential (volts) For p-channel MOSFETs, use n-channel equations with p-channel parameters and invert current. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 16 MOS Models (5/23/00) MOSFET Constants for Silicon: Constant Symbol VG k ni ε0 εsi εox Constant Description Silicon bandgap (27°C) BoltzmannÕs constant Intrinsic carrier concentration (27°C) Value Units 1.205 1.381x10-23 1.45x1010 8.854x10-14 11.7 ε0 Permittivity of free space Permittivity of silicon Permittivity of SiO2 V J/K cm-3 f/cm F/cm F/cm 3.9 ε0 Model Parameters for a Typical CMOS Bulk Process (0.8µm CMOS n-well): Parameter Parameter Symbol Description Threshold Voltage VT0 (VBS = 0) K' Transconductance Parameter (in saturation) Bulk threshold γ parameter Channel length λ modulation parameter Surface potential at 2|φF| strong inversion Typical Parameter Value N-Channel P-Channel 0.7 ± 0.15 −0.7 ± 0.15 Units V 110.0 ± 10% 50.0 ± 10% µA/V2 0.4 0.57 (V)1/2 0.04 (L=1 µm) 0.01 (L=2 µm) 0.05 (L = 1 µm) 0.01 (L = 2 µm) (V)-1 0.7 0.8 V ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 17 MOS Models (5/23/00) MOSFET SMALL SIGNAL MODEL Small-Signal Model Complete schematic model: D G id D B G G + vgs B S - S S B + vbs - gmvgs gmbsvbs rds +D vds - S Fig. 4.2-4 where diD | = β (V -V ) = gm ≡ dv GS T GS Q and 2 β ID ∂ιD ∂iD ∂vGS gmbs = ∂v Q = ∂v ∂v = BS GS BS Q diD λiD | gds ≡ dv = ≈ λ iD DS Q 1 + λ v D S gmγ ∂ i D ∂vT = ∂vT∂vBSQ 2 2| φ F | - V B S = ηgm Simplified schematic model: id D D G G S S G + vgs S - gmvgs rds +D vds - S Fig. 4.2-2 Extremely important assumption: g m ≈ 10g m b s ≈ 100g ds ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 18 MOS Models (5/23/00) Illustration of the Small-Signal Model Application DC resistor: i v V DC resistance = i = Q I AC Resistance • Useful for biasing - creating current from voltage and vice versa VT Small-Signal Load (AC resistance): D G S G v VDS Fig. 4-2-2B id D B DC Resistance ID G B S + vgs S - B + vbs - gmvgs gmbsvbs rds +D vds - S Fig. 4.2-4 vds 1 1 AC resistance = i = g + g ≈ g d m ds m ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 19 MOS Models (5/23/00) Example 2 - Small-Signal Load Resistance Find the small signal resistance of the MOS diode shown using the parameters of Table 3.2-1. Assume that the W/L ratio is 10µm/1µm. Solution If we are going to include the bulk effect, we must first find the dc value of the bulk-source voltage. Unfortunately, we do not know the threshold voltage because the bulk-source voltage is unknown. The best approach is to ignore the bulk-source voltage, find the gate-source voltage and then iterate if necessary. VDD = 5V rac 100µA Fig. 4.2-5 2I 2·100 + V = + 0.7 = 1.126V T0 β 110·10 Thus let us guess at a gate-source voltage of 1.3V (to account for the bulk effect) and calculate the resulting gate-source voltage. ∴ VGS = V T = V T0 + γ 2| φ F | - (-3.7) - γ 2|φF| = 0.7 + 0.4 0.7+3.7 - 0.4 0.7 = 1.20V ⇒ VGS = 1.63V Now refine our guess at VGS as 1.6V and repeat the above to get VT = 1.175V which gives VGS = 1.60V. Therefore, V BS = -3.4V. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 20 MOS Models (5/23/00) Example 2 - Continued The small signal model for this example is shown. The ac input resistance is found by, iac = gdsvac - gmvgs - gmbsvbs = gdsvac + gmvs + gmbsvs = vac(gm+gmbs+gds) id G,D,B gmvgs rds gmbsvbs rac + vds = vgs vac S iac Fig. 4.2-6 vac 1 ∴ rac = i = g +g +g ac m mbs ds Now we must find the parameters which are, 2βID = 2·110·10·100 µS = 469µS, gds = 0.04V-1·100µA = 4µS, 469µS·0.4 = 0.0987·469µS = 46.33µS and gmbs = 2 0.7+3.4 Finally, gm = 106 rac = 469 + 46.33 + 4 = 1926Ω If we had used the previous approximations of gm ≈ 10gmbs ≈ 100gds, then we could have simply let 1 1 rac ≈ g = 469 = 2132Ω m Probably the most important result of this approximation is that we would not have to find VBS which took a lot of effort for little return. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 21 MOS Models (5/23/00) Small-Signal Model for the Active Region ∂iD | K’WV DS K’W gm = = (1+ λ V ) ≈ VD S DS ∂ v GS Q L L ∂iD K’W γ V D S gmbs = ∂ v Q| = BS 2L 2 φ F - V B S ∂iD IDλ K’W gds = ∂v Q| = L ( V GS - V T - V DS )(1+ λ V DS ) + 1+λV DS DS ECE 4430 - Analog Integrated Circuits and Systems K’W L (V GS - V T - V DS ) © Phillip E. Allen 2000 Page 22 MOS Models (5/23/00) MOSFET CAPACITANCES Types of Capacitance Physical Picture: SiO2 Gate Source C1 Drain C2 C3 FOX FOX C4 CBS Bulk CBD Fig1.8-5 MOSFET Capacitances consist of: • Depletion capacitance • Charge storage or parallel plate capacitance ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 23 MOS Models (5/23/00) MOSFET Depletion Capacitors Polysilicon gate Model: H CJ·AS CJSW·PS C BS = + MJ MJSW, v BS ≤ FC·PB v B S v B S 1 1 PB PB G C D Source Drain F E A and V B S 1 (1+MJ)FC + MJ C BS = 1+MJ PB ( 1- F C) SiO2 CJ·AS Bulk Fig1.8-6 Drain bottom = ABCD Drain sidewall = ABFE + BCGF + DCGH + ADHE CBS V B S , + 1 (1+MJSW)FC + MJSW 1+MJSW PB ( 1 - F C) CJSW·PS vBS> FC·PB B vBS ≥ FC·PB vBS ≤ FC·PB PB where AS = area of the source PS = perimeter of the source CJSW = zero bias, bulk source sidewall capacitance MJSW = bulk-source sidewall grading coefficient For the bulk-drain depletion capacitance replace "S" by "D" in the above. ECE 4430 - Analog Integrated Circuits and Systems vBS FC·PB Fig1.8-6B © Phillip E. Allen 2000 Page 24 MOS Models (5/23/00) Charge Storage (Parallel Plate) MOSFET Capacitances - C1 , C2 , C3 and C4 Mask L Actual L (Leff) LD Oxide encroachment Actual W (Weff) Mask W Gate Drain-gate overlap capacitance CGD (C3) Source-gate overlap capacitance CGS (C1) Gate FOX Source Gate-Channel Capacitance (C2) Bulk FOX Drain Channel-Bulk Capacitance (C4) Fig1.8-7 Overlap capacitances: C1 = C3 = LD·Weff·Cox = CGSO or CGDO (LD ≈ 0.015 µm for LDD structures) Channel capacitances: C2 = gate-to-channel = CoxW eff·(L-2LD) = CoxW eff·Leff C4 = voltage dependent channel-bulk/substrate capacitance ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 25 MOS Models (5/23/00) Charge Storage (Parallel Plate) MOSFET Capacitances - C5 View looking down the channel from source to drain Overlap Overlap FOX C5 Gate Source/Drain C5 FOX Bulk Fig1.8-8 C5 = CGBO Capacitance values and coefficients based on an oxide thickness of 140 Å or Cox=24.7 × 10−4 F/m2: Type CGSO CGDO CGBO CJ CJSW MJ MJSW P-Channel 220 × 10−12 220 × 10−12 700 × 10−12 560 × 10−6 350 × 10−12 0.5 0.35 ECE 4430 - Analog Integrated Circuits and Systems N-Channel 220 × 10−12 220 × 10−12 700 × 10−12 770 × 10−6 380 × 10−12 0.5 0.38 Units F/m F/m F/m F/m2 F/m © Phillip E. Allen 2000 Page 26 MOS Models (5/23/00) Expressions for CGD, CG S and CG B Cutoff Region: CGB = C2 + 2 C 5 = Cox(Weff)(Leff) + 2CGBO(Leff) CGS = C1 ≈ Cox(LD)Weff) = CGSO(Weff) CGD = C3 ≈ Cox(LD)Weff) = CGDO(Weff) Cutoff VB = 0 CGS CGS = C1 +(2/3)C2 = Cox(LD+0.67Leff)(Weff) = CGSO(Weff) + 0.67Cox(Weff)(Leff) CGD = C3 ≈ Cox(LD)Weff) = CGDO(Weff) p+ Saturated VB = 0 p+ p- substrate Active VB = 0 Active Region: CGB = 2 C 5 = 2CGBO(Leff) CGS = C1 + 0.5C2 = Cox(LD+0.5Leff)(Weff) = (CGSO + 0.5CoxLeff)Weff CGD = C3 + 0.5C2 = Cox(LD+0.5Leff)(Weff) VG < VT Polysilicon p- substrate Saturation Region: CGB = 2C5 = CGBO(Leff) ,,, ,,, ,,, ,,, VS = 0 n+ VS = 0 CGS n+ CGB VG >VT Polysilicon n+ p- substrate VD >VG -VT CGD n+ Inverted Region VS = 0 CGS VG >VT Polysilicon p+ VD > 0 CGD n+ VD <VG -VT CGD n+ Inverted Region Fig1.8-9 = (CGDO + 0.5CoxLeff)Weff ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 27 MOS Models (5/23/00) Illustration of CGD, CG S and CG B Capacitance C4 Large C2 + 2C5 CGS C1+ 0.67C2 C1+ 0.5C2 C1, C3 2C5 0 CGS, CGD vDS = constant vBS = 0 C4 Small CGS, CGD CGD CGB Off Saturation VT NonSaturation vDS +VT vGS Fig1.8-10 Comments on the variation of CBG in the cutoff region: 1 CBG = 1 1 + 2C5 + C C2 4 For vGS ≈ 0, C GB ≈ C 2 + 2C 5 (C4 is large because of the thin inversion layer in weak inversion where VGS is slightly less than VT)) For 0<vGS V T, C GB ≈ 2C 5 (C4 is small because of the thicker inversion layer in strong inversion) ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 28 MOS Models (5/23/00) Small-Signal Frequency Dependent Model Cgd G Cgb + vgs S - id Cgs gmvgs gmbsvbs vbs rds + vds - S D Cbd Cbs + B Fig1.8-15 The depletion capacitors are found by evaluating the large signal capacitors at the DC operating point. The charge storage capacitors are constant for a specific region of operation. Gainbandwidth of the MOSFET: Assume VSB = 0 and the MOSFET is in saturation, gm 1 1 gm f T = 2π C + C ≈ 2π C gs gd gs Recalling that 2 and Cgs ≈ 3 C ox WL gives 3 µo fT = 4π 2 (V GS -V T ) L gm = µoCox ECE 4430 - Analog Integrated Circuits and Systems W (V GS -V T ) L © Phillip E. Allen 2000 Page 29 MOS Models (5/23/00) Summary of the MOSFET Large Signal Model D CGD rD CBD vBD + - G rG iBD vBS + - iD rB B iBS CBS CGS CGB rS where, rG, rS, rB, and rD are vBD iBD = Is exp Vt ohmic and contact resistances vBS 1 and iBS = Is exp V - 1 t S ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 30 MOS Models (5/23/00) Electron Drift Velocity (m/s) SHORT-CHANNEL MOSFET MODEL Velocity Saturation The most important short-channel effect in MOSFETs is the velocity saturation of carriers in the channel. A plot of electron drift velocity versus electric field is shown below. 105 5x104 2x104 104 5x103 105 106 Electric Field (V/m) 107 Fig1.8-11 An expression for the electron drift velocity as a function of the electric field is, µ nE v d ≈ 1 + E/E c where vd = electron drift velocity (m/s) µn = low-field mobility (≈ 0.07m2/V·s) Ec = critical electrical field at which velocity saturation occurs ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 31 MOS Models (5/23/00) Short-Channel Model Derivation As before, iD WQ I(y)µ nE JD = JS = W = Q I(y)vd(y) → iD = W QI(y)vd(y) = 1 + E/E c → E iD 1 + E = WQ I(y)µnE C Replacing E by dv/dy gives, 1 d v dv iD 1 + E dy= WQ I(y)µn dy C Integrating along the channel gives, L vD S 1 d v ⌠ ⌠ iD 1 + Ec dydy = ⌡WQ I(y)µ ndv ⌡ 0 0 The result of this integration is, µnCox W K’ W 2] = [2(v V )v v [2(vGS - V T )vDS - vDS 2] iD = GS T DS DS L 2[1 + θ (v -V )] L v GS T 1 D S 2 1 + E L c where θ = 1/LEc with dimensions of V-1. The saturation voltage has not changed so substituting for vDS by vGS-VT gives, K’ W iD = 2[1 + θ (v -V )] L [ vGS - V T ]2 GS T Note that the transistor will enter the saturation region for vDS < vGS - VT in the presence of velocity saturation. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 32 MOS Models (5/23/00) The Influence of Velocity Saturation on the Transconductance Characteristics The following plot was made for K’ = 110µA/V2 and W/L = 1: 1000 θ=0 θ = 0.2 iD/W (µA/µm) 800 θ = 0.4 600 θ = 0.6 400 θ = 1.0 200 0 0.5 1 1.5 2 vGS (V) θ = 0.8 2.5 3 Fig1.8-12 Note as the velocity saturation effect becomes stronger, that the drain current-gate voltage relationship becomes linear. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 33 MOS Models (5/23/00) Circuit Model for Velocity Saturation A simple circuit model to include the influence of velocity saturation is the following: D G iD + + vGS' RSX vGS We know that K’W iD = 2L (v GS ’ -V T )2 and v GS = v GS ’ + iD RSX Substituting vGS’ into the current relationship gives, Fig1.8-13 or - S v GS ’ = v GS - iD R XS K’W iD = 2L (v GS - iD R SX -V T )2 Solving for iD results in, iD = K’ W (v GS - V T )2 L W 21 + K ’ L R SX (v GS -V T ) Comparing with the previous result, we see that W 1 θL θ = K’ L R SX → R SX = = E K’W K’W c Therefore for K’ = 110µA/V2, W = 1µm and Ec = 1.5x106V/m, we get RXS = 6.06kΩ. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 34 MOS Models (5/23/00) Output Characteristics of Short-Channel MOSFETs† IBM, 1998, tox = 3.5nm 800 Drain Current (µA/µm) 700 600 NFET VGS=1.8V Leff = 0.08µm PFET Leff = 0.11µm VGS=1.4V 500 400 300 200 100 VGS=-1.8V VGS=1.0V VGS=-1.4V VGS=-1.0V VGS=0.6V VGS=-0.6V 0 -1.8 -1.2 -0.6 0.6 0.0 Drain Voltage (V) 1.2 1.8 Fig1.8-14 † Su, L., et.al., “A High Performance Sub-0.25µm CMOS Technology with Multiple Thresholds and Copper Interconnects,” 1998 Symposium on VLSI Technology Digest of Technical Papers, pp. 18-19. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 35 MOS Models (5/23/00) SUBTHRESHOLD MOSFET MODEL Weak inversion operation occurs when the applied gate voltage is below V T and pertains to when the surface of the substrate beneath the gate is weakly inverted. ,,, zz ,, y y VGS n+ n-channel n+ Diffusion Current p-substrate/well Regions of operation according to the surface potential, φS. φS < φF : Substrate not inverted φ F < φ S < 2φ F : Channel is weakly inverted (diffusion current) 2φF < φS : Strong inversion (drift current) Drift current versus diffusion current in a MOSFET: log iD Diffusion Current Drift Current 10-6 10-12 0 ECE 4430 - Analog Integrated Circuits and Systems VT VGS © Phillip E. Allen 2000 Page 36 MOS Models (5/23/00) Large-Signal Model for Subthreshold Model: W iD = K x L evGS/nVt(1 - e-vDS/Vt)(1 + λvDS) where Kx is dependent on process parameters and the bulk-source voltage n ≈ 1.5 - 3 and iD kT Vt = q If vDS > 0, then 1µA W iD = K x L evGS/nVt (1 + λvDS) Small-signal model: VGS<VT 0 ∂iD qID gm = ∂ v Q| = nkT GS ∂iD gds = ∂v Q| DS VGS=VT 0 1V vDS Fig1.8-18 ID VA ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 37 MOS Models (5/23/00) SUBSTRATE CURRENT FLOW IN MOSFETS Impact Ionization Impact Ionization: Occurs because high electric fields cause an impact which generates a hole-electron pair. The electrons flow out the drain and the holes flow into the substrate causing a substrate current flow. Illustration: ,,, ,,,,,,,, VG > VT VD > VDS(sat) S B Polysilicon p+ Depletion Region ,,,,,,,, ,,,,,,,, A n+ Fixed Atom p- substrate Free n+ electron Free hole Fig1.8-16 ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 38 MOS Models (5/23/00) Model of Substrate Current Flow Substrate current: iDB = K1(vDS - vDS(sat))iDe-[K2/(vDS-vDS(sat))] where K1 and K2 are process-dependent parameters (typical values are K1 = 5V-1 and K2 = 30V) Schematic model: D iDB G B S Fig1.8-17 Small-signal model: IDB ∂iDB gdb = ∂v = K 2 V DB DS - V DS (sat) This conductance will have a negative influence on high-output resistance current sinks/sources. ECE 4430 - Analog Integrated Circuits and Systems © Phillip E. Allen 2000 Page 39 MOS Models (5/23/00) SUMMARY Simple Large-Signal Model Non-saturationWµoCox vDS2 (v - V T )v D S - 2 (1 + λ vDS ) iD = L GS SaturationWµ oC ox 2 iD = 2L (v GS - V T ) (1 + λ v DS ) Small-Signal Model diD diD λiD | | = β (V GS -V T ) = 2 β ID g ds ≡ dv = ≈ λ iD gm ≡ dv GS Q DS Q 1 + λ v D S g mbs = gmγ 2 2| φ F | - V B S Capacitances Capacitance C4 Large C2 + 2C5 CGS C1+ 0.67C2 C1+ 0.5C2 C1, C3 2C5 0 CGS, CGD vDS = constant vBS = 0 C4 Small CGS, CGD CGD CGB Off Saturation VT NonSaturation vDS +VT ECE 4430 - Analog Integrated Circuits and Systems vGS Fig1.8-10 © Phillip E. Allen 2000