2006. Fall Semester: Introduction to Electronic Materials & Devices (Prof. Sin-Doo Lee, Rm. 301-1109, http://mipd.snu.ac.kr Principles of Electronic Materials and Devices S. O. Kasap (McGraw Hill, New York, 2000) Week Sep. 4 - 6 Sep. 11 - 13 Sep. 25 Sep. 26 - 28 Oct. 2 - 4 Chapter Chap. 1: Bonding & Solids Crystalline State Chap. 2: Drude Model Electrical Conductivity Week Chapter Nov. 6 - 8 Chap. 5: Extrinsic Semiconductor Nov. 13 - 15 Nov. 20 - 22 Chap. 6 Semiconductor Devices Nov. 27 - 29 Chap. 7: Dielectric Materials Chap. 3: Elementary QM Dec. 4 - 6 Oct. 9 - 11 Chap. 4: Energy Bands Oct. 16 - 18 Midterm Exam (18) Oct. 23 - 25 Chap. 4: Metals, Phonons Oct. 30 Chap. 5: Intrinsic Semiconductor Charge Carriers Dec. 11 - 13 Chap. 8: Superconductivity Chap. 9: Optical Properties Final Exam (13) Chap. 1. Elementary Materials : Science Concepts 1.1 Atomic Structure - Shell model based on "the Bohr model": L shell with two subshells Nucleus 1s K L 2s 2p 1s22s22p2 or [He]2s22p2 Fig. 1.1: The shell model of the atom in which the electrons are confined to live within certain shells and in subshells within shells. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.2 Bonding and Types of Solids 1.2.1 Molecules and General Bonding Principles - Net force = attractive and repulsive r=∞ ro Molecule Interatomic separation, r FR = Repulsive force (a) Force vs r Repulsion FN = Net force Potential Energy, E(r) Attraction FA = Attractive force ro 0 Repulsion Force + Separated atoms ER = Repulsive PE E = Net PE r 0 Attraction + Eo ro EA = Attractive PE (b) Potential energy vs r Fig. 1.3: (a) Force vs interatomic separation and (b) Potential energy vs interatomic separation. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.2.2 Covalently Bonded Solids: H2, CH4, diamond Covalent bond H H C H H L shell C covalent bonds K shell H H H H (b) (a) 109.5° H H C H H (c) Fig. 1.5: (a) Covalent bonding in methane, CH 4 , involves four hydrogen atoms sharing electrons with one carbon atom. Each covalent bond has two shared electrons. T he four bonds are identical and repel each other. (b) Schematic sketch of CH 4 on paper. (c) In three dimensions, due to symmetry, the bonds are directed tow ards the corners of a tetrahedron. From P rinciples of Electronic Materials and D evices, S econ d E dition, S .O . Kasap (© McGraw-Hill, 2002) http://Materials.U sask.Ca 1.2.3 Metallic Bonding: electron gas or cloud (collective sharing of electrons) Positive metal ion cores Free valence electrons forming an electron gas Fig. 1.7: In metallic bonding the valence electrons from the metal atoms form a "cloud of electrons" which fills the space between the metal ions and "glues" the ions together through the coulombic attraction between the electron gas and positive metal ions. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.2.4 Ionically Bonded Solids: salt (cation-anion) Cl Na 3s 3s 3p Closed K and L shells Closed K and L shells (a) Cl- ClNa+ FA FA 3s 3p Na+ r ro (b) (c) Fig. 1.8: The formation of an ionic bond between Na and Cl atoms in NaCl. The attraction is due to coulombic forces. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 6 Cl 0 - -6 -6.3 Cl - r=∞ + Na 1.5 eV 0.28 nm Cohesive energy Potential energy E(r), eV/(ion-pair) - Potential energy per ion pair in solid NaCl Cl r=∞ Separation, r Na + Na ro = 0.28 nm Fig. 1.10: Sketch of the potential energy per ion-pair in solid NaCl. Zero energy corresponds to neutral Na and Cl atoms infinitely separated. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.2.5 Secondary Bonding : hydrogen bonds (polar), van der Waals bonds (induced dipolar) H O H (a) (b) Fig. 1.12: The origin of van der Waals bonding between water molecules. (a) The H2O molecule is polar and has a net permanent dipole moment. (b) Attractions between the various dipole moments in water gives rise to van der Waals bonding. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca Time averaged electron (negative charge) distribution Closed L Shell Ne Instantaneous electron (negative charge) distribution fluctuates about the nucleus. Ionic core (Nucleus + K-shell) B A van der Waals force Synchronized fluctuations of the electrons Fig. 1.13: Induced dipole-induced dipole interaction and the resulting van der Waals force. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.3 Kinetic Molecular Theory 1.3.1 Mean Kinetic Energy and Temperature - Gas pressure: the collisions between the gas molecules and the walls of the container Square Container Area A a Face B Face A vy vx Gas atoms a a Fig.1.15: The gas molecules in the container are in random motion. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca - The change in the momentum: and Force = the change of momentum: Pressure - For any molecule, , kinetic energy then - Heat capacity of one mole of monoatomic "gas" (not solid) at constant volume: * Maxwell's principle of equipartition of energy - an average of to each degree of freedom (each degree of freedom has an average energy of and thus the everage kinetic energy of a monoatomic molecule is × ) 1.4, 1.5, 1.6 : Reading Assignment 1.7 The Crystalline State 1.7.1 Type of Crystals : periodic array of points in space - lattice Crystal Lattice Basis a a 90° Unit cell Unit cell (a) (c) (b) Basis placement in unit cell (d) (0,0) y (1/2,1/2) x Fig. 1.70: (a) A simple square lattice. The unit cell is a square with a side a. (b) Basis has two atoms. (c) Crystal = Lattice + Basis. The unit cell is a simple square with two atoms. (d) Placement of basis atoms in the crystal unit cell. UNIT CELL GEOMETRY CUBIC SYSTEM a = b = c α = β = γ = 90° M any metals, Al, Cu, Fe, Pb. Many ceramics and semiconductors, NaCl, CsCl, LiF, Si, GaAs Sim ple cubic Body centered cubic Face centered cubic TETRAGONAL SYSTEM a = b - c α = β = γ = 90° Body centered tetragonal Sim ple tetragonal In, Sn, Barium Titanate, TiO 2 ORTHORHOMBIC SYSTEM a - b - c α = β = γ = 90° S, U, Pl, Ga (<30°C), Iodine, Cementite (Fe3 C), Sodium Sulfate Simple orthorhom bic Body centered orthorhombic Base centered orthorhom bic Face centered orthorhom bic HEXAGONAL SYSTEM a = b - c α = β = 90° ; γ = 120° RHOMBOHEDRAL SYSTEM a = b = c α = β = γ - 90° Cadmium, Magnesium, Zinc, Graphite Arsenic, Boron, Bismuth, Antimony, M ercury (<-39°C) Hexagonal Rhom bohedral M ONOCLINIC SYSTEM a - b - c α = β = 90° ; γ - 90° TRICLINIC SYSTEM a - b - c α - β - γ - 90° α−Selenium, Phosphorus Potassium dicromate Lithium Sulfate Tin Fluoride Sim ple m onoclinic Base centered m onoclinic Triclinic Fig. 1.71: The seven crystal system s (unit cell geometries) and fourteen Bravais lattices. - Face-Centered Cubic (FCC) Structure: FCC Unit Cell (a) 2R a a a (b) a (c) Fig. 1.30: (a) The crystal structure of copper is Face Centered Cubic (FCC). The atoms are positioned at well defined sites arranged periodically and there is a long range order in the crystal. (b) An FCC unit cell with closed packed spheres. (c) Reduced sphere representation of the FCC unit cell. Examples: Ag, Al, Au, Ca, Cu, γ-Fe (>912°C), Ni, Pd, Pt, Rh - Body-Centered Cubic (BCC) Structure: a a b Examples: Alkali metals (Li, Na, K, Rb), Cr, Mo, W, Mn, α-Fe (< 912°C), β-Ti (> 882°C). Fig. 1.31: Body centered cubic (BCC) crystal structure. (a) A BCC unit cell with closely packed hard spheres representing the Fe atoms. (b) A reduced-sphere unit cell. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca - Hexagonal Closed Packed (HCP) Structure: Layer B Layer A Layer B Layer A Layer A (a) Layer A (b) c a (c) (d) Examples: Be, Mg, α-Ti ( < 882°C ), Cr, Co, Zn, Zr, Cd Fig. 1.32: The Hexagonal Close Packed (HCP) Crystal Structure. (a) The Hexagonal Close Packed (HCP) Structure. A collection of many Zn atoms. Color difference distinguishes layers (stacks). (b) The stacking sequence of closely packed layers is ABAB (c) A unit cell with reduced spheres (d) The smallest unit cell with reduced spheres. - Diamond & Zinc Blende Cubic Structure: C S a a Zn a a Fig. 1.33: The diamond unit cell is cubic. The cell has eight atoms. Grey Sn (α-Sn) and the elemental semiconductors Ge and Si have this crystal structure. a a Fig. 1.34: The Zinc blende (ZnS) cubic crystal structure. Many important compound crystals have the zinc blende structure. Examples: AlAs, GaAs, GaP, GaSb, InAs, InP, InSb, ZnS, ZnTe. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca Table 1.3 Properties of some important crystal structures Crystal Structure Coordination Number of Atomic a and R (R is the radius Number (CN) atoms per Packing unit cell Factor of the atom). Examples Simple cubic a = 2R 6 1 0.52 None BCC a = 4R/√3 8 2 0.68 M any metals: α -Fe, Cr, M o, W FCC a = 4R/√2 12 4 0.74 M any metals Ag, Au, Cu, Pt HCP a = 2R c = 1.633a 12 2 0.74 M any metals: Co, M g, Ti, Zn Diamond a = 8R/√3 4 8 0.34 Covalent solids: Diamond, Ge, Si, α -Sn. Zinc blende 4 8 0.34 M any covalent and ionic solids. M any compund semiconductors. ZnS, GaAs, GaSb, InAs, InSb NaCl 6 4 cations 0.67 Ionic solids such as NaCl, AgCl, LiF M gO, CaO 4 anions (NaCl) Ionic packing factor depends on relative sizes of ions. CsCl 8 1 cation 1 anion Ionic solids such as CsCl, CsBr, CsI From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.7.2 Crystal Directions and Planes z z Unit Cell Geometry Unit cell c c β O zo α b γ b a [121 P c y xo a a yo y b x x (a ) A p a ra lle le p ip e d is ch o se n to d e s crib e g e o m e try o f a u n it ce ll. W e lin e th e x , y a n d z a x e s w ith th e e d g e s o f th e p a ra lle le p ip e d tak in g lo w e r-le ft re a r co rn e r a s th e o rig in (b ) Id e n tific a tio n o f a d ire ctio n in a c rysta l [001] [111] [010] -y [010] [100] [111] [110] [110] [111] -a x y a [111] [111] (c) D ire ctio n s in cu b ic c rysta l syste m [111] [111] [111] [111] Family of <111> directions F ig. 1.39 F rom P rinc iple s of E le ctro nic M ateria ls a nd D e vice s, S ec ond E ditio n, S .O . K asap (© M c G ra w -H ill, 20 02) http://M a te ria ls.U s as k .C a - Directions of [uvw] Family of directions <100>; [100], [010], [001], [ 00], [0 0], [00 ] - Planes of (hkl): Miller index, 1/intercept for each axis Family of planes {100}; (100), (010), (001), ( 00), (0 0), (00 ) z z intercept at ∞ b Miller Indices (hkz) : x intercept at a/ 1 1 1/ 1 2 c 1 ∞ (210) 2 y a Unit cell x y intercept at b (a) Identification of a plane in a crystal z (010) (010) z (010) (010) (010) y y x x (110) (001) (100) z (111) z (111) (110) y x -z (b) Various planes in the cubic lattice -y y x Fig. 1.40: L abelling of crystal planes and typical exam ples in the cubic lattice From P rinciples of E lectron ic M ateria ls and D e vices, S e cond E d ition , S .O . K asap (© M cG ra w -H ill, 2002 ) http://M a te ria ls.U s ask.C a 1.7.3 Three Phases of Carbon Covalently bonded layer Layers bonded by van der Waal bonding Cubic crystal Covalently bonded layer Covalently bonded network of atoms Hexagonal unit cell (a) Diamond unit cell The FCC unit cell of the Buckminsterfullerene crystal. Each lattice point has a C60 molecule (b) Graphite Buckminsterfullerene (C60) molecule (the "buckyball" molecule) (c) Buckminsterfullerene Fig. 1.42: The three allotropes of carbon. 1.8 Crystalline Defects 1.8.1 Point Defects: vacancy concentration (a) Perfect crystal without vacancies (c) An atom in the bulk diffuses to fill the vacancy thereby displacing the vacancy towards the bulk. (b) An energetic atom at the surface breaks bonds and jumps on to a new adjoining position on the surface. This leaves behind a vacancy. (d) Atomic diffusions cause the vacancy to diffuse into the bulk. Fig. 1.43: Generation of a vacancy by the diffusion of an atom to the surface and the subsequent diffusion of the vacancy into the bulk. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca (a) A vacancy in the crystal. (b) A substitutional impurity in the crystal. The impurity atom is larger than the host atom. (c) A substitutional impurity in the crystal. The impurity atom is smaller than the host atom. (d) An interstitial impurity in the crystal. It occupies an empty space between host atoms. Fig. 1.44: Point defects in the crystal structure. The regions around the point defect become distorted; the lattice becomes strained. - Schottky defect (cation-anion pair missing) & Frenkel defect (host into interstitial position) Schottky defect Frenkel defect (a) Schottky and Frenkel defects in an ionic crystal. Substitutional impurity. Doubly charged (b) Two possible imperfections caused by ionized substitutional impurity atoms in an ionic crystal. Fig. 1.45: Point defects in ionic crystals 1.8.2 Line Defects: Edge and screw dislocations Edge dislocation line (a) Dislocation is a line defect. The dislocation shown runs into the paper. Compression Tension (b) Around the dislocation there is a strain field as the atomic bonds have been compressed above and stretched below the islocation line Fig. 1.46: Dislocation in a crystal is a line defect which is accompanied by lattice distortion and hence a lattice strain around it. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca A C D Dislocation line (a) A screw dislocation in a crystal. B Dislocation A line Atoms in the upper portion. Atoms in the lower portion. D C (b) The screw dislocation in (a) as viewed from above. Fig. 1.47: A screw dislocation involves shearing one portion of a perfect crystal with respect to another portion on one side of a line (AB). New molecule Growth spiral on the surface of a Fig. 1.49: Screw dislocation aids polypropylene crystal due to screw crystal growth because the newly dislocation aided crystal growth. arriving atom can attach to two or (SOURCE: Photo by Phillip Geil, Courtesy of three atoms instead of one atom and Case Western Reserve University.) thereby form more bonds. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.8.3 Planar Defects: Grain boundaries Nuclei Crystallite Liquid (a) (b) Grain Grain boundary (c) Fig. 1.50: Solidification of a polycrystalline solid from the melt. (a) Nucleation. (b) Growth. (c) The solidified polycrystalline solid. For simplicity, cubes represent atoms. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca Foreign impurity Self-interstitial type atom Void, vacancy Strained bond Grain boundary Broken bond (dangling bond) Fig. 1.51: The grain boundaries have broken bonds, voids, vacancies, strained bonds and "interstitial" type atoms. The structure of the grain boundary is disordered and the atoms in the grain boundaries have higher energies than those within the grains. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.8.4 Crystal Surfaces and Surface Properties H2O Dangling bond Surface Reconstructed surface Absorbed Oxygen O H H2 Surface atoms Bulk crystal Fig. 1.52: At the surface of a hypothetical two dimensional crystal, the atoms cannot fulfill their bonding requirements and therefore have broken, or dangling, bonds. Some of the surface atoms bond with each other; the surface becomes reconstructed. The surface can have physisorbed and chemisorbed atoms. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca 1.10 Glasses and Amorphous Solids Silicon (or Arsenic) atom Oxygen (or Selenium) atom (a) A crystalline solid reminiscent to crystalline SiO2.(Density = 2.6 g cm-3) (b) An amorphous solid reminiscent to vitreous silica (SiO2) cooled from the melt (Density = 2.2 g cm-3 ) Fig. 1.56: Crystalline and amorphous structures illustrated schematically in two dimensions. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca Dangling bond (a) Two dimensional schematic representation of a silicon crystal H H H H (b) Two dimensional schematic representation of the structure of amorphous silicon. The structure has voids and dangling bonds and there is no long range order. (c) Two dimensional schematic representation of the structure of hydrogenated amorphous silicon. The number of hydrogen atoms shown is exaggerated. H H Fig. 1.58: Silicon can be grown as a semiconductor crystal or as an amorphous semiconductor film. Each line represents an electron in a bond. A full covalent bond has two lines and a broken bond has one line. From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca [Homework] 1. Prob. #1.1 2. Prob. #1.18