Higher Junction Temperature in Power Modules – a demand from hybrid cars, a potential for the next step increase in power density for various Variable Speed Drives Dr. Reinhold Bayerer, Infineon Technologies AG, Max-Planck-Str. 5, Warstein, Germany Abstract Removing the barrier of maximum junction temperature at 150°C will allow a significant increase in power density or simplified cooling. The barrier is set by solder fatigue and wire bond lift off at intermittent operation. New Packaging technologies can eliminate the reliability issue. Future IGBT generations will take advantage of the progress in packaging and will show major improvements based on Silicon. For the application of higher temperatures in power electronics, special concern is on PCB’s and passives. When spatial temperature profiles of heat sinks are taken into account, those components can stay within their limits. 1 Introduction Data sheets of power devices show maximum ratings in junction temperature (TJ) of 150°C or 175°C (Fig. 1). The maximum TJ for switching conditions, i.e. inverter operation is usually 25°C less. This lower temperature TJ,op is also based on power cycling and other reliability requirements. It is the intermittent operation of power electronics, which links TJ,op to power cycling reliability. FS50R12KT3 (example of old generation) FS50R12KT4 (example of new generation) Fig. 1 Extraction of IGBT modules’ data sheets. Maximum junction temperature ratings are split into DC and operational. Modules with a resulting maximum TJ,op of 125°C belong to the former module generations, i.e. up to IGBT3/1200V, for example. More recently, power modules, which allow an operation up to 150°C, became available. These modules with a TJ,max of 175°C belong to the new module genera- tion IGBT4/1200V, for example. A major reliability improvement was required to ensure this increase in operating temperature [9], [6]. Driven by automotive requirements and hybrid car application further increase of junction temperatures is on the roadmap. It would simplify power electronics within a car, because the coolant of the combustion engine could cool the power electronics, as well. Otherwise a separate cooling circuit is required. The separate cooling means more space weight and cost for power electronics in a hybrid car. For other drives applications like industrial applications the question arises, if they could also benefit from the related increase of power density. Industrial drives represent an example of power electronics, which went through several steps in power density. We may look back to mercury vapour rectifiers and the break through when power semiconductors – thyristors and diodes – became available. In the 80’s the Darlington transistors had been introduced. Passive components to control switching slopes of the thyristor became obsolete. But three stage Darlington transistors wasted approximately 30% of chip area for the first two stages. Therefore the introduction of IGBT meant another increase in power density. Furthermore, it was easier to control and more robust and has today significantly fewer losses. In the mean time, several development steps followed increasing the power density in IGBT (Fig. 16). It led to more and more current and power density in modules (Fig. 2). In turn, heat sinks had to dissipate more and more power. In case of air-cooled heat sinks, the thermal impedance of the heat sink to ambient is dominating the whole chain from chip to ambient. Therefore, the capability of power dissipation through air-cooled Al heat sinks limits power density at today’s levels. The limit could move by higher heat sink temperatures. short circuit test results, for example, justify this conclusion. The semiconductor does not set the limit in junction temperature (up to 200°C), but lifetime of solder joints and interconnects rather sets the limit. Eoff-FS100R12KE3 30 25 2 x Inom 20 Eoff [mJ] 1.5 x Inom 15 Inom 10 0.5 x Inom 2 x Inom 5 0 0 50 100 Tvj [°C] 150 200 Fig. 3 1200V Trench-Field-stop-IGBT, turn-off losses up to 200°C 2 Temperature limits for Power Semiconductors High temperature characteristics of Silicon devices, i.e. emitter controlled free wheeling diodes and IGBT with trench and field-stop, had been studied [1], [2], [3], [4] (Fig. 3, Fig. 4). Going from TJ=150°C to TJ=200°C switching losses would increase by 10%, approximately. Blocking characteristics improved by introducing trench and field-stop-IGBTs, which results in less growth of leakage current with TJ. Therefore 600V- and 1200V-Chips losses caused by leakage current stay below critical limits, even at TJ=200°C. The short circuit condition represents another question mark at elevated junction temperature, because it deposits a large amount of energy within the chip. A steep rise of TJ is the consequence. As it adds to the starting temperature a higher Tj,op is assumed to be critical. The work in [4] focuses on the feasibility of maintaining the short circuit capability and dispels doubts. The overall conclusion with respect to chip characteristics is that 600V and 1200V IGBT and diodes can operate at up to 200°C junction, in principle. Blocking characteristics, switching and 1.E-03 1.E-04 cut-off current (A) Fig. 2 Evolution of IGBT module. Shrink of 150A-1200V Half-bridges. First generation IGBTmodules required 62mm-package (left). Today (IGBT4) the function fits in EasyBRIDGETM2B. The footprint shrunk by a factor of 2.5. 1.E-05 1.E-06 1.E-07 IGBT3 IGBT2 1.E-08 1.E-09 0 50 100 150 200 T (°C) Fig. 4 Leakage (cut-off) current representing blocking capability of two 600V-IGBT generations. IGBT2/IGBT3-characteristics are from devices with a current rating of 20A. 3 Reliability Limit for Junction Temperatures One important characteristic with respect to reliability is the power-cycling lifetime. Former module generations rated at TJ,op =125°C had been represented by the dashed power cycling curve of Fig. 5. For the new generation, which can operate up to TJ,op =150°C the solid line applies. If material optimization (Fig. 1). The root cause here was solder fatigue and wires had not been lifted the number of power cycles can increase further as soon as solder is replaced or improved. 1.E+07 1.E+06 N f / Cycles the former generation’s life is represented by a special point at ∆TJ=80°C (cycling from TJ=45°C to ∆TJ=125°C) the new generation withstands similar number of cycles at 25°C higher ∆TJ and TJ indicated by the arrow. Progress in wire bonding technology improved the reliability. As the number of power-cycles to failure (Nf) increased by a large factor, solder fatigue became a factor competing with wire bond lift-off as failure mechanism [1]. Wire bonds and solder joints reached their limits. For further increase of power cycling capability or further increase of TJ accompanied by higher ∆TJ, even lead rich solders with higher melting point would not be an alternative in terms of reliability [5]. 1.E+05 7 1 .10 1.E+04 Nf / cycles 6 1 .10 60 80 90 100 110 120 130 140 150 160 ∆ TJ / K Fig. 6 Improvement of cycles achieved in power cycling by wire material optimization. Arrow indicates delta between standard wires (lower group of data) and optimized wires (upper 2 data points). Root cause of failure for upper points is solder fatigue. 5 1 .10 4 1 .10 3 1 .10 40 60 80 100 120 ∆TJ / K 140 160 Fig. 5 Power cycling lifetime, i.e. Nf-∆TJ relation (min. values) [6]; modules for industrial application with max. TJ,op=125°C, lower, doted trace; typical Nf for new module generation with IGBT4/1200V at max. TJ,op of 150°C, solid line. Arrow indicates increased ∆TJ of 25°C. 4 70 Required Changes of Power Modules Assembly and Interconnection technologies have to change for enabling high temperature operation in the range of 175°C to 200°C, especially if ∆TJ follows in increase. One example is the predominately used Al heavy wire bonding technology, which has to change. The analysis of end of life failures reveals cracks running through the wire but not along the interface to the chips. Consequently, there is a potential to improve, e.g. by modification of the wire material. Examples of Power cycling tests indicate such a progress by NTV - also known as low temperature joining technique – can replace solder joints. It is known since its invention in 1986 [7] and is in production for high power thyristors and diodes at Infineon Technologies since then. Power cycling results prove the elimination of fatigue [8]. As the NTV process is not that attractive for power modules, from the process point of view, other assembly technologies, which can be considered to meet the target of eliminating the solder fatigue, are investigated, too. Power cycling results of NTV and such alternatives look also promising (Fig. 7). In such tests, the chip to substrate interface was stable. The devices failed by wire bond lift-off or third failure reasons [8]. When the previously mentioned data point at 80°C (refer to dashed curve of Fig. 5) is transferred to a TJ of 175°C and a related ∆TJ of 130°C (see arrow in Fig. 7) results show significant potential. Integrating wire bond improvements and new assembly technology makes TJ,op of 175°C feasible. Further optimization of assembly and interconnection technologies should even allow 200°C. Large area joints of DCB (direct copper bonded substrate) to base plate can benefit from the new joining techniques, as well. Examples by NTV and their passive thermal cycling tests prove the required reliability. Fig. 8, shows DCB substrates sintered to a 3 mm Cu base plate of the 62mmmodule footprint. During the thermal cycling test, the NTV joint delaminates after 500 cycles over a small distance at the corners. The crack propagates very slowly up to 2250 cycles; the original thermal contact to the base plate is almost maintained. It represents a tremendous improvement against soldered layers. technology is also implemented in new modules for automotive application (Fig. 10). 1.E+07 Nf / Cycles 1.E+06 TM Fig. 9 PrimePACK , direct copper bonded terminals for high temperature application 1.E+05 1.E+04 1.E+03 40 50 60 70 80 90 100 110 120 130 140 150 160 ∆TJ / K Fig. 7 Power Cycling results from modules with new die attach technologies (data above ∆TJ=120°C). Root cause of failure is bond wire lift-off. Other data are copied from Fig. 5. Arrow points to target for a TJ,op of 175°C. Fig. 8 USM inspection of DCB-substrate bonded to a Copper base plate; bonded area 54mm x 73mm; delaminating of NTV-bond during thermal shock test (-40°C … 150°C, 1 h dwell time at each temperature); from left to right USM picture before test, after 500 cycles, after 1000 cycles, after 2250 cycles. 5 Terminals A further important area for improvement is solder joints of heavy power terminals. A direct copper bonding technology is introduced to replace these solder joints. New modules like PrimeTM PACK take already advantage of this solder free interconnection (Fig. 9). The interconnection TM Fig. 10 New IGBT Module HYBRIDPACK 2 for hybrid car application. Direct copper bonded terminals and integrated heat sink. 6 Impact of new die attach technology on transient thermal impedance The new die attach methods not only improve the reliability and power cycling but also improve the thermal contact between chip and substrate. It is the consequence of the replacement of solder material with low thermal conductivity. As the total chain of thermal impedance from junction to ambient has other dominating elements it has almost no impact on total thermal impedance but it affects the transient thermal impedance in the early phase. Short circuit pulses have been used to study this transient thermal impedance with high Measuring pulse Heating pulse ∆t resolution in time (Fig. 11). Longer first short circuit pulse deposits energy in the chip and a 2nd pulse serves as sense of junction temperature. The relation between short circuit current level and junction temperature leads to the extraction of temperature rise after the first pulse. Comparison of transient thermal impedance of soldered and chips attached by the new method shows a faster transfer of heat from the chip into the substrate. This benefit allows for further increase of current density and loss reduction in the IGBT. 7 The automotive demand for hybrid cars In terms of required number of power cycles at certain ∆TJ the hybrid application may look very well covered by the modules, which fulfil the requirements of industrial applications. The difference makes the temperature profiles and their impact especially on solder. Underlying slower passive cycles in power cycling conditions may stress solder layers additionally and reduce the lifetime, when the coolant of the combustion engine is used. top side contact sheet of metal, eg. Cu NTV Fig. 11 Short circuit test of IGBT for transient thermal impedance evaluation. Collector Current: Yellow trace. Gate voltage: Green trace. Accumulated energy by short circuit current: Brown trace. nd First pulse is used to heat the chip and 2 pulse is used to sense the temperature after a delay ∆t. Time scale is 2µs/div. 160 Temperature (°C) 140 Test data of soldered chip Simulation (solder) 120 Test dataof new die attach Simulation (new die attach) 100 80 60 40 20 0 200 400 time(µs) 600 800 1000 Fig. 12 Transient temperature within chip after short circuit pulse of 5µs. New die attach method leads to faster transfer of heat from chip into substrate. Simulation is based on a RC-network, which is equivalent to the thermal chain. Si chip Cu- ceramic - Cu MMC plate Al heat sink channel to distribute the coolant structure brazed to act as cooling fins envelope channel to distribute the coolant Fig. 13 Example of module setup based on NTV. Metal layer on top of Chip interfaces the wire bond and chip. The integrated heat sink is based on a low cost MMC plate equipped with a fin structure by Al brazing. Thermal expansion of MMC plate is less than CTE of Copper. A module set up, which combines new assembly and interconnection technologies with an integrated heat sink (Fig. 13), can supply further functionality. As the heat sink is required to consist of Aluminum, a special metal matrix material with low content of SiC or other ceramic fillers may result in a cost effective and reliable solution with excellent overall thermal impedance. 8 Industrial application As the capability of power dissipation through aircooled heat sinks limits power density, more power dissipation and consequently more power density requires higher heat sink temperature (Fig. 14). Higher heat sink temperature is enabled by an increase of TJ,op. Therefore, higher TJ will help with further increase in power density, especially in air-cooled systems. Allowance of higher TJ,op and Tsink may also allow to use simpler heat sinks, in some case. the extended reliability gained by the new packaging technologies, described above. FLIR Systems 174.4 °C Li2 Sp1 150 Li3 100 50 Sp2 Li1 25.2 °C 170 160 150 140 130 120 110 100 90 80 70 60 50 40 30 Fig. 14 Air-cooled heat sink for IGBT module; growing power density is illustrate by a shrinking red square on the heat sink - from left to right. Power injected into the heat sink is kept constant for the different sizes of squares. Upper boxes show temperature profiles on the heat sink. Temperature on the heat sink is growing from left to right due to higher power density. With the consideration to increase heat sink temperatures concerns, come up. Higher heat sink temperature may thermally overstress PCBs and passives, which are assembled on heat sinks, as well. To judge this risk, temperature profiles on the heat sink have to be investigated. Already from (Fig. 14) one can imagine that higher power density causes the maximum temperatures to be more concentrated at the heat source i. e. below the power module. Infrared measurements of such temperature profiles confirm the temperature to drop within a short distance from the module. Components like PCBs and passives do not seem to be that much affected, if placed outside the module mounting area. Considering such profiles during the design of a system, higher TJ looks feasible, also from the passives point of view. Furthermore, passives may not stay at their limits of today. High voltage drives applications, i.e. traction applications may not approach the junction temperature as high as foreseen for the 1200V devices but such application may take advantage of Bezeichnung Li1 Li2 Li3 Cursor - Min 44.3 41.6 79.1 Max 104.9 97.5 174.0 TM Fig. 15 EconoPACK 3 on a state-of-the-art heat sink. IR-measured temperature profiles TJ (Li3), Tsink with some distance from the module (Li1, Li2). Junction temperature is at increased value of 175°C. 9 Conclusion Power modules can approach the 175°C point as operating temperature and 200°C in a further step. This development will further extend the possibilities of silicon based power devices like IGBT [Fig. 16]. It will show up in future IGBT Generations. New high temperature packaging technologies are on their way to replace solder and standard wire bonds. Utilization of the high temperature capabilities in variable speed drives will lower the effort of cooling and system cost. Challenges arising from the temperature budget on surrounding passive components have to be solved by optimized system design and/or improved thermally robust components The increase of power density is also a contribution to extended use of controlled drives and thus to energy saving. VCEsat(125°C) [V] @ 75A 4 2nd Gen 3rd Gen 4th Gen 3.5 6th Gen 5th Gen 3 1st Gen 1200 V / 75 A IGBT 2.5 2 1.5 1 1988 1992 1996 2000 2004 2008 2012 Fig. 16 IGBT progress for 75A/1200V chip. Latest Generation, IGBT4 operates at 150°C. Further generation will allow higher TJ. 10 Literature [1] F. 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